Full-automatic high-pressure mercury lamp degumming machine

Abstract

This fully automatic high-pressure mercury lamp degumming machine belongs to the field of wafer manufacturing auxiliary equipment technology. It includes a PLC, negative pressure pump, chassis, electric lifting feeder, and air compressor. It also features a handling mechanism, a feeding mechanism, a transfer mechanism, and a high-pressure mercury lamp mechanism. The PLC, negative pressure pump, electric lifting feeder, air compressor, handling mechanism, feeding mechanism, transfer mechanism, high-pressure mercury lamp mechanism, and chassis are all installed together. Under the combined action of these mechanisms, the feeding mechanism, in coordination with the transfer mechanism and handling mechanism, can cyclically and sequentially place the wafers requiring degumming onto the upper position of the ultraviolet high-pressure mercury lamp. Simultaneously, after degumming, the previously degummed wafer is returned to its corresponding feeding slot on the electric lifting feeder. Since no manual operation is required throughout the process, it provides convenience for workers, improves work efficiency, and saves production costs. In summary, this invention has good application prospects.

Description

Technical Field

[0001] This utility model relates to the field of wafer production auxiliary equipment technology, and in particular to a fully automatic high-pressure mercury lamp degumming machine. Background Technology

[0002] A wafer is a silicon wafer used to fabricate silicon semiconductor circuits. Its raw material is silicon. In the production process, high-purity polycrystalline silicon is dissolved and doped with silicon seed crystals, then slowly pulled out to form a cylindrical single silicon ingot. After grinding, polishing, and slicing, the silicon ingot forms a silicon wafer. Wafers then undergo further processes such as dicing, bonding, and packaging. Before these processes, backthinning is required to reduce the package mounting height, thereby reducing the chip package size, improving the chip's thermal diffusion efficiency, electrical performance, mechanical properties, and reducing the amount of dicing work.

[0003] Before dicing, bonding, and packaging, a protective film is attached to the underside of the wafer to ensure stable production in the next process. The wafer's lower end is placed inside the inner ring of a processing metal ring (the inner diameter of the processing metal ring is slightly larger than the outer diameter of the wafer; the wafer is removed from the ring before the next processing step). This protective film is peeled off before the next production step, allowing for dicing, bonding, and packaging. In practice, a high-pressure mercury lamp UV debonding machine is used to remove the protective film before each of these processes. Specifically, the high-pressure mercury lamp emits ultraviolet light to reduce the adhesiveness of the UV protective film, making it easier to remove in subsequent processes. Existing high-pressure mercury lamp degumming machines are generally equipped with an electric lifting feeder (the feed frame has multiple spaced feed compartments from top to bottom, with each wafer placed in each compartment; the rear end of each compartment has an opening, and the rear end of the metal ring supporting the wafer is located outside the compartment, allowing workers to easily remove the wafers to be degummed; the lower end of the feed frame rests on the top plate of the electric lifting feeder). The top plate of the electric lifting feeder automatically pushes multiple wafers stacked from bottom to top, maintaining a constant height for the wafers at the top of the feeder, facilitating workers to remove the wafers to the degumming machine for the degumming process. Although existing high-pressure mercury lamp UV degumming machines meet production needs to some extent, they still have the following technical problems due to structural and functional limitations. Specifically, the processes of removing wafers from the electric lifting feeder and placing them in the degumming machine for UV irradiation for degumming, as well as returning the wafers to their original feed slots on the electric lifting feeder after degumming, all require manual operation by staff. This causes inconvenience and increases production costs. Therefore, it is essential to provide a degumming machine that reduces labor intensity and production costs. Utility Model Content

[0004] To overcome the shortcomings of existing degumming machines used in wafer manufacturing, which are limited by structure and function as described in the background art, this utility model provides a fully automatic high-pressure mercury lamp degumming machine based on existing mature high-pressure mercury lamps, electric lifting feeders, PLC or host computer technology, etc., which can cyclically transfer wafers with metal rings from relevant positions to the wafer degumming station for degumming, and simultaneously place the degummed wafer back into the corresponding feed cell of the electric lifting feeder. Since no manual operation is required throughout the process, it brings convenience to the staff, improves work efficiency, and saves production costs.

