Display substrate and display device

Abstract

A display substrate is provided, comprising: a substrate; a first electrode layer including a plurality of first electrodes; a pixel defining layer including a plurality of first openings; a support layer including at least one support pillar, the orthographic projection of the support pillar on the substrate being spaced apart from the orthographic projection of the first electrodes on the substrate; and a light-emitting layer including a plurality of light-emitting portions, wherein at least one support pillar is included between at least two adjacent light-emitting portions, wherein at least one first groove is provided on the surface of the substrate facing the pixel defining layer, the orthographic projection of the at least one first groove on the substrate is located between the orthographic projections of the at least two adjacent first openings on the substrate; the orthographic projection of the support pillar on the substrate falls within the orthographic projection of the first groove on the substrate; and the first groove includes a connected groove bottom and groove wall, the groove wall being located on the side of the pixel defining layer away from the support pillar, and a portion of at least one light-emitting portion being located between the support pillar and the groove wall of the first groove.

Description

Technical Field

[0001] This utility model relates to the field of display technology, and in particular to a display substrate and a display device. Background Technology

[0002] Light-emitting diodes (LEDs) can be used in the display field, serving as backlights for display devices or as LED displays. With technological advancements, the resolution of LED display products has gradually increased. As resolution increases, the pixel pitch in LED display products has gradually decreased. In LED display products with small pixel pitches, how to design the structure of the display panel to reduce or even avoid crosstalk between pixels is one of the key issues that display product developers are concerned with.

[0003] The information disclosed in this section is only for understanding the background of the inventive concept of this utility model. Therefore, the above information may include information that does not constitute prior art. Utility Model Content

[0004] In one aspect, a display substrate is provided, the display substrate comprising: a substrate; a first electrode layer located on the substrate, the first electrode layer including a plurality of first electrodes spaced apart; a pixel defining layer located on a side of the first electrode layer away from the substrate, the pixel defining layer including a plurality of first openings spaced apart, the orthographic projection of at least one first opening on the substrate at least partially overlapping the orthographic projection of at least one first electrode on the substrate; a support layer located on a side of the pixel defining layer away from the substrate, the support layer including at least one support pillar, the orthographic projection of the support pillar on the substrate being spaced apart from the orthographic projection of the first electrode on the substrate; and a light-emitting layer located on a side of the pixel defining layer away from the substrate, the light-emitting layer including a plurality of light-emitting portions, the orthographic projection of at least one light-emitting portion on the substrate being spaced apart from the orthographic projection of the first electrode on the substrate at least partially overlapping ... At least one of the first openings overlaps with the orthographic projection portion on the substrate, and at least one of the support pillars is included between at least two adjacent light-emitting portions. At least one first groove is provided on the surface of the substrate facing the pixel defining layer. The substrate includes a first surface away from the pixel defining layer. The first groove is recessed towards the first surface. The orthographic projection of at least one first groove on the substrate is located between the orthographic projections of at least two adjacent first openings on the substrate. The orthographic projection of the support pillar on the substrate falls within the orthographic projection of the first groove on the substrate. The first groove includes a connected groove bottom and groove wall. In a direction parallel to the first surface, the groove wall of the first groove is spaced apart from the adjacent support pillars. A portion of at least one light-emitting portion is located between the support pillar and the groove wall of the first groove.

[0005] According to some exemplary embodiments, the support column includes a first support portion and a second support portion, the second support portion being located on the side of the first support portion away from the substrate, the orthographic projection of the first support portion on the substrate falling within the orthographic projection of the second support portion on the substrate; and at least a portion of the light-emitting portion being located between the first support portion and the groove wall of the first groove.

[0006] According to some exemplary embodiments, the first support portion includes a first side facing the adjacent light-emitting portion, the first side being a concave arc surface.

[0007] According to some exemplary embodiments, at least a portion of the light-emitting portion contacts a first side of at least one of the adjacent first support portions.

[0008] According to some exemplary embodiments, the light-emitting portion includes a first sub-portion, the orthographic projection of the first sub-portion on the substrate coincides with the orthographic projection of the first opening on the substrate, the surface of the first support portion away from the substrate is closer to the first surface than the surface of the first sub-portion of the light-emitting portion away from the substrate; and / or, the surface of the first support portion away from the substrate is further away from the first surface than the surface of the first electrode away from the substrate.

[0009] According to some exemplary embodiments, in at least one of the support columns, the height of the first support portion in a direction perpendicular to the first surface is greater than the height of the second support portion in a direction perpendicular to the first surface.

[0010] According to some exemplary embodiments, a plurality of the first grooves are connected to form a grid-like groove, the orthographic projection of the grid-like groove on the substrate includes a plurality of groove gaps spaced apart, and the orthographic projection of the plurality of the first openings on the substrate falls into the plurality of groove gaps respectively.

[0011] According to some exemplary embodiments, the overlapping portion of the orthographic projection of at least one of the light-emitting portions on the substrate and the orthographic projection of the first groove on the substrate is annular.

[0012] According to some exemplary embodiments, in a direction perpendicular to the first surface, the bottom of at least one of the first grooves is closer to the first surface than the bottom of at least one other first groove.

[0013] According to some exemplary embodiments, in at least two of the support pillars, the height of one support pillar in a direction perpendicular to the first surface is greater than the height of the other support pillar in the same direction, and the two support pillars are flush with the surface of the substrate away from the substrate.

[0014] According to some exemplary embodiments, the height of the second support portion of one of the support columns in the direction perpendicular to the first surface is greater than the height of the second support portion of the other support column in the direction perpendicular to the first surface.

[0015] According to some exemplary embodiments, in at least two support pillars, the height of the first support portion of one support pillar in a direction perpendicular to the first surface is greater than the height of the first support portion of the other support pillar in a direction perpendicular to the first surface, and the first support portions of the two support pillars are flush with the surface of the substrate.

[0016] According to some exemplary embodiments, the plurality of light-emitting portions include a plurality of first light-emitting portions, a plurality of second light-emitting portions, and a plurality of third light-emitting portions; and the maximum distance between the surface of at least one first light-emitting portion away from the substrate and the first surface in a direction perpendicular to the first surface is a first distance, the distance between the surface of at least one support post away from the substrate and the first surface in a direction perpendicular to the first surface is a second distance, the first distance is less than or equal to the second distance, and / or, the maximum distance between the surface of at least one second light-emitting portion away from the substrate and the first surface in a direction perpendicular to the first surface is a third distance, the distance between the surface of at least one support post away from the substrate and the first surface in a direction perpendicular to the first surface is a second distance, the third distance is less than or equal to the second distance.

[0017] According to some exemplary embodiments, the maximum distance between at least one surface of the third light-emitting portion away from the substrate and the first surface in a direction perpendicular to the first surface is a fourth distance, and the fourth distance is greater than or equal to the second distance.

[0018] According to some exemplary embodiments, in at least one of the first grooves, the center of the groove bottom is closer to the first surface than the edge; and / or, in at least one of the first grooves, the edge of the groove bottom is closer to the first surface than the center.

[0019] According to some exemplary embodiments, a plurality of the support pillars are connected in a grid pattern, the support layer includes a plurality of second openings; the display substrate includes a plurality of light-emitting units, each light-emitting unit including a light-emitting portion, a first opening and a second opening; and within a light-emitting unit, the orthographic projection of the first opening on the substrate falls into the orthographic projection of the second opening on the substrate, and the orthographic projection of the first opening on the substrate falls into the orthographic projection of the light-emitting portion on the substrate.

[0020] According to some exemplary embodiments, in one of the light-emitting units, the distance between the edge of the orthographic projection of the first opening on the substrate and the edge of the orthographic projection of the second opening on the substrate along a first direction is equal to the distance along a second direction, and the first direction intersects the second direction.

[0021] According to some exemplary embodiments, in at least two light-emitting units, the distance between the edge of the orthographic projection of the first opening on the substrate and the edge of the orthographic projection of the second opening on the substrate in one light-emitting unit along a first direction is equal to the distance between the edge of the orthographic projection of the first opening on the substrate and the edge of the orthographic projection of the second opening on the substrate in the other light-emitting unit along a first direction.

[0022] According to some exemplary embodiments, in at least two light-emitting units, the distance between the edge of the orthographic projection of the first opening on the substrate and the edge of the orthographic projection of the second opening on the substrate in one light-emitting unit along a first direction is greater than the distance between the edge of the orthographic projection of the first opening on the substrate and the edge of the orthographic projection of the second opening on the substrate in another light-emitting unit along a first direction; and the thickness of the light-emitting portion of one light-emitting unit perpendicular to the first surface is greater than the thickness of the light-emitting portion of the other light-emitting unit perpendicular to the first surface.

[0023] According to some exemplary embodiments, the first electrode includes a first electrode reflective portion and a first electrode body portion located on the side of the first electrode reflective portion away from the substrate, wherein the orthographic projection of the first electrode reflective portion on the substrate falls within the orthographic projection of the first electrode body portion on the substrate; and the groove wall of the first groove is connected to the side of the adjacent first electrode body portion.

[0024] According to some exemplary embodiments, at least one second groove is further provided on the surface of the substrate facing the pixel defining layer. The at least one second groove is located on the side of the at least one first groove away from the substrate and communicates with the first groove. The orthographic projection of the at least one first groove on the substrate falls within the orthographic projection of the at least one second groove on the substrate. The groove wall of the second groove is connected to the side of the adjacent first electrode reflector.

