A MEMS scanning optical-mechanical module

Abstract

This invention provides a MEMS scanning optical-mechanical module that effectively overcomes the problem of limited scanning angle in traditional single MEMS modules, and greatly expands the field of view under the premise of difficulty in increasing the MEMS deflection angle. It includes a first optical path assembly and a second optical path assembly symmetrically arranged on both sides of a MEMS galvanometer. Both the first and second optical path assemblies include R, G, and B three-color light sources. A beam combiner is provided on the light source exit path of each of the first and second optical path assemblies to combine the R, G, and B three-color light sources. After being beam-compressed and emitted along the first optical path direction, the light source of the first optical path assembly is reflected by a first reflection assembly to the MEMS galvanometer. After being beam-compressed and emitted along the second optical path direction, the light source of the second optical path assembly is reflected by a second reflection assembly to the MEMS galvanometer. The geometric center of the light spot reflected by the first and second reflection assemblies onto the MEMS galvanometer coincides with the geometric center of the light spot on the MEMS galvanometer.

Description

Technical Field

[0001] This utility model relates to the field of MEMS-based optomechanical scanning imaging technology, specifically a MEMS scanning optomechanical module. Background Technology

[0002] MEMS scanning optical-mechanical modules, as core components integrating microelectromechanical systems (MEMS) and optical control technology, achieve directional scanning and modulation of light beams through high-precision deflection of micromirror structures. They have been widely used in fields such as lidar, augmented reality (AR) / virtual reality (VR), 3D imaging, medical diagnostics, and autonomous driving. Compared to traditional optical scanning systems, MEMS scanning optical-mechanical modules have advantages such as small size (typical module size as low as 19×14×11mm), low power consumption (electrostatic drive type power consumption is only a few milliwatts), high scanning frequency (frame rate up to 1.4kHz), and low mass production cost, making them a key component driving the upgrade of intelligent sensing and human-computer interaction technologies.

[0003] In MEMS scanning technology, the scanning angle is a core indicator that determines the field of view and spatial coverage of the optical system. It can directly restrict the lateral resolution of 3D imaging, the detection range of lidar, and the field of view boundary of display devices. However, for traditional single MEMS scanning optomechanical modules, due to the limited structural layout, it is difficult to improve the MEMS deflection angle. Therefore, in scenarios that require large-scale spatial detection, insufficient scanning angle will become the primary bottleneck restricting the application of the technology. Utility Model Content

[0004] To address the aforementioned issues, this invention provides a MEMS scanning optical-mechanical module that effectively overcomes the limitation of traditional single MEMS scanning angles and significantly expands the field of view under the premise of difficulty in increasing the MEMS deflection angle.

[0005] This utility model adopts the following technical solution: a MEMS scanning optical-mechanical module, including a first optical path component and a second optical path component symmetrically arranged on both sides of a MEMS galvanometer. Both the first and second optical path components include R, G, and B three-color light sources. A beam combiner is provided on the light source exit path of each of the first and second optical path components to combine the R, G, and B three-color light sources. The light source of the first optical path component, after being beam-compressed and emitted along the first optical path direction, is reflected by a first reflection component to the MEMS galvanometer. The light source of the second optical path component, after being beam-compressed and emitted along the second optical path direction, is reflected by a second reflection component to the MEMS galvanometer. The geometric center of the light spot reflected by the first and second reflection components onto the MEMS galvanometer coincides with the geometric center of the light spot on the MEMS galvanometer.

[0006] Furthermore, the R, G, and B three-color light sources are respectively formed by a red laser, a green laser, and a blue laser. The beam combining component includes a first reflector, a first dichroic mirror, and a second dichroic mirror. The emitted light from the red laser, green laser, and blue laser is respectively directed to the first reflector, the first dichroic mirror, and the second dichroic mirror.

[0007] Furthermore, the first reflector, the first dichroic mirror, and the second dichroic mirror are arranged parallel to each other, and the emitted light from the red laser, the green laser, and the blue laser are all arranged at a 45° angle to the first reflector, the first dichroic mirror, and the second dichroic mirror.

[0008] Furthermore, the collimated beam emitted along the first optical path direction is incident on the first reflective component at an angle of 10° to 80°; the collimated beam emitted along the second optical path direction is incident on the second reflective component at an angle of 10° to 80°.

