Transportation device and production system

Abstract

This application relates to a transport equipment and production system. The transport equipment includes a frame, a production unit, a feeding unit, a storage unit, and a handling unit. The production unit includes several production devices, each positioned close to the frame. The feeding unit transports material components. The storage unit is positioned close to the production unit and stores material components produced by the production unit and material components awaiting production transported by the feeding unit. The handling unit is movably coupled to the frame and configured to move relative to the frame to transport material components between the production devices, feeding unit, and storage unit. The transport equipment, utilizing the cooperation of the production unit, feeding unit, storage unit, and handling unit, enables automated chip production and transport, significantly reducing labor costs and effectively improving production efficiency.

Description

Technical Field

[0001] This application relates to the field of transportation equipment technology, and in particular to a transportation equipment and production system. Background Technology

[0002] With the development of semiconductor chips and strong government support for the semiconductor industry, market demand for semiconductor chips is growing rapidly. Correspondingly, chip manufacturers urgently need to improve semiconductor chip production efficiency and capacity.

[0003] However, most chip manufacturers on the market currently adopt a single-machine, single-process production model. Although one person can operate multiple machines at the same time, the labor cost is high and the production efficiency is low. Utility Model Content

[0004] Therefore, it is necessary to provide a transportation equipment and production system to address the above problems.

[0005] A transport device for chip manufacturing, comprising:

[0006] frame;

[0007] The production unit includes several production devices, each of which is located close to the frame;

[0008] The feeding unit is used to transport material components;

[0009] A storage unit, located close to the production unit, is used to store material components produced by the production unit after completion, as well as material components to be produced conveyed by the feeding unit; and

[0010] A conveying unit is movably coupled to the frame and configured to move relative to the frame to convey material components between the production units, the feeding units and the storage units.

[0011] In one embodiment, the material assembly includes a crucible, a graphite module, and a carrier for holding the graphite module; the production apparatus includes a machine and a single crystal furnace disposed on the machine, the machine being configured with a crucible loading position for placing the crucible and a graphite loading position for placing the graphite module and the carrier.

[0012] In one embodiment, the conveying unit includes a conveying assembly, which includes a gripping part and an adsorption part. The gripping part includes a driving member and a gripper. The driving member is connected between the third displacement assembly and the gripper. The driving member is used to drive the gripper to open and close in order to pick up and put down the crucible.

[0013] In one embodiment, the connection between the drive member and the gripper is configured to form a pivot point, and the drive member is also used to drive the gripper to rotate around the pivot point.

[0014] In one embodiment, the conveying assembly includes an adsorption section, which includes an adsorption element and a vacuuming element. The adsorption element is coupled to the third displacement assembly, and the vacuuming element is coupled to the adsorption element. The vacuuming element evacuates the adsorption element so that the adsorption element can vacuum adsorb the graphite module.

[0015] In one embodiment, the conveying unit further includes a first displacement component, a second displacement component, and a third displacement component. The first displacement component is movably coupled to the frame, the second moving component is movably coupled to the first moving component, the third moving component is movably coupled to the second moving component, and the conveying component is coupled to the third moving component.

[0016] The first moving component is controllably movable back and forth relative to the frame along a first direction, and drives the second moving component, the third moving component, and the camera component to move synchronously along the first direction; the second moving component is controllably movable back and forth relative to the first moving component along a second direction, and drives the third moving component and the camera component to move synchronously along the second direction; the third moving component is controllably movable back and forth relative to the second moving component along a third direction, and drives the camera component to move synchronously along the third direction; the first direction, the second direction, and the third direction intersect each other.

[0017] In one embodiment, the transport unit further includes a positioning detection element and a controller. The positioning detection element is coupled to the transport assembly and is used to determine the position information of the crucible and the graphite module within the single crystal furnace. The controller is used to control the transport assembly to move the crucible and the graphite module according to the position information determined by the positioning detection element.

