High-precision temperature-controlled quartz heating plate

Abstract

This utility model relates to the field of quartz heating plate technology, specifically disclosing a high-precision temperature-controlled quartz heating plate, comprising: a support bar, a quartz heat insulation plate connected to the top of the support bar, a quartz heating plate disposed inside the quartz heat insulation plate, three vacuum pipes fixedly connected inside the quartz heating plate, tungsten wire heating wires disposed inside the vacuum pipes, and a connecting electrode fixedly connected to the end of the tungsten wire heating wires, a receiving groove opened inside the quartz heat insulation plate, and the quartz heating plate located inside the receiving groove, and three sets of through holes opened at the bottom of the quartz heat insulation plate, with the surface of the connecting electrode penetrating through the interior of the through holes; this utility model, through the combined use of the quartz heating plate, quartz heat insulation plate, vacuum pipes, tungsten wire heating wires, support bar, pressing bar, compression spring, and plug-in rod, solves the problems of uneven temperature, organic contamination interference, and poor spatial adaptability in existing silicon wafer heating technology, significantly improving the heating precision of silicon wafers.

Description

Technical Field

[0001] This utility model belongs to the technical field of quartz heating plates, specifically relating to a high-precision temperature-controlled quartz heating plate. Background Technology

[0002] The silicon wafer production and storage environment contains a large amount of organic matter, which will deposit on the surface and cause various problems, affecting the yield. It is necessary to monitor organic pollutants and their sources. Existing stainless steel silicon wafer heating tubes will adsorb organic matter, and cutting heating is limited. Currently, sealed quartz chambers use multiple quartz infrared heating tubes for overall heating, which is troublesome to install and maintain, and difficult to control temperature uniformity. Utility Model Content

[0003] The purpose of this invention is to provide a high-precision temperature-controlled quartz heating plate to solve the problems mentioned in the background art.

[0004] To achieve the above objectives, this utility model provides the following technical solution:

[0005] A high-precision temperature-controlled quartz heating plate includes: a support bar, a quartz heat insulation plate connected to the top of the support bar, a quartz heating plate disposed inside the quartz heat insulation plate, three vacuum pipes fixedly connected inside the quartz heating plate, tungsten filament heating wires disposed inside the vacuum pipes, and a wiring electrode fixedly connected to the end of the tungsten filament heating wires, a receiving groove formed inside the quartz heat insulation plate, the quartz heating plate located inside the receiving groove, and three sets of through holes formed at the bottom of the quartz heat insulation plate, with the surface of the wiring electrode penetrating through the interior of the through holes.

[0006] Preferably, support rods are fixedly connected to both sides of the top of the support bar, and a horizontal bar is fixedly connected to the top of the support rod.

[0007] Preferably, the inside of the horizontal bar is provided with a horizontal groove, and a guide rod is fixedly connected to the inner side wall of the horizontal groove. The surface of the guide rod slides and is sleeved with two pressing strips.

[0008] Preferably, both sides of the guide rod surface are fixedly connected to a blocking disc, a compression spring is fixedly connected to one side of the blocking disc, and the end of the compression spring away from the blocking disc is fixedly connected to one side of the pressing strip.

[0009] Preferably, sliding grooves are provided on both sides of the bottom of the quartz heat insulation plate, and the support bar slides inside the sliding grooves.

[0010] Preferably, two sets of positioning blocks are fixedly connected to both sides of the bottom of the quartz heat insulation plate, and positioning holes are opened inside the positioning blocks.

[0011] Preferably, a plug rod is fixedly connected to one side of the pressing strip, and the surface of the plug rod penetrates the interior of the positioning hole.

[0012] Compared with the prior art, the beneficial effects of this utility model are:

[0013] (1) By using tungsten wire heating wires of different powers in three vacuum pipes, combined with a power regulator, independent temperature control is achieved in each zone to meet the heating needs of 6-inch, 8-inch, and 12-inch silicon wafers. Temperature uniformity is significantly improved, avoiding the problem of reduced silicon wafer yield caused by local overheating or underheating. The tungsten wire heating wires in the vacuum pipes are wrapped in a vacuum environment, reducing heat convection loss, improving thermal efficiency, and reducing energy consumption. The transparent quartz heating plate and the opaque quartz heat insulation plate are integrally formed, and infrared energy is only radiated upwards, avoiding loss to the bottom and sides, further enhancing temperature uniformity.

[0014] (2) Quartz material does not adsorb organic matter, avoiding the problem of adsorption of organic pollutants on the surface of silicon wafers by traditional stainless steel heating tubes, ensuring the accuracy of organic matter detection data during heating, providing reliable support for improving silicon wafer yield and tracing pollutants, and reducing air flow in the overall structure, reducing the risk of external organic matter volatilization and deposition, and maintaining a clean heating environment.

