Graphite boat card point, boat sheet and graphite boat

Abstract

This application provides a graphite boat locking point, a boat sheet, and a graphite boat, relating to the technical field of solar cells. The graphite boat locking point can be installed on the boat sheet. The graphite boat locking point includes a locking point and an insertion locking point. The locking point has a locking groove. The insertion locking point includes a connected insertion locking point body and a snap-fit ​​member, which is used to embed into the locking groove and engage with the locking point. The locking point includes a base plate and an extension, the extension surrounding and connecting to the base plate, and the extension and the base plate forming the locking groove. A locking pin hole is formed on the base plate, penetrating the base plate along its thickness direction. The end of the snap-fit ​​member away from the insertion locking point body is used to embed into the locking pin hole and engage with the locking point. The embodiments of this application improve the ease of installation and disassembly of the locking point and insertion locking point, thereby improving the ease of installation and disassembly of the graphite boat locking point and boat sheet, eliminating the need for mechanical equipment, saving time and effort, and reducing costs.

Description

Technical Field

[0001] Embodiments of this application relate to the technical field of solar cells, and more particularly to a graphite boat chuck, a boat sheet, and a graphite boat. Background Technology

[0002] The graphite boat consists of a boat sheet, which in turn includes a boat blade and graphite boat locking points. The graphite boat locking points can be installed on the boat blade.

[0003] Typically, the boat leaf has mounting holes, requiring mechanical equipment to press the graphite boat locking points to install them into the mounting holes. This operation is inconvenient and affects the ease of installation between the graphite boat locking points and the boat leaf. Utility Model Content

[0004] The embodiments of this application disclose a graphite boat locking point, a boat sheet, and a graphite boat, which can improve the ease of installation between the graphite boat locking point and the boat sheet.

[0005] On one hand, embodiments of this application provide a graphite boat locking point. The graphite boat locking point is used for a boat sheet. The graphite boat locking point includes a locking point and an insertion locking point. The locking point has a locking groove. The insertion locking point includes a connected insertion locking point body and a snap-fit ​​member. The snap-fit ​​member is used to embed into the locking groove and engage with the locking point.

[0006] In some possible implementations, the locking point includes a base plate and an extension, the extension surrounding and connecting to the base plate, and the extension and base plate forming a locking groove. A locking pin hole is formed on the base plate, penetrating the base plate along its thickness. The end of the locking member furthest from the locking point body is used to embed into the locking pin hole and engage with the base plate.

[0007] In some possible implementations, the latching member includes a first latching member and a second latching member, which are spaced apart and connected to the locking point body respectively. The locking pin holes include a first locking pin hole and a second locking pin hole, which are spaced apart. The end of the first latching member furthest from the locking point body is designated as a first end, which is used to engage with the first locking pin hole and latch with the base plate. The end of the second latching member furthest from the locking point body is designated as a second end, which is used to engage with the second locking pin hole and latch with the base plate.

[0008] In some possible implementations, the locking point further includes a support member located within the locking groove and connected to the base plate. The extension direction of the support member is perpendicular to the surface where the base plate and the support member connect. When the first and second latching members are embedded in the locking groove, the support member is located between the first and second latching members and abuts against them.

[0009] In some possible implementations, at least a portion of the support member gradually increases in cross-sectional area along the direction from the support member to the base plate. The cross-section is parallel to the surface where the base plate and the support member connect.

[0010] In some possible implementations, along the direction from the support member to the base plate, the cross-sectional area of ​​the support member first gradually increases and then gradually decreases.

[0011] In some possible implementations, the surface of the first end away from the second end includes a first convex arc surface, and the surface of the second end away from the first end includes a second convex arc surface.

[0012] In some possible implementations, the extension includes a first sub-section and a second sub-section. One end of the first sub-section is connected to the base plate, and the first sub-section gradually approaches the support along the direction from the base plate to the support. The second sub-section is connected to the end of the first sub-section away from the base plate, and the second sub-section extends away from the support. A first groove is formed on the surface of the first sub-section away from the support, and the first groove and the second sub-section are arranged adjacent to each other. The first groove is used to accommodate a silicon wafer.

[0013] On the other hand, embodiments of this application provide a boat sheet. The boat sheet is used for a graphite boat. The boat sheet includes a boat leaf, two boat ears, and graphite boat locking points as described above. The boat leaf has a mounting hole that extends through the boat leaf along its thickness direction. The two boat ears are located on both sides of the boat leaf along its length direction and are respectively connected to the boat leaf. The two boat ears are spaced apart along the width direction of the boat leaf. The locking point is located on one side of the boat leaf along its thickness direction, and the locking point body is located on the other side of the boat leaf along its thickness direction. A locking member passes through the mounting hole and is embedded in the locking groove to engage with the locking point.

[0014] In another aspect, embodiments of this application provide a graphite boat. The graphite boat includes a connector and a plurality of boat pieces as described above. The connector connects the plurality of boat pieces.

