Contact probe, probe head and probe card using the contact probe
By designing a contact probe tail with reduced width and thickness, combined with a beveled and recessed planar structure, the problems of unstable contact impedance and insufficient contact area were solved, ensuring the stability and accuracy of test results, while reducing the risk of the probe tail extending beyond the edge of the contact pad.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- MPI CORP
- Filing Date
- 2025-06-10
- Publication Date
- 2026-07-31
AI Technical Summary
With the miniaturization of electronic components, contact probes are prone to unstable contact impedance and insufficient contact area when contacting the contact pads of the device under test. Furthermore, the tip of the probe may extend beyond the edge of the contact pad, affecting the accuracy of the test results.
The probe tail is designed with a reduced width and thickness to form a smaller contact end face. The cross-sectional area is gradually reduced by a bevel or an inward-reducing plane. Combined with the structure of the stop and base, this ensures stable contact and precise alignment between the probe tail and the interface plate.
It achieves stable contact impedance and accurate test results, reduces the risk of the probe tail extending beyond the edge of the contact pad, and improves the structural strength and installation efficiency of the contact probe.
Smart Images

Figure CN224581593U_ABST
Abstract
Description
Technical Field
[0001] This application relates to probes in probe cards for test equipment used in electronic devices, and more particularly to a contact probe and a probe head and probe card containing the contact probe. Background Technology
[0002] With the trend of miniaturization of electronic components, the contact pads of electronic components are also becoming smaller. The smaller the contact pad, the less contact force it can withstand. Therefore, the probe cards used to test electronic components with tiny contact pads need to use contact probes with low contact force (or low needle pressure) to avoid applying excessive contact force when the contact probe contacts the contact pad of the device under test, which could damage the device under test.
[0003] In addition to contacting the contact pads of the device under test with its tip, the contact probe also needs to contact the contact pads of the interface board (such as a space transformer) with its tail to establish an electrical connection between the probe and the interface board. However, when using a contact probe with low contact force, the force exerted by the probe tail on the interface board's contact pad will also be relatively low, which can easily lead to unstable contact impedance. That is, an unstable contact is formed between the probe tail and the interface board's contact pad, which will adversely affect the accuracy of the test results.
[0004] Furthermore, with the trend of miniaturization of electronic components, the center-to-center spacing of their contact pads is becoming increasingly smaller. Therefore, the contact probes of the probe cards required for testing also need to have fine spacing characteristics, such as a center-to-center spacing of 50 to 80 micrometers, or even less than 50 micrometers. The contact pads of the interface board of the probe card will also shrink in size and center-to-center spacing. As a result, the tip of the contact probe may extend beyond the edge of the contact pad it contacts, which may lead to insufficient contact area or the contact probe contacting a non-corresponding contact pad. Utility Model Content
[0005] To address the aforementioned issues, the main objective of this application is to provide a contact probe for a probe card of a test device for electronic devices. The probe tip can make stable contact with the contact pad of the interface board to obtain stable contact impedance, thereby ensuring stable and accurate test results. Furthermore, the probe tip can be precisely aligned with its corresponding contact pad, thus reducing the risk of exceeding the edge of the contact pad.
[0006] To achieve the above objectives, the contact probe provided in this application defines mutually perpendicular longitudinal, first transverse, and second transverse axes. The contact probe defines a width along the first transverse axis, a thickness along the second transverse axis, and a cross-sectional area perpendicular to the longitudinal axis. The contact probe includes an elongated needle body extending along the longitudinal axis, a needle tip connected to the needle body and extending downward from the needle body along the longitudinal axis, and a needle tail connected to the needle body and extending upward from the needle body along the longitudinal axis. The needle body defines a first central axis extending along the longitudinal axis. The needle body is bent at least along the first transverse axis between an upper guide plate unit and a lower guide plate unit. The needle tip is used to abut against a contact pad of the device under test located below the lower guide plate unit. The needle tail includes a contact end portion, which includes a contact end face. The contact end face is used to mechanically and electrically contact the contact pad of the interface plate. The contact end face defines a second central axis extending along the longitudinal axis. The contact end portion is at least partially smaller than the needle body in both width and thickness, such that the area of the contact end face is smaller than the cross-sectional area of the needle body.
[0007] Therefore, compared to the needle body, the contact tip of the needle tail is reduced in both width and thickness, thereby reducing the contact area. This enhances the contact stability between the contact tip and the contact pad of the interface board, resulting in stable contact impedance and stable and accurate test results. Furthermore, the smaller contact area of the needle tail allows for more precise alignment with the corresponding contact pad on the interface board, and ensures sufficient safety distance between the contact tip and the edge of the contact pad it contacts, reducing the risk of the contact tip extending beyond the edge of the contact pad.
[0008] Preferably, the contact end of the needle tail of the contact probe is at least partially tapered towards the contact end face along the longitudinal axis in terms of cross-sectional area.
[0009] In other words, the contact end of the needle tail has at least a local inclined surface, conical surface or similar structure that is inclined relative to the longitudinal axis, thereby achieving the characteristic of gradually reducing the cross-sectional area. This can avoid the problem of insufficient structural strength caused by the reduction of the cross-sectional area at the contact end.
[0010] Preferably, the needle tail includes four sides, at least one of which includes an inwardly recessed plane, the inwardly recessed plane being parallel to and facing the same direction as one side of the needle body, and the inwardly recessed plane being offset from the side of the needle body in the opposite direction to the same direction.
[0011] In other words, besides achieving a smaller contact area by having at least a partially tapered contact end, the needle tail can also achieve this by having at least a partially planar (non-tapered) side of the needle tail that is directly recessed relative to the needle body. This allows the needle tail to reduce its cross-sectional area relative to the needle body in a non-tapered manner, thus reducing the contact force exerted by the needle tail on the contact pad of the interface plate to some extent, while also reducing the area of the contact end face to improve contact resistance and contact stability. Furthermore, the needle tail can simultaneously possess both the characteristics of taperingly reducing the cross-sectional area (i.e., the aforementioned inclined surface, conical surface, or similar structure) and non-taperedly reducing the cross-sectional area (i.e., the aforementioned recessed plane), thereby ensuring that the contact end face has an appropriate area and generates appropriate contact force and contact resistance to meet testing requirements.
[0012] More preferably, two sides of the needle tail each include an inner recessed plane, the inner recessed planes of the two sides facing the positive and negative directions of the first transverse axis, respectively.