[0025] According to some exemplary embodiments, the depth of the first groove perpendicular to the first surface is greater than the depth of the second groove perpendicular to the first surface.

[0026] In another aspect, a display device is provided, wherein the display substrate described in any of the preceding claims is provided. Attached Figure Description

[0027] Other objects and advantages of the present invention will become apparent from the following description of the invention with reference to the accompanying drawings, and will help to provide a comprehensive understanding of the invention.

[0028] Figure 1A schematic diagram of a mask pattern in the related art is shown.

[0029] Figure 2 A schematic diagram of a vapor deposition principle in related technologies is shown.

[0030] Figure 3 A cross-sectional structural diagram of a display substrate in the related art is shown schematically.

[0031] Figure 4 A schematic plan view of a display substrate according to some embodiments of the present invention is shown.

[0032] Figure 5 The schematic diagram illustrates the display substrate according to some embodiments of the present invention located at... Figure 4 A magnified structural diagram of region C1 in the middle, where, Figure 5 The diagram illustrates the plan view of the support layer and pixel boundary layer located in region C1.

[0033] Figure 6A A schematic cross-sectional structural diagram of a display substrate according to some embodiments of the present invention is shown, wherein, Figure 6A Schematic illustration along Figure 5 Cross-sectional structural diagram taken from the centerline BB'.

[0034] Figure 6B schematically shown Figure 6A A magnified view of the central region C2.

[0035] Figure 7 schematically shown Figure 4 A magnified structural diagram of region C1 in the middle, where, Figure 7 The diagram illustrates a plan view of the first groove, the light-emitting layer, and the pixel-defining layer located within region C1.

[0036] Figure 8A schematically shown Figure 6A A magnified view of the central region C3.

[0037] Figure 8B schematically shown Figure 6A A magnified view of the central region C4.

[0038] Figure 9 A flowchart illustrating a method for preparing a display substrate according to some embodiments of the present invention is shown schematically.

[0039] Figures 10A-10D The diagram schematically illustrates the fabrication process of a display substrate fabrication method according to some embodiments of the present invention.

[0040] Figure 11A schematic cross-sectional structural diagram of a display substrate according to some embodiments of the present invention is shown, wherein, Figure 11 Schematic illustration along Figure 5 Cross-sectional structural diagram taken from the centerline BB'.

[0041] Figure 12 A flowchart illustrating a method for preparing a display substrate according to some embodiments of the present invention is shown schematically.

[0042] Figures 13A-13C The diagram schematically illustrates the fabrication process of a display substrate fabrication method according to some embodiments of the present invention.

[0043] Figure 14 The schematic diagram illustrates the display substrate according to some embodiments of the present invention located at... Figure 4 A magnified structural diagram of region C1 in the middle, where, Figure 14 The diagram illustrates the plan view of the support layer and pixel boundary layer located in region C1.

[0044] Figure 15 The schematic diagram illustrates the display substrate according to some embodiments of the present invention located at... Figure 4 A magnified structural diagram of region C1 in the middle, where, Figure 15 The diagram illustrates the plan view of the support layer and pixel boundary layer located in region C1.

[0045] Figure 16 A schematic plan view of a display device according to some embodiments of the present invention is shown.

[0046] It should be noted that, for clarity, the dimensions of layers, structures, or regions in the drawings used to describe embodiments of the present invention may be enlarged or reduced, i.e., these drawings are not drawn to actual scale. Detailed Implementation

[0047] In the following description, numerous specific details are set forth for illustrative purposes to provide a comprehensive understanding of various exemplary embodiments. However, it will be apparent that various exemplary embodiments may be implemented without these specific details or with one or more equivalent arrangements. In other instances, well-known structures and apparatuses are shown in block diagram form to avoid unnecessarily obscuring the various exemplary embodiments. Furthermore, the various exemplary embodiments may be different, but not necessarily exclusive. For example, specific shapes, configurations, and characteristics of exemplary embodiments may be used or implemented in another exemplary embodiment without departing from the inventive concept.

[0048] In the accompanying drawings, the dimensions and relative dimensions of the elements may be enlarged for clarity and / or descriptive purposes. Thus, the dimensions and relative dimensions of the individual elements are not necessarily limited to those shown in the drawings. When exemplary embodiments can be implemented differently, the specific process sequence may be performed differently than the order described. For example, two consecutively described processes may be performed substantially simultaneously or in the reverse order of description. Furthermore, the same reference numerals denote the same elements.

[0049] When an element is described as being "on" another element, "connected to" another element, or "attached to" another element, the element may be directly on, directly connected to, or directly attached to the other element, or there may be intermediate elements present. However, when an element is described as being "directly on" another element, "directly connected to" another element, or "directly attached to" another element, there are no intermediate elements. Other terms and / or expressions used to describe relationships between elements should be interpreted in a similar manner, such as "between" versus "directly between," "adjacent" versus "directly adjacent," or "on" versus "directly on," etc. Furthermore, the term "connection" can refer to a physical connection, an electrical connection, a communication connection, and / or a fluid connection. Additionally, the X-axis, Y-axis, and Z-axis are not limited to the three axes of a Cartesian coordinate system and can be interpreted in a broader sense. For example, the X-axis, Y-axis, and Z-axis may be perpendicular to each other, or may represent different directions that are not perpendicular to each other. For the purposes of this invention, "at least one of X, Y, and Z" and "at least one selected from the group consisting of X, Y, and Z" can be interpreted as only X, only Y, only Z, or any combination of two or more of X, Y, and Z such as XYZ, XY, YZ, and XZ. As used herein, the term "and / or" includes any and all combinations of one or more of the listed related items.

[0050] It should be understood that although the terms first, second, etc., may be used herein to describe different elements, these elements should not be limited by these terms. These terms are merely used to distinguish one element from another. For example, without departing from the scope of the exemplary embodiments, a first element may be named a second element, and similarly, a second element may be named a first element.

[0051] Figure 1 A schematic diagram of a mask pattern in the related art is shown. Figure 2 A schematic diagram of a vapor deposition principle in related technologies is shown. Figure 3 A cross-sectional structural diagram of a display substrate in the related art is shown schematically.

[0052] To meet the increasingly higher resolution requirements of silicon-based OLED display substrates, fine silicon masks (FSMs) with higher precision are needed for the deposition of the light-emitting layer. (Refer to...) Figure 1 The mask FSM includes a plurality of vapor-deposited openings FSM1 spaced apart. Each vapor-deposited opening FSM1 includes a first sub-opening FSM11 and a plurality of second sub-openings FSM12, wherein the plurality of second sub-openings FSM12 are configured corresponding to one first sub-opening FSM11 and are connected to the first sub-opening FSM11.

[0053] Combined with reference Figure 1 and Figure 2 When using the mask FSM for vapor deposition, the side of the mask FSM with the second sub-aperture FSM12 faces the display substrate PNL, and the side of the mask FSM with the first sub-aperture FSM11 faces the vapor deposition source. During the vapor deposition process, the vapor deposition material first passes through the first sub-aperture FSM11 and then through the second sub-aperture FSM12, and is finally deposited onto the display substrate PNL.

[0054] To mitigate the shadowing effect during vapor deposition, the gap between the mask finial (FSM) and the display substrate matrix (PNL) needs to be minimal, ideally even flush. However, a small gap poses a risk of scratching the already formed film layer on the PNL. To avoid this, support pillars can be placed within the display area of ​​the PNL. These pillars support the mask finial during vapor deposition, effectively preventing contact between the mask finial and the already formed film layer on the PNL, thus avoiding scratches.

[0055] Reference Figure 3The display substrate includes a substrate 100', a first electrode layer 300' on the substrate 100', a pixel defining layer PDL' on the side of the first electrode layer 300' away from the substrate 100', a plurality of support pillars 210' on the side of the pixel defining layer PDL' away from the substrate 100', a hole injection layer HIL' on the side of the first electrode layer 300' away from the substrate 100', a hole transport layer HTL' on the side of the hole injection layer HIL' away from the substrate 100', and a hole transport layer HTL' on the side of the hole transport layer HTL' away from the substrate 100'. The light-emitting layer 410', the electron transport layer ETL' located on the side of the light-emitting layer 410' away from the substrate 100', the electron injection layer EIL' located on the side of the electron transport layer ETL' away from the substrate 100', the second electrode layer 500' located on the side of the electron injection layer EIL' away from the substrate 100', the encapsulation layer TFE' located on the side of the second electrode layer 500' away from the substrate 100', the color filter layer CF' located on the side of the encapsulation layer TFE' away from the substrate 100', and the cover plate CG' located on the side of the color filter layer CF' away from the substrate 100'.

[0056] The applicant found through research that, Figure 3 In the schematic display substrate, the edge thinning area formed by the shadow effect in the light-emitting layer 410' falls into the opening area of ​​the pixel defining layer PDL'. As a result, in the part of the light-emitting layer 410' located within the opening of the pixel defining layer PDL', the thickness at the edge is less than the thickness in the middle. This thickness difference can cause color shift at the edge of the sub-pixel.

[0057] Especially for display substrates with higher PPI, the subpixel size is very small, for example, 5μm-10μm. When the subpixel size is small, the area of ​​the thinned portion of the light-emitting layer located at the inner edge of the opening will increase, for example, exceeding 10%. At this time, the color shift problem at the subpixel edge will be aggravated, thus affecting the brightness uniformity and color uniformity of the display substrate.

