A drying system

Abstract

This application relates to the field of material drying technology, and more particularly to a drying system. The drying system includes: several drying devices arranged in parallel, each drying device having a first air inlet and a first air outlet, the first air inlet being configured to introduce hot air; a hot air external circulation pipeline, including: several air supply branches, one end of each air supply branch connected to the first air outlet of the corresponding drying device; a connecting main pipeline, the other end of each air supply branch connected to the connecting main pipeline; and several control valves, each control valve disposed between the corresponding air supply branch and the connecting main pipeline, the control valve being configured to connect or disconnect different drying devices. This drying system, through the cooperation of the drying devices and the hot air external circulation pipeline, can utilize the hot air external circulation pipeline to achieve hot air circulation and utilization between different drying devices, thereby improving the drying effect.

Description

Technical Field

[0001] This application relates to the field of material drying technology, and more particularly to a drying system. Background Technology

[0002] During the production and processing of solar cells, silicon wafers often require wet processing. After wet processing, a large amount of liquid residue remains on the silicon wafers, so a drying system is needed to provide hot air to dry them.

[0003] In actual production, drying systems often have multiple drying units to meet the drying needs of more silicon wafers. However, when some drying units do not need to perform drying work, hot air will still be continuously supplied, resulting in hot air waste. Utility Model Content

[0004] This application discloses a drying system that can solve the problem of hot air waste caused by continuously supplying hot air to the drying system during the production process.

[0005] To achieve the above objectives, this application discloses a drying system, comprising:

[0006] A plurality of drying devices arranged in parallel, each of the drying devices having a first air inlet and a first air outlet, the first air inlet being configured to introduce hot air;

[0007] Hot air external circulation duct, the hot air external circulation duct comprising:

[0008] Several air supply branches, one end of any one air supply branch is connected to the first air outlet of the corresponding drying device;

[0009] The main duct is connected to the main duct, and the other end of any of the air supply branches is connected to the main duct.

[0010] A plurality of control valves, any one of which is disposed between the corresponding air supply branch and the main connecting pipe, the control valve being configured to connect or disconnect different drying devices.

[0011] Furthermore, the drying device includes a first type of drying device in a non-drying working state and a second type of drying device in a drying working state. The air supply branch includes a first type of air supply branch connected to the first type of drying device and a second type of air supply branch connected to the second type of drying device. The control valve includes a first type of control valve disposed between the first type of air supply branch and the main connecting pipe, and a second type of control valve disposed between the second type of air supply branch and the main connecting pipe. When the first type of control valve and the second type of control valve are in the open state, the first type of drying device is configured to direct the hot air flow to the second type of drying device.

[0012] Furthermore, the second type of drying device has multiple units, and the second type of control valve has multiple units. When the first type of control valve and a portion of the second type of control valve adjacent to the first type of control valve are in the open state, and the second type of control valve far from the first type of control valve is in the closed state, the first type of drying device is configured to direct the hot air flow to the adjacent second type of drying device.

[0013] Furthermore, the drying system also includes a hot air heating device connected to the drying apparatus, the hot air heating device comprising:

[0014] An air inlet duct, one end of which is configured to supply an air source and the other end is connected to the first air inlet;

[0015] An air supply device and a heating device are provided on the air inlet duct, and the heating device is configured to heat the air source into hot air.

[0016] Furthermore, the hot air heating device includes multiple devices, and any one of the drying devices includes multiple first air inlets arranged in parallel. One first air inlet is connected to one of the hot air heating devices, so that the multiple hot air heating devices arranged in parallel are connected to one of the drying devices.

[0017] Furthermore, each of the adjacent air inlet ducts is independently equipped with the air supply device, and the adjacent air inlet ducts are equipped with a shared heating device.

[0018] Furthermore, the air supply device is located upstream of the heating device, and the hot air is configured to sequentially pass through the air supply device and the heating device before entering the drying device; or,

[0019] The air supply device is located downstream of the heating device, and the hot air is configured to pass through the heating device and the air supply device in sequence before entering the book drying device.

