Battery sheet production system

Abstract

This utility model discloses a battery cell production system. A connecting platform is installed between a coating equipment and a wafer insertion equipment along a first direction. The connecting platform has a movable support for carrying graphite boats along the first direction, facilitating the transport of graphite boats between the coating and insertion equipment. A transport track extends along a second direction and connects to both the connecting platform and a cleaning device spaced apart from the coating equipment along the second direction, thereby transporting graphite boats between the connecting platform and the cleaning device. This allows for smooth flow of graphite boats between the coating, insertion, and cleaning equipment via the connecting platform and transport track. Furthermore, the connecting platform is located between and connects to the coating and insertion equipment along the first direction, while the transport track extends along the second direction and connects to both the connecting platform and the cleaning device. The first and second directions intersect, and this layout reduces the space required for the graphite boat transport route.

Description

Technical Field

[0001] This application relates to the field of solar cell processing system technology, and more particularly to a solar cell production system. Background Technology

[0002] Graphite boats are carriers used in the production of solar cells. During the production process, graphite boats need to be transferred between different process equipment to carry silicon wafers to different process equipment.

[0003] In related technologies, graphite boats are mainly transported by AGVs (Automated Guided Vehicles). To meet the needs of graphite boats in the production workshop, a large number of AGVs need to be deployed, which requires reserving a wide boat-moving route and taking up too much space. Utility Model Content

[0004] This utility model discloses a battery cell production system that can reduce the space required for transporting boats.

[0005] To achieve the above objectives, the first aspect of this utility model discloses a battery cell production system, comprising:

[0006] A coating apparatus configured to coat silicon wafers;

[0007] An insertion device, wherein the insertion device and the coating device are spaced apart along a first direction, and the insertion device is configured to insert the silicon wafer into a graphite boat or remove the silicon wafer from the graphite boat;

[0008] A cleaning device is provided at a distance from the coating device along a second direction, and the cleaning device is configured to clean the graphite boat.

[0009] A connecting platform is located between the coating equipment and the inserting equipment along the first direction. The connecting platform is used to dock with the coating equipment and the inserting equipment. The connecting platform is provided with a carrier that is movable along the first direction. The carrier is configured to carry the graphite boat for transporting the graphite boat between the coating equipment and the inserting equipment.

[0010] A transport track extends along the second direction and docks with the connecting platform and the cleaning equipment respectively. The transport track is configured between the connecting platform and the cleaning equipment to transport the graphite boat.

[0011] The first direction and the second direction intersect.

[0012] As an optional implementation, the transport track includes a first sub-transport track and a second sub-transport track. The first sub-transport track is configured to transport the graphite boat to be cleaned from the connecting platform to the cleaning equipment, and the second sub-transport track is configured to transport the cleaned graphite boat from the cleaning equipment to the connecting platform.

[0013] As an optional implementation, the first sub-transport track and the second sub-transport track are spaced apart along the height direction of the coating equipment, and both the first sub-transport track and the second sub-transport track are positioned above the coating equipment along the height direction of the coating equipment.

[0014] The cell production system further includes a first lifting assembly and a second lifting assembly, which are spaced apart. The first lifting assembly is located between the first sub-transport track and the connecting platform and is configured to dock with the first sub-transport track and the connecting platform to transport the graphite boat from the connecting platform to the first sub-transport track. The second lifting assembly is located between the second sub-transport track and the connecting platform and is configured to dock with the second sub-transport track and the connecting platform to transport the graphite boat from the second sub-transport track to the connecting platform.

[0015] As an optional implementation, the first sub-transport track is located above the second sub-transport track along the height direction of the coating equipment;

[0016] The battery cell production system also includes a carrier plate. A carrier plate placement area is connected below the first sub-transport track. The carrier plate placement area is spaced apart above the connecting table along the height direction of the coating equipment. The carrier plate placement area is provided with multiple placement positions spaced apart along the height direction of the coating equipment. The placement positions are configured to place the carrier plate, and the carrier plate is configured to support the graphite boat.

[0017] The first lifting assembly includes a first lifting member and a second lifting member, which are spaced apart. The first lifting member docks with the connecting platform and the placement position to transport the graphite boat from the connecting platform to the placement position. The second lifting member docks with the placement position and the first sub-transport track to transport the carrier plate carrying the graphite boat to the first sub-transport track.

[0018] As an optional implementation, the carrier plate is provided with an identification module, and the coating equipment, the inserting equipment and the cleaning equipment are all provided with a reader, which is configured to read the identification module to track the position of the graphite boat.

[0019] As an optional implementation, the cell production system further includes a first buffer area and a second buffer area. The first buffer area is located between the coating equipment and the cleaning equipment along the second direction. The first buffer area is provided with a plurality of first buffer positions for temporarily storing the graphite boat to be cleaned. The second buffer area is spaced apart from the insertion equipment along the second direction, and the first buffer area and the second buffer area are respectively located on both sides of the transport track along the first direction. The second buffer area is provided with a plurality of second buffer positions for temporarily storing the cleaned graphite boat.

[0020] The cell production system further includes a third lifting assembly and a fourth lifting assembly. The third lifting assembly is disposed between the first sub-transport track and the first buffer position, and is configured to dock with the first buffer position and the first sub-transport track to transport the graphite boat to be cleaned from the first sub-transport track to the first buffer position. The fourth lifting assembly is disposed between the second sub-transport track and the second buffer position, and is configured to dock with the second buffer position and the second sub-transport track to transport the cleaned graphite boat from the second sub-transport track to the second buffer position.

