Vertical quartz boat

Abstract

This utility model discloses a vertical quartz boat, comprising a base plate, a middle plate, a top plate, a fixed column, and two movable columns. The base plate, middle plate, and top plate are arranged sequentially from bottom to top. The fixed columns are sequentially fixedly connected to the base plate, middle plate, and top plate. Each of the base plate, middle plate, and top plate has two arc-shaped adjustment holes, into which limit posts are inserted. The fixed column and movable columns each have several evenly spaced annular grooves. The base plate, middle plate, top plate, fixed column, and movable columns are all made of quartz. This vertical quartz boat, with its vertical placement, effectively improves the space utilization of the processing equipment. The cooperation between the movable and fixed columns not only improves the clamping and fixing effect on workpieces such as silicon wafers, preventing workpieces from falling off, but also facilitates the removal of workpieces. In particular, it can be used in conjunction with automated equipment such as robots to achieve rapid unloading.

Description

Technical Field

[0001] This utility model belongs to the field of quartz boat technology, specifically relating to a vertical quartz boat. Background Technology

[0002] In semiconductor manufacturing, photovoltaic industry, and materials science research, quartz boats serve as crucial support tools, commonly used in high-temperature processes to hold silicon wafers, semiconductor wafers, and other workpieces. Their structural design directly impacts processing quality and efficiency. Traditional quartz boat structures are relatively fixed, presenting numerous limitations in practical use. Existing quartz boats are generally horizontal, with silicon wafers and other workpieces placed vertically within them. This results in a large footprint in annealing furnaces and other processing equipment, leading to low internal space utilization. Furthermore, current processes require manual removal of silicon wafers and other workpieces one by one from the quartz boat, making it difficult to integrate with automated equipment like robots for rapid unloading due to the boat's structural design. Utility Model Content

[0003] To solve the above-mentioned technical problems, the technical solution adopted by this utility model is as follows: a vertical quartz boat, including a bottom plate, a middle plate, a top plate, a fixed column, and two movable columns. The bottom plate, middle plate, and top plate are arranged sequentially from bottom to top. The fixed column is fixedly connected to the bottom plate, middle plate, and top plate in sequence. The bottom plate, middle plate, and top plate are each provided with two arc-shaped adjustment holes, which correspond to the movable columns. The movable columns pass through the corresponding arc-shaped adjustment holes. The fixed column and the two movable columns are located on the circumference of the same virtual circle. The center of the arc-shaped adjustment hole coincides with the center of the virtual circle. A limit column is inserted into the arc-shaped adjustment hole. The fixed column and the movable column are each provided with several evenly spaced annular grooves. The bottom plate, middle plate, top plate, fixed column, and movable column are all made of quartz.

[0004] As a preferred embodiment of the above technical solution, the lower surface of the base plate and the upper surface of the top plate are respectively provided with mounting grooves, and the arc-shaped adjustment holes are respectively connected to the corresponding mounting grooves.

[0005] As a preferred embodiment of the above technical solution, the movable column is fixedly connected with two lower limit plates, two middle limit plates, and two upper limit plates, with the bottom plate sandwiched between the two lower limit plates, the middle plate sandwiched between the two middle limit plates, and the top plate sandwiched between the two upper limit plates.

[0006] As a preferred embodiment of the above technical solution, a bayonet is provided on one side of the upper end of the limiting post.

[0007] As a preferred embodiment of the above technical solution, the middle plate is provided with handles on all four sides, and the two ends of the handles are fixedly connected to the middle plate.

[0008] As a preferred embodiment of the above technical solution, the diameter of the fixed column is larger than the diameter of the movable column.

[0009] The beneficial effects of this utility model are as follows: The vertical quartz boat of this utility model, with its vertical placement, effectively improves the space utilization of the processing equipment. The cooperation between the movable column and the fixed column can not only improve the clamping and fixing effect of workpieces such as silicon wafers, preventing workpieces from falling off, but also facilitate the removal of workpieces. In particular, it can be used in conjunction with automated equipment such as robots to achieve rapid unloading. Attached Figure Description

[0010] Figure 1 This is a schematic diagram of the structure of this utility model; Figure 2 This is a schematic diagram of the cross-sectional structure of this utility model; Figure 3 This is a cross-sectional structural diagram of the present invention from another angle. Detailed Implementation