[0058] Figure 4 A schematic plan view of a display substrate according to some embodiments of the present invention is shown. Figure 5 The schematic diagram illustrates the display substrate according to some embodiments of the present invention located at... Figure 4 A magnified structural diagram of region C1 in the middle, where, Figure 5 The diagram illustrates the plan view of the support layer and pixel boundary layer located in region C1. Figure 6A A schematic cross-sectional structural diagram of a display substrate according to some embodiments of the present invention is shown, wherein, Figure 6A Schematic illustration along Figure 5 Cross-sectional structural diagram taken from the centerline BB'. Figure 6B schematically shown Figure 6A A magnified view of the central region C2.

[0059] According to some exemplary embodiments, in conjunction with reference to Figure 4 , Figure 5 and Figure 6A The display substrate includes a substrate 100 and a plurality of light-emitting devices 400E disposed on the substrate 100. The plurality of light-emitting devices 400E can be arranged in an array within the display area AA.

[0060] The display substrate may include a first electrode layer 300 disposed on a substrate 100, a pixel defining layer PDL located on the side of the first electrode layer 300 away from the substrate 100, a light emitting layer 410 located on the side of the pixel defining layer PDL away from the substrate 100, and a second electrode layer 500 located on the side of the light emitting layer 410 away from the substrate 100.

[0061] The substrate 100 may include a silicon substrate, which may include a silicon substrate and a driving circuit layer formed on the silicon substrate. The driving circuit layer may include a transistor array structure formed by CMOS process. The transistor array structure includes multiple pixel driving circuits arranged in an array in the display area, and the multiple pixel driving circuits are respectively connected to multiple light-emitting devices. Each pixel driving circuit includes at least two transistors and at least one storage capacitor.

[0062] The first electrode layer 300 may include a plurality of first electrodes 310 spaced apart, each of which is electrically connected to a plurality of pixel driving circuits. Exemplarily, the first electrode layer 300 may include an electrode reflective layer and an electrode body layer located on the side of the electrode reflective layer away from the substrate 100. The material of the electrode reflective layer may include a metallic material with high reflectivity; for example, the material of the electrode reflective layer may include silver or aluminum. The material of the electrode body layer may include indium tin oxide.

[0063] The pixel defining layer (PDL) may include a plurality of spaced-apart first openings KK1, which may include a first pixel opening KK11, a second pixel opening KK12, and a third pixel opening KK13. The orthographic projection of at least one first opening KK1 onto the substrate 100 at least partially overlaps with the orthographic projection of at least one first electrode 310 onto the substrate 100, meaning that at least one first opening KK1 exposes at least a portion of the corresponding first electrode 310. The material of the pixel defining layer (PDL) may include an inorganic insulating material; for example, the material of the pixel defining layer (PDL) may include at least one of silicon oxide, silicon nitride, and silicon oxynitride.

[0064] The light-emitting layer 410 may include a plurality of light-emitting portions 411, which may include a plurality of first light-emitting portions 4111, a plurality of second light-emitting portions 4112, and a plurality of third light-emitting portions 4113. The orthographic projection of the first light-emitting portion 4111 onto the substrate 100 at least partially overlaps with the orthographic projection of the first pixel opening KK11 onto the substrate 100; the orthographic projection of the second light-emitting portion 4112 onto the substrate 100 at least partially overlaps with the orthographic projection of the second pixel opening KK12 onto the substrate 100; and the orthographic projection of the third light-emitting portion 4113 onto the substrate 100 at least partially overlaps with the orthographic projection of the third pixel opening KK13 onto the substrate 100. The first light-emitting portion 4111 may include a blue light-emitting material, the second light-emitting portion 4112 may include a green light-emitting material, and the third light-emitting portion 4113 may include a red light-emitting material. The light-emitting materials of the first light-emitting portion 4111, the second light-emitting portion 4112, and the third light-emitting portion 4113 may be interchanged as needed.

[0065] The second electrode layer 500 is a continuous film layer within the display area, and the orthographic projection of the second electrode layer 500 on the substrate 100 can cover the orthographic projection of the plurality of light-emitting parts 411 on the substrate 100. For example, the first electrode layer 300 can be used to form the anode of the plurality of light-emitting devices 400E, and the second electrode layer 500 can be used to form the cathode of the plurality of light-emitting devices 400E.

[0066] The plurality of light-emitting devices 400E may include a first light-emitting device 401, a second light-emitting device 402, and a third light-emitting device 403. The first light-emitting device 401 may include a first light-emitting portion 4111, a first electrode 310 located on the side of the first light-emitting portion 4111 near the substrate 100, and a portion of a second electrode layer 500 located on the side of the first light-emitting portion 4111 away from the substrate 100. The second light-emitting device 402 may include a second light-emitting portion 4112, a first electrode 310 located on the side of the second light-emitting portion 4112 near the substrate 100, and a portion of a second electrode layer 500 located on the side of the second light-emitting portion 4112 away from the substrate 100. The third light-emitting device 403 may include a third light-emitting portion 4113, a first electrode 310 located on the side of the third light-emitting portion 4113 near the substrate 100, and a portion of a second electrode layer 500 located on the side of the third light-emitting portion 4113 away from the substrate 100.

[0067] The display substrate may further include a first functional layer located between the light-emitting layer 410 and the first electrode layer 300, and a second functional layer 420 located between the light-emitting layer 410 and the second electrode layer 500. The first functional layer may include at least one of a hole transport layer and a hole injection layer, and the second functional layer 420 may include at least one of an electron transport layer and an electron injection layer.

[0068] To illustrate the structure of the light-emitting layer 410 more clearly, Figure 6A In the diagram, only the second functional layer 420 located on the upper side of the light-emitting layer 410 is shown, while the first functional layer located on the lower side of the light-emitting layer 410 is omitted.

[0069] According to some exemplary embodiments, refer to Figure 6A The display substrate may further include a first encapsulation layer TFE1, a color filter layer CF, a second encapsulation layer TFE2, and a cover plate CG. The first encapsulation layer TFE1 may be located on the side of the second electrode layer 500 away from the substrate 100, the color filter layer CF may be located on the side of the first encapsulation layer TFE1 away from the substrate 100, the second encapsulation layer TFE2 may be located on the side of the color filter layer CF away from the substrate 100, and the cover plate CG may be located on the side of the second encapsulation layer TFE2 away from the substrate 100. The color filter layer CF may include a first color filter portion CF1, a second color filter portion CF2, and a third color filter portion CF3. The orthographic projection of the first color filter portion CF1 on the substrate 100 and the orthographic projection of the first light-emitting portion 4111 on the substrate 100 at least partially overlap. The orthographic projection of the second color filter portion CF2 on the substrate 100 and the orthographic projection of the second light-emitting portion 4112 on the substrate 100 at least partially overlap. The orthographic projection of the third color filter portion CF3 on the substrate 100 and the orthographic projection of the third light-emitting portion 4113 on the substrate 100 at least partially overlap.

[0070] Continue to refer to Figure 6A The display substrate also includes a support layer 200, which is located on the side of the pixel defining layer (PDL) away from the substrate 100. The support layer 200 may include at least one support pillar 210. The orthographic projection of the support pillar 210 on the substrate 100 is spaced apart from the orthographic projection of the first electrode 310 on the substrate 100, and at least one support pillar 210 is included between at least two adjacent light-emitting portions 411. The support pillar 210 is used to support the mask used during the vapor deposition process to form the light-emitting layer 410, thereby avoiding the problem of film layer scratches caused by the mask contacting the related film layer formed earlier on the display substrate during the vapor deposition process.

[0071] At least one first groove 110 is formed on the surface of the substrate 100 facing the pixel defining layer PDL. The substrate 100 includes a first surface 100a away from the pixel defining layer PDL. The first groove 110 is partially recessed into the substrate 100 in a direction close to the first surface 100a. The orthographic projection of at least one first groove 110 on the substrate 100 lies between the orthographic projections of two adjacent first openings KK1 on the substrate 100. The orthographic projection of the support post 210 on the substrate 100 falls within the orthographic projection of the first groove 110 on the substrate 100, that is, at least a portion of the support post 210 is located within the first groove 110.

[0072] The first groove 110 may include a connected groove bottom 111 and groove wall 112. In a direction parallel to the first surface 100a, the groove wall 112 is located on the side of the pixel defining layer (PDL) away from the support pillar 210, and the groove wall 112 of the first groove 110 is spaced apart from adjacent support pillars 210. The groove bottom 111 of the first groove 110 is substantially parallel to the first surface 100a of the substrate 100. The included angle formed by the groove bottom 111 and groove wall 112 of the first groove 110 may be an obtuse angle.

[0073] The pixel defining layer (PDL) covers the bottom 111 and the wall 112 of the first groove 110. The PDL may include a second side surface (PDLa), which is located within the first groove 110 and between the wall 112 of the first groove 110 and the adjacent support post 210. The second side surface (PDLa) of the PDL is spaced apart from the adjacent support post 210. At least a portion of at least one light-emitting part (411) located at the edge is located within the first groove 110 and in the spaced area between the second side surface (PDLa) of the PDL and the adjacent support post 210, that is, a portion of at least one light-emitting part (411) is located between the support post 210 and the wall 112 of the first groove 110.