[0020] Furthermore, the drying device also includes a second air outlet, and the hot air heating device also includes a hot air internal circulation pipeline. The hot air internal circulation pipeline includes a second air inlet and a third air outlet. The second air inlet is connected to the second air outlet, and the third air outlet is connected to the air inlet pipeline and located upstream of the air supply equipment. A first switching valve is provided at the third air outlet.

[0021] Furthermore, the drying system is located inside a machine with clean air, and the air source is the clean air; the hot air internal circulation pipeline also includes a fourth air outlet and a second switch valve located at the fourth air outlet, and the fourth air outlet leads to the machine.

[0022] Furthermore, the air inlet duct is also equipped with an exhaust duct and a third switch valve located at the exhaust duct. One end of the exhaust duct is located downstream of the air supply equipment, and the other end of the exhaust duct leads to the outside of the machine; and / or,

[0023] The drying system is configured to dry at least one of silicon wafers, solar cell semi-finished products, solar cell finished products, or photovoltaic modules.

[0024] Compared with the prior art, the beneficial effects of this application are as follows:

[0025] This application provides a drying system that, through the coordinated arrangement of multiple parallel drying devices and a hot air external circulation pipeline, can fully utilize the hot air—allowing the hot air from some of the drying devices to flow to other drying devices through the coordination of control valves, air supply branches, and connecting main pipelines, thereby improving the drying effect and reducing process time.

[0026] The hot air external circulation pipeline includes several air supply branches, each connected to the first air outlet of the corresponding drying device. This ensures a one-to-one correspondence between the air supply branches and drying devices, allowing hot air to flow from the drying devices into the air supply branches. Simultaneously, the hot air external circulation pipeline also includes a main connecting pipeline connecting all the air supply branches, enabling hot air from any drying device to enter the main connecting pipeline via its corresponding air supply branch, thus circulating the hot air among the drying devices. The drying system of this application also includes several control valves located between the air supply branches and the main connecting pipeline, allowing different drying devices to be connected or isolated. Thus, when it is necessary to send hot air from some drying devices to other drying devices, their corresponding control valves can be opened, allowing the hot air to flow from the air supply branches into the main connecting pipeline. At the same time, the control valves corresponding to other drying devices are also opened, so that the hot air in the main pipeline can enter other drying devices through the corresponding air supply branch, realizing the reuse of hot air in different drying devices, reducing the waste of hot air, and increasing the air intake of the drying devices that are supplied with hot air, improving the drying effect of these drying devices on the processed parts, and shortening the drying process time. Attached Figure Description

[0027] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0028] Figure 1 This is a schematic diagram of the drying system according to an embodiment of this application;

[0029] Figure 2 yes Figure 1 A schematic diagram of region I in the middle;

[0030] Figure 3 This is a schematic diagram of the fluid flow in the drying system of this application embodiment. Figure 1 ;

[0031] Figure 4 This is a schematic diagram of the fluid flow in the drying system of this application embodiment. Figure 2 ;

[0032] Figure 5 This is a schematic diagram of the fluid flow in the drying system of this application embodiment. Figure 3 ;

[0033] Figure 6 This is a schematic diagram of the fluid flow in the drying system of this application embodiment. Figure 4 ;

[0034] Figure 7 This is a schematic diagram of the fluid flow in the drying system of this application embodiment. Figure 5 ;

[0035] Figure 8 This is a schematic diagram of the fluid flow in the drying system of this application embodiment. Figure 6 ;

[0036] Figure 9 This is a schematic diagram of the fluid flow in the drying system of this application embodiment. Figure 7 .

