Glue solution distribution structure of a glue coating and developing machine

Abstract

This utility model relates to the field of coating and developing machines, specifically to a glue distribution structure for such a machine. The structure includes a support plate, a rotating motor at the bottom of the support plate, an adjusting rod at the output end of the motor passing through the support plate, and an extension control plate at the top of the adjusting rod. This glue distribution structure for a coating and developing machine, through the rotating motor driving the adjusting rod to rotate precisely, and combined with the stable connection between the extension control plate and the stabilizing cap, enables precise adjustment of the support block angle, thereby effectively controlling the spray direction. Simultaneously, the cooperative structure of the protruding plate and the moving slide, combined with the elastic restoring effect of the spring, allows the spray transition plate to achieve stable reciprocating movement, improving the dynamic response capability during the glue spraying process. Furthermore, by setting a reciprocating motor to control the movement of the reciprocating block, the spray transition plate can be quickly driven to perform high-frequency vibration.

Description

Technical Field

[0001] This utility model relates to the field of coating and developing machines, specifically to a coating and developing machine adhesive distribution structure. Background Technology

[0002] A Chinese patent proposes an optimized photoresist coating developing machine (application number: CN202211034922.5). The technical problem addressed by this invention is that photoresist sprayed onto the upper surface of a silicon wafer can flow onto the lower surface, causing contamination and affecting subsequent wafer processing. The technical solution is a photoresist coating optimized developing machine, comprising a frame, casters, and doors. A partition plate in the middle of the frame divides it into upper and lower chambers. Casters are fixedly connected to the four corners of the lower side of the frame. Four doors are movably connected to the front of the frame, arranged in a rectangular pattern. This invention, through the inclusion of an adsorption unit and a centering unit, centers and fixes the silicon wafer, then checks its flatness. This direct centering within the developing machine prevents wafer misalignment during transfer and avoids the impact of insufficient wafer flatness on photoresist coating, significantly optimizing the photoresist coating effect.

[0003] In existing adhesive coating and developing equipment, the adhesive distribution structure typically employs a fixed nozzle design or a simple mechanical drive, making it difficult to precisely control the spray angle and flow rate. This structure often leads to uneven adhesive spraying and difficulty in removing residual adhesive from the nozzles during practical use, affecting coating quality and equipment operational stability. Utility Model Content

[0004] To address the shortcomings of existing technologies, this invention provides a glue distribution structure for a coating and developing machine.

[0005] The technical solution of this utility model is as follows: This utility model provides a glue distribution structure for a coating and developing machine, including a support plate. A rotating motor is disposed at the bottom of the support plate. An adjusting rod is disposed at the output end of the rotating motor after passing through the support plate. An extension control plate is disposed at the top of the adjusting rod. A support block is disposed at the other end of the extension control plate. A spray transition plate is disposed on one side of the support block. A stabilizing protrusion is disposed on one side of the support block. A reciprocating motor is disposed on one side of the stabilizing protrusion. A reciprocating rotating block is disposed at the output end of the reciprocating motor. A reciprocating block is disposed at the top of the spray transition plate. The reciprocating block is in contact with the reciprocating rotating block.

[0006] Optionally, the top of the support plate is provided with a stabilizing hole, and a rotating motor is fixedly connected to the bottom of the support plate. The rotating motor is fixedly connected to the adjusting rod.

[0007] Optionally, the top of the adjusting rod is provided with a stabilizing cap, the extension control plate is fixedly connected to the adjusting rod through the stabilizing cap, and the extension control plate is fixedly connected to the support block.

[0008] Optionally, a protruding plate is provided on one side of the support block, and a movable groove is provided on one side of the support block. The end of the spray transition plate passes through the movable groove, and the spray transition plate is slidably connected along the movable groove.

[0009] Optionally, the top of the spray transition plate is provided with an inlet, the bottom of the spray transition plate is provided with a nozzle, the spray transition plate and the protruding plate are connected by a spring, the two ends of the spring are fixedly provided with spring plates, the two spring plates are respectively fixedly connected to the spray transition plate and the protruding plate, and a heating plate is provided inside the spray transition plate.

[0010] Optionally, one side of the stabilizing protrusion is fixedly connected to the protrusion, the stabilizing protrusion is fixedly connected to the reciprocating motor, and a reciprocating rotating block is fixedly connected to the output end of the reciprocating motor.

[0011] Optionally, an adjusting rod is fixedly connected to one side of the reciprocating block, the adjusting rod is fixedly connected to the injection transition plate, the reciprocating motor drives the reciprocating rotating block to rotate, and the reciprocating rotating block is arc-shaped.

