Heating furnace
By using heating wires of different types and control methods in the heating furnace, zoned temperature control was achieved, solving the temperature difference problem between the furnace opening and the furnace tail, improving temperature uniformity and reducing costs.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- JIANGSU MICROVIA NANO EQUIP TECH CO LTD
- Filing Date
- 2025-08-29
- Publication Date
- 2026-07-31
AI Technical Summary
Existing heating furnaces are unable to cope with complex heating conditions during the process, especially the uneven temperature control between the furnace mouth and the furnace tail, which leads to temperature difference problems.
The first furnace body and the second furnace body adopt different heating wire types and control methods. Multiple first heating wires are arranged circumferentially in the first furnace body, and second heating wires are arranged spirally in the second furnace body. Each heating wire is independently controlled to achieve zoned temperature control.
This technology enables zoned temperature control based on actual conditions, improving temperature uniformity, reducing manufacturing costs, and solving the temperature difference problem caused by the entry of the propeller rod.
Smart Images
Figure CN224580711U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of heating technology, and in particular to heating furnaces. Background Technology
[0002] A heating furnace can heat workpieces during a process to provide the required temperature. However, in related technologies, the temperature control of a heating furnace typically employs the same heating and control methods from the furnace opening to the furnace tail, which is insufficient to handle complex heating conditions. Utility Model Content
[0003] Embodiments of this application provide a heating furnace that optimizes the temperature control capability of the heating furnace.
[0004] This application provides a heating furnace. The heating furnace includes a furnace body. The furnace body has a furnace opening and a furnace tail; the furnace body includes a first furnace body and a second furnace body, with the first furnace body disposed on the side of the second furnace body near the furnace opening. The first furnace body is cylindrical, and a plurality of first heating wires are spaced apart circumferentially on its sidewalls; the second furnace body is cylindrical, and second heating wires are spirally extended circumferentially on its sidewalls.
[0005] Optionally, there are multiple first furnace bodies and multiple second furnace bodies; the multiple first furnace bodies are arranged adjacent to each other, the multiple second furnace bodies are connected to each other, and the multiple first furnace bodies are all located on the side of the second furnace body closer to the furnace opening.
[0006] Optionally, the first heating wires in different first furnace bodies are controlled independently, and the second heating wires in different second furnace bodies are controlled independently.
[0007] Optionally, the first furnace body is provided with at least a first heating section and a second heating section arranged in the circumferential direction. The first heating section and the second heating section are spaced apart in the circumferential direction. Each of the first heating section and the second heating section is provided with a plurality of first heating wires. The plurality of first heating wires in the first heating section and the plurality of first heating wires in the second heating section are controlled independently of each other.
[0008] Optionally, the first furnace body is provided with a first heating section, a second heating section, a third heating section and a fourth heating section arranged in a circumferential direction; the first heating section and the second heating section are arranged opposite to each other, and the third heating section and the fourth heating section are arranged opposite to each other; multiple first heating wires are provided in both the third heating section and the fourth heating section, and the multiple first heating wires in the third heating section and the multiple first heating wires in the fourth heating section are controlled independently.
[0009] Optionally, multiple first heating wires in the first heating section constitute a first heating group, multiple first heating wires in the second heating section constitute a second heating group, multiple first heating wires in the third heating section constitute a third heating group, and multiple first heating wires in the fourth heating section constitute a fourth heating group; the first heating group, the second heating group, the third heating group, and the fourth heating group are connected in parallel with each other.
[0010] Optionally, the spacing between the first heating wires in the second heating section is smaller than the spacing between the first heating wires in the first heating section.
[0011] Optionally, the diameter of the first heating wire is between 2 mm and 3 mm; the first heating wire extends in a spiral or wavy shape.
[0012] Optionally, the diameter of the second heating wire is between 8 mm and 10 mm.
[0013] Optionally, the diameter of the first heating wire is smaller than the diameter of the second heating wire.
