Multi-width right-angle steering device for flat plate and wafer production equipment thereof

Abstract

This utility model discloses a multi-width right-angle steering device for flat panels, comprising: a first conveying mechanism having a first input end and a first output end; a lifting mechanism having a lifting platform; and a second conveying mechanism arranged perpendicularly to the first conveying mechanism, the second conveying mechanism having a second input end and a second output end, with the second input end located above and overlapping the first output end; the second conveying mechanism includes two adjustable-distance transverse conveying sides. When the flat panel reaches the first output end, the lifting platform rises to lift the flat panel from the first output end, and the two transverse conveying sides simultaneously adjust their distance to widen and avoid obstruction; after the lifting platform rises to a preset height, the lifting platform descends, and the two transverse conveying sides simultaneously adjust their distance to reset, so that the flat panel is placed at the second input end. Compared with the structure of traditional practical mechanical modules combined with grippers, the structure of this application provides more stable conveying and solves the problems of unstable gripping and easy material drop in traditional methods.

Description

Technical Field

[0001] This utility model relates to the field of conveying devices, and in particular to a flat plate multi-width right-angle turning device and its wafer production equipment. Background Technology

[0002] When flat components are transferred at a 90° right angle (e.g., during wafer manufacturing), X-axis and Y-axis linear modules are often used in conjunction with robotic arms or gripping mechanisms mounted on the linear modules to pick up and transfer the flat components. Because the flat components are relatively thin and have a flat shape, the gripping mechanism is prone to instability during the gripping process, which may cause the flat components to fall during the transfer, resulting in product damage. Utility Model Content

[0003] In view of this, the present invention addresses the deficiencies of the existing technology, and its main objective is to provide a multi-width right-angle steering device for flat panels, which solves the problem of flat panels potentially falling off during the transfer process.

[0004] To achieve the above objectives, this utility model adopts the following technical solution: a flat plate multi-width right-angle steering device, comprising, The first conveying mechanism has a first input end and a first output end; A lifting mechanism, located below the first output end, includes a lifting platform; and... The second conveying mechanism is arranged perpendicularly to the first conveying mechanism. The second conveying mechanism has a second input end and a second output end, and the second input end is located above and overlaps the first output end. The second conveying mechanism includes two lateral conveying sides with adjustable spacing. When the flat plate reaches the first output end, the lifting platform rises to lift the flat plate from the first output end, and the two transverse conveying sides synchronously adjust their distance to widen and avoid it; after the lifting platform rises to a preset height, the lifting platform descends, and the two transverse conveying sides synchronously adjust their distance to reset, so that the flat plate is placed at the second input end.

[0005] In one embodiment, the first conveying mechanism includes two longitudinal conveying sides arranged at intervals, at least one of the longitudinal conveying sides being position-adjustable by a first spacing adjustment mechanism.

[0006] In one embodiment, each of the longitudinal conveying edges includes a mounting plate, a motor, a first rotating shaft, a plurality of active magnetic wheels, and a plurality of power wheel assemblies corresponding to each active magnetic wheel; the first rotating shaft is arranged along the length direction of the mounting plate, and one end is connected to the output shaft of the motor; the plurality of active magnetic wheels are spaced apart on the first rotating shaft; Each power wheel assembly includes a second rotating shaft rotatably mounted on the mounting plate, a driven magnetic wheel mounted on one end of the second rotating shaft, and a conveyor wheel mounted on the other end of the second rotating shaft. Multiple conveyor wheels are arranged in a longitudinal row, and the multiple conveyor wheels convey the flat plate. The driven magnetic wheel and the active magnetic wheel are arranged at intervals, and the driven magnetic wheel drives the active magnetic wheel to rotate.

[0007] In one embodiment, the top surface of the mounting plate is provided with a plurality of rotatable guide wheels at intervals, and the plurality of guide wheels protrude above the conveyor wheel.

[0008] In one embodiment, the two said transverse conveying edge structures are the same as the said longitudinal conveying edge structure.

[0009] In one embodiment, the lifting mechanism includes a cylinder and a lifting platform disposed on the cylinder output shaft, the cylinder driving the lifting platform to move up and down.

[0010] In one embodiment, the upper surface of the lifting platform is provided with an anti-slip plate.

[0011] In one embodiment, the two lateral conveying edges are positionally adjustable via a second spacing adjustment mechanism, which adjusts the two lateral conveying edges to move closer to or further apart from each other.

[0012] In one embodiment, a blocking cylinder is provided on the second output end, a blocking block is provided on the output shaft of the blocking cylinder, and a blocking wheel is rotatably provided on the blocking block. The blocking cylinder drives the blocking block and the blocking wheel to extend to block the flat plate from flowing out of the second output end.

