A gripping device for a robot arm and a robot arm

Abstract

This application provides a gripping device and a robotic arm for use with a robotic arm, comprising: a gripping component including a first gripping arm and a second gripping arm spaced apart from and opposite to the first gripping arm; a transmission component connecting the first and second gripping arms; a drive assembly connected to the transmission component and configured to drive the transmission component to switch the gripping component between a gripping and releasing state; a mounting component including a base and a main support, on which the gripping component is mounted; and an adsorption device mounted on the base and configured to adsorb or release a sample. The gripping device of this application achieves the gripping or releasing of a sample, while the adsorption device provides vacuum adsorption force, working in conjunction with the mechanical gripping to effectively prevent sample slippage during sample removal, avoiding damage to the sample during gripping, reducing the risk of manual cleaning, and improving equipment uptime and product yield.

Description

Technical Field

[0001] This application relates to the field of semiconductor processing technology, and more specifically to a gripping device and a robotic arm for use in robotic arms. Background Technology

[0002] In semiconductor manufacturing, wafer transport and handling are crucial for ensuring production continuity and product yield. As process complexity increases, some process-end equipment requires wafer delamination after completing specific processes. This involves separating the wafer from the substrate or process platform, typically achieved by the end effector of a robotic arm. During this process, vacuum adsorption is usually used to hold the wafer to ensure stability during transport.

[0003] In related technologies, during the process of lifting a wafer by the end effector of a robotic arm, the wafer needs to be continuously sprayed with water during the peeling process. This causes water to enter the vacuum adsorption plate of the end effector, affecting its adsorption and sealing performance. This results in the wafer slipping during the lifting process, ultimately leading to wafer breakage. The broken wafer fragments can cause scratches, dents, and bumps to other wafers. At the same time, the wafer fragments can contaminate the cleanliness of the water tank. Manually handling the wafer fragments carries the risk of scratches, affecting equipment uptime and product yield.

[0004] Therefore, improvements are needed to at least partially address the aforementioned problems. Utility Model Content

[0005] The utility model description section introduces a series of simplified concepts, which will be further explained in detail in the detailed description section. This utility model description section is not intended to limit the key features and essential technical features of the claimed technical solution, nor is it intended to determine the scope of protection of the claimed technical solution.

[0006] To at least partially solve the above problems, this utility model provides a gripping device for a robotic arm, comprising: a gripping component including a first gripping arm and a second gripping arm spaced apart from and opposite to the first gripping arm; a transmission component connecting the first gripping arm and the second gripping arm; a drive assembly connected to the transmission component and configured to drive the transmission component to switch the gripping component between a gripping state and a releasing state; a mounting component including a base and a main support extending vertically upward from one end of the base, wherein the gripping component is mounted on the main support; and an adsorption device mounted on the base and configured to adsorb or release the sample.

[0007] For example, the drive assembly includes a drive member and a piston rod, one end of the piston rod being connected to the drive member, wherein the piston rod reciprocates linearly along its axial direction under the action of the drive member.

[0008] For example, the transmission component includes a first transmission member and a second transmission member, wherein one end of the first transmission member and one end of the second transmission member are both connected to the other end of the piston rod; wherein the first clamping arm is rotatably connected to the first transmission member, and the second clamping arm is rotatably connected to the second transmission member.

[0009] For example, the clamping component further includes a support arm disposed between the first clamping arm and the second clamping arm. The first clamping arm includes a first vertical arm and a first clamping member, and the second clamping arm includes a second vertical arm and a second clamping member. One end of the support arm is connected to the end of the first vertical arm away from the first clamping member, and the other end of the support arm is connected to the end of the second vertical arm away from the second clamping member. The other end of the first vertical arm is connected to the first clamping member, and the other end of the second vertical arm is connected to the second clamping member. The first clamping member is inclined relative to the first vertical arm toward the second clamping arm, and the second clamping member is inclined relative to the second vertical arm toward the first clamping arm. Furthermore, the first clamping member and the second clamping member are disposed opposite each other, and the two form an acute angle between them.

