Workpiece mounting apparatus, semiconductor mounting system

Abstract

This application relates to the field of mounting technology, and more particularly to a workpiece mounting equipment and a semiconductor mounting system. The workpiece mounting equipment includes: a conveying mechanism mounted on a work platform for conveying a first workpiece along the X-direction; a beam frame arranged along the Y-axis, spanning above the conveying mechanism via support columns, the length of the beam frame being less than or equal to that of the work platform; a feeding device for providing a second workpiece mounted on the work platform, the feeding device being located at the front of the work platform and corresponding to the front end of the beam frame; and a mounting mechanism connected to the beam frame and movable along the Y-direction. The mounting mechanism includes: a mounting column connected to the beam frame, on which a first camera, a mounting head, and a second camera are arranged sequentially along the Y-axis. This application uses two cameras arranged along the Y-axis to photograph and position the first and second workpieces respectively, thereby shortening the path of the mounting mechanism moving along the Y-axis and achieving photographic positioning of the workpiece and the workpiece to be mounted without increasing the size of the mounting equipment.

Description

Technical Field

[0001] This application relates to the field of mounting technology, and more particularly to a workpiece mounting equipment and a semiconductor mounting system. Background Technology

[0002] In existing placement equipment, the component to be placed needs to be attached to the component to be placed. Before placement, both the component and the component need to be photographed and positioned by a vision device mounted on a crossbeam to improve placement accuracy. The vision device moves on the crossbeam to obtain the positional information of the component and the component to be placed. The travel distance of the vision device depends on the length of the crossbeam. When the component or the component to be placed is located at the edge of the frame of the placement equipment, the length of the crossbeam will restrict the movement of the vision device, making it difficult for the vision device to fully take into account the photographic positioning of the component or the component to be placed at the edge of the frame. Unless the length of the crossbeam is increased, it is easy for the end of the crossbeam to protrude from the placement equipment, increasing the size of the placement equipment and reducing the operational stability of the equipment.

[0003] How to achieve accurate photographic positioning of both the component to be mounted and the component to be mounted without increasing the size of the mounting equipment is a technical problem that equipment manufacturers need to solve. Utility Model Content

[0004] The present invention aims to solve at least the following technical problem: how to achieve the photographic positioning of the mounting part and the part to be mounted without increasing the size of the mounting equipment.

[0005] Therefore, this utility model provides a workpiece mounting device, in which two cameras are arranged along the Y-axis in the mounting mechanism to take pictures and position the first workpiece and the second workpiece respectively, so as to shorten the path of the mounting mechanism moving along the Y-axis, thereby realizing the picture positioning of the mounting part and the workpiece to be mounted without increasing the size of the mounting device.

[0006] The workpiece mounting equipment according to an embodiment of the present utility model includes:

[0007] The work platform is used to receive the first workpiece transferred from the previous process;

[0008] A conveying mechanism is mounted on a work platform and arranged along the X-axis, for conveying the first workpiece along the X-axis.

[0009] A beam frame is arranged along the Y-axis direction and spans above the conveying mechanism via support columns. The length of the beam frame is less than or equal to that of the working platform. The working platform is equipped with a feeding device for providing a second workpiece. The feeding device is located on the front side of the working platform and corresponds to the front end of the beam frame.

[0010] The mounting mechanism is connected to the beam frame and is movable along the Y direction. The mounting mechanism includes:

[0011] The mounting column is connected to the beam frame. The mounting column is equipped with a first camera, a placement head, and a second camera arranged sequentially along the Y-axis. The first camera is used to photograph the first workpiece, the second camera is used to photograph the second workpiece, and the placement head is used to pick up the second workpiece and place the second workpiece onto the first workpiece.

[0012] The beneficial effect of this utility model is that by setting two cameras arranged along the Y-axis in the mounting mechanism, the first workpiece and the second workpiece are photographed and positioned respectively, so as to shorten the path of the mounting mechanism moving along the Y-axis and reduce the space occupied by the mounting equipment. Thus, the photographic positioning of the mounting part and the part to be mounted is achieved without increasing the volume of the mounting equipment.

[0013] According to one embodiment of the present invention, the front and rear sides of the mounting column are slidably connected to a front mounting bracket and a rear mounting bracket via two Z-axis drive devices, respectively. The first camera is mounted on the rear mounting bracket, and the second camera and the mounting head are mounted on the front mounting bracket.

[0014] According to one embodiment of the present invention, the conveying mechanism is provided with two working positions along the X-axis, and there are two beam frames, each corresponding to one of the two working positions.

[0015] According to one embodiment of the present invention, the mounting mechanisms on the two beam frames are respectively connected to one side of the two beam frames that are opposite to each other.

[0016] According to one embodiment of the present invention, the working platform is provided with two feeding devices, which are respectively arranged opposite to two beam frames.

