Highly sensitive multimodal flexible tactile sensor and sensor module integrating magnetic and pressure sensing

Abstract

This invention discloses a highly sensitive multimodal flexible tactile sensor and sensor module integrating magnetic and pressure sensing. The sensor module includes a flexible magnetic substrate, a flexible pressure sensor, a data acquisition unit, and a base, all integrally formed and arranged sequentially. By innovatively integrating the magnetic sensor and the flexible pressure sensor, and employing a combined sensor structure design and multimodal data fusion algorithm, this invention achieves multimodal, high-precision perception and rapid response to complex environmental information. Simultaneously, it solves the problem of low detection limit and wide measurement range incompatibility of magnetic sensors in a single mode, effectively improving the environmental adaptability and task execution capabilities of embodied intelligent robots, demonstrating significant technological innovation and application value.

Description

Technical Field

[0001] This utility model relates to the field of flexible sensor technology, specifically to a highly sensitive multimodal flexible tactile sensor and sensor module integrating magnetic and pressure sensing. Background Technology

[0002] Against the backdrop of rapid development in artificial intelligence and robotics, embodied intelligent robots, with their ability to simulate human perception and action, are demonstrating enormous application potential in fields such as intelligent manufacturing, medical rehabilitation, and service interaction. Tactile perception, as a key technology for robot interaction with the physical environment, directly affects its operational accuracy, safety, and intelligent decision-making capabilities.

[0003] However, existing robotic tactile sensing technologies still have many limitations. While traditional rigid tactile sensors offer high detection accuracy, they lack flexibility and adaptability, making it difficult to conform to complex curved surfaces and posing safety hazards in human-robot collaborative scenarios. Single-modal flexible pressure sensors can only sense single physical signals such as pressure or vibration, failing to comprehensively capture information such as the magnitude and direction of multidimensional forces. This results in insufficient robot recognition capabilities for multidimensional features such as object material, texture, and weight.

[0004] To overcome the aforementioned technical bottlenecks, it is urgent to develop a tactile sensor that can balance high sensitivity, multimodal sensing, wide range, and flexible adaptation, and to be equipped with an efficient data processing and intelligent decision-making system. Utility Model Content

[0005] The technical problem solved by this utility model is to provide a highly sensitive multimodal flexible tactile sensor and sensor module that can be applied to embodied intelligent robots and integrates magnetic and pressure sensing.

[0006] The technical solution adopted by this utility model to solve its technical problem is: A highly sensitive multimodal flexible tactile sensor integrating magnetic and pressure sensing includes a flexible magnetic substrate, a flexible pressure sensor, and a data acquisition unit that are arranged sequentially and integrally. The flexible magnetic substrate is a flexible substrate with magnetism, and a magnetic material layer for generating a magnetic field is disposed inside it. The data acquisition device includes a PCB circuit board, the flexible magnetic substrate and the flexible pressure sensor are sequentially disposed on the upper surface of the PCB circuit board, and several triaxial Hall sensors are disposed on the lower surface of the PCB circuit board in a regular arrangement. The triaxial Hall sensor includes three mutually perpendicular Hall elements capable of simultaneously measuring the magnetic field components in the X, Y, and Z axes. The magnetic material layer and the plurality of triaxial Hall sensors are arranged vertically to form a magnetic sensor array for three-dimensional force measurement and sensing. The three-dimensional force includes the magnitude and direction of the pressure, as well as the distribution of the pressure. The flexible pressure sensor is horizontally integrated between the flexible magnetic substrate and the upper surface of the PCB circuit board for large-range pressure measurement and sensing. The flexible pressure sensor includes an electrode layer and a sensing material layer. The electrode layer is arranged in an array on the upper surface of the PCB circuit board, and forms an electrode array on the upper surface of the PCB circuit board. The sensing material layer is disposed above and below the electrode layer, and is regularly arranged on the lower surface of the flexible magnetic substrate.

[0007] Furthermore, the flexible magnetic substrate includes a flexible substrate with a certain thickness and a microporous structure and / or a gradient hardness design, and the magnetic material layer is regularly integrated in the flexible substrate.

