A multi-angle spray device for a coating and developing machine

Abstract

This utility model discloses a multi-angle spraying device for a coating and developing machine, including a machine body, a support slidably connected between the inner walls of the machine body, a lifting component inside the machine body for moving the support, a dispensing pipe rotatably connected between the inner walls of the support, an adjusting component inside the support for rotating the dispensing pipe, and a nozzle on the outer side of the dispensing pipe. This utility model, through the coordinated arrangement of a liquid supply pump, a glue supply pump, a liquid guide pipe, a first folded telescopic pipe, a second folded telescopic pipe, the dispensing pipe, and the nozzles, achieves the spraying of glue and developing solution onto the wafer. Simultaneously, the adjusting component drives the dispensing pipe to rotate between the inner walls of the support, thereby adjusting the spraying angle of the nozzles, effectively avoiding spray dead zones and ensuring full coverage of the spraying operation. This not only improves the uniformity of coating and developing but also significantly enhances the spraying efficiency and quality of the coating and developing machine.

Description

Technical Field

[0001] This utility model relates to the field of coating and developing machine technology, specifically a multi-angle spraying device for a coating and developing machine. Background Technology

[0002] Photoresist coating and developing machines, as key equipment in semiconductor manufacturing processes, play a crucial role in the photolithography stage. Their main function is to uniformly coat the wafer surface with photoresist and remove unwanted photoresist through the developing process, thereby accurately transferring the mask pattern onto the wafer.

[0003] In current coating and developing machines, most still use a fixed-angle spray structure for spraying adhesive and developer. However, the fixed-angle spraying method is prone to dead zones and cannot achieve comprehensive and uniform spraying of the wafer surface. This not only affects the coverage of the spraying effect, but may also lead to insufficient spraying uniformity, thereby reducing the efficiency and quality of coating and developing machine spraying. To solve the above problems, we propose a multi-angle spraying device for coating and developing machines. Utility Model Content

[0004] The purpose of this invention is to provide a multi-angle spraying device for a coating and developing machine to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a multi-angle spraying device for a coating and developing machine, comprising a body, a support slidably connected between the inner walls of the body, a lifting assembly inside the body for moving the support, a dispensing pipe rotatably connected between the inner walls of the support, an adjusting assembly inside the support for rotating the dispensing pipe, a nozzle on the outer side of the dispensing pipe, a first folded telescopic pipe and a second folded telescopic pipe between the dispensing pipe and the body, a liquid storage tank fixedly connected to the top of the body, a partition fixedly connected between the inner walls of the liquid storage tank, an injection port and a glue injection port on one side of the liquid storage tank, a guide pipe between the liquid storage tank and the body, the guide pipe communicating with the interior of the first folded telescopic pipe, and a spraying table fixedly connected to the bottom of the inner side of the body.

[0006] As a further preferred embodiment of this technical solution, a liquid supply pump and a glue supply pump are fixedly installed between the inner walls of the liquid storage tank. The liquid supply pump and the glue supply pump are located on both sides of the partition. One end of the liquid guide tube extends into the interior of the liquid storage tank and is fixedly connected to the output end of the liquid supply pump. The top end of the second folding telescopic tube extends into the interior of the liquid storage tank and is fixedly connected to the output end of the glue supply pump.

[0007] As a further preferred embodiment of this technical solution, the adjustment component includes a first rotating shaft and a second rotating shaft, which are rotatably connected to both sides inside the support. One end of each of the first and second rotating shafts is fixedly connected to the liquid separator, and a worm gear is fixedly connected to the outer side of the first rotating shaft.

[0008] As a further preferred embodiment of this technical solution, a mounting plate and an auxiliary plate are fixedly connected to one side inside the bracket, and a worm gear is rotatably connected between the mounting plate and the auxiliary plate, the worm gear meshing with a worm wheel.

[0009] As a further preferred embodiment of this technical solution, an adjusting motor is fixedly installed on one side of the mounting plate, and the output end of the adjusting motor passes through the mounting plate and is fixedly connected to the worm gear.

[0010] As a further preferred embodiment of this technical solution, the lifting assembly includes a lifting groove and a guide groove, which are respectively opened on both sides of the body. A threaded rod is rotatably connected between the inner walls of the lifting groove, and a lifting block is threadedly connected to the outer side of the threaded rod. One side of the lifting block is fixedly connected to the bracket.

[0011] As a further preferred embodiment of this technical solution, a guide rod is fixedly connected between the inner walls of the guide groove, a guide block is slidably connected to the outer side of the guide rod, and one side of the guide block is fixedly connected to the bracket.