[0015] (3) When moving the quartz heating plate, the entire device is moved by the horizontal bar to avoid direct contact with the high-temperature quartz heating plate, reduce the risk of burns, and improve operational safety. Through the design of sliding groove, positioning block and plug rod, the support bar can be extended and adjusted, and the distance between the horizontal bar and the quartz heating plate can be flexibly changed to adapt to different spatial environments, reduce the space occupied by the equipment, and the adjustment method is simple and convenient for staff to operate. Attached Figure Description

[0016] Figure 1 This is a perspective view of the present utility model;

[0017] Figure 2 This is a perspective view of the transverse groove of this utility model;

[0018] Figure 3 This is a perspective view of the receiving groove of this utility model;

[0019] Figure 4 This is a cross-sectional view of the positioning block of this utility model;

[0020] Figure 5 This is a cross-sectional view of the vacuum pipe of this utility model;

[0021] In the diagram: 1. Support bar; 2. Quartz heat insulation plate; 3. Quartz heating plate; 4. Vacuum pipe; 5. Tungsten wire heating wire; 6. Connecting electrode; 7. Receiving groove; 8. Through hole; 9. Support rod; 10. Horizontal bar; 11. Horizontal groove; 12. Guide rod; 13. Pressing bar; 14. Blocking plate; 15. Compression spring; 16. Sliding groove; 17. Positioning block; 18. Insertion rod. Detailed Implementation

[0022] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0023] Example 1:

[0024] Please see Figures 1 to 5 As shown, a high-precision temperature-controlled quartz heating plate includes a support bar 1, a quartz heat insulation plate 2 connected to the top of the support bar 1, a quartz heating plate 3 disposed inside the quartz heat insulation plate 2, three vacuum pipes 4 fixedly connected inside the quartz heating plate 3, tungsten wire heating wires 5 disposed inside the vacuum pipes 4, and a wiring electrode 6 fixedly connected to the end of the tungsten wire heating wires 5, a receiving groove 7 opened inside the quartz heat insulation plate 2, and the quartz heating plate 3 located inside the receiving groove 7, and three sets of through holes 8 opened at the bottom of the quartz heat insulation plate 2, with the surface of the wiring electrode 6 penetrating through the interior of the through holes 8.

[0025] The support bar 1 provides a certain support for the whole device during use. The quartz heat insulation plate 2 is made of opaque quartz material, and the quartz heating plate 3 is made of transparent quartz material. The quartz heating plate 3 and the quartz heat insulation plate 2 are an integral structure. The quartz heating plate 3 has a diameter of 250mm and a thickness of 6mm. The vacuum pipe 4 has an inner diameter of 3mm.

[0026] The diameters of the three vacuum tubes 4 are 215mm-225mm, 143mm-153mm, and 40mm-50mm, respectively. The inner tungsten wire heating wire 5 has a power of 300-600W, the middle tungsten wire heating wire 5 has a power of 3000-4000W, and the outer tungsten wire heating wire 5 has a power of 800-1200W. The power of the three tungsten wire heating wires 5 is adjusted by three power regulators (not shown in the diagram, as this is existing technology and will not be described in detail). When heating 6-inch, 8-inch, and 12-inch silicon wafers, the temperature uniformity is optimal. The receiving groove 7 facilitates the placement of the quartz heating plate 3, and the through hole 8 facilitates the passage of electrodes. The quartz heat insulation plate 2 has an outer diameter of 270mm, an inner diameter of 251mm, a bottom thickness of 6mm, and a recess depth of 6mm. During the heating process, the quartz heat insulation plate 2 prevents infrared energy from radiating downwards and to the sides, allowing it to radiate only upwards.

[0027] Support rods 9 are fixedly connected to both sides of the top of support bar 1, and a horizontal bar 10 is fixedly connected to the top of support rod 9.

[0028] The inside of the horizontal bar 10 is provided with a horizontal groove 11, and a guide rod 12 is fixedly connected to the inner side wall of the horizontal groove 11. The surface of the guide rod 12 slides and is sleeved with two pressing strips 13.

[0029] The support rod 9 is provided to fix the horizontal bar 10. The horizontal bar 10 is provided to open the horizontal groove 11. The opening of the horizontal groove 11 allows the guide rod 12 to be fixed on its inner side wall. The guide rod 12 is provided to allow the pressing strip 13 to slide and be sleeved on its surface.

[0030] Both sides of the guide rod 12 are fixedly connected to a blocking disc 14. A compression spring 15 is fixedly connected to one side of the blocking disc 14, and the end of the compression spring 15 away from the blocking disc 14 is fixedly connected to one side of the pressing strip 13.

[0031] The blocking disc 14 allows the compression spring 15 to be installed and fixed. When the pressing bar 13 is pressed, it presses one end of the compression spring 15 to compress it, and the blocking disc 14 acts as a block for the other end.

[0032] The bottom of the quartz heat insulation plate 2 has sliding grooves 16 on both sides, and the support bar 1 slides inside the sliding grooves 16.

