differential pressure sensor
By improving the substrate, isolation diaphragm, and oil circuit structure of the differential pressure sensor, the problems of easy breakage and high machining accuracy of existing differential pressure sensors under vibration environment have been solved, achieving higher measurement accuracy and service life.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- SHANGHAI LEEG INSTR CO LTD
- Filing Date
- 2025-08-08
- Publication Date
- 2026-07-31
AI Technical Summary
Existing differential pressure sensors are prone to breakage under vibration, require high processing precision, resulting in poor measurement accuracy and reliability. Incomplete stress relief of the central diaphragm affects the zero point position and test accuracy.
The design incorporates a substrate, isolation diaphragm, cup holder, conduit, central diaphragm, and oil circuit structure. The isolation diaphragm receives pressure and transmits it to the central diaphragm. The oil circuit structure is simplified, and vibration energy is absorbed through the conduit, reducing the requirements for machining accuracy and improving measurement accuracy and stability.
It reduces the difficulty and cost of parts processing, improves the measurement accuracy and service life of differential pressure sensors, and enhances vibration resistance and measurement reliability.
Smart Images
Figure CN224581055U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of sensor technology, and in particular to a differential pressure sensor. Background Technology
[0002] Differential pressure sensors are used to monitor pressure differences in oil systems and are widely used in industries such as manufacturing, automotive, and refrigeration. However, existing differential pressure sensors have many defects and problems.
[0003] like Figure 1 As shown, existing differential pressure sensors typically employ a rigid welding method between the cup holder 4 and the substrate 1 to ensure the overall structural strength. However, this welding structure is insufficient in terms of vibration resistance. Under vibration, the packaging structure is prone to breakage, thus affecting the service life and stability of the differential pressure sensor. Furthermore, the pressure transmission of the differential pressure sensor mainly occurs through an annular oil passage 42 within the cup holder 4 to form a negative pressure end oil passage. The design of the annular oil passage 42 requires high precision in component machining; even slight differences can lead to uneven pressure transmission, thereby affecting the sensor's measurement accuracy and reliability. In addition, the central diaphragm 7 of existing differential pressure sensors often uses a flat diaphragm structure. This results in incomplete stress relief after a large pressure overload, preventing the central diaphragm 7 from returning to its original position. This not only alters the zero-point position of the differential pressure sensor but also affects the testing accuracy.
[0004] Therefore, there is an urgent need for a differential pressure sensor to solve the above-mentioned technical problems. Utility Model Content
[0005] The purpose of this invention is to provide a differential pressure sensor that can reduce processing precision and cost while improving its measurement accuracy and service life.
[0006] To achieve this objective, the present invention adopts the following technical solution:
[0007] A differential pressure sensor, comprising:
[0008] Matrix;
[0009] The first isolation membrane and the second isolation membrane are respectively disposed on both sides of the substrate;
[0010] A cup holder and a conduit, wherein the cup holder is connected to the substrate via the conduit, and a chip is disposed within the cup holder;
[0011] A central diaphragm, embedded within the matrix, is used to receive pressure from the first and second isolation diaphragms.
[0012] A first oil passage and a second oil passage, wherein one end of the first oil passage is connected to the positive pressure side of the chip and the other end is connected to one side of the central diaphragm, and one end of the second oil passage is connected to the negative pressure side of the chip and the other end is connected to the other side of the central diaphragm, and the interior of the conduit forms part of the first oil passage and part of the second oil passage.
[0013] Optionally, both the first and second isolation films have grooves on the side facing the substrate.
[0014] Optionally, the grooves are distributed radially or in a grid pattern.
[0015] Optionally, the cup holder is inclined relative to the base, and the central axis of the cup holder is set at an angle to the central axis of the base.
[0016] Optionally, the surface of the central diaphragm is provided with a corrugated structure.
[0017] Optionally, the cup holder is provided with an openable and closable oil filling hole, which is connected to the second oil passage.
