A piezoceramic actuated regulator

Abstract

This utility model discloses a piezoelectric ceramic actuator regulator, including a substrate, a piezoelectric ceramic assembly, and a pre-pressing assembly. The substrate includes a fixed part and a movable part. The fixed part includes a first mounting plate, and the movable part includes a second mounting plate, which are spaced apart. The piezoelectric ceramic assembly is mounted on the fixed part and is used to push the movable part to move vertically, thereby changing the distance between the first and second mounting plates. The pre-pressing assembly is used to apply a pre-tightening force to the piezoelectric ceramic assembly on the fixed part. Piezoelectric ceramics have the characteristics of fast response speed and high displacement resolution. Two coaxial optical elements are respectively mounted on the first and second mounting plates, which can achieve sub-micron level high-precision adjustment between the two coaxial optical elements, meeting the high-precision optical experimental requirements such as confocal microscopy, laser interferometry, or optical platform calibration.

Description

Technical Field

[0001] This utility model relates to the field of optical experimental system technology, and in particular to a piezoelectric ceramic actuator regulator. Background Technology

[0002] In precision optical experimental systems (such as confocal microscopy, laser interferometry, or optical platform calibration), it is often necessary to actively adjust the sub-micron level distance between two coaxially arranged optical elements (such as lens groups, mirrors, or filter assemblies). Currently available optical element distance adjustment devices have significant limitations in terms of accuracy. Most of these devices are based on traditional mechanical transmission principles, such as lead screws and rack and pinion mechanisms. While these mechanisms can adjust the distance between optical elements to some extent, their adjustment accuracy is typically limited by factors such as manufacturing precision, friction, clearance, and temperature variations, making it difficult to achieve sub-micron level precision. In many optical experiments with extremely high precision requirements, this low adjustment accuracy is far from sufficient to meet experimental needs, leading to deviations in experimental results and even preventing the experiment from achieving its intended objectives. Utility Model Content

[0003] In view of this, the present invention proposes a piezoelectric ceramic actuator regulator, the purpose of which is to achieve high-precision submicron-level adjustment between two coaxial optical elements.

[0004] The solution provided by this utility model includes:

[0005] A piezoelectric ceramic actuator regulator, comprising:

[0006] The base includes a fixed part and a movable part. The fixed part includes a first mounting plate, and the movable part includes a second mounting plate. The first mounting plate and the second mounting plate are spaced apart.

[0007] A piezoelectric ceramic assembly is disposed on the fixed portion and is used to push the movable portion to move vertically, thereby changing the spacing between the first mounting plate and the second mounting plate;

[0008] A pre-compression assembly is used to apply a pre-compression force to the piezoelectric ceramic assembly, pressing it against the fixed portion.

[0009] As a further optional solution, the movable part further includes a movable body, a first deformable plate, and a second deformable plate; the first deformable plate and the second deformable plate are arranged laterally on one side of the movable body, and the second mounting plate is arranged on the other side of the movable body; the first deformable plate and the second deformable plate are arranged vertically at intervals, and the movable body is connected to the fixed part through the first deformable plate and the second deformable plate;

[0010] The fixed part also includes a support platform located between the first deformable plate and the second deformable plate, and the piezoelectric ceramic assembly is disposed on the support platform to push the moving body to move vertically.

[0011] As a further optional solution, the base also includes a lever amplification section, which includes a lifting block, a third deformation plate, and a fourth deformation plate; the lifting block is disposed between the support platform and the first deformation plate, the third deformation plate and the fourth deformation plate are both vertically arranged, one end of the lifting block in the horizontal direction is connected to the fixed part through the third deformation plate, and the other end of the lifting block is connected to the moving part through the fourth deformation plate;

[0012] One end of the piezoelectric ceramic component abuts against the support platform, and the other end abuts against the lifting block.

