A testing device for SIC device package production

Abstract

This utility model relates to the field of SiC device testing technology, and provides a testing device for SiC device packaging production. It includes a base, a support frame fixed to the top of the base, a movable structure on one side of the support frame at the top of the base, and a fixed structure fixed to the top of the other side of the support frame at the top of the base. The fixed structure includes a fixing plate fixed to the top of the base. By providing the fixed structure, this utility model enhances the stability of the slide block during movement under the action of the sliding groove. After movement, the slide block, through the clamping plate, drives a rubber pad to clamp one side of the device. The rubber pad increases the friction between the clamping plate and the device, thus fixing the device and preventing displacement. It also protects the edges of the device, achieving the function of easy fixation and improving the stability of the SiC device packaging production testing device during use.

Description

Technical Field

[0001] This utility model relates to the field of SiC device technology, and in particular to a testing device for SiC device packaging production. Background Technology

[0002] SiC devices are electronic components made of silicon carbide material and are core products of third-generation semiconductor technology. After SiC devices are packaged, they need to be tested. In order to avoid defects such as voids and cracks inside the package, a testing device for SiC device packaging production is used.

[0003] To address this, patent CN207851233U discloses a SiC testing device, including a housing, a display screen on one side of the housing, a calibration knob on the side of the display screen, one end of the calibration knob being embedded inside the housing and fixed to it, a fixing plate inside the housing, the fixing plate being fixedly connected to the housing by screws, a battery on the top of the fixing plate, a programmable controller on the side of the battery, a heat dissipation panel on one side of the housing, the heat dissipation panel being fixedly connected to the housing by screws, a connection hole on the side of the heat dissipation panel, a transmission line inside the connection hole, and a test pen at one end of the transmission line, which has good stability, is easy to put in and take out, and has good heat dissipation effect;

[0004] Although the SiC testing device described above has good stability, is easy to place and remove, and has good heat dissipation, it is not easy to fix it in place, making it difficult to avoid affecting the accuracy of the test results due to movement, and making it difficult to ensure the stability of the test process. Utility Model Content

[0005] The purpose of this invention is to provide a testing device for SiC device packaging production, in order to solve the defect of existing testing devices for SiC device packaging production being inconvenient to fix.

[0006] To solve the above-mentioned technical problems, this utility model provides the following technical solution: a testing device for SiC device packaging production, including a base;

[0007] A support frame is fixed to the top of the base. A movable structure is provided at the top of the base on one side of the support frame, and a fixed structure is fixed at the top of the base on the other side of the support frame.

[0008] The fixing structure includes a fixing plate fixed to the top of the base, a first electric push rod passing through the inside of the fixing plate, a movable plate fixed to one end of the first electric push rod, hinge rods hinged to both sides of the top of the movable plate, a sliding groove passing through the top of the support frame, sliding seats passing through both sides of the inside of the sliding groove, and a clamping plate fixed to the top of each sliding seat.

[0009] A display screen is fixed to the top of the base on one side of the movable structure, and an X-ray detector is installed at the bottom of the movable structure.

[0010] When using this device, the fixed structure facilitates its fixation, thereby improving the stability of the SiC device packaging production test device during use; the movable structure facilitates testing, thereby improving the applicability of the SiC device packaging production test device during use.

[0011] Preferably, the end of the hinge rod away from the movable plate is hinged to the bottom end of the slide, and a rubber pad is fixed to one side of the clamping plate. The sliding groove enhances the stability of the slide during movement, and the moved slide, through the clamping plate, clamps the rubber pad to one side of the device.

[0012] Preferably, the slide and the support frame form a sliding structure through a sliding groove. The rubber pad increases the friction between the clamping plate and the device, thus fixing the device in place, preventing displacement, and protecting the edges of the device.

[0013] Preferably, the output of the X-ray detector is electrically connected to the input of the display screen via a microcontroller. Under the action of the X-ray detector, the microcontroller can display the image on the display screen, thereby checking for defects such as voids and cracks inside the device package.

[0014] Preferably, the movable structure includes a bracket, an internal cavity, a movable groove, a movable seat, a second electric push rod, a threaded rod, a movable seat, a servo motor, and a slide rod. The internal cavity is located at the top of the base. A threaded rod is provided on one side of the internal cavity. The movable seat is threadedly connected to the outer side of the threaded rod. The top of the movable seat extends to the outside of the base and is fixed with a bracket. A servo motor is installed on the outer wall of the base at one end of the threaded rod. A slide rod passes through one side of the inside of the movable seat. A second electric push rod is fixed to one side of the top of the bracket. A movable groove passes through the other side of the top of the bracket. A movable seat passes through the inside of the movable groove.

[0015] Preferably, the bottom end of the movable seat is fixedly connected to the top end of the X-ray detector, and the movable seat and the bracket form a sliding structure through a movable groove. One end of the second electric push rod is fixedly connected to one side of the movable seat. The movable groove enhances the stability of the movable seat during movement. After moving, the movable seat drives the X-ray detector to move left and right. The sliding rod prevents the movable seat from rotating along with the threaded rod.