[0021] As an optional implementation, the cell production system further includes a calibration boat device, which is spaced apart from the insertion device along the second direction, and the calibration boat device and the cleaning device are located on opposite sides of the transport track along the first direction. The calibration boat device is configured to calibrate the cleaned graphite boat.

[0022] As an optional implementation, the calibration boat equipment includes a detection component and a repair component, which are arranged at intervals. The detection component is configured to detect the cleaned graphite boat, and the repair component is configured to repair the graphite boat that is found to be unqualified by the detection component.

[0023] As an optional implementation, the cell production system further includes a silicon wafer transport device disposed along the first direction on the side of the insertion device away from the coating device, and the silicon wafer transport device is configured to transport the silicon wafer to or from the insertion device.

[0024] As an optional implementation, the coating equipment, the cleaning equipment, the inserting device, and the connecting platform are all multiple, and the multiple coating equipment and the multiple cleaning equipment are arranged at intervals along the second direction. The number of inserting devices, coating equipment, and connecting platforms is the same, and the inserting devices, coating equipment, and connecting platforms are arranged in a one-to-one correspondence.

[0025] Compared with the prior art, the beneficial effects of this application are:

[0026] This utility model provides a battery cell production system. A connecting platform is installed between a coating equipment and an insertion equipment along a first direction. The connecting platform has a movable support for carrying graphite boats along the first direction, facilitating the transport of graphite boats between the coating and insertion equipment. A transport track extends along a second direction and connects to both the connecting platform and a cleaning device spaced apart from the coating equipment along the second direction, thereby transporting graphite boats between the connecting platform and the cleaning device. This allows for smooth flow of graphite boats between the coating, insertion, and cleaning equipment via the connecting platform and transport track. Furthermore, the connecting platform is located between and connects to the coating and insertion equipment along the first direction, while the transport track extends along the second direction and connects to both the connecting platform and the cleaning device. The first and second directions intersect, and this layout reduces the space required for the graphite boat transport route. Attached Figure Description

[0027] To more clearly illustrate the technical solutions in the embodiments of this application, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0028] Figure 1 This is a schematic diagram of the structure of the battery cell production system (transport track not shown) disclosed in the embodiments of this application;

[0029] Figure 2 This is a schematic diagram of the structure of the transport track disclosed in the embodiments of this application;

[0030] Figure 3 This is a schematic diagram of the structure of the first lifting assembly and the second lifting assembly disclosed in the embodiments of this application;

[0031] Figure 4 This is a schematic diagram of the structure of the second cache area disclosed in an embodiment of this application;

[0032] Figure 5 This is a top view of the battery cell production system disclosed in the embodiments of this application;

[0033] Figure 6 This is a schematic diagram of the structure of a battery cell production system when there are multiple coating equipment, inserting equipment, cleaning equipment and connecting tables as disclosed in the embodiments of this application.

[0034] Explanation of reference numerals in the attached figures:

[0035] 100 - Cell production system; 1 - Coating equipment; 11 - Connecting platform; 111 - Carrier; 2 - Insertion equipment; 21 - Silicon wafer transfer equipment; 3 - Cleaning equipment; 4 - Transport track; 41 - First sub-transport track; 411 - Carrier placement area; 411a - Placement position; 411b - Carrier; 42 - Second sub-transport track; 5 - First lifting assembly; 51 - First lifting component; 52 - Second lifting component; 6 - Second lifting assembly; 7 - First buffer area; 71 - First buffer position; 72 - Third lifting assembly; 8 - Second buffer area; 81 - Second buffer position; 82 - Fourth lifting assembly; 9 - Calibration boat equipment; 91 - Testing component; 92 - Repair component; 200 - Graphite boat; X - First direction; Y - Second direction. Detailed Implementation

[0036] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0037] In this application, the terms "upper," "lower," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. These terms are primarily for the purpose of better describing this application and its embodiments, and are not intended to limit the indicated equipment, elements, or components to having a specific orientation, or to be constructed and operated in a specific orientation.

[0038] Furthermore, in addition to indicating location or positional relationship, some of the aforementioned terms may also have other meanings. For example, the term "above" may also be used in some cases to indicate a certain dependency or connection relationship. Those skilled in the art can understand the specific meaning of these terms in this application based on the specific circumstances.

[0039] Furthermore, the terms "setup" and "connection" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral structure; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection via an intermediate medium, or an internal connection between two devices, components, or parts. Those skilled in the art can understand the specific meaning of these terms in this application based on the specific circumstances.

[0040] Furthermore, the terms "first," "second," etc., are primarily used to distinguish different devices, components, or parts (which may be the same or different in specific type and construction), and are not intended to indicate or imply the relative importance or quantity of the indicated devices, components, or parts. Unless otherwise stated, "a plurality of" means two or more.

[0041] Solar cells are products made from silicon wafers through multiple processing steps. Each processing step requires different processing equipment, and quartz boats are used to transport silicon wafers between different steps. This allows multiple silicon wafers to be transported to the corresponding processing station at a time using quartz boats, thereby improving the efficiency of silicon wafer transportation.

[0042] The movement of the quartz boat among the various processing equipment in the workshop is accomplished by AGVs (Automated Guided Vehicles). Under the coordinated action of the control and navigation systems, the AGVs operate according to preset paths and task instructions. They achieve automatic movement and transport functions through the drive system, and simultaneously interact with surrounding equipment and systems via the communication system to complete various complex transport tasks.

[0043] However, in order to meet the needs of graphite boat transportation in the production workshop, a large number of AGVs need to be deployed in the relevant technologies. Furthermore, the AGVs also need sufficient space to drive and turn. Therefore, a wide boat transportation route needs to be reserved, which results in the graphite boat transportation route occupying too much space.