[0013] After the contact probe passes through the upper and lower guide holes of the upper and lower guide plate units, the upper and lower guide plate units will at least shift relative to each other along the first transverse axis, causing the section of the needle body located between the upper and lower guide plate units to elastically bend and deform along the first transverse axis (the upper and lower guide plate units may also shift relative to each other along the first and second transverse axes, causing the needle body to elastically bend and deform along both axes). At this time, the positive or negative side of the needle body facing the first transverse axis will abut against the inner surface of the upper guide hole. That is, the section of the needle body located in the upper guide hole will not be centered relative to the upper guide hole, but will be eccentric at least along the first transverse axis. By giving the needle tail the inwardly recessed planes facing the positive and negative directions of the first transverse axis, the contact end face of the needle tail can be adjusted to be less eccentric relative to the upper guide hole along the first transverse axis (compared to the needle body), or even centered relative to the upper guide hole. Therefore, the contact end face of the needle tail can be more accurately aligned with the contact pad of its corresponding interface board, and the risk of the contact end face of the needle tail going beyond the edge of the contact pad it contacts can be reduced.
[0014] Preferably, the needle tail further includes a stop portion and a base portion, the stop portion being connected to the needle body, and the base portion being connected between the stop portion and the contact end; the cross-sectional area of the stop portion is larger than the cross-sectional area of the needle body, thereby restricting the needle tail above the upper guide plate unit; the cross-sectional area of the base portion is smaller than the cross-sectional area of the stop portion, and the cross-sectional area of the contact end is smaller than or equal to the cross-sectional area of the base portion.
[0015] Therefore, a base is provided between the contact end and the stop, which strengthens the structural strength of the needle tail and makes the contact end less prone to breakage under stress. Moreover, when the contact probe is inserted into the upper and lower guide plate units, the contact probe passes through the upper and lower guide holes of the upper and lower guide plate units from top to bottom. When the installer looks down, it is usually difficult to identify whether the installation direction of the contact probe is correct by the relative position relationship between the contact end and the stop. However, with a base, the relative position relationship between the contact end and the base can be clearly identified, thereby improving the efficiency and accuracy of the contact probe installation.
[0016] More preferably, the base portion has a top surface, and the contact end is biased toward at least one side of the base portion and connected to a portion of the top surface, such that the point where the contact end is connected to the base portion is offset by a certain distance relative to at least one edge of the top surface of the base portion along at least one of the first and second transverse axes.
[0017] Therefore, the contact end is biased towards one side of the base portion along the first transverse axis and / or towards the other side of the base portion along the second transverse axis, so that the contact end and the base portion have a clearly identifiable relative positional relationship, thereby improving the efficiency and accuracy of installing the contact probe.
[0018] More preferably, the base portion is trapezoidal in cross-section parallel to the longitudinal axis.
[0019] Therefore, the base portion can be trapezoidal in the cross-section along the longitudinal axis and the first transverse axis, or it can be trapezoidal in the cross-section along the longitudinal axis and the second transverse axis. In this way, the cross-sectional area gradually decreases from the base portion upwards, thereby ensuring the overall structural strength of the needle tail while ensuring that the contact end face has the required small area.
[0020] More preferably, the width of the base portion is smaller than the width of the stop portion, and the thickness of the base portion is less than or equal to the thickness of the stop portion and greater than or equal to the thickness of the contact end portion.
[0021] Therefore, the base portion only needs to be narrower than the stop portion, while its thickness can be equal to that of the stop portion, or the thickness of the base portion can be narrower than that of the stop portion. This reduces the cross-sectional area from the base portion, resulting in a smaller contact surface area.
[0022] More preferably, the base portion and the stop portion are discontinuously connected to each other.
[0023] Therefore, the base and the stop are clearly distinguishable in appearance, and they do not form a continuous shape together. This results in a significant difference in the cross-sectional area of the base relative to that of the stop, thereby reducing the cross-sectional area from the base and making the contact end face smaller.
[0024] Preferably, the second central axis of the contact end face of the needle tail is offset from the first central axis of the needle body by a certain distance along the first transverse axis.
[0025] As mentioned earlier, when the upper and lower guide plate units are displaced relative to each other along the first transverse axis, causing the probe body to bend along the first transverse axis, the section of the probe body located within the upper guide hole will be eccentrically positioned relative to the upper guide hole along the first transverse axis. By offsetting the second central axis from the first central axis along the first transverse axis by a certain distance, the degree of eccentricity of the probe tail contact end face relative to the upper guide hole along the first transverse axis can be reduced (compared to the probe body), and the probe tail contact end face can even be centered relative to the upper guide hole. Therefore, the probe tail contact end face can be more accurately aligned with the contact pad of its corresponding interface plate, and the risk of the probe tail contact end face extending beyond the edge of the contact pad it contacts can be further reduced.
[0026] More preferably, the second central axis of the contact end face of the needle tail is offset from the first central axis of the needle body by another distance along the second transverse axis.
[0027] Since the upper and lower guide plate units may shift relative to each other along both the first and second transverse axes, the section of the needle body located within the upper guide hole may also be eccentrically positioned relative to the upper guide hole along the second transverse axis. By offsetting the second central axis from the first central axis by a certain distance along the second transverse axis, the degree of eccentricity of the needle tail contact end face relative to the upper guide hole along the second transverse axis can be reduced (compared to the needle body), and the needle tail contact end face can even be centered relative to the upper guide hole. Therefore, the needle tail contact end face can be more accurately aligned with the contact pad of its corresponding interface plate, and the risk of the needle tail contact end face extending beyond the edge of the contact pad it contacts can be further reduced.
[0028] Preferably, the needle body includes at least one slit extending along the longitudinal axis and penetrating the needle body along a second transverse axis, such that the needle body is defined by the at least one slit into at least two arms, the at least two arms being separated from each other along a first transverse axis.
[0029] Therefore, the slit weakens the rigidity of the probe body, thereby reducing the contact force exerted by the contact probe on the contact pads of the device under test and the interface plate, thus preventing damage to the contact pads due to excessive contact force. Especially for high-frequency and high-speed testing requirements, shorter contact probes are usually used to obtain good electrical transmission characteristics. However, shorter contact probes have higher rigidity and contact force, which can be reduced by the slit. In addition, the slit also enhances the elasticity of the probe body, ensuring the elastic deformation effect of the probe body when bending along the first transverse axis.