[0009] Furthermore, the first reflective component includes a second reflector and a third reflector; the second reflective component includes a fourth reflector and a fifth reflector; the collimated beam emitted along the first optical path direction passes sequentially through the second reflector and the third reflector and is reflected to the MEMS galvanometer; the collimated beam emitted along the second optical path direction passes sequentially through the fourth reflector and the fifth reflector and is reflected to the MEMS galvanometer, and the third reflector and the fifth reflector are reflected to the MEMS galvanometer at the same position;

[0010] Furthermore, the combined collimated light emitted along the first optical path direction and the combined collimated light emitted along the second optical path direction are on the same plane, and this plane is parallel to the horizontal plane, and the MEMS galvanometer is inclined to the horizontal plane.

[0011] Furthermore, the MEMS galvanometer is configured to deflect at an angle of ±α relative to the horizontal plane and at an angle of ±β relative to the vertical plane; the reflected light from the third and fifth reflectors is tilted at an angle γ to the MEMS galvanometer; wherein the angles α and β are both 0° to 40°, and γ < α.

[0012] The beneficial effect of this utility model is that, by symmetrically arranging the first optical path component and the second optical path component on both sides of the MEMS galvanometer, and simultaneously reflecting the two combined collimated beams to the MEMS galvanometer through the first reflection component and the second reflection component respectively, and the geometric center of the light spot reflected by the first reflection component and the second reflection component to the MEMS galvanometer coincides with the geometric center of the light spot of the MEMS galvanometer, a twice-wide imaging image can be output through the same MEMS galvanometer. Thus, it is possible to greatly expand the field of view without increasing the MEMS deflection angle, and has good application value. Attached Figure Description

[0013] Figure 1 This is a schematic diagram of the optical path of this utility model;

[0014] Figure 2 This is a schematic diagram of the structure of this utility model;

[0015] Figure 3 This is an image of the imaging effect of this utility model;

[0016] Figure 4 This is an image of the single-light path imaging effect. Detailed Implementation

[0017] like Figure 1 , Figure 2 As shown, a MEMS scanning optical-mechanical module of this utility model includes a first optical path component and a second optical path component symmetrically arranged on both sides of a MEMS galvanometer 3. Both the first and second optical path components include R, G, and B three-color light sources. A beam combiner is provided on the light source output optical path of both the first and second optical path components to combine the R, G, and B three-color light sources. After the light source of the first optical path component is beam-compressed and emitted along the first optical path direction, it is reflected by a first reflection component to the MEMS galvanometer 3. After the light source of the second optical path component is beam-compressed and emitted along the second optical path direction, it is reflected by a second reflection component to the MEMS galvanometer 3. The geometric center of the light spot reflected by the first and second reflection components onto the MEMS galvanometer 3 coincides with the geometric center of the light spot on the MEMS galvanometer 3.

[0018] The R, G, and B color light sources are formed by red lasers, green lasers, and blue lasers, respectively. The beam combining component includes a first reflector, a first dichroic mirror, and a second dichroic mirror. The emitted light from the red laser, green laser, and blue laser is directed to the first reflector, the first dichroic mirror, and the second dichroic mirror, respectively.

[0019] This utility model distinguishes identical devices by using different numerical labels for ease of understanding. Specifically, the emitted light from the red laser 1-1, green laser 1-2, and blue laser 1-3 in the first optical path assembly is directed to the first reflecting mirror 1-4, the first dichroic mirror 1-5, and the second dichroic mirror 1-6, respectively.

[0020] The emitted light from the red laser 2-1, green laser 2-2, and blue laser 2-3 in the second optical path assembly is directed to the first reflector 2-4, the first dichroic mirror 2-5, and the second dichroic mirror 2-6, respectively.

[0021] The first reflector 1-4, the first dichroic mirror 1-5, and the second dichroic mirror 1-6 are arranged parallel to each other. The first reflector 2-4, the first dichroic mirror 2-5, and the second dichroic mirror 2-6 are also arranged parallel to each other. The emitted light from the red laser 1-1, the green laser 1-2, and the blue laser 1-3 are all arranged at a 45° angle to the first reflector 1-4, the first dichroic mirror 1-5, and the second dichroic mirror 1-6. The emitted light from the red laser 2-1, the green laser 2-2, and the blue laser 2-3 are all arranged at a 45° angle to the first reflector 2-4, the first dichroic mirror 2-5, and the second dichroic mirror 2-6.

[0022] The collimated beam emitted along the first optical path direction is incident on the first reflective component at an angle of 10° to 80°; the collimated beam emitted along the second optical path direction is incident on the second reflective component at an angle of 10° to 80°.