[0017] According to one embodiment of the present invention, the feeding device includes,

[0018] A storage cabinet is used to store multiple stacked trays. The top of the storage cabinet is provided with an output position, and an empty tray storage area is provided above the storage cabinet.

[0019] A lifting mechanism, which is installed inside the storage cabinet, is used to lift multiple stacked material trays and move them toward the output position;

[0020] A feeding mechanism is located on one side of the storage cabinet and opposite to the output position. The feeding mechanism is used to transport the material tray toward the conveying mechanism and transport the empty material tray back to the empty tray storage area.

[0021] A pushing device is installed on the top of the storage cabinet and is located opposite the feeding mechanism. The pushing device and the feeding mechanism are located on opposite sides of the storage cabinet. The pushing device is used to push the material tray onto the feeding mechanism.

[0022] A material return device is provided on the feeding mechanism to push empty trays below the empty tray storage area.

[0023] According to one embodiment of the present invention, the storage cabinet is installed on the front side of the work platform, and the workpiece mounting equipment is installed on the work platform.

[0024] According to one embodiment of the present invention, the feeding device further includes a magazine storage rack for storing multiple magazines stacked together. The magazine storage rack is located between the two beams and at the front end of the beams. The working platform is provided with a top-loading assembly for pushing out the magazines in the magazine storage rack.

[0025] According to one embodiment of the present invention, the top material assembly includes:

[0026] A support block, which is slidably disposed below the working platform along the Z-axis direction;

[0027] A push rod is connected to the top of the support block and extends through the work platform into the magazine storage rack.

[0028] This utility model embodiment also provides a semiconductor mounting system, including a feeding device, multiple dispensing devices, multiple workpiece mounting devices as described above, a hot pressing device, and a unloading device connected in sequence to each other.

[0029] Other features and advantages of this invention will be set forth in the description which follows, and will be apparent in part from the description, or may be learned by practicing the invention. The objectives and other advantages of this invention are realized and obtained through the structures particularly pointed out in the description, claims, and drawings.

[0030] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, preferred embodiments are described below in detail with reference to the accompanying drawings. Attached Figure Description

[0031] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0032] Figure 1 This is a schematic diagram of the semiconductor mounting system in this utility model.

[0033] Figure 2 This is a schematic diagram of the workpiece mounting equipment in this utility model.

[0034] Figure 3 This is a schematic diagram of the conveying mechanism and beam frame layout in this utility model.

[0035] Figure 4 This is a schematic diagram of the mounting mechanism in this utility model.

[0036] Figure 5 This is a schematic diagram of the conveying mechanism in this utility model.

[0037] Figure 6 This is a schematic diagram of the feeding device in this utility model.

[0038] Figure 7 This is a schematic diagram of the structure of the first transmission component in this utility model.

[0039] Figure 8 This is a schematic diagram of the disassembly mechanism in this utility model.

[0040] Figure 9 This is a schematic diagram of the structure of the disassembly assembly in this utility model.

[0041] Figure 10 This is a schematic diagram of the material return device in this utility model.

[0042] Figure 11 This is a schematic diagram of the magazine storage rack in this utility model.

[0043] In the diagram: 1. Feeding equipment; 2. Dispensing equipment; 3. Workpiece mounting equipment; 31. Working platform; 32. Conveying mechanism; 321. Conveyor belt; 322. First conveyor frame; 323. Second conveyor frame; 324. Lifting device; 325. Limiting device; 33. Beam frame; 34. Mounting mechanism; 341. Mounting column; 342. Front mounting frame; 343. Rear mounting frame; 344. Mounting head; 345. First camera; 346. Second camera; 347. Z-axis drive device; 35. Process module; 36. Feeding device; 361. Storage cabinet; 3611. Output position; 3612. Guide plate; 3613. Empty tray storage area; 3614. Cabinet door; 3615. Sliding opening; 3616. Notch; 3617. Support plate; 362. Lifting mechanism; 3621. Bearing plate; 3622. First transmission assembly; 36221. Drive source; 36222. Transmission Shaft; 36223, Drive wheel; 36224, Transmission wheel; 36225, Transmission belt; 36226, Tensioner; 36227, Slide; 36228, Driven wheel; 36229, First guide rail; 363, Pushing device; 364, Returning device; 3641, Pushing component; 3642, Push plate; 3643, Limiting plate; 3644, Through port; 365, Disassembly mechanism; 3651, Second transmission assembly; 3652, Connecting... 3653. Mounting base; 366. Feeding mechanism; 3661. Mounting plate; 3662. Conveyor belt; 3663. Motor; 367. Disassembly assembly; 3671. Disassembly base; 3672. Disassembly component; 3673. Torsion spring; 3674. Guide surface; 368. Magazine rack; 3681. Lifting screw; 3682. Support block; 3683. Push rod; 3684. Connecting frame; 4. Hot pressing equipment; 5. Unloading equipment. Detailed Implementation

[0044] The present invention will now be described in further detail with reference to the accompanying drawings. These drawings are simplified schematic diagrams, illustrating only the basic structure of the present invention, and therefore only show the components relevant to the present invention.