[0030] More preferably, the thickness of the needle body is greater than or equal to the width of the needle body.
[0031] Because the needle body is bent along the axis of the defined width (i.e., the first transverse axis), the width of the needle body is no greater than the thickness, or even less than the thickness, which allows the needle body to produce a better elastic deformation effect and allows the needle body to have sufficient thickness so that it is less likely to break.
[0032] More preferably, the slit is provided with at least one set of bumps, the set of bumps comprising two bumps that protrude from two adjacent arms facing each other.
[0033] Therefore, when the probe tip abuts against the contact pad of the test device and is subjected to a reaction force, the probe body is compressed, elastically deformed, and deflects. At this time, the two protrusions facing each other within the slit will abut against each other, thus preventing adjacent arms from contacting each other and wearing out, thereby extending the service life of the contact probe. Moreover, by having the two protrusions facing each other abut against each other, the arms can maintain a consistent deflection direction and a certain distance, which is beneficial for the electrical performance of high-frequency and high-speed tests.
[0034] This application further provides a probe head for a probe card of a test device for an electronic device, comprising an upper guide plate unit, a lower guide plate unit, and a plurality of probes. The upper guide plate unit includes a plurality of upper guide holes, and the lower guide plate unit includes a plurality of lower guide holes. The probes pass through the upper guide holes and the lower guide holes respectively, and the plurality of probes includes at least one contact probe as described above. The plurality of probes are all bent along a first transverse axis, and each upper guide hole defines a third central axis. The second central axis of the contact probe is closer to the third central axis of the upper guide hole it passes through than the first central axis.
[0035] Therefore, the probe tip of this application, due to the small contact end face of the needle tail, can stably contact the contact pad of the interface board, resulting in stable and accurate test results. Moreover, compared to the needle body, the contact end face of the needle tail has a lower degree of eccentricity relative to the upper guide hole. This allows the contact end face of the needle tail to be more accurately aligned with the corresponding contact pad of the interface board, and further ensures that there is a sufficient safety distance between the contact end face of the needle tail and the edge of the contact pad it contacts, thereby reducing the risk that the contact end face of the needle tail may extend beyond the edge of the contact pad it contacts.
[0036] Preferably, the second central axis of the contact probe coincides with the third central axis of the upper guide hole.
[0037] Therefore, the contact end face of the needle tail is centered relative to the upper guide hole, which allows the contact end face of the needle tail to be more accurately aligned with the contact pad of its corresponding interface board, and reduces the risk that the contact end face of the needle tail will extend beyond the edge of the contact pad it contacts.
[0038] Preferably, the first transverse axis can define two opposite directions, the needle body of the contact probe includes a first bearing surface facing the first transverse axis in said direction, the first bearing surface abuts against the inner surface of the upper guide hole, and the contact end of the needle tail of the contact probe is at least partially offset from the first bearing surface in one of the other directions of the first transverse axis.
[0039] For example, when the first abutment surface of the needle body faces the negative direction of the first transverse axis, the contact end of the needle tail is at least partially offset from the first abutment surface in the positive direction of the first transverse axis. Therefore, compared to the needle body, the contact end face of the needle tail is less eccentric relative to the upper guide hole along the first transverse axis, and can even be centrally positioned relative to the upper guide hole. This allows the contact end face of the needle tail to be more accurately aligned with the contact pad of its corresponding interface plate, and further reduces the risk of the contact end face of the needle tail extending beyond the edge of the contact pad it contacts.
[0040] Preferably, the second transverse axis can define two opposite directions, the needle body of the contact probe includes a second bearing surface facing one of the directions of the second transverse axis, the second bearing surface abuts against the inner surface of the upper guide hole, and the contact end of the needle tail of the contact probe is at least partially offset from the second bearing surface in the other direction of the second transverse axis.
[0041] For example, when the second abutment surface of the needle body faces the negative direction of the second transverse axis, the contact end of the needle tail deviates at least partially from the second abutment surface in the positive direction of the second transverse axis. Therefore, compared to the needle body, the contact end face of the needle tail is less eccentric relative to the upper guide hole along the second transverse axis, and can even be centrally positioned relative to the upper guide hole. This allows for more precise alignment of the contact end face of the needle tail with the contact pad of its corresponding interface plate, and further reduces the risk of the contact end face of the needle tail extending beyond the edge of the contact pad it contacts.
[0042] This application further provides a probe card for a test apparatus for an electronic device, comprising a probe head as described above, and an interface board. The interface board includes a lower surface facing the probe head, and a plurality of contact pads located on the lower surface. The contact end face of the probe head's contact probe tail makes mechanical and electrical contact with the contact pads of the interface board.
[0043] Therefore, the probe card of this application uses the aforementioned probe head, which has its advantages and benefits, can produce accurate, stable and good test results, and can avoid the risk that the contact end face of the needle tail exceeds the edge of the contact pad it contacts.
[0044] Detailed descriptions of the structure, features, assembly, and usage of the contact probes, probe heads, and probe cards provided in this application will be provided in the subsequent detailed descriptions of the embodiments. However, those skilled in the art to which this application pertains should understand that the above detailed descriptions and the specific embodiments listed in this application are for illustrative purposes only and are not intended to limit the scope of patent protection of this application. Attached Figure Description
[0045] The contact probe, probe head, and probe card provided in this application will be further described below with reference to the accompanying drawings and implementation methods, wherein:
[0046] Figure 1 This is a schematic diagram of the test equipment and the device under test provided in a preferred embodiment of this application.
[0047] Figure 2 This is a partial cross-sectional schematic diagram of the probe card used in the test equipment.
[0048] Figure 3 This is a planar schematic diagram of the contact probe of the probe card.
[0049] Figure 4 This is a partial three-dimensional schematic diagram of the contact probe.
[0050] Figure 5 for Figure 2 Sectional view along section line 5-5.
[0051] Figure 6 and Figure 7 They are respectively similar to Figure 4 and Figure 5 However, the needle tails show different patterns.
[0052] Figures 8 to 13 This is a partial three-dimensional schematic diagram of other contact probes with different states.
[0053] Figures 14 to 23 This is a partial planar schematic diagram of other contact probes with different states.
[0054] Figure 24 This is a partial three-dimensional schematic diagram of a contact probe of a different state.
[0055] Figure 25 This is a planar schematic diagram of a contact probe of a different state.
[0056] Figure 26 for Figure 25 Sectional view along section line 26-26.
