Electrostatic eliminator for vacuum coating machine

Abstract

This utility model discloses an antistatic device for a vacuum coating machine, comprising: a main body, a shell, partitions, an output port, an air pipe, an air pump, and a plasma antistatic device; the main body has a shell at its lower part, and the shell is a rectangular cavity structure; two partitions are arranged inside the shell, one partition has an opening at the top of the shell on one side, and the plasma antistatic device is arranged in the shell between the two partitions; the other partition has evenly spaced output ports, and an output port is arranged on one side of the shell; an air pipe is connected to the shell on both sides of one partition, and an air pump is installed in the air pipe. The plasma antistatic device is installed on the vacuum coating machine for antistatic operation.

Description

Technical Field

[0001] This utility model relates to the field of static electricity elimination technology, specifically to a static electricity elimination device for a vacuum coating machine. Background Technology

[0002] Vacuum coating machines mainly refer to coating processes that require high vacuum levels. They encompass many types, including vacuum resistance heating evaporation, electron gun heating evaporation, magnetron sputtering, MBE (molecular beam epitaxy), PLD (laser-assisted deposition), and ion beam sputtering. They are primarily divided into evaporation and sputtering.

[0003] Static electricity during vacuum coating can affect the coating effect of thin films, potentially causing them to stick together and become difficult to separate. Therefore, static electricity elimination is necessary during coating; hence, this paper provides a static electricity elimination device for a vacuum coating machine. Utility Model Content

[0004] To address the above problems, the purpose of this utility model is to provide an antistatic device for a vacuum coating machine.

[0005] To solve the above-mentioned technical problems, the present invention adopts the following technical solution:

[0006] An antistatic device for a vacuum coating machine includes: a main body, a housing, a partition, an output port, an air pipe, an air pump, and a plasma antistatic device;

[0007] The lower part of the main body is provided with a shell, which is a rectangular cavity structure.

[0008] The housing has two partitions inside. One partition has an opening on the upper part of the housing. A plasma static eliminator is installed inside the housing between the two partitions. The other partition has evenly spaced output ports. An output hole is provided on one side of the housing.

[0009] An air pipe is connected to the shell on both sides of a partition, and an air pump is installed in the air pipe.

[0010] Furthermore: an inclined plate is provided on one side of the housing of the partition, and multiple filter screens are provided on the housing below the inclined plate.

[0011] Furthermore: a second air rod is provided on the housing on one side of the filter screen plate, the second air rod is connected to the second reciprocating air pump, and a scraper is provided on the second air rod.

[0012] Furthermore: the lower part of the housing on one side of the filter screen has multiple outlets, and the housing at the outlet is rotatably connected with a buckle, which is rotatably connected to and fixes the collection trough.

[0013] Furthermore: a drive shaft is provided in the middle of the main body, and the drive shaft is driven by a motor;

[0014] A first fixed post is provided on one drive shaft, and a second fixed post is provided on the other drive shaft; a slot is provided on the outer wall of the first fixed post, and a driving ring is provided on the slot.

[0015] Furthermore, the outer diameters of the driving ring and the second fixed column are the same, and both the driving ring and the second fixed column are provided with fixed rings.

[0016] Furthermore: the driving ring is connected to the first air rod, and the first air rod is connected to the first reciprocating air pump.

[0017] Furthermore, the main body is provided with multiple guide rollers.

[0018] Compared with the prior art, the present invention has at least one of the following beneficial effects:

[0019] (1) Install a plasma static eliminator on the vacuum coating machine for static elimination operation of the vacuum coating machine.

[0020] (2) The film roll is a hollow roll. One end of the film roll is fixed to the second fixed post and close to the fixed ring. The first reciprocating air pump drives the first air rod to move. The first air rod drives the driving ring to move. The driving ring moves in the groove on the outer wall of the first fixed post, which facilitates the movement of the driving ring. The driving ring is a circular annular plate with open ends. The outer diameter of the driving ring and the second fixed post are the same, which facilitates the placement of the film roll at the outer wall of the driving ring and the second fixed post. The fixed ring is designed to fix both sides of the film roll. After the film is coated, the film needs to be wound up. Multiple guide rollers are provided on the main body to guide the film to be wound onto the film roll. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of the structure of this utility model.