[0010] For example, a reset element is provided between the first clamping arm and the second clamping arm. The reset element includes a first reset element and a second reset element. A sleeve extending downward from the surface of the support arm is also provided on the support arm. One end of the first reset element is connected to the first clamping arm, and the other end of the first reset element is connected to the sleeve. One end of the second reset element is connected to the second clamping arm, and the other end of the second reset element is connected to the sleeve. The first reset element and the second reset element are springs.

[0011] For example, the first clamping member and the second clamping member are provided with at least one roller member, each roller member including at least one slot spaced apart in the width direction of the clamping member, and each slot of each roller member on the first clamping member and each slot of each roller member on the second clamping member correspond one-to-one.

[0012] For example, the driving component is a cylinder. When the cylinder is vented, the piston rod extends, causing the transmission component to retract, thereby driving the clamping component to switch to the clamping state. When the cylinder is depressurized, the piston rod retracts, causing the transmission component and the clamping component to reset.

[0013] For example, it also includes a limiting member disposed on the main support and located above the drive assembly, for adjusting the opening and closing angle of the clamping component.

[0014] For example, the device also includes an actuator mounted on the base. The adsorption device includes a suction cup and a suction cup support. One end of the suction cup support is connected to the actuator, and the other end of the suction cup support is connected to the suction cup. The actuator is configured to drive the suction cup support to cause the suction cup to adsorb or release the sample.

[0015] According to another aspect of the present invention, a robotic arm is provided, including the aforementioned clamping device for the robotic arm.

[0016] The clamping device for a robotic arm according to this utility model includes a clamping component consisting of a first clamping arm and a second clamping arm, a transmission component, a drive assembly, and an adsorption device. The drive assembly drives the transmission component to clamp or release the first and second clamping arms, thereby clamping or releasing the sample. At the same time, the adsorption device provides vacuum adsorption force, which works in conjunction with the mechanical clamping to effectively prevent sample slippage during sample peeling, avoid damage to the sample during clamping, reduce the risk of manual cleaning, and improve equipment uptime and product yield. Attached Figure Description

[0017] The following drawings, which are incorporated herein by reference as part of this invention, are provided for understanding the invention. The drawings illustrate embodiments of the invention and their descriptions, serving to explain the principles of the invention.

[0018] In the attached image:

[0019] Figure 1 A schematic diagram of the structure of a clamping device for a robotic arm according to a specific embodiment of the present invention is shown.

[0020] Figure 2 A front view of a clamping device for a robotic arm according to a specific embodiment of the present invention is shown;

[0021] Figure 3 This diagram shows a schematic representation of a roller component disposed in a clamping device according to a specific embodiment of the present invention.

[0022] Figure 4 The image shows a front view of a roller component arranged in a clamping device according to a specific embodiment of the present invention. Detailed Implementation

[0023] In the following description, numerous specific details are set forth in order to provide a more thorough understanding of the present invention. However, it will be apparent to those skilled in the art that the present invention can be practiced without one or more of these details. In other instances, certain technical features well-known in the art have not been described in order to avoid confusion with the present invention.

[0024] It should be understood that this invention can be embodied in various forms and should not be construed as being limited to the embodiments set forth herein. Rather, providing these embodiments will make the disclosure thorough and complete, and will fully convey the scope of this invention to those skilled in the art. In the drawings, for clarity, the dimensions of layers and regions, as well as their relative dimensions, may be exaggerated. The same reference numerals denote the same elements throughout.