[0057] The markings in the attached diagram are as follows:
[0058] 10: Testing equipment
[0059] 11: Supporting platform
[0060] 12: Probe Card
[0061] 20: Wafer
[0062] 21: Test Device
[0063] 211: Contact pad
[0064] 30: Interface board
[0065] 31: Lower surface
[0066] 32: Contact pad
[0067] 40: Probe head
[0068] 41: Upper guide plate unit
[0069] 411: Upper guide hole
[0070] 411a, 411b: Inner surface
[0071] 42: Lower guide plate unit
[0072] 421: Lower guide hole
[0073] 43: Probe
[0074] 50: Contact probe
[0075] 51: Needle body
[0076] 51a, 51b, 51c, 51d: Side view
[0077] 511: First bearing surface
[0078] 512: Second bearing surface
[0079] 513: Slit
[0080] 514: Arm
[0081] 515: Bump Group
[0082] 516: Bump
[0083] 52: Needle
[0084] 53: Needle tail
[0085] 53a, 53b, 53c, 53d: Side view
[0086] 531: Stopping part
[0087] 532: Base section
[0088] 532a: Top surface
[0089] 532b: Side edge
[0090] 533: Contact end
[0091] 533a: Gradual contraction
[0092] 533b: Non-gradient segment
[0093] 534: Contact end face
[0094] 535:Front bevel
[0095] 536: Back slope
[0096] 537, 538: Inward plane
[0097] 539:Right bevel
[0098] 540:Left bevel
[0099] 541: Inward plane
[0100] A1: First central axis
[0101] A2: Second Central Axis
[0102] A3: Third Central Axis
[0103] D1, D2, D3: Distance
[0104] T: Thickness
[0105] W: Width Detailed Implementation
[0106] First, it should be noted that in the embodiments and accompanying drawings described below, the same reference numerals denote the same or similar elements or their structural features. It should be observed that the elements and structures in the accompanying drawings are for illustrative purposes and are not drawn to scale or in quantity; and features of different embodiments may be used interchangeably if feasible in practice. Second, when it is stated that an element is disposed on another element, it means that the aforementioned element is directly disposed on the other element, or indirectly disposed on the other element; that is, one or more other elements are disposed between the two elements. Conversely, when it is stated that an element is "directly" disposed on another element, it means that no other elements are disposed between the two elements.
[0107] Please refer to the following first. Figure 1This application provides a preferred embodiment of a test apparatus 10 for an electronic device. The test apparatus 10 includes a stage 11 and a probe card 12. The electronic device (hereinafter also referred to as the device under test) in this embodiment is formed on a wafer 20. The wafer 20 is placed on the stage 11, and a plurality of devices under test 21 are formed on the wafer 20. Each device under test 21 includes a plurality of contact pads 211. The probe card 12 includes at least an interface board 30 and a probe head 40. The probe head 40 includes an upper guide plate unit 41, a lower guide plate unit 42, and a plurality of probes 43 passing through the upper and lower guide plate units 41 and 42. The probe card 12 is used to electrically connect to a test machine (not shown in the figure) and to perform test procedures by mechanically and electrically contacting the contact pads 211 of the device under test 21 through the probes 43.
[0108] like Figure 2 As shown, the upper guide plate unit 41 includes a plurality of upper guide holes 411, and the lower guide plate unit 42 includes a plurality of lower guide holes 421. The aforementioned plurality of probes 43 pass through the upper guide holes 411 and the lower guide holes 421 respectively. The probes 43 in the probe head 40 may be all or part of the following: Figure 2 The contact probe 50 shown in this application refers to the probe 43 whose needle tail has specific structural features, which will be described in detail below. In this embodiment, the upper and lower guide plate units 41 and 42 each contain only one plate body; however, the upper guide plate unit 41 and / or the lower guide plate unit 42 may also be composed of multiple stacked plates. The edges of the upper and lower guide plate units 41 and 42 may have protruding structures and be directly connected to each other, or a hollow middle guide plate (not shown in the figure) may be connected between the upper and lower guide plate units 41 and 42.
[0109] Probe cards typically include a main circuit board for electrical connection to a testing machine. This main circuit board may be directly mounted on the probe head, or a space converter may be provided between the main circuit board and the probe head. The interface board 30 described in this application refers to a circuit board directly mounted on the probe head 40 and in direct contact with the probe 43; therefore, the interface board 30 can be either the aforementioned main circuit board or a space converter. Figure 2 As shown, the interface board 30 includes a lower surface 31 facing the probe head 40, and a plurality of contact pads 32 located on the lower surface 31, wherein the contact probes 50 respectively mechanically and electrically contact the contact pads 32 of the interface board 30.
[0110] During the assembly of the probe head 40, the upper and lower guide plate units 41 and 42 are initially positioned relative to each other but not yet fixed. At this time, the upper guide hole 411 is coaxially aligned with the lower guide hole 421. The probe 43, initially in a straight line, passes through the coaxially aligned upper guide hole 411 and lower guide hole 421 from top to bottom. Then, the upper and lower guide plate units 41 and 42 move relative to each other along the first transverse axis (Y-axis), causing the upper guide hole 411 and lower guide hole 421 to be offset from each other along the Y-axis, thereby causing the probe 43 to bend along the Y-axis, i.e., as shown in the figure. Figure 2 The contact probe 50 is shown in a curved shape. The upper and lower guide plate units 41 and 42 can also (but are not limited to) move relative to each other along the second transverse axis (X-axis), so that the upper guide hole 411 and the lower guide hole 421 are also offset from each other along the X-axis, thereby causing the probe 43 to also bend along the X-axis. After the upper and lower guide plate units 41 and 42 have moved relative to each other, they will be fixed to each other, so that the probe 43 in the probe head 40 maintains its curved shape.
[0111] Please see Figure 2 and Figure 3 When the contact probe 50 is still in a straight line state, the contact probe 50 includes a needle body 51 extending in an elongated shape along the longitudinal axis (Z-axis), a needle tip 52 integrally connected to the needle body 51 and extending downward from the needle body 51 along the Z-axis, and a needle tail 53 integrally connected to the needle body 51 and extending upward from the needle body 51 along the Z-axis. In this application, the contact probe 50 defines a width along a first transverse axis (Y-axis), a thickness along a second transverse axis (X-axis), and a cross-sectional area perpendicular to the longitudinal axis (Z-axis), that is, a cross-sectional area defined in the XY plane. When the probe head 40 is assembled, the needle tail 53 is located above the upper guide hole 411 and is used to abut against the contact pad 32 of the interface plate 30. The needle head 52 is located below the lower guide hole 421 and is used to abut against the contact pad 211 of the test device 21. The needle body 51 is bent along the first transverse axis or along the first and second transverse axes and is located between the upper and lower guide plate units 41 and 42, so as to be slightly elastically bent when the needle head 52 abuts against the contact pad 211 of the test device 21.