[0018] Optionally, a sealed first oil-filled cavity is formed between the first isolation diaphragm and the substrate, a sealed second oil-filled cavity is formed between the second isolation diaphragm and the substrate, and a sealed third oil-filled cavity and a fourth oil-filled cavity are formed between the two sides of the central diaphragm and the substrate, respectively. The third oil-filled cavity is connected to the first oil-filled cavity, and the fourth oil-filled cavity is connected to the second oil-filled cavity.
[0019] Optionally, the substrate is provided with a third oil passage and a fourth oil passage, the first oil-filling chamber is connected to the third oil-filling chamber through the third oil passage, and the second oil-filling chamber is connected to the fourth oil-filling chamber through the fourth oil passage.
[0020] Optionally, the third oil circuit is provided with a first branch that can be connected to the outside, and the fourth oil circuit is provided with a second branch that can be connected to the outside. Both the first branch and the second branch are provided with an oil sealing element at the end connected to the outside.
[0021] Optionally, the differential pressure sensor further includes a locking element, which is detachably connected to the base and configured to abut against the sealing element.
[0022] The beneficial effects of this utility model are:
[0023] This invention provides a differential pressure sensor, comprising a substrate, a first isolation diaphragm, a second isolation diaphragm, a cup holder, a conduit, a chip, a central diaphragm, a first oil passage, and a second oil passage. The first and second isolation diaphragms are respectively disposed on opposite sides of the substrate, and the central diaphragm is embedded within the substrate to receive pressure from the first and second isolation diaphragms. The first and second isolation diaphragms then transmit the high and low pressures in the oil passage system to the two sides of the central diaphragm, respectively. The central diaphragm deforms under the pressure difference. One end of the first oil passage is connected to the positive pressure side of the chip within the cup holder, and the other end is connected to one side of the central diaphragm. One end of the second oil passage is connected to the negative pressure side of the chip, and the other end is connected to the other side of the central diaphragm. The central diaphragm directly transmits the pressure signal to both sides of the chip through the first and second oil passages, thereby achieving differential pressure measurement. Compared to existing annular oil passage designs, the oil passage structure design of this application reduces the requirements for component machining accuracy and avoids the problem of poor pressure transmission due to differences in machining accuracy, which is beneficial to improving the measurement accuracy and reliability of the differential pressure sensor. Furthermore, the cup holder is connected to the base via a conduit, the interior of which forms part of a first oil passage and part of a second oil passage. The conduit not only absorbs energy from vibration environments to prevent breakage between the cup holder and the base due to rigid connection, thus improving the service life and stability of the differential pressure sensor, but also simplifies the oil circuitry, reducing processing difficulty and cost. Through these features, the differential pressure sensor of this application can reduce processing precision and cost while improving its measurement accuracy and service life. Attached Figure Description
[0024] Figure 1 This is a schematic diagram of an existing differential pressure sensor;
[0025] Figure 2 This is a schematic diagram of the differential pressure sensor provided in an embodiment of the present invention;
[0026] Figure 3 yes Figure 2 A magnified view of a section at point A in the middle;
[0027] Figure 4 This is a first schematic diagram of the engraving provided in this embodiment of the utility model;
[0028] Figure 5 This is a second schematic diagram of the engraving provided in this embodiment of the utility model.
[0029] In the picture:
[0030] 1. Substrate; 11. Third oil passage; 111. First branch; 12. Fourth oil passage; 121. Second branch; 2. First isolation diaphragm; 21. Score; 22. First oil filling chamber; 3. Second isolation diaphragm; 31. Second oil filling chamber; 4. Cup seat; 41. Oil injection hole; 42. Annular oil passage; 5. Conduit; 6. Chip; 7. Central diaphragm; 71. Third oil filling chamber; 72. Fourth oil filling chamber; 8. First oil passage; 9. Second oil passage; 10. Oil sealing component; 20. Locking component. Detailed Implementation
[0031] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, the accompanying drawings show only the parts relevant to the present invention, not the entire structure.
[0032] In the description of this utility model, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.
[0033] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.
[0034] In the description of this embodiment, the terms "upper," "lower," "right," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first" and "second" are only used for distinction in description and have no special meaning.
