Substrate washing apparatus

Abstract

This application discloses a substrate washing fixture, belonging to the field of substrate cleaning technology. The substrate washing fixture includes a square transport frame with two parallel support rods slidably connected to it. A cover plate is detachably connected to the upper part of each support rod. The transport frame and the support rods are fixed together by a first bolt. By setting two support rods within the transport frame and adjusting the distance between them, the fixture can adapt to the fixing requirements of substrates of different sizes without replacing the transport frame, thus reducing usage costs.

Description

Technical Field

[0001] This application relates to the field of substrate cleaning technology, and more specifically, to a substrate water washing fixture. Background Technology

[0002] In semiconductor packaging processes, high-density packaging structures such as flip chips or BGAs require ball placement on the surface of individual substrates after wafer dicing. If residual flux, organic contaminants, metal oxides, and particulate impurities on the substrate surface are not thoroughly removed before ball placement, it will directly lead to defects such as decreased solder ball wettability, cold solder joints, voids, or bridging, thus affecting packaging reliability. Therefore, water washing is a critical process before ball placement, and its cleaning effect and process stability have a decisive impact on yield.

[0003] A search revealed that Chinese patent CN222995355U discloses a substrate washing fixture. This device expands the cleaning area through a grid-arranged window structure. The window structure is designed with an arc-shaped obtuse angle to improve buffering, prevent impurity accumulation, and effectively achieve repeated cleaning.

[0004] The carrier plate in the above device has a fixed size. When fixing substrates of different sizes, it is often necessary to replace the carrier plate with a different size, which increases the cost of use. In view of this, we propose a substrate washing fixture. Utility Model Content

[0005] 1. Technical problems to be solved

[0006] The purpose of this application is to provide a substrate washing fixture to solve the problems mentioned in the background art.

[0007] 2. Technical Solution

[0008] This application is achieved through the following technical solution:

[0009] A substrate washing fixture includes a square transport frame with two support rods slidably connected to it. The two support rods are parallel to each other, and a cover plate is detachably connected to the upper part of each support rod. The transport frame and the support rods are connected and fixed by a first bolt.

[0010] As an optional solution to the technical solution of this application, two scales are fixedly installed on the transport frame. The two scales are respectively set at both ends of the support rod. The support rod is orthogonal to the scales and the support rod is slidably set above the scales.

[0011] As an optional solution to the technical solution of this application, a gap is provided between the scale and the transport frame, and a first bolt is connected to both ends of the support rod. The first bolt passes through the gap and is threadedly connected to the support rod. A nut is provided at the end of the first bolt away from the support rod.

[0012] As an optional solution to the technical solution in this application, a fixing plate is provided above the scale. The fixing plate is integrally formed with the transport frame. The fixing plate is located in the middle of the transport frame and is connected and fixed to the scale by a second bolt.

[0013] As an optional solution to the technical solution in this application, the support rod is provided with an upwardly protruding baffle on its outer side.

[0014] As an optional solution to the technical solution in this application, the inner side of the support rod is serrated.

[0015] As an optional solution to the technical solution of this application, the inner side of the cover plate is serrated, and the support rod is staggered from the serrations on the cover plate.

[0016] As an optional solution to the technical solution in this application, the support rod and the cover plate are magnetically attached.

[0017] 3. Beneficial effects

[0018] Compared with the prior art, the beneficial effects of this application are:

[0019] 1) This application sets two support rods in the transport frame. By adjusting the distance between the two support rods, it can adapt to the fixing requirements of substrates of different sizes without replacing the transport frame, thus reducing the cost of use.

[0020] 2) By setting the edges of the support rod and the cover plate to be serrated, this application can reduce the obstruction of the substrate when the support rod and the cover plate clamp and fix the substrate, which facilitates the increase of the drying efficiency of the substrate after washing. Attached Figure Description

[0021] Figure 1 This is a top view of the overall structure of a substrate washing fixture;

[0022] Figure 2 This is a three-dimensional view of the overall structure of a substrate washing fixture;

[0023] Figure 3 This is a side view of the overall structure of a substrate washing fixture;

[0024] In the diagram: 1. Transport frame; 101. Fixing plate; 2. Support rod; 3. Cover plate; 4. First bolt; 5. Scale. Detailed Implementation

[0025] The technical solution of this application will now be clearly and completely described in conjunction with the accompanying drawings.