[0008] Furthermore, the flexible substrate includes a flexible upper substrate and a flexible lower substrate, and the magnetic material layer is regularly embedded inside the flexible upper substrate and the flexible lower substrate, or embedded in the microporous structure of the flexible substrate.

[0009] Furthermore, between the flexible magnetic substrate and the PCB circuit board, several elastic protrusions are regularly arranged for support and rebound.

[0010] Furthermore, the upper surface of the flexible magnetic substrate is regularly provided with patterned anti-slip stripes for anti-slip purposes.

[0011] A highly sensitive multimodal flexible tactile sensor module integrating magnetic and pressure sensing includes the aforementioned highly sensitive multimodal flexible tactile sensor, a signal processing module for signal acquisition, amplification, and filtering, a microprocessor for logic and function control, a power management module for voltage conversion and management, a low-power wireless communication module for signal transmission and wireless communication, and a base. The signal processing module, the microprocessor, the power management module, and the wireless communication module are integrated at the lower end of the acquisition circuit board to form a highly sensitive multimodal flexible tactile sensor with an integrated sensor controller module, or they can be independently mounted on another PCB circuit board to form an independent sensor controller module. The highly sensitive multimodal flexible tactile sensor is fixedly mounted on the upper end of the base, and the sensor controller module is located in the inner cavity of the base.

[0012] Furthermore, when the highly sensitive multimodal flexible tactile sensor is mounted and fixed on the base, the flexible magnetic substrate is positioned above the upper surface of the base.

[0013] Furthermore, it also includes a battery for providing power to the sensor module and an interface module for communication between the sensor module and the host computer; the battery is a rechargeable battery, and the interface module includes a USB female connector and a USB management chip. The sensor module can also charge the battery via a data cable and the USB female connector.

[0014] The beneficial effects of this utility model are:

[0015] 1. This utility model discloses a highly sensitive multimodal flexible tactile sensor integrating magnetic and pressure sensing. By innovatively integrating a magnetic sensor and a flexible pressure sensor, and combining the two-modal sensor combination structure design with a multimodal data fusion algorithm, it achieves multimodal, high-precision perception and rapid response to complex environmental information. Simultaneously, it solves the problem of low detection limit and wide measurement range incompatibility of magnetic sensors in a single mode, effectively improving the environmental adaptability and task execution capability of embodied intelligent robots, demonstrating significant technological innovation and application value.

[0016] 2. This utility model discloses a highly sensitive multimodal flexible tactile sensor that integrates a flexible magnetic material, a flexible pressure sensor, and a data acquisition unit. When a small pressure is applied to the device, the flexible magnetic material is compressed and undergoes displacement, generating a change in the magnetic field. The Hall element outputs a signal, while the flexible pressure sensor between the flexible magnetic substrate and the data acquisition unit does not output a signal. When the applied pressure increases, the flexible magnetic substrate reaches the trigger threshold. The pressure-sensitive characteristics of the nanomaterial convert the external pressure signal into an electrical signal output. The output electrical signal changes with the pressure applied to the sensor surface. Through a specific pressure-electrical signal relationship, the magnitude and direction of the pressure can be measured. The combination of the two sensors allows for compatibility between a low detection limit and a wide measurement range in a single device. Attached Figure Description

[0017] Figure 1 This is an exploded view of the sensor module of this utility model; Figure 2 for Figure 1 The combined state diagram; Figure 3 for Figure 2 Top view; Figure 4 for Figure 3 A cross-sectional view along the AA direction; in: 1. Flexible magnetic substrate; 11. Flexible upper substrate; 12. Magnetic material; 13. Flexible lower substrate; 1101. Anti-slip stripes; 21. Electrode layer; 22. Sensing material layer; 23. Flexible adhesive layer; 3. Data acquisition unit; 31. PCB circuit board; 32. Hall element; 33. Data processing unit; 4. Base, 401. Inner cavity, 402. Sensor mounting base, 403. Data interface. Detailed Implementation

[0018] To make the above-mentioned contents, objectives, and beneficial effects of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a full understanding of this utility model. However, this utility model can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this utility model. Therefore, this utility model is not limited to the specific embodiments disclosed below.