[0112] Please see Figure 3 and Figure 4 In this embodiment, the needle tail 53 of the contact probe 50 includes, from bottom to top, a stop portion 531, a base portion 532, and a contact end portion 533. The stop portion 531 is connected to the needle body 51, and the base portion 532 is connected between the stop portion 531 and the contact end portion 533. The stop portion 531 and the needle body 51 have the same thickness, but the width of the stop portion 531 is greater than the width of the needle body 51. Therefore, the cross-sectional area of the stop portion 531 is greater than the cross-sectional area of the needle body 51. Figure 2As shown, the width of the upper guide hole 411 is slightly larger than the width of the needle body 51 but smaller than the width of the stop portion 531. Therefore, the stop portion 531 allows the needle tail 53 to be confined above the upper guide plate unit 41. The base portion 532 has the same thickness as the stop portion 531 (or the thickness of the base portion 532 may be smaller than the thickness of the stop portion 531), but the width of the base portion 532 is smaller than the width of the stop portion 531. Therefore, the cross-sectional area of the base portion 532 is smaller than the cross-sectional area of the stop portion 531. The width of the contact end 533 is smaller than the width of the base portion 532, the thickness of the base portion 532 is greater than or equal to the thickness of the contact end 533, the cross-sectional area of the contact end 533 where it connects to the base portion 532 is smaller than the cross-sectional area of the base portion 532, and the cross-sectional area of the contact end 533 gradually decreases upward from that point. The contact end 533 includes a contact end face 534 located at its uppermost end. The contact end face 534 is used for mechanical and electrical contact with the contact pad 32 of the interface plate 30. The contact end 533 is generally smaller in width than the needle body 51. Moreover, except for the part connecting to the base portion 532, the thickness of the contact end 533 is also smaller than that of the needle body 51 and gradually tapers upward, so that the area of the contact end face 534 is much smaller than the cross-sectional area of the needle body 51. It should be understood that the base portion 532 and the stop portion 531 in this application are not connected to each other discontinuously, that is, the base portion 532 and the stop portion 531 can be clearly distinguished in appearance, and the two do not form a continuous shape together. For example, the base portion 532 and the stop portion 531 form a difference in appearance, that is, the outer surface (side) has a height difference.
[0113] Therefore, compared to the needle body 51, the contact end 533 of the needle tail 53 is reduced in both width and thickness, thereby reducing the area of the contact end face 534. This enhances the contact stability between the contact end face 534 of the needle tail 53 and the contact pad 32 of the interface plate 30, resulting in stable contact impedance. This ensures stable and accurate test results, guaranteeing the good performance of the tested device. Furthermore, the small area of the contact end face 534 of the needle tail 53 allows for more precise alignment with the corresponding contact pad 32 of the interface plate 30. It also allows for sufficient safety distance between the contact end face 534 of the needle tail 53 and the edge of the contact pad 32 it contacts, thereby reducing the risk of the contact end face 534 of the needle tail 53 extending beyond the edge of the contact pad 32 it contacts.
[0114] Furthermore, a base portion 532 is provided between the contact end 533 and the stop portion 531. This reduces the area of the contact end face 534 of the needle tail 53, thereby reducing the length or height of the contact end 533 in the Z-axis direction, thus strengthening the structural strength of the needle tail 53 and making the contact end 533 less prone to breakage under stress. Moreover, the base portion 532 can be designed to have a clearly identifiable relative positional relationship with the contact end 533, for example... Figure 3As shown, in this embodiment, the right side of the base portion 532 is flush with the right side of the contact end portion 533, while the left side of the base portion 532 protrudes significantly beyond the left side of the contact end portion 533. This asymmetrical design provides a clear identification effect. When the installer inserts the contact probe 50 from top to bottom into the upper and lower guide plate units 41 and 42, they can easily identify whether the installation direction of the contact probe 50 is correct by the relative positional relationship between the base portion 532 and the contact end portion 533. This improves the efficiency and accuracy of installing the contact probe 50. The base portion 532 and the contact end portion 533 are eccentrically configured. Specifically, the contact end portion 533 is offset from the base portion 532 by a predetermined distance in the width direction (i.e., the direction of needle bending). Or, the contact end portion 533 is offset from the base portion 532 by a predetermined distance in the Y-axis direction. More specifically, the base portion 532 has a top surface 532a, and a contact end portion 533 is biased toward at least one side of the base portion 532 (in this embodiment, biased to the right, but may also be biased to the front or rear) and connected to and / or formed in a portion of the top surface 532a, such that the point where the contact end portion 533 connects to the base portion 532 is offset relative to at least one edge 532b of the top surface 532a of the base portion 532 by a distance D3 along at least one of the X-axis and Y-axis (in this embodiment, for example, ...). Figure 3 As shown, this is the distance D3 offset along the Y-axis relative to the left edge of the top surface 532a, and it can also be offset by another distance along the X-axis relative to the front or rear edge of the top surface 532a.