[0015] In summary, the embodiments of this application have at least the following beneficial effects:

[0016] In the embodiments of this application, the graphite boat locking points include locking points and insertion locking points. The locking component can be embedded in the locking groove opened on the locking point and engage with the locking point, so that the locking point and the insertion locking point can be fixed by mortise and tenon connection, reducing the risk of relative detachment between the two, realizing button-type installation, and improving the connection reliability between the locking point and the insertion locking point.

[0017] Furthermore, by adopting the above-mentioned setting method, the locking point and the insertion point can be fixed by manual pressing by the operator, without the need for mechanical equipment, saving equipment costs. Moreover, the operation is simple, time-saving and labor-saving, and improves the convenience of installing the graphite boat locking point on the boat leaf.

[0018] Furthermore, by setting the graphite boat locking points to a locking and inserting locking mechanism, if one of the locking or inserting locking points is damaged, only the damaged one can be replaced, eliminating the need to replace the entire graphite boat locking point and reducing costs. Attached Figure Description

[0019] To more clearly illustrate the technical solutions in the embodiments of this application, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 This is a schematic diagram of the structure of the boat piece provided in some embodiments of this application;

[0021] Figure 2 This is a schematic diagram of the structure of the boat piece provided in other embodiments of this application;

[0022] Figure 3 This is a schematic diagram showing the positional relationship between the hull and the silicon wafer provided in some embodiments of this application;

[0023] Figure 4 This is a schematic diagram of the structure of the locking point provided in some embodiments of this application;

[0024] Figure 5 This is a schematic diagram of the structure of the locking point provided in some embodiments of this application;

[0025] Figure 6 This is a schematic diagram of the structure of the locking point provided in other embodiments of this application;

[0026] Figure 7 This is a schematic diagram illustrating the cooperation relationship between locking points and insertion points provided in some embodiments of this application;

[0027] Figure 8 This is a schematic diagram showing the positional relationship between the base plate and the snap-fit ​​component provided in some embodiments of this application.

[0028] Explanation of reference numerals in the attached figures:

[0029] 100-Graphite boat locking point, 110-Locking point, 111-Base plate, 112-Extension, 1121-First sub-part, 1122-Second sub-part, 113-Support member, 120-Locking point, 121-Locking point body, 1211-Frustum, 1212-Extension plate, 122-Connecting piece, 1221-First connecting piece, 1222-Second connecting piece, 200-Boat piece, 2001-First boat piece, 2002-Second boat piece, 210-Boat leaf, 220-Boat ear, 221-First boat ear 222-Second boat ear, 301-Silicon wafer, X-Length direction of boat 210, Y-Width direction of boat 210, Z-Thickness direction of boat 210, Z1-First sub-direction, Z2-Second sub-direction, P-Snap-in hole, P1-First snap-in hole, P2-Second snap-in hole, E1-Mounting hole, E2-Connection hole, E3-Surface mount through hole, Q1-First end, Q2-Second end, M-Locking groove, M1-First sub-groove, M2-Second sub-groove, D1-First groove, D2-Second groove. Detailed Implementation

[0030] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0031] In this application, the terms "upper," "left," "right," "front," "top," "bottom," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. These terms are primarily for the purpose of better describing this application and its embodiments, and are not intended to limit the indicated device, element, or component to having a specific orientation, or to be constructed and operated in a specific orientation.

[0032] Furthermore, in addition to indicating location or positional relationship, some of the aforementioned terms may also have other meanings. For example, the term "above" may also be used in some cases to indicate a certain dependency or connection relationship. Those skilled in the art can understand the specific meaning of these terms in this application based on the specific circumstances.

[0033] Furthermore, the terms "installation," "setup," "equipped with," and "connection" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral structure; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium, or an internal connection between two devices, components, or parts. Those skilled in the art can understand the specific meaning of these terms in this application based on the specific circumstances.

[0034] Furthermore, the terms "first," "second," etc., are primarily used to distinguish different devices, elements, or components (which may be the same or different in specific type and construction), and are not intended to indicate or imply the relative importance or quantity of the indicated devices, elements, or components. Unless otherwise stated, "a plurality of" means two or more.

[0035] In the fabrication of solar cells, silicon wafers typically require coating. For example, low-pressure chemical vapor deposition (LPCVD) can be used to deposit doped amorphous silicon on the surface of the silicon wafer. Alternatively, other processes can be used, or other films can be deposited on the surface of the silicon wafer. The embodiments of this application do not further limit this.

[0036] In the process of coating silicon wafers, graphite boats serve as an important tool for supporting the silicon wafers. For example, a graphite boat can carry a silicon wafer into a furnace tube, and the electrode rods inside the furnace tube can supply power to the graphite boat, thereby creating an electric field to ionize the reactive gases and achieve coating on the silicon wafer.

[0037] Figure 1 The diagram shows the structure of the boat piece provided in some embodiments of this application. Figure 2 The diagram shows the structure of the boat piece provided in some other embodiments of this application.