[0044] In view of this, this application discloses a solar cell production system. A connecting platform is arranged between a coating equipment and an insertion equipment along a first direction. The connecting platform is equipped with a carrier movable along the first direction for carrying a graphite boat, thereby transporting the graphite boat between the coating equipment and the insertion equipment. A cleaning equipment is spaced apart from the coating equipment along a second direction. A transport track extends along the second direction and connects with both the connecting platform and the cleaning equipment, thereby transporting the graphite boat between the connecting platform and the cleaning equipment. This allows for smooth flow of the graphite boat between the coating equipment, the insertion equipment, and the cleaning equipment via the connecting platform and the transport track. Furthermore, the connecting platform is located between and connects with the coating equipment and the insertion equipment along the first direction, and the transport track extends along the second direction and connects with both the connecting platform and the cleaning equipment. The first and second directions intersect, and this layout reduces the space required for the graphite boat transport route, thus reducing the overall space required for the solar cell production system.

[0045] The technical solution of this application will be further described below with reference to the embodiments and accompanying drawings.

[0046] Please see Figure 1, Figure 1 This is a schematic diagram of the structure of a solar cell production system (excluding the transport track) disclosed in an embodiment of this application. The solar cell production system 100 includes a coating equipment 1, a wafer insertion equipment 2, a cleaning equipment 3, a connecting table 11, and a transport track 4. The coating equipment 1 is configured to coat silicon wafers. The wafer insertion equipment 2 and the coating equipment 1 are aligned along a first direction X (e.g., ...). Figure 1 The wafer insertion device 2 is configured to insert silicon wafers into the graphite boat 200 or remove silicon wafers from the graphite boat 200, spaced apart along the left and right sides of the paper. The cleaning device 3 and the coating device 1 are arranged along the second direction Y (e.g., ...). Figure 1 The cleaning device 3 is configured to clean the graphite boat 200, with the cleaning equipment arranged at intervals along the front and back directions of the paper surface. A connecting platform 11 is located between the coating device 1 and the inserting device 2 along a first direction X. The connecting platform 11 is used to dock with both the coating device 1 and the inserting device 2. A carrier 111 movable along the first direction X is provided on the connecting platform 11. The carrier 111 is configured to carry the graphite boat 200 for transporting it between the coating device 1 and the inserting device 2. A transport track 4 extends along a second direction Y, docking with both the connecting platform 11 and the cleaning device 3. The transport track 4 is configured to transport the graphite boat 200 between the connecting platform 11 and the cleaning device 3. The first direction X and the second direction Y intersect.

[0047] The solar cell production system 100 disclosed in this application includes a coating equipment 1, a wafer insertion equipment 2, and a cleaning equipment 3 connected to each other via a connecting platform 11 and a transport track 4. This enables automated transport between the processes of inserting and removing silicon wafers in the graphite boat 200, coating silicon wafers in the graphite boat 200, and cleaning the graphite boat 200. This improves the handling efficiency of the graphite boat 200 in the solar cell production process, thereby increasing the production efficiency of the solar cells.

[0048] Secondly, a connecting platform 11 is positioned between the coating equipment 1 and the insertion equipment 2 along the first direction X, for docking with both equipment. The connecting platform 11 also has a movable support member 111 along the first direction X, capable of carrying the graphite boat 200, thereby transporting the graphite boat 200 between the coating equipment 1 and the insertion equipment 2 via the support member 111. Additionally, a transport track 4 extending along the second direction Y is provided, docking with both the connecting platform 11 and the cleaning equipment 3, thereby transporting the graphite boat 200 between them. The first direction X and the second direction Y intersect. This layout, where the first direction X intersects the second direction Y, allows the coating equipment 1, the insertion equipment 2, the cleaning equipment 3, the connecting platform 11, and the transport track 4 to be compactly arranged within a relatively small space, thereby reducing the space occupied by the transport track 4 and improving the overall compactness of the battery cell production system 100.

[0049] It is understood that the above-mentioned coating equipment 1 can be a PECVD (Plasma Enhanced Chemical Vapor Deposition) equipment or an ALD (Atomic Layer Deposition) equipment, etc., and this embodiment does not specifically limit it.

[0050] It is understandable that in the above-mentioned coating equipment 1, the graphite boat 200 carries the silicon wafer and performs coating in the process chamber of the coating equipment 1, thereby generating a silicon nitride thin film layer on the surface of the silicon wafer.

[0051] It is understood that the aforementioned wafer insertion device 2 can be a robotic arm wafer insertion device, which uses a robotic arm to grip the silicon wafers, thereby inserting and removing the silicon wafers from the graphite boat 200. Of course, the wafer insertion device 2 can also be a pneumatic wafer insertion device, which uses a cylinder to drive the grippers to grip the silicon wafers, thereby inserting and removing the silicon wafers from the graphite boat 200. Other types of wafer insertion devices 2 are also possible, and this embodiment does not specifically limit them.

[0052] Understandably, when the graphite boat 200 carries the silicon wafer and is coated in the coating equipment 1, the coating equipment 1 will also coat the non-silicon wafer-covered areas of the graphite boat 200. This leads to the accumulation of a silicon nitride film layer on the graphite boat 200 during long-term use. At high temperatures, the silicon nitride reacts with the graphite, causing the graphite boat 200 to thin and affecting its operational stability. Therefore, to ensure the long-term stable use of the graphite boat 200, a cleaning equipment 3 needs to be installed to clean the graphite boat 200 promptly after use, removing the silicon nitride film layer from its surface.

[0053] It is understood that the cleaning equipment 3 mentioned above can be a dry cleaning equipment, such as plasma cleaning equipment or laser cleaning equipment, or a wet cleaning equipment, such as ultrasonic cleaning equipment or spray cleaning equipment. The specific choice can be made according to actual production needs.

