Semiconductor device cooling liquid metal ion concentration probe

Abstract

This utility model relates to the field of semiconductor manufacturing equipment and process technology, and discloses a metal ion concentration probe for semiconductor equipment coolant. It includes a transmission hose, a connector fixedly connected to the top of the transmission hose, a hollow rotating shaft slidably connected to the outer wall of the connector, a screw threadedly connected to the outer wall of the hollow rotating shaft, a fixing plate threadedly connected to the outer wall of the screw, a fixing post rotatably connected to the inner wall of the fixing plate, and a rotating plate rotatably connected to the outer wall of the fixing post. In this utility model, the connector at the top of the probe is screwed into a connecting block. Rotating a knob causes the connecting rod to rotate, which in turn drives the hollow rotating shaft to rotate, causing the fixing plate to rotate. This causes the clamping plate to move inward, locking into the groove of the connector, restricting the connector from moving up and down. Because rotation of the threaded connection inevitably involves movement, the threaded connection will not loosen, achieving the purpose of preventing loosening.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing equipment and process technology, and in particular to a metal ion concentration probe for semiconductor equipment coolant. Background Technology

[0002] In the semiconductor manufacturing industry, the chip production process has extremely high requirements for environmental cleanliness, material purity, and process stability. Even tiny impurities and contamination can lead to a decline in chip performance or even scrapping. As a key auxiliary medium for the normal operation of semiconductor equipment, the quality of coolant directly affects the heat dissipation efficiency, service life, and yield of the final product. Metal ions in coolant are one of the main pollutants. Therefore, the need for accurate monitoring of their concentration has spurred the research and application of metal ion concentration probes for semiconductor equipment coolant.

[0003] With the continuous development of semiconductor technology, the integration of chips is becoming increasingly higher, and the process nodes are shrinking from the micrometer level to the nanometer level. This places higher demands on the cleanliness of the manufacturing environment and the stability of process parameters. This requires higher accuracy and faster response speed in monitoring the concentration of metal ions in the coolant, which has driven the research and development of online monitoring probe technology. However, most existing probes are connected by threaded connections. The threads and clips of the mechanical interface will gradually loosen under long-term vibration, causing the probe to shift position and the sealing performance to deteriorate. This can lead to the probe falling into the coolant, resulting in damage to the semiconductor equipment and the probe. Utility Model Content

[0004] To overcome the above shortcomings, this utility model provides a metal ion concentration probe for semiconductor equipment coolant, which aims to improve the problem of the inability to prevent loosening in the prior art.

[0005] To achieve the above objectives, this utility model adopts the following technical solution: a semiconductor equipment coolant metal ion concentration probe, comprising a transmission hose, a connector fixedly connected to the top of the transmission hose, a hollow rotating shaft slidably connected to the outer wall of the connector, a screw threadedly connected to the outer wall of the hollow rotating shaft, a fixing plate threadedly connected to the outer wall of the screw, a fixing column rotatably connected to the inner wall of the fixing plate, a rotating plate rotatably connected to the outer wall of the fixing column, a rotating column rotatably connected to the inner wall of the rotating plate, a slider fixedly connected to the outer wall of the rotating column, a locking plate slidably connected to the outer wall of the slider, a connecting rod fixedly connected to the outer wall of the hollow rotating shaft, a knob fixedly connected to the outer wall of the connecting rod, and a dustproof device fixedly connected to the outer wall of the transmission hose, the function of which is to prevent dust from entering the interior when the equipment is not in use.

[0006] As a further description of the above technical solution:

[0007] The dustproof device includes a rigid outer shell, the inner wall of which is fixedly connected to the outer wall of the transmission hose. A rotator shell is fixedly connected to the outer wall of the rigid outer shell. An arc-shaped groove is formed on the outer wall of the rotator shell. A connecting rod 2 is slidably connected to the outer wall of the arc-shaped groove. A dustproof shell is slidably connected to the outer wall of the connecting rod 2. A through hole is formed on the outer wall of the dustproof shell. A sealing ring is fixedly connected to the outer wall of the through hole. A knob 2 is fixedly connected to the outer wall of the connecting rod 2.