[0014] The beneficial effects of this application are as follows: Unlike existing technologies, by using different types of first and second heating wires in the first and second furnace bodies, different heating methods and heating wire control methods can be achieved for the first and second furnace bodies. For the first furnace body, which is closer to the furnace opening, its operating conditions are more complex. By arranging multiple first heating wires at circumferential intervals, the first furnace body can achieve circumferential zoned temperature control. For the second furnace body, which is farther from the furnace opening, its heating temperature is less affected by factors, and using spirally extended second heating wires can reduce the manufacturing cost of the heating furnace. Furthermore, the first and second furnace bodies can independently control their internal temperatures. Therefore, the furnace body can also achieve zoned temperature control in the direction from the furnace opening to the furnace tail, thus achieving the effect of zoned temperature control according to actual conditions. Attached Figure Description
[0015] Figure 1 This is a schematic diagram of the structure of an embodiment of the heating furnace of this application;
[0016] Figure 2 This is a cross-sectional structural schematic diagram of an embodiment of the heating furnace of this application;
[0017] Figure 3 yes Figure 2 The diagram shows the structure of the first furnace body;
[0018] Figure 4 yes Figure 3 A schematic diagram of the arrangement of the first heating wire;
[0019] Figure 5 yes Figure 2 The diagram shows the structure of the second furnace body;
[0020] Figure 6 yes Figure 5 A schematic diagram of the arrangement of the second heating wire;
[0021] Figure 7 This is a schematic diagram of another embodiment of the first furnace body of this application;
[0022] Figure 8 yes Figure 7 A schematic diagram of the arrangement of the first heating wire;
[0023] Figure 9 This is a schematic diagram of the cross-sectional structure of the first furnace body of this application. Detailed Implementation
[0024] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of the embodiments. Based on the embodiments of this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of this application.
[0025] In related technologies, such as in the vapor deposition process, a heating furnace is used to heat the substrate carried on a carrier to achieve the required process conditions. During furnace preheating or substrate heating, the furnace opening comes into contact with air during opening and closing, resulting in a significant temperature difference near the furnace opening. Furthermore, during substrate deposition, when a propeller is used to transfer the carrier, the propeller's insertion into the furnace causes a temperature difference from the furnace opening to the furnace tail. The propeller is typically located below the carrier, occupying a relatively low position within the furnace, which further exacerbates the vertical temperature difference within the furnace. To address these technical problems, this application provides the following embodiments.
[0026] Combination Figure 1 and Figure 2 This application provides a heating furnace. The heating furnace includes a furnace body 10. The furnace body 10 has a furnace opening 101 and a furnace tail 102. The furnace body 10 includes a first furnace body 11 and a second furnace body 12, with the first furnace body 11 disposed on the side of the second furnace body 12 near the furnace opening 101. The first furnace body 11 is cylindrical (or tubular), and a plurality of first heating wires 111 are circumferentially spaced along the sidewall of the first furnace body 11 (in conjunction with...). Figure 3 and Figure 4Multiple first heating wires 111 are independent of each other and can be connected in parallel or in series as needed. In other words, the first heating wires 111 can have different heating temperatures in the circumferential direction of the first furnace body 11, thereby realizing temperature zone control of the first furnace body 11 in the circumferential direction. The second furnace body 12 is cylindrical (or tubular), and the sidewalls of the second furnace body 12 are provided with second heating wires 121 extending spirally in the circumferential direction (in conjunction with...). Figure 5 and Figure 6 The central axis of the second heating wire 121 spiral is the central axis of the second furnace body 12. This arrangement of the heating wire results in lower costs.
[0027] Specifically, by setting the first heating wire 111 and the second heating wire 121 in the first furnace body 11 and the second furnace body 12 to be of different types, the first furnace body 11 and the second furnace body 12 can have different heating methods and control methods for the heating wires. For the first furnace body 11, which is closer to the furnace opening 101, its operating conditions are more complex. By arranging multiple first heating wires 111 at circumferential intervals, the first furnace body 11 can control the temperature in circumferential zones. For the second furnace body 12, which is farther from the furnace opening 101, its heating temperature is less affected by factors. Using spirally extended second heating wires 121 can reduce the manufacturing cost of the heating furnace. On the other hand, the first furnace body 11 and the second furnace body 12 can independently control their internal temperatures. Therefore, the furnace body 10 can also perform zoned temperature control in the direction from the furnace opening 101 to the furnace tail 102, so as to achieve the effect of zoned temperature control according to actual conditions.