[0074] By providing a first groove 110 on the substrate 100 between adjacent first openings KK1, a portion of the film shape distortion caused by the shading effect of vapor deposition at the edge of the light-emitting part 411 can fall into the first groove 110. This ensures the uniformity of the thickness of the other portion of the light-emitting layer 410 corresponding to the first opening KK1, thereby effectively avoiding color shift problems in the light-emitting device. On the other hand, the provision of the first groove 110 increases the space between the support post 210 and the adjacent first electrode 310 for accommodating the portion of the film shape distortion caused by the shading effect of vapor deposition at the edge of the light-emitting part 411. This narrows the distance between the support post 210 and the adjacent first electrode 310, which is beneficial for further improving the resolution of the display substrate.

[0075] It should be noted that the driving circuit layer in the substrate 100 may include at least one insulating layer, and the first groove 110 may be formed in at least one insulating layer of the substrate 100.

[0076] in addition, Figure 5The diagram schematically illustrates the first opening KK1 at a portion of the light-emitting devices in region C1 and the planar structure of the support column 210, with the openings of each light-emitting device being hexagonal. However, this does not represent a limitation on the embodiment of this utility model. The shape and arrangement of the openings of each light-emitting device can be set to other forms according to actual needs.

[0077] According to some exemplary embodiments, in conjunction with reference to Figure 5 and Figure 6A At least one light-emitting portion 411 may include a first sub-portion 411a and a second sub-portion 411b. The orthographic projection of the first sub-portion 411a of the light-emitting portion 411 on the substrate 100 coincides with the orthographic projection of a corresponding first opening KK1 on the substrate 100. The orthographic projection of the second sub-portion 411b of the light-emitting portion 411 on the substrate 100 surrounds the orthographic projection of the first sub-portion 411a of the light-emitting portion 411 on the substrate 100.

[0078] It should be noted that, in Figure 5 In order to more clearly illustrate the structure of the support column 210 and the first opening KK1, only the first sub-part 411a of the light-emitting part 411 is shown, and the second sub-part 411b of the light-emitting part 411 is omitted.

[0079] In at least one light-emitting portion 411, the first sub-portion 411a has a second surface a1 on the side away from the substrate 100, and the second sub-portion 411b has a third surface b1 on the side away from the substrate 100. In a direction perpendicular to the first surface 100a, the distance between the second surface a1 and the first surface 100a is distance G10, and the distance between the third surface b1 and the first surface 100a is distance G11.

[0080] The spacing G10 of the second surface a1 at different positions can remain the same, thereby ensuring the uniformity of brightness and color of the light-emitting device. It should be noted that due to factors such as the vapor deposition process, the spacing G10 of the second surface a1 at different positions may not be the same. For example, the deviation range of the spacing G10 of the second surface a1 at at least one location from the spacing G10 of the second surface a1 at at least another location is within ±10%. Optionally, the deviation range of the spacing G10 of the second surface a1 at at least one location from the spacing G10 of the second surface a1 at at least another location is within ±5%. The light-emitting portion 411 corresponding to the first sub-portion 411a within the first opening KK1 has good film thickness uniformity, thereby ensuring the uniformity of brightness and color of the light-emitting device.

[0081] The spacing G11 of the third surface b1 can be different at different positions. For example, the spacing G11 gradually decreases along the direction from the first sub-part 411a of the light-emitting part 411 to the second sub-part 411b of the light-emitting part 411. At least a portion of the second sub-part 411b of the light-emitting part 411 is located within the first groove 110 and between the support post 210 and the groove wall 112 of the first groove 110. This helps to reduce the degree of shape distortion of the second electrode layer 500, thereby avoiding display defects caused by shape distortion of the second electrode layer 500.

[0082] According to some exemplary embodiments, refer to Figure 6A The first electrode 310 may include a first electrode reflective portion 311 and a first electrode main body portion 312, with the first electrode main body portion 312 located on the side of the first electrode reflective portion 311 away from the substrate 100. The material of the first electrode reflective portion 311 may include a metallic material with high reflectivity; for example, the material of the first electrode reflective portion 311 may include at least one of silver and aluminum. The material of the first electrode main body portion 312 includes a material with a high work function; for example, the material of the first electrode main body portion 312 may include indium tin oxide. The first electrode reflective portion 311 is used to reflect light emitted from the light-emitting layer 410 to the side away from the substrate 100, thus achieving a top-emitting display mode. The first electrode main body portion 312 is used to generate holes, which are injected and transported to the light-emitting layer 410 and recombine with electrons located in the light-emitting layer 410 to radiate light.

[0083] In at least one first electrode 310, the orthographic projection of the first electrode body portion 312 on the substrate 100 can cover the orthographic projection of the first electrode reflective portion 311 on the substrate 100. The pattern of the first electrode body portion 312 is different from the pattern of the first electrode reflective portion 311. The first electrode body portion 312 and the first electrode reflective portion 311 are structures formed by two patterning processes respectively.

[0084] The first electrode main body 312 can extend from the surface of the first electrode reflective part 311 away from the substrate 100 through the side of the first electrode reflective part 311 to the substrate 100. The first electrode main body 312 covers the side of the first electrode reflective part 311, which can prevent the side of the first electrode reflective part 311 from being exposed and corroded, thereby causing problems such as a decrease in the reflectivity of the first electrode 310.

[0085] According to some exemplary embodiments, in conjunction with reference to Figure 6A and Figure 6BThe first groove 110 can be formed by over-etching the substrate 100 during the etching process to form the first electrode body 312, thus eliminating the need for additional patterning processes. The first groove 110 located between adjacent first openings KK1 is formed in this manner. The groove wall 112 of the first groove 110 is connected to the side surface 312a of the adjacent first electrode body 312. Furthermore, by over-etching the substrate 100, the film layer between two adjacent first electrode bodies 312 is completely removed, preventing short circuits between adjacent first electrodes 310 due to etching residue.

[0086] It should be noted that the side surface 312a of the first electrode body 312 is located on the periphery of the first electrode body 312, in contact with the substrate 100, and at a certain angle to the substrate 100.

[0087] According to some exemplary embodiments, in conjunction with reference to Figure 6A and Figure 6B During the etching process to form the first electrode reflective portion 311, in order to ensure that the film layer between adjacent first electrode reflective portions 311 is completely etched away, the substrate 100 is also over-etched to a certain extent, thereby forming a second groove 120 in the substrate 100. The groove wall 122 of the second groove 120 is connected to the side surface 311a of the adjacent first electrode reflective portion 311. The second groove 120 is located on the side of the first groove 110 away from the first surface 100a, and the second groove 120 is connected to the first groove 110. The orthographic projection of at least one first groove 110 on the substrate 100 falls within the orthographic projection of at least one second groove 120 on the substrate 100.

[0088] According to some exemplary embodiments, in conjunction with reference to Figure 6A and Figure 6B The depth H1 of the first groove 110 perpendicular to the first surface 100a is greater than the depth H2 of the second groove 120 perpendicular to the first surface 100a. By setting the depth H1 of the first groove 110 to be deeper, the first groove 110 has a larger space to accommodate the second sub-part 411b of the light-emitting part 411. While ensuring the uniformity of the thickness of the first sub-part 411a of the light-emitting part 411, the distance between the support post 210 and the adjacent first electrode 310 can be narrowed, which is conducive to further improving the resolution of the display substrate.

[0089] According to some exemplary embodiments, refer to Figure 6AThe support post 210 may include a first support portion 211 and a second support portion 212. The second support portion 212 is located on the side of the first support portion 211 away from the substrate 100. The orthographic projection of the first support portion 211 on the substrate 100 falls on the orthographic projection of the second support portion 212 on the substrate 100. A portion of the second sub-part 411b of at least one light-emitting portion 411 is located between the first support portion 211 and the groove wall 112 of the first groove 110. In a direction parallel to the first surface 100a, the edge of the first support portion 211 is recessed compared to the edge of the second support portion 212, thereby allowing for a larger space between the first support portion 211 and the groove wall 112 of the first groove 110 to accommodate the second sub-part 411b of the light-emitting portion 411. While ensuring the uniformity of the thickness of the first sub-part 411a of the light-emitting portion 411, the distance between the support post 210 and the adjacent first electrode 310 can be narrowed, which is beneficial to further improving the resolution of the display substrate.

[0090] According to some exemplary embodiments, refer to Figure 6A The materials of the first support portion 211 and the second support portion 212 may include organic resin materials. The first support portion 211 and the second support portion 212 may include the same material, or the first support portion 211 and the second support portion 212 may each include different materials.

[0091] According to some exemplary embodiments, in conjunction with reference to Figure 6A and Figure 6B The first support portion 211 may include a first side surface 211a facing the adjacent light-emitting portion 411, and the first side surface 211a may be a concave arc surface. Setting the first side surface 211a of the first support portion 211 as a concave arc surface allows the surfaces of the first support portion 211 near the substrate 100 and away from the substrate 100 to still have relatively large areas. Furthermore, the smooth arc surface of the first side surface 211a allows for more dispersed stress generated under pressure during the support portion's support of the mask, thus improving the support performance of the first support portion 211. On the other hand, it also allows for a larger space between the first support portion 211 and the groove wall 112 of the first groove 110 to accommodate the second sub-part 411b of the light-emitting portion 411. While ensuring the uniformity of the thickness of the first sub-part 411a of the light-emitting portion 411, it can narrow the distance between the support post 210 and the adjacent first electrode 310, thereby further improving the resolution of the display substrate.

[0092] According to some exemplary embodiments, refer to Figure 6AThe orthographic projection of the surface of the first support portion 211 on the substrate 100 near the substrate 100 and the orthographic projection of the surface of the first support portion 211 on the substrate 100 away from the substrate 100 can substantially coincide. The cross-sectional shape of the first support portion 211 in the direction perpendicular to the first surface 100a can be a rectangular shape with concave left and right sides.