[0035] Differential pressure sensors are used to monitor pressure differences in oil systems and are widely used in industries such as manufacturing, automotive, and refrigeration. However, existing differential pressure sensors have many defects and problems.
[0036] like Figure 1 As shown, existing differential pressure sensors typically employ a rigid welding method between the cup holder 4 and the substrate 1 to ensure the overall structural strength. However, this welding structure is insufficient in terms of vibration resistance. Under vibration, the packaging structure is prone to breakage, thus affecting the service life and stability of the differential pressure sensor. Furthermore, the pressure transmission of the differential pressure sensor mainly occurs through an annular oil passage 42 within the cup holder 4 to form a negative pressure end oil passage. The design of the annular oil passage 42 requires high precision in component machining; even slight differences can lead to uneven pressure transmission, thereby affecting the sensor's measurement accuracy and reliability. In addition, the central diaphragm 7 of existing differential pressure sensors often uses a flat diaphragm structure. This results in incomplete stress relief after a large pressure overload, preventing the central diaphragm 7 from returning to its original position. This not only alters the zero-point position of the differential pressure sensor but also affects the testing accuracy.
[0037] Therefore, there is an urgent need for a differential pressure sensor to solve the above-mentioned technical problems.
[0038] like Figures 1-5 As shown, this embodiment provides a differential pressure sensor, which includes a substrate 1, a first isolation diaphragm 2, a second isolation diaphragm 3, a cup holder 4, a conduit 5, a chip 6, a central diaphragm 7, a first oil passage 8, and a second oil passage 9. The first isolation diaphragm 2 and the second isolation diaphragm 3 are respectively disposed on both sides of the substrate 1. The cup holder 4 is connected to the substrate 1 through the conduit 5. The chip 6 is disposed inside the cup holder 4. The central diaphragm 7 is embedded in the substrate 1 and is used to receive the pressure received by the first isolation diaphragm 2 and the second isolation diaphragm 3. One end of the first oil passage 8 is connected to the positive pressure side of the chip 6, and the other end is connected to one side of the central diaphragm 7. One end of the second oil passage 9 is connected to the negative pressure side of the chip 6, and the other end is connected to the other side of the central diaphragm 7. The conduit 5 forms part of the first oil passage 8 and part of the second oil passage 9.
[0039] In this embodiment, the first isolation diaphragm 2 and the second isolation diaphragm 3 are respectively disposed on both sides of the substrate 1, and the central diaphragm 7 is embedded in the substrate 1 to receive the pressure received by the first isolation diaphragm 2 and the second isolation diaphragm 3. The first isolation diaphragm 2 and the second isolation diaphragm 3 then transmit the high pressure and low pressure in the oil circuit system to both sides of the central diaphragm 7, respectively. The central diaphragm 7 deforms under the pressure difference. Since one end of the first oil circuit 8 is connected to the positive pressure side of the chip 6 in the cup holder 4, and the other end is connected to one side of the central diaphragm 7, and one end of the second oil circuit 9 is connected to the negative pressure side of the chip 6, and the other end is connected to the other side of the central diaphragm 7, the central diaphragm 7 directly transmits the pressure signal to both sides of the chip 6 through the first oil circuit 8 and the second oil circuit 9, thereby realizing differential pressure measurement. Compared with the existing annular oil circuit 42 design, the oil circuit structure design of this application reduces the requirements for the machining accuracy of the parts, avoids the problem of poor pressure transmission due to differences in machining accuracy, and is beneficial to improving the measurement accuracy and reliability of the differential pressure sensor. Furthermore, the cup holder 4 is connected to the base 1 via a conduit 5. The conduit 5 forms part of a first oil passage 8 and part of a second oil passage 9. The conduit 5 not only absorbs energy from vibration environments to prevent breakage between the cup holder 4 and the base 1 due to rigid connection, thus improving the service life and stability of the differential pressure sensor, but also simplifies the oil circuit, reducing processing difficulty and cost. Through the above configuration, the differential pressure sensor of this embodiment can reduce processing precision and cost while improving its measurement accuracy and service life.