[0037] Explanation of reference numerals in the attached drawings: 100, Drying device; 100a, First air inlet; 100b, First air outlet; 100c, Second air outlet; 101, First drying device; 102, Second drying device; 103, Third drying device; 104, Fourth drying device; 200, Hot air external circulation pipe; 210, Air supply branch; 211, First air supply branch; 212, Second air supply branch; 213, Third air supply branch; 214, Fourth air supply branch; 220, Connecting main pipe; 3 00, Control valve; 301, First control valve; 302, Second control valve; 303, Third control valve; 304, Fourth control valve; 400, Hot air heating device; 410, Air inlet duct; 420, Air supply equipment; 430, Heating equipment; 440, Hot air internal circulation duct; 440a, Second air inlet; 440b, Third air outlet; 440c, Fourth air outlet; 500, Exhaust duct; 600, First switch valve; 700, Second switch valve; 800, Third switch valve. Detailed Implementation

[0038] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0039] In this application, the terms "upper," "lower," "left," "right," "front," "rear," "top," "bottom," "inner," "outer," "middle," "vertical," "horizontal," "lateral," and "longitudinal" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. These terms are primarily for the purpose of better describing this application and its embodiments, and are not intended to limit the indicated device, element, or component to having a specific orientation, or to be constructed and operated in a specific orientation.

[0040] Furthermore, in addition to indicating location or positional relationship, some of the aforementioned terms may also have other meanings. For example, the term "above" may also be used in some cases to indicate a certain dependency or connection relationship. Those skilled in the art can understand the specific meaning of these terms in this application based on the specific circumstances.

[0041] Furthermore, the terms "installation," "setup," "equipped with," "connection," and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral structure; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium, or an internal connection between two devices, components, or parts. Those skilled in the art can understand the specific meaning of these terms in this application based on the specific circumstances.

[0042] Furthermore, the terms "first," "second," etc., are primarily used to distinguish different devices, elements, or components (which may be the same or different in specific type and construction), and are not intended to indicate or imply the relative importance or quantity of the indicated devices, elements, or components. Unless otherwise stated, "a plurality of" means two or more.

[0043] The production and processing of solar cells involves drying operations, thus requiring a drying system to dry the corresponding parts. In actual production lines, since a large number of parts often need to be dried, the drying system is equipped with multiple drying units to meet the demand.

[0044] However, in some cases, only some drying units in the drying system need to operate, while others do not. In such cases, directly shutting down the drying units that do not require drying and stopping the hot air supply will disrupt the previously stable hot air environment inside the unit, causing it to cool down. If the unit is restarted, hot air must be supplied for a period of time to allow the internal hot air environment to stabilize before drying can resume. This approach increases production time and energy consumption, and is not conducive to flexibly adjusting the drying status of the units on the actual production line.

[0045] Therefore, in actual production lines, even though some drying units do not require drying operations, hot air is continuously supplied to them to maintain a stable hot air environment inside the drying unit. This ensures that the processed parts can be put back into the drying unit for drying at any time without reheating the drying unit. However, this results in the drying unit continuing to supply hot air even when it is not in operation, leading to a waste of hot air.

[0046] Based on the above analysis, this application provides an improved drying system that connects multiple drying devices in parallel and works in conjunction with a hot air external circulation pipeline to solve the aforementioned problem of hot air waste.

[0047] The technical solutions provided in this application will be further described below with reference to the embodiments and accompanying drawings.

[0048] like Figures 1 to 2 As shown in the figure, this application provides a drying system, including a plurality of drying devices 100 arranged in parallel and a hot air external circulation pipeline 200.

[0049] Among them, any one of the several parallel drying devices 100 has a first air inlet 100a and a first air outlet 100b. The first air inlet 100a is configured to introduce hot air so that the hot air enters the drying device 100 to dry the processed parts that need to be dried.

[0050] The drying device 100 can be a trough dryer, a box dryer, a direct-discharge dryer, etc. This application does not limit the specific type of the drying device 100.

[0051] The hot air external circulation pipe 200 includes:

[0052] Several air supply branches 210, one end of any one air supply branch 210 is connected to the first air outlet 100b of the corresponding drying device 100;

[0053] The main duct 220 is connected to the main duct 220, and the other end of any air supply branch 210 is connected to the main duct 220 so that the gas between the air supply branches 210 can flow to each other.

[0054] Several control valves 300 are provided, with any one of the control valves 300 located between the corresponding air supply branch 210 and the main connecting pipe 220, so that different drying devices 100 can be connected or separated.