[0023] Furthermore, the first reflecting component includes a second reflecting mirror 1-7 and a third reflecting mirror 1-8; the second reflecting component includes a fourth reflecting mirror 2-7 and a fifth reflecting mirror 2-8; the collimated beam emitted along the first optical path direction passes sequentially through the second reflecting mirror 1-7 and the third reflecting mirror 1-8 and is reflected to the MEMS galvanometer 3; the collimated beam emitted along the second optical path direction passes sequentially through the fourth reflecting mirror 2-7 and the fifth reflecting mirror 2-8 and is reflected to the MEMS galvanometer 3, and the third reflecting mirror 1-8 and the fifth reflecting mirror 2-8 are reflected to the same position on the MEMS galvanometer 3; wherein, the second reflecting mirror 1-7, the third reflecting mirror 1-8, the fourth reflecting mirror 2-7, and the fifth reflecting mirror 2-8 are all configured to independently achieve displacement angle deflection in 6 degrees of freedom, that is, to achieve displacement in up, down, left, right, forward, and backward, as well as pitch, yaw, and rotation angle deflection, thereby ensuring that the angle incident on the MEMS galvanometer 3 is consistent.

[0024] The beam-combined collimated light emitted along the first optical path direction and the beam-combined collimated light emitted along the second optical path direction are on the same plane, and this plane is parallel to the horizontal plane. The MEMS galvanometer 3 is tilted relative to the horizontal plane.

[0025] MEMS galvanometer 3 is configured to deflect at an angle of ±α relative to the horizontal plane and at an angle of ±β relative to the vertical plane, with the center lines of the angles in the horizontal and vertical directions being perpendicular to each other; the reflected light from the third mirror 1-8 and the fifth mirror 2-8 are all tilted at an angle γ to MEMS galvanometer 3; wherein the angles α and β are both 0°~40°, and γ<α.

[0026] From the perspective of the vertical plane, the incident angle is determined based on the vertical deflection angle range of the MEMS galvanometer 3 and the geometry of the MEMS. That is, within the range of ±β of the vertical deflection angle of the MEMS galvanometer 3, it is ensured that the incident light and its outgoing light do not interfere with the structure of the MEMS, and the outgoing light of the MEMS galvanometer 3 does not interfere with the second reflecting mirror 1-7, the third reflecting mirror 1-8, the fourth reflecting mirror 2-7, and the fifth reflecting mirror 2-8. From the perspective of the horizontal plane, the angle γ of the incident light from the third reflecting mirror 1-8 and the fifth reflecting mirror 2-8 onto the MEMS galvanometer 3 satisfies the requirement that within the range of ±α of the horizontal deflection angle of the MEMS galvanometer 3, the incident light and its outgoing light do not interfere with the structure of the MEMS. Therefore, the reflected light from the third reflecting mirror 1-8 and the fifth reflecting mirror 2-8 is symmetrically incident on the MEMS galvanometer 3 at an angle γ, which can realize the superposition of two imaging images from two optical paths, thereby achieving scanning imaging with a 2x wide field of view.

[0027] The working principle of this utility model is as follows: the same image is divided into two images in the middle in advance. By using existing circuit operation technology, the R, G, and B colors of the two images are mapped to the first optical path component and the second optical path component of this utility model, so as to achieve scanning imaging of a 2x wide image.

[0028] Specifically, the lasers emitted by the first and second optical path components are both collimated beams. The collimated beam from the first optical path component is combined and then passes sequentially through the second reflector 1-7 and the third reflector 1-8 before being reflected by the MEMS galvanometer 3. The collimated beam from the second optical path component is combined and then passes sequentially through the fourth reflector 2-7 and the fifth reflector 2-8 before being reflected by the MEMS galvanometer 3. Furthermore, since the output of the two sets of optical path components is the same, taking the output of the first optical path component as an example, the red laser 1-1 outputs... The red collimated light passes through the first reflecting mirror 1-4 and then enters the first dichroic mirror 1-5. The green collimated light output from the green laser 1-2 is reflected after entering the first dichroic mirror 1-5. At this time, the green collimated light and the red collimated light coincide. The red collimated light and the green collimated light coincide and enter the second dichroic mirror 1-6, and pass through the second dichroic mirror 1-6. The blue collimated light output from the blue laser 1-3 is reflected after entering the second dichroic mirror 1-6. At this time, the blue collimated light, the red collimated light, and the green collimated light coincide.