[0012] As a further preferred embodiment of this technical solution, a lifting motor is fixedly installed on the top of the machine body, and the output end of the lifting motor extends into the interior of the lifting groove and is fixedly connected to the threaded rod.

[0013] This utility model provides a multi-angle spraying device for a coating and developing machine, which has the following beneficial effects:

[0014] (1) This utility model achieves the spraying of adhesive and developer onto the wafer by setting up a liquid supply pump, glue supply pump, liquid guide tube, first folded telescopic tube, second folded telescopic tube, liquid distribution tube and nozzle in cooperation. At the same time, the liquid distribution tube is driven to rotate between the inner walls of the support by the adjustment component, thereby adjusting the spraying angle of the nozzle, so as to effectively avoid spray dead angles and ensure full coverage of spraying operation. This not only improves the uniformity of glue coating and development, but also significantly improves the spraying efficiency and quality of the glue coating and developing machine.

[0015] (2) This utility model drives the support to move between the inner walls of the machine body through the lifting component, thereby adjusting the spraying height of the nozzle, further ensuring the quality of spraying, and improving the adjustment flexibility of the coating and developing machine. Attached Figure Description

[0016] Figure 1 This is a three-dimensional structural diagram of the present invention;

[0017] Figure 2 This is a three-dimensional cross-sectional structural diagram of the present invention;

[0018] Figure 3 This is a schematic diagram of the body structure of this utility model;

[0019] Figure 4 This is a schematic diagram of the support structure of this utility model;

[0020] In the diagram: 1. Machine body; 2. Liquid storage tank; 3. Liquid injection port; 4. Liquid guide pipe; 5. Lifting groove; 6. Threaded rod; 7. Spray table; 8. Bracket; 9. Mounting plate; 10. Auxiliary plate; 11. Worm gear; 12. Adjusting motor; 13. Worm wheel; 14. Liquid distribution pipe; 15. Nozzle; 16. First folding telescopic pipe; 17. Liquid supply pump; 18. Guide groove; 19. Guide rod; 20. Lifting motor; 21. Lifting block; 22. Guide block; 23. First rotating shaft; 24. Second rotating shaft; 25. Glue injection port; 26. Partition plate; 27. Glue supply pump; 28. Second folding telescopic pipe. Detailed Implementation

[0021] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention.

[0022] This utility model provides a technical solution: such as Figures 1-4 As shown, in this embodiment, a multi-angle spraying device for a coating and developing machine includes a body 1. A support 8 is slidably connected between the inner walls of the body 1. A lifting assembly is provided inside the body 1 to move the support 8. A dispensing pipe 14 is rotatably connected between the inner walls of the support 8. An adjusting assembly is provided inside the support 8 to rotate the dispensing pipe 14. A nozzle 15 is provided on the outer side of the dispensing pipe 14. A first folding telescopic pipe 16 and a second folding telescopic pipe 28 are provided between the dispensing pipe 14 and the body 1. A liquid storage tank 2 is fixedly connected to the top of the body 1. The inner walls of the liquid storage tank 2 are fixedly connected... A partition 26 is connected to the liquid storage tank 2. A liquid inlet 3 and a glue inlet 25 are provided on one side of the liquid storage tank 2. A liquid guide pipe 4 is provided between the liquid storage tank 2 and the machine body 1. The liquid guide pipe 4 communicates with the interior of the first folding telescopic pipe 16. A spray table 7 is fixedly connected to the bottom of the inner side of the machine body 1. A liquid supply pump 17 and a glue supply pump 27 are fixedly installed between the inner walls of the liquid storage tank 2. The liquid supply pump 17 and the glue supply pump 27 are located on both sides of the partition 26. One end of the liquid guide pipe 4 extends into the interior of the liquid storage tank 2 and is fixedly connected to the output end of the liquid supply pump 17. The top end of the second folding telescopic pipe 28 extends into the interior of the liquid storage tank 2 and is fixedly connected to the output end of the glue supply pump 27.