[0019] It should be noted that, unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0020] like Figure 1-4 As shown, this utility model provides a highly sensitive multimodal flexible tactile sensor that integrates magnetic and pressure sensing, including a flexible magnetic substrate 1, a flexible pressure sensor, and a data acquisition unit 3 arranged in a regular sequence.

[0021] The flexible magnetic substrate 1 is a flexible substrate with magnetism, and magnetic material 12 is regularly arranged inside the flexible substrate. The data acquisition unit 3 includes a PCB circuit board 31 and several groups of Hall elements 32 regularly arranged on the lower surface of the PCB circuit board 31. The magnetic material 12 and the several groups of Hall elements 32 form a magnetic sensor array for the measurement and sensing of three-dimensional force, that is, the measurement and sensing of pressure magnitude and direction, as well as pressure distribution. Flexible pressure sensors are regularly integrated between the flexible magnetic substrate 1 and the upper surface of the PCB circuit board 31 for large-range pressure measurement and sensing.

[0022] The working principle of the sensor of this utility model is as follows: A magnetic sensor array is formed by vertically arranging several magnetic materials 12 and several groups of Hall elements 32; a flexible pressure sensor array is formed by horizontally arranging flexible pressure sensors. By vertically integrating the magnetic sensor array and the flexible pressure sensor array, a highly sensitive multimodal three-dimensional array is formed.

[0023] When a small pressure is applied to the sensor device (i.e., pressure is applied to the flexible magnetic substrate 1), the magnetic material 12 inside the flexible magnetic substrate 1 is compressed and undergoes displacement, generating a change in the magnetic field. Several sets of Hall elements 32 can detect and output signals with high sensitivity, measuring the magnitude and direction of the pressure on the flexible magnetic substrate, as well as the pressure distribution pattern. At this time, the flexible pressure sensor has not reached the trigger threshold and does not output a signal.

[0024] When the pressure applied to the sensor increases, the flexible pressure sensor reaches the trigger threshold. The pressure-sensitive properties of the nanomaterial convert the external pressure signal into an electrical signal output. The output electrical signal changes with the pressure applied to the surface of the sensor. Through a specific pressure-electrical signal relationship, the magnitude of the pressure and the pressure distribution spectrum over a large range can be measured.

[0025] This invention combines two sensors to create a multimodal flexible tactile sensor that is compatible with high sensitivity and wide measurement range, as well as pressure magnitude, direction, and pressure distribution patterns. Through the synergistic effect of flexible magnetic materials and a flexible pressure sensor, dual-modal output of magnetic and pressure signals is achieved. Compared to traditional single-modal sensors, it can acquire richer tactile information, improve sensing sensitivity, broaden the detection range, and realize the perception of multi-dimensional information such as the magnitude and direction of contact force, dynamic characteristics, and object material.

[0026] This invention proposes a highly sensitive multimodal flexible tactile sensor for embodied intelligent robots. Through the innovative integration of a magnetic sensor and a flexible pressure sensor, along with a combined sensor structure design and multimodal data fusion algorithm, it achieves multimodal, high-precision perception and rapid response to complex environmental information. Simultaneously, it solves the problem of low detection limit and wide measurement range incompatibility of magnetic sensors in a single mode, effectively improving the environmental adaptability and task execution capabilities of embodied intelligent robots, demonstrating significant technological innovation and application value.

[0027] Furthermore, each group of Hall elements 32 contains three mutually perpendicular Hall elements, corresponding to the X-axis, Y-axis, and Z-axis directions respectively, thus enabling the simultaneous measurement of magnetic field components in all three directions. The three mutually perpendicular Hall elements form a triaxial Hall sensor. By establishing a mathematical model and algorithm, the magnetic field changes detected by the Hall sensor are correlated with the applied three-dimensional force. Based on the magnitude and direction of the magnetic field changes, the magnitude and direction of the force applied to the sensor are calculated.

[0028] like Figure 1 As shown, in one embodiment, the flexible pressure sensor includes an electrode layer 21 and a sensing material layer 22. The electrode layer 21 and the sensing material layer 22 are in contact under force to generate an electrical signal. The electrode layer 21 is integrated and arranged in an array on the upper surface of the PCB circuit board 31, forming an electrode array on the upper surface of the PCB circuit board 31. The sensing material layer 22 is disposed above and below the electrode layer 21 and is regularly integrated on the lower surface of the flexible magnetic substrate 1.