[0029] Next, the collimated light from the combined R, G, and B light beams is incident at 45° angles onto the second reflecting mirror 1-7 and the fourth reflecting mirror 2-7, respectively. The collimated light after passing through the second reflecting mirror 1-7 is then incident on the third reflecting mirror 1-8 and then on the MEMS galvanometer 3. The collimated light after passing through the fourth reflecting mirror 2-7 is then incident on the fifth reflecting mirror 2-8 and then on the MEMS galvanometer 3. Preferably, the geometric center of the light spot coincides with the center of the MEMS galvanometer 3 when the two light paths illuminate the MEMS galvanometer 3, thus enabling scanning imaging with a 2x wider image.

[0030] Since two optical paths are incident on MEMS galvanometer 3, therefore Figure 3 It includes two images, one green on the left and one red on the right, to achieve scanning imaging with a screen width of 2 times. Assuming that the upper right corner is the origin, pixels with the same coordinate are scanned at the same time. The difference is that the two pixels have different red, green and blue ratios, and the color ratio can be set according to the actual situation.

[0031] Figure 4 The image shown is an illustration of the existing single-optical-path imaging effect. Figure 3 and Figure 4 Compared to other methods, it can achieve scanning imaging with a screen width of 2 times, thus further expanding the field of view.

[0032] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0033] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A MEMS scanning optical engine module, characterized in that: The device includes a first optical path assembly and a second optical path assembly symmetrically arranged on both sides of a MEMS galvanometer. Both the first and second optical path assemblies include R, G, and B three-color light sources. A beam combiner is provided on the light source exit path of each of the first and second optical path assemblies to combine the R, G, and B three-color light sources. The light source of the first optical path assembly, after being beam-compressed and emitted along the first optical path direction, is reflected by a first reflection assembly to the MEMS galvanometer. Similarly, the light source of the second optical path assembly, after being beam-compressed and emitted along the second optical path direction, is reflected by a second reflection assembly to the MEMS galvanometer. The geometric centers of the light spots reflected by the first and second reflection assemblies onto the MEMS galvanometer coincide with the geometric center of the light spot on the MEMS galvanometer. 2.The MEMS scanning optical engine module of claim 1, wherein: The R, G, and B three-color light sources are respectively formed by a red laser, a green laser, and a blue laser. The beam combining component includes a first reflector, a first dichroic mirror, and a second dichroic mirror. The emitted light from the red laser, green laser, and blue laser is respectively directed to the first reflector, the first dichroic mirror, and the second dichroic mirror.

3. A MEMS scanning optomechanical module according to claim 2, characterized in that: The first reflector, the first dichroic mirror, and the second dichroic mirror are arranged parallel to each other, and the emitted light from the red laser, the green laser, and the blue laser are all arranged at a 45° angle to the first reflector, the first dichroic mirror, and the second dichroic mirror.

4. A MEMS scanning optomechanical module according to claim 1, characterized in that: The collimated beam emitted along the first optical path direction is incident on the first reflective component at an angle of 10° to 80°; the collimated beam emitted along the second optical path direction is incident on the second reflective component at an angle of 10° to 80°.

5. A MEMS scanning optomechanical module according to claim 1, characterized in that: The first reflective component includes a second reflector and a third reflector; the second reflective component includes a fourth reflector and a fifth reflector. The collimated beam emitted along the first optical path direction passes sequentially through the second and third reflecting mirrors and is then reflected to the MEMS galvanometer. The collimated beam emitted along the second optical path direction passes sequentially through the fourth and fifth reflecting mirrors and is reflected onto the MEMS galvanometer. The third and fifth reflecting mirrors are reflected onto the MEMS galvanometer at the same positions.

6. A MEMS scanning optomechanical module according to claim 1, characterized in that: The combined collimated light emitted along the first optical path direction and the combined collimated light emitted along the second optical path direction are on the same plane, and this plane is parallel to the horizontal plane. The MEMS galvanometer is inclined to the horizontal plane.

7. A MEMS scanning optomechanical module according to claim 5, characterized in that: The MEMS galvanometer is configured to deflect at an angle of ±α relative to a horizontal plane and at an angle of ±β relative to a vertical plane; the reflected light from the third and fifth reflectors is tilted at an angle γ relative to the MEMS galvanometer; wherein the angles α and β are both 0° to 40°, and γ < α.

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