A sample stage for an X-ray photoelectron spectroscopy analyzer

Abstract

The utility model discloses a sample stage for an X-ray photoelectron spectroscopy analyzer, belonging to the technical field of X-ray photoelectron spectroscopy analysis; the utility model is provided with a bottom support, which is used for connecting with the sample transmission system of the X-ray photoelectron spectroscopy analyzer; a bracket, which is fixedly connected to the top of the bottom support and is configured as a king-shaped structure formed by enclosing with support plates, so as to form a plurality of accommodating spaces with one side open; and lifting wings, which are arranged in the accommodating spaces, and the side wall of the bracket located in the accommodating spaces is provided with sliding ways for connecting the lifting wings at any height. The utility model can realize putting samples with different heights into the X-ray photoelectron spectrometer at the same time for surface element testing of the samples, greatly improving the sample introduction efficiency, saving the time for the instrument to pump vacuum, saving the testing time, and improving the detection efficiency.

Description

Technical Field

[0001] This utility model relates to the field of X-ray photoelectron spectroscopy analysis technology, and in particular to a sample stage for X-ray photoelectron spectroscopy analyzer for simultaneous testing of block samples and powder samples of different heights. Background Technology

[0002] X-ray photoelectron spectroscopy (XPS) is one of the most commonly used surface analysis methods. Typically, XPS samples are available in both bulk and powder form.

[0003] When preparing block samples, use a cutting tool to cut samples of different heights into appropriate sizes, generally with an area of ​​a few square centimeters and a height of less than 1.8 cm to facilitate placement on the sample stage.

[0004] When preparing powder samples, take an appropriate amount of powder and spread it evenly on a sticky conductive adhesive to form a thin and uniform layer. If the powder sample has large particle size variations, it can be ground into a finer powder first to form a uniform and smooth surface. The height of the powder sample is usually only a few millimeters.

[0005] When samples of different heights are placed on the sample stage simultaneously, the sample surfaces must be flat and on the same plane to ensure the accuracy and repeatability of the test results. Currently, some solid electrolyte samples, such as oxide solid electrolytes and polymer solid electrolytes, are mostly in block form. Due to the needs of solid-state battery research, the height of solid electrolyte block samples varies. The Thermo Fisher Nexsa X-ray photoelectron spectrometer can accept samples with a height of less than 18 mm, and the sample stage size is 6 cm × 6 cm. Multiple samples can be placed simultaneously. However, the existing sample stage only has 3 height controls and cannot achieve individual height control for different samples. Utility Model Content

[0006] The purpose of this invention is to overcome the defects of the existing technology and provide a sample stage for an X-ray photoelectron spectroscopy analyzer, which solves the problem that existing sample stages cannot achieve individual height control for different samples.

[0007] To achieve the above objectives, this utility model provides the following technical solution:

[0008] This utility model discloses a sample stage for an X-ray photoelectron spectroscopy analyzer, comprising:

[0009] The base is used to connect to the sample drive system of the X-ray photoelectron spectroscopy analyzer.

[0010] The bracket, fixed to the top of the base, is constructed in a king-shaped structure formed by the enclosure of support plates, thereby creating multiple accommodating spaces with openings on one side; and

[0011] An elevator is disposed within the accommodating space, and the support is provided with a slide rail on the side wall of the accommodating space for connecting the elevator at any height.

[0012] Furthermore, the bracket includes spaced-apart transverse support plates and longitudinal support plates that are fixedly connected to adjacent transverse support plates, wherein the transverse support plates and the longitudinal support plates are arranged perpendicularly.

[0013] Furthermore, the slide rails are fixedly connected to the sides of both the transverse support plate and the longitudinal support plate.

[0014] Furthermore, the side of the lifting wing contacts the slide rail, and the slide rail is connected to the lifting wing by a latch.

[0015] Furthermore, the height of the transverse support plate and the longitudinal support plate is 5-10mm, the thickness is 2-4mm, and the width is no more than 60mm.

[0016] Furthermore, the top of the base is detachably fixed to the bracket by bolts.

[0017] Furthermore, the bottom of the base is provided with positioning points and grooves.

[0018] Furthermore, the upper surface of the lifting wing has 2-6 insertion holes, arranged in rows of 1-3.

[0019] Furthermore, the elevator wing has a length of 30mm, a width of 30mm, and a thickness of 2mm.

[0020] Furthermore, the base, the bracket, and the lifting wing are all made of metal.

[0021] In the above technical solution, the X-ray photoelectron spectroscopy analyzer sample stage provided by this utility model has the following advantages:

[0022] The X-ray photoelectron spectroscopy (XPS) analyzer sample stage designed in this invention has a support fixed to the top of the base. Utilizing a king-shaped structure, it forms multiple accommodating spaces with openings on one side. The sidewalls of the support within these accommodating spaces are connected to lifting wings at any height via slide rails. These lifting wings form multiple platforms with independently controllable lifting heights for attaching samples to be tested. Using this sample stage, samples of different heights can be simultaneously placed into the XPS analyzer for surface element testing, greatly improving sample introduction efficiency, saving instrument vacuuming time, reducing testing time, and increasing detection efficiency. Attached Figure Description

[0023] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this utility model. For those skilled in the art, other drawings can be obtained based on these drawings.