[0038] In some examples, the graphite boat comprises multiple boat pieces 200, such as Figure 1 and Figure 2 As shown, the boat piece 200 includes a boat leaf 210 and two boat ears 220.

[0039] Two lugs 220 are located on both sides of the boat leaf 210 along the length direction X and are connected to the boat leaf 210 respectively. The two lugs 220 are spaced apart along the width direction Y of the boat leaf 210.

[0040] The boat leaf 210 can be a sheet-like structure, and its outline can be rectangular or approximately rectangular. Understandably, the length direction X and width direction Y of the boat leaf 210 are perpendicular or approximately perpendicular; that is, the angle between the length direction X and width direction Y of the boat leaf 210 can be 90°, 88°, or 89°, etc.

[0041] Two lugs 220 are located on either side of the boat leaf 210 along its length direction X, and are spaced apart along its width direction Y. That is, as... Figure 1 and Figure 2As shown, the two lugs 220 can be spaced apart along the diagonal direction of the leaf 210. For example, the lugs 220 and the leaf 210 can be an integrally formed structure to improve the reliability of their connection.

[0042] Continue to refer to Figure 1 and Figure 2 The two lugs 220 include a first lug 221 and a second lug 222, and the leaf 210 includes a first edge L1 and a second edge L2 disposed opposite to each other along the width direction Y of the leaf 210. Understandably, both the first edge L1 and the second edge L2 extend along the length direction X of the leaf 210.

[0043] The graphite boat may include multiple first boat pieces 2001 and multiple second boat pieces 2002. For example... Figure 1 As shown, along the width direction Y of the first boat piece 2001, the first boat ear 221 of the first boat piece 2001 is close to the first edge L1, and the second boat ear 222 of the first boat piece 2001 is close to the second edge L2.

[0044] like Figure 2 As shown, along the width direction Y of the boat sheet 210, the first boat ear 221 of the second boat sheet 2002 is close to the second edge L2, and the second boat ear 222 of the second boat sheet 2002 is close to the first edge L1. For example, the first boat sheet 2001 can be rotated 180 degrees along the length direction X of the boat sheet 210 to form the second boat sheet 2002.

[0045] For example, multiple first boat sheets 2001 and multiple second boat sheets 2002 are alternately spaced along the thickness direction Z of the boat sheet 210.

[0046] Understandably, the thickness direction Z of the boat 210 is perpendicular or approximately perpendicular to the plane containing the length direction X and the width direction Y of the boat 210. In other words, the angle between the thickness direction Z of the boat 210 and the plane containing the length direction X and the width direction Y of the boat 210 can be 90°, 88°, or 89°, etc.

[0047] After the graphite boat carrying the silicon wafer enters the furnace tube, the positive electrode rod inside the furnace tube can be connected to the positive terminal of the radio frequency power supply and multiple first boat wafers 2001, and the negative electrode rod inside the furnace tube can be connected to the negative terminal of the radio frequency power supply and multiple second boat wafers 2002. In this way, an electric field can be formed between the first boat wafers 2001 and the second boat wafers 2002 to ionize the reactive gas and achieve film deposition on the silicon wafer.

[0048] In some examples, the graphite boat also includes connecting rods that connect multiple boat segments 200.

[0049] For example, the connecting rod can extend along the thickness direction Z of the boat leaf 210. (e.g.) Figure 1 and Figure 2 As shown, a connecting hole E2 can be provided on the boat sheet 210, and the connecting hole E2 penetrates the boat sheet 210 along the thickness direction Z. The connecting rod can pass through the connecting hole E2 provided on multiple boat sheets 210, so that the connecting rod can connect multiple boat pieces 200.

[0050] The connecting rods connect multiple boat pieces 200, which can fix the multiple boat pieces 200 relatively, reduce the risk of shaking or displacement between the multiple boat pieces 200, and improve the reliability of the graphite boat.

[0051] For example, the connecting rod may include an insulating material to provide electrical isolation and reduce the risk of a short circuit between the first piece 2001 and the second piece 2002. For instance, the connecting rod may be made of ceramic, or it may include other insulating materials such as rubber.

[0052] The number of connecting rods can be multiple, and the multiple connecting rods are spaced apart to improve the connection effect of the connecting rods on multiple boat pieces 200. For example, the number of connecting rods can be six, eight, or ten, etc., and the embodiments of this application do not further limit the number of connecting rods.

[0053] The graphite boat may also include a nut, a ceramic washer, and a graphite washer. The ceramic washer and the graphite washer are sleeved on the end of the connecting rod that protrudes from the boat blade 210. The nut is located on the side of the ceramic washer and the graphite washer away from the boat blade 210 and is connected to the connecting rod. The nut is used to lock and fix the connecting rod, reducing the risk of the connecting rod wobbling or shifting relative to the multiple boat blades 200.

[0054] The graphite boat may also include a ceramic ring, which is located between two adjacent boat pieces 200 (first boat piece 2001 and second boat piece 2002) and serves as an isolation element. A connecting rod can pass through the ceramic ring and connect multiple boat pieces 200.