[0055] Among them, the control valve 300 can be a gate valve, ball valve, butterfly valve, etc. This application does not limit the type of control valve 300. Similarly, the first type of control valve, the second type of control valve, the first switching valve 600, the second switching valve 700 and the third switching valve 800 mentioned below are not limited in this application. This application does not limit the specific types of each control valve and switching valve, as long as it can realize the connection or disconnection of the corresponding pipeline.

[0056] In this embodiment, the hot air external circulation pipeline 200 includes several air supply branches 210. Each air supply branch 210 is connected to the first air outlet 100b of the corresponding drying device 100, meaning that each air supply branch 210 corresponds one-to-one with a drying device 100, allowing hot air to enter the air supply branch 210 from the drying device 100. Simultaneously, the hot air external circulation pipeline 200 also includes a main connecting pipeline 220 connecting all the air supply branches 210, allowing hot air from any drying device 100 to enter the main connecting pipeline 220 via the corresponding air supply branch 210, thus achieving the purpose of hot air circulation among the drying devices 100. The drying system of this application also includes several control valves 300, which are located between the air supply branches 210 and the main connecting pipeline 220, allowing different drying devices 100 to be connected or separated. When it is necessary to send hot air from some drying devices 100 to other drying devices 100, the corresponding control valve 300 can be opened, allowing the hot air to enter the main connecting pipe 220 through the air supply branch 210. At the same time, the control valves 300 corresponding to the other drying devices 100 are also opened, allowing the hot air in the main connecting pipe 220 to enter the other drying devices 100 with useful air demand through the corresponding air supply branch 210. This realizes the reuse of hot air from different drying devices 100, reduces the waste of hot air, and increases the air intake of the drying devices 100 that receive hot air, improving the drying effect of these drying devices 100 on the processed parts and shortening the drying process time.

[0057] In one optional embodiment, the drying device 100 includes a first type of drying device in an un-drying working state and a second type of drying device in a drying working state. The air supply branch 210 includes a first type of air supply branch connected to the first type of drying device and a second type of air supply branch connected to the second type of drying device. The control valve 300 includes a first type of control valve disposed between the first type of air supply branch and the connecting main pipe 220 and a second type of control valve disposed between the second type of air supply branch and the connecting main pipe 220. The first type of control valve and the second type of control valve are in an open state so that the hot air from the first type of drying device flows into the second type of drying device.

[0058] The "undrying state" refers to a situation where no workpieces need drying in the first type of drying device, but hot air is still being supplied and is not being utilized. The "drying state" refers to a situation where workpieces need drying exist in the second type of drying device, and the supplied hot air is used to dry them. Through the coordination of control valve 300, air supply branch 210, and connecting main pipe 220 with the two types of drying devices, hot air is directed from the first type of drying device in the undrying state to the second type of drying device in the drying state. This reuses the idle hot air in the first type of drying device, reducing waste, while increasing the airflow in the second type of drying device, improving the drying effect on the workpieces, and shortening the drying process time.

[0059] It is understood that there can be one or more first-type drying devices, and there can be one or more second-type drying devices. This application does not limit this, as long as the drying requirements of the processed parts can be met.

[0060] Preferably, there are multiple second-type drying devices and multiple second-type control valves. The first-type control valve and some second-type control valves adjacent to the first-type control valve are in the open state, while the second-type control valves far from the first-type control valve are in the closed state, so that the hot air from the first-type drying device flows to the adjacent second-type drying device.

[0061] There is no limit to the number of the second type of control valves; the number can be the same as that of the second type of drying device, or multiple control valves 300 can be provided for any drying device 100. When multiple control valves 300 are provided for any drying device 100, there are multiple air supply branches 210 corresponding to these control valves 300, and all multiple air supply branches 210 are connected to the corresponding drying device 100.

[0062] "Proximity" refers to the comparison of the physical distance between control valves 300, so that unused hot air enters the drying device 100 in the drying operation state with minimal heat loss.