[0005] The technical solution adopted by this utility model to solve its technical problem is: This fully automatic high-pressure mercury lamp degumming machine includes a PLC, a negative pressure pump, a chassis, an electric lifting feeder, and an air compressor. It also features a conveying mechanism, a feeding mechanism, a transfer mechanism, and a high-pressure mercury lamp mechanism. The chassis has a movable door on one side of its front end, and the lower end of the electric lifting feeder is fixedly installed on the other side of the front of the chassis. The conveying mechanism has at least two sets, each set including a first electric lead screw linear slide, a first cylinder, vacuum nozzles, and a fixing plate. The cylinder body of the first cylinder is fixedly installed on the front side of the sliding block of the first electric lead screw linear slide, and the rear side of the fixing plate is fixedly installed on the lower end of the piston rod of the first cylinder. Support plates are fixedly installed on the front and rear sides of the fixing plate. Multiple vacuum nozzles are included. Multiple vacuum nozzles are fixedly installed on the outside of the support plate. The housings of the first electric lead screw linear slides of the two sets of conveying mechanisms are fixedly installed on the rear side of the machine box at intervals. The transfer mechanism includes a second electric lead screw linear slide, a fixed plate, a movable plate, and a linear slide rail. The housing of the second electric lead screw linear slide and the guide rail of the linear slide rail are fixedly installed on the upper ends of both sides of the fixed plate. The fixed plate is fixedly installed on one side of the machine box. The movable plate, the sliding block of the electric lead screw linear slide, and the sliding block of the linear slide rail are fixedly installed together. The movable plate has an opening. The high-pressure mercury lamp mechanism is installed on the upper and lower ends of the fixed plate, and the feeding mechanism is installed on the other side of the machine box.

[0006] Furthermore, the feeding compartment of the electric lifting feeder is located on the rear side, and there is a material receiving port on the other side of the front end of the machine box.

[0007] Furthermore, the lower end of the vacuum nozzle of the upper set of conveying mechanisms is higher than the upper end of the vacuum nozzle of the lower set of conveying mechanisms.

[0008] Furthermore, the outer diameter of the opening is larger than the outer diameter of the lower end of the metal ring on which the wafer is mounted and smaller than the outer diameter of the upper end of the metal ring.

[0009] Furthermore, the high-pressure mercury lamp mechanism includes an ultraviolet high-pressure mercury lamp, a lampshade, a cylinder, a shield, a second cylinder, and a limiting frame. The fixed plate has an opening, and there are at least two limiting frames. The lower end of one limiting frame and the upper end of the other limiting frame are respectively fixedly installed at the upper and lower ends of the opening. The lampshade has a light-transmitting opening at the upper end. One side of the upper part of the lampshade is rotatably installed at the rear end of an opening at the lower end. The high-pressure mercury lamp is fixedly installed inside the lampshade. The other side of the upper part of the lampshade is fixedly installed at the front end of an opening at the lower end. One side of the upper part of the lower limiting frame has a guide opening. The rear end of the shield slides within the guide opening. The piston rod of the second cylinder is fixedly installed together with the front side of the shield. The cylinder barrel of the second cylinder is fixedly installed at the lower front end of the fixed plate.

[0010] Furthermore, the outer diameter of the shielding plate is larger than the outer diameter of the opening of the fixing plate and smaller than the inner diameter of the limiting frame.

[0011] Furthermore, the feeding mechanism includes a support plate, a limiting groove plate, a third electric lead screw linear slide, and a finger-clamping cylinder. The support plate is fixedly installed on the other rear side of the machine housing. The two limiting groove plates are respectively fixedly installed on both ends of the support plate. The housing of the third electric lead screw linear slide is fixedly installed on the side end of the support plate. The sliding block of the third electric lead screw linear slide is fixedly installed with a connecting plate. The upper end of the cylinder body of the finger-clamping cylinder is fixedly installed on one side end of the connecting plate.

