An etching apparatus for TVS chip processing

Abstract

This utility model provides an etching apparatus for TVS chip processing, relating to the field of chip processing. It includes a processing apparatus body; a transparent viewing window, externally fixedly installed at the front end of the processing apparatus body, with a square transparent plate at its center; a motor fixedly installed in the center of a base plate, with the bottom of the motor fixedly connected to the interior of the processing apparatus body; and a clamping assembly installed on the top of the base plate for clamping and fixing the TVS chip during processing. Through this technical solution, the chip can be recorded in real time during the etching process. The clamping assembly of this utility model uses a motor to drive a gear to rotate, causing racks one and two to move in opposite directions. This, in turn, drives two sets of L-shaped clamping plates to move synchronously closer or further away via a horizontal plate, achieving rapid clamping and releasing of TVS chips of different sizes. During clamping, the clamping plates move along a fixed trajectory, further improving clamping stability.

Description

Technical Field

[0001] This utility model relates to the field of chip processing technology, specifically to an etching apparatus for TVS chip processing. Background Technology

[0002] TVS chips, as an important transient voltage suppression chip, are widely used in the field of electronic circuit protection. Their processing precision directly affects the performance and reliability of the product. Etching process, as a key step in the TVS chip manufacturing process, requires precise chemical or physical etching of the chip surface to form specific circuit patterns and structures.

[0003] Currently, TVS chip etching equipment on the market has many shortcomings in practical applications. In terms of clamping and fixing, traditional equipment mostly adopts manual adjustment or a single-direction clamping structure, which is difficult to adapt to the rapid fixing requirements of chips of different sizes. Moreover, uneven clamping force can easily lead to chip damage or displacement, affecting etching accuracy. During the etching process, the spraying of etching solution is mostly a fixed path or a large-area coverage, which cannot be accurately positioned and sprayed according to the specific etching area of ​​the chip. This not only wastes etching solution, but may also cause deviations in the etching pattern due to uneven distribution of etching solution, reducing the product qualification rate.

[0004] For example, a Chinese patent with authorization announcement number CN221827851U discloses an etching apparatus for TVS chip processing. By setting up a sufficient contact mechanism, a stirring motor drives a rotating shaft to agitate the etching solution at the bottom of the etching tank, creating flow. Simultaneously, rotating gears and racks drive the placement plate and TVS chip to repeatedly move up and down, improving the contact between the chip and the etching solution. The apparatus also includes an auxiliary stirring mechanism that uses bevel gears to drive the secondary stirring blades to further enhance the flow of the etching solution. However, such apparatus still has significant limitations: it is essentially an immersion etching process, requiring a large amount of etching solution and incurring high replacement costs. Furthermore, the chip's positional shift during vertical movement can affect etching accuracy.

[0005] Currently available TVS chips are difficult to adapt to the rapid fixation requirements of chips of different sizes. Most etching solutions are in an immersion mode, which can easily lead to waste and may also cause deviations in the etching pattern due to uneven distribution of the etching solution. Utility Model Content

[0006] This invention provides an etching apparatus for TVS chip processing, which solves the problems mentioned in the background art.

[0007] To solve the above-mentioned technical problems, the technical solution of this utility model is as follows:

[0008] An embodiment of this utility model provides an etching apparatus for TVS chip processing, comprising:

[0009] The main body of the processing device;

[0010] A transparent viewing window is fixedly installed on the front end of the processing device body, and a square transparent plate is set in the center of the transparent viewing window;

[0011] The base plate is externally fixedly connected to the inside of the processing device body. A motor is fixedly installed in the center of the inside of the base plate, and the bottom of the motor is fixedly connected to the inside of the processing device body.

[0012] Motor 2 is fixedly installed outside the processing device body, and a lead screw is fixedly connected to the output end of Motor 2;

[0013] The clamping assembly is mounted on the top of the base plate and is used to clamp and fix the TVS chip during processing.

[0014] The spraying assembly, installed inside the processing unit, is used for precise etching of TVS chips.

[0015] The above technical solution allows for real-time recording of the chip during the etching process.

[0016] Furthermore, the clamping assembly includes a horizontal plate, a motor, a rack, a rack, and a gear. The output end of the motor is fixedly connected to the gear, and the gear has a cylindrical shape. Multiple tooth blocks are provided on the outside of the gear, and the gear is meshed with racks 1 and 2. The bottom of rack 2 is fixedly connected to the horizontal plate, and two sets of horizontal plates are installed at the bottom of racks 1 and 2.

[0017] The above technical solution allows the clamping component to hold chips of different sizes, ensuring their fixation during the etching process.

