An anti-oxidation etching post-treatment device

Abstract

This utility model relates to the field of anti-oxidation technology, and more particularly to an anti-oxidation etching post-treatment device, including a main chamber, a liquid storage box that slides back and forth on the vertical inner wall of the main chamber, a rotating rod rotatably connected inside the main chamber, and a pair of cams fixedly sleeved on the rotating rod, the cam wheel surfaces contacting the bottom surface of the liquid storage box; it also includes: an electric drive assembly and a reset assembly, the reset assembly causing the liquid storage box to return to its original position after stable vertical downward movement. The electric drive assembly includes a motor fixedly connected to the bottom of the inner cavity of the main chamber, a bevel gear one fixedly connected to the output end of the motor, and a bevel gear two fixedly sleeved on the rotating rod, the bevel gear one and bevel gear two meshing. This utility model, through the arrangement of the electric drive assembly, the reset assembly, and the cams, not only replaces manual operation, saving time and labor compared to the processing in the prior art, but also accelerates the penetration rate of the anti-oxidation solution through periodic oscillation, thereby effectively shortening the process cycle and improving the efficiency of workpiece anti-oxidation treatment.

Description

Technical Field

[0001] This utility model relates to the field of anti-oxidation technology, and in particular to an anti-oxidation etching post-treatment device. Background Technology

[0002] In fields such as semiconductor manufacturing and precision electronic component processing, the surface activity of workpieces after etching is significantly enhanced, making them highly susceptible to oxidation reactions with oxygen, water vapor, and other substances in the air, forming an oxide layer. This oxidation phenomenon can seriously affect the conductivity, weldability, and appearance quality of the workpiece, so efficient anti-oxidation treatment is necessary.

[0003] Existing technologies mostly employ static immersion or manual spraying methods. Static immersion involves placing the workpiece in a chemical solution, relying on the natural diffusion of the solution; spraying involves manually or mechanically applying the anti-oxidation solution. However, due to the need to process large batches of workpieces simultaneously, the processing cycle is too long; manual spraying is labor-intensive, time-consuming, and labor-intensive; both methods are insufficient to meet the needs of processing large batches of workpieces, reducing the efficiency of anti-oxidation treatment. Utility Model Content

[0004] The purpose of this invention is to solve the problems of excessively long processing cycles caused by processing a large number of workpieces simultaneously in the existing technology, and the high labor intensity, time and labor costs of manual spraying. Therefore, an anti-oxidation etching post-treatment device is proposed.

[0005] To achieve the above objectives, the present invention adopts the following technical solution:

[0006] An anti-oxidation etching post-treatment device includes a main chamber, a liquid storage box that slides back and forth on the vertical inner wall of the main chamber, a rotating rod that is rotatably connected inside the main chamber, and a pair of cams that are fixedly sleeved on the rotating rod, with the cam wheel surface in contact with the bottom surface of the liquid storage box;

[0007] Also includes:

[0008] An electric drive assembly that drives the rotary rod to rotate;

[0009] A reset component that causes the liquid storage box to return to its original position after moving vertically downwards in a stable manner.

[0010] Preferably, the electric drive assembly includes a motor fixedly connected to the bottom of the main compartment cavity, a bevel gear one fixedly connected to the output end of the motor, and a bevel gear two fixedly sleeved on the rotating rod, wherein the bevel gear one and the bevel gear two mesh.

[0011] Preferably, the reset assembly includes a pair of pressure plates that contact the top of the liquid storage box, an L-shaped block is provided above the pressure plate, a rectangular rod is fixedly connected to the top of the pressure plate, the rectangular rod slides vertically through the L-shaped block, a spring is sleeved on the rectangular rod, and the two ends of the spring are fixedly connected to the pressure plate and the L-shaped block respectively.

[0012] Preferably, a vertical plate is fixedly connected to the top of the main compartment, a screw is threadedly connected to the vertical plate, and one end of the screw is rotatably connected to the L-shaped block. A pair of sliding rods are slidably connected to the vertical plate, and the sliding rods are fixedly connected to the L-shaped block. An anti-detachment block is fixedly connected to the top of the rectangular rod.

[0013] Preferably, a top plate is fixedly connected to the top of the main compartment, an installation strip is fixedly connected to the top plate, a dovetail groove is provided on the front of the installation strip, a dovetail strip is slidably arranged in the dovetail groove, and a filter plate is fixedly connected to the front of the dovetail strip.