[0012] Compared with existing technologies, the advantages of this invention are as follows: Based on existing mature high-pressure mercury lamps, electric lifting feeders, PLC or host computer technologies, and with the joint action of related mechanisms, the feeding mechanism, in conjunction with the transfer mechanism and handling mechanism, can cyclically and sequentially place the wafers requiring degumming at the upper position of the ultraviolet high-pressure mercury lamp. Simultaneously with degumming, the previously degummed wafer can be returned to its corresponding feeding slot on the electric lifting feeder. Since no manual operation is required throughout the process, it provides convenience for workers, improves work efficiency, and saves production costs. In summary, this invention has good application prospects. Attached Figure Description

[0013] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0014] Figure 1 This is a schematic diagram of the overall three-dimensional structure of this utility model.

[0015] Figure 2 This is a schematic diagram of the overall three-dimensional structure of this utility model excluding the chassis.

[0016] Figure 3 This is a bottom view structural diagram of the transfer mechanism and high-pressure mercury lamp mechanism of this utility model.

[0017] Figure 4 This is a top-view three-dimensional structural diagram of the transfer mechanism and high-pressure mercury lamp mechanism of this utility model.

[0018] Figure 5 This is a side view schematic diagram of the transfer mechanism and high-pressure mercury lamp mechanism of this utility model. Detailed Implementation

[0019] Figure 1 , 2 As shown in Figures 3, 4, and 5, the fully automatic high-pressure mercury lamp degumming machine includes a PLC (not shown in the figure), a negative pressure pump (not shown in the figure), a chassis 1, an electric lifting feeder 2, and an air compressor (not shown in the figure). It also has a conveying mechanism, a feeding mechanism 4, a transfer mechanism 5, and a high-pressure mercury lamp mechanism 6. The front left end of the chassis 1 has a hinged movable door 101 (opening the door allows for internal maintenance). The lower end of the electric lifting feeder 2 is fixedly installed on the front right end of the chassis 1. There are two identical sets of conveying mechanisms. Each set includes a first electric lead screw linear slide 31, a first cylinder 32, a vacuum nozzle 33, and a fixed plate 34. The cylinder body of cylinder 32 is vertically fixed to the front side of the sliding block of the first electric screw linear slide 31. The rear side of the fixing plate 34 is horizontally fixed to the lower end of the piston rod of the first cylinder 32. A support plate 341 is horizontally fixed to the front and rear sides of the fixing plate 34 respectively. There are four vacuum nozzles 33. The outer ends of the four vacuum nozzles 33 are fixed to the outer sides of the left and right ends of the two support plates 341 respectively. The rear end of the housing of the first electric screw linear slide 31 of the two sets of conveying mechanisms is horizontally distributed and fixed to the middle of the rear side of the machine box 1 at a vertical distance. The exhaust pipes of the four vacuum nozzles 33 of the two sets of conveying mechanisms are divided into two groups, and negative... The intake ends of the two intake and exhaust solenoid valves of the compressor are connected in parallel via high-pressure hoses of a certain strength. The intake and exhaust solenoid valves at the upper and lower ends of the cylinder barrel 32 of the first cylinder of the two sets of conveying mechanisms, the intake and exhaust solenoid valves at the left and right ends of the cylinder barrel of the first electric screw slide 31, and the exhaust ends of the first and second, third, fourth, fifth, sixth, seventh, and eighth solenoid valves of the air compressor's air tank are connected via high-pressure hoses. The transfer mechanism includes a second electric screw linear slide 51, a fixed plate 52, a movable plate 53, and a non-powered linear slide rail 54. The lower end of the housing of the second electric screw linear slide 51 and the guide rod of the linear slide rail 54 are also connected. The lower ends are fixedly installed on the upper ends of the left and right sides of the fixed plate 52 at intervals. The lower ends of the fixed plate 52 are fixedly installed on the middle left side of the machine housing 1. The movable plate 53 is fixedly installed on the right side of the sliding block of the second electric screw linear slide table 51 and the left side of the sliding block of the linear slide rail 54 (for guidance) on both sides. There is an opening 531 in the middle of the movable plate 53. The inlet and outlet solenoid valves of the cylinder of the second electric screw slide table 51 and the exhaust ends of the ninth and tenth solenoid valves of the air compressor's air tank are connected via high-pressure hoses. The high-pressure mercury lamp mechanism 6 is installed in the middle of the fixed plate 52, and the feeding mechanism 4 is installed on the right rear end of the machine housing. The PLC is installed in the electrical control box, and the negative pressure pump and air compressor are installed at the lower end of the machine housing.