[0016] Preferably, one end of the threaded rod extends to the outside of the base and is fixedly connected to the output end of the servo motor. The movable seat and the slide rod form a sliding structure, and both ends of the slide rod are fixedly connected to the inner wall of the base. The movable seat drives the bracket to move, and the moved bracket drives the X-ray detector to move back and forth, allowing the X-ray detector to move back and forth and left and right above the device.

[0017] The present invention provides a testing device for SiC device packaging production, which has the following advantages:

[0018] By setting a fixed structure, the stability of the slide block during movement is enhanced under the action of the slide groove. After the slide block moves, the clamping plate drives the rubber pad to clamp the device on one side. Under the action of the rubber pad, the friction between the clamping plate and the device is increased, so as to fix the device and prevent the device from shifting. At the same time, it can protect the edge of the device, realizing the function of easy fixation of the device, thereby improving the stability of the test device for SiC device packaging production during use.

[0019] By incorporating a movable structure, the stability of the movable seat during movement is enhanced by the action of the movable slot. After moving, the movable seat drives the X-ray detector to move left and right. Under the action of the sliding rod, the movable seat is prevented from rotating along with the threaded rod. The movable seat drives the support to move, and the support, after moving, drives the X-ray detector to move back and forth. By moving the X-ray detector back and forth and left and right above the device, the image can be displayed on the screen by the microcontroller, thereby checking whether there are defects such as voids and cracks inside the device package. This realizes the function of convenient testing of the device, thereby improving the applicability of the testing device for SiC device packaging production. Attached Figure Description

[0020] Figure 1 This is a three-dimensional structural schematic diagram of the present invention;

[0021] Figure 2 This is a three-dimensional structural schematic diagram of the main cross-section of this utility model;

[0022] Figure 3 This is a side view cross-sectional three-dimensional structural schematic diagram of the present invention;

[0023] Figure 4 This is a top-view cross-sectional three-dimensional structural schematic diagram of the present invention;

[0024] Figure 5 This is a three-dimensional exploded structural diagram of the fixed structure of this utility model.

[0025] The following are the annotations in the figure: 1. Base; 2. Support frame; 3. Fixed structure; 301. Fixed plate; 302. First electric push rod; 303. Movable plate; 304. Hinge rod; 305. Slide groove; 306. Clamping plate; 307. Slide seat; 4. X-ray detector; 5. Moving structure; 501. Bracket; 502. Internal cavity; 503. Movable groove; 504. Movable seat; 505. Second electric push rod; 506. Threaded rod; 507. Movable seat; 508. Servo motor; 509. Slide rod; 6. Display screen. Detailed Implementation

[0026] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0027] Please see Figures 1-5 This utility model provides a testing device for SiC device packaging production, including a base 1, a support frame 2 fixed to the top of the base 1, and a movable structure 5 provided on one side of the support frame 2 at the top of the base 1. The movable structure 5 includes a bracket 501, an internal cavity 502, a movable groove 503, a movable seat 504, a second electric push rod 505, a threaded rod 506, a movable seat 507, a servo motor 508, and a slide bar 509. The internal cavity 502 is located at the top of the base 1, and a threaded rod 506 is provided on one side inside the internal cavity 502. The movable seat 507 is threadedly connected to the outer side of the threaded rod 506. The top of the movable seat 507 extends to the outside of the base 1 and is fixed with the bracket 501. A servo motor 508 is installed on the outer wall of the base 1 at one end of the threaded rod 506. The servo motor 508 and the movable seat 507 have a sliding rod 509 passing through one side inside. The second electric push rod 505 is fixed to one side of the top of the bracket 501. The other side of the top of the bracket 501 has a movable groove 503 passing through it. The movable seat 504 passes through the inside of the movable groove 503. The bottom end of the movable seat 504 is fixedly connected to the top of the X-ray detector 4. The movable seat 504 and the bracket 501 form a sliding structure through the movable groove 503. One end of the second electric push rod 505 is fixedly connected to one side of the movable seat 504. One end of the threaded rod 506 extends to the outside of the base 1 and is fixedly connected to the output end of the servo motor 508. The movable seat 507 and the sliding rod 509 form a sliding structure. Both ends of the sliding rod 509 are fixedly connected to the inner wall of the base 1.

[0028] Reference Figure 1 and Figures 2-4As shown, connect the power supply and start the second electric push rod 505. The second electric push rod 505 drives the movable seat 504 to move inside the movable groove 503. Under the action of the movable groove 503, the stability of the movable seat 504 during movement is enhanced. After moving, the movable seat 504 drives the X-ray detector 4 to move left and right. Start the servo motor 508. The servo motor 508 drives the threaded rod 506 to rotate inside the internal cavity 502. The threaded rod 506 drives the movable seat 507 to move, so that the movable seat 507 moves outside the slide rod 509. Under the action of the slide rod 509... To prevent the movable seat 507 from rotating along with the threaded rod 506, the movable seat 507 drives the bracket 501 to move. After moving, the bracket 501 drives the X-ray detector 4 to move back and forth. The X-ray detector 4 moves back and forth and left and right above the device. Under the action of the X-ray detector 4, X-rays can penetrate the device body. By utilizing the different absorption and scattering degrees of X-rays by different materials, images are formed to detect defects inside the device body. The images are displayed on the display screen 6 through the microcontroller, thereby checking whether there are defects such as voids and cracks inside the device package.

