An X-ray-based online detection device

Abstract

This invention discloses an X-ray-based online inspection device, including a radiation source assembly, a detector assembly, a front track, a sample stage, and a rear track. The sample stage includes a turntable, a power transmission assembly, and a signal transmission assembly. A middle track is mounted on the turntable, comprising a base plate and two upright plates. The power transmission assembly is located near the conveying end of the sample stage and includes a lifting cylinder, a drive gear, and a driven gear. The lifting cylinder drives the drive gear and driven gear to mesh or disengage, providing power to the middle track. The signal transmission assemblies are installed on both sides of the middle track. This invention combines two-dimensional and three-dimensional imaging, enabling the reconstruction, automatic correction, and detection of two-dimensional / three-dimensional images of the inspected object without altering the hardware. This improves equipment utilization, increases inspection efficiency, and meets the production capacity requirements of automated production lines.

Description

Technical Field

[0001] This utility model relates to the field of X-ray imaging technology, and in particular to an online detection device based on X-rays. Background Technology

[0002] X-ray inspection equipment, with its non-destructive testing characteristics, can detect internal defects without damaging objects and is currently widely used in various industries such as semiconductors, batteries, and scientific research. With the improvement of product testing standards, the increase in testing procedures, and the rise in production volume, traditional manual or offline inspection can no longer meet the capacity demands of automated production lines, making online inspection an inevitable trend.

[0003] Online inspection refers to the real-time inspection of products on automated production lines by adding automatic transmission devices and corresponding inspection methods. This effectively improves inspection efficiency and meets the production line's capacity requirements. X-ray online inspection devices, based on X-ray imaging technology and combined with automatic transmission and control functions, enable online detection of internal defects in objects, achieving two-dimensional or three-dimensional imaging.

[0004] Existing technical solutions are mostly offline detection methods, using slip rings for current and signal transmission. This approach lacks the structure required for online detection and the automatic calibration and detection functions of 3D / 2D imaging equipment, failing to meet the needs of high-volume production lines and various types of imaging. Furthermore, the carbon brushes used in slip rings are consumables that need to be replaced after prolonged use, increasing maintenance costs and time. The slip rings are mounted on a rotary table, requiring the rotary motor to account for its large inertia, leading to increased motor power. In addition, existing technologies struggle to achieve adjustable X-ray source and detector angles and adjustable magnification ratios without replacing hardware. Utility Model Content

[0005] To address the shortcomings of existing technologies, this invention provides an X-ray-based online inspection device. This device combines two-dimensional and three-dimensional imaging, and without changing the hardware, it can realize the reconstruction, automatic correction, and detection of two-dimensional / three-dimensional images of the object being inspected, thereby improving the utilization rate of equipment functions, increasing inspection efficiency, and meeting the production capacity requirements of automated production lines.

[0006] To achieve the above objectives, the present invention adopts the following technical solution: An X-ray-based online detection device includes: a radiation source assembly, a detector assembly, a front track, a sample stage, and a rear track; wherein the transmission end of the front track is connected to the receiving end of the sample stage, and the conveying end of the sample stage is connected to the transmission front end of the rear track. The sample stage includes a turntable, a power transmission component, and a signal transmission component. The turntable has a central track, which includes a base plate and two uprights for connecting the object to be tested to the end of the front track. The power transmission component is located near the conveying end of the sample stage and includes a lifting cylinder, a drive gear, and a driven gear. The lifting cylinder drives the drive gear and driven gear to mesh or disengage, providing power to the central track. The signal transmission component is installed on both sides of the central track.

[0007] As a further technical solution, the radiation source assembly includes a radiation source body, a lower rotating shaft, and a lower support; the radiation source body is mounted on the lower rotating shaft, the lower rotating shaft is angle-adjustable, and the lower rotating shaft is mounted on the lower support, the lower support can drive the lower rotating shaft and the radiation source body to move up and down.

[0008] As a further technical solution, the detector assembly includes a detector body, an upper rotating shaft, and an upper support; the detector body is mounted on the upper rotating shaft, the upper rotating shaft is adjustable in angle, and the upper rotating shaft is mounted on the upper support, the upper support can drive the upper rotating shaft and the detector body to move up and down.

[0009] As a further technical solution, the base plate is mounted on a turntable, the two upright plates are mounted parallel to each other on the base plate, and the base plate is machined with strip holes, through which the distance between the two upright plates can be adjusted.

[0010] As a further technical solution, the power transmission assembly also includes a motor, the driving gear is mounted on the motor, and the motor is mounted on the lifting cylinder; the driven gear is mounted on the outside of the vertical plate and close to the driving gear.