[0025] It should be understood that when an element or layer is referred to as "on," "adjacent to," "connected to," or "coupled to" other elements or layers, it may be directly on, adjacent to, connected to, or coupled to other elements or layers, or there may be intervening elements or layers. Conversely, when an element is referred to as "directly on," "directly adjacent to," "directly connected to," or "directly coupled to" other elements or layers, there are no intervening elements or layers. It should be understood that although the terms first, second, third, etc., may be used to describe various elements, components, areas, layers, and / or portions, these elements, components, areas, layers, and / or portions should not be limited by these terms. These terms are only used to distinguish one element, component, area, layer, or portion from another element, component, area, layer, or portion. Therefore, without departing from the teachings of this utility model, the first element, component, area, layer, or portion discussed below may be referred to as a second element, component, area, layer, or portion.

[0026] Spatial relation terms such as “below,” “under,” “below,” “under,” “above,” “above,” etc., are used herein for convenience of description to describe the relationship between one element or feature shown in the figure and other elements or features. It should be understood that, in addition to the orientation shown in the figure, spatial relation terms are intended to also include different orientations of the device in use and operation. For example, if the device in the figure is flipped, then the element or feature described as “below” or “under” the other element or feature will be oriented “above” the other element or feature. Therefore, the exemplary terms “below” and “under” can include both upper and lower orientations. The device may be otherwise oriented (rotated 90 degrees or otherwise) and the spatial descriptive terms used herein will be interpreted accordingly.

[0027] The terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the scope of the invention. When used herein, the singular forms “a,” “an,” and “the” are also intended to include the plural forms, unless the context clearly indicates otherwise.

[0028] To address at least one of the aforementioned technical problems, this application provides a gripping device for a robotic arm, characterized in that it comprises:

[0029] A clamping component, comprising a first clamping arm and a second clamping arm spaced apart from and opposite to the first clamping arm;

[0030] A transmission component, which connects the first clamping arm and the second clamping arm;

[0031] A drive component, connected to a transmission component, is configured such that the drive transmission component drives the clamping component to switch between a clamping state and a releasing state.

[0032] The mounting component includes a base and a main support extending vertically upward from one end of the base, wherein a clamping component is mounted on the main support.

[0033] An adsorption device, mounted on a base, is configured to adsorb or release samples.

[0034] According to this application, the clamping device for a robotic arm includes a clamping component consisting of a first clamping arm and a second clamping arm, a transmission component, a drive assembly, and an adsorption device. The drive assembly drives the transmission component to clamp or release the first and second clamping arms, thereby clamping or releasing the sample. At the same time, the adsorption device provides vacuum adsorption force, which works in conjunction with the mechanical clamping to effectively prevent sample slippage during sample peeling, avoid damage to the sample during clamping, reduce the risk of manual cleaning, and improve equipment uptime and product yield.

[0035] To fully understand this application, a detailed structure will be presented in the following description to illustrate the technical solutions proposed in this application. Preferred embodiments of this application are described in detail below; however, in addition to these detailed descriptions, this application may have other implementation methods.

[0036] The following is for reference. Figures 1 to 4 A gripping device for a robotic arm according to one embodiment of this application is described, such as... Figures 1 to 4As shown, it includes: a clamping component 10, which includes a first clamping arm 101 and a second clamping arm 102 spaced apart from and opposite to the first clamping arm 101; a transmission component 11, which connects the first clamping arm 101 and the second clamping arm 102; a driving assembly 12, which is connected to the transmission component 11 and configured to drive the transmission component 11 to switch the clamping component 10 between a clamping state and a releasing state; a mounting component 13, which includes a base 131 and a main support 132 extending vertically upward from one end of the base 131, wherein the clamping component 10 is mounted on the main support 132; and an adsorption device 16, which is mounted on the base 131 and configured to adsorb or release samples.