[0033] The opening of the sliding groove 16 allows the support bar 1 to slide inside it, thereby adjusting the distance between the crossbar 10 and the quartz heating plate 3.

[0034] Two sets of positioning blocks 17 are fixedly connected to both sides of the bottom of the quartz heat insulation plate 2, and positioning holes are opened inside the positioning blocks 17.

[0035] A plug rod 18 is fixedly connected to one side of the pressing strip 13, and the surface of the plug rod 18 penetrates the interior of the positioning hole.

[0036] The positioning block 17 allows the positioning hole to be opened, and the surface of the insertion rod 18 penetrates the interior of the positioning hole, thereby fixing the support bar 1 in the position of the positioning block 17. There are two sets of positioning blocks 17, four in each set, located on both sides of the bottom of the quartz heat insulation plate 2. There are four support bars 1, two in a set. Each time the support bar 1 moves, it moves into the two positioning blocks 17 at the same axial position. When the support bar 1 drives the insertion rod 18 to insert into the interior of the two sets of positioning blocks 17 that are far apart, the support bar 1 is in an extended state. When the insertion rod 18 is inserted into the position where the two sets of positioning blocks 17 are close to each other, the support bar 1 is in a retracted state, reducing the space occupied.

[0037] The working principle of this utility model is as follows: The operator places the entire device in a suitable position, then places the object to be heated on the quartz heating plate 3. By adjusting the power regulator, the operator can control the power of the tungsten filament heating wire 5 to precisely control the temperature of the object. After heating, the operator directly holds the two horizontal bars 10 with both hands and moves the entire device to a suitable position, avoiding accidental burns to the hands if the operator accidentally touches the quartz heating plate 3 while lifting the quartz heat shield 2. If space is limited during use, the operator can push the two pressing bars 13 inside the horizontal bars 10 towards each other, thus compressing the spring. When the spring 15 is compressed, the pressing bar 13 causes the insertion rod 18 to disengage from the positioning hole inside the positioning block 17 at the current position. At this time, the operator slides the support bar 1 through the sliding groove 16 to make it slide to the opposite position. When the insertion rod 18 moves to the position where the two positioning blocks 17 are close to each other, the operator stops pressing the pressing bar 13. Then the compressed spring 15 returns to its original position. At this time, the pressing bar 13 causes the insertion rod 18 to insert into the positioning hole inside the positioning block 17 at the current position, so that the support bar 1 is fixed and the distance between the horizontal bar 10 and the quartz heat insulation plate 2 is brought closer. This is suitable for situations where the working environment is confined.

[0038] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A high-precision temperature-controlled quartz heating plate, characterized in that, include: A support bar (1) is provided, and a quartz heat insulation plate (2) is connected to the top of the support bar (1). A quartz heating plate (3) is provided inside the quartz heat insulation plate (2). Three vacuum pipes (4) are fixedly connected inside the quartz heating plate (3). A tungsten wire heating wire (5) is provided inside the vacuum pipe (4). A wire electrode (6) is fixedly connected to the end of the tungsten wire heating wire (5). A receiving groove (7) is opened inside the quartz heat insulation plate (2), and the quartz heating plate (3) is located inside the receiving groove (7). Three sets of through holes (8) are opened at the bottom of the quartz heat insulation plate (2), and the surface of the wire electrode (6) penetrates through the inside of the through holes (8).

2. The high-precision temperature-controlled quartz heating plate according to claim 1, characterized in that: Support rods (9) are fixedly connected to both sides of the top of the support bar (1), and a horizontal bar (10) is fixedly connected to the top of the support rod (9).

3. The high-precision temperature-controlled quartz heating disc according to claim 2, characterized in that: The inside of the horizontal bar (10) is provided with a horizontal groove (11), and a guide rod (12) is fixedly connected to the inner side wall of the horizontal groove (11). The surface of the guide rod (12) slides and is sleeved with two pressing strips (13).

4. The high-precision temperature-controlled quartz heating disc according to claim 3, characterized in that: Both sides of the guide rod (12) are fixedly connected to a blocking disc (14), and a compression spring (15) is fixedly connected to one side of the blocking disc (14). The end of the compression spring (15) away from the blocking disc (14) is fixedly connected to one side of the pressing strip (13).

5. The high-precision temperature-controlled quartz heating disc according to claim 1, characterized in that: The bottom of the quartz heat insulation plate (2) is provided with sliding grooves (16) on both sides, and the support bar (1) slides inside the sliding grooves (16).

6. The high-precision temperature-controlled quartz heating disc according to claim 3, characterized in that: Two sets of positioning blocks (17) are fixedly connected to both sides of the bottom of the quartz heat insulation plate (2), and positioning holes are opened inside the positioning blocks (17).

7. The high-precision temperature-controlled quartz heating disc according to claim 6, characterized in that: A plug rod (18) is fixedly connected to one side of the pressing strip (13), and the surface of the plug rod (18) penetrates the interior of the positioning hole.

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