[0011] The technical solution of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0012] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0013] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0014] like Figure 1-3As shown, the vertical quartz boat includes a base plate 1, a middle plate 2, a top plate 3, a fixed column 4, and two movable columns 5. The base plate 1, middle plate 2, and top plate 3 are arranged sequentially from bottom to top. The fixed column 4 is sequentially fixedly connected to the base plate 1, middle plate 2, and top plate 3. Each of the base plate 1, middle plate 2, and top plate 3 has two arc-shaped adjustment holes 6, corresponding to the movable columns 5. The movable columns 5 pass through the corresponding arc-shaped adjustment holes 6. The fixed column 4 and the two movable columns 5 are located on the circumference of the same virtual circle. The center of the arc-shaped adjustment hole 6 coincides with the center of the virtual circle. A limit post 14 is inserted into the arc-shaped adjustment hole 6. The fixed column 4 and the movable columns 5 each have several evenly spaced annular grooves 7. The base plate 1, middle plate 2, top plate 3, fixed column 4, and movable column 5 are all made of quartz. The fixed column 4 and the two movable columns 5 provide three-point support for each silicon wafer or other workpiece. Two movable columns 5 move within the arc-shaped adjustment hole 6. When the two movable columns 5 move to opposite ends of the same diameter within the virtual circle (with the movable column 5 located at one end of the arc-shaped adjustment hole 6), the opening between the two movable columns 5 is at its maximum. Workpieces are inserted one by one between the movable column 5 and the fixed column 4, using the annular groove 7 to provide three-point support for the workpieces. After all workpieces are placed, the movable columns 5 are moved to the other end of the arc-shaped adjustment hole 6. At this point, the distance between the movable columns 5 and the distance between the movable column 5 and the fixed column 4 are equal, forming an equilateral triangle that clamps all workpieces between them. A limiting column 14 is then inserted into the arc-shaped adjustment hole 6 to restrict the position of the movable columns 5. At this point, regardless of the state of the quartz boat, the workpieces inside will not fall out. This facilitates subsequent transfer operations with robots and other automated equipment.

[0015] Furthermore, the lower surface of the base plate 1 and the upper surface of the top plate 3 are respectively provided with mounting grooves 8, and the arc-shaped adjustment holes 6 are respectively connected to the corresponding mounting grooves 8.

[0016] Furthermore, two lower limit plates 9, two middle limit plates 10, and two upper limit plates 11 are fixedly connected to the movable column 5. The bottom plate 1 is sandwiched between the two lower limit plates 9, the middle plate 2 is sandwiched between the two middle limit plates 10, and the top plate 3 is sandwiched between the two upper limit plates 11. The movable column 5 utilizes the cooperation between the two lower limit plates 9, the two middle limit plates 10, and the two upper limit plates 11 with the bottom plate 1, the middle plate 2, and the top plate 3, respectively, so that the movable column 5 can only move along the direction of the arc-shaped adjustment hole 6.

[0017] Furthermore, a latch 12 is provided on one side of the upper end of the limiting post 14. The latch 12 provides a point of force application, facilitating manual or automated equipment to pull the limiting post 14 out of the arc-shaped adjustment hole 6. To prevent the limiting post 14 from automatically sliding out of the arc-shaped adjustment hole 6, the limiting post 14 is designed to be tapered, with the upper diameter being larger than the diameter of the arc-shaped adjustment hole 6.

[0018] Furthermore, handles 13 are provided around the perimeter of the middle plate 2, and the two ends of the handles 13 are fixedly connected to the middle plate 2. The handles 13 can facilitate the movement of the entire quartz boat and can also limit the distance between adjacent quartz boats in the processing equipment.

[0019] Furthermore, the diameter of the fixed column 4 is larger than the diameter of the movable column 5. The fixed column 4 plays a major supporting role.

[0020] It is worth mentioning that the technical features such as quartz and welding involved in this utility model patent application should be regarded as prior art. The specific structure, working principle and possible control methods and spatial arrangement of these technical features can be adopted by conventional choices in the field and should not be regarded as the inventive point of this utility model patent. This utility model patent will not be further elaborated in detail.

[0021] The preferred embodiments of the present invention have been described in detail above. It should be understood that those skilled in the art can make many modifications and variations based on the concept of the present invention without creative effort. Therefore, all technical solutions that can be obtained by those skilled in the art based on the concept of the present invention through logical analysis, reasoning or limited experimentation on the basis of the prior art should be within the scope of protection defined by the claims.

Claims

1. A vertical quartz boat characterized by, It includes a base plate, a middle plate, a top plate, a fixed column, and two movable columns. The base plate, middle plate, and top plate are arranged sequentially from bottom to top. The fixed column is fixedly connected to the base plate, middle plate, and top plate in sequence. Each of the base plate, middle plate, and top plate has two arc-shaped adjustment holes, which correspond to the movable columns. The movable columns pass through the corresponding arc-shaped adjustment holes. The fixed column and the two movable columns are located on the circumference of the same virtual circle. The center of the arc-shaped adjustment hole coincides with the center of the virtual circle. Limiting columns are inserted into the arc-shaped adjustment holes. The fixed column and the movable column are each provided with several evenly spaced annular grooves. The base plate, middle plate, top plate, fixed column, and movable column are all made of quartz.

2. The vertical quartz boat of claim 1, wherein, The lower surface of the base plate and the upper surface of the top plate are respectively provided with mounting grooves, and the arc-shaped adjustment holes are respectively connected to the corresponding mounting grooves.

3. The vertical quartz boat of claim 2, wherein, The movable column is fixedly connected to two lower limit plates, two middle limit plates, and two upper limit plates. The bottom plate is sandwiched between the two lower limit plates, the middle plate is sandwiched between the two middle limit plates, and the top plate is sandwiched between the two upper limit plates.

4. The vertical quartz boat of claim 3, wherein, The upper end of the limiting post is provided with a locking slot.

5. The vertical quartz boat of claim 1, wherein, The middle plate is provided with handles on all four sides, and the two ends of the handles are fixedly connected to the middle plate.

6. The vertical quartz boat of claim 1, wherein, The diameter of the fixed column is larger than the diameter of the movable column.

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