[0037] In this embodiment, the clamping device includes a clamping component 10 composed of a first clamping arm 101 and a second clamping arm 102, a transmission component 11, and a drive assembly 12. The drive assembly 12 provides power to the clamping device, and drives the transmission component 11 to switch the clamping component 10 back and forth between a clamping state and a releasing state (i.e., to achieve sample clamping and release). Specifically, when the drive assembly 12 is activated, the drive transmission component 11 drives the first clamping arm 101 and the second clamping arm 102 to move, thereby achieving sample clamping and release. The clamping device also includes a mounting component 13 and an adsorption device 16. The mounting component 13 includes a base 131 and a main support 132 extending vertically upward from one end of the base 131. The main support 132 is used to mount the clamping component 10, and the base 131 is used to mount the adsorption device 16. The adsorption device 16 is used to provide vacuum adsorption force when clamping the sample, thereby assisting in stabilizing the clamping. Therefore, by installing this clamping device on the robotic arm, the dual functions of mechanical clamping and vacuum adsorption are achieved. This effectively prevents sample slippage during sample peeling, avoids damage to the sample during clamping (e.g., scratches, bumps, and knocks), reduces the risk of manual cleaning, and improves the uptime of the device and the product yield.

[0038] In some embodiments, such as Figure 1 As shown, the clamping device includes a clamping component 10, which includes a first clamping arm 101 and a second clamping arm 102 spaced apart from and opposite to the first clamping arm 101. The clamping component 10 is configured to clamp a sample when in a clamping state and to allow the sample to leave or enter the area enclosed by the clamping component when in a released state. The sample can be a wafer or the like. Specifically, both the first clamping arm 101 and the second clamping arm 102 are elongated rod-shaped structures, and are arranged symmetrically and spaced apart along the central axis of the clamping device. The distance between the first clamping arm 101 and the second clamping arm 102 can be designed according to the size of the sample to be clamped, and is not specifically limited thereto.

[0039] In some embodiments, such as Figure 1 As shown, the clamping component 10 also includes a support arm 105, which is disposed between the first clamping arm 101 and the second clamping arm 102. The first clamping arm 101 includes a first vertical arm 106 and a first clamping member 103, and the second clamping arm 102 includes a second vertical arm 107 and a second clamping member 104. One end of the support arm 105 is connected to the end of the first vertical arm 106 away from the first clamping member 103, and the other end of the support arm 105 is connected to the end of the second vertical arm 107 away from the second clamping member 104. Specifically, the support arm 105 is a horizontal connecting rod, which serves as a connector to provide support and stability. One end of the support arm 105 is connected to the end of the first vertical arm 106 away from the first clamping member 103 by a fastener; the other end of the support arm 105 is also connected to the end of the second vertical arm 107 away from the second clamping member 104 by a fastener, thereby forming a rigid bridging structure between the two clamping arms. The fasteners can be screws or pins, etc., and are not specifically limited thereto. In this embodiment, the support arm 105, the first clamping arm 101, and the second clamping arm 102 together form an approximately "U"-shaped or "door frame" structure. This structure not only improves the bending and torsional resistance of the clamping components during the clamping process, but also ensures the synchronicity and symmetry of the clamping actions on the left and right sides, avoiding problems such as unilateral clamping or sample tilting.

[0040] For example, such as Figure 2As shown, one end of the first vertical arm 106 is connected to the support arm 105, and the other end is connected to the first clamping member 103. That is, the first clamping member 103 is located at the end of the first clamping arm 101 away from the transmission member 11, and the first clamping member 103 is inclined relative to the first vertical arm 106 toward the second clamping arm 102. One end of the second vertical arm 107 is connected to the support arm 105, and the other end is connected to the second clamping member 104. That is, the second clamping member 104 is located at the end of the second clamping arm 102 away from the transmission member 11, and the second clamping member 104 is inclined relative to the second vertical arm 107 toward the first clamping arm 101. In addition, the first clamping member 103 and the second clamping member 104 are arranged opposite each other, and the two form an acute angle between them, so as to effectively clamp samples of different shapes or sizes. Specifically, the first vertical arm 106 is a rod extending vertically, one end of which (i.e., the upper end of the first vertical arm) is connected to one end of the support arm 105 (i.e., the left end of the support arm) by a fastener, and the other end of which (i.e., the lower end of the first vertical arm) is connected to the first clamping member 103; similarly, the second vertical arm 107 is a rod extending vertically, one end of which (i.e., the upper end of the second vertical arm) is connected to the other end of the support arm 105 (i.e., the right end of the support arm) by a fastener, and the other end of which (i.e., the lower end of the second vertical arm) is connected to the second clamping member 104; at the same time, the first clamping member 103 is inclined relative to the first vertical arm 106 toward the second clamping arm 102, and the second clamping member 104 is inclined relative to the second vertical arm 107 toward the first clamping arm 101, which can generate an inward guiding force when clamping the sample, and automatically center the position when clamping the sample, thereby improving the clamping accuracy and stability. The first clamping member 103 and the first vertical arm 106 can be integrated to form the first clamping arm 101, and the second clamping member 104 and the second vertical arm 107 can be integrated to form the second clamping arm 102. The first clamping member 103 and the first vertical arm 106, and the second clamping member 104 and the second vertical arm 107 can also be other suitable structures, which are not specifically limited.