[0020] Figure 1 、 2As shown in Figures 3, 4, and 5, the feeding frame 21 of the electric lifting feeder has multiple spaced feeding compartments 211 from top to bottom. Each wafer is placed in each feeding compartment 211. The rear end of the feeding compartment 211 has an opening. The rear end of the metal ring that carries the wafer is located outside the rear end of the feeding compartment 211. The lower end of the feeding frame is placed on the upper end of the moving plate (top plate) of the electric lifting feeder. The feeding compartments 211 are located on the rear side. There is a rectangular pick-up port 102 in the middle of the front right end of the chassis 1, which is larger than the outer diameter of the feeding compartment. The lower end of the pick-up port 102 and the upper end of the feeding compartment 211 of the feeding frame 21 are horizontal. The lower end of the vacuum nozzle 33 of the upper set of conveying mechanisms is higher than the upper end of the vacuum nozzle 33 of the lower set of conveying mechanisms. The outer diameter of the opening 531 is larger than the lower outer diameter of the metal ring 7 that holds the wafer but smaller than the upper outer diameter of the metal ring 7. The high-pressure mercury lamp mechanism includes an ultraviolet high-pressure mercury lamp 61, a lamp cover 62, a shielding plate 63, a second cylinder 64, and a rectangular hollow limiting frame 65. A rectangular opening 521 is located in the center of the fixing plate. There are two limiting frames 65; the lower end of one limiting frame 65 and the upper end of the other are fixedly installed around the upper and lower ends of the opening 521, respectively. A rectangular light-transmitting opening 621 is located in the center of the upper end of the lamp cover 62. The upper rear ends of the lamp cover 62 are rotatably mounted on the lower end of the fixing plate 52 at the rear end of the lower opening 521. The high-pressure mercury lamp 61 is horizontally fixed inside the lamp cover 62. The upper front end of the lamp cover 62 is fixedly mounted to the lower opening by bolts and nuts. At the lower end of the fixing plate at the front position (the bolts and nuts can be removed after the high-pressure mercury lamp 61 is damaged, exposing the mercury lamp 61 outside the lower limiting frame for easy replacement through the light-transmitting opening 621), there is a rectangular guide opening 651 at the upper front of one of the lower limiting frames 65. The rear end of the shielding plate 63 slides within the guide opening 651. The piston rods of the two second cylinders 64 and the left and right ends of the front side of the shielding plate 63 are fixedly installed together. The upper ends of the cylinder barrels of the two second cylinders 64 are fixedly installed on the left and right sides of the lower front end of the fixing plate 51. The exhaust solenoid valves of the front and rear ends of the cylinder barrels of the second cylinders 64 and the exhaust ends of the eleventh and twelfth solenoid valves of the air compressor's air tank are connected via high-pressure hoses. When the lamp cover 62 is in a horizontal structure, the lower ends of the upper and lower limiting frames 65 are in a sealed structure. The outer diameter of the shielding plate 63 is larger than the outer diameter of the opening 521 of the fixing plate and smaller than the inner diameter of the lower limiting frame 65.The feeding mechanism includes a support plate 41, an "L"-shaped limiting groove plate 42, a third electric lead screw linear slide 43, and a finger-clamping cylinder 44. The support plate 41 is fixedly installed in the middle of the right rear side of the machine housing 1. The two limiting groove plates 42 are fixedly installed face-to-face on the left and right ends of the support plate 41, respectively. The lower end of the housing of the third electric lead screw linear slide 43 is longitudinally fixedly installed on the right side of the support plate 41. A "˥"-shaped connecting plate 45 is fixedly installed on the right side of the sliding block of the third electric lead screw linear slide 43. The upper end of the cylinder body of the finger-clamping cylinder 44 is longitudinally fixedly installed on the lower left end of the connecting plate 45, and the two fingers of the finger-clamping cylinder are fixedly attached to it. The finger clamping cylinder 44 and the material inlet 102 are located vertically on the front side, and are on the same horizontal plane. The inlet and outlet solenoid valves at the front and rear ends of the cylinder of the third electric screw slide 43, the inlet and outlet solenoid valves at the upper and lower ends of the cylinder of the finger clamping cylinder 44, and the exhaust ends of the thirteenth, fourteenth, fifteenth, and sixteenth solenoid valves of the air compressor storage tank are connected by high-pressure hoses. The power input terminals of the first, second, and third electric screw slides, the first and second cylinders, and the inlet and outlet solenoid valves of the finger clamping cylinder, the electric lifting feeder, the high-pressure mercury lamp, and the multi-channel control power output terminals of the PLC or host computer are connected by wires.