[0018] In one embodiment, the conveying unit further includes a temperature sensor, which is coupled to the conveying assembly and used to determine the temperature information of the material assembly on the production device; the controller is also used to control the conveying assembly to move the crucible and the graphite module according to the temperature information determined by the temperature sensor.

[0019] In one embodiment, a cleaning unit is further included, which is coupled to the conveying unit and is used to clean the material components after the production unit has completed production and the material components to be produced conveyed by the feeding unit.

[0020] A production system including transport equipment as described in the foregoing embodiments.

[0021] The aforementioned transportation equipment and production system include a frame, production units, feeding units, storage units, and handling units. Each production unit comprises several production devices, all positioned close to the frame. The feeding unit transports material components. The storage unit is positioned close to the production unit and stores material components produced by the production unit and those awaiting production from the feeding unit. The handling unit is movably mounted on the frame and configured to move relative to the frame to transport material components between the production devices, feeding units, and storage units. By utilizing the coordinated operation of the production units, feeding units, storage units, and handling units, the transportation equipment enables automated chip production and transportation, significantly reducing labor costs and effectively improving production efficiency. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of the assembly of the transportation equipment and material components in this application.

[0023] Figure 2 This is a schematic diagram of the transport unit in this application.

[0024] Figure Labels

[0025] 100 transport equipment;

[0026] Rack 10;

[0027] Production unit 11; Production device 111;

[0028] Storage unit 12; Feeding unit 13;

[0029] Handling unit 14; handling assembly 141; first displacement assembly 142; second displacement assembly 143; third displacement assembly 144; positioning detection component 145;

[0030] Material assembly 200; crucible 20; material fixture 21. Detailed Implementation

[0031] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0032] In the description of this application, it should be understood that if terms such as "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" appear, these terms indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0033] Furthermore, where the terms "first" and "second" appear, these terms are for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined with "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, where the term "multiple" appears, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0034] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0035] In this application, unless otherwise expressly specified and limited, the use of descriptions such as "above" or "below" the second feature indicates that the first and second features are in direct contact or indirect contact via an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. Similarly, "below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0036] It should be noted that if an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. If an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. If so, the terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used in this application are for illustrative purposes only and do not represent the only possible implementation.

[0037] With the development of semiconductor chips and strong government support for the semiconductor industry, market demand for semiconductor chips is growing rapidly. Correspondingly, chip manufacturers urgently need to improve semiconductor chip production efficiency and capacity.

[0038] However, most chip manufacturers on the market currently adopt a single-machine, single-process production model. Although one person can operate multiple machines at the same time, the labor cost is high and the production efficiency is low.

[0039] Based on the above considerations, in order to solve the above problems, please refer to [link / reference needed]. Figure 1 and Figure 2 One or more embodiments of this application provide an intelligent transportation device. The intelligent transportation device utilizes the cooperation of a production unit 11, a feeding unit 13, a storage unit 12, and a handling unit 14 to realize the automated production and transportation of chips, thereby greatly saving labor costs and effectively improving production efficiency.

[0040] Specifically, the intelligent transportation equipment includes a frame 10, a production unit 11, a feeding unit 13, a storage unit 12, and a handling unit 14. The production unit 11 includes several production devices 111, each of which is located close to the frame 10; the feeding unit 13 is used to transport material components 200; the storage unit 12 is located close to the production unit 11 and is used to store the material components 200 after production by the production unit 11 and the material components 200 to be produced conveyed by the feeding unit 13; the handling unit 14 is movably coupled to the frame 10 and configured to move relative to the frame 10 to handle material components 200 between the production devices 111, the feeding unit 13, and the storage unit 12.

[0041] Understandably, during the specific operation of the intelligent transportation equipment, the material component 200 to be produced is manually placed into the storage unit 12, and the feeding unit 13 can move to the storage unit 12 and retrieve the material component 200 to be produced from the storage unit 12. Subsequently, the feeding unit 13 can transport the material component 200 to be produced to each production device 111.