[0013] As a further optional solution, the fixing part also includes a vertical plate, a top plate, and a bottom plate; the top plate and the bottom plate are vertically spaced on one side of the vertical plate, and the support platform is fixedly installed on the same side of the vertical plate; the first deformable plate and the second deformable plate are installed between the top plate and the bottom plate, and the first mounting plate is installed on the top plate;

[0014] The top plate is provided with a vertical through-hole adjustment hole, and the pre-compression component is threaded to the adjustment hole; the first deformation plate is provided with a clearance hole for the pre-compression component to pass through, and the pre-compression component abuts against the top of the lifting block to apply a pre-tightening force to the piezoelectric ceramic component.

[0015] As a further optional solution, the fixed part, the movable part, and the lever amplification part are integrally formed metal parts; the first deformation plate, the second deformation plate, the third deformation plate, and the fourth deformation plate are metal plates with a thickness of less than 3mm.

[0016] As a further alternative, the piezoelectric ceramic component may be a single piezoelectric ceramic or may be composed of multiple piezoelectric ceramics stacked vertically.

[0017] As a further optional solution, the support platform is provided with a groove, and the lower end of the piezoelectric ceramic assembly is disposed in the groove.

[0018] As a further optional solution, the first mounting plate is provided with a first mounting hole, and the second mounting plate is provided with a second mounting hole;

[0019] Both the first mounting hole and the second mounting hole are provided with connectors. Each connector includes an annular body with a threaded connection portion for connecting optical elements.

[0020] As a further optional solution, the inner wall of the first mounting hole is provided with a plurality of radially penetrating first locking holes, and the inner wall of the second mounting hole is provided with a plurality of radially penetrating second locking holes, and a set screw is threaded into both the first locking holes and the second locking holes.

[0021] The annular body is fitted into the first mounting hole / second mounting hole, and a groove is recessed on the outer periphery of the annular body. The set screw abuts against the groove of the annular body to fix the connector on the first mounting plate / second mounting plate.

[0022] As a further alternative, the threaded connection includes an external thread structure and / or an internal thread structure.

[0023] Compared with the prior art, the piezoelectric ceramic actuator regulator of this application has at least the following advantages:

[0024] This piezoelectric ceramic actuator adjuster moves the moving part vertically through the piezoelectric ceramic component, which can precisely change the distance between the first and second mounting plates. Piezoelectric ceramics have the characteristics of fast response speed and high displacement resolution. Two coaxial optical elements are respectively set on the first and second mounting plates, which can realize sub-micron level high-precision adjustment between the two coaxial optical elements. This meets the optical experiment requirements with extremely high precision, such as confocal microscopy, laser interferometry, or optical platform calibration, and effectively avoids the problem of experimental results deviation or even failure to achieve the expected goal due to insufficient adjustment precision. Attached Figure Description

[0025] Figure 1 This is a schematic diagram of the structure of a piezoelectric ceramic actuator regulator according to an embodiment of the present invention;

[0026] Figure 2 This is an exploded schematic diagram of a piezoelectric ceramic actuator regulator according to an embodiment of this utility model;

[0027] Figure 3 This is a cross-sectional schematic diagram of a piezoelectric ceramic actuator regulator according to an embodiment of this utility model;

[0028] Figure 4 This is a schematic diagram of the structure of the fixing part in an embodiment of this utility model;

[0029] Figure 5 This is a schematic diagram of the structure of the moving part in an embodiment of this utility model;

[0030] Figure 6 This is a schematic diagram of the lever amplification section in an embodiment of this utility model;

[0031] Figure 7 This is a schematic diagram illustrating the function of the lever amplification section in an embodiment of this utility model.