[0063] The following description uses an example of a drying system according to an embodiment of this application, which has four drying devices 100, each corresponding to a control valve 300 and an air supply branch 210, to illustrate the process of hot air reuse in the first type of drying device. (In conjunction with...) Figures 3 to 9 As shown, four drying devices 100 are arranged from top to bottom as follows: first drying device 101, second drying device 102, third drying device 103, and fourth drying device 104. Corresponding to each drying device 100, four control valves 300 are arranged from top to bottom as first control valve 301, second control valve 302, third control valve 303, and fourth control valve 304. If we define the second drying device 102 as a first-type drying device, and the first drying devices 101, third drying devices 103, and fourth drying devices 104 as second-type drying devices, then the second control valve 302 is a first-type control valve, and the first control valve 301, third control valve 303, and fourth control valve 304 are second-type control valves. In this case, the first control valve 301 and third control valve 303 are the second-type control valves adjacent to the first-type control valves, and the fourth control valve 304 is the second-type control valve farther away from the first-type control valves. At this time, the second control valve 302 is opened, allowing the hot air in the second drying device 102 to enter the main connecting pipe 220 through the second air supply branch 212; the fourth control valve 304 is closed, preventing the hot air in the second drying device 102 from entering the fourth drying device 104 through the fourth air supply branch 214.

[0064] like Figure 3 As shown, the first control valve 301 and the third control valve 303 are opened simultaneously, so that the hot air in the main pipeline 220 enters the first drying device 101 through the first air supply branch 211 and enters the third drying device 103 through the third air supply branch 213, thereby increasing the hot air volume in the first drying device 101 and the third drying device 103.

[0065] like Figure 4 As shown, the first control valve 301 is open and the third control valve 303 is closed. At this time, the hot air in the main pipeline 220 enters the first drying device 101 through the first air supply branch 211, so that the hot air entering the first drying device 101 has a larger air volume than when the first control valve 301 and the third control valve 303 are opened at the same time, and thus the drying effect of the first drying device 101 is better.

[0066] like Figure 5 As shown, the first control valve 301 is closed and the third control valve 303 is open. At this time, the hot air in the main pipeline 220 enters the third drying device 103 through the third air supply branch 213, so that the hot air entering the third drying device 103 has a larger air volume than when the first control valve 301 and the third control valve 303 are opened at the same time, and thus the drying effect of the third drying device 103 is better.

[0067] By selectively opening the adjacent control valve 300, the heat loss of hot air in the main connecting pipe 220 can be reduced, resulting in a better drying effect of the drying system.

[0068] Further, see the return Figures 1 to 2 As shown, the drying system also includes a hot air heating device 400 connected to the first air inlet 100a. The hot air heating device 400 includes:

[0069] Air inlet duct 410, one end of which is configured to introduce an air source, and the other end is connected to the first air inlet 100a;

[0070] Air supply device 420 and heating device 430 are installed on air inlet duct 410, and heating device 430 is configured to heat the air source into hot air;

[0071] The hot air heating device 400 includes multiple devices, and any drying device 100 includes multiple first air inlets 100a arranged in parallel. Each first air inlet 100a is connected to a hot air heating device 400, so that multiple hot air heating devices 400 arranged in parallel are connected to a drying device 100.

[0072] Among them, the air supply equipment 420 can be a fan, air pump, compressor, etc.; the heating equipment 430 can be an electric heater, heat exchanger, gas heater, etc. This application does not limit the specific types of the air supply equipment 420 and the heating equipment 430.

[0073] In this embodiment, the air source enters the air inlet duct 410 under the action of the air supply device 420, and is converted into hot air by the heating device 430. The hot air then enters the drying device 100 to dry the processed parts inside the drying device 100. Simultaneously, a drying device 100 can be connected to multiple hot air heating devices 400, increasing the volume of hot air entering the drying device 100 and thus improving the drying effect.

[0074] like Figure 6 As shown, in one optional embodiment, adjacent air inlet ducts 410 are each independently provided with air supply devices 420, and adjacent air inlet ducts 410 are provided with shared heating devices 430.