[0029] Furthermore, such as Figure 1 and Figure 4 As shown, the flexible magnetic substrate 1 is bonded and fixed to the upper surface of the PCB circuit board 31 by an adhesive layer 23. The adhesive layer 23 is disposed along the edge of the flexible magnetic substrate 1 and the PCB circuit board 31, thus serving as a spacer layer to separate the flexible magnetic substrate 1 from the PCB circuit board 31 vertically, and forming an inner cavity between the flexible magnetic substrate 1 and the PCB circuit board 31. The electrode layer 21 and the sensing material layer 22 are sealed in the inner cavity between the flexible magnetic substrate and the PCB circuit board.

[0030] Furthermore, several elastic protrusions can be regularly arranged between the flexible magnetic substrate 1 and the PCB circuit board. The arrangement of these elastic protrusions serves two purposes: firstly, it can separate the electrode layer from the sensing material layer; secondly, it can provide a certain elasticity, thereby quickly separating the electrode layer from the sensing material layer.

[0031] like Figure 1 As shown, in one embodiment, the flexible magnetic substrate 1 includes a flexible upper substrate 11, a plurality of magnetic materials 12, and a flexible lower substrate 13. The plurality of magnetic materials 12 are regularly disposed within the flexible upper and lower substrates (11, 13). The flexible upper and lower substrates (11, 13) are integrally formed by a low-temperature hot-pressing process to form the flexible magnetic substrate 1, achieving a balance of "flexibility-sensitivity-integration," thus making it suitable for applications such as wearable devices and minimally invasive surgical instruments where thickness is sensitive.

[0032] The magnetic material 12 is integrated into the interior of the flexible substrate. On the one hand, this can prevent the magnetic material from falling off and affecting the test results of the magnetic sensor. On the other hand, the flexible substrate can act as a buffer protective layer to prevent the magnetic material 12 from crushing the flexible pressure sensor due to excessive force, which would affect the test results of the flexible pressure sensor or even cause the flexible pressure sensor to break and fail.

[0033] Furthermore, the magnetic material 12 employs micromagnets or flexible bonded magnets (such as ferrite / rubber composite magnets). The shape of the magnetic material 12 is not limited, and may include, but is not limited to, cylindrical, cubic, or other irregularly shaped structures, with length and width dimensions of 10μm-1000μm and height of 10μm-2000μm. The micromagnets or flexible bonded magnets can maintain magnetism while achieving bendability. The magnetic material 12 is integrated within the flexible upper and lower substrates (11, 13), forming a "flexible magnetic-force coupling unit" together with them.

[0034] Furthermore, the flexible upper and lower substrates (11, 13) are made of soft materials with a certain thickness. The substrate material is preferably made of soft and deformable materials such as silicone, soft rubber, organic zero-degree cotton, and memory foam, with a thickness of 0.05-2mm.

[0035] Furthermore, the flexible upper and lower substrates (11, 13) are flexible substrates with microporous structures and / or gradient hardness. Their microporous structures or gradient hardness design can amplify the deformation transmission efficiency caused by pressure, enabling the sensor to have high sensitivity to micro-pressure. Simultaneously, the flexible upper and lower substrate materials possess good mechanical durability and can be adapted to complex curved surfaces. Specifically, the gradient hardness flexible upper and lower substrates are achieved by controlling the polymer content in the flexible upper and lower substrates, resulting in a gradual decrease in modulus from bottom to top.

[0036] like Figure 1 and Figure 4 As shown, a magnetic sensor array is formed by vertically arranging several magnetic materials 12 and several groups of Hall elements 32; a flexible pressure sensor array is formed by horizontally arranging an electrode array (electrode layer 21) and a sensing material layer 22. By vertically integrating the magnetic sensor array and the flexible pressure sensor array, a highly sensitive multimodal three-dimensional array (a magnetic sensor array in the vertical direction and a flexible pressure sensor array in the horizontal direction) is formed, thereby enabling real-time reconstruction of pressure distribution patterns (such as object contours, stress concentration points on contact surfaces, etc.).