[0055] The graphite boat may also include a graphite block located between two adjacent boat pieces 200 (first boat piece 2001 and second boat piece 2002) and connected to the boat lug 220. The graphite block may have a first electrode hole and a second electrode hole. The positive terminal of the radio frequency power supply can be embedded in the first electrode hole and connected to multiple first boat pieces 2001, and the negative terminal of the radio frequency power supply can be embedded in the second electrode hole and connected to multiple second boat pieces 2002.

[0056] The graphite boat may also include boat feet, which are located on one side of the boat sheet 200 along the width direction Y of the boat sheet 210 and connected to the graphite block, serving to support multiple boat sheets 200. For example, there can be four boat feet, which can be arranged in an array along the length direction X and the thickness direction Z of the boat sheet 210.

[0057] In some examples, the boat 200 may also include graphite boat anchor points 100. Understandably, the graphite boat anchor points 100 are used to support the silicon wafer.

[0058] For example, the material of the graphite boat locking point 100 may include graphite, enabling the graphite boat locking point 100 to conduct electricity and improve the electric field uniformity between two adjacent boat pieces 200 (first boat piece 2001 and second boat piece 2002). Alternatively, the graphite boat locking point 100 may also include other conductive materials, which are not further limited in the embodiments of this application.

[0059] Continue to refer to Figure 1 and Figure 2 In some examples, the boat leaf 210 has a mounting hole E1 that extends through the boat leaf 210 along the thickness direction Z. The mounting hole E1 is used to mount the graphite boat locking point 100.

[0060] Figure 3 This is a schematic diagram illustrating the positional relationship between the hull and the silicon wafer provided in some embodiments of this application. For example, as shown... Figure 3 As shown, the graphite boat locking point 100 can pass through the mounting hole E1, and both ends of the graphite boat locking point 100 can protrude from the boat 210 along the thickness direction Z of the boat 210, so that the two silicon wafers 301 can be arranged on both sides of the boat 210 along the thickness direction Z of the boat 210.

[0061] like Figure 2 and Figure 3 As shown, at least a portion of the multiple planks 200 may have patch through holes E3 on their plank blades 210. For example, in the multiple planks 200, except for the planks 200 located at the two side edges, the planks 210 of the other planks 200 may have patch through holes E3.

[0062] The surface mount via E3 penetrates the boat 210 along its thickness direction. There can be multiple surface mount vias E3, which can be spaced apart along the length direction X of the boat 210. The embodiments of this application do not further limit the number of surface mount vias E3.

[0063] For example, such as Figure 1 and Figure 2As shown, at least two mounting holes E1 are spaced apart circumferentially along the surface mount through-hole E3, so that multiple graphite boat locking points 100 can be spaced apart circumferentially along the surface mount through-hole E3, thereby enabling multiple graphite boat locking points 100 to support the same silicon wafer, thereby improving the reliability of the graphite boat locking points 100 in supporting the silicon wafer.

[0064] For example, three mounting holes E1 can be spaced circumferentially along the surface mount through-hole E3, so that the three graphite boat locking points 100 can respectively support the three sides of the silicon wafer, reducing the risk of the silicon wafer wobbling relative to the graphite boat locking points 100.

[0065] In some cases, it is necessary to use mechanical equipment to press the graphite boat locking point 100 to install the graphite boat locking point 100 into the mounting hole E1. This operation is inconvenient and affects the ease of installation between the graphite boat locking point 100 and the boat leaf 210.

[0066] Furthermore, during use, the graphite boat locking point 100 is prone to damage, loosening, displacement, detachment, or dirt accumulation, requiring frequent replacement. In some cases, mechanical equipment is needed to press the graphite boat locking point 100 to separate it from the boat leaf 210, which is inconvenient and affects the ease of disassembly between the graphite boat locking point 100 and the boat leaf 210.

[0067] In other words, under certain circumstances, the installation and separation of the graphite boat jamming point 100 and the boat leaf 210 require the use of mechanical equipment, which affects the ease of operation.

[0068] Figure 4 This is a schematic diagram of the locking point structure provided in some embodiments of this application. Figure 5 This is a schematic diagram of the structure of the locking point provided in some embodiments of this application. Figure 6 This is a schematic diagram of the structure of the locking point provided in some other embodiments of this application. Figure 7 This is a schematic diagram illustrating the cooperation relationship between locking points and insertion points provided in some embodiments of this application.

[0069] Based on this, embodiments of this application provide a graphite boat locking point 100. The graphite boat locking point 100 is used for the boat sheet 200.

[0070] In some examples, such as Figure 4 , Figure 5 and Figure 6 As shown, the graphite boat locking point 100 includes a locking point 110 and a locking insertion point 120. The locking point 110 has a locking groove M. The locking insertion point 120 includes a connected locking point body 121 and a locking connector 122.