[0093] According to some exemplary embodiments, refer to Figure 6A The cross-sectional shape of the second support 212 in the direction perpendicular to the first surface 100a can be rectangular or trapezoidal, etc. Figure 6A The diagram illustrates the case where the shape is trapezoidal.

[0094] According to some exemplary embodiments, refer to Figure 6A The orthographic projection of the surface of the first support portion 211 on the substrate 100 near the substrate 100 falls within the orthographic projection of the surface of the second support portion 212 on the substrate 100 away from the substrate 100.

[0095] According to some exemplary embodiments, in conjunction with reference to Figure 6A and Figure 6B At least one light-emitting portion 411 has a second sub-portion 411b in contact with the first side surface 211a of an adjacent first support portion 211. While ensuring the uniformity of the thickness of the first sub-portion 411a of the light-emitting portion 411, the distance between the first support portion 211 and the adjacent first electrode 310 can be set slightly smaller, allowing the second sub-portion 411b of the light-emitting portion 411 to contact the first side surface 211a of the adjacent support portion, which is beneficial for further improving the resolution of the display substrate.

[0096] According to some exemplary embodiments, refer to Figure 6A The surface of the first support portion 211 away from the substrate 100 is closer to the first surface 100a than the surface of the first sub-part 411a of the light-emitting portion 411 away from the substrate 100. The surface of the first support portion 211 away from the substrate 100 is further away from the first surface 100a than the surface of the first electrode 310 away from the substrate 100. The height of the first support portion 211 can be set between the height of the first electrode 310 and the height of the first sub-part 411a of the light-emitting portion 411, so that there is a large space between the first support portion 211 and the adjacent first electrode 310 to accommodate the second sub-part 411b of the light-emitting portion 411. This also avoids the problem of increased shape distortion of the second electrode layer 500 due to excessively high support pillar 210, which could lead to display defects.

[0097] According to some exemplary embodiments, in conjunction with reference to Figure 6A and Figure 6B In at least one support post 210, the height H3 of the first support portion 211 in the direction perpendicular to the first surface 100a can be set to be greater than the height H4 of the second support portion 212 in the direction perpendicular to the first surface 100a. Setting the height H3 of the recessed first support portion 211 to be slightly larger allows for a larger space between the first support portion 211 and the adjacent first electrode 310 to accommodate the second sub-part 411b of the light-emitting portion 411, thereby narrowing the distance between the first support portion 211 and the adjacent first electrode 310, which is beneficial for further improving the resolution of the display substrate.

[0098] Figure 7 schematically shown Figure 4 A magnified structural diagram of region C1 in the middle, where, Figure 7 The diagram illustrates a plan view of the first groove, the light-emitting layer, and the pixel-defining layer located within region C1.

[0099] According to some exemplary embodiments, in conjunction with reference to Figure 6A and Figure 7 Multiple first grooves 110 are connected to form a grid-like groove. The orthographic projection of the grid-like groove on the substrate 100 includes multiple groove gaps 110x spaced apart. The orthographic projections of multiple first openings KK1 on the substrate 100 respectively fall into the multiple groove gaps 110. x Inside. For at least one first opening KK1, it is continuously surrounded by at least one first groove 110. The orthographic projection of the light-emitting portion 411 above the first opening KK1 onto the substrate 100 overlaps with the orthographic projection of the at least one first groove 110 onto the substrate 100 in a ring shape. That is, a portion of the second sub-part 411b of the light-emitting portion 411 falls into the first groove 110 at each location surrounding the first sub-part 411a. This arrangement helps to further ensure the uniformity of the film thickness of the first sub-part 411a in the light-emitting portion 411.

[0100] According to some exemplary embodiments, refer to Figure 6ADuring the etching of the first electrode body 312 and the over-etching of the substrate 100, due to factors such as the thickness uniformity and etching uniformity of the first electrode body 312, at least two of the formed first grooves 110 may have different depths. That is, the bottom 111 of at least one first groove 110 is closer to the first surface 100a than the bottom 111 of at least another first groove 110, and the depth H5 of at least one first groove 110 in the direction perpendicular to the first surface 100a is greater than the depth H6 of at least another first groove 110 in the direction perpendicular to the first surface 100a.

[0101] Figure 8A schematically shown Figure 6A A magnified view of the central region C3. Figure 8B schematically shown Figure 6A A magnified view of the central region C4.

[0102] According to some exemplary embodiments, in conjunction with reference to Figure 6A , Figure 8A and Figure 8B In order to provide sufficient space for the second sub-part 411b of the light-emitting part 411 to be accommodated in the first groove 110, after the first electrode body 312 is etched, the insulating layer on the substrate 100 is etched to a greater extent to form a plurality of first grooves 110. Among the plurality of first grooves 110 formed, at least one first groove 110 has a depth H5 perpendicular to the first surface 100a that is greater than at least another first groove 110 has a depth H6 perpendicular to the first surface 100a. The etching time of the first grooves 110 with different depths is different, so that the first grooves 110 with different depths can have different cross-sectional structures.

[0103] For example, in conjunction with reference Figure 6A and Figure 8A The first groove 110 has a relatively small depth and a relatively short etching time, so that the center of the groove bottom 111 in the first groove 110 is closer to the first surface 100a than the edge. The groove bottom 111 of the first groove 110 may include an arc surface that protrudes toward the side closer to the first surface 100a.

[0104] For example, in conjunction with reference Figure 6A and Figure 8B The first groove 110 has a relatively large depth and a relatively long etching time, so that the edge of the groove bottom 111 in the first groove 110 is closer to the first surface 100a than the center. The groove bottom 111 of the first groove 110 may include an arc surface that protrudes away from the first surface 100a.

[0105] It should be noted that, in Figure 6AThe schematic display substrate has Figure 8A The schematic cross-sectional structure of the first groove 110 and Figure 8B The first grooves 110 in the schematic cross-sectional structure are arranged adjacently, but this is not intended to limit the embodiments of this utility model. Figure 8A The schematic cross-sectional structure of the first groove 110 and Figure 8B The first groove 110 of the schematic cross-sectional structure can also be set at intervals.

[0106] In addition, in some cases, each of the first recesses 110 in the display substrate may include Figure 8A The schematic cross-sectional structure; in some cases, each of the first recesses 110 in the display substrate may include Figure 8B A schematic cross-sectional structure.

[0107] According to some exemplary embodiments, refer to Figure 6A In order to ensure that the multiple support pillars 210 can provide uniform support force to the mask during the process of vapor deposition to form the light-emitting layer 410, the support height of the multiple support pillars 210 can be kept consistent, that is, the surfaces of at least two support pillars 210 that are furthest from the substrate 100 are flush.

[0108] Because the bottom 111 of at least one first groove 110 is closer to the first surface 100a than the bottom 111 of at least another first groove 110, the two support pillars 210 in these two first grooves 110 have different heights in the direction perpendicular to the first surface 100a in order to ensure that they are flush with the surface away from the substrate 100. In the first groove 110 where the bottom 111 is closer to the first surface 100a, the height H7 of the support pillar 210 is greater, and in the other first groove 110 where the bottom 111 is further away from the first surface 100a, the height H8 of the support pillar 210 is smaller.

[0109] It should be noted that the fabrication process of the support pillar 210 can be controlled so that, among the at least two support pillars 210 in at least two first grooves 110 with different depths, the surface of one support pillar 210 away from the first surface 100a can be flush with the surface of the other support pillar 210 away from the first surface 100a. Due to factors such as fluctuations in the fabrication process of the support pillar 210, the flushness of the surfaces of the at least two support pillars 210 away from the substrate 100 should be understood as the height of the surfaces of the at least two support pillars 210 away from the substrate 100 (the distance between the surface of the support pillar 210 away from the substrate 100 and the first surface 100a) fluctuating within a target height of ±0.1 μm.

[0110] According to some exemplary embodiments, refer to Figure 6AThe height H9 of the second support portion 212 of one support pillar 210 in the direction perpendicular to the first surface 100a can be greater than the height H10 of the second support portion 212 of the other support pillar 210 in the same direction. Similarly, the height of the first support portion 211 of one support pillar 210 in the direction perpendicular to the first surface 100a can be equal to the height of the first support portion 211 of the other support pillar 210 in the same direction. That is, by controlling the fabrication process of the second support portion 212 in the support pillar 210, the height H9 of the second support portion 212 can be greater in a first groove 110 closer to the first surface 100a at the bottom 111, and the height H10 of the second support portion 212 can be smaller in another first groove 110 further away from the first surface 100a at the bottom 111. This allows the surfaces of the two support pillars 210 away from the substrate 100 to remain flush.

[0111] Figure 9 A flowchart illustrating a method for preparing a display substrate according to some embodiments of the present invention is shown schematically. Figures 10A-10D The diagram schematically illustrates the fabrication process of a display substrate fabrication method according to some embodiments of the present invention.

[0112] At least some other embodiments of this utility model provide a method for preparing a display substrate, see below. Figure 9 The preparation method includes the following steps S11-S14.

[0113] In step S11, a first electrode layer is formed on the substrate and a plurality of first grooves are formed in the substrate. The first electrode layer includes a plurality of first electrodes spaced apart, and at least one first groove is located between at least two adjacent first electrodes.

[0114] In step S12, a pixel defining layer is formed on the side of the first electrode layer away from the substrate.