[0032] In the diagram: 1. Matrix;

[0033] 11. Fixed part; 111. First mounting plate; 1111. First mounting hole; 1112. First locking hole; 112. Support platform; 1121. Groove; 113. Vertical plate; 114. Top plate; 1141. Adjustment hole; 115. Base plate;

[0034] 12. Moving part; 121. Second mounting plate; 1211. Second mounting hole; 1212. Second locking hole; 122. Moving body; 123. First deformable plate; 1231. Clearance hole; 124. Second deformable plate;

[0035] 13. Lever amplification section; 131. Lifting block; 132. Third deformation plate; 133. Fourth deformation plate;

[0036] 2. Piezoelectric ceramic components;

[0037] 3. Pre-compression components;

[0038] 4. Connector; 41. Ring-shaped body; 42. Threaded connection part; 43. Slot;

[0039] 5. Side cover plate. Detailed Implementation

[0040] The specific embodiments of this utility model will be described in further detail below with reference to the accompanying drawings and examples. The following examples are used to illustrate this utility model, but are not intended to limit its scope.

[0041] In the description of this utility model, it should be understood that the terms "upper", "lower", "front", "rear", "vertical", "horizontal", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0042] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0043] In this utility model, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0044] refer to Figures 1 to 7 An embodiment of this utility model illustrates a piezoelectric ceramic actuator regulator, comprising a substrate 1, a piezoelectric ceramic assembly 2, and a pre-pressurization assembly 3. The substrate 1 includes a fixed portion 11 and a movable portion 12. The fixed portion 11 includes a first mounting plate 111, and the movable portion 12 includes a second mounting plate 121, which are spaced apart. The piezoelectric ceramic assembly 2 is disposed on the fixed portion 11 and is used to push the movable portion 12 to move vertically, thereby changing the spacing between the first mounting plate 111 and the second mounting plate 121. The pre-pressurization assembly 3 is used to apply a pre-tightening force to the piezoelectric ceramic assembly 2, pressing it against the fixed portion 11.

[0045] In application, two coaxial optical elements are respectively mounted on the first mounting plate 111 and the second mounting plate 121. Piezoelectric ceramics have the characteristics of fast response speed and high displacement resolution. By using the piezoelectric ceramic component 2 to push the moving part 12 to move vertically, the distance between the first mounting plate 111 and the second mounting plate 121 can be precisely changed, and submicron-level high-precision adjustment between the two coaxial optical elements can be achieved.

[0046] Piezoelectric ceramics are ferroelectric materials, and their displacement-voltage response curves exhibit a distinct hysteresis loop (similar to a magnetic hysteresis loop). When a voltage is applied, the displacement change lags behind the voltage change, and the displacement curves under forward and reverse voltages do not coincide. This leads to a decrease in adjustment accuracy (e.g., different displacement amounts may occur under the same voltage). The pre-pressure component 3 provides pre-tightening force (constant pressure) to the piezoelectric ceramic component 2, which makes the orientation of the internal domains of the piezoelectric ceramic more consistent, reduces the frictional resistance when the domains reverse, thereby narrowing the width of the hysteresis loop, making the displacement-voltage relationship closer to linear, and improving the repeatability and accuracy of the adjustment process.

[0047] In some embodiments, such as Figures 3 to 5As shown, the movable part 12 further includes a movable body 122, a first deformable plate 123, and a second deformable plate 124; the first deformable plate 123 and the second deformable plate 124 are arranged laterally on one side of the movable body 122, and the second mounting plate 121 is arranged on the other side of the movable body 122; the first deformable plate 123 and the second deformable plate 124 are arranged vertically at intervals, and the movable body 122 is connected to the fixed part 11 through the first deformable plate 123 and the second deformable plate 124; the fixed part 11 further includes a support platform 112 located between the first deformable plate 123 and the second deformable plate 124, and the piezoelectric ceramic assembly 2 is arranged on the support platform 112 to push the movable body 122 to move vertically.

[0048] In this embodiment, the piezoelectric ceramic component 2 can indirectly or directly apply a thrust to the moving part 12, causing the moving part 12 to move. In this embodiment, the fixed part 11, the first deformable plate 123, the second deformable plate 124 and the moving body 122 form a frame structure similar to a parallelogram. The first deformable plate 123 and the second deformable plate 124 are designed to be relatively thin. Therefore, when the piezoelectric ceramic component 2 deforms, the first deformable plate 123 and the second deformable plate 124 will tilt and deform. Under the constraint of the parallelogram-like shape, the moving body 122 will tend to move vertically, so that the second mounting plate 121 moves smoothly as a whole.