[0071] For example, the locking point body 121 and the snap-fit ​​member 122 can be a single molded structure to improve the reliability of their connection. Alternatively, the locking point body 121 and the snap-fit ​​member 122 can also be connected by welding or other processes.

[0072] In some examples, such as Figure 7 As shown, the snap-fit ​​part 122 is used to be embedded in the locking groove M and snap-fit ​​with the locking point 110.

[0073] Understandably, the shape of the locking groove M is adapted to the shape of the snap-fit ​​member 122, so that the snap-fit ​​member 122 can be embedded in the locking groove M and snap-fit ​​with the locking point 110. This allows the locking point 110 and the insertion point 120 to be connected by a snap-fit ​​structure, achieving a button-type installation. This reduces the risk of them falling off and improves the ease of installation of the locking point 110 and the insertion point 120, which in turn improves the ease of installation between the graphite boat locking point 100 and the boat leaf 210.

[0074] In some examples, the locking point 110 is located on one side of the boat 210 along the thickness direction of the boat 210, and the insertion locking point body 121 is located on the other side of the boat 210 along the thickness direction Z of the boat 210. The snap-fit ​​member 122 passes through the mounting hole E1 and is embedded in the locking groove M to snap-fit ​​with the locking point 110.

[0075] Understandably, the snap-fit ​​member 122 can extend along the thickness direction Z of the leaf 210, so that the snap-fit ​​member 122 can pass through the mounting hole E1 and be embedded in the locking groove M to snap with the locking point 110.

[0076] Locking point 110 and locking point body 121 are located on both sides of the boat 210 along the thickness direction Z of the boat 210, so that the two ends of the graphite boat locking point 100 can protrude from the boat 210 along the thickness direction Z of the boat 210, thereby enabling the graphite boat locking point 100 to support two silicon wafers arranged along the thickness direction Z of the boat 210.

[0077] In the embodiments of this application, the graphite boat locking point 100 includes a locking point 110 and a locking point 120. The locking member 122 can be embedded in the locking groove M opened on the locking point 110 and engage with the locking point 110, so that the locking point 110 and the locking point 120 can be fixed by mortise and tenon connection, reducing the risk of relative detachment between the two, realizing button-type installation, and improving the connection reliability between the locking point 110 and the locking point 120.

[0078] Furthermore, by adopting the above-mentioned setting method, the locking point 110 and the insertion point 120 can be locked by manual pressing by the operator, without the need for mechanical equipment, saving equipment costs. Moreover, the operation is simple, time-saving and labor-saving, and improves the convenience of installing the graphite boat locking point 100 on the boat page 210.

[0079] Furthermore, by configuring the graphite boat locking point 100 as a locking point 110 and a locking point 120, if one of the locking point 110 or the locking point 120 is damaged, the damaged one can be replaced without replacing the entire graphite boat locking point 100, thus reducing costs.

[0080] In some examples, such as Figure 4 As shown, the locking point 110 includes a base plate 111 and an extension 112. The extension 112 surrounds the base plate 111 and is connected to the base plate 111. The extension 112 and the base plate 111 form a locking groove M.

[0081] For example, the outline of the base plate 111 can be circular, square, or other shapes. The embodiments of this application do not further limit the shape of the outline of the base plate 111. The base plate 111 and the extension 112 can be an integrally formed structure to improve the reliability of their connection.

[0082] Continue to refer to Figure 4 A locking pin hole P is provided on the base plate 111, and the locking pin hole P penetrates the base plate 111 along the thickness direction of the base plate 111. Figure 8 This is a schematic diagram illustrating the positional relationship between the base plate and the snap-fit ​​component provided in some embodiments of this application. For example... Figure 7 and Figure 8 As shown, the end of the snap-fit ​​122 away from the locking point body 121 is used to be embedded in the snap-fit ​​hole P and snap-fit ​​with the base plate 111.

[0083] For example, the shape of the latch hole P is adapted to the shape of the end of the latching member 122 away from the locking point body 121, so that the end of the latching member 122 away from the locking point body 121 can be inserted into the latch hole P and latched with the base plate 111.

[0084] Understandably, by setting one end of the latching member 122 away from the locking point body 121 to be embedded in the latching pin hole P and to be latched with the base plate 111, the latching reliability between the latching member 122 and the locking point 110 can be improved.

[0085] Furthermore, the locking pin hole P extends through the base plate 111 along its thickness direction, and the end of the locking member 122 away from the locking point body 121 is embedded in the locking pin hole P, such as... Figure 8 As shown, this allows the end face of the latch 122 away from the locking point body 121 to be exposed.

[0086] In this way, when it is necessary to separate the locking point 110 and the insertion point 120, a fingernail or small tool can be used to point along the base plate 111 towards the insertion point body 121 (e.g., Figure 7 As shown in the first sub-direction Z1, the end face of the locking member 122 away from the locking point body 121 is pushed against, so that the locking member 122 can undergo elastic deformation, thereby allowing the locking member 122 to separate relative to the locking pin hole P, that is, the locking point 110 and the locking point 120 can be separated. No mechanical equipment is needed, the operation is simple, and the labor cost and time cost are reduced.