[0054] It is understood that the aforementioned connecting platform 11 can be a machine or desktop, etc., used to place the carrier 111. This embodiment does not specifically limit this.

[0055] It is understood that the aforementioned carrier 111 may be a tray or an electric gripper, etc., and this embodiment does not specifically limit it.

[0056] It is understandable that the carrier 111 is movably mounted on the connecting platform 11 along the first direction X. Specifically, this can be achieved through the cooperation of a slide rail and a slider. A slider is provided below the carrier 111, and a slide rail extending along the first direction X is provided on the connecting platform 11. The slide rail and the slider are slidably connected, thereby enabling the carrier 111 to move relative to the connecting platform 11 along the first direction X. Alternatively, it can be achieved through the cooperation of a pulley and a sliding groove. A pulley is provided below the carrier 111, and a sliding groove extending along the first direction X is provided on the connecting platform 11. The pulley and the sliding groove are slidably connected, thereby enabling the carrier 111 to move relative to the connecting platform 11 along the first direction X.

[0057] It is understood that the aforementioned transport track 4 can be a conveyor belt or a suspended track, etc., and this embodiment does not specifically limit it.

[0058] It is understandable that the aforementioned coating equipment 1, wafer insertion equipment 2, cleaning equipment 3, connecting table 11, and transport track 4 are all equipped with robotic arms for gripping graphite boats 200 between processes. For example, the robotic arm on coating equipment 1 is used to grip the graphite boat 200 carrying the silicon wafer to be coated from the carrier 111 on the connecting table 11 and transport it into coating equipment 1, and to grip the graphite boat 200 carrying the coated silicon wafer from inside coating equipment 1 and transport it onto the carrier 111. Of course, the two robotic arms used for gripping the graphite boat 200 into coating equipment 1 and for gripping the graphite boat 200 out of coating equipment 1 are two different robotic arms. This avoids confusion in gripping the graphite boat 200, which could affect the production of solar cells.

[0059] In some embodiments, please refer to Figure 1 and Figure 2 , Figure 2 This is a schematic diagram of the transport track structure disclosed in this application embodiment. The transport track 4 includes a first sub-transport track 41 and a second sub-transport track 42. The first sub-transport track 41 is configured to transport the graphite boat 200 to be cleaned from the connecting platform 11 to the cleaning equipment 3, and the second sub-transport track 42 is configured to transport the cleaned graphite boat 200 from the cleaning equipment 3 to the connecting platform 11. By setting up two sub-transport tracks, where the first sub-transport track 41 is responsible for transporting the graphite boat 200 to be cleaned to the cleaning equipment 3 for cleaning, and the second sub-transport track 42 is responsible for transporting the cleaned graphite boat 200 back to the connecting platform 11, this arrangement makes the cleaning process of the graphite boat 200 clearer and smoother, thereby avoiding confusion during the transportation of the graphite boat 200 and improving the operating efficiency of the entire battery cell production system 100.

[0060] Furthermore, by transporting the graphite boats 200 to be cleaned and those already cleaned via two different sub-transport tracks, the first sub-transport track 41 and the second sub-transport track 42, the dwell time of the graphite boats 200 during the waiting and return process can be reduced, thereby accelerating the turnover rate of the graphite boats 200 and improving the efficiency of the entire solar cell production system 100. On the other hand, it also avoids secondary contamination of the cleaned graphite boats 200 by the graphite boats 200 to be cleaned, thus ensuring the cleaning effect of the graphite boats 200 and the production quality of the solar cells.

[0061] It is understood that the first sub-transport track 41 and the second sub-transport track 42 can be located at the same height or at different heights. In this embodiment, the following description will be based on the first sub-transport track 41 and the second sub-transport track 42 being located at different heights.

[0062] It is understood that the first sub-transport track 41 and the second sub-transport track 42 can both be located within the height range of the coating equipment 1, or one of them can be located within the height range of the coating equipment 1 and the other can be located above the coating equipment 1. Of course, both sub-transport tracks can also be located above the coating equipment 1. In this embodiment, the following description will be based on the premise that the first sub-transport track 41 and the second sub-transport track 42 are both located above the coating equipment 1.

[0063] Optionally, please refer to Figures 1 to 3 , Figure 3 This is a schematic diagram of the structure of the first lifting assembly and the second lifting assembly disclosed in the embodiments of this application. The first sub-transport track 41 and the second sub-transport track 42 are spaced apart along the height direction of the coating equipment 1, and both the first sub-transport track 41 and the second sub-transport track 42 are positioned above the coating equipment 1 along the height direction of the coating equipment 1. The battery cell production system 100 also includes a first lifting assembly 5 and a second lifting assembly 6, which are spaced apart. The first lifting assembly 5 is disposed between the first sub-transport track 41 and the connecting platform 11, and is configured to dock with the first sub-transport track 41 and the connecting platform 11 to transport the graphite boat 200 from the connecting platform 11 to the first sub-transport track 41. The second lifting assembly 6 is disposed between the second sub-transport track 42 and the connecting platform 11, and is configured to dock with the second sub-transport track 42 and the connecting platform 11 to transport the graphite boat 200 from the second sub-transport track 42 to the connecting platform 11. By setting the first sub-transport track 41 and the second sub-transport track 42 at intervals along the height direction of the coating equipment 1, and placing both sub-transport tracks above the coating equipment 1, the vertical space of the battery cell production workshop can be fully utilized, thereby reducing the lateral space occupied by the transport track 4 and improving the space utilization rate of the production workshop.