[0008] As a further description of the above technical solution:

[0009] The outer wall of the knob is fixedly connected with anti-slip texture, and the outer wall of the connector is threaded with a connecting block.

[0010] As a further description of the above technical solution:

[0011] A protective shell is fixedly connected to the outer wall of the dustproof shell, a filter screen is fixedly connected to the inner wall of the protective shell, and a sleeve is fixedly connected to the outer wall of the second knob.

[0012] As a further description of the above technical solution:

[0013] A pull rod is slidably connected to the inner wall of the sleeve, and a locking pin is fixedly connected to the outer wall of the pull rod.

[0014] As a further description of the above technical solution:

[0015] A baffle is fixedly connected to the outer wall of the locking post, and a spring is fixedly connected to the outer wall of the baffle.

[0016] As a further description of the above technical solution:

[0017] The outer wall of the transmission hose is fixedly connected to a probe housing, the inner wall of the probe housing is fixedly connected to a detection pool, the inner wall of the transmission hose is provided with an inner insulating and waterproof layer, and the inner wall of the inner insulating and waterproof layer is fixedly connected to a partition plate.

[0018] As a further description of the above technical solution:

[0019] The inner wall of the inner insulating and waterproof layer is provided with a wire, and an electrode plate is fixedly connected to the outer wall of the wire. A partition is fixedly connected to the inner wall of the detection pool.

[0020] This utility model has the following beneficial effects:

[0021] 1. In this utility model, the connector at the top of the probe is screwed into the connecting block. Turning the knob causes the connecting rod to rotate, which in turn drives the hollow shaft to rotate, which in turn causes the fixing plate to rotate, which in turn causes the rotating plate to rotate, which in turn causes the clamping plate to move inward and lock into the groove of the connector, restricting the connector so that it cannot move up and down. Since the rotation of the threaded connection is always accompanied by movement, the threaded connection will not loosen, thus achieving the purpose of preventing loosening.

[0022] 2. In this utility model, pulling the lever outward causes the locking pin to move outward, which in turn causes the baffle to move inward, thereby compressing the spring and causing it to contract. Rotating the knob two causes the connecting rod two to rotate, which in turn causes the dust cover to rotate. Because the arc groove on the surface of the dust cover can only cause the connecting rod two to rotate a quarter turn, the through holes on the surface of the dust cover are blocked, and excessive rotation is prevented, so that dust will not enter the probe through the dust cover when not in use, thus achieving the purpose of dust prevention when not in operation. Attached Figure Description

[0023] Figure 1 A three-dimensional view of the front side of the metal ion concentration probe for semiconductor equipment coolant proposed in this utility model;

[0024] Figure 2 This is a partial structural diagram of the hollow rotating shaft of the semiconductor device coolant metal ion concentration probe proposed in this utility model.

[0025] Figure 3 This is a partial structural diagram of the card plate of the semiconductor equipment coolant metal ion concentration probe proposed in this utility model.

[0026] Figure 4 This is a partial structural diagram of the dustproof housing of the metal ion concentration probe for semiconductor equipment coolant proposed in this utility model.

[0027] Figure 5 This is a partial structural diagram of the rigid housing of the semiconductor device coolant metal ion concentration probe proposed in this utility model.

[0028] Figure 6 This is a partial structural diagram of the wire of the semiconductor device coolant metal ion concentration probe proposed in this utility model;

[0029] Figure 7 This is a partial structural breakdown of the pull rod of the semiconductor device coolant metal ion concentration probe proposed in this utility model.

[0030] Figure 8 This is a partial structural diagram of the connector of the semiconductor equipment coolant metal ion concentration probe proposed in this utility model.

