A specimen stage support structure for a scanning electron microscope

Abstract

This utility model relates to the field of scanning electron microscope (SEM) sample support technology, specifically a sample stage support structure for an SEM, comprising a main body, a cover plate, an SEM, a placement frame, a placement stage, a sample carrier plate, and a replacement device. The cover plate is rotatably connected to the surface of the main body, the SEM is fixedly connected to the upper surface of the main body, the placement frame is slidably connected to the interior of the main body, the placement stage is installed inside the placement frame, the sample carrier plate is installed on the upper surface of the placement stage, and the replacement device is installed inside the placement stage. The replacement device includes a pressing hole and a connecting groove. The pressing hole is located inside the placement stage, and the connecting groove is located on the upper surface of the placement stage. The sample carrier plate is inserted into the connecting groove, and a limiting groove is provided on the side of the sample carrier plate. This utility model's replacement device enables rapid replacement of the sample carrier plate, improving the user's replacement efficiency.

Description

Technical Field

[0001] This utility model relates to the field of scanning electron microscope (SEM) sample support technology, and in particular to a sample stage support structure for SEM. Background Technology

[0002] As an important tool for microstructure analysis, scanning electron microscopy has a wide range of applications in many fields such as materials science, biology, and geology. During the operation of scanning electron microscopy, the sample stage support structure plays a crucial role. It needs to stably support the sample and ensure that the sample maintains the correct position and orientation during electron beam scanning.

[0003] However, the existing equipment has the following shortcomings: When using the existing equipment, the loading plate is generally fixed to the surface of the placement platform with bolts. When replacing the loading plate, tools are required, which are too cumbersome and result in low replacement efficiency for users.

[0004] Therefore, we propose a sample stage support structure for scanning electron microscopes to address the problems mentioned above. Utility Model Content

[0005] The purpose of this invention is to address the shortcomings of existing technologies where users need to use tools to change the sample plate, resulting in low efficiency. Therefore, this invention proposes a sample stage support structure for scanning electron microscopes.

[0006] To achieve the above objectives, the present invention adopts the following technical solution: a sample stage support structure for a scanning electron microscope, comprising a main body, a cover plate, a scanning electron microscope, a placement frame, a placement stage, a carrier plate, and a replacement device. The cover plate is rotatably connected to the surface of the main body, the scanning electron microscope is fixedly connected to the upper surface of the main body, the placement frame is slidably connected to the interior of the main body, the placement stage is installed inside the placement frame, the carrier plate is installed on the upper surface of the placement stage, and the replacement device is installed inside the placement stage. The replacement device includes a pressing hole and a connecting groove. The pressing hole is located inside the placement stage, the connecting groove is located on the upper surface of the placement stage, the carrier plate is inserted into the interior of the connecting groove, and a limiting groove is provided on the side of the carrier plate.

[0007] Furthermore, a pressure rod is slidably connected inside the pressure hole, and a limit rod is fixedly connected inside the pressure rod. By setting the limit rod, the loading plate can be limited, reducing the difficulty of limiting the loading plate during use.

[0008] Furthermore, the limiting rod is inserted into the limiting groove.

[0009] Furthermore, a first spring is fixedly connected to the end of the pressure rod away from the limiting rod, and the end of the first spring away from the pressure rod is fixedly connected to the inside of the pressure hole. The first spring is provided to facilitate the application of a restoring force to the pressure rod.

[0010] Furthermore, an adjustment device is fixedly installed inside the main body. The adjustment device includes a slide rail and a connecting plate. The slide rail is fixedly connected inside the main body, and the connecting plate is fixedly connected to the side of the placement frame. The connecting plate is slidably connected inside the slide rail. An adjustment groove is opened inside the slide rail, and a moving hole is opened inside the connecting plate. A retaining ball is slidably connected inside the moving hole. One end of the retaining ball is engaged with the inside of the adjustment groove. A stop block is fixedly connected to the end of the retaining ball away from the adjustment groove. A second spring is fixedly connected to the surface of the retaining ball. The end of the second spring away from the retaining ball is fixedly connected to the inside of the moving hole. A stop rod is slidably connected inside the moving hole. A limit block is fixedly connected to the outer surface of the placement frame. The stop rod is slidably connected inside the limit block. A sliding rod is fixedly connected to the surface of the placement frame. The stop rod is slidably connected to the surface of the sliding rod. By setting the retaining ball, the connecting plate can be fixed to the inside of the slide rail, reducing the difficulty of fixing the placement frame to the inside of the main body during use.