[0041] In some embodiments, such as Figure 3 and Figure 4As shown, at least one roller member 15 is provided on the first clamping member 103 and the second clamping member 104, wherein the roller members 15 on the first clamping member 103 and the second clamping member 104 are symmetrically arranged. Exemplarily, each roller member 15 includes at least one slot spaced apart in the width direction of the clamping member, and each slot of each roller member on the first clamping member 103 corresponds one-to-one with each slot of each roller member on the second clamping member 104. Specifically, the slot is composed of multiple rollers, with each pair of adjacent rollers arranged side-by-side to form a slot. The slot is used to fix the sample when clamping it. The roller members 15 on the first clamping member 103 correspond to the roller members 15 on the second clamping member 104 in both position and number, ensuring that the sample is subjected to uniform force on both sides during clamping and avoiding sample tilting or displacement. For example, a roller member may consist of three rollers arranged side-by-side to form two slots, allowing two samples to be clamped at once. The roller component 15 can be fixedly installed on the inner side of the first clamping member 103 and the second clamping member 104 by a pin. When the clamping device clamps the sample, the roller component contacts the sample and generates rolling friction as the sample moves, thereby effectively reducing the risk of scratches and wear caused by sliding friction during the clamping process.

[0042] In some embodiments, such as Figure 2 As shown, the clamping device includes a transmission component 11 and a drive assembly 12. The transmission component 11 is connected to a first clamping arm 101 and a second clamping arm 102. The drive assembly 12 is connected to the transmission component 11 and is configured to drive the transmission component 11 to switch the clamping component 10 between a clamping state and a releasing state. For example, the drive assembly 12 includes a drive member 121 and a piston rod 122. One end of the piston rod 122 is connected to the drive member 121, and the other end is connected to the transmission component 11. The piston rod 122 reciprocates linearly along its axial direction under the action of the drive member 121. For example, the transmission component 11 includes a first transmission member 111 and a second transmission member 112. One end of the first transmission member 111 and one end of the second transmission member 112 are both connected to the other end of the piston rod 122. The first clamping arm 101 is rotatably connected to the first transmission member 111, and the second clamping arm 102 is rotatably connected to the second transmission member 112. For example, a sleeve 108 extending downward from the surface of the support arm 105 is also provided on the support arm 105. For example, a sleeve 108 is formed extending downward from the surface of the support arm 105 in the middle. The sleeve 108 is disposed between the first clamping arm 101 and the second clamping arm 102. The piston rod 122 passes through the sleeve 108 and is connected to the first transmission member 111 and the second transmission member 112.