[0040] It should be noted that the positive pressure side and negative pressure side of chip 6 refer to the two different pressure input terminals used by chip 6 to sense pressure signals. The positive pressure side is the side of chip 6 used to receive higher pressure signals, while the negative pressure side is the side of chip 6 used to receive lower pressure signals. Further explanation is not provided here.
[0041] Furthermore, by embedding the central diaphragm 7 within the substrate 1, the central diaphragm 7 can be protected, preventing it from directly contacting the outside environment and causing corrosion, which is beneficial for increasing the diversity of materials available for the central diaphragm 7.
[0042] The specific structure of the differential pressure sensor is described below:
[0043] Specifically, such as Figure 2 , Figure 4 and Figure 5As shown, both the first isolation diaphragm 2 and the second isolation diaphragm 3 have grooves 21 (illustrated for illustrative purposes only) on the side facing the substrate 1. These grooves effectively disperse the pressure on the first isolation diaphragm 2 and the second isolation diaphragm 3 (hereinafter referred to as "diaphragms"), making the stress distribution more uniform. This helps extend the service life of the diaphragms and improves the reliability of the differential pressure sensor. Moreover, by setting the grooves 21, it helps reduce the local deformation of the diaphragms under pressure, avoiding measurement errors caused by excessive deformation of the diaphragms, and thus improving the measurement accuracy of the differential pressure sensor.
[0044] More specifically, the notches 21 are distributed radially or in a grid pattern, which can further optimize the stress dispersion effect. Radially distributed notches 21 can evenly disperse stress in multiple directions, avoiding excessive stress concentration in a specific direction; while grid-distributed notches 21 can form multiple tiny stress dispersion units, further enhancing the overall deformation resistance of the diaphragm. It is understood that those skilled in the art can adjust and improve the shape of the notches 21 based on the above to meet actual needs, and will not be elaborated further here.
[0045] Specifically, such as Figure 2 As shown, the cup holder 4 is tilted relative to the base 1, and the central axis of the cup holder 4 is set at an angle to the central axis of the base 1. This allows the chip 6 inside the cup holder 4 to better adapt to pressure input from different directions, reducing measurement errors caused by inconsistent pressure directions, thereby improving the measurement accuracy of the differential pressure sensor.
[0046] Specifically, such as Figure 2 As shown, the surface of the central diaphragm 7 has a corrugated structure to increase its resilience. Specifically, the central diaphragm 7 has multiple raised and recessed annular grooves arranged at intervals along its radial direction, and both the raised and recessed annular grooves extend circumferentially along the central diaphragm 7, thereby improving the resilience of the central diaphragm 7 and facilitating the uniform distribution of pressure. When the central diaphragm 7 is deformed under pressure, it can quickly return to its original state, avoiding zero-point drift caused by incomplete diaphragm deformation, thus improving the measurement accuracy of the differential pressure sensor and ensuring stable performance during multiple measurements.
[0047] It should be noted that in this embodiment, when a large pressure is applied to the first isolation diaphragm 2 in the oil circuit system, the grooved structure 21 on the first isolation diaphragm 2 can effectively disperse the stress, and the corrugated structure on the central diaphragm 7 enhances its reverse deformation capability, enabling it to better adapt to pressure changes. Through the above configuration, the first isolation diaphragm 2 can absorb more silicone oil expansion, reduce edge tension, and avoid excessive deformation or damage to the diaphragm due to silicone oil expansion. This not only improves the stability of the differential pressure sensor under high pressure conditions but also reduces measurement errors caused by uneven diaphragm deformation, thereby further improving the sensor's measurement accuracy and reliability.
[0048] Specifically, such as Figure 2 As shown, the cup holder 4 is provided with an openable and closable oil filling hole 41, which is connected to the second oil passage 9 to facilitate oil filling operation. During operation, the operator can more conveniently inject silicone oil into the differential pressure sensor through the oil filling hole 41.