[0014] Preferably, a transparent window is embedded and fixedly installed on the front of the main compartment to facilitate staff observation of the interior of the main compartment.

[0015] Compared with the prior art, the advantages of this utility model are as follows:

[0016] This invention, through the arrangement of an electric drive assembly, a reset assembly, and a cam, allows power to be transmitted to a rotating rod via meshing bevel gears one and two after the motor is turned on. This rotation drives the cam to rotate, and under the combined action of the cam profile and the spring force, the liquid storage box drives the workpiece in a vertical reciprocating motion. This reciprocating lifting motion not only replaces manual operation, saving time and effort, but also accelerates the penetration rate of the anti-oxidation solution through periodic oscillation, thereby effectively shortening the process cycle and improving the efficiency of anti-oxidation treatment of the workpiece. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the overall structure of an anti-oxidation etching post-treatment device proposed in this utility model;

[0018] Figure 2 for Figure 1 Enlarged view of point A in the middle;

[0019] Figure 3 This is a schematic diagram of the cam in an anti-oxidation etching post-treatment device proposed in this utility model.

[0020] In the picture:

[0021] 1. Main position;

[0022] 2. Liquid reservoir; 21. Rotating rod; 22. Cam; 23. Motor; 24. Bevel gear one; 25. Bevel gear two; 26. Pressure plate; 27. L-shaped block; 28. Rectangular rod; 29. ​​Spring;

[0023] 3. Vertical plate; 31. Screw; 32. Slide rod; 33. Anti-detachment block;

[0024] 4. Top plate; 41. Mounting strip; 42. Dovetail strip;

[0025] 5. Transparent window; 6. Filter plate. Detailed Implementation

[0026] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0027] Reference Figures 1-3 An anti-oxidation etching post-treatment device includes a main chamber 1, a liquid storage box 2 that slides back and forth on the vertical inner wall of the main chamber 1, a rotating rod 21 that is rotatably connected inside the main chamber 1, and a pair of cams 22 that are fixedly sleeved on the rotating rod 21, with the wheel surface of the cams 22 in contact with the bottom surface of the liquid storage box 2.

[0028] Also includes:

[0029] The electric drive assembly drives the rotating rod 21 to rotate;

[0030] The reset component resets the liquid storage box 2 after it moves vertically downwards in a stable manner.

[0031] The electric drive assembly includes a motor 23 fixedly connected to the bottom of the inner cavity of the main compartment 1. A bevel gear 24 is fixedly connected to the output end of the motor 23, and a bevel gear 25 is fixedly sleeved on the rotating rod 21. The bevel gear 24 and the bevel gear 25 mesh. Through the meshing transmission of the bevel gear 24 and the bevel gear 25, the rotating rod 21 is driven to rotate smoothly.

[0032] The reset assembly includes a pair of pressure plates 26 that contact the top of the liquid reservoir 2. An L-shaped block 27 is positioned above the pressure plates 26. A rectangular rod 28 is fixedly connected to the top of the pressure plates 26. The rectangular rod 28 slides vertically through the L-shaped block 27. A spring 29 is fitted onto the rectangular rod 28, and both ends of the spring 29 are fixedly connected to the pressure plates 26 and the L-shaped block 27, respectively. The spring 29 provides a stable rebound force, allowing the liquid reservoir 2 to stably reset vertically downwards.

[0033] A vertical plate 3 is fixedly connected to the top of the main compartment 1. A screw 31 is threaded onto the vertical plate 3, and the screw 31 is threaded into the vertical plate 3. The position of the L-shaped block 27 can be manually adjusted so that the pressure plate 26 is away from the liquid storage box 2, making it easier to remove the liquid storage box 2 and pour out the liquid inside. One end of the screw 31 is rotatably connected to the L-shaped block 27. A pair of sliding rods 32 are slidably connected to the vertical plate 3. The sliding rods 32 ensure the horizontal movement of the L-shaped block 27 is stable and prevents it from tilting. The sliding rods 32 and the L-shaped block 27 are fixedly connected. An anti-detachment block 33 is fixedly connected to the top of the rectangular rod 28. The anti-detachment block 33 is designed to prevent the rectangular rod 28 from falling vertically off the L-shaped block 27.

[0034] A top plate 4 is fixedly connected to the top of the main compartment 1. An installation strip 41 is fixedly connected to the top plate 4. A dovetail groove is opened on the front of the installation strip 41, and a dovetail strip 42 is slidably arranged in the dovetail groove. A filter plate 6 is fixedly connected to the front of the dovetail strip 42. After the workpiece is placed on the filter plate 6, the filtered residual medicine flows back to the storage box 2 through the filter plate 6, reducing the waste of medicine.