[0043] Exemplarily, the first clamping arm 101 and the second clamping arm 102 are rotatably connected to the first transmission member 111 and the second transmission member 112 via bearings and pins, respectively. Specifically, a hinge hole is formed on the first vertical arm 106 of the first clamping arm 101, the outer ring of the bearing is fixed in the hinge hole, the inner ring of the bearing is sleeved on the pin, and the first transmission member 111 is connected to the pin, so that the first clamping arm 101 and the first transmission member 111 rotate relative to each other around the pin. The second clamping arm 102 and the second transmission member 112 are rotatably connected to each other via bearings and pins in the same manner, which will not be described in detail here. When the drive assembly 12 drives the first transmission member 111 and the second transmission member 112 to move, the first clamping arm 101 and the second clamping arm 102 rotate around the pin, thereby realizing the clamping or releasing operation of the first clamping member 103 and the second clamping member 104 on the sample. This structural design not only improves the flexibility of the clamping action and the uniformity of the clamping force, but also enhances the adaptability of the clamping device to samples of different sizes. Specifically, the clamping components and transmission components form a multi-stage linkage clamping structure, enabling more precise control of the clamping angle, improving clamping stability and clamping force uniformity, expanding the clamping range, and adapting to samples of different sizes.

[0044] In some embodiments, the driving member 121 can be a cylinder. The cylinder, through the action of compressed air, can drive the piston rod 122 to perform linear reciprocating motion. Driven by the cylinder, the piston rod 122 extends forward or retracts backward, causing the first clamping member 103 and the second clamping member 104 to perform sample clamping or releasing actions. Specifically, the cylinder is a bidirectional cylinder. When the cylinder is vented, the piston rod 122 extends, causing the transmission member 11 to retract, thereby switching the clamping member 10 to a clamping state (i.e., the first clamping member 103 and the second clamping member 104 clamp the sample); when the cylinder is depressurized, the piston rod 122 retracts, causing the transmission member 11 and the clamping member 10 to reset (i.e., the first clamping member 103 and the second clamping member 104 release the sample). In other examples, the driving member can also be a hydraulic cylinder, etc., without specific limitation.

[0045] In some embodiments, such as Figure 1 and Figure 2As shown, a reset element is provided between the first clamping arm 101 and the second clamping arm 102. The reset element includes a first reset element 109 and a second reset element 110. One end of the first reset element 109 is connected to the first clamping arm 101, and the other end is connected to the sleeve 108. One end of the second reset element 110 is connected to the second clamping arm 102, and the other end is connected to the sleeve 108. The first and second reset elements operate independently without interfering with each other. The sleeve can prevent interference between the reset element and the piston rod, thereby avoiding frictional damage and improving the stability, accuracy, and service life of the device. Specifically, the sleeve 108 has a positioning structure on its outer periphery for mounting a reset element. The positioning structure includes a first positioning structure and a second positioning structure, which are positioned opposite each other on the outer periphery of the sleeve 108. A positioning pin is provided on the first vertical arm 106 of the first clamping arm 101, and a positioning pin is provided on the second vertical arm 107 of the second clamping arm 102. The first reset element 109 is connected to the positioning pin on the first vertical arm 106 and the first positioning structure, and the second reset element 110 is connected to the positioning pin on the second vertical arm 107 and the second positioning structure. The positioning structure on the sleeve and the positioning pin on the clamping arm can fix the reset element to prevent it from dislodging. When the first clamping arm 101 and the second clamping arm 102 clamp the sample under the action of the drive assembly 12, the reset element is stretched and stores elastic potential energy. When the clamping force is released, the reset element releases the elastic potential energy to drive the first clamping arm 101 and the second clamping arm 102 back to the initial open position, thereby realizing the automatic release of the sample. For example, the first reset element and the second reset element can be springs or the like, without any specific limitation.

[0046] In some embodiments, such as Figure 1 As shown, the clamping device also includes a mounting member 13, which includes a base 131 and a main support 132 extending vertically upward from one end of the base 131. The clamping member 10 is mounted on the main support 132. Specifically, the support arm 105 of the clamping member 10 is connected to the main support 132 so that the clamping member 10 is fixedly mounted on the main support 132.