[0087] Furthermore, by using the above method to separate the locking point 110 and the insertion point 120, it is not necessary to disassemble the multiple boat pieces 200 of the graphite boat, which saves time and effort and improves the convenience of disassembling the locking point 110 and the insertion point 120, thereby improving the convenience of replacing the graphite boat locking point 100 and reducing labor costs.

[0088] In other words, the embodiments of this application can not only improve the ease of installation between the graphite boat locking point 100 and the boat page 210, but also improve the ease of disassembly between the graphite boat locking point 100 and the boat page 210.

[0089] For example, the snap-fit ​​connector 122 may include a flexible material to improve ease of disassembling the locking point 110 and the insertion point 120.

[0090] In some examples, such as Figure 7 and Figure 8 As shown, the card connector 122 includes a first card connector 1221 and a second card connector 1222. The first card connector 1221 and the second card connector 1222 are spaced apart and are respectively connected to the locking point body 121.

[0091] For example, the first connector 1221 and the second connector 1222 can be spaced apart in any direction within the XY plane (the plane containing the length direction X and the width direction Y of the boat 210).

[0092] The locking pin hole P includes a first locking pin hole P1 and a second locking pin hole P2 that are spaced apart. It can be understood that the direction in which the first locking pin hole P1 and the second locking pin hole P2 are spaced apart is the same as the direction in which the first locking member 1221 and the second locking member 1222 are spaced apart.

[0093] The end of the first latching member 1221 furthest from the locking point body 121 is the first end Q1, which is used to be inserted into the first latching pin hole P1 and to be engaged with the base plate 111. The end of the second latching member 1222 furthest from the locking point body 121 is the second end Q2, which is used to be inserted into the second latching pin hole P2 and to be engaged with the base plate 111.

[0094] This configuration improves the reliability of the locking point 110 and the insertion point 120, and reduces the risk of the locking point 110 and the insertion point 120 becoming loose or falling off after locking.

[0095] Continue to refer to Figure 4 and Figure 7 In some examples, the locking point 110 also includes a support member 113, which is located within the locking groove M and connected to the base plate 111. For example, the support member 113 and the base plate 111 can be an integrally formed structure to improve the reliability of their connection. The support member 113, disposed within the locking groove M, can divide the locking groove M into a first sub-groove M1 and a second sub-groove M2.

[0096] In some examples, the extension direction of the support member 113 is perpendicular to the surface where the base plate 111 and the support member 113 are connected. For example, the support member 113 may extend along the thickness direction Z of the leaf 210.

[0097] When the first latching member 1221 and the second latching member 1222 are embedded in the locking groove M, the support member 113 is located between the first latching member 1221 and the second latching member 1222, and abuts against the first latching member 1221 and the second latching member 1222.

[0098] Understandably, such as Figure 5 As shown, when the insertion point 120 and the locking point 110 are separated, the distance between the first locking member 1221 and the second locking member 1222 is small. After the locking member 122 is embedded in the locking groove M, the first locking member 1221 can be located in the first sub-groove M1, and the second locking member 1222 can be located in the second sub-groove M2.

[0099] The snap-fit ​​122 moves along the support 113 in the direction pointing towards the base plate 111 (e.g.) Figure 7 During the process (as shown in the second sub-direction Z2), the support member 113 can apply force to the first latching member 1221 and the second latching member 1222, such as... Figure 6 and Figure 7 As shown, the support member 113 can gradually expand the first snap-fit ​​member 1221 and the second snap-fit ​​member 1222, and the distance between the first snap-fit ​​member 1221 and the second snap-fit ​​member 1222 gradually increases.

[0100] When the first snap-fit ​​member 1221 and the second snap-fit ​​member 1222 are snapped into the base plate 111 respectively, the support member 113 can abut against the first snap-fit ​​member 1221 and the second snap-fit ​​member 1222. Under the action of the support member 113, the first snap-fit ​​member 1221 and the second snap-fit ​​member 1222 are respectively embedded in the first snap-fit ​​hole P1 and the second snap-fit ​​hole P2.

[0101] Understandably, when the first latching member 1221 and the second latching member 1222 are embedded in the locking groove M, the support member 113 is arranged to abut against the first latching member 1221 and the second latching member 1222. This increases the friction between the support member 113 and the latching member 122, thereby reducing the risk that the first latching member 1221 will move closer to the second latching member 1222 and separate from the first latching pin hole P1. It also reduces the risk that the second latching member 1222 will move closer to the first latching member 1221 and separate from the second latching pin hole P2.

[0102] In other words, by adopting the above-mentioned configuration, the reliability of the engagement between locking point 110 and locking point 120 can be improved, and the risk of loosening or falling off between the two after the engagement is completed can be reduced.

[0103] Understandably, the snap-fit ​​122 includes a flexible material, which allows the first snap-fit ​​1221 and the second snap-fit ​​1222 to gradually separate under the action of the support 113, reducing the risk of the first snap-fit ​​1221 and the second snap-fit ​​1222 breaking under the action of the support 113.