[0035] A transparent window 5 is embedded and fixedly installed on the front of the main compartment 1, allowing staff to observe the interior of the main compartment 1 in real time. The transparent window 5 allows staff to observe the internal processing status in real time.

[0036] The functional principle of this utility model can be explained through the following operation methods:

[0037] Initial preparation: Place the etched workpiece in the reservoir 2 and inject the anti-oxidation solution. Rotate the screw 31 to push the L-shaped block 27 to move horizontally along the slide bar 32, so that the pressure plate 26 is adjusted to be directly above the reservoir 2, and the pressure plate 26 and the reservoir 2 are released. At this time, the spring 29 is compressed and stores energy.

[0038] Starting device: Turn on motor 23, drive rotating rod 21 to rotate through bevel gear 1 24 and bevel gear 25 meshing, and cam 22 rotates accordingly; when cam 22 contacts the bottom of liquid storage box 2 at its high point, it pushes it to rise along the inner wall of main compartment 1; at the low point, spring 29 releases its elastic force, and under the combined action of spring and the weight of liquid storage box 2 itself, liquid storage box 2 moves down to reset, forming a reciprocating lifting motion.

[0039] Dynamic processing: The lifting and lowering of the liquid storage box 2 creates turbulence in the liquid, enhancing the etching effect of the oxide layer on the workpiece surface.

[0040] Draining operation: After the treatment is completed, push the dovetail strip 42 horizontally along the dovetail slide to move the filter plate 6 to the top of the liquid storage box 2. After the workpiece is taken out, place it on the filter plate 6 to drain the residual liquid.

[0041] The entire process combines automatic mechanical lifting with manual adjustment to ensure efficient anti-oxidation treatment of the etched workpiece.

[0042] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. An anti-oxidation post-etch treatment device comprising a main chamber (1), characterized in that, A liquid storage box (2) slides back and forth on the vertical inner wall of the main compartment (1). A rotating rod (21) is rotatably connected inside the main compartment (1). A pair of cams (22) are fixedly sleeved on the rotating rod (21). The wheel surface of the cams (22) is in contact with the bottom surface of the liquid storage box (2). Also includes: An electric drive assembly that drives the rotating rod (21) to rotate; The reset component resets the liquid storage box (2) after it moves vertically downwards in a stable manner.

2. The post-etch oxidation prevention treatment apparatus according to claim 1, wherein The electric drive assembly includes a motor (23) fixedly connected to the bottom of the inner cavity of the main compartment (1). The output end of the motor (23) is fixedly connected to a bevel gear (24), and a bevel gear (25) is fixedly sleeved on the rotating rod (21). The bevel gear (24) and the bevel gear (25) mesh with each other.

3. The post-etch treatment apparatus for preventing oxidation according to claim 1, wherein The reset assembly includes a pair of pressure plates (26) that contact the top of the liquid storage box (2). An L-shaped block (27) is provided above the pressure plate (26). A rectangular rod (28) is fixedly connected to the top of the pressure plate (26). The rectangular rod (28) slides vertically through the L-shaped block (27). A spring (29) is sleeved on the rectangular rod (28). The two ends of the spring (29) are fixedly connected to the pressure plate (26) and the L-shaped block (27) respectively.

4. The post-etch oxidation prevention treatment apparatus according to claim 3, wherein A vertical plate (3) is fixedly connected to the top of the main compartment (1). A screw (31) is threaded onto the vertical plate (3), and one end of the screw (31) is rotatably connected to the L-shaped block (27). A pair of sliding rods (32) are slidably connected to the vertical plate (3), and the sliding rods (32) are fixedly connected to the L-shaped block (27). An anti-detachment block (33) is fixedly connected to the top of the rectangular rod (28).

5. The post-etch oxidation prevention treatment apparatus according to claim 1, wherein The main compartment (1) is fixedly connected to a top plate (4), and an installation strip (41) is fixedly connected to the top plate (4). The front of the installation strip (41) is provided with a dovetail groove, and a dovetail strip (42) is slidably arranged in the dovetail groove. A filter plate (6) is fixedly connected to the front of the dovetail strip (42).

6. The post-etch oxidation prevention treatment apparatus according to claim 1, wherein The main compartment (1) has a transparent window (5) embedded and fixedly installed on its front side, which facilitates staff to observe the interior of the main compartment (1).

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