[0029] A fixing structure 3 is fixed to the top of the base 1 on the other side of the support frame 2. The fixing structure 3 includes a fixing plate 301 fixed to the top of the base 1. A first electric push rod 302 passes through the inside of the fixing plate 301. A movable plate 303 is fixed to one end of the first electric push rod 302. A hinge rod 304 is hinged to both sides of the top of the movable plate 303. A slide groove 305 passes through the top of the support frame 2. A slide seat 307 passes through both sides of the inside of the slide groove 305. A clamping plate 306 is fixed to the top of the slide seat 307. The end of the hinge rod 304 away from the movable plate 303 is hinged to the bottom end of the slide seat 307. A rubber pad is fixed to one side of the clamping plate 306. The slide seat 307 and the support frame 2 form a sliding structure through the slide groove 305. A display screen 6 is fixed to the top of the base 1 on one side of the movable structure 5. An X-ray detector 4 is set at the bottom of the movable structure 5. The output end of the X-ray detector 4 is electrically connected to the input end of the display screen 6 through a microcontroller.

[0030] Reference Figure 3 and Figure 5 As shown, the device is placed on the top of the support frame 2, and the first electric push rod 302 is activated. The first electric push rod 302 drives the movable plate 303 to move. The movable plate 303 drives the slide block 307 to move inside the slide groove 305 through the hinge rod 304. Under the action of the slide groove 305, the stability of the slide block 307 during movement is enhanced. After moving, the slide block 307 drives the rubber pad to clamp the device on one side through the clamping plate 306. Under the action of the rubber pad, the friction between the clamping plate 306 and the device is increased, so as to fix the device and prevent the device from shifting. At the same time, it can protect the edge of the device.

[0031] Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A testing device for SiC device packaging production, comprising a base (1); Its features are: The top of the base (1) is fixed with a support frame (2), and a movable structure (5) is provided on the top of the base (1) on one side of the support frame (2), and a fixed structure (3) is fixed on the top of the base (1) on the other side of the support frame (2). The fixing structure (3) includes a fixing plate (301) fixed to the top of the base (1), a first electric push rod (302) passing through the inside of the fixing plate (301), a movable plate (303) fixed to one end of the first electric push rod (302), hinge rods (304) hinged to both sides of the top of the movable plate (303), a slide groove (305) passing through the top of the support frame (2), a slide seat (307) passing through both sides of the inside of the slide groove (305), and a clamping plate (306) fixed to the top of the slide seat (307). A display screen (6) is fixed to the top of the base (1) on one side of the movable structure (5), and an X-ray detector (4) is installed at the bottom of the movable structure (5).

2. The testing device for SIC device package production according to claim 1, characterized in that: The end of the hinge rod (304) away from the movable plate (303) is hinged to the bottom end of the slide (307), and a rubber pad is fixed on one side of the clamping plate (306).

3. The testing device for SIC device package production according to claim 1, characterized in that: The slide block (307) and the support frame (2) form a sliding structure through the slide groove (305).

4. The testing device for SIC device package production according to claim 1, characterized in that: The output of the X-ray detector (4) is electrically connected to the input of the display screen (6) via a microcontroller.

5. The testing device for SIC device package production according to claim 1, characterized in that: The movable structure (5) includes a bracket (501), an internal cavity (502), a movable slot (503), a movable seat (504), a second electric push rod (505), a threaded rod (506), a movable seat (507), a servo motor (508), and a slide rod (509). The internal cavity (502) is located at the top of the base (1). A threaded rod (506) is provided on one side inside the internal cavity (502). The movable seat (507) is threadedly connected to the outer side of the threaded rod (506). The top of the movable seat (507) extends to the outside of the base (1) and is fixed with a bracket (501). A servo motor (508) is installed on the outer wall of the base (1) at one end of the threaded rod (506). A slide rod (509) passes through one side of the interior of the movable seat (507). A second electric push rod (505) is fixed on one side of the top of the bracket (501). A movable slot (503) passes through the other side of the top of the bracket (501). A movable seat (504) passes through the interior of the movable slot (503).

6. The testing device for SIC device package production according to claim 5, characterized in that: The bottom end of the movable seat (504) is fixedly connected to the top end of the X-ray detector (4). The movable seat (504) and the bracket (501) form a sliding structure through the movable groove (503). One end of the second electric push rod (505) is fixedly connected to one side of the movable seat (504).

7. The testing device for SIC device package production according to claim 5, characterized in that: One end of the threaded rod (506) extends to the outside of the base (1) and is fixedly connected with the output end of the servo motor (508), the moving seat (507) and the slide rod (509) constitute a sliding structure, both ends of the slide rod (509) are fixedly connected with the inner wall of the base (1).

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