[0037] Compared to the spatial perception capability of single-point sensors, the magnetic sensing unit of this application can realize three-dimensional mapping of spatial pressure distribution. When external pressure is applied to the flexible magnetic substrate 1, the deformation of the flexible substrate causes the magnet layer (magnetic material 12) to shift, causing the magnetic field distribution of the magnet layer to change, thereby realizing real-time reconstruction of the spatial pressure distribution.

[0038] Furthermore, such as Figure 2 As shown, patterned anti-slip stripes 1101 are regularly arranged on the upper surface of the flexible magnetic substrate 1.

[0039] like Figure 1 and Figure 4 As shown, when external pressure is applied to the flexible magnetic substrate 1, the sensing material layer 22 on the lower surface of the flexible magnetic substrate 1 and the electrode layer 21 on the upper surface of the collector 3 are in contact with each other, generating an electrical signal. As the pressure changes, the contact area between the sensing material layer 22 and the electrode layer 21 changes, the contact resistance value changes, and the corresponding electrical signal also changes.

[0040] This invention discloses a highly sensitive multimodal flexible tactile sensor integrating magnetic and pressure sensing. A flexible magnetic material 1, a flexible pressure sensor, and a data acquisition unit 3 are integrated into a single unit to form the highly sensitive multimodal flexible tactile sensor. When a small pressure is applied to the device, the flexible magnetic material 1 is compressed and undergoes displacement, generating a change in the magnetic field. Several sets of Hall elements output signals, while the flexible pressure sensor between the flexible magnetic substrate 1 and the data acquisition unit 3 does not output a signal. When the applied pressure increases, the flexible pressure sensor below the flexible magnetic substrate 1 reaches its trigger threshold. The pressure-sensitive characteristics of the nanomaterial convert the external pressure signal into an electrical signal output. The output electrical signal changes with the pressure applied to the sensor surface. Through a specific pressure-electrical signal relationship, the magnitude and direction of the pressure can be measured. The combination of these two sensors allows the sensor to be compatible with both a low detection limit and a wide measurement range.

[0041] This invention discloses a highly sensitive multimodal flexible tactile sensor integrating magnetic and pressure sensing capabilities. It possesses multimodal sensing capabilities: through the synergistic effect of magnetic materials and a flexible pressure sensor, it achieves dual-modal output of magnetic and pressure signals. Compared to traditional single-modal sensors, it can acquire richer tactile information, improve sensing sensitivity, broaden the detection range, and realize the perception of multidimensional information such as the magnitude, direction, dynamic characteristics, and material properties of contact force. It also exhibits higher environmental interference resistance.

[0042] Furthermore, such as Figure 1As shown, the data acquisition device 3 includes a PCB circuit board 31 with a thickness of 0.5mm-5mm. Electrode layers are regularly arranged on the upper surface of the PCB circuit board 31, and several groups of Hall elements 32 are regularly arranged on the lower surface of the PCB circuit board 31.

[0043] Furthermore, PCB circuit board 31 can also be a flexible PCB circuit board.

[0044] Furthermore, in one embodiment, the lower surface of the PCB circuit board 31 also integrates a signal processing module 33 (ADC unit, amplification unit and filtering unit) for signal acquisition, amplification and filtering, a microprocessor for logic and function control, a power management module for voltage conversion and management, and a low-power wireless communication module for signal transmission and wireless communication.

[0045] Furthermore, in one embodiment, the lower surface of the PCB circuit board 31 also integrates a battery for providing operating power and an interface module for charging, discharging, and / or data transmission. The interface module includes a USB female connector and a USB management chip. Preferably, a rechargeable battery is used, and a USB-C female connector is selected for easy electrical connection to a power adapter via a USB-C data cable, thereby charging the battery through the power adapter and the USB-C data cable; or communicating with a host computer via the USB-C data cable.

[0046] Furthermore, the microprocessor selected is a microprocessor with integrated wireless functionality.