[0047] In some embodiments, the clamping device further includes a limiting member 14, which is disposed on the main support 132 and located above the drive assembly 12, for adjusting the opening and closing angle of the clamping member 10. Specifically, the limiting member 14 is fixed on a limiting base, which is mounted on the main support 132. The main support 132 is provided with equidistant limiting holes, allowing the position of the limiting base to be adjusted vertically, thereby adjusting the position of the limiting member 14. Exemplarily, the limiting member 14 includes, but is not limited to, a hydraulic buffer. The limiting member 14 is used to press against the drive member 121 (e.g., a cylinder) when it retracts. Therefore, by adjusting the position of the limiting member 14, the working distance of the piston rod 122 can be controlled, thereby adjusting the opening and closing angle of the first clamping member 103 and the second clamping member 104. The opening and closing angle of the first clamping member 103 and the second clamping member 104 is 15 degrees to 30 degrees.

[0048] In some embodiments, such as Figure 4 As shown, the clamping device also includes an adsorption device 16 and an actuator 17. The actuator 17 is mounted on the base 131 of the mounting member 13. The adsorption device 16 includes a suction cup 161 and a suction cup support 162. One end of the suction cup support 162 is connected to the actuator 17, and the other end is connected to the suction cup 161. Specifically, the actuator 17 is arranged parallel to the axis of the suction cup 161 on the base 131. The actuator 17 is configured to drive the suction cup support 162 to cause the suction cup 161 to adsorb or release the sample. The suction cup 161 is made of a flexible material, which has good sealing and adsorption capacity, and can closely adhere to the sample surface to form an effective vacuum adsorption area. The suction cup support 162 is a rigid structure, with one end connected to the actuator 17 and the other end connected to the suction cup 161. The actuator 17 drives the suction cup support 162 to move, causing the suction cup 161 to adsorb or release the sample. For example, the actuator 17 can be a cylinder. During sample slicing, the adsorption device not only adsorbs the sample but also assists in the separation process. When the clamping components hold the sample, the suction cup applies adsorption force to the sample surface through vacuum adsorption, thereby helping to stabilize the clamping and improving the stability and safety of the clamping process. It also effectively prevents problems such as sample displacement, slippage, or damage during the peeling process. In some operating modes, clamping or slicing operations can be completed without relying on actuators.

[0049] In summary, the clamping device for a robotic arm according to the embodiments of this application includes a clamping component composed of a first clamping arm and a second clamping arm, a transmission component, a drive component, and an adsorption device. The drive component drives the transmission component to clamp or release the first clamping arm and the second clamping arm, thereby clamping or releasing the sample. At the same time, the adsorption device provides vacuum adsorption force, which works in conjunction with the mechanical clamping to effectively prevent sample slippage during sample peeling, avoid damage to the sample during clamping, reduce the risk of manual cleaning, and improve equipment uptime and product yield.

[0050] This application also provides a robotic arm that includes the aforementioned gripping device for the robotic arm.

[0051] Although exemplary embodiments have been described herein with reference to the accompanying drawings, it should be understood that the above exemplary embodiments are merely illustrative and are not intended to limit the scope of this application. Various changes and modifications can be made therein by those skilled in the art without departing from the scope and spirit of this application. All such changes and modifications are intended to be included within the scope of this application as claimed in the appended claims.

[0052] Similarly, it should be understood that, in order to simplify this application and aid in understanding one or more aspects of the application, various features of this application may sometimes be grouped together in a single embodiment, figure, or description thereof in the description of exemplary embodiments of this application. However, this approach should not be construed as reflecting an intention that the claimed application requires more features than are expressly recited in each claim. Rather, as reflected in the corresponding claims, the point of application is that the corresponding technical problem can be solved with fewer features than all of a single disclosed embodiment. Therefore, the claims following the detailed description are hereby expressly incorporated into that detailed description, wherein each claim itself is a separate embodiment of this application.