[0012] The beneficial effects achieved by this utility model are as follows: This invention provides a glue distribution structure for a glue coating and developing machine. By using a rotating motor to drive an adjusting rod for precise rotation, and combining this with a stable connection between an extended control plate and a stabilizing cap, the angle of the support block can be precisely adjusted, thereby effectively controlling the spraying direction. Simultaneously, the cooperative structure of the protruding plate and the moving slide, combined with the elastic return action of a spring, allows the spraying transition plate to achieve stable reciprocating movement, improving the dynamic response capability during the glue spraying process. Furthermore, by using a reciprocating motor to control the movement of the reciprocating block, the spraying transition plate can be quickly driven to vibrate at high frequency, which helps to promptly remove residual glue at the nozzle and prevent dripping. Attached Figure Description

[0013] Figure 1 This is a schematic diagram of the overall structure of this utility model; Figure 2 This is a structural schematic diagram of the entire utility model from another perspective; Figure 3 This is a partial structural schematic diagram of the present invention.

[0014] In the diagram, 1 is the support plate; 101 is the stabilizing hole; 2 is the rotating motor; 201 is the adjusting plate; 3 is the adjusting rod; 301 is the stabilizing cap; 4 is the extension control plate; 5 is the support block; 501 is the protruding plate; 502 is the moving slide; 6 is the spray transition plate; 601 is the inlet; 602 is the nozzle; 7 is the spring; 701 is the spring plate; 8 is the stabilizing protruding plate; 801 is the adjusting hole; 9 is the reciprocating motor; 901 is the reciprocating rotating block; 10 is the reciprocating block; and 1001 is the adjusting rod. Detailed Implementation

[0015] To facilitate understanding of this utility model by those skilled in the art, the specific embodiments of this utility model are described below with reference to the accompanying drawings. Example 1

[0016] like Figure 1-3 As shown, this utility model provides a glue distribution structure for a coating and developing machine, including a support plate 1, a rotating motor 2 at the bottom of the support plate 1, an adjusting rod 3 at the output end of the rotating motor 2 passing through the support plate 1, an extension control plate 4 at the top of the adjusting rod 3, a support block 5 at the other end of the extension control plate 4, a spray transition plate 6 on one side of the support block 5, a stabilizing protrusion plate 8 on one side of the support block 5, a reciprocating motor 9 on one side of the stabilizing protrusion plate 8, a reciprocating rotating block 901 at the output end of the reciprocating motor 9, and a reciprocating block 10 at the top of the spray transition plate 6, with the reciprocating block 10 in contact with the reciprocating rotating block 901.

[0017] This invention provides a glue distribution structure for a glue coating and developing machine. By using a rotating motor 2 to drive an adjusting rod 3 for precise rotation, and combining this with the stable connection between the extension control plate 4 and the stabilizing cap 301, the angle of the support block 5 can be precisely adjusted, thereby effectively controlling the spraying direction. Simultaneously, utilizing the cooperative structure of the protruding plate 501 and the moving slide 502, combined with the elastic reset effect of the spring 7, the spraying transition plate 6 can achieve stable reciprocating movement, improving the dynamic response capability during the glue spraying process. Furthermore, by using a reciprocating motor 9 to control the movement of the reciprocating block 10, the spraying transition plate 6 can be quickly driven to vibrate at high frequency, which helps to promptly remove residual glue at the nozzle 602 and prevent dripping. Example 2

[0018] like Figure 1-2 As shown, a stabilizing hole 101 is provided at the top of the support plate 1, and a rotating motor 2 is fixedly connected to the bottom of the support plate 1. The rotating motor 2 is fixedly connected to the adjusting rod 3.

[0019] Specifically, a support plate 1 is set to connect to the stabilizing hole 101, and a rotating motor 2 is set to drive the rotation of the adjusting rod 3. The rotating motor 2 is a stepper motor, so the rotation of the adjusting rod 3 can be partially controlled. The rotating motor 2 makes it convenient to control the angle of the adjusting rod 3.

[0020] In this embodiment, a stabilizing cap 301 is provided at the top of the adjusting rod 3, and the extension control plate 4 is fixedly connected to the adjusting rod 3 through the stabilizing cap 301. The extension control plate 4 is also fixedly connected to the support block 5.

[0021] Specifically, when the extended control plate 4 rotates along the adjusting rod 3, it can drive the controlled movement of the equipment according to the rotation of the adjusting rod 3, and the stabilizing cap 301 ensures a firm connection, thereby ensuring the stability of the connection. Example 3

[0022] like Figure 2-3 As shown, a protruding plate 501 is provided on one side of the support block 5, and a movable groove 502 is provided on one side of the support block 5. The end of the spray transition plate 6 passes through the movable groove 502, and the spray transition plate 6 is slidably connected along the movable groove 502.

[0023] Specifically, the spray transition plate 6 can slide flexibly through the protruding plate 501 and the movable slide groove 502.

[0024] In this embodiment, the top of the spray transition plate 6 is provided with an inlet 601, the bottom of the spray transition plate 6 is provided with a nozzle 602, the spray transition plate 6 and the protruding plate 501 are connected by a spring 7, the two ends of the spring 7 are fixedly provided with spring plates 701, the two spring plates 701 are fixedly connected to the spray transition plate 6 and the protruding plate 501 respectively, and a heating plate is provided inside the spray transition plate 6.