[0115] like Figure 3 As shown, the needle body 51 defines a first central axis A1 extending along the Z-axis, and the contact end face 534 defines a second central axis A2 extending along the Z-axis. The second central axis A2 is offset from the first central axis A1 along the Y-axis by a distance D1. Figure 2 As shown, each upper guide hole 411 defines a third central axis A3. When the probe head 40 is assembled, the relative movement of the aforementioned upper and lower guide plate units 41 and 42 along the Y-axis will cause the first central axis A1 of the needle body 51 to deviate from the third central axis A3 of the upper guide hole 411 in the negative Y-axis direction, as shown. Figure 5As shown. Furthermore, the second central axis A2 of the contact end face 534 can be offset by another distance D2 along the X-axis from the first central axis A1 of the needle body 51. When the probe head 40 is assembled, the relative movement of the aforementioned upper and lower guide plate units 41 and 42 along the X-axis will cause the first central axis A1 of the needle body 51 to deviate from the third central axis A3 of the upper guide hole 411 in the positive X-axis direction. It should be understood that when the probe head 40 is assembled, the middle section of the needle body 51 contacting the probe 50 is curved, therefore the first central axis A1 of the needle body 51 will also be curved in the middle section accordingly. The aforementioned deviation of the first central axis A1 from the third central axis A3 of the upper guide hole 411 refers to the relationship between the section of the first central axis A1 located within the upper guide hole 411 and the third central axis A3 of the upper guide hole 411. In this embodiment, the design of the contact end 533 makes the second central axis A2 of the contact end face 534 closer to the third central axis A3 of the upper guide hole 411 through which it passes, compared to the first central axis A1 of the needle body 51. Figure 5 As shown ( Figure 5 The contact end face 534 is indicated by a dashed line. In other words, compared to the needle body 51, the contact end face 534 of the needle tail 53 is less eccentric relative to the upper guide hole 411. This allows the contact end face 534 of the needle tail 53 to be more accurately aligned with the contact pad 32 of its corresponding interface plate 30, and also ensures that there is a sufficient safety distance between the contact end face 534 of the needle tail 53 and the edge of the contact pad 32 it contacts, thereby reducing the risk that the contact end face 534 of the needle tail 53 will extend beyond the edge of the contact pad 32 it contacts.
[0116] More ideally, the contact end 533 can be designed such that the second central axis A2 of its contact end face 534 coincides with the third central axis A3 of the upper guide hole 411, that is, the contact end face 534 of the needle tail 53 is centered relative to the upper guide hole 411. This allows the contact end face 534 of the needle tail 53 to be more accurately aligned with the contact pad 32 of its corresponding interface plate 30, and also reduces the risk that the contact end face 534 of the needle tail 53 will extend beyond the edge of the contact pad 32 it contacts.
[0117] Furthermore, in Figures 2 to 5 In the illustrated configuration, the needle body 51 of the contact probe 50 includes a first bearing surface 511 facing the negative Y-axis. The relative movement of the aforementioned upper and lower guide plate units 41 and 42 along the Y-axis causes the first bearing surface 511 of the needle body 51 to abut against an inner surface 411a of the upper guide hole 411, while the contact end 533 of the needle tail 53 deviates from the first bearing surface 511 in the positive Y-axis direction, i.e. Figure 3 As shown, the contact end 533 is positioned further to the right of the first bearing surface 511 on the Y-axis. This structural design allows for a lower degree of eccentricity of the contact end surface 534 of the needle tail 53 relative to the upper guide hole 411 along the Y-axis, or even a centered configuration.
[0118] On the other hand, the needle body 51 of the contact probe 50 also includes a second bearing surface 512 facing the positive X-axis. The relative movement of the aforementioned upper and lower guide plate units 41 and 42 along the X-axis causes the second bearing surface 512 to abut against another inner surface 411b of the upper guide hole 411, while the contact end 533 of the needle tail 53 deviates from the second bearing surface 512 in the negative X-axis direction, that is, as Figure 4 As shown, the position of the front inclined surface 535 of the contact end 533 on the X-axis gradually deviates from the position of the second bearing surface 512 on the X-axis from bottom to top. Through this structural design, the degree of eccentricity of the contact end surface 534 of the needle tail 53 relative to the upper guide hole 411 along the X-axis can be reduced, or even centrally located.
[0119] The needle tail 53 of the contact probe 50 can also be like Figure 6 As shown, it is similar to Figure 4 The only difference shown in the needle tail 53 is that... Figure 4 The contact end 533 in the middle has only a front inclined surface 535 on its front side, which makes its cross-sectional area gradually decrease upward, while Figure 6 The contact end 533 is provided with a front inclined surface 535 and a rear inclined surface 536 on its front and rear sides, respectively, so that its cross-sectional area gradually decreases upward. This allows the area of the contact end surface 534 to be smaller. Figure 7 As shown ( Figure 7 The contact end face 534 is indicated by a dashed line, which allows for more precise alignment of the contact end face 534 with the contact pad 32 of the interface plate 30 and reduces the risk of the contact end face 534 extending beyond the edge of the contact pad 32. The contact end face 533 has an isosceles trapezoidal shape that is larger at the bottom and smaller at the top. This geometric shape allows the upper contact end face 534 to maintain a small contact area while ensuring the connection strength between the lower part and the base part 532, further improving the reliability and performance of the overall design.
[0120] exist Figure 4 and Figure 6 In the illustrated configuration, the contact end 533 of the needle tail 53 tapers from its lowest point to its highest contact end face 534, meaning that the entire cross-sectional area tapers along the Z-axis towards the contact end face 534. However, the contact end 533 of the needle tail 53 may also only have a localized cross-sectional area taper along the Z-axis towards the contact end face 534, for example... Figure 8 and Figure 9The contact end 533 of the needle tail 53 shown includes a tapered section 533a with a gradually decreasing cross-sectional area and a non-tapered section 533b with a uniform cross-sectional area. By making the cross-sectional area of the contact end 533 of the needle tail 53 gradually decrease, rather than decreasing abruptly, the problem of insufficient structural strength caused by the reduction of the cross-sectional area of the contact end 533 can be avoided. In other words, by adopting an upwardly tapering manner, the strength of the contact end 533 can be further ensured while maintaining a small area of the contact end face 534. That is, the connection between the contact end 533 and the base portion 532 can withstand greater pressure or stress, thereby improving the overall stability and durability of the contact end 533 structure and reducing damage or deformation that may be caused by uneven stress.