[0049] In addition, although the piezoelectric ceramic component 2 has advantages such as simple structure, small size, high resolution, high precision, and the ability to achieve automatic micro-feeding, the driving displacement stroke of the piezoelectric ceramic component 2 is small.

[0050] In some preferred embodiments, such as Figure 3 and Figure 6 As shown, the base 1 also includes a lever amplification section 13, which includes a lifting block 131, a third deformation plate 132, and a fourth deformation plate 133. The lifting block 131 is disposed between the support platform 112 and the first deformation plate 123. The third deformation plate 132 and the fourth deformation plate 133 are both vertically arranged. One end of the lifting block 131 in the horizontal direction is connected to the fixed part 11 through the third deformation plate 132, and the other end of the lifting block 131 is connected to the moving part 12 through the fourth deformation plate 133. One end of the piezoelectric ceramic assembly 2 abuts against the support platform 112, and the other end abuts against the lifting block 131.

[0051] In this embodiment, the output displacement of the piezoelectric ceramic component 2 is amplified by the lever amplification section 13; such as Figure 7As shown, when the piezoelectric ceramic component 2 pushes the lifting block 131 upward, the lifting block 131 will rotate around its connection with the fixed part 11. The portion of the lifting block 131 corresponding to the position of the piezoelectric ceramic component 2 rises by a distance L1, while the position of the lifting block 131 near the moving body 122 is a distance L2. L2 is greater than L1, thereby amplifying the output displacement of the piezoelectric ceramic component 2. The output displacement of the piezoelectric ceramic component 2 may be several micrometers or even tens of micrometers, and after lever amplification, it can be increased to tens of micrometers, hundreds of micrometers or even thousands of micrometers.

[0052] In addition, during the above process, the lifting block 131 tilts and drives the moving body 122 upward, the third deformation plate 132 and the fourth deformation plate 133 will deform, and the moving body 122 will still move vertically under the constraint of the quadrilateral structure formed between the fixed part 11, the first deformation plate 123, the second deformation plate 124 and the moving body 122.

[0053] In some embodiments, such as Figure 3 and Figure 4 As shown, the fixing part 11 also includes a vertical plate 113, a top plate 114, and a bottom plate 115; the top plate 114 and the bottom plate 115 are vertically spaced on one side of the vertical plate 113, and the support platform 112 is fixedly disposed on the same side of the vertical plate 113; the first deformable plate 123 and the second deformable plate 124 are disposed between the top plate 114 and the bottom plate 115, and the first mounting plate 111 is disposed on the top plate 114; the top plate 114 is provided with a vertically penetrating adjustment hole 1141, and the pre-compression component 3 is threadedly connected to the adjustment hole 1141; the first deformable plate 123 is provided with a clearance hole 1231 for the pre-compression component 3 to pass through, and the pre-compression component 3 abuts against the top of the lifting block 131 to apply a pre-tightening force to the piezoelectric ceramic component 2.

[0054] In this embodiment, the base plate 115 is used to place the base stably; the top plate 114 is provided with an adjustment hole 1141, which can realize the position adjustment of the pre-pressure component 3 and adjust the pre-tightening force of the pre-pressure component 3 on the piezoelectric ceramic component 2; specifically, the pre-pressure component 3 can be a bolt, ball screw or other threaded fastener.

[0055] In the above scheme, the fixed part 11, the moving part 12, and the lever amplification part 13 are integrally formed metal parts, with a compact overall structure, strong integration, convenient processing, and convenient assembly; the first deformation plate 123, the second deformation plate 124, the third deformation plate 132, and the fourth deformation plate 133 are metal plates with a thickness of less than 3mm. Because of their thinness, they can be deformed by the piezoelectric ceramic; the fixed part 11 and the moving body 122 are relatively thick, so in principle they will not be deformed by the piezoelectric ceramic.