[0025] Specifically, the support block 5, along with the spring 7 and the sliding groove 502, can be used to control the reciprocating movement of the spray transition plate 6, facilitating subsequent control of the reciprocating movement of the spray transition plate 6. The heating plate can be used to heat the spray transition plate 6, providing a heating function when the spray transition plate 6 has not been used for a long time.

[0026] In this embodiment, one side of the stabilizing protrusion 8 is fixedly connected to the protrusion 501, the stabilizing protrusion 8 is fixedly connected to the reciprocating motor 9, and the output end of the reciprocating motor 9 is fixedly connected to the reciprocating rotating block 901.

[0027] In this embodiment, an adjusting rod 1001 is fixedly connected to one side of the reciprocating block 10. The adjusting rod 1001 is fixedly connected to the spray transition plate 6. The reciprocating motor 9 drives the reciprocating rotating block 901 to rotate. The reciprocating rotating block 901 is arc-shaped.

[0028] In use, the reciprocating motor 9 controls the rotation of the reciprocating rotating block 901, which in turn drives the reciprocating block 10 and the adjusting rod 1001 to move. This allows the spray transition plate 6 to slide back and forth in the moving slide groove 502, achieving a reciprocating vibration effect to shake off the adhesive residue left at the nozzle 602.

[0029] In summary, rotating the motor 2 can drive the precise rotation of the adjusting rod 3. Combined with the stable connection between the extension control plate 4 and the stabilizing cap 301, it can drive the stable rotation of the support block 5, thereby precisely controlling the angle of the support block 5. Furthermore, the protruding plate 501 and the moving slide 502, together with the spring 7, can control the reciprocating movement of the spray transition plate 6. The reciprocating motor 9 can control the reciprocating movement of the reciprocating block 10, thereby controlling the rapid reciprocating movement of the spray transition plate 6, which facilitates the quick shaking off of the adhesive residue left at the nozzle 602.

[0030] The embodiments of this utility model described above do not constitute a limitation on the scope of protection of this utility model. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the scope of protection of the claims of this utility model.

Claims

1. A glue solution dispensing structure of a glue developing machine, characterized by: The system includes a support plate (1), a rotating motor (2) is provided at the bottom of the support plate (1), an adjusting rod (3) is provided at the output end of the rotating motor (2) after passing through the support plate (1), an extension control plate (4) is provided at the top of the adjusting rod (3), a support block (5) is provided at the other end of the extension control plate (4), a spray transition plate (6) is provided on one side of the support block (5), a stabilizing protrusion plate (8) is provided on one side of the support block (5), a reciprocating motor (9) is provided on one side of the stabilizing protrusion plate (8), a reciprocating rotating block (901) is provided at the output end of the reciprocating motor (9), a reciprocating block (10) is provided at the top of the spray transition plate (6), and the reciprocating block (10) is in contact with the reciprocating rotating block (901).

2. The glue solution dispensing structure of the gluing and developing machine according to claim 1, characterized in that: The top of the support plate (1) is provided with a stabilizing hole (101), and the bottom of the support plate (1) is fixedly connected with a rotating motor (2), which is fixedly connected to the adjusting rod (3).

3. The glue solution dispensing structure of the gluing and developing machine according to claim 1, characterized in that: The top of the adjusting rod (3) is provided with a stabilizing cap (301), the extension control plate (4) is fixedly connected to the adjusting rod (3) through the stabilizing cap (301), and the extension control plate (4) is fixedly connected to the support block (5).

4. The glue solution distribution structure of the gluing and developing machine according to claim 1, characterized in that: The support block (5) has a protruding plate (501) on one side and a movable groove (502) on one side. The end of the spray transition plate (6) passes through the movable groove (502) and the spray transition plate (6) is slidably connected along the movable groove (502).

5. The glue solution dispensing structure of the gluing and developing machine according to claim 4, characterized in that: The top of the spray transition plate (6) is provided with an inlet (601), and the bottom of the spray transition plate (6) is provided with a nozzle (602). The spray transition plate (6) and the protruding plate (501) are connected by a spring (7). Spring plates (701) are fixedly provided at both ends of the spring (7). The two spring plates (701) are fixedly connected to the spray transition plate (6) and the protruding plate (501) respectively. A heating plate is provided inside the spray transition plate (6).

6. The glue solution dispensing structure of the gluing and developing machine according to claim 1, characterized in that: One side of the stabilizing protrusion (8) is fixedly connected to the protrusion (501), the stabilizing protrusion (8) is fixedly connected to the reciprocating motor (9), and the output end of the reciprocating motor (9) is fixedly connected to the reciprocating rotating block (901).

7. The adhesive dispensing structure of a coating and developing machine according to claim 6, characterized in that: An adjusting rod (1001) is fixedly connected to one side of the reciprocating block (10). The adjusting rod (1001) is fixedly connected to the spray transition plate (6). The reciprocating motor (9) drives the reciprocating rotating block (901) to rotate. The reciprocating rotating block (901) is arc-shaped.

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