[0011] As a further technical solution, the passive gear is connected to a drive pulley at one end of the inner side of the vertical plate via a drive shaft. The passive gear can drive the drive pulley to rotate via the drive shaft. A passive pulley is installed at the other end of the inner side of the vertical plate. A belt is wound around the drive pulley and the passive pulley.

[0012] As a further technical solution, the belt is wound around the driving pulley and the driven pulley to form belt segments distributed vertically. A belt guide plate is provided between the belt segments, and the belt guide plate is fixed on the upright plate to provide guidance for the belt. A belt pressure plate is provided above the upper belt segment.

[0013] As a further technical solution, the upright plate is provided with an adjustment mechanism, which is used to adjust the tension of the belt.

[0014] As a further technical solution, a front sensor is provided at the transmission end of the front track to send a material presence signal to the sample stage when a detected object is being transmitted; a rear sensor is provided at the transmission end of the rear track to send a material discharge signal.

[0015] As a further technical solution, a control unit is also included, which is electrically connected to the motor and used to send control commands.

[0016] One or more technical solutions of this utility model have the following beneficial effects: The online inspection device of the present invention includes the necessary structures for online inspection such as a front track, a sample stage, and a rear track. It can connect to the front and rear processes to achieve automatic transmission, and has both two-dimensional and three-dimensional imaging capabilities. It can meet the inspection needs of large-scale production lines and different types of imaging, thereby improving inspection efficiency.

[0017] To address the issues of needing to replace carbon brushes and increasing motor power caused by using slip rings, the sample stage of this invention does not use slip rings for power and signal transmission. Instead, it uses a gear-meshing transmission track power mechanism, which uses a cylinder to achieve gear engagement and disengagement. This saves on the cost of purchasing slip rings and replacing carbon brushes, shortens maintenance time, and eliminates the need to consider the impact of slip ring inertia on motor selection, thus reducing motor power requirements.

[0018] To address the problem of difficulty in adjusting the angle and magnification ratio of the X-ray source and detector without changing the hardware, the X-ray source body and detector body in this invention can be translated and rotated respectively through the lower and upper motion mechanisms. Without changing the hardware, the angle and magnification ratio can be adjusted, improving the flexibility and functional utilization of the equipment. Attached Figure Description

[0019] The accompanying drawings, which form part of this specification, are used to provide a further understanding of this utility model. The illustrative embodiments of this utility model and their descriptions are used to explain this utility model and do not constitute an improper limitation of this utility model.

[0020] Figure 1 This is a schematic diagram of an X-ray-based online detection device according to this utility model; Figure 2 This is a schematic diagram of the sample stage in this utility model; Among them: 1 X-ray source assembly, 101 lower rotating shaft, 102 lower support, 103 X-ray source body, 2 detector assembly, 201 upper rotating shaft, 202 upper support, 203 detector body, 3 front track, 301 front sensor, 4 sample stage, 5 rear track, 501 rear sensor, 6 control unit, 11 object to be detected. 401 Turntable, 402 Intermediate rail, 403 Power transmission assembly, 404 Signal transmission assembly, 405 Drive gear, 406 Motor, 407 Lifting cylinder, 408 Driven gear, 409 Base plate, 410 Vertical plate, 411 Drive pulley, 412 Driven pulley, 413 Belt, 414 Belt guide plate, 415 Belt pressure plate, 416 Adjustment mechanism, 417 Drive shaft. Detailed Implementation

[0021] It should be noted that the following detailed description is illustrative and intended to provide further explanation of the present invention. Unless otherwise specified, all technical and scientific terms used in this invention have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains.

[0022] Example 1 This invention provides an online detection device based on X-rays, such as... Figure 1 As shown, it includes: a radiation source assembly, a detector assembly, a front track, a sample stage, a rear track, and a control unit. The transmission end of the front track is connected to the receiving end of the sample stage, and the conveying end of the sample stage is connected to the transmission front end of the rear track.

[0023] In this embodiment, as Figure 1 As shown, the X-ray source assembly includes a X-ray source body, a lower rotating shaft, and a lower support. The X-ray source body is mounted on the lower rotating shaft, which can be automatically or manually adjusted to change its angle, thus obtaining detection results at different angles between the X-ray source body and the object being inspected. The lower rotating shaft is mounted on the lower support, which can move the lower rotating shaft and the X-ray source body up and down, changing the distance between the X-ray source body and the object being inspected, adjusting the magnification ratio, and accommodating different models and sizes of X-ray source bodies.