[0031] Legend:

[0032] 1. Transmission hose; 2. Dustproof device; 201. Rigid outer shell; 202. Rotator shell; 203. Arc groove; 204. Connecting rod two; 205. Dustproof shell; 206. Through hole; 207. Sealing ring; 208. Knob two; 3. Connector; 4. Hollow rotating shaft; 5. Screw; 6. Fixing plate; 7. Fixing column; 8. Rotating plate; 9. Rotating column; 10. Sliding block; 11. Clamping plate; 12. Connecting rod one; 13. Knob one; 14. Anti-slip texture; 15. Connecting block; 16. Protective shell; 17. Filter screen; 18. Sleeve; 19. Pull rod; 20. Clamping column; 21. Baffle; 22. Spring; 23. Detection cell; 24. Partition one; 25. Inner insulating and waterproof layer; 26. Partition two; 27. Wire; 28. Electrode plate; 29. ​​Probe shell. Detailed Implementation

[0033] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0034] Please see the appendix Figure 1 , attached Figure 2 and attached Figure 3 An embodiment of this utility model provides a semiconductor equipment coolant metal ion concentration probe, including a transmission hose 1, a connector 3 fixedly connected to the top of the transmission hose 1, a hollow rotating shaft 4 slidably connected to the outer wall of the connector 3, a screw 5 threadedly connected to the outer wall of the hollow rotating shaft 4, a fixing plate 6 threadedly connected to the outer wall of the screw 5, a fixing column 7 rotatably connected to the inner wall of the fixing plate 6, a rotating plate 8 rotatably connected to the outer wall of the fixing column 7, a rotating column 9 rotatably connected to the inner wall of the rotating plate 8, a slider 10 fixedly connected to the outer wall of the rotating column 9, a locking plate 11 slidably connected to the outer wall of the slider 10, a connecting rod 12 fixedly connected to the outer wall of the hollow rotating shaft 4, a knob 13 fixedly connected to the outer wall of the connecting rod 12, and a dustproof device 2 fixedly connected to the outer wall of the transmission hose 1. The function of the dustproof device 2 is to prevent dust from entering the interior when the equipment is not in use.

[0035] Specifically, a connector 3 is fixedly connected to the top of the transmission hose 1. A hollow rotating shaft 4 is slidably connected to the outer wall of the connector 3. A screw 5 is threadedly connected to the outer wall of the hollow rotating shaft 4. A fixing plate 6 is threadedly connected to the outer wall of the screw 5, so that the fixing plate 6 is fixedly connected to the hollow rotating shaft 4. A fixing post 7 is rotatably connected to the inner wall of the fixing post 6. A rotating plate 8 is rotatably connected to the outer wall of the fixing post 7. A rotating post 9 is rotatably connected to the inner wall of the rotating plate 8. A slider 10 is fixedly connected to the outer wall of the rotating post 9, so that the slider 10 can slide along the slide groove when the rotating plate 8 is driven to rotate. A locking plate 11 is slidably connected to the outer wall of the slider 10. A connecting rod 12 is fixedly connected to the outer wall of the hollow rotating shaft 4. A knob 13 is fixedly connected to the outer wall of the connecting rod 12. A dustproof device 2 is fixedly connected to the outer wall of the transmission hose 1. The function of the dustproof device 2 is to prevent dust from entering the interior when the equipment is not in use.

[0036] Please see the appendix Figure 1 , attached Figure 4 and attached Figure 5 The dustproof device 2 includes a rigid outer shell 201. The inner wall of the rigid outer shell 201 is fixedly connected to the outer wall of the transmission hose 1. A rotating housing 202 is fixedly connected to the outer wall of the rigid outer shell 201. An arc-shaped groove 203 is opened on the outer wall of the rotating housing 202. A connecting rod 204 is slidably connected to the outer wall of the arc-shaped groove 203. A dustproof shell 205 is slidably connected to the outer wall of the connecting rod 204. A through hole 206 is opened on the outer wall of the dustproof shell 205. A sealing ring 207 is fixedly connected to the outer wall of the through hole 206. A knob 208 is fixedly connected to the outer wall of the connecting rod 204.

[0037] Specifically, the dustproof device 2 includes a rigid outer shell 201. The inner wall of the rigid outer shell 201 is fixedly connected to the outer wall of the transmission hose 1. A rotator shell 202 is fixedly connected to the outer wall of the rigid outer shell 201 to prevent damage between the transmission hose 1 and the probe shell 29 due to bending and to strengthen the structural strength. An arc-shaped groove 203 is provided on the outer wall of the rotator shell 202. A connecting rod 204 is slidably connected to the outer wall of the arc-shaped groove 203. A dustproof shell 205 is slidably connected to the outer wall of the connecting rod 204. When the dustproof shell 205 is rotated, the through hole 206 on its surface is closed, preventing dust from entering the dustproof shell 205. A sealing ring 207 is fixedly connected to the outer wall of the dustproof shell 205. A knob 208 is fixedly connected to the outer wall of the connecting rod 204.