[0042] Furthermore, by controlling the transport unit 14 to move relative to the frame 10 and align with the feeding unit 13, the material assembly 200 to be produced transported on the feeding unit 13 is transported to the corresponding production device 111 for production. After the production process is completed, the transport unit 14 transports the produced material assembly 200 to the storage unit 12 for storage, and subsequently uses the feeding unit 13 to transport the produced material assembly 200 to other equipment; or, after the production process is completed, the transport unit 14 directly transports the produced material assembly 200 to the feeding unit 13, and the feeding unit 13 transports the produced material assembly 200 to other equipment.

[0043] It should be noted that, in this embodiment of the application, the intelligent transport equipment is used in the technical field of chip manufacturing. The material component 200 includes a crucible 20, graphite, and a material fixture 21 for placing the graphite, and the production apparatus 111 includes a machine tool and a single crystal furnace. It is understood that the application field of the intelligent transport equipment is not limited to this. In other embodiments, the material component 200 may correspond to other different products, and the production apparatus 111 may correspond to different structures.

[0044] Correspondingly, the specific operation process when the intelligent transportation equipment manufactures chips is as follows: the crucible 20 to be produced and the graphite are placed in the storage unit 12 by manual labor; the feeding unit 13 can move to the storage unit 12 and take out the crucible 20 to be produced and the graphite from the storage unit 12. Subsequently, the feeding unit 13 can transport the crucible 20 to be produced and the graphite to each production device 111.

[0045] Further, the transport unit 14 is moved relative to the frame 10 and aligned with the feeding unit 13 to transport the crucible 20 to be produced on the feeding unit 13 to the crucible 20 placement position on the corresponding production device 111, and to transport the graphite to be produced on the feeding unit 13 to the product loading position on the corresponding production device 111. Then, the transport unit 14 is moved to transport the graphite to the single crystal furnace for subsequent production processes. After the production process is completed, the transport unit 14 transports the produced graphite to be assembled with the crucible 20, and further transports the assembled graphite and crucible 20 to the storage unit 12 for storage. Finally, the feeding unit 13 transports the produced material assembly 200 to other equipment; or, after the production process is completed, the transport unit 14 directly transports the produced material assembly 200 to the feeding unit 13, and the feeding unit 13 transports the produced material assembly 200 to other equipment.

[0046] In other words, the intelligent transportation equipment provided in this application embodiment utilizes the production unit 11, feeding unit 13, storage unit 12 and handling unit 14 to achieve automated production and transportation of chips, thereby greatly saving labor costs and effectively improving production efficiency.

[0047] In some embodiments, see Figure 1 and Figure 2 The conveying assembly 141 includes a gripping part, which includes a driving member and a gripper. The driving member is connected between the third displacement assembly 144 and the gripper. The driving member is used to drive the gripper to open and close in order to pick up and put down the crucible 20.

[0048] Furthermore, the conveying assembly 141 includes an adsorption section, which includes an adsorption element and a vacuuming element. The adsorption element is coupled to the third displacement assembly 144, and the vacuuming element is coupled to the adsorption element. The vacuuming element evacuates the adsorption element so that the adsorption element can vacuum adsorb the graphite module.

[0049] It is understandable that in the field of chip manufacturing technology, graphite specifically includes graphite rings, graphite plates, graphite felts and graphite wool, and crucible 20 includes a pot body, a pot lid and a crucible 20 cover.

[0050] Thus, during the actual operation of the intelligent transportation equipment, the drive unit can control the opening and closing of the grippers to realize the picking and placing operations of the crucible 20 and the lid. The vacuuming unit can cooperate with the adsorption unit to pick up the graphite ring, graphite plate, graphite wool and crucible 20 cover to realize the picking and placing operations of graphite.

[0051] Specifically, the operation process of intelligent transportation equipment in chip manufacturing is as follows: the crucible 20 to be produced and graphite are manually placed into the storage unit 12. The feeding unit 13 can move to the storage unit 12 and take out the crucible 20 to be produced and graphite from the storage unit 12. Subsequently, the feeding unit 13 can transport the crucible 20 to be produced and graphite to each production device 111.

