Silencing device for a wafer sawing machine

Abstract

This utility model relates to the field of wafer dicing machine technology and discloses a noise reduction device for a wafer dicing machine, including a drainage tank and a vacuum generator. The vacuum generator is mounted on the drainage tank, and its outlet end is equipped with a noise-reducing filter. The noise-reducing filter is filled with porous fiber blocks and arranged inside the drainage tank cavity. Wastewater inlet and outlet are respectively located on both sides of the drainage tank, and the drainage tank cavity forms a continuous slope between the wastewater inlet and outlet. This utility model, by integrating the vacuum generator onto the drainage tank and arranging the noise-reducing filter inside the drainage tank cavity, makes reasonable use of the internal space of the drainage tank and simultaneously reduces noise at the outlet of the vacuum generator, effectively reducing the environmental noise during the operation of the entire dicing machine.

Description

Technical Field

[0001] This utility model relates to the field of wafer dicing machine technology, specifically to a noise reduction device for a wafer dicing machine. Background Technology

[0002] In the cutting operation of fully automatic or semi-automatic grinding wheel dicing machines, the cutting process requires the spraying of cutting water, which generates a large amount of water vapor, along with waste material formed during cutting. This waste material is collected in a drainage trough along with the water vapor and then discharged from the dicing machine. Furthermore, existing grinding wheel dicing machines use vacuum adsorption to fix the workpiece at the cutting station before cutting, but the vacuum generator generates significant noise during operation, which can negatively impact the working environment and operators. Utility Model Content

[0003] To address the shortcomings of existing technologies, this utility model provides a noise reduction device for a wafer dicing machine, which solves the problems of the existing dicing machine's drainage tank having a single function and the vacuum generator generating significant noise during operation, thus affecting the operator's working environment.

[0004] To achieve the above objectives, this utility model provides the following technical solution:

[0005] A noise reduction device for a wafer dicing machine includes a drainage trough and a vacuum generator. The vacuum generator is installed on the drainage trough, and a noise reduction filter is provided at its outlet end. The noise reduction filter is filled with porous fiber blocks and arranged in the inner cavity of the drainage trough. Wastewater inlet and wastewater outlet are respectively provided on both sides of the drainage trough, and the inner cavity of the drainage trough forms a continuous slope between the wastewater inlet and the wastewater outlet.

[0006] Preferably, the outer ring of the porous fiber block is fitted with a sound-absorbing sponge frame, and the sound-absorbing sponge frame fills the gap between the porous fiber block and the wall of the sound-absorbing filter.

[0007] Preferably, a water level sensor is vertically and detachably mounted on the cavity wall of the drainage trough via a mounting bracket. The water level sensor is positioned near the wastewater outlet, and a U-shaped groove that mates with the water level sensor is provided on the mounting bracket.

[0008] Preferably, a sound-absorbing sealing plate is detachably installed on the upper surface of the drainage trough, a sound-absorbing filter screen is detachably installed on the sound-absorbing sealing plate, and a vacuum generator is fixedly installed on the sound-absorbing sealing plate with its air outlet end connected to the sound-absorbing filter screen.

[0009] Preferably, an extension panel can be detachably installed on the upper surface of the drainage trough, located on one side of the sound-absorbing sealing plate. The extension panel has a pipe opening that communicates with the inner cavity of the drainage trough, and the pipe opening is arranged close to the wastewater inlet.

[0010] Preferably, the expansion panel has mounting slots at its four corners, and the mounting position of the expansion panel on the drainage channel can be adjusted by using the mounting slots and fixing screws.

[0011] This utility model has the following beneficial effects:

[0012] The noise reduction device of this wafer dicing machine, through a sound-absorbing filter filled with porous fiber blocks, can reduce the exhaust noise generated at the vacuum generator's exhaust end while ensuring exhaust efficiency. Simultaneously, the efficient use of the drainage tank's internal space enhances the overall integration of the automatic dicing machine. The continuous slope within the drainage tank ensures that the cutting water from the mixed oil waste material fed into the wastewater inlet is directly discharged from the wastewater outlet, preventing waste material accumulation within the drainage tank and thus improving drainage efficiency. Attached Figure Description

[0013] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0014] Figure 2 This is a cross-sectional structural diagram of the present invention;

[0015] Figure 3 This is a schematic diagram of the disassembled structure of the main components of this utility model;

[0016] Figure 4 This is a schematic diagram of the layout structure of the sound-absorbing filter, sound-absorbing sponge frame, and porous fiber block of this utility model.

[0017] Figure 5 This is a schematic diagram of the vacuum generator structure in this utility model (in the vacuum generator, P corresponds to the air inlet, V corresponds to the vacuum adsorption end, and A corresponds to the air outlet).

[0018] In the diagram: 1. Drainage trough; 11. Wastewater inlet; 12. Wastewater outlet; 2. Silencing filter; 21. Silencing sponge frame; 22. Porous fiber block; 3. Water level sensor; 31. Mounting bracket; 4. Silencing sealing plate; 5. Vacuum generator; 6. Extension panel; 61. Mounting slot. Detailed Implementation

[0019] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0020] A noise reduction device for a wafer dicing machine includes a drainage trough 1 and a vacuum generator 5. The vacuum generator 5 is mounted on the drainage trough 1, and its outlet end is equipped with a noise reduction filter 2. The noise reduction filter 2 is filled with porous fiber blocks 22 and arranged in the inner cavity of the drainage trough 1. Wastewater inlet 11 and wastewater outlet 12 are respectively provided on both sides of the drainage trough 1. The inner cavity of the drainage trough 1 forms a continuous slope between the wastewater inlet 11 and the wastewater outlet 12.