[0021] Figure 1 , 2As shown in Figures 3, 4, and 5, the working process of this new type is as follows: (1): The PLC controls the third electric screw linear slide 43 to work, and its sliding block drives the finger-clamping cylinder 44 to move to the front end and then stops working; the PLC controls the finger-clamping cylinder 44 to work, and the front ends of two fingers (the distance between them is less than the distance between the two feeding grids) clamp the metal ring of the wafer in the upper feeding grid 211 of the feeding frame 21 through the feeding port 102; the PLC controls the third electric screw linear slide 43 to work, and its sliding block drives the finger-clamping cylinder 44 to clamp the metal ring along the limiting groove plate 42 (guided action) to the rear end and then stops working; the PLC controls the finger-clamping cylinder to stop clamping the rear end of the metal ring, and the third electric screw linear slide 43 controls it to move backward a certain distance. (2): The first electric lead screw linear slide 31 of the lower set of conveying mechanism of PLC control box works, and its sliding block drives the lower set of first cylinder 32 and four vacuum nozzles 33 to move to the right end and then stop working; the first cylinder 32 of the lower set of conveying mechanism of PLC control box works, and the piston rod of the first cylinder 32 drives the four vacuum nozzles 33 to move to the lower end and then stop working, and the lower part of the four vacuum nozzles 33 contacts the upper part of the metal ring 7. (3): The PLC controls the four vacuum nozzles 33 of the lower set of conveying mechanism to be in a negative pressure state to suck up the metal ring; the PLC controls the first cylinder 32 of the lower set of conveying mechanism to work, the piston rod of the first cylinder 32 drives the four vacuum nozzles to move to the upper end and then stops working; the PLC controls the first electric screw linear slide 31 of the lower set of conveying mechanism to work, its sliding block drives the lower set of first cylinder 32 and the four vacuum nozzles to move to the left end and then stops working (at the same time, the PLC controls the electric lifting feeder to work, its second feed grid 211 from top to bottom rises to the same height as the feeding port (same as the above steps (1)-(3), the PLC will control the four vacuum nozzles of the upper set of conveying mechanism to take out the second wafer from top to bottom in the feed frame, and then move to the upper end of the opening and then temporarily stop working). (4) PLC The PLC controls the operation of the first cylinder 32 of the lower set of conveying mechanisms at the control box. The piston rod of the first cylinder 32 drives the four vacuum nozzles to move to the lower end and then stops working. The PLC no longer controls the four vacuum nozzles of the lower set of conveying mechanisms to be in a negative pressure state and no longer sucks up the metal ring. The metal ring 7 and the wafer fall onto the opening 531 of the movable plate 53. The PLC controls the operation of the second electric lead screw linear slide 51. Its sliding block drives the metal ring 7 and the wafer to move to the upper end of the opening 521 of the fixed plate and then stops working. The PLC controls the operation of the two second cylinders 64. Their piston rods drive the shielding plate 63 to move forward. The shielding plate 63 no longer blocks the opening of the fixed plate 521 (the PLC controls the ultraviolet high-pressure mercury lamp to be constantly lit) and then stops working. In this way, the ultraviolet light emitted by the high-pressure mercury lamp will act on the film at the lower end of the wafer 7 from bottom to top to de-adhere it (generally within a few minutes).