[0121] The contact probe 50's tail 53 can achieve a smaller contact end face 534 area not only by having a contact end 533 that is at least partially tapered, but also by having at least one side of the tail 53 that is at least partially directly planar (non-tapered) and recessed relative to the needle body 51. More specifically, as... Figure 4 As shown, the needle tail 53 includes four sides 53a, 53b, 53c, and 53d, namely front, back, left, and right sides, and the needle body 51 also has corresponding four sides 51a, 51b, 51c, and 51d. Figure 4 , Figure 6 , Figure 8 and Figure 9 In the illustrated configuration, the side 53d (right side) of the needle tail 53 includes an inward-curving plane 537. This inward-curving plane 537 is parallel to the side 51d (right side) of the needle body 51 and faces the positive Y-axis. The inward-curving plane 537 is offset from the side 51d of the needle body 51 in the negative Y-axis direction (i.e., to the left). Furthermore, the side 53c (left side) of the needle tail 53 includes another inward-curving plane 538. This inward-curving plane 538 is parallel to the side 51c (left side) of the needle body 51 and faces the negative Y-axis. The inward-curving plane 538 is offset from the side 51c of the needle body 51 in the positive Y-axis direction (i.e., to the right). In other words, the left and right sides of the needle tail 53 both have inward-curving planes 538 and 537, facing the negative and positive Y-axis directions respectively. Alternatively, the needle tail 53 may only have an inward-curving plane on one side, for example... Figure 10 and Figure 11 The needle tail shown is 53. Figure 10 The needle tail 53 shown is Figure 4 The difference shown is that only the side 53c (i.e. the left side) has an inwardly recessed plane 538, while the right side does not have an inwardly recessed plane. Therefore, the base portion 532 and the needle body 51 have the same width. Figure 11 The needle tail 53 shown is Figure 10The difference shown is that, in addition to the front inclined surface 535, the contact end 533 is further provided with a right inclined surface 539 that causes its cross-sectional area to gradually decrease upward.
[0122] Therefore, although the needle tail 53 reduces its cross-sectional area relative to the needle body 51 in a non-gradual manner, it can still reduce the contact force exerted by the needle tail 53 on the contact pad 32 of the interface plate 30 to a certain extent. At the same time, it can also reduce the area of the contact end face 534, thereby improving the contact impedance and contact stability. Moreover, in the aforementioned states, the needle tail 53 has both the characteristics of gradually reducing the cross-sectional area (e.g., front slope 535, rear slope 536, right slope 539) and non-gradually reducing the cross-sectional area (e.g., inwardly narrowed planes 537, 538), so that the contact end face 534 has an appropriate area and generates appropriate contact force and contact impedance to meet the test requirements. Alternatively, the aforementioned inwardly narrowed plane 538 can also be replaced by the left slope 540, such as... Figure 12 As shown, the same effect can be achieved in this way.
[0123] In summary, at least one of the four sides of the needle tail 53 may be an inwardly recessed plane in whole or in part, and / or at least one of the four sides of the contact end 533 of the needle tail 53 may be a beveled surface in whole or in part, which can be configured as needed, for example, in the following forms. Figure 13 The contact end 533 of the needle tail 53 shown is provided with a front bevel 535, a rear bevel 536, a right bevel 539, and a left bevel 540. Figure 14 The needle tail 53 shown has inwardly tapered planes 537 and 538, a front bevel 535, and a right bevel 539. Figure 15 The needle tail 53 shown has an inward-retracting plane 537, a front bevel 535, a right bevel 539, and a left bevel 540. Figure 16 Similar to Figure 14 However, the right inclined surface 539 only occupies a part of the right side of the contact end 533. Figure 17 Similar to Figure 15 However, the right inclined surface 539 and the left inclined surface 540 only occupy a portion of the right and left sides of the contact end 533, respectively. Figure 18 and Figure 19 They are respectively similar to Figure 16 and Figure 17 However, the needle tail 53 does not have an inwardly tapered plane 537, so that the base portion 532 has the same width as the needle body 51. Figure 20 The needle tail 53 shown does not have an inwardly tapered plane; the area of the contact end face 534 is reduced only by the front inclined surface 535 and the right inclined surface 539. Figure 21 The needle tail 53 shown does not have an inwardly tapered plane; the area of the contact end face 534 is reduced only by the front inclined surface 535 and the left inclined surface 540. Figure 22 Similar to Figure 20 However, the right inclined surface 539 is located at both the base portion 532 and the contact end portion 533. Figure 23 Similar to Figure 21 However, the left inclined surface 540 is located simultaneously at the base portion 532 and the contact end portion 533. Figures 2 to 21 In the middle, the base portion 532 is rectangular in both longitudinal sections along the X and Z axes and along the Y and Z axes; therefore, the front, rear, left, and right sides of the base portion 532 are all rectangular. And... Figure 22 and Figure 23 In this configuration, the base portion 532 is trapezoidal in longitudinal sections along the Y and Z axes. Alternatively, the base portion 532 may also be trapezoidal in longitudinal sections along the X and Z axes. In other words, the base portion 532 may be trapezoidal in sections parallel to the longitudinal axis, thus gradually reducing the cross-sectional area from the base portion 532 upwards. This ensures the overall structural strength of the needle tail 53 while maintaining the required small area for the contact end face 534. Furthermore, the front bevel 535 in the aforementioned configurations may be replaced by another inwardly tapered plane, for example, Figure 24 The needle tail 53 shown is similar to Figure 4 As shown, however, the contact end 533 does not have a front bevel 535 on the front side, but has an inwardly recessed plane 541. The inwardly recessed plane 541 is parallel to the side 51a (i.e. the front side) of the needle body 51 and faces the positive X-axis, and the inwardly recessed plane 541 is offset from the side 51a of the needle body 51 in the negative X-axis direction.
[0124] Please see Figure 25 and Figure 26 The contact probe 50 of this application may include at least one slit 513 in its needle body 51. The slit 513 extends elongatedly along the longitudinal direction of the needle body 51, that is, the slit 513 extends along the Z-axis before the needle body 51 is bent or deformed. The slit 513 penetrates the needle body 51 along the X-axis, such that the needle body 51 is defined by the at least one slit 513 into at least two thin-sheet-like arms 514, which are separated from each other along the Y-axis. Such a slit 513 can weaken the rigidity of the needle body 51, thereby reducing the contact force applied by the contact probe 50 to the contact pad 211 of the tested device 21 and the contact pad 32 of the interface plate 30, so as to avoid damage to the contact pads 211 and 32 due to excessive contact force. Especially for high-frequency and high-speed testing requirements, shorter contact probes 50 are typically used to achieve good electrical transmission characteristics. Shorter contact probes 50 have higher rigidity and contact force, which can be reduced by the slit 513. Furthermore, the slit 513 also enhances the elasticity of the needle body 51, ensuring the elastic deformation effect when the needle body 51 bends along the Y-axis. Moreover, since the needle body 51 bends along the Y-axis, and the Y-axis is the axis defining the width, the thickness T of the needle body 51 can be greater than or equal to the width W of the needle body 51, resulting in better elastic deformation and sufficient thickness T to prevent breakage.