[0064] Secondly, the graphite boat 200 to be cleaned and the cleaned graphite boat 200 run on two sub-transport tracks at different heights, which can avoid cross-interference that may occur when the two are transported on the same horizontal plane, thus ensuring smoother transport of the graphite boat 200 and improving the production efficiency of solar cells.

[0065] In addition, the first lifting assembly 5 can accurately transport the graphite boat 200 to be cleaned from the connecting table 11 to the first sub-transport track 41, and then the first sub-transport track 41 directly sends it to the cleaning equipment 3, thereby ensuring that the graphite boat 200 can enter the cleaning process in a timely and accurate manner. Similarly, the second lifting assembly 6 can accurately transport the cleaned graphite boat 200 to the connecting table 11, thereby ensuring the smooth progress of subsequent production.

[0066] It is understood that the first lifting component 5 and the second lifting component 6 can be electric lifting platforms or screw jacks, etc., and this embodiment does not specifically limit them.

[0067] It is understood that the first lifting component 5 and the second lifting component 6 can be spaced apart along the first direction X, so that the first lifting component 5 and the second lifting component 6 are respectively located on both sides of the first sub-transport track 41 along the first direction X. The first lifting component 5 and the second lifting component 6 can also be spaced apart along the second direction Y, but both the first lifting component 5 and the second lifting component 6 are located on one side of the first sub-transport track 41 along the first direction X. Of course, the first lifting component 5 and the second lifting component 6 can also be spaced apart along both the first direction X and the second direction Y, depending on actual needs.

[0068] It is understandable that the graphite boat 200 can be moved from the connecting platform 11 to the first lifting assembly 5 and from the second lifting assembly 6 to the connecting platform 11 by means of a robotic arm. The robotic arm can be set on the connecting platform 11 or on the first lifting assembly 5 and the second lifting assembly 6. This embodiment does not make specific limitations on this.

[0069] It is understood that, along the height direction of the coating equipment 1, the first sub-transport track 41 can be positioned above the second sub-transport track 42, or the first sub-transport track 41 can be positioned below the second sub-transport track 42. In this embodiment, the first sub-transport track 41 is positioned below the second sub-transport track 42 for subsequent description.

[0070] In some embodiments, please refer to Figure 3The cell production system 100 also includes a carrier plate 411b. A carrier plate placement area 411 is connected below the first sub-transport track 41. The carrier plate placement area 411 is spaced above the connecting table 11 along the height direction of the coating equipment 1. The carrier plate placement area 411 has multiple placement positions 411a spaced along the height direction of the coating equipment 1. The placement positions 411a are configured to place the carrier plate 411b, and the carrier plate 411b is configured to carry the graphite boat 200. The first lifting assembly 5 includes a first lifting member 51 and a second lifting member 52, which are spaced apart. The first lifting member 51 docks with the connecting table 11 and the placement position 411a to transport the graphite boat 200 from the connecting table 11 to the placement position 411a. The second lifting member 52 docks with the placement position 411a and the first sub-transport track 41 to transport the carrier plate 411b carrying the graphite boat 200 to the first sub-transport track 41. A carrier plate placement area 411 is connected below the first sub-transport track 41. This carrier plate placement area 411 is spaced apart above the connecting platform 11 along the height direction of the coating equipment 1, and the carrier plate placement area 411 has multiple placement positions 411a spaced apart along the height direction of the coating equipment 1. The placement positions 411a are used to place carrier plates 411b, which are configured to support the graphite boat 200. By spaced apart above the connecting platform 11 along the height direction of the coating equipment 1, and having multiple placement positions 411a spaced apart along this direction, the carrier plate placement area 4111 provides placement space for the carrier plates 411b, facilitating the management of the carrier plates 411b.

[0071] The carrier plate 411b is used to support the graphite boat 200 and is transported together with the graphite boat 200 to the first sub-transport track 41. The support of the carrier plate 411b makes the graphite boat 200 more stable during transportation, thereby avoiding damage caused by the graphite boat 200 overturning or colliding during transportation.

[0072] Secondly, when the graphite boat 200 needs to be transported from the connecting platform 11 to the first sub-transport track 41, the first lifting component 51 first transports it to the placement position 411a, and then the second lifting component 52 transports the carrier plate 411b carrying the graphite boat 200 to the first sub-transport track 41. This phased lifting and transportation method can avoid problems such as shaking caused by direct long-distance lifting and lowering during transportation, thereby improving the stability of the graphite boat 200 transportation.

[0073] It is understood that the aforementioned carrier plate 411b can be a metal plate, such as a stainless steel plate or an aluminum plate, and this embodiment does not specifically limit it.

[0074] It is understood that the first lifting component 51 and the second lifting component 52 mentioned above can be an electric lifting platform or a screw jack, etc., and this embodiment does not specifically limit them.

[0075] It is understood that the aforementioned carrier plate placement area 411 can be a multi-layer rack-type placement area or a rotating rack-type placement area, etc., wherein multiple placement positions 411a are spaced apart along the height direction of the coating equipment 1. Within the carrier plate placement area 411, the placement position 411a can be a fixed shelf for placing the carrier plate 411b, or it can be a movable pallet for placing the carrier plate 411b.

[0076] It is understandable that robotic arms can be installed on the first lifting member 51, the placement position 411a, and the second lifting member 52 to achieve the following: the graphite boat 200 is picked up from the connecting table 11 and placed onto the first lifting member 51; the graphite boat 200 is picked up from the first lifting member 51 and placed onto the carrier plate 411b at the placement position 411a; the carrier plate 411b carrying the graphite boat 200 is picked up from the placement position 411a and placed onto the second lifting member 52; and the carrier plate 411b carrying the graphite boat 200 is picked up from the second lifting member 52 and placed onto the first sub-transport track 41. Of course, the robotic arms can be installed in other locations besides those described above, depending on actual needs and equipment layout.