[0047] Furthermore, the aforementioned microprocessor, signal processing module, power management module, wireless communication module, interface module, etc., can also be separately mounted on another PCB circuit board and integrated into the base 4 to form a highly sensitive multimodal flexible tactile sensor module with integrated magnetic and pressure sensing according to this utility model.

[0048] Several sets of Hall elements 32 are used to detect the magnetic field strength and distribution changes of the magnet layer. The signal processing module is electrically connected to the flexible sensor and the power supply. The signal processing circuit includes a differential amplifier circuit, an A / D conversion circuit, etc., which can process the electrical signal of the flexible pressure sensor and the magnetic signal detected by the Hall elements. After filtering, amplification and other processing by the analog circuit inside the signal processing module, the signal is converted into a digital signal. A dedicated algorithm is used to analyze and process the data. Then, the data is exchanged with the terminal (mobile APP, computer, etc.) through wireless transmission (low power Bluetooth, Wifi, 5G, etc.) to synchronize the measurement results to the terminal for visualization and management.

[0049] This invention discloses a highly sensitive multimodal flexible tactile sensor integrating magnetic and pressure sensing. Through PCB layer (PCB circuit board) circuit design, multiple "magnetic-pressure" sensing units can be integrated to form a three-dimensional array, realizing distributed sensing and real-time reconstruction of spatial pressure distribution maps. It also expands the communication protocol data frame and adds a three-axis magnetic flux (x, y, z) data stream to the magnetic sensing channel. It exhibits strong environmental adaptability; the PCB layer uses magnetic signals for real-time calibration, eliminating the need for additional reference sensors and reducing system complexity.

[0050] like Figure 1-4 As shown, this utility model also provides a highly sensitive multimodal flexible tactile sensor module integrating magnetic and pressure sensing, including the aforementioned highly sensitive multimodal flexible tactile sensor and base 4, with the highly sensitive multimodal flexible tactile sensor mounted on the upper end of the base 4.

[0051] Furthermore, the upper end of the base 4 is regularly provided with an inner cavity 401 for mounting the collector 3 and accommodating components on the lower surface of the collector. The inner wall of the inner cavity 401 is regularly provided with a sensor mounting base 402 for mounting the high-sensitivity multimodal flexible tactile sensor. The structure of the sensor mounting base 402 is not limited and can be, for example... Figure 1 The high-sensitivity multimodal flexible tactile sensor is mounted and fixed on the support step inside the base 4, as shown. When the high-sensitivity multimodal flexible tactile sensor is mounted and fixed at the upper end of the inner cavity 401, its flexible magnetic substrate 1 protrudes above the upper surface of the base 4, thus facilitating its contact with objects and signal acquisition.

[0052] Furthermore, the high-sensitivity multimodal flexible tactile sensor can be fixed to the base 4 using fasteners such as screws, or by magnetic attraction to adsorb and fix the high-sensitivity multimodal flexible tactile sensor to the upper end of the base 4, or by adhesive bonding, or by using elastic straps, cable ties, or other accessories to secure the high-sensitivity multimodal flexible tactile sensor to the upper end of the base 4.

[0053] When magnetic fixation is used, several small magnets or flexible magnetic sheets that attract each other are regularly set at the corners and / or edges of the sensor mounting base 402 inside the PCB circuit board of the collector and the base 4, so as to adsorb and fix the highly sensitive multimodal flexible tactile sensor to the upper end of the base 4.

[0054] Furthermore, the sealing treatment between the base 4 and the high-sensitivity multimodal flexible tactile sensor can be achieved by reasonably setting a sealing structure between the base 4 and the high-sensitivity multimodal flexible tactile sensor and sealing it with a sealing component, or by using a potting process to pot the components on the lower surface of the collector 3 for sealing treatment.

[0055] Furthermore, the base 4 has regular openings at the USB female connector of the data collector 3 to form the data interface 403 of the sensor.

[0056] Furthermore, integrating a highly sensitive multimodal flexible tactile sensor module onto an embodied intelligent robot can enable the robot to have highly sensitive perception of three-dimensional forces.