[0075] The number of adjacent air inlet ducts 410 can be two, three or more, and this application does not limit the number of air inlet ducts 410.

[0076] In this embodiment, the number of air supply devices 420 is the same as the number of air inlet ducts 410, allowing air to be supplied to the corresponding air inlet ducts 410 through the air supply devices 420, thus ensuring the air volume of the air source. Multiple adjacent air inlet ducts 410 share one heating device 430. Compared to configuring one heating device 430 for each air inlet duct 410, this reduces the energy consumption of the drying system and also reduces the space occupied by the heating device 430 in the drying system.

[0077] Optionally, the air supply device 420 is located upstream of the heating device 430. The air inlet duct 410 passes sequentially through the air supply device 420 and the heating device 430 into the drying device 100, allowing a larger volume of air to enter the air inlet duct 410 while the heated air quickly enters the drying device 100. With the air supply device 420 upstream of the heating device 430, it is closer to the air source, enabling it to deliver a larger volume of air into the corresponding air inlet duct 410, resulting in a larger volume of air entering the drying device 100 and a better drying effect. Simultaneously, the closer proximity of the heating device 430 to the drying device 100 shortens the travel distance of the heated air in the air inlet duct 410, reducing losses caused by the longer flow path of the hot air in the air inlet duct 410.

[0078] Optionally, the air supply device 420 is located downstream of the heating device 430. The air inlet duct 410 enters the drying device 100 through the heating device 430 and the air supply device 420 in sequence, so that the air in the air inlet duct 410 is fully heated. With the air supply device 420 downstream of the heating device 430, the heating device 430 is closer to the air source, resulting in more thorough heating of the air in the air inlet duct 410 and a stable hot air temperature. This allows the hot air to quickly remove moisture from the processed parts after entering the drying device 100, significantly shortening the drying cycle and increasing efficiency.

[0079] Among them, upstream and downstream refer to the positional relationship between the equipment and the air source in the air inlet duct 410, with the upstream being closer to the air source than the downstream.

[0080] Furthermore, such as Figure 7 As shown, the drying device 100 also includes a second air outlet 100c, and the hot air heating device 400 also includes a hot air internal circulation pipe 440. The hot air internal circulation pipe 440 includes a second air inlet 440a and a third air outlet 440b. The second air inlet 440a is connected to the second air outlet 100c, and the third air outlet 440b is connected to the air inlet pipe 410 and is located upstream of the air supply device 420. A first switching valve 600 is provided at the third air outlet 440b, so that the hot air in the drying device 100 can be reheated by the heating device 430.

[0081] In this embodiment, by setting up a hot air internal circulation pipe 440, the hot air in the drying device 100 can enter the air inlet pipe 410 through the third air outlet 440b, and after passing through the air supply device 420, it is delivered to the heating device 430 for heating. When some drying devices 100 in the drying system are in an un-drying working state, and these drying devices 100 are of the first type of drying devices, their internal hot air temperature is lower than the hot air temperature requirement of the second type of drying devices in the drying working state. At this time, the hot air in the first type of drying device can be introduced into the corresponding air inlet pipe 410 through the hot air internal circulation pipe 440. Through the air supply device 420 and the heating device 430, the hot air is reheated so that the hot air temperature reaches the required temperature of the second type of drying device. After that, the hot air is introduced into the drying device 100 and further enters the second type of drying device through the hot air external circulation pipe 200, which increases the air volume in the second type of drying device and shortens the process time.

[0082] Furthermore, the drying system is located within a machine (not shown) equipped with clean air, and the air source is clean air, so that the clean air within the machine is recycled; for example... Figure 8 As shown, the hot air internal circulation pipeline 440 also includes a fourth air outlet 440c and a second switch valve 700 located at the fourth air outlet 440c. The fourth air outlet 440c leads to the machine base so that the hot air in the drying device 100 is discharged from the drying system.

[0083] Clean air refers to air with a cleanliness level of 10,000.

[0084] The machine is used in a solar cell production line. In addition to a drying system, the machine may also include other systems for processing silicon wafers. This application does not limit other parts of the machine.