[0077] Optionally, the carrier plate 411b is provided with an identification module (not shown in the figure), and the coating equipment 1, the inserting equipment 2 and the cleaning equipment 3 are all provided with a reader (not shown in the figure), which is configured to read the identification module to track the position of the graphite boat 200.

[0078] By setting an identification module on the carrier plate 411b and setting reading devices on the coating equipment 1, the insertion equipment 2 and the cleaning equipment 3, the position of the graphite boat 200 in the solar cell production system 100 can be accurately tracked, thereby facilitating effective monitoring and management of the solar cell production process.

[0079] Secondly, by reading the information from the identification module, the cell production system 100 can more rationally arrange the working sequence and time of each device, thereby helping to achieve automated and intelligent scheduling of the cell production process.

[0080] In addition, if a silicon wafer corresponding to a certain Graphite Boat 200 has a quality problem during the cell production process, the information recorded by the corresponding identification module can be used to trace back to its entire production process, thereby accurately locating the root cause of the problem.

[0081] It is understood that if the above-mentioned identification module can be a QR code, then the corresponding reader can be a QR code scanner; or, if the identification module can be an RFID chip, then the corresponding reader can be an RFID reader. This embodiment does not make any specific limitations on this.

[0082] In some embodiments, please refer to Figures 2 to 5 , Figure 4 This is a schematic diagram of the structure of the second cache area disclosed in an embodiment of this application. Figure 5 This is a top view of the solar cell production system disclosed in this application embodiment. The solar cell production system 100 also includes a first buffer area 7 and a second buffer area 8. The first buffer area 7 is located between the coating equipment 1 and the cleaning equipment 3 along a first direction X. The first buffer area 7 has a plurality of first buffer positions 71, which are used to temporarily store the graphite boat 200 to be cleaned. The second buffer area 8 is arranged at intervals from the inserting equipment 2 along a second direction Y. The first buffer area 7 and the second buffer area 8 are respectively located on both sides of the transport track 4 along the first direction X. The second buffer area 8 has a plurality of second buffer positions 81, which are used to temporarily store the cleaned graphite boat 200. The solar cell production system 100 also includes a third lifting assembly 72 and a fourth lifting assembly 82. The third lifting assembly 72 is disposed between the first sub-transport track 41 and the first buffer positions 71. The third lifting assembly 72 is configured to dock with the first buffer positions 71 and the first sub-transport track 41 to transport the graphite boat 200 to be cleaned from the first sub-transport track 41 to the first buffer positions 71. The fourth lifting component 82 is disposed between the second sub-transport track 42 and the second buffer position 81. The fourth lifting component 82 is configured to dock with the second buffer position 81 and the second sub-transport track 42 to transport the cleaned graphite boat 200 from the second sub-transport track 42 to the second buffer position 81.

[0083] By setting up a first buffer zone 7 and a second buffer zone 8, the graphite boats 200 to be cleaned and the cleaned graphite boats 200 can be temporarily stored. This effectively balances the differences caused by the asynchronous processing speeds of the coating equipment 1, the wafer insertion equipment 2, and the cleaning equipment 3, thereby reducing the idle or waiting time of the equipment and improving the overall production efficiency of the solar cell production system 100. In addition, by setting up a third lifting component 72 and a fourth lifting component 82 to cooperate with the buffer zone and the transport track 4 respectively, the graphite boats 200 can be transported between the buffer zone and the transport track 4 in an orderly manner, making the flow of graphite boats 200 between the various devices smoother.

[0084] In addition, by setting up a buffer area to temporarily store the graphite boat 200, the cell production system 100 can better cope with emergencies. For example, when the equipment malfunctions, the buffer area can temporarily store the graphite boat 200 to be cleaned and after cleaning, waiting for the equipment to be repaired, thereby maintaining the relative stability of the cell production system 100.

[0085] It is understood that the first buffer area 7 and the second buffer area 8 mentioned above can be equipped with floor-standing buffer racks or mobile buffer racks, etc., to realize the buffer placement of the graphite boat. This embodiment does not make specific limitations in this regard.

[0086] It is understood that the first cache bit 71 and the second cache bit 81 can be a platform or tray set in the cache area, etc., and this embodiment does not make specific limitations on this.

[0087] It is understood that the third lifting assembly 72 and the fourth lifting assembly 82 have the same structure as the first lifting assembly 5 described above, and this embodiment will not elaborate further on this.

[0088] It is understandable that robotic arms are provided in the third lifting assembly 72 and the fourth lifting assembly 82 to transport the graphite boat 200 from the lifting assembly to the sub-transport track. Alternatively, robotic arms can be provided on the first sub-transport track 41 and the second sub-transport track 42 to transport the graphite boat 200. The specific configuration can be determined according to actual needs.

[0089] Optionally, please refer to Figure 5 The solar cell production system 100 also includes a calibration boat device 9, which is spaced apart from the insertion device 2 along the second direction Y. The calibration boat device 9 and the cleaning device 3 are located on opposite sides of the transport track 4 along the first direction X. The calibration boat device 9 is configured to calibrate the cleaned graphite boat 200. Considering that the graphite boat 200 may undergo slight deformation during the cleaning process due to factors such as water flow impact, chemical corrosion, or high temperature, the calibration boat device 9 can calibrate the cleaned graphite boat 200, ensuring its stable use in subsequent processes. Furthermore, the calibrated graphite boat 200 ensures its dimensional accuracy, guaranteeing neat arrangement of silicon wafers during subsequent insertion. This prevents uneven or missing coatings during the silicon wafer deposition process due to dimensional deviations in the graphite boat 200, thereby improving the production quality of the solar cells.