[0115] In step S13, a first support layer is formed on the side of the pixel defining layer away from the substrate, and a second support layer is formed on the side of the first support layer away from the substrate. A polishing process is used to make the surface of the second support layer away from the substrate parallel to the first surface.

[0116] In step S14, a patterning process is performed on the first support layer and the second support layer, so that the first support layer is patterned to include a plurality of first support portions spaced apart, and the second support layer is patterned to include a plurality of second support portions spaced apart.

[0117] The following combination Figures 10A-10D The preparation method of the display substrate of at least some embodiments of the present invention will be described.

[0118] Reference Figure 10A A first electrode layer 300 is formed on a substrate 100. The first electrode layer 300 includes a plurality of first electrodes 310 spaced apart. Each first electrode 310 includes a first electrode reflective portion 311 and a first electrode body portion 312. The first electrode body portion 312 is located on the side of the first electrode reflective portion 311 away from the substrate 100. The orthogonal projection of the first electrode body portion 312 on the substrate 100 can cover the orthogonal projection of the first electrode reflective portion 311 on the substrate 100. During the etching process to form the first electrode body portion 312, the insulating layer on the substrate 100 is over-etched to form a plurality of first grooves 110 located within the substrate 100. At least one first groove 110 is located between at least two adjacent first electrodes 310.

[0119] A pixel defining layer PDL is then formed on the side of the first electrode layer 300 away from the substrate 100. The pixel defining layer PDL includes a plurality of first openings KK1 spaced apart. The orthographic projection of at least one first opening KK1 on the substrate 100 at least partially overlaps with the orthographic projection of at least one first electrode 310 on the substrate 100.

[0120] Reference Figure 10B A first support layer 201 is formed on the side of the pixel defining layer PDL away from the substrate 100, and a second support layer 202 is formed on the side of the first support layer 201 away from the substrate 100. The surfaces of the first support layer 201 and the second support layer 202 away from the substrate 100 both have uneven morphologies.

[0121] Combined with reference Figure 10B and Figure 10C The surface of the second support layer 202 away from the substrate 100 is made parallel to the first surface 100a by a polishing process. For example, the polishing process can be a chemical mechanical polishing process.

[0122] It should be noted that the parallelism between the surface of the second support layer 202 away from the substrate 100 and the first surface 100a should be understood as the height of the surface of the second support layer 202 away from the substrate 100 at various locations (the distance between the surface of the second support layer 202 away from the substrate 100 and the first surface 100a) fluctuating within the range of ±0.1μm of the target height.

[0123] Combined with reference Figure 10C and Figure 10DThe first support layer 201 and the second support layer 202 are patterned such that the first support layer 201 is patterned to include a plurality of spaced-apart first support portions 211, and the second support layer 202 is patterned to include a plurality of spaced-apart second support portions 212. This forms a plurality of support pillars 210, each support portion including a first support portion 211 and a second support portion 212, with the second support portion 212 located on the side of the first support portion 211 away from the substrate 100.

[0124] It should be noted that the example given is that the first opening KK1 is etched first, and then the first support portion 211 and the second support portion 212 are etched. If necessary, the pixel definition layer PDL can also be etched to form the first opening KK1 after the first support portion 211 and the second support portion 212 are formed.

[0125] Figure 11 A schematic cross-sectional structural diagram of a display substrate according to some embodiments of the present invention is shown, wherein, Figure 11 Schematic illustration along Figure 5 Cross-sectional structural diagram taken from the centerline BB'.

[0126] According to some exemplary embodiments, refer to Figure 11 In at least two support pillars 210, the height H11 of the first support portion 211 of one support pillar 210 in the direction perpendicular to the first surface 100a is greater than the height H12 of the first support portion 211 of the other support pillar 210 in the same direction, and the first support portions 211 of both support pillars 210 are flush with the surface of the substrate 100. That is, by controlling the fabrication process of the first support portion 211 in the support pillars 210, the height of the first support pillar 210 can be increased in one first groove 110 closer to the first surface 100a than in another first groove 110 further away from the first surface 100a. This ensures that the surfaces of the two support pillars 210 remain flush with the surface of the substrate 100.

[0127] Figure 12 A flowchart illustrating a method for preparing a display substrate according to some embodiments of the present invention is shown schematically. Figures 13A-13C The diagram schematically illustrates the fabrication process of a display substrate fabrication method according to some embodiments of the present invention.

[0128] At least some other embodiments of this utility model provide a method for preparing a display substrate, see below. Figure 12 The preparation method includes the following steps S21-S24.

[0129] In step S21, a first electrode layer is formed on the substrate and a plurality of first grooves are formed in the substrate. The first electrode layer includes a plurality of first electrodes spaced apart, and at least one first groove is located between at least two adjacent first electrodes.

[0130] In step S22, a pixel defining layer is formed on the side of the first electrode layer away from the substrate.

[0131] In step S23, a first support layer is formed on the side of the pixel defining layer away from the substrate. A polishing process is used to make the surface of the first support layer away from the substrate parallel to the first surface. A second support layer is formed on the side of the first support layer away from the substrate.

[0132] In step S24, a patterning process is performed on the first support layer and the second support layer, so that the first support layer is patterned to include a plurality of first support portions spaced apart, and the second support layer is patterned to include a plurality of second support portions spaced apart.

[0133] The following combination Figure 10A , Figures 13A-13C The preparation method of the display substrate of at least some embodiments of the present invention will be described.

[0134] Reference Figure 10A A first electrode layer 300 is formed on a substrate 100. The first electrode layer 300 includes a plurality of first electrodes 310 spaced apart. Each first electrode 310 includes a first electrode reflective portion 311 and a first electrode body portion 312. The first electrode body portion 312 is located on the side of the first electrode reflective portion 311 away from the substrate 100. The orthogonal projection of the first electrode body portion 312 on the substrate 100 can cover the orthogonal projection of the first electrode reflective portion 311 on the substrate 100. During the etching process to form the first electrode body portion 312, the insulating layer on the substrate 100 is over-etched to form a plurality of first grooves 110 located within the substrate 100. At least one first groove 110 is located between at least two adjacent first electrodes 310.

[0135] A pixel defining layer PDL is then formed on the side of the first electrode layer 300 away from the substrate 100. The pixel defining layer PDL includes a plurality of first openings KK1 spaced apart. The orthographic projection of at least one first opening KK1 on the substrate 100 at least partially overlaps with the orthographic projection of at least one first electrode 310 on the substrate 100.

[0136] Reference Figure 13A A first support layer 201 is formed on the side of the pixel defining layer (PDL) away from the substrate 100. The surface of the first support layer 201 away from the substrate 100 has an uneven morphology.

[0137] Combined with reference Figure 13A and Figure 13B The surface of the first support layer 201 away from the substrate 100 is made parallel to the first surface 100a by a polishing process. For example, the polishing process can be a chemical mechanical polishing process.

[0138] It should be noted that the fact that the surface of the first support layer 201 away from the substrate 100 is parallel to the first surface 100a should be understood as the height of the surface of the first support layer 201 away from the substrate 100 at various locations (the distance between the surface of the first support layer 201 away from the substrate 100 and the first surface 100a) fluctuates within the range of ±0.1μm of the target height.

[0139] After polishing the surface of the first support layer 201 away from the substrate 100, a second support layer 202 is formed on the side of the first support layer 201 away from the substrate 100. Since the surface of the first support layer 201 away from the substrate 100 is parallel to the first surface 100a, the surface of the formed second support layer 202 away from the substrate 100 is also parallel to the first surface 100a.

[0140] It should be noted that, depending on the requirements, the surface of the second support layer 202 away from the substrate 100 can also be polished to further improve the flatness of the surface of the second support layer 202 away from the substrate 100.

[0141] Combined with reference Figure 13B and Figure 13C The first support layer 201 and the second support layer 202 are patterned such that the first support layer 201 is patterned to include a plurality of spaced-apart first support portions 211, and the second support layer 202 is patterned to include a plurality of spaced-apart second support portions 212. This forms a plurality of support pillars 210, each support portion including a first support portion 211 and a second support portion 212, with the second support portion 212 located on the side of the first support portion 211 away from the substrate 100.

[0142] According to some exemplary embodiments, refer to Figure 11 The maximum distance between the surface of at least one first light-emitting portion 4111 away from the substrate 100 and the first surface 100a in a direction perpendicular to the first surface 100a is a first distance G1, and the distance between the surface of at least one support post 210 away from the substrate 100 and the first surface 100a in a direction perpendicular to the first surface 100a is a second distance G2, wherein the first distance G1 is less than or equal to the second distance G2. This arrangement effectively prevents the surface of the first light-emitting portion 4111 away from the substrate 100 from being scratched during the vapor deposition process of forming the light-emitting layer 410, as this would result in contact between the first light-emitting portion 4111 and the mask used during vapor deposition.

[0143] According to some exemplary embodiments, refer to Figure 11 The maximum distance between the surface of at least one second light-emitting portion 4112 away from the substrate 100 and the first surface 100a in a direction perpendicular to the first surface 100a is a third distance G3, and the distance between the surface of at least one support post 210 away from the substrate 100 and the first surface 100a in a direction perpendicular to the first surface 100a is a second distance G2, and the third distance G3 is less than or equal to the second distance G2. With this arrangement, during the vapor deposition process of the light-emitting layer 410, the problem of scratches on the surface of the second light-emitting portion 4112 away from the substrate 100 caused by contact between the second light-emitting portion 4112 and the mask used during vapor deposition can be effectively avoided.