[0045] In the description of this utility model, it should be understood that the terms "center," "longitudinal," "transverse," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential," etc., indicating the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, features defined with "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more.

[0046] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0047] A semiconductor mounting system includes a feeding device 1, multiple dispensing devices 2, multiple workpiece mounting devices 3, a hot pressing device 4, and a unloading device 5, which are connected in sequence to each other.

[0048] In this embodiment, the workpiece mounting equipment 3 specifically includes a working platform 31, a conveying mechanism 32, a beam frame 33, a mounting mechanism 34, a process module 35, and a feeding device 36. Multiple conveying mechanisms 32 are provided; in this embodiment, two conveying mechanisms 32 are provided, arranged along the Y-axis. The workpiece transport direction of each conveying mechanism 32 is set along the X-axis for transporting the first workpiece. In this embodiment, each conveying mechanism 32 has two working positions. The number of beam frames 33 matches the number of working positions on each conveying mechanism 32. The beam frames 33 are correspondingly arranged with the working positions, and their length direction is set along the Y-axis. The beam frames 33 are supported by support columns spanning above the two conveying mechanisms 32.

[0049] With the positive Y-axis direction as front and the positive X-axis direction as right, the right side is the first workpiece unloading end and the left side is the first workpiece loading end. The number of feeding devices 36 is adapted to the number of working positions on each conveying mechanism 32. The feeding devices 36 are all set on the front side of the working platform 31 for loading the second workpiece and are spaced apart along the X-axis direction. The process module 35 is set on the working platform 31 and located between the two feeding devices 36.

[0050] Each beam frame 33 is equipped with a mounting mechanism 34, which slides relative to the beam frame 33 along the Y-axis direction via a Y-axis drive device. The mounting mechanism 34 includes a mounting column 341, a mounting head 344, a first camera 345, a second camera 346, and a height measuring device. The mounting column 341 is connected to the Y-axis drive device. Two mounting frames, namely a front mounting frame 342 and a rear mounting frame 343, are slidably connected to the front and rear sides of the mounting column 341 via two Z-axis drive devices 347, respectively. The mounting head 344 and the second camera 346 are sequentially mounted on the front mounting frame 342 along the positive Y-axis direction. The second camera 346 is located in front of the mounting head 344 and is positioned close to the feeding device 36. The first camera 345 is mounted on the rear mounting frame 343 and is positioned close to the conveying mechanism 32. The first camera 345 is used to photograph and position the first workpiece on the conveying mechanism 32, and the second camera 346 is used to photograph and position the second workpiece on the feeding device 36. In this application, two cameras are used to photograph and position the second and first workpieces respectively, thereby reducing the path of the mounting mechanism 34 along the Y-axis. The length of the beam frame 33 can be less than or equal to the front-to-back length of the working platform 31, shortening the length of the equipment along the Y-axis. This allows for photographic positioning of the mounting and the workpieces to be mounted without increasing the volume of the mounting equipment. The first workpiece enters the working platform 31 via the conveying mechanism 32. The mounting mechanism 34 picks up the second workpiece from the feeding device 36 and then moves sequentially to the corresponding working positions on the two conveying mechanisms 32 for mounting.

[0051] Specifically, the conveying mechanism 32 includes a conveyor belt 321, a first conveyor frame 322, a second conveyor frame 323, and a lifting device 324. The length direction of the first conveyor frame 322 and the second conveyor frame 323 is arranged along the X-axis. The first conveyor frame 322 is fixedly installed on the work platform 31 by a fixing frame. The second conveyor frame 323 is arranged at intervals from the first conveyor frame 322 along the Y-axis. A support frame for supporting the second conveyor frame 323 is connected to the second conveyor frame 323. The conveyor belt 321 is arranged on the opposite side of the first conveyor frame 322 and the second conveyor frame 323.

[0052] It should be noted that the work platform 31 is equipped with an adjustment device. The second conveyor frame 323 in the two conveying mechanisms 32 is connected to the adjustment device through a support frame. The adjustment device can adjust the distance between the first conveyor frame 322 and the second conveyor frame 323.

[0053] The adjustment device includes guide rails and sliders. The number of guide rails is adapted to the number of support frames on each second conveyor 323. The length direction of the guide rails is set along the Y-axis. The sliders are connected to the bottom of the support frames and slide in cooperation with the guide rails, thereby adjusting the distance between the first conveyor 322 and the second conveyor 323. The adjustment device may also include an adjustment element for controlling the movement of the support frames.