[0018] Furthermore, two sets of sliders are fixedly connected to the bottom of the horizontal plate, and slide rails are slidably connected to the bottom of the sliders. Two sets of slide rails are installed on the top of the base plate, with slide rail one fixedly installed on one side of the top of the base plate and slide rail two fixedly installed on the other side.

[0019] With the above technical solution, the slide rail is installed on the base plate so that the slider moves to drive the rack and gear to mesh.

[0020] Furthermore, the outer side of the horizontal plate is configured as two sets, installed on the top of the slider, and an L-shaped clamp is fixedly connected to the center of the top of the horizontal plate.

[0021] Using the above technical solution, the L-shaped clamp can hold chips of any size.

[0022] Furthermore, the outer surface of the processing device body is rectangular, and the interior of the processing device body is hollow. A spraying component is provided on the back of the processing device body, and a support plate is fixedly connected to the back of the processing device body.

[0023] With the above technical solution, the spraying component is installed on the back of the main body, and the support plate fixes it to make it more stable.

[0024] Furthermore, the spraying assembly includes a mounting base, a lead screw, a slider, a nozzle, a motor, a delivery pipe, and a check valve. The end of the lead screw furthest from the motor is rotatably connected to the mounting base. The outer side of the mounting base is fixedly connected to the inner wall of the processing device body. A slider is sleeved in the center of the lead screw. A nozzle is fixedly connected to the bottom of the slider. A hole is opened on one side of the nozzle. A delivery pipe is fixedly connected to the outside of the nozzle. A check valve is fixedly connected to the other end of the delivery pipe.

[0025] Through the above technical solution, the spraying component can move laterally to spray the chip widely, making the chip surface evenly sprayed and reducing the waste of raw materials.

[0026] Furthermore, a solution tank is fixedly installed at the bottom of the check valve, and the interior of the solution tank is hollow. The bottom of the solution tank is fixedly installed on the top of the support plate.

[0027] The above technical solution prevents backflow of the solution by using a check valve and achieves uniform spraying by using a delivery pipe to enter the nozzle.

[0028] The above-described solution of this utility model has at least the following beneficial effects:

[0029] 1. In this utility model, the clamping assembly uses a motor to drive a gear to rotate, which in turn drives rack one and rack two to move in opposite directions. This, in turn, drives two sets of L-shaped clamping plates to move closer or further away synchronously through a horizontal plate, enabling rapid clamping and releasing of TVS chips of different sizes. This gear and rack transmission structure ensures uniform clamping force and avoids damage to the chip due to uneven force. The slider at the bottom of the horizontal plate cooperates with the slide rail on the base plate, allowing the clamping plates to move along a fixed trajectory during clamping, reducing shaking and further improving clamping stability. This ensures that the chip position does not shift during etching, providing a basic guarantee for processing accuracy.

[0030] 2. In this utility model, the spraying assembly is driven by a second motor to rotate a lead screw, which in turn moves a first slider and the bottom nozzle along the lead screw axis. Combined with the directional hole design of the nozzle, the spraying position and range of the etching solution can be precisely controlled. Compared with the traditional large-area spraying method, it can target the areas of the chip that need to be etched, reducing solution waste. The check valve on the delivery pipe can prevent the etching solution from flowing back, ensuring stable solution delivery pressure and avoiding uneven etching depth caused by pressure fluctuations. This improves the consistency and accuracy of the etching pattern, thereby increasing the processing yield of TVS chips. Attached Figure Description

[0031] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0032] Figure 2 This is a schematic diagram of the clamping component structure of this utility model;

[0033] Figure 3 This is a schematic diagram of the spraying component structure of this utility model.

[0034] Explanation of reference numerals in the attached figures:

[0035] 1. Processing device body; 2. Transparent viewing window; 3. Base plate; 4. Slide rail one; 5. Slide rail two; 6. Slider; 7. Horizontal plate; 8. L-shaped clamp; 9. Motor one; 10. Rack one; 11. Rack two; 12. Gear; 13. Mounting base; 14. Lead screw; 15. Slider one; 16. Nozzle; 17. Motor two; 18. Delivery pipe; 19. Check valve; 20. Solution tank; 21. Support plate. Detailed Implementation

[0036] Exemplary embodiments of the present invention will now be described in more detail with reference to the accompanying drawings. While exemplary embodiments of the present invention are shown in the drawings, it should be understood that the present invention may be implemented in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this invention will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art.