(5): After the glue is removed, the PLC controls the two second cylinders 64 to work, and their piston rods drive the baffle plate 63 to move backward. The baffle plate 63 stops working after blocking the opening of the fixing plate 521 (to prevent ultraviolet rays from shining out and affecting the health of personnel); the PLC controls the first cylinder 32 of the set of conveying mechanisms at the lower end of the chassis to work, and the piston rod of the first cylinder 32 drives the four vacuum nozzles to move to the lower end and then stops working. The lower part of the four vacuum nozzles 33 at the lower end contacts the upper part of the metal ring; the PLC controls the four vacuum nozzles of the set of conveying mechanisms at the lower end to be in a negative pressure state to suck up the metal ring; the PLC controls the first cylinder 32 of the set of conveying mechanisms at the lower end of the chassis to work, and the first cylinder Piston rod 32 drives four vacuum nozzles and a metal ring to move to the upper end and then stops working; the first electric lead screw linear slide 31 of the lower set of conveying mechanisms of the PLC control box works, and its sliding block drives the first cylinder 32 of the lower set of conveying mechanisms and four vacuum nozzles to move to the right end and then stops working; the first cylinder 32 of the lower set of conveying mechanisms of the PLC control box works, and the piston rod of the first cylinder 32 drives four vacuum nozzles to move to the lower end and then stops working, with the metal ring located at the upper rear of the two limiting slot plates; the PLC no longer controls the four vacuum nozzles at the lower end to be in a negative pressure state and no longer sucks up the metal ring, and the metal ring 7 and the wafer fall to the upper rear of the two limiting slot plates. (6): The PLC controls the finger-clamping cylinder 44 to work. The two fingers clamp the metal ring 7 at the rear middle of the upper part of the two limiting slot plates and then stop working. (At the same time, the PLC controls the electric lifting feeder to work. The first feeding grid 21 from top to bottom descends to the same height as the feeding port. The PLC controls the third electric screw linear slide 43 to work. Its sliding block drives the finger-clamping cylinder 44 to clamp the metal ring along the limiting slot plate 42 (guided action) to the front end and then stops working. After de-adhesion, the wafer and the metal ring enter the upper feeding grid 21 of the feeding frame from back to front. At the same time that the first electric screw linear slide 31 of the lower set of conveying mechanism drives the wafer to move to the right end, the same as the above process, the first electric screw linear slide 31 of the upper set of conveying mechanism also... The second wafer undergoes debonding under the combined action of the transfer mechanism and the high-pressure pump lamp mechanism. Simultaneously, a lower set of first electric lead screw linear slides 31 moves the third wafer to the debonding station, while an upper set of first electric lead screw linear slides 31 moves the second debonded wafer to the right and into the second feeding slot. Through the above, with the combined action of the two handling mechanisms, the transfer mechanism, and the feeding mechanism, this new device can cyclically and sequentially place the wafers requiring debonding onto the upper position of the ultraviolet high-pressure mercury lamp. Simultaneously with debonding, the previously debonded wafer can be returned to its corresponding feeding slot on the electric lifting feeder. Since no manual operation is required throughout the process, it provides convenience for workers, improves work efficiency, and saves production costs.It should be noted that the PLC, cylinders, electric lead screw linear slides, vacuum nozzles, etc. involved in this invention are all mature technologies (including the working mode of PLC-controlled cylinders, electric lead screw linear slides, vacuum pumps, vacuum nozzles, etc., and solenoid valves). This application does not elaborate on the above technical solutions, nor does it provide any protection for the above technical solutions. This application protects the above components and application solutions, and the technical points such as the cyclic debonding of wafers.