[0052] Furthermore, the conveying unit 14 is moved relative to the frame 10 and aligned with the feeding unit 13, so that the crucible 20 to be produced transported on the feeding unit 13 can be transported to the crucible 20 placement position on the machine table of the corresponding production device 111 by the gripping part, and the graphite to be produced transported on the feeding unit 13 can be transported to the product loading position on the machine table of the corresponding production device 111 by the adsorption part.

[0053] Following this, a material loading process is required. Specifically, the transport unit 14 needs to be moved to the position of crucible 20, the lid of crucible 20 is picked up by the clamping part, and it is transported to the storage unit 12 for storage. The transport unit 14 is then moved back to the position of crucible 20, and the crucible 20 cover is picked up by the adsorption part and transported to the material fixture 21. Subsequently, the body of crucible 20 is transported to the single crystal furnace using the transport unit 14, and the lid stored in the storage unit 12 is transported to the body of crucible 20 using the transport unit 14. Then, the graphite felt, graphite ring, graphite plate, and graphite wool are sequentially placed into the single crystal furnace using the transport unit 14, and the production process is carried out.

[0054] After the production process is completed, a material unloading process is required. Correspondingly, the material assembly 200 is removed from the single crystal furnace using the handling unit 14 and then returned to its original position. Finally, the material assembly 200 is transported to other equipment using the feeding unit 13; or, after the production process is completed, the material assembly 200 is directly transported to the feeding unit 13 using the handling unit 14, and then transported to other equipment using the feeding unit 13.

[0055] Furthermore, the connection between the drive component and the gripper is configured to form a pivot point, and the drive component is also used to drive the gripper to rotate around the pivot point. In this way, the orientation of the gripper can be flexibly adjusted so that the gripper can accurately grasp the crucible 20, making it flexible to use.

[0056] In some embodiments, see Figure 1 and Figure 2 The conveying unit 14 includes a first displacement component 142, a second displacement component 143 and a third displacement component 144. The first displacement component 142 is movably coupled to the frame 10, the second moving component is movably coupled to the first moving component, the third moving component is movably coupled to the second moving component, and the conveying component 141 is coupled to the third moving component.

[0057] The first moving component is controllably movable back and forth relative to the frame 10 along a first direction, and drives the second moving component, the third moving component, and the camera component to move synchronously along the first direction. The second moving component is controllably movable back and forth relative to the first moving component along a second direction, and drives the third moving component and the camera component to move synchronously along the second direction. The third moving component is controllably movable back and forth relative to the second moving component along a third direction, and drives the camera component to move synchronously along the third direction. The first direction, the second direction, and the third direction intersect each other.

[0058] Understandably, during the actual operation of the intelligent transportation equipment, by controlling the first and second moving components to move along the first and second directions respectively, the first and second moving components drive the handling component 141 to move synchronously along the first and second directions, thereby improving the movement accuracy of the handling component 141 and enabling it to accurately pick up and handle the material component 200. Furthermore, by controlling the third moving component to drive the handling component 141 to move synchronously along the third direction, the handling component 141 can pick up and place the material component 200.

[0059] It should be noted that the first direction, the second direction, and the third direction intersect each other, and their specific orientations are not limited. In this application, the third direction is a vertical direction, the first direction is a horizontal direction perpendicular to the first direction, and the second direction is perpendicular to both the first and second directions. Thus, for ease of understanding, the first direction, the second direction, and the third direction correspond to the X-axis, Y-axis, and Z-axis in a spatial rectangular coordinate system, respectively.

[0060] It should be further noted that the specific structures of the first moving component, the second moving component, and the third moving component are not limited.

[0061] In some embodiments, see Figure 1 and Figure 2 The first moving component includes a first guide rail and a first sliding member. The first guide rail is coupled to the frame 10 and extends along a first direction, and the first sliding member is slidably coupled to the first guide rail.