[0024] Figure 1 This is a schematic diagram of the overall structure of the sample stage of the X-ray photoelectron spectroscopy analyzer disclosed in this utility model;

[0025] Figure 2 This is a bottom view of the metal base of the sample stage of the X-ray photoelectron spectroscopy analyzer disclosed in this utility model;

[0026] Figure 3 This is a top view of the metal base of the sample stage of the X-ray photoelectron spectroscopy analyzer disclosed in this utility model;

[0027] Figure 4 This is a top view of the metal support for the sample stage of the X-ray photoelectron spectroscopy analyzer disclosed in this utility model;

[0028] Figure 5 This is a side view of the transverse support plate of the sample stage of the X-ray photoelectron spectroscopy analyzer disclosed in this utility model;

[0029] Figure 6 This is a schematic diagram of the metal wing structure of the sample stage of the X-ray photoelectron spectroscopy analyzer disclosed in this utility model.

[0030] Figure label:

[0031] 1. Base support; 2. Weight reduction hole; 3. Groove; 4. Groove; 5. Positioning point; 6. Bolt; 7. Bracket; 8. Slide rail; 9. Lock; 10. Lifting wing; 11. Insertion hole;

[0032] Horizontal support plate 71; longitudinal support plate 72. Detailed Implementation

[0033] To enable those skilled in the art to better understand the technical solution of this utility model, the present utility model will be further described in detail below with reference to the accompanying drawings.

[0034] See Figure 1 As shown;

[0035] A sample stage for an X-ray photoelectron spectroscopy analyzer, comprising: a base 1, a support 7, and a lifting wing 10;

[0036] The base 1 is used to connect to the sample transmission system of the X-ray photoelectron spectroscopy analyzer, and a transmission positioning point 5 is set at the bottom of the base 1. The base 1 is made of a relatively dense metal material such as copper or stainless steel.

[0037] The bracket 7 is fixedly connected to the top of the base 1 and is constructed as a king-shaped structure formed by enclosing with support plates. The three horizontal support plates 71 of the king-shaped structure are arranged parallel to each other, and a vertical support plate 72 is fixedly connected at the middle position of the three horizontal support plates 71. The three horizontal support plates 71 and the vertical support plate 72 are perpendicular to each other. The two outer horizontal support plates 71 are coplanar with the side surface of the base 1 (flush with the edge of the base 1). The height of each support plate is 5 - 10 mm, the thickness is 2 - 4 mm, and the width does not exceed 60 mm. Sliding grooves 8 are provided on the inner sides of the two outer horizontal support plates 71, and sliding grooves 8 are provided on both sides of the vertical support plate 72 of the middle horizontal support plate 71. The horizontal support plates 71 can be of an integral structure, and the vertical support plate 72 is of a split structure and is respectively fixedly connected between two adjacent horizontal support plates 71. Among them, the bracket 7 is made of a metal material with a relatively small density, such as aluminum, aluminum alloy, etc.;

[0038] The lifting wing 10 is arranged in the accommodating space formed by enclosing two adjacent horizontal support plates 71 and the vertical support plate 72 of the king-shaped structure of the bracket 7. Lifting wings 10 are arranged in the four accommodating spaces formed by the king-shaped structure of the bracket 7, used to form four independently liftable platforms. The lifting wing 10 is 30 mm long, 30 mm wide, and 2 mm thick. Each lifting wing 10 has 2 - 6 jacks 11, with 1 - 3 jacks 11 in each row. These jacks 11 are used to insert the pin needles to fix the块状样品 (block samples), and the lifting wing 10 is made of a metal material with a relatively small density, such as aluminum, aluminum alloy, etc. Among them, a lock 9 for positioning at any position is slidably connected in the sliding grooves 8 of the horizontal support plates 71 and the vertical support plate 72, and is fixedly connected to the lifting wing 10 through the lock 9, so that the lifting wing 10 can stay at any position in the sliding groove 8. Specifically, the lock 9 can be a slider slidably connected to the sliding groove 8 in the prior art. A bolt is threadedly connected to the slider. By tightening or loosening the bolt, the slider is fixedly connected or slidably connected to the sliding groove 8. In order to facilitate the operation of the bolt, the height of the slider can be greater than the thickness of the lifting wing 10, and the bolt is operated on the upper or lower part of the lifting wing 10. Of course, the lock 9 can also be other slider structures as long as it can realize the movement and stay of the lifting wing 10.

[0039] In a specific embodiment:

[0040] Such as Figure 2 As shown, the base 1 is connected to the sample transmission system of the X-ray photoelectron spectrometer. Grooves 3 and 4 are opened at the lower end of the base 1. The grooves are the connection points with the sample transmission system of the spectrometer. The positioning point 5 is the mark for the spectrometer to track the position of the sample stage. The base 1 is provided with a square weight-reducing hole 2 to reduce the weight of the sample.