[0144] According to some exemplary embodiments, refer to Figure 11 The maximum distance between the surface of at least one third light-emitting portion 4113 away from the substrate 100 and the first surface 100a in a direction perpendicular to the first surface 100a is a fourth distance G4, which is greater than or equal to a second distance G2. Depending on display requirements, the thicknesses of at least two of the first light-emitting portions 4111, the second light-emitting portion 4112, and the third light-emitting portion 4113 can be set to be unequal to achieve a better display effect. For example, the thickness T3 of the third light-emitting portion 4113 is greater than the thickness T1 of the first light-emitting portion 4111, and the thickness T3 of the third light-emitting portion 4113 is greater than the thickness T2 of the second light-emitting portion 4112. That is, the fourth distance G4 is greater than the first distance G1, and the fourth distance G4 is greater than the third distance G3.

[0145] Based on this, after the first light-emitting part 4111 and the second light-emitting part 4112 are formed by vapor deposition, the third light-emitting part 4113 can be formed by vapor deposition. Since the third light-emitting part 4113 is the last light-emitting part 411 to be formed by vapor deposition, after the third light-emitting part 4113 is formed, it is not necessary to use a fine mask for vapor deposition, thus effectively avoiding the problem of the third light-emitting part 4113 being scratched by the mask. Based on this, the second spacing G2 can be set to be less than or equal to the fourth spacing G4 to reduce the height of the support pillar 210 and avoid the problem of the second electrode layer 500 being distorted due to the support pillar 210 being too high, which would lead to display defects.

[0146] It should be noted that, in this document, the surface of the light-emitting part 411 away from the substrate 100 may include a plane and / or a curved surface, and the thickness of the light-emitting part 411 should be understood as the maximum thickness of the portion of the light-emitting part 411 corresponding to the first opening KK1.

[0147] According to some exemplary embodiments, in conjunction with reference to Figure 5 and Figure 11Multiple support pillars 210 are connected in a grid pattern, and the support layer 200 includes multiple second openings KK2. The display substrate includes multiple light-emitting units LU, and each light-emitting unit LU includes a light-emitting part 411, a first opening KK1, and a second opening KK2. Within a light-emitting unit LU, the orthographic projection of the first opening KK1 on the substrate 100 falls into the orthographic projection of the second opening KK2 on the substrate 100, and the orthographic projection of the first opening KK1 on the substrate 100 falls into the orthographic projection of the light-emitting part 411 on the substrate 100.

[0148] According to some exemplary embodiments, in conjunction with reference to Figure 5 and Figure 11 Within a light-emitting unit LU, the distance G5 between the edge of the orthographic projection of the first opening KK1 onto the substrate 100 and the edge of the orthographic projection of the second opening KK2 onto the substrate 100 along the first direction D1 is equal to the distance G6 along the second direction D2, and the first direction D1 and the second direction D2 intersect. The second opening KK2 is extended outward relative to the first opening KK1, such that the distance by which the second opening KK2 extends outward relative to the first opening KK1 in different directions is equal.

[0149] To avoid damage to the first electrode 310 during the formation of the support pillar 210, the second opening KK2 in the support layer 200 can be formed first, and then the first opening KK1 in the pixel defining layer PDL can be formed. Since the second opening KK2 expands outward by the same distance as the first opening KK1 in different directions, the etching uniformity of different areas of the first opening KK1 can be improved during the etching process of forming the first opening KK1, thus avoiding the problem of damaging the first electrode 310 due to over-etching of some areas in the first opening KK1.

[0150] It should be noted that in this article, "two equal spacings" should be understood as the deviation of one spacing from the other being within ±10%.

[0151] For example, in a light-emitting unit LU, the geometric center of the orthographic projection of the first opening KK1 onto the substrate 100 can be set to coincide with the geometric center of the orthographic projection of the second opening KK2 onto the substrate 100.

[0152] For example, the orthographic projection of the first opening KK1 onto the substrate 100 can be a first hexagon, and the orthographic projection of the second opening KK2 onto the substrate 100 can be a second hexagon, with the second hexagon being an outward extension relative to the first hexagon. The first direction D1 can be the extension direction of a perpendicular line drawn from the geometric center of the first hexagon to one side of the first hexagon, and the second direction D2 can be the extension direction of a perpendicular line drawn from the geometric center of the first hexagon to another side of the first hexagon.

[0153] Figure 14 The schematic diagram illustrates the display substrate according to some embodiments of the present invention located at... Figure 4 A magnified structural diagram of region C1 in the middle, where, Figure 14 The diagram illustrates the plan view of the support layer and pixel boundary layer located in region C1.

[0154] According to some exemplary embodiments, in conjunction with reference to Figure 11 and Figure 14 The orthographic projection of the first opening KK1 onto the substrate 100 can be a first rectangle, and the orthographic projection of the second opening KK2 onto the substrate 100 can be a second rectangle, with the second rectangle being an outward extension compared to the first rectangle. Within a light-emitting unit LU, the distance G5 between the edge of the orthographic projection of the first opening KK1 onto the substrate 100 and the edge of the orthographic projection of the second opening KK2 onto the substrate 100 along the first direction D1 is equal to the distance G6 along the second direction D2, and the first direction D1 intersects the second direction D2.

[0155] The first direction D1 can be the extension direction of the perpendicular line drawn from the geometric center of the first rectangle to one side of the first rectangle, and the second direction D2 can be the extension direction of the perpendicular line drawn from the geometric center of the first rectangle to the other side of the first rectangle.

[0156] According to some exemplary embodiments, refer to Figure 5 In at least two light-emitting units LU, the distance G5 between the edge of the orthographic projection of the first opening KK1 on the substrate 100 and the edge of the orthographic projection of the second opening KK2 on the substrate 100 in one light-emitting unit LU along the first direction D1 is equal to the distance G7 between the edges of the orthographic projections of the first opening KK1 and the second opening KK2 on the substrate 100 in the other light-emitting unit LU along the first direction D1. In the two light-emitting units LU, the outward expansion distance of the second opening KK2 in the first light-emitting unit LU relative to the first opening is set to be equal to the outward expansion distance of the second opening KK2 in the other light-emitting unit LU relative to the first opening. This improves the etching uniformity in different first openings KK1 during the etching process of forming the first opening KK1, and avoids the problem of damaging the first electrode 310 due to over-etching of some first openings KK1.

[0157] Figure 15 The schematic diagram illustrates the display substrate according to some embodiments of the present invention located at... Figure 4 A magnified structural diagram of region C1 in the middle, where, Figure 15 The diagram illustrates the plan view of the support layer and pixel boundary layer located in region C1.

[0158] According to some exemplary embodiments, in conjunction with reference to Figure 11 and Figure 15 In at least two light-emitting units LU, the distance G8 between the edge of the orthographic projection of the first opening KK1 on the substrate 100 and the edge of the orthographic projection of the second opening KK2 on the substrate 100 in one light-emitting unit LU along the first direction D1 is greater than the distance G9 between the edges of the orthographic projections of the first opening KK1 and the second opening KK2 on the substrate 100 in the other light-emitting unit LU along the first direction D1. The thickness of the light-emitting portion 411 of one light-emitting unit LU perpendicular to the first surface 100a is greater than the thickness of the light-emitting portion 411 of the other light-emitting unit LU perpendicular to the first surface 100a. For a light-emitting unit LU with a thicker light-emitting portion 411, the outward expansion distance of its corresponding second opening KK2 can be set to be larger than that of the first opening KK1. In this way, in the light-emitting unit LU, the space between the support post 210 and the adjacent first electrode 310 for accommodating the portion of the film shape distortion formed by the shadow effect of evaporation at the edge of the light-emitting portion 411 can be increased, which is beneficial to ensuring the flatness of the light-emitting portion 411 in the region of the first opening KK1.

[0159] For example, the thickness T3 of the third light-emitting part 4113 is greater than the thickness T1 of the first light-emitting part 4111. In the light-emitting unit LU including the third light-emitting part 4113, the edge of the orthogonal projection of the first opening KK1 on the substrate 100 and the edge of the orthogonal projection of the second opening KK2 on the substrate 100 are spaced by a distance G8 along the first direction D1. In the light-emitting unit LU including the first light-emitting part 4111, the edge of the orthogonal projection of the first opening KK1 on the substrate 100 and the edge of the orthogonal projection of the second opening KK2 on the substrate 100 are spaced by a distance G91 along the first direction D1. The distance G8 is greater than the distance G91.

[0160] For example, the thickness T3 of the third light-emitting part 4113 is greater than the thickness T2 of the second light-emitting part 4112. In the light-emitting unit LU including the third light-emitting part 4113, the edge of the orthogonal projection of the first opening KK1 on the substrate 100 and the edge of the orthogonal projection of the second opening KK2 on the substrate 100 are spaced by a distance G8 along the first direction D1. In the light-emitting unit LU including the second light-emitting part 4112, the edge of the orthogonal projection of the first opening KK1 on the substrate 100 and the edge of the orthogonal projection of the second opening KK2 on the substrate 100 are spaced by a distance G92 along the first direction D1. The distance G8 is greater than the distance G92.

[0161] Figure 16 A schematic plan view of a display device according to some embodiments of the present invention is shown.

[0162] Reference Figure 16At least some embodiments of the present invention also provide a display device 20, which includes the display substrate 10 as described above.