[0037] like Figures 1 to 3 As shown, an embodiment of this utility model provides an etching apparatus for TVS chip processing, comprising:

[0038] The device comprises: a processing unit body 1; a transparent viewing window 2, which is fixedly installed on the front end of the processing unit body 1, with a square transparent plate in the center; a base plate 3, which is fixedly connected to the interior of the processing unit body 1, with a motor 9 fixedly installed in the center of the interior of the base plate 3, and the bottom of the motor 9 fixedly connected to the interior of the processing unit body 1; a second motor 17, which is fixedly installed on the exterior of the processing unit body 1, with a lead screw 14 fixedly connected to the output end of the second motor 17; a clamping assembly, installed on the top of the base plate 3, used for clamping and fixing TVS chips during processing; and a spraying assembly, installed inside the processing unit body 1, used for precise etching of TVS chips.

[0039] In this embodiment, the TVS chip is placed on the base plate 3. The motor 9 is started, and its output drives the gear 12 to rotate. The gear 12 meshes and drives the rack 10 and rack 11 to move in opposite directions. Then, the horizontal plate 7 drives the two sets of L-shaped clamps 8 to move synchronously along the slide rail to complete the clamping and fixing of the chip. After clamping, the etching solution is drawn from the solution tank 20 through the delivery pipe 18 and stably delivered to the nozzle 16 through the check valve 19. The motor 17 is started, and its output drives the lead screw 14 to rotate, so that the slider 15 sleeved on the lead screw drives the nozzle 16 to move. The nozzle 16 accurately sprays the etching solution onto the chip to be processed area to realize the etching operation. The operator can observe the internal etching process in real time through the transparent viewing window 2 at the front of the processing device body 1. After etching is completed, the motor 9 is reversed to loosen the L-shaped clamps 8 and remove the chip.

[0040] like Figures 1 to 3 As shown, the clamping assembly includes a horizontal plate 7, a motor 9, a rack 10, a rack 2 11, and a gear 12. The output end of the motor 9 is fixedly connected to the gear 12, which is cylindrical in shape and has multiple tooth blocks on its exterior. The gear 12 is meshed with the rack 10 and rack 2 11. The bottom of the rack 2 11 is fixedly connected to the horizontal plate 7, which is configured in two sets and installed at the bottom of the rack 10 and rack 2 11. The bottom of the horizontal plate 7 is fixedly connected to two sets of sliders 6, and the bottom of the sliders 6 is slidably connected to slide rails. Two sets of slide rails are installed on the top of the base plate 3. One side of the top of the base plate 3 is fixedly installed with slide rail 4, and the other side is fixedly installed with slide rail 2 5. The exterior of the horizontal plate 7 is configured in two sets and installed on the top of the sliders 6. An L-shaped clamping plate 8 is fixedly connected to the center of the top of the horizontal plate 7.

[0041] In this embodiment, the motor 9 is started, and its output drives the gear 12 to rotate. Since the teeth on the outside of the gear 12 mesh with the rack 10 and the rack 2 11 respectively, the rotation of the gear 12 will drive the rack 10 and the rack 2 11 to move in opposite linear motion. The bottom of the rack 10 and the rack 2 11 are connected to the horizontal plate 7. The slider 6 at the bottom of the horizontal plate 7 is embedded in the slide rail 4 and the slide rail 2 5 at the top of the base plate 3 respectively. When the rack drives the horizontal plate 7 to move, the slider 6 slides along the slide rail, providing a stable guide for the horizontal plate 7 and ensuring that it moves in a straight line. The L-shaped clamps 8 at the top of the two sets of horizontal plates 7 move synchronously with the horizontal plates: when the rack 10 and the rack 2 11 approach each other, the L-shaped clamps 8 approach and clamp the TVS chip synchronously; when they move away from each other, the L-shaped clamps 8 release the chip, thereby realizing the rapid clamping and release of the chip, and the clamping process is stable and the force is uniform.

[0042] like Figures 1 to 3 As shown, the spraying assembly includes a mounting base 13, a lead screw 14, a slider 15, a nozzle 16, a motor 17, a delivery pipe 18, and a check valve 19. The end of the lead screw 14 furthest from the motor 17 is rotatably connected to the mounting base 13. The outer side of the mounting base 13 is fixedly connected to the inner wall of the processing device body 1. The slider 15 is sleeved in the center of the outer side of the lead screw 14. The bottom of the slider 15 is fixedly connected to the nozzle 16. A hole is opened on one side of the nozzle 16. The delivery pipe 18 is fixedly connected to the outer side of the nozzle 16. The other end of the delivery pipe 18 is fixedly connected to the check valve 19. A solution tank 20 is fixedly installed at the bottom of the check valve 19. The interior of the solution tank 20 is hollow. The bottom of the solution tank 20 is fixedly installed on the top of the support plate 21.