[0053] Furthermore, those skilled in the art will understand that although some embodiments described herein include certain features but not others included in other embodiments, combinations of features from different embodiments are intended to be within the scope of this application and form different embodiments. For example, in the claims, any one of the claimed embodiments can be used in any combination.

[0054] It should be noted that the above embodiments are illustrative of this application and not limiting of it, and that those skilled in the art can devise alternative embodiments without departing from the scope of the appended claims. In the claims, any reference signs placed between parentheses should not be construed as limiting the claims. The use of the words first, second, and third, etc., does not indicate any order. These words can be interpreted as names.

Claims

1. A gripping device for a robot arm, characterized in that, include: A clamping component, the clamping component including a first clamping arm and a second clamping arm spaced apart from and opposite to the first clamping arm; A transmission component, wherein the transmission component connects the first clamping arm and the second clamping arm; A drive assembly connected to the transmission member is configured to drive the transmission member to switch the clamping component between a clamping state and a releasing state. The mounting component includes a base and a main support extending vertically upward from one end of the base, wherein the clamping component is mounted on the main support; An adsorption device, which is mounted on the base and configured to adsorb or release a sample.

2. The clamping device of claim 1, wherein The drive assembly includes a drive member and a piston rod, one end of which is connected to the drive member. Under the action of the drive member, the piston rod reciprocates linearly along its axial direction.

3. The clamping device of claim 2, wherein The transmission component includes a first transmission member and a second transmission member, wherein one end of the first transmission member and one end of the second transmission member are both connected to the other end of the piston rod. The first clamping arm is rotatably connected to the first transmission member, and the second clamping arm is rotatably connected to the second transmission member.

4. The holding device of claim 1, wherein The clamping component further includes a support arm disposed between the first clamping arm and the second clamping arm. The first clamping arm includes a first vertical arm and a first clamping member, and the second clamping arm includes a second vertical arm and a second clamping member. One end of the support arm is connected to the end of the first vertical arm away from the first clamping member, and the other end of the support arm is connected to the end of the second vertical arm away from the second clamping member. The other end of the first vertical arm is connected to the first clamping member, and the other end of the second vertical arm is connected to the second clamping member. The first clamping member is inclined relative to the first vertical arm toward the second clamping arm, and the second clamping member is inclined relative to the second vertical arm toward the first clamping arm. Furthermore, the first clamping member and the second clamping member are arranged opposite to each other, and the two form an acute angle between them.

5. The clamping device of claim 4, wherein A reset element is provided between the first clamping arm and the second clamping arm. The reset element includes a first reset element and a second reset element. The support arm is further provided with a sleeve extending downward from the surface of the support arm. One end of the first reset element is connected to the first clamping arm, and the other end of the first reset element is connected to the sleeve. One end of the second reset element is connected to the second clamping arm, and the other end of the second reset element is connected to the sleeve. The first reset element and the second reset element are springs.

6. The clamping device of claim 4, wherein The first clamping member and the second clamping member are provided with at least one roller member, and each roller member includes at least one slot spaced apart in the width direction of the clamping member. Each slot of each roller member on the first clamping member corresponds one-to-one with each slot of each roller member on the second clamping member.

7. The holding device of claim 2, wherein The driving component is a cylinder. When the cylinder is ventilated, the piston rod extends, causing the transmission component to retract, thereby driving the clamping component to switch to the clamping state. When the cylinder deflates, the piston rod retracts, causing the transmission component and the clamping component to reset.

8. The holding device of claim 1, wherein It also includes a limiting member, which is disposed on the main support and located above the drive assembly, for adjusting the opening and closing angle of the clamping component.

9. The holding device of claim 1, wherein It also includes an actuator mounted on the base. The adsorption device includes a suction cup and a suction cup bracket. One end of the suction cup bracket is connected to the actuator, and the other end of the suction cup bracket is connected to the suction cup. The actuator is configured to drive the suction cup bracket to cause the suction cup to adsorb or release the sample.

10. A robot arm, characterized in that, The clamping device includes any one of claims 1-9.

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