[0026] Please see Figures 1 to 3 This application provides a technical solution:

[0027] A substrate washing fixture includes a square transport frame 1 with two support rods slidably connected to the transport frame 1. The two support rods 2 are parallel to each other, and a cover plate 3 is detachably connected to the upper part of the support rods 2. The transport frame 1 and the support rods 2 are connected and fixed by a first bolt 4.

[0028] Users can adjust the spacing between the support rods 2 according to the size of the substrate, and fix the position of the support rods 2 with the first bolt 4 so that both ends of the substrate can be placed on the support rods 2; then place the cover plate 3 on top of the substrate, and use the cover plate 3 and the support rods 2 to clamp and fix the substrate; by placing the transport frame 1 into the washing equipment, the substrate can be washed.

[0029] Preferably, the outer side of the support rod 2 is provided with an upwardly protruding baffle for limiting the two sides of the substrate; the inner side of the support rod 2 is serrated, and the inner side of the cover plate 3 is serrated. The serrations on the support rod 2 and the cover plate 3 are staggered to facilitate the rapid air drying of the substrate after washing; the support rod 2 and the cover plate 3 are magnetically attached to each other to simplify the fixing operation of the substrate.

[0030] like Figure 2 and Figure 3 As shown, two scales 5 are fixedly installed on the transport frame 1. The two scales 5 are respectively set at both ends of the support rod 2, and the support rod 2 is orthogonal to the scales 5. The support rod 2 is slidably positioned above the scales 5, and there is a gap between the scales 5 and the transport frame 1. Each end of the support rod 2 is connected to a first bolt 4, which passes through the gap and is threaded into the support rod 2. A nut is provided at the end of the first bolt 4 away from the support rod 2. The user can accurately adjust the position of the support rod 2 according to the scales 5, increasing the adjustment efficiency of the support rod 2. After the support rod 2 is adjusted, the nut is pressed against the transport frame 1 and the scales 5 by rotating the first bolts 4, increasing the friction between the support rod 2 and the transport frame 1 and the scales 5, thereby fixing the support rod 2.

[0031] Preferably, a fixing plate 101 is provided above the scale 5. The fixing plate 101 is integrally formed with the transport frame 1. The fixing plate 101 is located in the middle of the transport frame 1 and is connected and fixed to the scale 5 by a second bolt. This facilitates the replacement of the scale 5 after the scale on its surface is worn.

Claims

1. A substrate rinsing tool, comprising: The transport frame (1) is square in shape. Two support rods (2) are slidably connected to the transport frame (1). The two support rods (2) are parallel to each other. A cover plate (3) is detachably connected to the upper part of the support rod (2). The transport frame (1) and the support rods (2) are connected and fixed by a first bolt (4).

2. The substrate washing tool of claim 1, wherein: Two scales (5) are fixedly installed on the transport frame (1). The two scales (5) are respectively set at both ends of the support rod (2). The support rod (2) is orthogonal to the scales (5). The support rod (2) is slidably set above the scales (5).

3. The substrate washing tool of claim 2, wherein: There is a gap between the scale (5) and the transport frame (1). Both ends of the support rod (2) are connected to the first bolt (4). The first bolt (4) passes through the gap and is threaded to the support rod (2). The end of the first bolt (4) away from the support rod (2) is provided with a nut.

4. The substrate washing tool of claim 2, wherein: A fixing plate (101) is provided above the scale (5). The fixing plate (101) is integrally formed with the transport frame (1). The fixing plate (101) is located in the middle of the transport frame (1) and is connected and fixed to the scale (5) by a second bolt.

5. The substrate washing tool of claim 1, wherein: The support rod (2) has an upwardly protruding baffle on its outer side.

6. The substrate washing tool of claim 1, wherein: The inner side of the support rod (2) is serrated.

7. The substrate washing tool of claim 1, wherein: The inner side of the cover plate (3) is serrated, and the support rod (2) is staggered from the serrations on the cover plate (3).

8. The substrate washing tool of claim 1, wherein: The support rod (2) and the cover plate (3) are magnetically attracted to each other.

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