[0104] For example, the material of the snap fastener 122 may include flexible graphite, so that the snap fastener 122 has good flexibility and reduces the risk of the first snap fastener 1221 and the second snap fastener 1222 breaking under the action of the support member 113.

[0105] Alternatively, the connector 122 may also include other flexible conductive materials, which is not further limited in the embodiments of this application.

[0106] For example, the material of locking point 110 may include hard graphite, and the material of locking point body 121 may include hard graphite.

[0107] Understandably, the locking point 110 and the insertion locking point body 121 are located on both sides of the boat 210 along the thickness direction Z, respectively, serving to support the silicon wafer. The materials used for the locking point 110 and the insertion locking point body 121 both include hard graphite, which improves the mechanical strength of the locking point 110 and the insertion locking point body 121, thereby improving the mechanical strength of the graphite boat locking point 100 and enhancing the reliability of the graphite boat locking point 100 in supporting the silicon wafer.

[0108] Alternatively, the locking point 110 and the insertion point body 121 may also include other rigid conductive materials, and the embodiments of this application do not further limit this.

[0109] Taking the material of the locking point body 121 as hard graphite and the material of the snap-fit ​​member 122 as flexible graphite as an example, it can be understood that under high temperature (e.g., several hundred degrees Celsius or higher) and appropriate pressure, carbon atoms in flexible graphite and carbon atoms in hard graphite can diffuse into each other at the interface and embed into each other's lattice structure, so that the locking point body 121 and the snap-fit ​​member 122 can be connected.

[0110] In some examples, such as Figure 7 As shown, along the direction (second sub-direction Z2) from the support member 113 to the base plate 111, at least a portion of the support member 113 has a gradually increasing cross-sectional area. The cross-section is parallel to the surface where the base plate 111 and the support member 113 connect.

[0111] The area of ​​at least part of the support member 113 gradually increases in the cross-section, so that the outer surface of the support member 113 can be a smooth arc surface. The first snap-fit ​​member 1221 and the second snap-fit ​​member 1222 can gradually separate under the action of the support member 113, reducing the resistance caused by the support member 113 to the movement of the first snap-fit ​​member 1221 and the second snap-fit ​​member 1222 near the base plate 111, and reducing the risk of the support member 113 causing the first snap-fit ​​member 1221 and the second snap-fit ​​member 1222 to break.

[0112] Continue to refer to Figure 7 In some examples, along the direction (second sub-direction Z2) from the support member 113 to the base plate 111, the area of ​​the support member 113 on the cross-section first gradually increases and then gradually decreases.

[0113] Understandably, along the direction of the support member 113 pointing to the base plate 111 (second sub-direction Z2), the area of ​​the support member 113 on the cross-section is set to gradually increase and then gradually decrease. On the one hand, this allows the support member 113 to gradually open the first latching member 1221 and the second latching member 1222, thereby improving the latching reliability of the locking point 110 and the insertion locking point 120.

[0114] On the other hand, the end of the latching member 122 (first latching member 1221 and second latching member 1222) away from the locking point body 121 and the support member 113 can have a margin. In this way, when the end face of the latching member 122 away from the locking point body 121 is pressed, the latching member 122 can deform, which improves the convenience of separating the locking point 110 and the locking point 120, that is, improves the convenience of removing the graphite boat locking point 100 from the boat page 210.

[0115] Continue to refer to Figure 7 In some examples, the surface of the first end Q1 away from the second end Q2 includes a first convex arc surface, and the surface of the second end Q2 away from the first end Q1 includes a second convex arc surface.

[0116] This design reduces the friction between the end of the latching member 122 away from the locking point body 121 and the base plate 111, thereby allowing the latching member 122 to separate relative to the locking pin hole P when the end face of the latching member 122 away from the locking point body 121 is pressed. This improves the ease of separating the locking point 110 and the locking point 120, and also improves the ease of removing the graphite boat locking point 100 from the boat leaf 210.

[0117] Continue to refer to Figure 7 In some examples, the extension 112 includes a first sub-part 1121 and a second sub-part 1122. For example, the first sub-part 1121 and the second sub-part 1122 can be an integrally formed structure to improve the reliability of their connection.

[0118] One end of the first sub-part 1121 is connected to the base plate 111, and along the direction from the base plate 111 toward the support member 113, the first sub-part 1121 gradually approaches the support member 113.

[0119] The second sub-part 1122 is connected to the end of the first sub-part 1121 away from the base plate 111, and the second sub-part 1122 extends away from the support member 113. For example, the second sub-part 1122 may extend away from the support member 113 in any direction in the XY plane.

[0120] For example, the end face of the support member 113 away from the base plate 111 is flush with the surface of the second sub-part 1122 away from the first sub-part 1121. This arrangement improves the structural regularity of the locking point 110.