[0090] Secondly, the calibration boat equipment 9 can promptly detect and correct any abnormalities in the cleaned graphite boat 200, thereby preventing unqualified graphite boats 200 from entering subsequent production stages and ensuring the production quality of the solar cells.

[0091] Optionally, the calibration boat equipment 9 includes a testing component 91 and a repair component 92, which are arranged alternately. The testing component 91 is configured to test the cleaned graphite boat 200, and the repair component 92 is configured to repair graphite boats 200 that fail the test by the testing component 91. By setting the testing component 91 and the repair component 92 separately, the processes of testing and repairing the graphite boat 200 can be separated. Graphite boats 200 that fail the test can be sent to the repair component 92 for repair, while the testing component 91 can continue testing the graphite boat 200, thereby improving the overall working efficiency of the calibration boat equipment 9.

[0092] In addition, by setting up the maintenance component 92, some defective graphite boats 200 can be repaired and continued to be used, thereby reducing the cost of the cell production system 100.

[0093] It is understood that the aforementioned detection component 91 may specifically be a 3D laser scanner or an optical inspection instrument, etc., and this embodiment does not specifically limit it.

[0094] It is understood that the aforementioned repair component 92 may specifically be a mechanical straightening component or a structural reinforcement component, etc., and this embodiment does not specifically limit it.

[0095] In some embodiments, please refer to Figure 5 The solar cell production system 100 also includes a silicon wafer transport device 21, which is disposed along a first direction X on the side of the insertion device 2 away from the coating device 1. The silicon wafer transport device 21 is configured to transport silicon wafers to or from the insertion device 2. By setting up the silicon wafer transport device 21, silicon wafers can be automatically transported to or from the insertion device 2, thereby shortening the silicon wafer transport time, accelerating the turnaround speed of silicon wafers in the production process, and improving the efficiency of the entire solar cell production system 100.

[0096] In addition, by cooperating with the wafer transfer device 21 and the wafer insertion device 2, the automatic loading, unloading and transfer of silicon wafers can be realized, thereby making the production process of solar cells more continuous and reducing production delays caused by poor handling connections.

[0097] It is understood that the silicon wafer transport device 21 mentioned above can be a conveyor belt or a robotic arm, etc., and this embodiment does not specifically limit it.

[0098] Optionally, please refer to Figure 6 , Figure 6 This is a schematic diagram of a solar cell production system with multiple coating equipment, insertion equipment, cleaning equipment, and connecting stations as disclosed in this application. Multiple coating equipment 1, cleaning equipment 3, insertion equipment 2, and connecting stations 11 are included. Multiple coating equipment 1 and multiple cleaning equipment 3 are arranged at intervals along the second direction Y. The number of insertion equipment 2, coating equipment 1, and connecting stations 11 is the same, and they are arranged in a one-to-one correspondence. By arranging multiple coating equipment 1 and multiple cleaning equipment 3 at intervals along the second direction Y, multiple graphite boats 200 can simultaneously perform coating and cleaning operations, thereby improving the production efficiency and scale of the entire solar cell production system 100.

[0099] In addition, by setting the same number of wafer insertion devices 2, coating devices 1 and connecting stations 11 in a one-to-one correspondence, each wafer insertion device 2 can work efficiently with the corresponding coating device 1 and connecting station 11, ensuring that silicon wafers and graphite boats 200 can be transferred between the devices in a timely and smooth manner. This avoids idleness or congestion caused by mismatch in the number of devices, thereby improving the utilization rate of the equipment.

[0100] Secondly, this multi-equipment layout allows for flexible adjustment of the number of equipment deployed based on the size of production orders, thereby improving the flexibility of the cell production system 100.

[0101] It is understood that this application uses the entire coating process of silicon wafers as an example to illustrate the flow of the graphite boat 200. Of course, the transport track 4, connecting platform 11, and lifting assembly in this application can also be applied to other process steps in the production of solar cells. This embodiment will not elaborate on this further.

[0102] The following is a brief description of the entire process of silicon wafer coating in the solar cell production system 100 of this application:

[0103] First, the graphite boat 200 is inserted into the wafer insertion device 2. Then, the graphite boat 200 carrying the silicon wafer is transferred from the wafer insertion device 2 to the carrier 111 of the connecting platform 11 by a robotic arm. It is then transported via the carrier 111 to the side near the coating device 1. The robotic arm of the coating device 1 transfers the graphite boat 200 carrying the silicon wafer from the carrier 111 to the coating device 1 for silicon wafer coating. After the silicon wafer is coated, the robotic arm of the coating device 1 transfers the graphite boat 200 carrying the coated silicon wafer from the coating device 1 to the carrier 111 of the connecting platform 11. It is then transported via the carrier 111 to the side near the wafer insertion device 2. The robotic arm of the wafer insertion device 2 then transfers it into the wafer insertion device 2, and the wafer insertion device 2 removes the coated silicon wafer from the graphite boat 200. Then, the robotic arm of the inserting device 2 transports the empty graphite boat 200 to the connecting platform 11. The first lifting component 51 first transports the empty graphite boat 200 to the placement position 411a, and then the second lifting component 52 transports the carrier plate 411b carrying the graphite boat 200 to the first sub-transport track 41. The first sub-transport track 41 transports it to the cleaning device 3. The robotic arm of the cleaning device 3 transports the carrier plate 411b carrying the graphite boat 200 to the cleaning device 3 for cleaning the graphite boat 200. After cleaning, the robotic arm of the cleaning equipment 3 transports the carrier plate 411b carrying the cleaned graphite boat 200 to the second sub-transport track 42. It is then transported via the second sub-transport track 42 to the calibration boat equipment 9 for testing and maintenance of the graphite boat 200. Graphite boats 200 that pass the test are then transported back to the second sub-transport track 42 by the robotic arm of the calibration boat equipment 9. They are then transported via the second sub-transport track 42 to the inserting equipment 2 for inserting graphite boats 200 again, and this cycle continues.