[0028] In some embodiments, multiple first furnace bodies 11 and multiple second furnace bodies 12 are provided. The multiple first furnace bodies 11 are arranged adjacent to each other, and the multiple second furnace bodies 12 are connected to each other, with each of the first furnace bodies 11 located on the side of the second furnace body 12 closest to the furnace opening 101. The multiple first furnace bodies 11 and multiple second furnace bodies 12 can be manufactured separately and then assembled together. Alternatively, the multiple first furnace bodies 11 and multiple second furnace bodies 12 can be integrally formed, but the arrangement of the heating wires in the first furnace bodies 11 and the second furnace bodies 12 differs, and the first heating wires 111 arranged in different first furnace bodies 11 are independent of each other, as are the second heating wires 121 arranged in different second furnace bodies 12.
[0029] Specifically, in some embodiments, the first heating wires 111 in different first furnace bodies 11 are controlled independently, and the second heating wires 121 in different second furnace bodies 12 are controlled independently. In this way, the heating temperature of the corresponding first heating wire 111 can be independently controlled among different first furnace bodies 11. The heating temperature of the corresponding second heating wire 121 can be independently controlled among different second furnace bodies 12. Thus, in the direction from the furnace opening 101 to the furnace tail 102, the heating temperature of multiple first furnace bodies 11 and multiple second furnace bodies 12 can be controlled in zones, allowing different furnace bodies 10 to adjust their heating power, for example, according to their distance from the furnace opening 101, thereby improving temperature uniformity. For example, the closer to the furnace opening 101, the more severe the heat loss problem; therefore, among the multiple first furnace bodies 11, the first heating wire 111 in the first furnace body 11 closer to the furnace opening 101 has a higher heating power. Among the multiple second furnace bodies 12, the second heating wire 121 in the second furnace body 12 closer to the furnace opening 101 has a higher heating power.
[0030] Combination Figure 9 In some embodiments, the first furnace body 11 has at least a first heating section 1101 and a second heating section 1102 arranged circumferentially. The first heating section 1101 and the second heating section 1102 are spaced apart in the circumferential direction. Each of the first heating section 1101 and the second heating section 1102 has a plurality of first heating wires 111. The plurality of first heating wires 111 in the first heating section 1101 and the plurality of first heating wires 111 in the second heating section 1102 are controlled independently of each other.
[0031] Combination Figure 3 and Figure 4Specifically, the first heating wire 111 can be a single spiral or wavy heating wire. The first heating wires 111 are spaced apart on the side wall of the first furnace body 11, enabling the first furnace body 11 to have zoned heating functionality. Controlling each heating wire independently is difficult and costly. By dividing the first furnace body 11 circumferentially into multiple heating sections, and allowing the first heating wires 111 in different sections to operate independently, the difficulty and cost of zoned control are reduced. One issue affecting heat distribution in the first furnace body 11 is that, because the temperature inside the furnace body 10 is much higher than the temperature of the paddle, the paddle absorbs heat as it enters the furnace body 10, causing a temperature drop in the lower part of the furnace body 10, resulting in uneven temperature distribution between the upper and lower parts of the furnace body 10. By setting the first heating section 1101 and the second heating section 1102 opposite to each other in the circumferential direction of the first furnace body 11, and making their corresponding first heating wires independent, independent control of the first heating section 1101 and the second heating section 1102 can be achieved, enabling zoned heating. For example, the first heating section 1101 is located at the top, and the second heating section 1102 is located at the bottom. The heating power of the first heating wire 111 in the second heating section 1102 located at the bottom can be greater than that of the first heating wire 111 in the first heating section 1101, thereby compensating for the problem of low temperature on the lower side of the first furnace body 11 caused by heat absorption by the paddle rod. The multiple first heating wires 111 in the first heating section 1101 can be connected in series or parallel for unified control. The multiple first heating wires 111 in the second heating section 1102 can also be connected in series or parallel for unified control. However, the multiple first heating wires 111 in the first heating section 1101 as a whole and the multiple first heating wires 111 in the second heating section 1102 are at least connected in parallel to achieve independent control. Optionally, the multiple first heating wires 111 in the first heating section 1101 as a whole can be controlled by a separate control system, and the multiple first heating wires 111 in the second heating section 1102 can be controlled by a separate control system.