[0013] A wafer fabrication apparatus includes a multi-width right-angle steering device for flat panels as described above.

[0014] Compared with the prior art, this utility model has obvious advantages and beneficial effects. Specifically, as can be seen from the above technical solution: By vertically arranging the first and second conveying mechanisms, and with the second input end and the first output end partially overlapping in the vertical direction, when the flat piece reaches the first output end, the lifting platform rises to lift the flat piece from the first output end, and the two transverse conveying sides synchronously adjust their distance to widen and avoid it; after the lifting platform rises to a preset height, the lifting platform descends, and the two transverse conveying sides synchronously adjust their distance to reset, so that the flat piece is placed on the second input end. Compared with the structure of traditional practical mechanical modules with grippers, the structure of this application provides more stable conveying and solves the problems of unstable gripping and easy material drop in traditional methods.

[0015] To more clearly illustrate the structural features and effects of this utility model, the following detailed description of this utility model is provided in conjunction with the accompanying drawings and specific embodiments. Attached Figure Description

[0016] Figure 1 This is a perspective view of the right-angle steering device provided in an embodiment of this utility model; Figure 2 This is a partial view of the longitudinal conveying edge of an embodiment of this utility model; Figure 3 This is a perspective view of the lifting mechanism according to an embodiment of the present utility model; Figure 4 This is a perspective view of the second conveying mechanism according to an embodiment of the present invention.

[0017] Figure label: 10. First conveying mechanism 101. First input end 102. First output end; 11. Longitudinal conveyor side 111. Mounting plate; 112. Motor 113. First rotating shaft; 114. Active magnetic wheel 115. Second rotating shaft; 116. Driven magnetic wheel 117. Conveyor wheel; 118. Guide wheel 20. Lifting mechanism 21. Lifting platform 22. Cylinder 23. Anti-slip plate 30. Second conveying mechanism; 31. Lateral conveying side 40. First spacing adjustment mechanism; 41. Motor 42. Lead screw; 50. Second pitch adjustment mechanism 61. Blocking cylinder 62. Blocking block 63. Stop wheel. Detailed Implementation

[0018] To make the technical problems, technical solutions, and beneficial effects to be solved by this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and are not intended to limit the scope of this application.

[0019] It should be noted that when a component is referred to as being "fixed to" or "set on" another component, it can be directly on or indirectly on that other component. When a component is referred to as being "connected to" another component, it can be directly connected to or indirectly connected to that other component.

[0020] It should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0021] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, "multiple" means two or more, unless otherwise explicitly specified.

[0022] Please see Figures 1 to 4 As shown, this application provides a multi-width right-angle steering device for flat panels, including: a first conveying mechanism 10, having a first input end 101 and a first output end 102, wherein the flat panel is placed on the first input end 101 and then input and conveyed to the first output end; a lifting mechanism 20, located below the first output end 102, having a lifting platform 21 for raising and lowering the flat panel to change its height; and a second conveying mechanism 30, arranged perpendicularly to the first conveying mechanism 10, i.e., at a 90° angle, having a second input end 301 and a second output end 302, wherein the second input end 301 is located above and overlaps the first output end 102, i.e., the second input end 301 and the first output end 102 partially overlap in the vertical direction; the second conveying mechanism 30 includes two adjustable-spaced transverse conveying edges 31.

[0023] When the flat piece reaches the first output end 102, the lifting platform 21 rises to lift the flat piece from the first output end 102, and the two transverse conveying sides 31 simultaneously adjust their distance to widen and avoid it; after the lifting platform 21 rises to a preset height, the lifting platform 21 descends, and the two transverse conveying sides 31 simultaneously adjust their distance to reset, so that the flat piece is placed on the second input end 301. Compared with the structure of traditional practical mechanical modules with grippers, the structure of this application has more stable conveying and solves the problem of unstable gripping and easy material drop in traditional methods.

[0024] In specific operation, the flat plate is placed on the first input end 101, and the first conveying mechanism 10 longitudinally conveys the flat plate to the first output end 102. A blocking block is provided at the end of the first output end 102 to block the flow of the flat plate. The lifting platform 21 rises to lift the flat plate from the first output end 102 (the area of ​​the flat plate is larger than that of the lifting platform 21, so the side of the lifting platform 21 is exposed, or the lifting platform 21 is provided with a clearance). The two transverse conveying edges 31 are simultaneously adjusted to widen and avoid collision between the flat plate and the lifting platform 21. After the lifting platform 21 rises to the preset height, it then descends. The two transverse conveying edges 31 are simultaneously adjusted to reset (the distance narrows). The flat plate is placed on the second input end 301, and the lifting platform 21 continues to descend to its original position.