[0056] In the above scheme, the piezoelectric ceramic component 2 is a single piezoelectric ceramic or is composed of multiple piezoelectric ceramics stacked vertically. If it is composed of multiple stacked piezoelectric ceramics, the output displacement of multiple piezoelectric ceramics can be superimposed, resulting in a certain amplification effect.

[0057] In some embodiments, such as Figure 2 and Figure 4 As shown, the support platform 112 is provided with a groove 1121, and the lower end of the piezoelectric ceramic component 2 is disposed in the groove 1121. In this way, the stability of the piezoelectric ceramic component 2 disposed on the support platform 112 can be improved.

[0058] In addition, such as Figure 1 and Figure 2 As shown, side cover plates 5 can be added to both sides of the base 1 to achieve sealed protection for the piezoelectric ceramic component 2. Of course, wiring holes (not marked in the figure) should be provided on the base 1 to facilitate wiring of the piezoelectric ceramic component 2. The side cover plates 5 can be fixed to the fixed part 11 with screws, without affecting the displacement of the moving part 12.

[0059] In some embodiments, to facilitate the mounting of optical elements on the first mounting plate 111 / second mounting plate 121, such as Figures 1 to 3 As shown, the first mounting plate 111 is provided with a first mounting hole 1111, and the second mounting plate 121 is provided with a second mounting hole 1211; a connector 4 is provided in both the first mounting hole 1111 and the second mounting hole 1211, and the connector 4 includes an annular body 41, and the annular body 41 is provided with a threaded connection portion 42 for connecting optical elements.

[0060] Specifically, optical elements such as optical sleeves and lens groups can be threadedly connected to the threaded connection portion 42 on the connector 4. The threaded connection portion 42 on the connector 4 can be an external thread structure, an internal thread structure, or both an external thread structure and an internal thread structure, as long as it can match the optical element.

[0061] Specifically, to achieve the fixing of the connector 4 on the first mounting hole 1111 / second mounting hole 1211, such as Figure 2 , Figure 4 and Figure 5As shown, the inner wall of the first mounting hole 1111 is provided with a plurality of radially penetrating first locking holes 1112, and the inner wall of the second mounting hole 1211 is provided with a plurality of radially penetrating second locking holes 1212. Set screws are threaded into both the first locking holes 1112 and the second locking holes 1212. The annular body 41 is sleeved in the first mounting hole 1111 / second mounting hole 1211, and the outer periphery of the annular body 41 is recessed with a groove 43. The set screws abut against the groove 43 of the annular body 41 so that the connector 4 is fixed on the first mounting plate 111 / second mounting plate 121.

[0062] In summary, this application provides a piezoelectric ceramic actuator, which drives the moving part 12 to move vertically through the piezoelectric ceramic component 2, thereby precisely changing the distance between the first mounting plate 111 and the second mounting plate 121. Piezoelectric ceramics have the characteristics of fast response speed and high displacement resolution. The two coaxial optical elements are respectively set on the first mounting plate 111 and the second mounting plate 121, which can realize sub-micron level high-precision adjustment between the two coaxial optical elements. This meets the optical experimental requirements with extremely high precision, such as confocal microscopy, laser interferometry, or optical platform calibration, and effectively avoids the problem of experimental results deviation or even failure to achieve the expected goals due to insufficient adjustment precision.

[0063] In the above embodiments, the descriptions of each embodiment have different focuses. For parts not described in detail in a certain embodiment, please refer to the relevant descriptions of other embodiments.

[0064] The above description is only a preferred embodiment of the present utility model. It should be noted that for those skilled in the art, several improvements and substitutions can be made without departing from the technical principles of the present utility model, and these improvements and substitutions should also be considered within the protection scope of the present utility model.