[0049] Specifically, such as Figure 2 and Figure 3 As shown, a sealed first oil-filled cavity 22 is formed between the first isolation diaphragm 2 and the substrate 1, and a sealed second oil-filled cavity 31 is formed between the second isolation diaphragm 3 and the substrate 1. Separate and sealed third oil-filled cavities 71 and fourth oil-filled cavities 72 are formed between the two sides of the central diaphragm 7 and the substrate 1, respectively. The third oil-filled cavity 71 is connected to the first oil-filled cavity 22, and the fourth oil-filled cavity 72 is connected to the second oil-filled cavity 31. This ensures that the silicone oil inside the differential pressure sensor will not leak during pressure transmission, thus guaranteeing the stability and reliability of pressure transmission.
[0050] More specifically, the substrate 1 is provided with a third oil passage 11 and a fourth oil passage 12. The first oil filling chamber 22 is connected to the third oil filling chamber 71 through the third oil passage 11, and the second oil filling chamber 31 is connected to the fourth oil filling chamber 72 through the fourth oil passage 12. This optimizes the distribution and flow path of the silicone oil, ensuring that the silicone oil can be evenly distributed inside the differential pressure sensor and avoiding measurement errors caused by insufficient or excessive silicone oil in certain areas.
[0051] It is important to note that, such as Figure 1 and Figure 2As shown, in this embodiment, the substrate 1 is further provided with a fifth oil passage and a sixth oil passage. One end of the fifth oil passage is connected to the third oil filling chamber 71, and the other end of the fifth oil passage is connected to the positive pressure side of the chip 6 through a conduit 5 on one side of the cup holder 4. One end of the sixth oil passage is connected to the fourth oil filling chamber 72, and the other end of the sixth oil passage is connected to the negative pressure side of the chip 6 through a conduit 5 on the other side of the cup holder 4. It can be understood that the fifth oil passage and the conduit 5 on one side of the cup holder 4 form the first oil passage 8, and the sixth oil passage and the conduit 5 on the other side of the cup holder 4 form the second oil passage 9. It can be understood that through the cooperation between the fifth oil passage, the sixth oil passage, and the conduit 5, the pressure transmission path can be further optimized. By setting the conduit 5, vibration energy can be absorbed to reduce the impact of vibration on pressure transmission, which is beneficial to improving the stability of the differential pressure sensor in a vibration environment. Moreover, the formation of part of the first oil passage 8 and part of the second oil passage 9 inside the conduit 5 simplifies the oil passage structure and reduces the processing difficulty and cost compared to the existing annular oil passage 42.
[0052] Specifically, such as Figure 2 As shown, the third oil circuit 11 is provided with a first branch 111 that can be connected to the outside, and the fourth oil circuit 12 is provided with a second branch 121 that can be connected to the outside. Both the first branch 111 and the second branch 121 are provided with an oil sealing element 10 at the end connected to the outside, which can effectively prevent silicone oil leakage, ensure the sealing of the differential pressure sensor, avoid damage or measurement error caused by silicone oil leakage, and thus improve the reliability and service life of the differential pressure sensor.
[0053] More specifically, in this embodiment, the oil sealing element 10 is a steel ball. The steel ball can seal the end of the first branch 111 and the second branch 121 that connects to the outside. The steel ball is not only simple in structure and easy to process, but also effectively prevents silicone oil leakage and ensures the sealing of the oil circuit. In other embodiments, the oil sealing element 10 is a copper pillar or an aluminum pillar, which can also achieve the sealing function. It is understood that the specific structure of the oil sealing element 10 is not limited, as long as it can achieve the above-mentioned functions.
[0054] Specifically, the differential pressure sensor also includes a locking member 20, which is detachably connected to the base 1 and configured to abut against the oil sealing member 10. The locking member 20 can firmly fix the oil sealing member 10 at the ends of the first branch 111 and the second branch 121, preventing the oil sealing member 10 from loosening or falling off during use.