[0041] See Figure 3 As shown, the top of the base 1 is fixedly connected to the bracket 7 through nine bolts 6. The main structure of the base 1 is made of stainless steel;

[0042] As Figure 4 , 5 shown, the top view of the bracket 7 is a "king" - shaped structure. The four support plates on the bracket 7 can be connected to the bolts 6 on the inner wall of the base support 1. The three transverse support plates 71 are arranged in parallel at uniform intervals, and there are two longitudinal support plates 72 which are perpendicular to the transverse support plates 71 and are used to fixedly connect two adjacent transverse support plates 71. An accommodation space is formed by enclosing two adjacent transverse support plates 71 and longitudinal support plates 72. In the accommodation space, sliding grooves 8 are provided on both the transverse support plates 71 and the longitudinal support plates 72. A locking buckle 9 is provided on each sliding groove 8 and is fixedly connected to the lifting wing 10. By means of the locking buckle 9, the lifting wing 10 can be positioned at any height on the bracket 7. The main structure of the bracket 7 is made of wear - resistant aluminum alloy material;

[0043] As Figure 6 shown, there are four insertion holes 11 in two rows and two columns on the upper surface of the lifting wing 10 for inserting the pin for fixing the块状 sample. In this embodiment, there are a total of four lifting wings 10, which are respectively fixed in the four spaces of the "king" - shaped bracket 7. The lifting wing 10 is made of wear - resistant aluminum alloy material;

[0044] In the above technical solution, a sample stage of an X - ray photoelectron spectrometer provided by the present utility model is used in conjunction with the sample drive system of the X - ray photoelectron spectrometer by means of the base support. The bottom of the bracket is fixed on the base support. The transverse and longitudinal side walls of the bracket in the accommodation space can position the lifting wing at any position through the cooperation of the sliding groove and the locking buckle. A platform with independently controllable lifting height is formed by four lifting wings for pasting the sample to be measured. The lifting wing can be positioned at any position within the height range of 5 - 18 mm through the sliding groove. By using this sample stage, samples of different heights can be put into the X - ray photoelectron spectrometer at the same time for surface element testing of the sample;

[0045] This platform enables some samples of solid electrolyte materials and conventional samples to be sampled simultaneously, greatly improving the sampling efficiency, saving the time for the instrument to pump vacuum, saving the testing duration, and improving the detection efficiency. In addition, for this X - ray photoelectron spectrometer sample stage, lightweight materials with lower density are selected, which can greatly reduce the damage to the instrument drive system and extend the service life of the drive system.

[0046] Only some exemplary embodiments of the present utility model have been described by way of illustration above. Undoubtedly, for those of ordinary skill in the art, without departing from the spirit and scope of the present utility model, the described embodiments can be modified in various different ways. Therefore, the above drawings and description are illustrative in nature and should not be construed as limiting the scope of the claims of the present utility model.

Claims

1. An X-ray photoelectron spectrometer sample stage, characterized by, include: The base (1) is used to connect to the sample transmission system of the X-ray photoelectron spectroscopy analyzer; The bracket (7) is fixed to the top of the base (1) and is constructed as a king-shaped structure formed by the enclosure of the support plates, so as to form multiple accommodating spaces with openings on one side; as well as The lifting wing (10) is disposed within the accommodating space. The bracket (7) is provided with a slide rail (8) on the side wall of the accommodating space, which is used to connect the lifting wing (10) at any height.

2. An X-ray photoelectron spectrometer sample stage according to claim 1, wherein: The bracket (7) includes horizontal support plates (71) spaced apart and longitudinal support plates (72) that are fixedly connected to two adjacent horizontal support plates (71). The horizontal support plates (71) and the longitudinal support plates (72) are arranged perpendicularly.

3. An X-ray photoelectron spectrometer sample stage as claimed in claim 2, wherein: The slide rail (8) is fixedly connected to the sides of both the transverse support plate (71) and the longitudinal support plate (72).

4. An X-ray photoelectron spectrometer sample stage as defined in claim 2, wherein: The side of the elevator (10) contacts the slide (8), and the slide (8) is connected to the elevator (10) by a latch (9).

5. An X-ray photoelectron spectrometer sample stage as defined in claim 2, wherein: The height of the transverse support plate (71) and the longitudinal support plate (72) is 5-10mm, the thickness is 2-4mm, and the width is no more than 60mm.

6. An X-ray photoelectron spectrometer sample stage as defined in claim 1, wherein: The top of the base (1) is detachably fixed to the bracket (7) by bolts (6).

7. An X-ray photoelectron spectrometer sample stage as defined in claim 4, wherein: The bottom of the base (1) is provided with a positioning point (5) and a groove.

8. An X-ray photoelectron spectrometer sample stage as defined in claim 1, wherein: The upper surface of the elevator wing (10) has 2-6 holes (11), arranged in rows of 1-3.

9. An X-ray photoelectron spectrometer sample stage as claimed in claim 8, wherein: The elevator (10) is 30mm long, 30mm wide, and 2mm thick.

10. An X-ray photoelectron spectrometer sample stage according to claim 1, wherein: The base (1), the bracket (7), and the lifting wing (10) are all made of metal.

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