[0104] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this application.

Claims

1. A battery tab production system, characterized by, The battery cell production system includes: A coating apparatus configured to coat silicon wafers; An insertion device, wherein the insertion device and the coating device are spaced apart along a first direction, and the insertion device is configured to insert the silicon wafer into a graphite boat or remove the silicon wafer from the graphite boat; A cleaning device is provided at a distance from the coating device along a second direction, and the cleaning device is configured to clean the graphite boat. A connecting platform is located between the coating equipment and the inserting equipment along the first direction. The connecting platform is used to dock with the coating equipment and the inserting equipment. The connecting platform is provided with a carrier that is movable along the first direction. The carrier is configured to carry the graphite boat for transporting the graphite boat between the coating equipment and the inserting equipment. A transport track extends along the second direction and docks with the connecting platform and the cleaning equipment respectively. The transport track is configured between the connecting platform and the cleaning equipment to transport the graphite boat. The first direction and the second direction intersect.

2. The cell production system according to claim 1, wherein The transport track includes a first sub-transport track and a second sub-transport track. The first sub-transport track is configured to transport the graphite boat to be cleaned from the connecting platform to the cleaning equipment, and the second sub-transport track is configured to transport the cleaned graphite boat from the cleaning equipment to the connecting platform.

3. The cell production system according to claim 2, wherein The first sub-transport track and the second sub-transport track are spaced apart along the height direction of the coating equipment, and both the first sub-transport track and the second sub-transport track are positioned above the coating equipment along the height direction of the coating equipment. The cell production system further includes a first lifting assembly and a second lifting assembly, which are spaced apart. The first lifting assembly is located between the first sub-transport track and the connecting platform and is configured to dock with the first sub-transport track and the connecting platform to transport the graphite boat from the connecting platform to the first sub-transport track. The second lifting assembly is located between the second sub-transport track and the connecting platform and is configured to dock with the second sub-transport track and the connecting platform to transport the graphite boat from the second sub-transport track to the connecting platform.

4. The cell production system according to claim 3, wherein Along the height direction of the coating equipment, the first sub-transport track is located below the second sub-transport track; The battery cell production system also includes a carrier plate. A carrier plate placement area is connected below the first sub-transport track. The carrier plate placement area is spaced apart above the connecting table along the height direction of the coating equipment. The carrier plate placement area is provided with multiple placement positions spaced apart along the height direction of the coating equipment. The placement positions are configured to place the carrier plate, and the carrier plate is configured to support the graphite boat. The first lifting assembly includes a first lifting member and a second lifting member, which are spaced apart. The first lifting member docks with the connecting platform and the placement position to transport the graphite boat from the connecting platform to the placement position. The second lifting member docks with the placement position and the first sub-transport track to transport the carrier plate carrying the graphite boat to the first sub-transport track.

5. The cell production system of claim 4, wherein The carrier plate is provided with an identification module, and the coating equipment, the inserting equipment and the cleaning equipment are all provided with a reader. The reader is configured to read the identification module in order to track the position of the graphite boat.

6. The cell production system of claim 4, wherein The cell production system further includes a first buffer area and a second buffer area. The first buffer area is located between the coating equipment and the cleaning equipment along the second direction. The first buffer area has multiple first buffer positions for temporarily storing the graphite boat to be cleaned. The second buffer area is spaced apart from the insertion equipment along the second direction. The first buffer area and the second buffer area are located on both sides of the transport track along the first direction. The second buffer area has multiple second buffer positions for temporarily storing the cleaned graphite boat. The cell production system further includes a third lifting assembly and a fourth lifting assembly. The third lifting assembly is disposed between the first sub-transport track and the first buffer position, and is configured to dock with the first buffer position and the first sub-transport track to transport the graphite boat to be cleaned from the first sub-transport track to the first buffer position. The fourth lifting assembly is disposed between the second sub-transport track and the second buffer position, and is configured to dock with the second buffer position and the second sub-transport track to transport the cleaned graphite boat from the second sub-transport track to the second buffer position.

7. The cell production system according to any one of claims 1 to 6, wherein The cell production system also includes a calibration boat device, which is spaced apart from the insertion device along the second direction, and the calibration boat device and the cleaning device are located on opposite sides of the transport track along the first direction. The calibration boat device is configured to calibrate the cleaned graphite boat.

8. The cell production system of claim 7, wherein The calibration boat equipment includes a detection component and a repair component, which are arranged at intervals. The detection component is configured to detect the cleaned graphite boat, and the repair component is configured to repair the graphite boat that is found to be unqualified by the detection component.

9. The cell production system according to any one of claims 1 to 6, wherein The cell production system further includes a silicon wafer transport device, which is disposed along the first direction on the side of the insertion device away from the coating device. The silicon wafer transport device is configured to transport the silicon wafer to the insertion device or to remove the silicon wafer from the insertion device.

10. The cell production system according to any one of claims 1 to 6, wherein The coating equipment, the cleaning equipment, the inserting equipment, and the connecting platform are all multiple. The multiple coating equipment and the multiple cleaning equipment are arranged at intervals along the second direction. The number of inserting equipment, coating equipment, and connecting platforms is the same, and the inserting equipment, coating equipment, and connecting platforms are arranged in a one-to-one correspondence.

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