[0038] Please see the appendix Figure 1 , attached Figure 6 and attached Figure 7The outer wall of knob 13 is fixedly connected with anti-slip texture 14, the outer wall of connector 3 is threaded with connecting block 15, the outer wall of dust cover 205 is fixedly connected with protective cover 16, the inner wall of protective cover 16 is fixedly connected with filter screen 17, the outer wall of knob 208 is fixedly connected with sleeve 18, the inner wall of sleeve 18 is slidably connected with pull rod 19, and the outer wall of pull rod 19 is fixedly connected with locking post 20.

[0039] Specifically, the outer wall of knob 13 is fixedly connected with anti-slip texture 14, which can increase friction and make it easier to turn knob 13. The surface of knob 208 also has anti-slip texture 14. The outer wall of connector 3 is threadedly connected with connecting block 15. The outer wall of dust cover 205 is fixedly connected with protective shell 16. The inner wall of protective shell 16 is fixedly connected with filter screen 17 to prevent impurities in coolant from entering the probe and affecting the results. The outer wall of knob 208 is fixedly connected with sleeve 18. The inner wall of sleeve 18 is slidably connected with pull rod 19. The outer wall of pull rod 19 is fixedly connected with locking post 20 so that dust cover 205 no longer rotates when closed.

[0040] Please see the appendix Figure 1 , attached Figure 6 and attached Figure 8 A baffle 21 is fixedly connected to the outer wall of the locking post 20, and a spring 22 is fixedly connected to the outer wall of the baffle 21. A probe housing 29 is fixedly connected to the outer wall of the transmission hose 1. A detection pool 23 is fixedly connected to the inner wall of the probe housing 29. An inner insulating and waterproof layer 25 is provided on the inner wall of the transmission hose 1. A second partition 26 is fixedly connected to the inner wall of the inner insulating and waterproof layer 25. A wire 27 is provided on the inner wall of the inner insulating and waterproof layer 25. An electrode plate 28 is fixedly connected to the outer wall of the wire 27. A first partition 24 is fixedly connected to the inner wall of the detection pool 23.

[0041] Specifically, a baffle 21 is fixedly connected to the outer wall of the pin 20, a spring 22 is fixedly connected to the outer wall of the baffle 21, a probe housing 29 is fixedly connected to the outer wall of the transmission hose 1, a detection pool 23 is fixedly connected to the inner wall of the probe housing 29, an inner insulating and waterproof layer 25 is provided on the inner wall of the transmission hose 1, a second partition 26 is fixedly connected to the inner wall of the inner insulating and waterproof layer 25 to prevent the wires 27 from contacting each other, which would lead to incorrect results, and multiple wires 27 are provided on the inner wall of the inner insulating and waterproof layer 25. The wires 27 are energized and transmit electricity to the electrode plate 28. The electrode plate 28 is fixedly connected to the outer wall of the wires 27, and a first partition 24 is fixedly connected to the inner wall of the detection pool 23.

[0042] Working principle: When needed, screw the connector 3 at the top of the probe into the connector block 15, turn the knob 13, which in turn drives the connecting rod 12 to rotate, which in turn drives the hollow rotating shaft 4 to rotate, which in turn drives the fixing plate 6 fixed by the screw 5 to rotate, which in turn drives the fixing column 7 to rotate, which in turn drives the rotating plate 8 to rotate, which in turn causes the slider 10 on the outer wall of the rotating column 9 to slide along the groove of the clamping plate 11, which in turn causes the clamping plate 11 to retract inward, which in turn causes the clamping plate 11 to be locked in the groove of the connector 3, preventing the connector 3 from moving up and down. Since the rotation of the threaded connection is always accompanied by movement, the threaded connection will not loosen, thus achieving the purpose of preventing loosening.