[0055] The locking element 20 can be either a set screw or a screw, both of which can firmly fix the oil sealing element 10 in place. Moreover, set screws and screws are simple in structure, easy to manufacture, and low in cost, which can meet the production requirements of differential pressure sensors. Understandably, the specific structure of the locking element 20 is not limited, as long as it can achieve the above-mentioned functions.
[0056] It should be noted that the first isolation diaphragm 2, the second isolation diaphragm 3, and the central diaphragm 7 in this embodiment can be made of materials such as stainless steel and nickel-based alloys; the conduit 5 can be made of rigid components such as stainless steel tubes, copper tubes, aluminum tubes, and titanium alloy tubes; the chip 6 can be made of sensitive elements such as piezoresistive resistors, capacitive sensors, or strain gauges, and those skilled in the art are clear about the specific structure and working principle of the above components, so they will not be described in detail here.
[0057] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating the present utility model, and are not intended to limit the implementation of the present utility model. Those skilled in the art can make various obvious changes, readjustments, and substitutions without departing from the protection scope of this utility model. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.
Claims
1. Differential pressure sensor, characterized in that, include: Matrix (1); The first isolation membrane (2) and the second isolation membrane (3) are respectively disposed on both sides of the substrate (1); A cup holder (4) and a conduit (5), wherein the cup holder (4) is connected to the substrate (1) through the conduit (5), and a chip (6) is provided inside the cup holder (4); A central diaphragm (7) is embedded in the substrate (1) and is used to receive the pressure from the first isolation diaphragm (2) and the second isolation diaphragm (3); The first oil passage (8) and the second oil passage (9) are connected at one end to the positive pressure side of the chip (6) and at the other end to one side of the central diaphragm (7). The second oil passage (9) is connected at one end to the negative pressure side of the chip (6) and at the other end to the other side of the central diaphragm (7). The conduit (5) forms part of the first oil passage (8) and part of the second oil passage (9).
2. The differential pressure sensor of claim 1, wherein, Both the first isolation diaphragm (2) and the second isolation diaphragm (3) have grooves (21) on the side facing the substrate (1).
3. The differential pressure sensor of claim 2, wherein, The grooves (21) are distributed radially or in a grid pattern.
4. The differential pressure sensor of claim 1, wherein, The cup holder (4) is inclined relative to the base (1), and the central axis of the cup holder (4) is set at an angle to the central axis of the base (1).
5. The differential pressure sensor of claim 1, wherein, The surface of the central diaphragm (7) is provided with a corrugated structure.
6. The differential pressure sensor of claim 1, wherein, The cup holder (4) is provided with an openable and closable oil filling hole (41), which is connected to the second oil passage (9).
7. The differential pressure sensor according to any one of claims 1-6, characterized in that, A sealed first oil-filled cavity (22) is formed between the first isolation diaphragm (2) and the substrate (1), and a sealed second oil-filled cavity (31) is formed between the second isolation diaphragm (3) and the substrate (1). Separate and sealed third oil-filled cavities (71) and fourth oil-filled cavities (72) are formed between the two sides of the central diaphragm (7) and the substrate (1), respectively. The third oil-filled cavity (71) is connected to the first oil-filled cavity (22), and the fourth oil-filled cavity (72) is connected to the second oil-filled cavity (31).
8. The differential pressure sensor of claim 7, wherein, The substrate (1) is provided with a third oil passage (11) and a fourth oil passage (12). The first oil filling chamber (22) is connected to the third oil filling chamber (71) through the third oil passage (11), and the second oil filling chamber (31) is connected to the fourth oil filling chamber (72) through the fourth oil passage (12).
9. The differential pressure sensor of claim 8, wherein, The third oil passage (11) is provided with a first branch (111) that can be connected to the outside, and the fourth oil passage (12) is provided with a second branch (121) that can be connected to the outside. Both the first branch (111) and the second branch (121) are provided with an oil sealing element (10) at the end connected to the outside.
10. The differential pressure sensor of claim 9, wherein, The differential pressure sensor also includes a locking element (20), which is detachably connected to the base (1) and configured to abut against the sealing element (10).