[0022] Figure 2 This is a side view of the housing of this utility model.

[0023] Figure 3 This is a top view of the casing of this utility model.

[0024] In the diagram: 1-Main body, 2-Guide roller, 3-Drive shaft, 4-Motor, 5-Second fixed column, 6-Slot, 7-Drive ring, 8-Fixing ring, 9-First air rod, 10-First reciprocating air pump, 11-Housing shell, 12-Partition plate, 13-Inclined plate, 14-Filter screen plate, 15-Second reciprocating air pump, 16-Scraper, 17-Output hole, 18-Snap fastener, 19-Collection tank, 20-Air pipe, 21-Air pump, 22-First fixed column, 23-Second air rod, 24-Plasma static eliminator. Detailed Implementation

[0025] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model.

[0026] An antistatic device for a vacuum coating machine includes: a main body 1, a guide roller 2, a drive shaft 3, a motor 4, a second fixed column 5, a slot 6, a driving ring 7, a fixed ring 8, a first air rod 9, a first reciprocating air pump 10, a housing 11, a partition 12, an inclined plate 13, a filter screen 14, a second reciprocating air pump 15, a scraper 16, an output hole 17, a buckle 18, a collection tank 19, an air pipe 20, an air pump 21, a first fixed column 22, a second air rod 23, and a plasma antistatic device 24.

[0027] The main body 1 is provided with multiple guide rollers 2, and the main body 1 is provided with a drive shaft 3 in the middle. The drive shaft 3 is driven by a motor 4. A first fixed column 22 is provided on one drive shaft 3, and a second fixed column 5 is provided on the other drive shaft 3. A slot 6 is provided on the outer wall of the first fixed column 22, and a driving ring 7 is provided on the slot 6. The outer diameter of the driving ring 7 and the second fixed column 5 are the same, and both the driving ring 7 and the second fixed column 5 are provided with fixed rings 8. The driving ring 7 is connected to the first air rod 9, and the first air rod 9 is connected to the first reciprocating air pump 10.

[0028] The lower part of the main body 1 is provided with a shell 11, which is a rectangular cavity structure. Two partitions 12 are provided inside the shell 11. The upper part of the shell 11 on one side of one partition 12 is open. An inclined plate 13 is provided on the shell 11 on one side of the partition 12. Multiple filter screens 14 are provided on the shell 11 below the inclined plate 13. A second air rod 23 is provided on the shell 11 on one side of the filter screen 14. The second air rod 23 is connected to a second reciprocating air pump 15. A scraper 16 is provided on the second air rod 23. A plasma static elimination device 24 is provided in the shell 11 between the two partitions 12. The partition 12 on the other side has evenly opened output ports. An output hole 17 is provided on one side of the shell 11.

[0029] Multiple outlets are provided at the lower part of the housing 11 on one side of the filter screen 14. The housing 11 at the outlet is rotatably connected to a buckle 18, which fixes the collection tank 19 after being rotatably connected.

[0030] An air pipe 20 is provided on the housing 11 on both sides of a partition 12, and an air pump 21 is provided on the air pipe 20.

[0031] Working process: The film core is a hollow roll. One end of the film core is fixed to the second fixed post 5 near the fixed ring 8. The first reciprocating air pump 10 drives the first air rod 9 to move. The first air rod 9 drives the driving ring 7 to move. The driving ring 7 moves in the slot 6 on the outer wall of the first fixed post 22, which facilitates the movement of the driving ring 7. The driving ring 7 is a circular plate with open ends. The outer diameter of the driving ring 7 and the second fixed post 5 are the same, which facilitates the placement of the film core on the outer wall of the driving ring 7 and the second fixed post 5. The fixed ring 8 is set to facilitate the fixation of both sides of the film core. After the film is coated, the film needs to be wound up. Multiple guide rollers 2 set on the main body 1 facilitate the guidance of the film to be rolled onto the film core.