[0024] In this embodiment, as Figure 1 As shown, the detector assembly includes a detector body, an upper rotating shaft, and an upper support. The detector body is mounted on the upper rotating shaft, which can be automatically or manually adjusted to change its angle, thus obtaining detection results at different angles between the detector body and the object being detected. Furthermore, the upper rotating shaft is mounted on the upper support, which can move the upper rotating shaft and the detector body up and down, changing the distance between the detector body and the object being detected, adjusting the magnification ratio, and accommodating detector bodies of different models and sizes.

[0025] In this embodiment, both the front and rear tracks can be automatically or manually adjusted in spacing to accommodate objects 11 of different sizes. The front track is located at the very front of the entire device and is used to connect to the objects 11 transferred from the previous process. A front sensor is installed at the end of the front track to send a material presence signal to the sample stage when an object is being transferred. The rear track is located at the very back of the entire device and is used to connect to the objects 11 transferred from the sample stage. A rear sensor is installed at the end of the rear track to send a material discharge signal.

[0026] In this embodiment, as Figure 2 As shown, the sample stage includes a turntable, a central track, a power transmission assembly, and a signal transmission assembly, with the central track mounted on the turntable. The central track comprises a base plate and two upright plates for connecting the object to be tested, which is then transported from the end of the front track. Specifically, the base plate is mounted on the turntable, and the two upright plates are mounted parallel to each other on the base plate. The base plate has slotted holes through which the distance between the two upright plates can be adjusted. The track width can be adjusted manually or automatically to accommodate objects of different sizes.

[0027] In this embodiment, as Figure 2 As shown, the power transmission assembly is located near the conveying end of the sample stage. The power transmission assembly includes a lifting cylinder, a driving gear, and a driven gear. The lifting cylinder drives the driving gear and driven gear to mesh or disengage, providing power to the intermediate track. Specifically, the power transmission assembly also includes a motor. The driving gear is mounted on the motor, which is mounted on the lifting cylinder. The driven gear is mounted on the outside of the vertical plate, close to the driving gear.

[0028] like Figure 2 As shown, the passive gear is connected to the active pulley at one end of the inner side of the vertical plate via a drive shaft. The passive gear can drive the active pulley to rotate via the drive shaft. The passive pulley is installed at the other end of the inner side of the vertical plate. A belt is wound around the active pulley and the passive pulley. The belt converts the circular motion into linear motion, realizing the linear transmission of the object being detected.

[0029] like Figure 2 As shown, the belt is wound around the driving pulley and the driven pulley, forming belt segments distributed vertically. A belt guide plate is provided between the upper and lower belt segments and is fixed to the upright plate to provide guidance for the belt and support the object being inspected. A belt pressure plate is provided above the upper belt segment to ensure that the direction of movement of the object being inspected does not deviate. An adjustment mechanism is also provided on the upright plate to adjust the tension of the belt and facilitate assembly.

[0030] In this embodiment, the signal transmission components are installed on both sides of the middle track, specifically including two sets of signal transmission components. When the detected object is transmitted into position, the signal transmission components are triggered and send a signal to the control unit. The control unit is electrically connected to the motor and sends different commands to the motor, which can control the deceleration and stopping of the motor.

[0031] In this embodiment, neither the power transmission component nor the signal transmission component is fixed to the turntable. Since the turntable does not require power or signal transmission, there is no need to install slip rings for power and signal transmission. In this embodiment, the processing procedure of the control unit is prior art and is not within the scope of protection of this embodiment.

[0032] The specific detection method of the X-ray-based online detection device provided in this embodiment is as follows: The front track connects to the object to be inspected from the previous process and sends a material presence signal to the sample stage via the front sensor. After receiving the signal from the front sensor, the two sets of lifting cylinders of the power transmission component descend simultaneously. Once in position, the drive gear and driven gear mesh, and the motor begins to rotate, simultaneously driving the drive gear and driven gear to rotate.

[0033] The passive gear can drive the active and passive pulleys to rotate via the drive shaft. The belts wrapped around the active and passive pulleys convert the circular motion into linear motion, and the object being detected on the front track can be transferred to the middle track.

[0034] Once the object being detected is in position, the signal transmission component is triggered. After being triggered, the signal transmission component sends a signal to the control unit. The control unit then sends different commands to the motor, which can control the motor's deceleration and stopping, thereby controlling the deceleration and stopping of the object being detected on the belt.

[0035] After the motor stops rotating, the lifting cylinder is raised, the driving gear and the driven gear separate, and the intermediate track is disengaged from the power transmission component.