[0085] In this embodiment, the air source inside the machine is clean air. The clean air inside the machine is used as the air source for drying the processed parts inside the drying device 100, realizing the recycling of clean air. When the drying system has an exhaust requirement, the second switch valve 700 can be opened, and the hot air in the drying system can be exhausted to the machine through the fourth air outlet 440c of the hot air internal circulation pipe 440, realizing the exhaust of the drying system.

[0086] Furthermore, such as Figure 9 As shown, the air inlet pipe 410 is also equipped with an exhaust pipe 500 and a third switch valve 800 located at the exhaust pipe 500. One end of the exhaust pipe 500 is located downstream of the air supply equipment 420, and the other end of the exhaust pipe 500 leads to the outside of the machine, so that the gas in the air inlet pipe 410 can be discharged from the machine.

[0087] Optionally, the drying system is configured to dry at least one of silicon wafers, solar cell semi-finished products, solar cell finished products, or photovoltaic modules.

[0088] In this embodiment, the drying system dries at least one of silicon wafers, semi-finished solar cells, finished solar cells, or photovoltaic modules. The production of these processed parts involves precision structure manufacturing, and airborne pollutants can cause irreversible damage to the material surface, thin-film structure, and electrical properties of the processed parts, thereby affecting their performance. Therefore, the production process of these processed parts requires a high level of cleanliness, and all air used during the process is clean air.

[0089] In addition, other processes performed on the machine, such as pickling and washing, may cause acid gas and water vapor to be generated during the drying process of the above-mentioned dried parts, which may diffuse into the machine. By setting up an exhaust duct 500 and periodically opening the third switch valve 800, the air source containing acid gas and water vapor is sent into the air inlet duct 410 through the air supply equipment 420 and discharged from the machine through the exhaust duct 500, thereby reducing the pollution of the processed parts caused by acid gas and water vapor and ensuring the quality and performance of the processed parts.

[0090] See Figures 1 to 2 The working process of the drying system in this embodiment of the application will be described below, taking silicon wafers as an example of the workpiece to be dried:

[0091] The silicon wafers undergo relevant processes in the pickling and washing devices of the drying machine before entering the drying system. Specifically, clean air from the machine enters the hot air heating device 400 through the air inlet duct 410, and is transformed into hot air by the air supply device 420 and the heating device 430. The hot air enters the drying device 100 to dry the silicon wafers. When some drying devices 100 do not contain silicon wafers (i.e., are in an undried state), the control valve 300 corresponding to this part of the drying device 100 is opened, allowing the hot air from this part of the drying device 100 to enter the main connecting duct 220 through the corresponding air supply branch 210. At the same time, another part of the drying device 100 contains silicon wafers (i.e., is in the drying state), and the control valve 300 corresponding to this part of the drying device 100 is also opened, allowing the hot air from the undried drying device 100 to enter the drying device 100 in the drying state. This not only makes full use of the hot air in the drying device 100 when it is not in the drying state, but also increases the total amount of hot air in the drying device 100 when it is in the drying state, which is beneficial to improving the drying effect of silicon wafers and shortening the process time.

[0092] When the temperature of the hot air in the drying device 100 in the undried state is lower than the temperature requirement of the drying device 100 in the drying state, the hot air in the drying device 100 in the undried state can also enter the hot air internal circulation pipe 440 through the second air inlet 440a and enter the air inlet pipe 410 through the third air outlet 440b. After being reheated by the heating device 430, the hot air enters the drying device 100 in the drying state after reaching the target temperature to dry the silicon wafer.

[0093] In addition, other processes performed in the machine, such as pickling and washing, may cause acid gas and water vapor to be generated during the drying process of silicon wafers. If these are carried by hot air, the third switch valve 800 on the exhaust pipe 500 can be opened periodically to exhaust the hot air containing acid gas and water vapor from the machine through the exhaust pipe 500, thereby reducing the impact of acid gas and water vapor on the silicon wafers and better ensuring the performance of the silicon wafers.