[0023] When performing coating and developing operations in the coating and developing machine, the developer and adhesive are first injected into the storage tank 2 through the injection port 3 and the adhesive injection port 25, respectively, and separated by the partition 26. Then, the wafer is placed on the spray table 7. Subsequently, according to the spraying operation requirements, the lifting component drives the support 8 to move between the inner walls of the machine body 1, thereby adjusting the nozzle 15 to a suitable spraying height. At the same time, the adjusting component drives the dispensing pipe 14 to rotate between the inner walls of the support 8, thereby adjusting the nozzle 15 to a suitable spraying angle. Meanwhile, the machine body 1 is connected to an external power source and powered on. The controller then starts the adhesive supply pump 27, which delivers the adhesive along the guide pipe 4 and the first folded telescopic pipe 16 to the dispensing pipe 14. The nozzle 15 then uses the adhesive to evenly spray the adhesive onto the wafer, thus completing the coating operation.

[0024] After the adhesive on the wafer solidifies, the developer is pumped by the supply pump 17 along the second folded telescopic tube 28 to the distribution tube 14. Then, the developer is sprayed evenly onto the wafer in a mist form by the nozzle 15 to remove excess and uncured adhesive from the wafer, ensuring that the wafer surface is clean and tidy. This completes the developing operation and improves the spraying efficiency and quality of the spraying device.

[0025] like Figures 1-4 As shown, the adjustment assembly includes a first rotating shaft 23 and a second rotating shaft 24. The first rotating shaft 23 and the second rotating shaft 24 are rotatably connected to both sides inside the bracket 8. One end of the first rotating shaft 23 and the second rotating shaft 24 are fixedly connected to the liquid separator 14. A worm gear 13 is fixedly connected to the outer side of the first rotating shaft 23. A mounting plate 9 and an auxiliary plate 10 are fixedly connected to one side inside the bracket 8. A worm 11 is rotatably connected between the mounting plate 9 and the auxiliary plate 10. The worm 11 meshes with the worm gear 13. An adjustment motor 12 is fixedly installed on one side of the mounting plate 9. The output end of the adjustment motor 12 passes through the mounting plate 9 and is fixedly connected to the worm 11.

[0026] By adjusting the motor 12 to drive the worm gear 11 to rotate between the mounting plate 9 and the auxiliary plate 10, and by utilizing the meshing between the worm gear 11 and the worm wheel 13, the first rotating shaft 23 is driven to rotate. Then, in conjunction with the second rotating shaft 24, the liquid distribution pipe 14 is driven to rotate between the inner walls of the bracket 8, thereby improving the spraying effect of the spraying device.

[0027] like Figures 1-4As shown, the lifting assembly includes a lifting groove 5 and a guide groove 18. The lifting groove 5 and the guide groove 18 are respectively opened on both sides inside the body 1. A threaded rod 6 is rotatably connected between the inner walls of the lifting groove 5. A lifting block 21 is threadedly connected to the outer side of the threaded rod 6. One side of the lifting block 21 is fixedly connected to the bracket 8. A guide rod 19 is fixedly connected between the inner walls of the guide groove 18. A guide block 22 is slidably connected to the outer side of the guide rod 19. One side of the guide block 22 is fixedly connected to the bracket 8. A lifting motor 20 is fixedly installed on the top of the body 1. The output end of the lifting motor 20 extends into the interior of the lifting groove 5 and is fixedly connected to the threaded rod 6.

[0028] The lifting motor 20 drives the threaded rod 6 to rotate between the inner walls of the lifting groove 5, thereby driving the lifting block 21 to move. In conjunction with the guide block 22 that moves on the guide rod 19 inside the guide groove 18, the bracket 8 is driven to move between the inner walls of the body 1, thereby improving the adjustment flexibility of the spraying device.

[0029] This utility model provides a multi-angle spraying device for a coating and developing machine. The specific working principle is as follows: When the coating and developing machine is performing coating and developing operations, the developing solution and adhesive are first injected into the storage tank 2 through the injection port 3 and the adhesive injection port 25 respectively, and separated by a partition 26. Next, the wafer is placed on the spraying table 7. Then, according to the spraying operation requirements, the machine body 1 is connected to an external power source and powered on. The controller then starts the lifting motor 20, which drives the threaded rod 6 to rotate between the inner walls of the lifting groove 5, thereby driving the lifting block 21 to move. This, in conjunction with the guide block 22 moving on the guide rod 19 inside the guide groove 18, drives the... The bracket 8 moves between the inner walls of the machine body 1 to adjust the nozzle 15 to a suitable spraying height. At the same time, the motor 12 drives the worm gear 11 to rotate between the mounting plate 9 and the auxiliary plate 10. The meshing between the worm gear 11 and the worm wheel 13 drives the first rotating shaft 23 to rotate. Then, in conjunction with the second rotating shaft 24, the liquid distribution pipe 14 is driven to rotate between the inner walls of the bracket 8, thereby adjusting the nozzle 15 to a suitable spraying angle. Meanwhile, the glue supply pump 27 delivers glue along the liquid guide pipe 4 and the first folded telescopic pipe 16 to the liquid distribution pipe 14. The nozzle 15 then uses the glue to evenly spray the glue onto the wafer, thus completing the glue coating operation.