[0011] Furthermore, a fixing block is fixedly connected to the end of the slide rod away from the placement frame, and a third spring is sleeved and connected to the surface of the slide rod. The slide rod is designed to facilitate the limiting of the stop rod.

[0012] Furthermore, one end of the third spring is fixedly connected to the surface of the fixing block, and the end of the third spring away from the fixing block is fixedly connected to the surface of the abutment rod. The third spring is provided to facilitate the application of a restoring force to the abutment rod.

[0013] Compared with the prior art, the advantages and positive effects of this utility model are as follows: In this invention, by setting a replacement device, the loading plate is effectively limited, which stabilizes the loading plate and reduces the need for tools to replace the loading plate, which is usually fixed to the surface of the platform with bolts in existing equipment. The use of tools is too cumbersome and results in low replacement efficiency for users. This replacement device enables quick replacement of the loading plate and improves the user's replacement efficiency.

[0014] In this invention, by setting an adjustment device, the position of the placement frame is effectively restricted, thus limiting the position of the placement frame. This reduces the problem that existing equipment often has difficulty fixing the placement frame inside the main body, which can cause the placement frame to move easily when the main body of the equipment is subjected to external force during testing, affecting the accuracy of the equipment's testing. This adjustment device stabilizes the placement frame, facilitates the limiting and fixing of the placement frame inside the main body, and improves the accuracy of the equipment's testing. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the accompanying drawings used in the description of the embodiments or the prior art will be briefly introduced below.

[0016] Figure 1 A three-dimensional structural diagram of a sample stage support structure for a scanning electron microscope is provided for this utility model. Figure 2 This utility model provides an internal structural diagram of a sample stage support structure for a scanning electron microscope. Figure 3 This utility model provides a schematic diagram of a placement frame structure for a sample stage support structure used in a scanning electron microscope. Figure 4 This invention proposes a sample stage support structure for scanning electron microscopes. Figure 3 Enlarged structural diagram at point A in the middle; Figure 5 This invention proposes a sample stage support structure for scanning electron microscopes. Figure 3 Enlarged structural diagram at point B; Figure 6 This invention proposes a sample stage support structure for scanning electron microscopes. Figure 3 Enlarged structural diagram at point C.

[0017] Legend: 1. Main body; 2. Cover plate; 3. Scanning electron microscope; 4. Placement frame; 5. Placement stage; 6. Carrier plate; 7. Replacement device; 71. Pressing hole; 72. Connecting groove; 73. Limiting groove; 74. Pressing rod; 75. Limiting rod; 76. First spring; 8. Adjustment device; 81. Slide rail; 82. Connecting plate; 83. Adjustment groove; 84. Moving hole; 85. Ball retainer; 86. Abutment block; 87. Second spring; 88. Abutment rod; 89. Limiting block; 810. Slide rod; 811. Fixing block; 812. Third spring. Detailed Implementation

[0018] The embodiments of the present invention are described in detail below. Examples of the embodiments are shown in the accompanying drawings. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain the present invention, but should not be construed as limiting the present invention.

[0019] Please see Figures 1-6 This utility model provides a technical solution: a sample stage support structure for a scanning electron microscope, including a main body 1, a cover plate 2, a scanning electron microscope 3, a placement frame 4, a placement stage 5, a carrier plate 6, and a replacement device 7. The cover plate 2 is rotatably connected to the surface of the main body 1, the scanning electron microscope 3 is fixedly connected to the upper surface of the main body 1, the placement frame 4 is slidably connected to the interior of the main body 1, the placement stage 5 is installed inside the placement frame 4, and the carrier plate 6 is installed on the upper surface of the placement stage 5.

[0020] The main body 1 is made of high-strength alloy steel with precision surface processing, ensuring good stability; the cover plate 2 is also made of high-strength alloy steel; the scanning electron microscope 3 is a high-precision detection device with clear imaging; the placement frame 4 is a metal frame with a stable structure; the placement platform 5 is made of marble with high flatness; and the carrying plate 6 is a ceramic plate that is heat-resistant and insulating.

[0021] The specific settings and functions of the replacement device 7 and the adjustment device 8 will be explained in detail below.

[0022] In this embodiment: the replacement device 7 is installed inside the placement platform 5. The replacement device 7 includes a pressing hole 71 and a connecting groove 72. The pressing hole 71 is opened inside the placement platform 5, and the connecting groove 72 is opened on the upper surface of the placement platform 5. The carrying plate 6 is inserted and connected to the inside of the connecting groove 72. The side of the carrying plate 6 is provided with a limiting groove 73.