[0021] like Figure 2 and Figure 3 As shown, in the above technical solution, by filling the sound-absorbing filter 2 with porous fiber blocks 22, noise reduction of the exhaust noise generated at the exhaust end of the vacuum generator 5 can be achieved while ensuring exhaust efficiency. Simultaneously, the internal space of the drainage trough 1 is utilized efficiently, improving the overall integration of the automatic dicing machine. The continuous slope within the drainage trough 1 ensures that the cutting water from the mixed oil waste fed into the wastewater inlet 11 is directly discharged from the wastewater outlet 12, preventing waste from accumulating in the drainage trough 1 and affecting drainage efficiency.

[0022] The outer ring of the porous fiber block 22 is fitted with a sound-absorbing sponge frame 21, which fills the gap between the porous fiber block 22 and the cavity wall of the sound-absorbing filter 2, as shown in the figure. Figure 4 As shown, in this technical solution, the sound-absorbing sponge frame 21 can serve as a second sound-absorbing and noise-reducing measure, absorbing sound wave energy and reducing noise reflection of the gas discharged from the vacuum generator 5. Together with the porous fiber block 22, it plays a dual role in sound absorption and noise reduction, further ensuring the sound absorption capacity of the entire sound-absorbing filter 2.

[0023] like Figure 3 As shown, in this technical solution, the water level sensor 3 is vertically and detachably mounted on the cavity wall of the drainage tank 1 via a mounting bracket 31. The water level sensor 3 is positioned near the wastewater outlet 12, and the mounting bracket 31 has a U-shaped groove that mates with the water level sensor 3. The mounting bracket 31 facilitates quick and easy installation and removal of the water level sensor 3; simultaneously, the water level sensor 3 positioned near the wastewater outlet 12 ensures accurate water level monitoring. In practical applications, a float-type water level sensor 3 is used.

[0024] like Figure 4 As shown, in this technical solution, a sound-absorbing sealing plate 4 is detachably installed on the upper end face of the drainage tank 1, a sound-absorbing filter 2 is detachably installed on the sound-absorbing sealing plate 4, and a vacuum generator 5 is fixedly installed on the sound-absorbing sealing plate 4 with its air outlet connected to the sound-absorbing filter 2. The sound-absorbing sealing plate 4 can further improve the overall sound absorption capacity.

[0025] like Figure 1 and Figure 3As shown, in this technical solution, the upper end face of the drainage trough 1 is located on one side of the sound-absorbing sealing plate 4 and an extension panel 6 can be detachably installed. The extension panel 6 has a pipe opening that communicates with the inner cavity of the drainage trough 1 and the pipe opening is arranged close to the wastewater inlet 11.

[0026] The pipe openings located at the extension panel 6 serve as vertical wastewater inlets 11, allowing for easy adjustment of the overall layout of the drainage trough 1 to meet the need for simultaneous drainage of multiple wastewater sources and ensure overall drainage efficiency. Simultaneously, the extension pipe openings' proximity to the continuous slope also prevents waste material from accumulating within the drainage trough 1. In practical applications, the continuous slope is set between 3° and 10° to ensure both the water storage capacity of the drainage trough 1 and the prevention of waste accumulation.

[0027] The extension panel 6 has mounting slots 61 at its four corners. The mounting position of the extension panel 6 on the drain 1 is adjusted using the mounting slots 61 and fixing screws. Specifically, as shown below... Figure 3 As shown, in this technical solution, by adjusting the installation position of the expansion plate, the expansion port on it can be adjusted within a certain range so that the port can be stably matched with the drain port on the dicing machine.

[0028] It should be noted that, in this document, relational terms such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, the phrase "comprising an element defined as..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0029] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A noise reduction device for a wafer dicing machine, characterized in that, It includes a drainage trough and a vacuum generator. The vacuum generator is installed on the drainage trough, and its air outlet is equipped with a sound-absorbing filter. The sound-absorbing filter is filled with porous fiber blocks and arranged in the inner cavity of the drainage trough. Wastewater inlet and wastewater outlet are respectively provided on both sides of the drainage trough. The inner cavity of the drainage trough forms a continuous slope between the wastewater inlet and the wastewater outlet.

2. The dicing apparatus of claim 1, wherein: The outer ring of the porous fiber block is fitted with a sound-absorbing sponge frame, which fills the gap between the porous fiber block and the wall of the sound-absorbing filter.

3. The dicing apparatus of claim 1, wherein: The drainage trough cavity wall is vertically and detachably mounted with a water level sensor via a mounting bracket. The water level sensor is positioned near the wastewater outlet end, and the mounting bracket has a U-shaped groove that cooperates with the water level sensor.

4. A dicing apparatus according to claim 2 or 3, wherein: A sound-absorbing sealing plate is detachably installed on the upper surface of the drainage trough, and a sound-absorbing filter screen is detachably installed on the sound-absorbing sealing plate. A vacuum generator is fixedly installed on the sound-absorbing sealing plate, and its air outlet is connected to the sound-absorbing filter screen.

5. The dicing apparatus of claim 4, wherein: An extension panel can be detachably installed on the upper surface of the drainage trough, located on one side of the sound-absorbing sealing plate. The extension panel has a pipe opening that communicates with the inner cavity of the drainage trough, and the pipe opening is arranged close to the wastewater inlet.

6. The dicing apparatus of claim 5, wherein: The expansion panel has mounting slots at its four corners, and the mounting position of the expansion panel on the drainage channel can be adjusted by using the mounting slots and fixing screws.

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