[0062] The second moving component includes a second guide rail and a second slider. The second guide rail is coupled to the first slider and extends along a second direction. The second slider is slidably coupled to the second guide rail.

[0063] Understandably, the first and second guide rails can guide and limit the movement of the first and second slides, respectively, which helps to ensure that the first and second moving components drive the transport component 141 to move smoothly and reduces the probability of the transport component 141 deviating during movement. This makes operation convenient and improves the user experience.

[0064] In some embodiments, see Figure 1 and Figure 2 The third moving component includes a servo motor and a ball screw. The servo motor is connected to the second displacement component 143, one end of the ball screw is connected to the drive end of the servo motor, and the other end is connected to the conveying component 141.

[0065] In the actual operation of intelligent transportation equipment, the ball screw can convert the rotational motion generated by the servo motor into linear motion to realize the lifting and lowering of the handling component 141, thereby enabling the handling component 141 to pick up and put down the material component 200.

[0066] In some embodiments, see Figure 1 and Figure 2 The conveying unit 14 also includes a positioning detection element 145 and a controller. The positioning detection element 145 is coupled to the conveying assembly 141 and is used to determine the position information between the material assembly 200 and the production device 111. The controller is used to control the movement of the conveying assembly 141 based on the position information determined by the positioning detection element 145.

[0067] It is understandable that in the specific operation of manufacturing chips for intelligent transportation equipment, based on the position information between the material component 200 and the production device 111 determined by the positioning detection component 145, the controller can be used to achieve precise control of the handling component 141 to smoothly complete the loading and unloading processes.

[0068] Specifically, in the chip manufacturing process of the intelligent transportation equipment, the crucible 20 and graphite to be produced are manually placed into the storage unit 12. The feeding unit 13 can move to the storage unit 12 and remove the crucible 20 and graphite to be produced from the storage unit 12. Subsequently, the feeding unit 13 can transport the crucible 20 and graphite to be produced to each production device 111.

[0069] Furthermore, the conveying unit 14 is moved relative to the frame 10 and aligned with the feeding unit 13, so that the crucible 20 to be produced transported on the feeding unit 13 can be transported to the crucible 20 placement position on the machine table of the corresponding production device 111 by the gripping part, and the graphite to be produced transported on the feeding unit 13 can be transported to the product loading position on the machine table of the corresponding production device 111 by the adsorption part.

[0070] Following this, a material loading process is required. Specifically, the transport unit 14 needs to be moved to the position of the crucible 20, the lid of the crucible 20 is gripped by the clamping part, and it is transported to the storage unit 12 for storage. The transport unit 14 is then moved back to the position of the crucible 20, and the lid of the crucible 20 is picked up by the adsorption part and transported to the material fixture 21. After removing the lid of the crucible 20, the positioning detection element 145 is used to confirm the lifting screw hole and its position of the crucible 20, then the threaded handle is screwed into the crucible 20, and then the clamping block extends to tighten it.

[0071] Subsequently, the position of the single crystal furnace is confirmed using the positioning detection component 145, and then the crucible 20 is transported into the single crystal furnace using the transport unit 14. After the crucible 20 is placed, the positioning detection component 145 confirms its position. If there is a deviation, the transport component 141 re-grabs and adjusts the position, followed by measurement, correction, and verification of the height. Further, the transport unit 14 transports the lid stored in the storage unit 12 onto the crucible 20, and the positioning detection component 145 again verifies the installation of the lid and the crucible. Then, the transport unit 14 sequentially places the graphite felt, graphite ring, graphite plate, and graphite wool into the single crystal furnace for the production process.

[0072] After the production process is completed, a material unloading process is required. Correspondingly, the material assembly 200 is removed from the single crystal furnace using the handling unit 14 and then returned to its original position. The positioning detection element 145 performs a similar operation to that in the loading process, which will not be described in detail here.