[0023] Specifically, a pressure rod 74 is slidably connected inside the pressure hole 71, and a limit rod 75 is fixedly connected inside the pressure rod 74.

[0024] In this embodiment, by setting a limiting rod 75, the loading plate 6 can be limited, reducing the difficulty of limiting the loading plate 6 during use of the equipment.

[0025] Specifically, the limiting rod 75 is internally inserted into the limiting groove 73.

[0026] Specifically, a first spring 76 is fixedly connected to the end of the pressure rod 74 away from the limiting rod 75. The end of the first spring 76 away from the pressure rod 74 is fixedly connected to the inside of the pressure hole 71. The first spring 76 is provided to facilitate the application of a restoring force to the pressure rod 74.

[0027] In this embodiment: An adjustment device 8 is fixedly installed inside the main body 1. The adjustment device 8 includes a slide rail 81 and a connecting plate 82. The slide rail 81 is fixedly connected inside the main body 1, and the connecting plate 82 is fixedly connected to the side of the placement frame 4. The connecting plate 82 is slidably connected inside the slide rail 81. An adjustment groove 83 is opened inside the slide rail 81. A moving hole 84 is opened inside the connecting plate 82. A retaining ball 85 is slidably connected inside the moving hole 84. One end of the retaining ball 85 is engaged with the inside of the adjustment groove 83. A stop block 86 is fixedly connected to the end of the retaining ball 85 away from the adjustment groove 83. A second spring 87 is fixedly connected to the surface of the retaining ball 85. The end of the second spring 87 away from the retaining ball 85 is fixedly connected to the inside of the moving hole 84. A stop rod 88 is slidably connected inside the moving hole 84. A limit block 89 is fixedly connected to the outer surface of the placement frame 4. The stop rod 88 is slidably connected inside the limit block 89. A sliding rod 810 is fixedly connected to the surface of the placement frame 4. The stop rod 88 is slidably connected to the surface of the sliding rod 810.

[0028] In this embodiment, by setting the locking ball 85, the connecting plate 82 and the slide rail 81 can be fixed inside, reducing the difficulty of fixing the placement frame 4 inside the main body 1 when the equipment is in use.

[0029] Specifically, a fixing block 811 is fixedly connected to the end of the slide bar 810 away from the placement frame 4, and a third spring 812 is sleeved and connected to the surface of the slide bar 810. The slide bar 810 is set to facilitate the limiting of the stop bar 88.

[0030] Specifically, one end of the third spring 812 is fixedly connected to the surface of the fixed block 811, and the other end of the third spring 812 away from the fixed block 811 is fixedly connected to the surface of the abutment 88. The third spring 812 is provided to facilitate the application of a restoring force to the abutment 88.

[0031] Working principle: When using the equipment, the user first applies the adhesive to the upper surface of the carrier plate 6, then attaches the sample to be tested to the upper surface of the carrier plate 6. After ensuring a tight connection between the sample and the carrier plate 6, the carrier plate 6 is placed on the upper surface of the placement stage 5. The placement frame 4 is then attached to the main body 1. The scanning electron microscope 3 on the main body 1 is then activated to test the sample on the surface of the carrier plate 6. Inside the placement frame 4, the placement stage 5 is adjusted by the guide mover inside the placement frame 4, moving left and right. When the equipment places the carrier plate 6 onto the upper surface of the placement stage 5, the user presses the pressure rod 74, causing the first spring 76 to deform and generate elastic force. The pressure rod 74 then moves, driving the limit rod 7. 5. After the plate 6 is disengaged from the connecting groove 72, it is then engaged with the connecting groove 72 on the upper surface of the placement platform 5. The restraint of the pressure rod 74 is released, and the first spring 76 moves the pressure rod 74 and the limiting rod 75 to the inside of the limiting groove 73 to limit the plate 6. By setting the replacement device 7, the plate 6 is effectively limited, which stabilizes the plate 6. This reduces the need for tools to replace the plate 6, which is usually fixed to the surface of the placement platform 5 with bolts. The use of tools is too cumbersome and results in low replacement efficiency for users. This replacement device 7 enables quick replacement of the plate 6 and improves the user's replacement efficiency.