[0032] Combination Figure 9In some embodiments, the first furnace body 11 is provided with a first heating section 1101, a second heating section 1102, a third heating section 1103, and a fourth heating section 1104 arranged circumferentially. The first heating section 1101 and the second heating section 1102 are arranged opposite to each other, and the third heating section 1103 and the fourth heating section 1104 are arranged opposite to each other. Multiple first heating wires 111 are provided in both the third heating section 1103 and the fourth heating section 1104, and the multiple first heating wires 111 in the third heating section 1103 and the multiple first heating wires 111 in the fourth heating section 1104 are independently controlled. Specifically, the first furnace body 11 may have four heating sections arranged circumferentially, wherein the first heating section 1101 and the second heating section 1102 are used to heat the upper and lower sides of the first furnace body 11, respectively, and the third heating section 1103 and the fourth heating section 1104 are used to heat the left and right sides of the first furnace body 11 when viewed along the axis of the furnace body 10. The first heating section 1101, the second heating section 1102, the third heating section 1103, and the fourth heating section 1104 are configured to independently heat the first furnace body 11 in the circumferential direction, thereby enabling them to handle more complex heating conditions. The relationships between each pair of the multiple first heating wires 111 in the first heating section 1101, the second heating section 1102, the third heating section 1103, and the fourth heating section 1104 are similar to the relationships between the multiple first heating wires 111 in the first heating section 1101 and the multiple first heating wires 111 in the second heating section 1102, and will not be repeated here.
[0033] In some embodiments, a plurality of first heating wires 111 in the first heating section 1101 constitute a first heating group, a plurality of first heating wires 111 in the second heating section 1102 constitute a second heating group, a plurality of first heating wires 111 in the third heating section 1103 constitute a third heating group, and a plurality of first heating wires 111 in the fourth heating section 1104 constitute a fourth heating group; the first heating group, the second heating group, the third heating group, and the fourth heating group are connected in parallel. Specifically, the heating power of the first heating group, the second heating group, the third heating group, and the fourth heating group can be independently controlled, thereby realizing zoned heating of the first furnace body 11. The relationship between the first heating wires 111 in the first heating group can be series or parallel. The relationship between the first heating wires 111 in the second heating group can be series or parallel. The relationship between the first heating wires 111 in the third heating group can be series or parallel. The relationship between the first heating wires 111 in the fourth heating group can be series or parallel.
[0034] Combination Figure 7 and Figure 8In some embodiments, the spacing between the first heating wires 111 in the second heating section 1102 is smaller than the spacing between the first heating wires 111 in the first heating section 1101. The second heating section 1102 is located below the first heating section 1101 in the circumferential direction. Since the paddle rod is positioned lower in the furnace body 10, it causes a temperature drop on the lower side of the furnace body 10 during its entry into the furnace body. By setting the spacing between the first heating wires 111 in the second heating section 1102 to be smaller than the spacing between the first heating wires 111 in the first heating section 1101, the density of the heating wires on the lower side of the first furnace body 11 can be relatively greater. Therefore, under the same conditions, the second heating section 1102 can generate more heat, thereby compensating for the temperature drop caused by the paddle rod.
[0035] In some embodiments, the diameter of the first heating wire 111 is between 2 mm and 3 mm; the first heating wire 111 extends in a spiral or wavy shape. The first heating wire 111 is fixed inside the aluminum silicate insulation layer by a vacuum adsorption process. The first heating wire 111 has the characteristics of small heating mass, fast response speed, and high power energy density.