[0025] For example, sensors are provided on the first conveying mechanism 10, the lifting mechanism 20, and the second conveying mechanism 30 to sense the flat plate.

[0026] For example, the flat panel can be a glass plate, a wafer, a PCB board, or a flat panel carrier, etc.

[0027] In one embodiment of this application, the first conveying mechanism 10 includes two longitudinal conveying edges 11 spaced apart, at least one of which is position-adjustable via a first spacing adjustment mechanism 40. By adjusting the position of at least one longitudinal conveying edge 11, and in conjunction with the adjustable spacing of the two transverse conveying edges 31, it is possible to convey flat pieces of different widths.

[0028] For example, the first spacing adjustment mechanism 40 includes a motor 41 and a lead screw 42 connected to the motor output shaft. A threaded block is provided at the bottom of the longitudinal conveying edge 11, connected to the lead screw 42, and cooperates with a slider structure at the bottom of the longitudinal conveying edge 11. The motor 41 drives the lead screw 42 to rotate in both directions, thereby driving the longitudinal conveying edge 11 closer to or further away from another longitudinal conveying edge 11, thus achieving distance adjustment. Of course, the first spacing adjustment mechanism 40 is not limited to a motor and lead screw structure; it can also be directly driven by a cylinder.

[0029] In one embodiment of this application, each of the longitudinal conveying edges 11 includes a mounting plate 111, a motor 112, a first rotating shaft 113, a plurality of active magnetic wheels 114, and a plurality of power wheel assemblies corresponding to each active magnetic wheel 114; the mounting plate 111 is arranged vertically; the first rotating shaft 113 is arranged along the length direction of the mounting plate 111 and is mounted on the mounting plate 111 with bearings, and one end is connected to the output shaft of the motor 112; the plurality of active magnetic wheels 114 are spaced apart on the first rotating shaft 113.

[0030] Each power wheel assembly includes a second rotating shaft 115 rotatably mounted on a mounting plate 111 via a bearing seat, a driven magnetic wheel 116 mounted on one end of the second rotating shaft 115, and a conveyor wheel 117 mounted on the other end of the second rotating shaft 115. Multiple conveyor wheels 117 are arranged in a longitudinal row, with a flat plate placed on the upper surface of the conveyor wheels. The multiple conveyor wheels 117 convey the flat plate. The driven magnetic wheel 116 and the driving magnetic wheel 114 are arranged alternately. When the motor 112 drives the first rotating shaft 113 and the multiple driving magnetic wheels 114 to rotate, the driving magnetic wheel 114 drives the driven magnetic wheel 116 to rotate, and simultaneously drives the second rotating shaft 115 and the conveyor wheel 117 to rotate.

[0031] Power is transmitted synchronously without contact by mutual locking between the permanent magnet poles of the active magnetic wheel 114 and the driven magnetic wheel 116. Using a magnetic wheel structure as the transmission structure offers advantages such as no contact, no wear, ultra-long lifespan, and maintenance-free operation. It can transmit power through isolation walls (such as vacuum chambers, pressure vessels, and sterile barriers) to achieve absolute sealing. It requires no lubrication and causes no contamination, making it ideal for high-cleanliness environments (such as semiconductor, food, and pharmaceutical industries) and high-vacuum environments.

[0032] In one embodiment of this application, the top surface of the mounting plate 111 is provided with a plurality of rotatable guide wheels 118 spaced apart, and the plurality of guide wheels 118 protrude above the conveying wheel 117. The side edge of the flat plate contacts the guide wheels, which play an auxiliary role in conveying, making the conveying of the flat plate smoother and more stable. Exemplarily, the guide wheels 118 are plastic wheels or bearings.

[0033] In one embodiment of this application, the two transverse conveying edges 31 have the same structure as the longitudinal conveying edge 11, both using a magnetic wheel structure and a guide wheel structure. Therefore, the specific structure of the two transverse conveying edges 31 will not be described in detail.

[0034] In one embodiment of this application, the lifting mechanism 20 includes a cylinder 22 and a lifting platform 21 disposed on the output shaft of the cylinder 22, wherein the cylinder 22 drives the lifting platform 21 to move up and down. An anti-slip plate 23 is provided on the upper surface of the lifting platform 21 to prevent the flat plate from slipping off the lifting platform 21; exemplaryly, the anti-slip plate 23 is made of a non-slip material.

[0035] In one embodiment of this application, the two transverse conveying edges 31 are positionally adjustable via two second spacing adjustment mechanisms 50, which adjust the two transverse conveying edges 31 to move closer to or further apart from each other. Exemplarily, the second spacing adjustment mechanism 50 can be a motor-driven lead screw structure or a cylinder-driven structure; a cylinder structure can be used for short adjustment distances, while a motor-driven lead screw structure can be used for long adjustment distances.