[0030] After the adhesive on the wafer solidifies, the developer is pumped by the supply pump 17 along the second folded telescopic tube 28 to the distribution tube 14. Then, the developer is sprayed evenly onto the wafer in a mist form by the nozzle 15 to remove excess and uncured adhesive from the wafer, ensuring that the wafer surface is clean and tidy. This completes the developing operation and enables the use of the multi-angle spraying device.

[0031] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A multi-angle spraying device of a gumming developing machine, comprising a machine body (1), characterized in that: A bracket (8) is slidably connected between the inner walls of the machine body (1). A lifting assembly is provided inside the machine body (1) to move the bracket (8). A dispensing tube (14) is rotatably connected between the inner walls of the bracket (8). An adjusting assembly is provided inside the bracket (8) to rotate the dispensing tube (14). A nozzle (15) is provided on the outer side of the dispensing tube (14). A first folding telescopic joint is provided between the dispensing tube (14) and the machine body (1). The top of the body (1) is fixedly connected to a liquid storage tank (2), and a partition (26) is fixedly connected between the inner walls of the liquid storage tank (2). A liquid injection port (3) and a glue injection port (25) are opened on one side of the liquid storage tank (2). A liquid guide pipe (4) is provided between the liquid storage tank (2) and the body (1). The liquid guide pipe (4) communicates with the interior of the first folding telescopic pipe (16). A spray table (7) is fixedly connected to the bottom of the inner side of the body (1).

2. The multi-angle spraying device of the gluing developing machine according to claim 1, characterized in that: A liquid supply pump (17) and a glue supply pump (27) are fixedly installed between the inner walls of the liquid storage tank (2). The liquid supply pump (17) and the glue supply pump (27) are located on both sides of the partition (26). One end of the liquid guide pipe (4) extends into the interior of the liquid storage tank (2) and is fixedly connected to the output end of the liquid supply pump (17). The top end of the second folding telescopic pipe (28) extends into the interior of the liquid storage tank (2) and is fixedly connected to the output end of the glue supply pump (27).

3. The multi-angle spraying device of the gluing developing machine according to claim 1, characterized in that: The adjustment assembly includes a first rotating shaft (23) and a second rotating shaft (24). The first rotating shaft (23) and the second rotating shaft (24) are rotatably connected to both sides inside the bracket (8). One end of the first rotating shaft (23) and the second rotating shaft (24) are fixedly connected to the liquid separator (14). A worm gear (13) is fixedly connected to the outside of the first rotating shaft (23).

4. The multi-angle spraying device of a gluing developing machine according to claim 3, characterized in that: A mounting plate (9) and an auxiliary plate (10) are fixedly connected to one side inside the bracket (8). A worm (11) is rotatably connected between the mounting plate (9) and the auxiliary plate (10). The worm (11) meshes with the worm wheel (13).

5. The multi-angle spraying device of a gluing developing machine according to claim 4, characterized in that: An adjusting motor (12) is fixedly installed on one side of the mounting plate (9), and the output end of the adjusting motor (12) passes through the mounting plate (9) and is fixedly connected to the worm gear (11).

6. The multi-angle spraying device of a gluing developing machine according to claim 1, characterized in that: The lifting assembly includes a lifting groove (5) and a guide groove (18). The lifting groove (5) and the guide groove (18) are respectively opened on both sides inside the body (1). A threaded rod (6) is rotatably connected between the inner walls of the lifting groove (5). A lifting block (21) is threadedly connected to the outer side of the threaded rod (6). One side of the lifting block (21) is fixedly connected to the bracket (8).

7. The multi-angle spraying device of a gluing developing machine according to claim 6, characterized in that: A guide rod (19) is fixedly connected between the inner walls of the guide groove (18), and a guide block (22) is slidably connected to the outer side of the guide rod (19). One side of the guide block (22) is fixedly connected to the bracket (8).

8. The multi-angle spraying device of a gluing developing machine according to claim 5, characterized in that: The top of the machine body (1) is fixedly provided with a lifting motor (20), and the output end of the lifting motor (20) extends to the inside of the lifting groove (5) and is fixedly connected with the threaded rod (6).

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