[0121] Understandably, the first sub-part 1121 serves to support the silicon wafer. By positioning the first sub-part 1121 closer to the support member 113, an acute angle can be formed between the first sub-part 1121 and the second sub-part 1122, reducing the risk of the silicon wafer falling off the locking point 110 and improving the reliability of the locking point 110 in supporting the silicon wafer.

[0122] Continue to refer to Figure 7 In some examples, the surface of the first sub-part 1121 away from the support member 113 has a first groove D1, and the first groove D1 and the second sub-part 1122 are arranged adjacent to each other. The first groove D1 is used to accommodate a silicon wafer.

[0123] Understandably, the first groove D1 can limit the silicon wafer, reduce the risk of the silicon wafer falling off the locking point 110, and improve the reliability of the locking point 110 in supporting the silicon wafer.

[0124] Continue to refer to Figure 7In some examples, the locking point body 121 may include a frustum 1211 and an extension plate 1212, with the upper bottom surface of the frustum 1211 connected to the extension plate 1212. A second groove D2 is provided on the side wall of the frustum 1211 for accommodating a silicon wafer.

[0125] Understandably, the sidewalls of the frustum 1211 can serve to support the silicon wafer. Connecting the upper bottom surface of the frustum 1211 to the extension plate 1212 can reduce the risk of the silicon wafer falling off the locking point 120 and improve the reliability of the locking point 120 in supporting the silicon wafer.

[0126] A second groove D2 is provided on the side wall of the frustum 1211. The second groove D2 can limit the silicon wafer, reduce the risk of the silicon wafer falling off the locking point 120, and improve the reliability of the locking point 120 for supporting the silicon wafer.

[0127] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this application.

Claims

1. A graphite boat card point, characterized by, Used for boat sheet; the graphite boat clamping points include: A locking point, wherein a locking groove is provided on the locking point; The locking point includes a connected locking point body and a snap-fit ​​component; the snap-fit ​​component is used to embed into the locking groove and snap-fit ​​with the locking point.

2. The graphite boat checkpoint according to claim 1, characterized in that, The locking point includes a base plate and an extension, the extension surrounds the base plate and is connected to the base plate, and the extension and the base plate surround the locking groove; The base plate has a locking pin hole that extends through the base plate along its thickness direction. The end of the snap-fit ​​component away from the locking point body is used to be embedded in the snap-fit ​​hole and snap-fit ​​with the base plate.

3. The graphite boat card point of claim 2, wherein, The latching component includes a first latching component and a second latching component, which are spaced apart and connected to the locking point body respectively. The locking pin holes include a first locking pin hole and a second locking pin hole spaced apart; the end of the first locking member away from the locking point body is the first end, which is used to be inserted into the first locking pin hole and locked with the base plate; the end of the second locking member away from the locking point body is the second end, which is used to be inserted into the second locking pin hole and locked with the base plate.

4. The graphite boat card point of claim 3, wherein, The locking point also includes a support member, which is located within the locking groove and connected to the base plate; the extending direction of the support member is perpendicular to the surface where the base plate and the support member are connected. When the first and second latching members are embedded in the locking groove, the support member is located between the first and second latching members and abuts against the first and second latching members.

5. The graphite boat card point of claim 4, wherein, Along the direction from the support member to the base plate, at least a portion of the support member has a gradually increasing cross-sectional area; the cross-section is parallel to the surface where the base plate and the support member connect.

6. The graphite boat checkpoint according to claim 5, characterized in that, Along the direction from the support member to the base plate, the area of ​​the support member on the cross-section first gradually increases and then gradually decreases.

7. The graphite boat card point according to any one of claims 3 to 6, characterized in that The surface of the first end away from the second end includes a first convex arc surface, and the surface of the second end away from the first end includes a second convex arc surface.

8. The graphite boat card point according to any one of claims 4 to 6, wherein The extension includes a first sub-part and a second sub-part; One end of the first sub-part is connected to the base plate, and the first sub-part gradually moves closer to the support member along the direction from the base plate to the support member; the second sub-part is connected to the end of the first sub-part away from the base plate, and the second sub-part extends away from the support member; The first sub-part has a first groove on its surface away from the support member, and the first groove and the second sub-part are arranged adjacent to each other; the first groove is used to accommodate a silicon wafer.

9. A boat piece, characterized in that For use in graphite boats; the boat sheet comprises: The boat leaf has mounting holes that penetrate the boat leaf along its thickness direction; Two boat ears are located on either side of the boat sheet along its length and are respectively connected to the boat sheet; the two boat ears are spaced apart along the width of the boat sheet; and, The graphite boat locking point as described in any one of claims 1 to 8; the locking point is located on one side of the boat sheet along the thickness direction of the boat sheet, and the insertion locking point body is located on the other side of the boat sheet along the thickness direction of the boat sheet; the locking member passes through the mounting hole and is embedded in the locking groove to engage with the locking point.

10. A graphite boat characterized in that, include: Multiple boat pieces as described in claim 9; A connector that connects multiple of the boat segments.

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