[0073] Finally, the feeding unit 13 is used to transport the produced material assembly 200 to other equipment; or, after the production process is completed, the handling unit 14 is used to directly transport the produced material assembly 200 to the feeding unit 13, and the feeding unit 13 is used to transport the produced material assembly 200 to other equipment.

[0074] In some embodiments, see Figure 1 and Figure 2 The conveying unit 14 also includes a temperature sensor, which is coupled to the conveying assembly 141 and used to determine the temperature information of the material assembly 200 on the production device 111. The controller is also used to control the movement of the conveying assembly 141 based on the temperature information determined by the temperature sensor.

[0075] Understandably, in the specific operation of manufacturing chips using intelligent transportation equipment, temperature detection devices are mainly used in the material unloading process. Specifically, after the production process is completed, the temperature inside the single crystal furnace needs to be measured and determined using temperature detection devices, so that the material assembly 200 after production can be picked up and placed using the handling component 141.

[0076] In some embodiments, see Figure 1 and Figure 2 The intelligent transportation equipment also includes a cleaning unit, which is connected to the handling unit 14. The cleaning unit is used to clean the material components 200 after the production unit 11 has completed production and the material components 200 to be produced conveyed by the feeding unit 13.

[0077] Understandably, in the specific operation of manufacturing chips for intelligent transportation equipment, the cleaning unit is mainly used in the loading and unloading processes.

[0078] Specifically, in the chip manufacturing process of the intelligent transportation equipment, the crucible 20 and graphite to be produced are manually placed into the storage unit 12. The feeding unit 13 can move to the storage unit 12 and remove the crucible 20 and graphite to be produced from the storage unit 12. Subsequently, the feeding unit 13 can transport the crucible 20 and graphite to be produced to each production device 111.

[0079] Furthermore, the conveying unit 14 is moved relative to the frame 10 and aligned with the feeding unit 13, so that the crucible 20 to be produced transported on the feeding unit 13 can be transported to the crucible 20 placement position on the machine table of the corresponding production device 111 by the gripping part, and the graphite to be produced transported on the feeding unit 13 can be transported to the product loading position on the machine table of the corresponding production device 111 by the adsorption part.

[0080] Following this, a material loading process is required. Specifically, the transport unit 14 needs to be moved to the position of the crucible 20, the lid of the crucible 20 is gripped by the clamping part, and it is transported to the storage unit 12 for storage. The transport unit 14 is then moved back to the position of the crucible 20, and the lid of the crucible 20 is picked up by the adsorption part and transported to the material fixture 21. After removing the lid of the crucible 20, the positioning detection element 145 is used to confirm the lifting screw hole and its position of the crucible 20, then the threaded handle is screwed into the crucible 20, and then the clamping block extends to tighten it.

[0081] Subsequently, the position of the single crystal furnace is confirmed using the positioning detection element 145, and then the crucible 20 is transported into the single crystal furnace using the transport unit 14. After the crucible 20 is placed, the positioning detection element 145 confirms its position. If there is a deviation, the transport component 141 re-grabs and adjusts the position, followed by measurement, correction, and verification of the height. Further, the transport unit 14 transports the lid stored in the storage unit 12 onto the crucible 20, and the positioning detection element 145 again verifies the installation of the lid and the crucible. After the positioning detection element 145 confirms that the position of the crucible 20 is correct, the cleaning unit performs a cleaning operation on the single crystal furnace and the crucible 20.

[0082] After the cleaning operation is completed, the graphite felt, graphite ring, graphite plate, and graphite wool are sequentially placed into the single crystal furnace using the handling unit 14. The positioning detection component 145 is used to determine the position of the graphite felt, graphite ring, graphite plate, and graphite wool, and after confirming that the position is correct, the cleaning unit is used again to clean the materials. Further, the production process is carried out after the cleaning operation is completed.

[0083] After the production process is completed, the unloading process is required. Correspondingly, the material assembly 200 is taken out from the single crystal furnace by the handling unit 14 and returned to its original position in sequence; and the cleaning unit will clean the material assembly 200 and the single crystal furnace after the production is completed.