Claims

1. A piezoceramic actuated regulator, characterized in that include: The base includes a fixed part and a movable part. The fixed part includes a first mounting plate, and the movable part includes a second mounting plate. The first mounting plate and the second mounting plate are spaced apart. A piezoelectric ceramic assembly is disposed on the fixed portion and is used to push the movable portion to move vertically, thereby changing the spacing between the first mounting plate and the second mounting plate; A pre-compression assembly is used to apply a pre-compression force to the piezoelectric ceramic assembly, pressing it against the fixed portion.

2. The piezoelectric ceramic actuator regulator according to claim 1, characterized in that: The movable part further includes a movable body, a first deformable plate, and a second deformable plate; the first deformable plate and the second deformable plate are laterally disposed on one side of the movable body, and the second mounting plate is disposed on the other side of the movable body; The first deformable plate and the second deformable plate are arranged vertically at intervals, and the moving body is connected to the fixed part through the first deformable plate and the second deformable plate; The fixed part also includes a support platform located between the first deformable plate and the second deformable plate, and the piezoelectric ceramic assembly is disposed on the support platform to push the moving body to move vertically.

3. The piezoelectric ceramic actuator regulator according to claim 2, characterized in that: The base also includes a lever amplification section, which includes a lifting block, a third deformation plate, and a fourth deformation plate. The lifting block is disposed between the support platform and the first deformation plate. The third and fourth deformation plates are both vertically arranged. One end of the lifting block in the horizontal direction is connected to the fixed part through the third deformation plate, and the other end of the lifting block is connected to the moving part through the fourth deformation plate. One end of the piezoelectric ceramic component abuts against the support platform, and the other end abuts against the lifting block.

4. The piezoelectric ceramic actuator regulator according to claim 3, characterized in that: The fixed part also includes a vertical plate, a top plate, and a bottom plate; the top plate and the bottom plate are vertically spaced on one side of the vertical plate, and the support platform is fixedly installed on the same side of the vertical plate; the first deformable plate and the second deformable plate are installed between the top plate and the bottom plate, and the first mounting plate is installed on the top plate; The top plate is provided with a vertical through-hole adjustment hole, and the pre-compression component is threaded to the adjustment hole; the first deformation plate is provided with a clearance hole for the pre-compression component to pass through, and the pre-compression component abuts against the top of the lifting block to apply a pre-tightening force to the piezoelectric ceramic component.

5. The piezoelectric ceramic actuator regulator according to claim 4, characterized in that: The fixed part, the movable part, and the lever amplification part are all integrally formed metal parts; the first deformation plate, the second deformation plate, the third deformation plate, and the fourth deformation plate are metal plates with a thickness of less than 3mm.

6. The piezoelectric ceramic actuator regulator according to claim 4, characterized in that: The piezoelectric ceramic component is a single piezoelectric ceramic or is composed of multiple piezoelectric ceramics stacked vertically.

7. The piezoelectric ceramic actuator regulator according to claim 4, characterized in that: The support platform is provided with a groove, and the lower end of the piezoelectric ceramic assembly is disposed in the groove.

8. The piezoelectric ceramic actuator regulator according to claim 5, characterized in that: The first mounting plate has a first mounting hole, and the second mounting plate has a second mounting hole; Both the first mounting hole and the second mounting hole are provided with connectors. Each connector includes an annular body with a threaded connection portion for connecting optical elements.

9. The piezoelectric ceramic actuator regulator according to claim 8, characterized in that: The inner wall of the first mounting hole is provided with a plurality of radially penetrating first locking holes, and the inner wall of the second mounting hole is provided with a plurality of radially penetrating second locking holes. Each of the first and second locking holes is threaded with a set screw. The annular body is fitted into the first mounting hole / second mounting hole, and a groove is recessed on the outer periphery of the annular body. The set screw abuts against the groove of the annular body to fix the connector on the first mounting plate / second mounting plate.

10. The piezoelectric ceramic actuator regulator according to claim 9, characterized in that: The threaded connection includes an external thread structure and / or an internal thread structure.

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