[0036] The X-ray source emits X-rays, and the turntable rotates the central track and the object being inspected together. In two-dimensional imaging, after the control unit receives the detector signal and images, a deflection correction algorithm corrects the image. The corrected image is then transmitted to the control unit's software detection module for real-time sample detection and calculation, outputting an OK / NG signal. In three-dimensional imaging, the turntable rotates one full turn, acquiring projected images from all angles. The reconstruction algorithm reconstructs specific slice layers and selects the clear layer, sending it to the three-dimensional slice detection module for real-time sample detection and calculation, outputting an OK / NG signal.

[0037] The circular motion of the turntable can be continuous or step-by-step. Different motion modes result in differences in scanning time and image quality.

[0038] After completing one imaging detection, the two sets of lifting cylinders of the power transmission component descend simultaneously. Once in position, the active gear and the passive gear mesh, and the motor begins to rotate, simultaneously driving the active gear and the passive gear to rotate.

[0039] The driven gear can drive the driving and driven pulleys to rotate via the drive shaft. The belts wrapped around the driving and driven pulleys convert the circular motion into linear motion, allowing the object to be inspected on the intermediate track to be transferred to the rear track. The rear track then transports the inspected object to the next process, completing one inspection step.

[0040] The above description is merely a preferred embodiment of this utility model and is not intended to limit the scope of this utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. An X-ray based online inspection apparatus, characterized in that include: The system includes a radiation source assembly, a detector assembly, a front track, a sample stage, and a rear track; wherein the transmission end of the front track is connected to the receiving end of the sample stage, and the conveying end of the sample stage is connected to the transmission front end of the rear track. The sample stage includes a turntable, a power transmission component, and a signal transmission component. The turntable has a central track, which includes a base plate and two uprights for connecting the object to be tested to the end of the front track. The power transmission component is located near the conveying end of the sample stage and includes a lifting cylinder, a drive gear, and a driven gear. The lifting cylinder drives the drive gear and driven gear to mesh or disengage, providing power to the central track. The signal transmission component is installed on both sides of the central track.

2. An X-ray based on-line inspection apparatus as claimed in claim 1, characterized in that, The radiation source assembly includes a radiation source body, a lower rotating shaft, and a lower support. The radiation source body is mounted on the lower rotating shaft, which is angle-adjustable. The lower rotating shaft is also mounted on the lower support, which can drive the lower rotating shaft and the radiation source body to move up and down.

3. An X-ray based on-line inspection apparatus as claimed in claim 1, characterized in that, The detector assembly includes a detector body, an upper rotating shaft, and an upper support; the detector body is mounted on the upper rotating shaft, the upper rotating shaft is adjustable in angle, and the upper rotating shaft is mounted on the upper support, the upper support being able to drive the upper rotating shaft and the detector body to move up and down.

4. An X-ray based on-line inspection apparatus as claimed in claim 1, characterized in that, The base plate is mounted on the turntable, and the two upright plates are mounted parallel to each other on the base plate. The base plate is machined with strip holes, through which the distance between the two upright plates can be adjusted.

5. An X-ray based on-line inspection apparatus as claimed in claim 1, characterized in that, The power transmission assembly also includes a motor, the driving gear is mounted on the motor, and the motor is mounted on the lifting cylinder; the driven gear is mounted on the outside of the vertical plate and close to the driving gear.

6. An X-ray based on-line inspection apparatus as claimed in claim 5, characterized in that, The passive gear is connected to the drive pulley at one end of the inner side of the vertical plate via a drive shaft. The passive gear can drive the drive pulley to rotate via the drive shaft. The passive pulley is installed at the other end of the inner side of the vertical plate. A belt is wound around the drive pulley and the passive pulley.

7. An X-ray based on-line inspection apparatus as claimed in claim 6, characterized in that, The belt is wound around the driving pulley and the driven pulley to form belt segments distributed vertically. A belt guide plate is provided between the belt segments and is fixed to the upright plate to provide guidance for the belt. A belt pressure plate is provided above the upper belt segment.

8. An X-ray based on-line inspection apparatus as claimed in claim 6, characterized in that, An adjustment mechanism is provided on the upright plate, which is used to adjust the tension of the belt.

9. An on-line X-ray based inspection apparatus as defined in claim 1, wherein, A front sensor is installed at the end of the front track to send a material presence signal to the sample stage when an object to be detected is being transported; a rear sensor is installed at the end of the rear track to send a material discharge signal.

10. The X-ray-based online detection device as described in claim 1, characterized in that, It also includes a control unit, which is electrically connected to the motor and is used to send control commands.

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