[0043] When not in use, to reduce the entry of internal dust, pull the lever 19 outward, causing the locking post 20 to move outward, which in turn moves the baffle 21, compressing the spring 22 and causing it to contract. Rotate the knob 208, which in turn drives the connecting rod 204 to rotate, which in turn drives the dust cover 205 to rotate. Because the arc groove 203 on the surface of the dust cover 205 can only allow the connecting rod 204 to rotate a quarter turn, after rotating a quarter turn, the dust cover 205 and the through hole 206 are misaligned, preventing dust from entering the probe. Release the lever 19, and due to the action of the spring 22, the locking post 20 returns to its original position, thus achieving dust prevention when not in use.

[0044] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A semiconductor plant coolant liquid metal ion concentration probe comprising a transfer hose (1) characterised in that: The top of the transmission hose (1) is fixedly connected to a connector (3), the outer wall of the connector (3) is slidably connected to a hollow rotating shaft (4), the outer wall of the hollow rotating shaft (4) is threadedly connected to a screw (5), the outer wall of the screw (5) is threadedly connected to a fixing plate (6), the inner wall of the fixing plate (6) is rotatably connected to a fixing column (7), the outer wall of the fixing column (7) is rotatably connected to a rotating plate (8), the inner wall of the rotating plate (8) is rotatably connected to a rotating column (9), the outer wall of the rotating column (9) is fixedly connected to a slider (10), the outer wall of the slider (10) is slidably connected to a clamping plate (11), the outer wall of the hollow rotating shaft (4) is fixedly connected to a connecting rod (12), the outer wall of the connecting rod (12) is fixedly connected to a knob (13), and the outer wall of the transmission hose (1) is fixedly connected to a dustproof device (2). The function of the dustproof device (2) is to prevent dust from entering the interior when the equipment is not in use.

2. The semiconductor device cooling liquid metal ion concentration probe of claim 1, wherein: The dustproof device (2) includes a rigid shell (201), the inner wall of which is fixedly connected to the outer wall of the transmission hose (1), a rotator shell (202) is fixedly connected to the outer wall of the rigid shell (201), an arc groove (203) is provided on the outer wall of the rotator shell (202), a connecting rod (204) is slidably connected to the outer wall of the arc groove (203), a dustproof shell (205) is slidably connected to the outer wall of the connecting rod (204), a through hole (206) is provided on the outer wall of the dustproof shell (205), a sealing ring (207) is fixedly connected to the outer wall of the through hole (206), and a knob (208) is fixedly connected to the outer wall of the connecting rod (204).

3. The semiconductor device cooling liquid metal ion concentration probe of claim 1, wherein: The outer wall of the knob (13) is fixedly connected with anti-slip texture (14), and the outer wall of the connector (3) is threadedly connected with a connecting block (15).

4. The semiconductor device cooling liquid metal ion concentration probe of claim 2, wherein: The outer wall of the dustproof shell (205) is fixedly connected to a protective shell (16), the inner wall of the protective shell (16) is fixedly connected to a filter screen (17), and the outer wall of the knob (208) is fixedly connected to a sleeve (18).

5. The semiconductor device cooling liquid metal ion concentration probe of claim 4, wherein: The inner wall of the sleeve (18) is slidably connected to a pull rod (19), and the outer wall of the pull rod (19) is fixedly connected to a locking post (20).

6. The semiconductor device cooling liquid metal ion concentration probe of claim 5, wherein: A baffle (21) is fixedly connected to the outer wall of the locking post (20), and a spring (22) is fixedly connected to the outer wall of the baffle (21).

7. The semiconductor device cooling liquid metal ion concentration probe of claim 1, wherein: The outer wall of the transmission hose (1) is fixedly connected to a probe housing (29), the inner wall of the probe housing (29) is fixedly connected to a detection pool (23), the inner wall of the transmission hose (1) is provided with an inner insulating waterproof layer (25), and the inner wall of the inner insulating waterproof layer (25) is fixedly connected to a partition plate (26).

8. The semiconductor device cooling liquid metal ion concentration probe of claim 7, wherein: The inner wall of the inner insulating waterproof layer (25) is provided with a wire (27), the outer wall of the wire (27) is fixedly connected with an electrode plate (28), and the inner wall of the detection pool (23) is fixedly connected with a partition plate (24).

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