[0057] The specific embodiments described above further illustrate the purpose, technical solution, and beneficial effects of this utility model. It should be understood that the above descriptions are merely specific embodiments of this utility model and are not intended to limit this utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A high-sensitivity multi-modal flexible tactile sensor integrated with magnetic and pressure sensing, characterized by: It includes a flexible magnetic substrate, a flexible pressure sensor, and a data acquisition unit, which are arranged sequentially and integrally. The flexible magnetic substrate is a flexible substrate with magnetism, and a magnetic material layer for generating a magnetic field is disposed inside it. The data acquisition device includes a PCB circuit board, the flexible magnetic substrate and the flexible pressure sensor are sequentially disposed on the upper surface of the PCB circuit board, and several triaxial Hall sensors are disposed on the lower surface of the PCB circuit board in a regular arrangement. The triaxial Hall sensor includes three mutually perpendicular Hall elements capable of simultaneously measuring the magnetic field components in the X, Y, and Z axes. The magnetic material layer and the plurality of triaxial Hall sensors are arranged vertically to form a magnetic sensor array for three-dimensional force measurement and sensing. The three-dimensional force includes the magnitude and direction of the pressure, as well as the distribution of the pressure. The flexible pressure sensor is horizontally integrated between the flexible magnetic substrate and the upper surface of the PCB circuit board for large-range pressure measurement and sensing. The flexible pressure sensor includes an electrode layer and a sensing material layer. The electrode layer is arranged in an array on the upper surface of the PCB circuit board, and forms an electrode array on the upper surface of the PCB circuit board. The sensing material layer is disposed above and below the electrode layer, and is regularly arranged on the lower surface of the flexible magnetic substrate. 2.The high-sensitivity multi-modal flexible tactile sensor integrated with magnetic and pressure sensing of claim 1, wherein: The flexible magnetic substrate includes a flexible substrate with a certain thickness and a microporous structure and / or a gradient hardness design, and the magnetic material layer is regularly integrated in the flexible substrate.

3. The highly sensitive multimodal flexible tactile sensor integrating magnetic and pressure sensing according to claim 2, characterized in that: The flexible substrate includes a flexible upper substrate and a flexible lower substrate, and the magnetic material layer is regularly embedded inside the flexible upper substrate and the flexible lower substrate, or embedded in the microporous structure of the flexible substrate.

4. The highly sensitive multimodal flexible tactile sensor integrating magnetic and pressure sensing according to claim 1, characterized in that: Between the flexible magnetic substrate and the PCB circuit board, there are several elastic protrusions regularly arranged for support and rebound.

5. The highly sensitive multimodal flexible tactile sensor integrating magnetic and pressure sensing according to claim 1, characterized in that: The upper surface of the flexible magnetic substrate is regularly provided with patterned anti-slip stripes for anti-slip purposes.

6. A highly sensitive multimodal flexible tactile sensor module integrating magnetic and pressure sensing, characterized in that: The device includes a high-sensitivity multimodal flexible tactile sensor as described in any one of claims 1-5, a signal processing module for signal acquisition, amplification, and filtering, a microprocessor for logic and function control, a power management module for voltage conversion and management, a low-power wireless communication module for signal transmission and wireless communication, and a base; the signal processing module, the microprocessor, the power management module, and the wireless communication module are integrated at the lower end of the acquisition circuit board to form a high-sensitivity multimodal flexible tactile sensor with an integrated sensor controller module, or they can be independently mounted on another PCB circuit board to form an independent sensor controller module; The highly sensitive multimodal flexible tactile sensor is fixedly mounted on the upper end of the base, and the sensor controller module is located in the inner cavity of the base.

7. The highly sensitive multimodal flexible tactile sensor module integrating magnetic and pressure sensing according to claim 6, characterized in that: When the highly sensitive multimodal flexible tactile sensor is mounted and fixed on the base, the flexible magnetic substrate is positioned above the upper surface of the base.

8. The highly sensitive multimodal flexible tactile sensor module integrating magnetic and pressure sensing according to claim 6, characterized in that: It also includes a battery for providing power to the sensor module and an interface module for communication between the sensor module and the host computer; the battery is a rechargeable battery, and the interface module includes a USB female connector and a USB management chip. The sensor module can also charge the battery via a data cable and the USB female connector.

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