[0032] During vacuum coating, dust or other substances can affect the thin film. An opening is provided on the upper part of the housing 11 on one side of a partition 12, allowing airflow to enter the housing 11. Multiple filter screens 14 are provided on the housing 11 below the inclined plate 13, with the mesh size of the filter screen 14 at the airflow inlet being larger than that at the airflow outlet. This filtration removes some large particles. The gas then enters the housing 11 between the two partitions 12 through the air pipe 20. The air pump 21 provides power. The gas then passes through a plasma static eliminator 24 for static elimination. After static elimination, the gas is discharged through the outlet of the partition 12 on the other side and the outlet hole 17 of the housing 11. Static elimination facilitates vacuum coating.

[0033] When the filter screen 14 is in use, dust and other particles adhere to it. The second air rod 23 of the second reciprocating air pump 15 moves, driving the scraper 16 to move, which facilitates the scraping of dust and other particles from the filter screen 14. The buckle 18 is rotatably connected to the housing 11, and the buckle 18 fixes the collection tank 19 to the lower part of the housing 11. When a certain amount is collected, the buckle 18 rotates, making it easy to remove the collection tank 19.

[0034] Although the present invention has been described herein with reference to several illustrative embodiments, it should be understood that many other modifications and implementations can be devised by those skilled in the art, which will fall within the scope and spirit of the principles disclosed herein. More specifically, various variations and modifications can be made to the components and / or layout of the subject matter combination within the scope of the disclosure, drawings, and claims. Besides variations and modifications to the components and / or layout, other uses will be apparent to those skilled in the art.

Claims

1. A device for removing static electricity from a vacuum coating machine, characterized in that: include: The main body (1), shell (11), partition (12), output hole (17), air pipe (20), air pump (21), and plasma static elimination device (24) are provided. The lower part of the main body (1) is provided with shell (11), which is a rectangular cavity structure. Two partitions (12) are provided inside the shell (11). One partition (12) has an opening on the upper part of the shell (11) on one side. The plasma static elimination device (24) is provided inside the shell (11) between the two partitions (12). The other partition (12) has an evenly distributed output port. An output hole (17) is provided on one side of the shell (11). The shell (11) on both sides of one partition (12) is connected by an air pipe (20), and the air pipe (20) is provided with an air pump (21).

2. The device according to claim 1, wherein: An inclined plate (13) is provided on one side of the housing (11) of the partition (12), and multiple filter screens (14) are provided on the housing (11) below the inclined plate (13).

3. The device according to claim 2, wherein the device is characterized by: A second air rod (23) is provided on the housing (11) on one side of the filter screen (14). The second air rod (23) is connected to the second reciprocating air pump (15). A scraper (16) is provided on the second air rod (23).

4. The device according to claim 2, wherein the device is characterized by: The lower part of the housing (11) on one side of the filter screen (14) has multiple outlets. The housing (11) at the outlet is rotatably connected to a buckle (18), and the buckle (18) is rotatably connected to a fixed collection trough (19).

5. The device according to claim 1, wherein the device is characterized by: The main body (1) has a drive shaft (3) in the middle, which is driven by a motor (4); a first fixed column (22) is provided on one drive shaft (3), and a second fixed column (5) is provided on the other drive shaft (3); a slot (6) is provided on the outer wall of the first fixed column (22), and a driving ring (7) is provided on the slot (6).

6. The device according to claim 5, wherein the device is characterized by: The outer diameters of the driving ring (7) and the second fixed column (5) are the same, and both the driving ring (7) and the second fixed column (5) are provided with a fixed ring (8).

7. The device according to claim 6, wherein the device is characterized by: The driving ring (7) is connected to the first air rod (9), and the first air rod (9) is connected to the first reciprocating air pump (10).

8. The device according to claim 1, wherein the device is characterized by: The main body (1) is provided with multiple guide rollers (2).

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