[0036] In some embodiments, the diameter of the second heating wire 121 is between 8 mm and 10 mm. The second heating wire 121 has the advantages of high heating mass, simple manufacturing and low cost.
[0037] In some embodiments, the diameter of the first heating wire 111 is smaller than the diameter of the second heating wire 121. Multiple first heating wires 111 are arranged at circumferential intervals around the first furnace body 11. The smaller diameter of the first heating wires 111 allows for a greater number of them to be arranged at circumferential intervals. The larger diameter of the second heating wire 121 allows it to achieve the same heating effect with fewer turns when spirally wound around the circumference.
[0038] In some embodiments, the first furnace body 11 may also be provided with a second heating wire 121 spirally arranged on the side wall of the first furnace body 11, and a first heating wire 111 arranged at circumferential intervals is sleeved inside the second heating wire 121. In this way, the second heating wire 121, which has lower control precision, can provide the basic temperature of the first furnace body 11. On the other hand, the first heating wire 111, which has higher control precision and can control the temperature in circumferential zones, can precisely control the temperature inside the first furnace body 11.
[0039] The above are merely embodiments of this application and do not limit the patent scope of this application. Any equivalent structural or procedural transformations made using the content of this application's specification and drawings, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this application.
Claims
1. A heating furnace characterized by comprising: include: The furnace body has a furnace opening and a furnace tail; the furnace body includes a first furnace body and a second furnace body, wherein the first furnace body is disposed on the side of the second furnace body near the furnace opening; The first furnace body is cylindrical, and a plurality of first heating wires are arranged at intervals along the circumference of the side wall of the first furnace body; the second furnace body is cylindrical, and a second heating wire is arranged spirally along the circumference of the side wall of the second furnace body.
2. The heating furnace according to claim 1, characterized in that: Multiple first furnace bodies and multiple second furnace bodies are provided; multiple first furnace bodies are arranged adjacent to each other, multiple second furnace bodies are connected to each other, and multiple first furnace bodies are all located on the side of the second furnace body closer to the furnace opening.
3. The heating furnace according to claim 2, characterized in that: The first heating wires in different first furnace bodies are controlled independently, and the second heating wires in different second furnace bodies are controlled independently.
4. The heating furnace according to claim 1, characterized in that: The first furnace body has at least a first heating section and a second heating section arranged in the circumferential direction. The first heating section and the second heating section are spaced apart in the circumferential direction. Both the first heating section and the second heating section are provided with a plurality of first heating wires. The plurality of first heating wires in the first heating section and the plurality of first heating wires in the second heating section are controlled independently of each other.
5. The heating furnace according to claim 4, characterized in that: The first furnace body is provided with a first heating section, a second heating section, a third heating section and a fourth heating section arranged in a circumferential direction; the first heating section and the second heating section are arranged opposite to each other, and the third heating section and the fourth heating section are arranged opposite to each other; a plurality of first heating wires are provided in both the third heating section and the fourth heating section, and the plurality of first heating wires in the third heating section and the plurality of first heating wires in the fourth heating section are controlled independently of each other.
6. The heating furnace according to claim 5, characterized in that: The plurality of first heating wires in the first heating section constitute a first heating group, the plurality of first heating wires in the second heating section constitute a second heating group, the plurality of first heating wires in the third heating section constitute a third heating group, and the plurality of first heating wires in the fourth heating section constitute a fourth heating group; the first heating group, the second heating group, the third heating group, and the fourth heating group are connected in parallel with each other.
7. The heating furnace according to claim 4, characterized in that: The spacing between the first heating wires in the second heating section is smaller than the spacing between the first heating wires in the first heating section.
8. The heating furnace according to claim 1, characterized in that: The diameter of the first heating wire is between 2 mm and 3 mm; the first heating wire extends in a spiral or wavy shape.
9. The heating furnace according to claim 1, characterized in that: The diameter of the second heating wire is between 8 mm and 10 mm.
10. The heating furnace according to claim 1, characterized in that: The diameter of the first heating wire is smaller than the diameter of the second heating wire.