[0022] Those skilled in the art should understand that although this specification describes embodiments, the embodiments do not necessarily contain only one independent technical solution. This way of describing the specification is only for clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in the embodiments can also be appropriately combined to form other embodiments that can be understood by those skilled in the art. Therefore, the scope of protection of this invention is defined by the claims.

Claims

1. A fully automatic high-pressure mercury lamp degumming machine, comprising a PLC, a negative pressure pump, a chassis, an electric lifting feeder, and an air compressor, characterized in that, It also includes a conveying mechanism, a feeding mechanism, a transfer mechanism, and a high-pressure mercury lamp mechanism; the front side of the machine housing has a movable door, and the lower end of the electric lifting feeder is fixedly installed on the other side of the front of the machine housing; the conveying mechanism has at least two sets, each set of conveying mechanism includes a first electric lead screw linear slide and a first cylinder, a vacuum nozzle, and a fixing plate. The cylinder body of the first cylinder is fixedly installed on the front side of the sliding block of the first electric lead screw linear slide, and the rear side of the fixing plate is fixedly installed on the lower end of the piston rod of the first cylinder. Support plates are fixedly installed on the front and rear sides of the fixing plate, respectively. There are multiple vacuum nozzles, and the multiple vacuum nozzles are fixedly installed on the outside of the support plates. On one side, the housings of the first electric lead screw linear slides of the two sets of conveying mechanisms are fixedly installed at intervals on the rear side of the machine box; the transfer mechanism includes a second electric lead screw linear slide, a fixed plate, a movable plate, and a linear slide rail. The housing of the second electric lead screw linear slide and the guide rail of the linear slide rail are fixedly installed on the upper ends of both sides of the fixed plate. The fixed plate is fixedly installed on one side of the machine box. The movable plate, the sliding block of the electric lead screw linear slide, and the sliding block of the linear slide rail are fixedly installed together. The movable plate has openings; the high-pressure mercury lamp mechanism is installed on the upper and lower ends of the fixed plate, and the feeding mechanism is installed on the other side of the machine box.

2. The fully automatic high-pressure mercury lamp debonder according to claim 1, characterized in that, The feeding compartment of the electric lifting feeder is located on the rear side, and the material receiving port is on the other side of the front of the machine.

3. The fully automatic high-pressure mercury lamp debonder according to claim 1, characterized in that, The lower end of the vacuum nozzle of the upper set of conveying mechanisms is higher than the upper end of the vacuum nozzle of the lower set of conveying mechanisms.

4. The fully automatic high-pressure mercury lamp cracker according to claim 1, characterized in that, The outer diameter of the opening is larger than the outer diameter of the lower end of the metal ring on which the wafer is mounted, but smaller than the outer diameter of the upper end of the metal ring.

5. The fully automatic high-pressure mercury lamp cracker according to claim 1, characterized in that, The high-pressure mercury lamp mechanism includes an ultraviolet high-pressure mercury lamp, a lampshade, a cylinder, a shield, a second cylinder, and a limiting frame. The fixed plate has an opening, and there are at least two limiting frames. The lower end of one limiting frame and the upper end of the other limiting frame are fixedly installed at the upper and lower ends of the opening, respectively. The upper end of the lampshade has a light-transmitting opening, and one side of the upper part of the lampshade is rotatably installed at the rear end of an opening at the lower end. The high-pressure mercury lamp is fixedly installed inside the lampshade, and the other side of the upper part of the lampshade is fixedly installed at the front end of an opening at the lower end. One side of the upper part of the lower limiting frame has a guide opening, and the rear end of the shield slides within the guide opening. The piston rod of the second cylinder is fixedly installed together with the front side of the shield, and the cylinder barrel of the second cylinder is fixedly installed at the lower front end of the fixed plate.

6. The fully automatic high-pressure mercury lamp degumming machine according to claim 5, characterized in that, The outer diameter of the baffle plate is larger than the outer diameter of the opening of the fixed plate, but smaller than the inner diameter of the limiting frame.

7. The fully automatic high-pressure mercury lamp degumming machine according to claim 1, characterized in that, The feeding mechanism includes a support plate, a limiting groove plate, a third electric lead screw linear slide, and a finger-clamping cylinder. The support plate is fixedly installed on the other rear side of the machine box. The two limiting groove plates are fixedly installed on both ends of the support plate. The housing of the third electric lead screw linear slide is fixedly installed on the side end of the support plate. The sliding block of the third electric lead screw linear slide is fixedly installed with a connecting plate. The upper end of the cylinder body of the finger-clamping cylinder is fixedly installed on one side end of the connecting plate.

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