[0094] The foregoing embodiments of this application focus on describing the differences between various embodiments. As long as the different optimization features between embodiments are not contradictory, they can be combined to form better embodiments. For the sake of brevity, these differences will not be elaborated upon here. The embodiments of this application have been described above with reference to the accompanying drawings. However, this application is not limited to the specific embodiments described above. The specific embodiments described above are merely illustrative and not restrictive. Those skilled in the art, under the guidance of this application, can make many modifications without departing from the spirit and scope of the claims, all of which fall within the protection scope of this application.

Claims

1. A drying system, characterized by, The drying system includes: A plurality of drying devices arranged in parallel, each of the drying devices having a first air inlet and a first air outlet, the first air inlet being configured to introduce hot air; Hot air external circulation duct, the hot air external circulation duct comprising: Several air supply branches, one end of any one air supply branch is connected to the first air outlet of the corresponding drying device; The main duct is connected to the main duct, and the other end of any of the air supply branches is connected to the main duct. A plurality of control valves, any one of which is disposed between the corresponding air supply branch and the main connecting pipe, the control valve being configured to connect or disconnect different drying devices.

2. The drying system of claim 1, wherein, The drying device includes a first type of drying device in a non-drying working state and a second type of drying device in a drying working state. The air supply branch includes a first type of air supply branch connected to the first type of drying device and a second type of air supply branch connected to the second type of drying device. The control valve includes a first type of control valve located between the first type of air supply branch and the main connecting pipeline, and a second type of control valve located between the second type of air supply branch and the main connecting pipeline. When the first type of control valve and the second type of control valve are in the open state, the first type of drying device is configured to direct the hot air flow into the second type of drying device.

3. The drying system of claim 2, wherein, The second type of drying device has multiple units, and the second type of control valve has multiple units. When the first type of control valve and a portion of the second type of control valve adjacent to the first type of control valve are in the open state, and the second type of control valve far from the first type of control valve is in the closed state, the first type of drying device is configured to direct the hot air flow to the adjacent second type of drying device.

4. The drying system according to any one of claims 1 to 3, characterized in that The drying system further includes a hot air heating device connected to the drying device, the hot air heating device comprising: An air inlet duct, one end of which is configured to supply an air source and the other end is connected to the first air inlet; An air supply device and a heating device are provided on the air inlet duct, and the heating device is configured to heat the air source into hot air.

5. The drying system of claim 4, wherein, The hot air heating device includes multiple devices, and any one of the drying devices includes multiple first air inlets arranged in parallel. One first air inlet is connected to one of the hot air heating devices, so that the multiple hot air heating devices arranged in parallel are connected to one of the drying devices.

6. The drying system of claim 4, wherein, Each adjacent air inlet duct is independently equipped with an air supply device, and the adjacent air inlet ducts are equipped with a shared heating device.

7. The drying system of claim 4, wherein, The air supply device is located upstream of the heating device, and the hot air is configured to pass sequentially through the air supply device and the heating device into the drying device; or... The air supply device is located downstream of the heating device, and the hot air is configured to enter the drying device sequentially through the heating device and the air supply device.

8. The drying system of claim 4, wherein, The drying device further includes a second air outlet, and the hot air heating device further includes a hot air internal circulation pipeline. The hot air internal circulation pipeline includes a second air inlet and a third air outlet. The second air inlet is connected to the second air outlet, and the third air outlet is connected to the air inlet pipeline and located upstream of the air supply equipment. A first switching valve is provided at the third air outlet.

9. The drying system of claim 8, wherein, The drying system is located inside a machine with clean air, and the air source is the clean air. The hot air internal circulation pipeline also includes a fourth air outlet and a second switch valve located at the fourth air outlet, the fourth air outlet leading to the machine.

10. The drying system of claim 9, wherein, The air inlet duct is also equipped with an exhaust duct and a third switch valve located at the exhaust duct. The exhaust duct is located downstream of the air supply equipment, and the other end of the exhaust duct leads to the outside of the machine; and / or The drying system is configured to dry at least one of silicon wafers, solar cell semi-finished products, solar cell finished products, or photovoltaic modules.

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