[0084] Finally, the feeding unit 13 is used to transport the produced material assembly 200 to other equipment; or, after the production process is completed, the handling unit 14 is used to directly transport the produced material assembly 200 to the feeding unit 13, and the feeding unit 13 is used to transport the produced material assembly 200 to other equipment.

[0085] In some embodiments, see Figure 1 and Figure 2 The feeding unit 13 includes several cargo carts, each of which can transport material components 200.

[0086] One or more embodiments of this application provide a production system, which includes the intelligent transportation equipment as described in the foregoing embodiments.

[0087] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0088] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. A transport device for chip manufacturing, characterized in that, include: frame; The production unit includes several production devices, each of which is located close to the frame; The feeding unit is used to transport material components; A storage unit is located close to the production unit and is used to store material components after the production unit has completed production and material components to be produced conveyed by the feeding unit. as well as A conveying unit is movably coupled to the frame and configured to move relative to the frame to convey material components between the production units, the feeding units and the storage units.

2. The transportation equipment according to claim 1, characterized in that, The material components include a crucible, a graphite module, and a carrier for holding the graphite module; the production apparatus includes a machine base and a single crystal furnace disposed on the machine base, the machine base being configured with a crucible loading position for placing the crucible and a graphite loading position for placing the graphite module and the carrier.

3. The transportation equipment according to claim 2, characterized in that, The transport unit includes a transport assembly, which includes a gripping part and an adsorption part. The gripping part includes a driving member and a gripper. The driving member is connected between the third displacement assembly and the gripper. The driving member is used to drive the gripper to open and close in order to pick up and put down the crucible.

4. The transportation equipment according to claim 3, characterized in that, The connection between the drive member and the gripper forms a pivot point, and the drive member is also used to drive the gripper to rotate around the pivot point.

5. The transportation equipment according to claim 3, characterized in that, The conveying assembly includes an adsorption section, which includes an adsorption element and a vacuuming element. The adsorption element is coupled to the third displacement assembly, and the vacuuming element is coupled to the adsorption element. The vacuuming element evacuates the adsorption element so that the adsorption element can vacuum adsorb the graphite module.

6. The transportation equipment according to claim 5, characterized in that, The conveying unit further includes a first displacement component, a second displacement component, and a third displacement component. The first displacement component is movably coupled to the frame, the second moving component is movably coupled to the first moving component, the third moving component is movably coupled to the second moving component, and the conveying component is coupled to the third moving component. The first moving component is controllably movable back and forth relative to the frame along a first direction, and drives the second moving component, the third moving component, and the camera component to move synchronously along the first direction; the second moving component is controllably movable back and forth relative to the first moving component along a second direction, and drives the third moving component and the camera component to move synchronously along the second direction; the third moving component is controllably movable back and forth relative to the second moving component along a third direction, and drives the camera component to move synchronously along the third direction; the first direction, the second direction, and the third direction intersect each other.

7. The transportation equipment according to claim 2, characterized in that, The transport unit further includes a positioning detection element and a controller. The positioning detection element is coupled to the transport assembly and is used to determine the position information of the crucible and the graphite module in the single crystal furnace. The controller is used to control the transport assembly to move the crucible and the graphite module according to the position information determined by the positioning detection element.

8. The transportation equipment according to claim 2, characterized in that, The conveying unit further includes a temperature detection element, which is coupled to the conveying assembly and used to determine the temperature information of the material assembly on the production device; the controller is also used to control the conveying assembly to move the crucible and the graphite module according to the temperature information determined by the temperature detection element.

9. The transportation equipment according to claim 1, characterized in that, It also includes a cleaning unit, which is connected to the conveying unit. The cleaning unit is used to clean the material components after the production unit has completed production and the material components to be produced conveyed by the feeding unit.

10. A production system, characterized in that, Includes the transport equipment as described in any one of claims 1 to 9.

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