[0163] The display device may include any device or product with display functionality. For example, the display device may be a smartphone, mobile phone, e-book reader, desktop computer (PC), laptop PC, netbook PC, personal digital assistant (PDA), portable multimedia player (PMP), digital audio player, mobile medical device, camera, wearable device (e.g., head-mounted device, electronic clothing, electronic bracelet, electronic necklace, electronic accessory, electronic tattoo, or smartwatch), television set, etc.

[0164] It should be understood that the display device according to some exemplary embodiments of the present invention has all the features and advantages of the above-described display substrate, which can be referred to the above description of the display substrate and will not be repeated here.

[0165] As used herein, the terms “substantially,” “approximately,” “about,” and other similar terms are used as terms of approximation rather than as terms of degree, and they are intended to account for inherent deviations in measured or calculated values ​​that would be recognized by one of ordinary skill in the art. Taking into account factors such as process variations, measurement problems, and errors associated with the measurement of a particular quantity (i.e., limitations of the measurement system), “approximately” or “about” as used herein includes the stated value and indicates that the particular value is within an acceptable range of deviation for one of ordinary skill in the art. For example, “approximately” may mean within one or more standard deviations, or within ±10% or ±5% of the stated value.

[0166] While some embodiments of the general inventive concept of this utility model have been illustrated and described, those skilled in the art will understand that changes may be made to these embodiments without departing from the principles and spirit of the general inventive concept of this utility model, the scope of which is defined by the claims and their equivalents.

Claims

1. A display substrate, wherein, The display substrate includes: Substrate; A first electrode layer is located on the substrate, and the first electrode layer includes a plurality of first electrodes spaced apart. A pixel defining layer is located on the side of the first electrode layer away from the substrate. The pixel defining layer includes a plurality of first openings spaced apart, and the orthographic projection of at least one of the first openings on the substrate at least partially overlaps with the orthographic projection of at least one of the first electrodes on the substrate. A support layer, located on the side of the pixel defining layer away from the substrate, the support layer including at least one support pillar, the orthographic projection of the support pillar on the substrate being spaced apart from the orthographic projection of the first electrode on the substrate; and A light-emitting layer is located on the side of the pixel defining layer away from the substrate. The light-emitting layer includes a plurality of light-emitting portions. The orthographic projection of at least one of the light-emitting portions on the substrate overlaps with the orthographic projection of at least one of the first openings on the substrate. At least one support pillar is included between at least two adjacent light-emitting portions. Wherein, at least one first groove is provided on the surface of the substrate facing the pixel defining layer, the substrate includes a first surface away from the pixel defining layer, the first groove is recessed in a direction close to the first surface, and the orthographic projection of at least one first groove on the substrate is located between the orthographic projections of at least two adjacent first openings on the substrate. The orthographic projection of the support post on the substrate falls within the orthographic projection of the first groove on the substrate; and The first groove includes a connected groove bottom and groove wall. In a direction parallel to the first surface, the groove wall of the first groove is spaced apart from the adjacent support column. At least a portion of the light-emitting part is located between the support column and the groove wall of the first groove. 2.The display substrate of claim 1, wherein, The support column includes a first support portion and a second support portion. The second support portion is located on the side of the first support portion away from the substrate. The orthographic projection of the first support portion on the substrate falls within the orthographic projection of the second support portion on the substrate. as well as At least one portion of the light-emitting part is located between the first support and the groove wall of the first groove. 3.The display substrate of claim 2, wherein, The first support portion includes a first side facing the adjacent light-emitting portion, and the first side is a concave arc surface. 4.The display substrate of claim 3, wherein, At least one portion of the light-emitting part contacts the first side of at least one of the adjacent first support portions. 5.The display substrate according to any one of claims 2-4, wherein, The light-emitting portion includes a first sub-portion, the orthographic projection of the first sub-portion on the substrate coincides with the orthographic projection of the first opening on the substrate, and the surface of the first support portion away from the substrate is closer to the first surface than the surface of the first sub-portion of the light-emitting portion away from the substrate. And / or, The surface of the first support portion away from the substrate is further away from the first surface than the surface of the first electrode away from the substrate. 6.The display substrate of any one of claims 2-4, wherein, In at least one of the support columns, the height of the first support portion in the direction perpendicular to the first surface is greater than the height of the second support portion in the direction perpendicular to the first surface. 7.The display substrate according to any one of claims 1-6, wherein, The plurality of first grooves are connected to form a grid-like groove, and the orthographic projection of the grid-like groove on the substrate includes a plurality of groove gaps spaced apart, and the orthographic projection of the plurality of first openings on the substrate falls into the plurality of groove gaps respectively. 8.The display substrate of claim 7, wherein, The overlapping portion of at least one of the light-emitting portions on the substrate and the first groove on the substrate is annular. 9.The display substrate of any one of claims 2-6, wherein, In a direction perpendicular to the first surface, the bottom of at least one of the first grooves is closer to the first surface than the bottom of at least one other first groove. 10.The display substrate of claim 9, wherein, In at least two of the support pillars, one support pillar has a greater height in a direction perpendicular to the first surface than the other support pillar in the same direction, and both support pillars are flush with the surface of the substrate away from the substrate. 11.The display substrate of claim 9, wherein, The height of the second support portion of one of the support columns in the direction perpendicular to the first surface is greater than the height of the second support portion of the other support column in the direction perpendicular to the first surface. 12.The display substrate of claim 9, wherein, In at least two of the support pillars, the height of the first support portion of one support pillar in the direction perpendicular to the first surface is greater than the height of the first support portion of the other support pillar in the direction perpendicular to the first surface, and the first support portions of both support pillars are flush with the surface of the substrate.

13. The display substrate of any of claims 1-12, wherein, The plurality of light-emitting parts include a plurality of first light-emitting parts, a plurality of second light-emitting parts, and a plurality of third light-emitting parts; as well as The maximum distance between the surface of at least one of the first light-emitting portions away from the substrate and the first surface in a direction perpendicular to the first surface is a first distance; the distance between the surface of at least one of the support pillars away from the substrate and the first surface in a direction perpendicular to the first surface is a second distance; the first distance is less than or equal to the second distance; and / or, The maximum distance between the surface of at least one of the second light-emitting portions away from the substrate and the first surface in a direction perpendicular to the first surface is a third distance, and the distance between the surface of at least one of the support pillars away from the substrate and the first surface in a direction perpendicular to the first surface is a second distance, and the third distance is less than or equal to the second distance. 14.The display substrate of claim 13, wherein, The maximum distance between at least one of the third light-emitting portions, the surface of which is away from the substrate, and the first surface in a direction perpendicular to the first surface is a fourth distance, and the fourth distance is greater than or equal to the second distance. 15.The display substrate according to any one of claims 1-14, wherein, In at least one of the first grooves, the center of the groove bottom is closer to the first surface than the edge; and / or, In at least one of the first grooves, the edge of the groove bottom is closer to the first surface than the center. 16.The display substrate according to any one of claims 1-15, wherein, The plurality of support columns are connected in a grid pattern, and the support layer includes a plurality of second openings; The display substrate includes a plurality of light-emitting units, and each light-emitting unit includes a light-emitting portion, a first opening and a second opening; as well as Within one of the light-emitting units, the orthographic projection of the first opening on the substrate falls into the orthographic projection of the second opening on the substrate, and the orthographic projection of the first opening on the substrate falls into the orthographic projection of the light-emitting part on the substrate. 17.The display substrate of claim 16, wherein, Within one of the light-emitting units, the distance between the edge of the orthographic projection of the first opening on the substrate and the edge of the orthographic projection of the second opening on the substrate along a first direction is equal to the distance along a second direction, and the first direction intersects the second direction. 18.The display substrate of claim 17, wherein, In at least two of the light-emitting units, the distance between the edge of the orthographic projection of the first opening on the substrate and the edge of the orthographic projection of the second opening on the substrate in one of the light-emitting units along the first direction is equal to the distance between the edge of the orthographic projection of the first opening on the substrate and the edge of the orthographic projection of the second opening on the substrate in the other light-emitting unit along the first direction. 19.The display substrate of claim 16, wherein, In at least two light-emitting units, the distance between the edge of the orthographic projection of the first opening on the substrate and the edge of the orthographic projection of the second opening on the substrate in one light-emitting unit along the first direction is greater than the distance between the edge of the orthographic projection of the first opening on the substrate and the edge of the orthographic projection of the second opening on the substrate in the other light-emitting unit along the first direction. as well as The thickness of the light-emitting part of one of the light-emitting units perpendicular to the first surface is greater than the thickness of the light-emitting part of the other light-emitting unit perpendicular to the first surface. 20.The display substrate according to any one of claims 1-19, wherein, The first electrode includes a first electrode reflective portion and a first electrode main body portion located on the side of the first electrode reflective portion away from the substrate, wherein the orthographic projection of the first electrode reflective portion on the substrate falls within the orthographic projection of the first electrode main body portion on the substrate; and The groove wall of the first groove is connected to the side of the adjacent first electrode body. 21.The display substrate of claim 20, wherein, At least one second groove is further provided on the surface of the substrate facing the pixel defining layer. The at least one second groove is located on the side of the at least one first groove away from the substrate and communicates with the first groove. The orthographic projection of the at least one first groove on the substrate falls within the orthographic projection of the at least one second groove on the substrate. The groove wall of the second groove is connected to the side of the adjacent first electrode reflector.

22. The display substrate of claim 21, wherein, The depth of the first groove perpendicular to the first surface is greater than the depth of the second groove perpendicular to the first surface.

23. A display device comprising: The display device includes a display substrate according to any one of claims 1-22.

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