[0036] In one embodiment of this application, a blocking cylinder 61 is provided on the second output terminal 302, a blocking block 62 is provided on the output shaft of the blocking cylinder 61, and a blocking wheel 63 is rotatably provided on the blocking block 62. The blocking cylinder 61 drives the blocking block 62 and the blocking wheel 63 to extend, so as to block the flat plate from flowing out of the second output terminal 302. The blocking wheel 63 directly contacts the flat plate, and the blocking wheel 63 is rotatable. Therefore, the position of blocking the flat plate may be different each time, thereby improving the service life.

[0037] This application also provides a wafer manufacturing equipment, including a flat panel multi-width right-angle turning device. Since this equipment adopts all the technical solutions of all the above embodiments, it also has all the beneficial effects brought about by the technical solutions of the above embodiments, which will not be described in detail here.

[0038] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A multi-width right angle steering gear for a flat plate member, characterized by: include, The first conveying mechanism (10) has a first input end (101) and a first output end (102). A lifting mechanism (20), located below the first output end (102), has a lifting platform (21); and, The second conveying mechanism (30) is arranged perpendicularly to the first conveying mechanism (10). The second conveying mechanism (30) has a second input end (301) and a second output end (302), and the second input end (301) is located above and overlaps the first output end (102). The second conveying mechanism (30) includes two horizontal conveying edges (31) with adjustable spacing. When the flat plate reaches the first output end (102), the lifting platform (21) rises to lift the flat plate from the first output end (102), and the two transverse conveying sides (31) are simultaneously adjusted to widen and avoid each other; after the lifting platform (21) rises to the preset height, the lifting platform (21) descends, and the two transverse conveying sides (31) are simultaneously adjusted to reset, so that the flat plate is placed at the second input end (301).

2. The flat plate multiple width right angle turning device according to claim 1, characterized in that: The first conveying mechanism (10) includes two longitudinal conveying sides (11) arranged at intervals, at least one of the longitudinal conveying sides (11) being position-adjustable by a first spacing adjustment mechanism (40).

3. The flat plate multiple width right angle turning device according to claim 2, characterized in that: Each of the longitudinal conveying edges (11) includes a mounting plate (111), a motor (112), a first rotating shaft (113), a plurality of active magnetic wheels (114), and a plurality of power wheel assemblies corresponding to each active magnetic wheel (114); the first rotating shaft (113) is arranged along the length direction of the mounting plate (111), and one end is connected to the output shaft of the motor (112); the plurality of active magnetic wheels (114) are spaced apart on the first rotating shaft (113); Each power wheel assembly includes a second rotating shaft (115) rotatably mounted on the mounting plate (111), a driven magnetic wheel (116) mounted on one end of the second rotating shaft (115), and a conveying wheel (117) mounted on the other end of the second rotating shaft (115). Multiple conveying wheels (117) are arranged in a longitudinal row, and multiple conveying wheels (117) convey the flat plate. The driven magnetic wheel (116) and the active magnetic wheel (114) are arranged at intervals, and the active magnetic wheel (114) drives the driven magnetic wheel (116) to rotate.

4. The multi-width right angle turn device of flat plate according to claim 3, characterized in that: The top surface of the mounting plate (111) is provided with a plurality of rotatable guide wheels (118) spaced apart, and the plurality of guide wheels (118) protrude above the conveyor wheel (117).

5. The multi-width right angle turn device of flat sheet according to claim 4, characterized in that: The two transverse conveying edges (31) have the same structure as the longitudinal conveying edge (11).

6. The flat plate multiple width right angle turning device of claim 1, wherein: The lifting mechanism (20) includes a cylinder (22) and a lifting platform (21) disposed on the output shaft of the cylinder (22). The cylinder (22) drives the lifting platform (21) to move up and down.

7. The multi-width right angle turn device of flat sheet according to claim 6, characterized in that: The upper surface of the lifting platform (21) is provided with an anti-slip plate (23).

8. The flat plate multiple width right angle turning device of claim 1, wherein: The two transverse conveying edges (31) are positionally adjustable by two second spacing adjustment mechanisms (50), which adjust the two transverse conveying edges (31) to move closer to or further away from each other.

9. The flat plate multiple width right angle turning device of claim 1, wherein: The second output end (302) is provided with a blocking cylinder (61), and the output shaft of the blocking cylinder (61) is provided with a blocking block (62). The blocking block (62) is rotatably provided with a blocking wheel (63). The blocking cylinder (61) drives the blocking block (62) and the blocking wheel (63) to extend, so as to block the flat plate from flowing out of the second output end (302).

10. A wafer production apparatus characterized by comprising: Including the flat plate multi-width right-angle steering device as described in any one of claims 1-9.

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