[0032] When the device is assembled with the placement frame 4 inside the main body 1, the user pulls the abutment rod 88 to move it on the surface of the slide rod 810. When the abutment rod 88 moves, it compresses the third spring 812 to generate elastic force. Then the abutment rod 88 moves away from the surface of the abutment block 86, and the abutment block 86 is unrestrained and moves. When the placement frame 4 moves and the connecting plate 82 moves inside the slide rail 81, the abutment ball 85 displaces and deforms the second spring 87 to generate elastic force to limit the placement frame 4. By setting the adjustment device 8, the position of the placement frame 4 is effectively limited, which reduces the difficulty of fixing the placement frame 4 inside the main body 1 during the use of existing equipment. This prevents the main body 1 from being subjected to external force during the test, which can easily cause the placement frame 4 to move and affect the accuracy of the test. This adjustment device 8 stabilizes the placement frame 4, facilitates the limiting and fixing of the placement frame 4 inside the main body 1, and improves the accuracy of the test.

[0033] The above-disclosed embodiments are merely one or more preferred embodiments of this application and should not be construed as limiting the scope of this application. Those skilled in the art can understand that all or part of the processes for implementing the above embodiments and equivalent changes made in accordance with the claims of this application still fall within the scope of this application.

Claims

1. A sample stage support structure for a scanning electron microscope, comprising a main body (1), a cover plate (2), a scanning electron microscope (3), a placement frame (4), a placement stage (5), a sample carrier plate (6), and a replacement device (7), characterized in that: The cover plate (2) is rotatably connected to the surface of the main body (1), the scanning electron microscope (3) is fixedly connected to the upper surface of the main body (1), the placement frame (4) is slidably connected to the interior of the main body (1), the placement stage (5) is installed inside the placement frame (4), and the carrier plate (6) is installed on the upper surface of the placement stage (5). The replacement device (7) is installed inside the placement platform (5). The replacement device (7) includes a pressing hole (71) and a connecting groove (72). The pressing hole (71) is opened inside the placement platform (5). The connecting groove (72) is opened on the upper surface of the placement platform (5). The carrying plate (6) is inserted and connected to the inside of the connecting groove (72). The side of the carrying plate (6) has a limiting groove (73).

2. The sample stage support structure for a scanning electron microscope according to claim 1, characterized in that: A pressure rod (74) is slidably connected inside the pressure hole (71), and a limit rod (75) is fixedly connected inside the pressure rod (74).

3. The sample stage support structure for a scanning electron microscope according to claim 2, characterized in that: The limiting rod (75) is inserted into the limiting groove (73).

4. The sample stage support structure for a scanning electron microscope according to claim 3, characterized in that: The end of the pressure rod (74) away from the limiting rod (75) is fixedly connected to a first spring (76), and the end of the first spring (76) away from the pressure rod (74) is fixedly connected to the inside of the pressure hole (71).

5. A sample stage support structure for a scanning electron microscope according to claim 1, characterized in that: An adjustment device (8) is fixedly installed inside the main body (1). The adjustment device (8) includes a slide rail (81) and a connecting plate (82). The slide rail (81) is fixedly connected inside the main body (1), and the connecting plate (82) is fixedly connected to the side of the placement frame (4). The connecting plate (82) is slidably connected inside the slide rail (81). An adjustment groove (83) is provided inside the slide rail (81), and a moving hole (84) is provided inside the connecting plate (82). A retaining ball (85) is slidably connected inside the moving hole (84), and one end of the retaining ball (85) engages with the inside of the adjustment groove (83). The end of the ball (85) away from the adjustment groove (83) is fixedly connected to a stop block (86). The surface of the ball (85) is fixedly connected to a second spring (87). The end of the second spring (87) away from the ball (85) is fixedly connected to the inside of the moving hole (84). The inside of the moving hole (84) is slidably connected to a stop rod (88). The outer surface of the placement frame (4) is fixedly connected to a limit block (89). The stop rod (88) is slidably connected inside the limit block (89). The surface of the placement frame (4) is fixedly connected to a slide rod (810). The stop rod (88) is slidably connected to the surface of the slide rod (810).

6. A sample stage support structure for a scanning electron microscope according to claim 5, characterized in that: The end of the slide rod (810) away from the placement frame (4) is fixedly connected to a fixing block (811), and a third spring (812) is sleeved and connected to the surface of the slide rod (810).

7. A sample stage support structure for a scanning electron microscope according to claim 6, characterized in that: One end of the third spring (812) is fixedly connected to the surface of the fixing block (811), and the other end of the third spring (812) away from the fixing block (811) is fixedly connected to the surface of the abutment (88).

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