[0125] Furthermore, at least one bump group 515 may be provided within the slit 513, the bump group 515 comprising two bumps 516, the two bumps 516 protruding from adjacent arms 514 facing each other. Thus, when the tip 52 of the contact probe 50 abuts against the contact pad 211 of the device under test 21 and is subjected to a reaction force, the needle body 51 will be compressed, elastically deformed, and deflected. At this time, the two protrusions 516 facing each other within the slit 513 will abut against each other, thus preventing adjacent arms 514 from contacting each other and causing wear, thereby extending the service life of the contact probe 50. Moreover, by the two protrusions 516 facing each other abutting against each other, the arms 514 can maintain a consistent deflection direction and a certain distance between each other, which is beneficial for the electrical performance of high-frequency, high-speed testing.
[0126] Finally, it must be stated again that the constituent elements disclosed in the foregoing embodiments of this application are merely illustrative examples and are not intended to limit the scope of protection of this application. Substitutions or variations of other equivalent elements should also be covered by the patent protection scope of this application.
Claims
1. A contact probe for a probe card of a test device for an electronic device, the contact probe defining a longitudinal axis, a first transverse axis, and a second transverse axis that are perpendicular to each other; the contact probe defining a width along the first transverse axis, a thickness along the second transverse axis, and a cross-sectional area perpendicular to the longitudinal axis; characterized in that: The contact probe includes: The needle body extends in an elongated shape along the longitudinal axis, the needle body defining a first central axis extending along the longitudinal axis, the needle body being bent between the upper guide plate unit and the lower guide plate unit at least along the first transverse axis. A needle tip, connected to the needle body and extending downward from the needle body along the longitudinal axis, is used to abut against the contact pad of the device under test located below the lower guide plate unit; as well as The needle tail is connected to the needle body and extends upward from the needle body along the longitudinal axis; The needle tail includes a contact end portion, which includes a contact end face. The contact end face is used for mechanically and electrically contacting the contact pad of the interface plate. The contact end face defines a second central axis extending along the longitudinal axis. The contact end portion is at least partially smaller than the needle body in both width and thickness, such that the area of the contact end face is smaller than the cross-sectional area of the needle body.
2. The contact probe according to claim 1, characterized in that: The contact end of the needle tail at least partially tapers towards the contact end face along the longitudinal axis in terms of cross-sectional area.
3. The contact probe according to claim 1 or 2, characterized in that: The needle tail includes four sides, at least one of which includes an inwardly recessed plane. The inwardly recessed plane is parallel to and faces the same direction as one side of the needle body, and is offset from the side of the needle body in the opposite direction to the same direction.
4. The contact probe according to claim 3, characterized in that: Two of the sides of the needle tail each contain an inwardly recessed plane, and the two inwardly recessed planes face the positive and negative directions of the first transverse axis, respectively.
5. The contact probe according to claim 1, characterized in that: The needle tail further includes a stop portion and a base portion. The stop portion is connected to the needle body, and the base portion is connected between the stop portion and the contact end portion. The cross-sectional area of the stop portion is larger than the cross-sectional area of the needle body, thereby restricting the needle tail above the upper guide plate unit. The cross-sectional area of the base portion is smaller than the cross-sectional area of the stop portion, and the cross-sectional area of the contact end portion is smaller than or equal to the cross-sectional area of the base portion.
6. The contact probe according to claim 5, characterized in that: The base portion has a top surface, and the contact end portion is biased toward at least one side of the base portion and connected to a portion of the top surface, such that the point where the contact end portion is connected to the base portion is offset relative to at least one edge of the top surface of the base portion along at least one of the first transverse axis and the second transverse axis by a certain distance.
7. The contact probe according to claim 5, characterized in that: The base portion is trapezoidal in cross-section parallel to the longitudinal axis.
8. The contact probe according to claim 5, characterized in that: The width of the base portion is less than the width of the stop portion, and the thickness of the base portion is less than or equal to the thickness of the stop portion and greater than or equal to the thickness of the contact end portion.
9. The contact probe according to claim 5, characterized in that: The base portion and the stop portion are discontinuously connected to each other.
10. The contact probe according to claim 1, characterized in that: The second central axis of the contact end face of the needle tail is offset from the first central axis of the needle body by a certain distance along the first transverse axis.
11. The contact probe according to claim 10, characterized in that: The second central axis of the contact end face of the needle tail is offset from the first central axis of the needle body by another distance along the second transverse axis.
12. The contact probe according to claim 1, characterized in that: The needle body includes at least one slit extending along the longitudinal axis, the slit penetrating the needle body along the second transverse axis, such that the needle body is defined by the at least one slit into at least two arms, the at least two arms being separated from each other along the first transverse axis.
13. The contact probe according to claim 12, characterized in that: The thickness of the needle body is greater than or equal to the width of the needle body.
14. The contact probe according to claim 12, characterized in that: The slit is provided with at least one set of bumps, the set of bumps comprising two bumps that protrude from two adjacent arms facing each other.
15. A probe tip, used in a probe card for testing equipment of electronic devices, characterized in that: The probe head includes: The upper guide plate unit contains multiple upper guide holes; The lower guide plate unit contains multiple lower guide holes; as well as Multiple probes pass through each of the upper guide holes and each of the lower guide holes, and each probe includes at least one contact probe according to claim 1; Each of the probes is bent along the first transverse axis, and each of the upper guide holes defines a third central axis. The second central axis of the contact probe is closer to the third central axis of the upper guide hole it passes through than the first central axis.
16. The probe head according to claim 15, characterized in that: The second central axis of the contact probe coincides with the third central axis of the upper guide hole.
17. The probe head according to claim 15, characterized in that: The first transverse axis can define two opposite directions, the needle body of the contact probe includes a first bearing surface facing the first transverse axis in the direction of the first bearing surface, the first bearing surface abuts against the inner surface of the upper guide hole, and the contact end of the needle tail of the contact probe is at least partially deviated from the first bearing surface in the other direction of the first transverse axis. The second transverse axis can define two opposite directions, the needle body of the contact probe includes a second bearing surface facing one of the directions of the second transverse axis, the second bearing surface abuts against the inner surface of the upper guide hole, and the contact end of the needle tail of the contact probe is at least partially offset from the second bearing surface in the other direction of the second transverse axis.
18. A probe card for a test apparatus of an electronic device, the probe card comprising: Includes: The probe head according to claim 15; and An interface board includes a lower surface facing the probe head and a plurality of contact pads located on the lower surface; The probe head and the contact end face of the probe tail make mechanical and electrical contact with the contact pad of the interface board.