[0043] In this embodiment, the etching solution is pre-stored in the solution tank 20. When etching is required, the solution is conveyed upward through the delivery pipe 18. The check valve 19 ensures that the solution can only flow in one direction, preventing backflow and ensuring stable pressure. The motor 17 is started, and its output end drives the lead screw 14 to rotate. The lead screw 14 and the slider 15 are connected by a thread. The rotation of the lead screw 14 drives the slider 15 to move linearly along the lead screw axis. The mounting base 13 provides stable support for the lead screw 14, ensuring its smooth rotation. The nozzle 16 at the bottom of the slider 15 moves synchronously. After the etching solution enters the nozzle 16 through the delivery pipe 18, it is sprayed directionally onto the area to be etched on the TVS chip below through the holes opened on one side of the nozzle. The motor 17 can rotate in both directions, driving the lead screw 14 to rotate in both directions, thereby enabling the nozzle 16 to move back and forth. With the directional spraying function of the nozzle 16, the etching area of ​​different positions on the chip can be accurately covered, completing the precise etching process of the TVS chip.

[0044] The above description is the preferred embodiment of this utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the principle of this utility model, and these improvements and modifications should also be considered within the protection scope of this utility model.

Claims

1. An etching apparatus for TVS chip processing, characterized in that, include: Processing device body (1); A transparent viewing window (2) is fixedly installed on the front end of the processing device body (1), and the center of the transparent viewing window (2) is set as a square transparent plate; The base plate (3) is fixedly connected to the inside of the processing device body (1) on the outside. A motor (9) is fixedly installed in the center of the inside of the base plate (3), and the bottom of the motor (9) is fixedly connected to the inside of the processing device body (1). Motor 2 (17) is fixedly installed on the outside of the processing device body (1), and a lead screw (14) is fixedly connected to the output end of the motor 2 (17); The clamping assembly is installed on the top of the base plate (3) and is used to clamp and fix the TVS chip during processing; The spraying assembly is installed inside the processing unit body (1) for precise etching of TVS chips.

2. The etching device for processing a TVS chip according to claim 1, wherein The clamping assembly includes a horizontal plate (7), a motor (9), a rack (10), a rack (11), and a gear (12). The output end of the motor (9) is fixedly connected to the gear (12), and the gear (12) is cylindrical in shape. Multiple tooth blocks are provided on the outside of the gear (12), and the rack (10) and rack (11) are meshed on the outside of the gear (12). The bottom of the rack (11) is fixedly connected to the horizontal plate (7), and the horizontal plate (7) is set in two sets and installed at the bottom of the rack (10) and rack (11).

3. The etching device for processing a TVS chip according to claim 2, wherein Two sets of sliders (6) are fixedly connected to the bottom of the horizontal plate (7). The bottom of the slider (6) is slidably connected to a slide rail, and two sets of slide rails are installed on the top of the base plate (3). Slide rail one (4) is fixedly installed on one side of the top of the base plate (3), and slide rail two (5) is fixedly installed on the other side.

4. The etching device for processing a TVS chip according to claim 3, wherein The outer side of the horizontal plate (7) is configured as two sets, which are installed on the top of the slider (6). An L-shaped clamp (8) is fixedly connected to the center of the top of the horizontal plate (7).

5. The etching device for TVS chip processing according to claim 1, characterized in that, The outer side of the processing device body (1) is rectangular, and the interior of the processing device body (1) is hollow. A spraying component is provided on the back of the processing device body (1), and a support plate (21) is fixedly connected to the back of the processing device body (1).

6. The etching device for TVS chip processing according to claim 1, characterized in that, The spraying assembly includes a mounting base (13), a lead screw (14), a slider (15), a nozzle (16), a motor (17), a delivery pipe (18), and a check valve (19). The end of the lead screw (14) away from the motor (17) is rotatably connected to the mounting base (13). The outside of the mounting base (13) is fixedly connected to the inner wall of the processing device body (1). The slider (15) is sleeved in the center of the outside of the lead screw (14). The bottom of the slider (15) is fixedly connected to the nozzle (16). A hole is opened on one side of the outside of the nozzle (16). The outside of the nozzle (16) is fixedly connected to the delivery pipe (18). The other end of the delivery pipe (18) is fixedly connected to the check valve (19).

7. The etching apparatus for processing a TVS chip according to claim 6, wherein The bottom of the check valve (19) is fixedly installed with a solution tank (20), and the interior of the solution tank (20) is hollow. The bottom of the solution tank (20) is fixedly installed on the top of the support plate (21).

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