[0054] The number and position of lifting devices 324 in a conveying mechanism 32 correspond to the working positions. Each lifting device 324 includes a base, a top plate, a lifting rod, and a support column. The base is slidably mounted on the working platform 31 along the Y-axis via a slide table. The lifting rod is a lead screw rotatably connected to the base. A nut block that mates with the lead screw is mounted on the top plate. The support column is connected to the base and has a guide rail. A slider that mates with the guide rail is mounted on the bottom of the top plate, providing guidance for the lifting and lowering of the top plate. A motor 3663 is mounted on the base, and the output shaft of the motor 3663 is connected to the lifting rod via a synchronous belt for transmission control. The slide table controls the top plate to move between the two conveyor frames, the lead screw rotates, and the top plate rises, lifting and positioning the carrier containing the first workpiece. Furthermore, each working position on the conveying mechanism 32 is provided with a limiting device 325 on the side near the unloading end of the first workpiece. The limiting device 325 includes a limiting plate 3643 that moves along the Z-axis. After the carrier carrying the first workpiece moves to the working position, the limiting plate 3643 rises to limit the carrier.

[0055] The front end of the work platform 31 is provided with a process module 35, which is located between two beam frames 33. The process module 35 includes a calibration plate and two bottom positioning cameras. The two bottom positioning cameras are used to take pictures and position the bottom of the second workpiece. The two bottom positioning cameras are respectively set close to the two beam frames 33.

[0056] The feeding device 36 includes a storage cabinet 361, a lifting mechanism 362, a pushing device 363, a return device 364, a disassembly mechanism 365, and a feeding mechanism 366.

[0057] The top of the storage cabinet 361 is set as an opening, and an output position 3611 is set at the top opening of the storage cabinet 361. Multiple trays are stacked inside the storage cabinet 361. A lifting mechanism 362 is set on the storage cabinet 361 and lifts the trays from the bottom of the multiple stacked trays toward the output position 3611. A tray removal component 367 is set on the top of the storage cabinet 361. The tray removal component 367 separates one tray located at the top. A feeding mechanism 366 is connected to one side of the storage cabinet 361. One end of the feeding mechanism 366 is opposite to the output position 3611. A pushing device 363 is set on the top of the storage cabinet 361. The pushing device 363 and the feeding mechanism 366 are respectively set on opposite sides of the storage cabinet 361. The pushing device 363 pushes the separated tray at the output position 3611 toward the feeding mechanism 366, so that the tray enters the feeding mechanism 366.

[0058] An empty tray storage area 3613 is provided above the storage cabinet 361. Multiple guide plates 3612 are provided on the top of the storage cabinet 361. Four guide plates 3612 are arrayed on the top of the storage cabinet 361, and the empty tray storage area 3613 is formed between the four guide plates 3612. The return device 364 is connected to the feeding mechanism 366 and is used to push the empty tray above the feeding mechanism 366 back to the top of the storage cabinet 361. The tray removal mechanism 365 is provided on the storage cabinet 361. The tray removal mechanism 365 is used to separate the tray at the top of the output position 3611 from other trays. With the lifting mechanism 362, the empty tray is lifted to the empty tray storage area 3613 for storage.

[0059] Specifically, a cabinet door 3614 is provided on the side of the storage cabinet 361 opposite to the feeding mechanism 366. The cabinet door 3614 is located on the front side of the storage cabinet 361 (on the positive Y-axis side) and is used to convey material trays into the storage cabinet 361.

[0060] The lifting mechanism 362 includes a support plate 3621, a first transmission assembly 3622, and a first guide rail 36229. The first transmission assembly 3622 includes a drive source 36221, a transmission shaft 36222, a drive wheel 36223, a transmission wheel 36224, and a transmission belt 36225. The drive source 36221 is disposed inside the storage cabinet 361. The transmission shaft 36222 is rotatably connected to the storage cabinet 361. The axial direction of the transmission shaft 36222 is along the X-axis. Both ends of the transmission shaft 36222 extend through the left and right side walls of the storage cabinet 361 (positive and negative X-axis directions). Drive wheels 36223 are disposed at both ends of the transmission shaft 36222. There are two gears 36224. The two drive gears 36224 are respectively set on the outer side walls of the left and right sides (positive and negative X-axis directions) of the storage cabinet 361. The drive gears 36224 are located directly above the opposite drive gears 36223 along the Z-axis direction. The drive gears 36224 and drive gears 36223 on the same side of the storage cabinet 361 are driven by a belt. Tensioning gears 36226 are also set on the left and right side walls of the storage cabinet 361. The tensioning gears 36226 are located between the drive gears 36224 and drive gears 36223 and are located on one side of the belt and are pressed against the belt. The installation position of the tensioning gears 36226 can be moved along the Y-axis direction. The drive source 36221 is installed inside the storage cabinet 361. A drive wheel is connected to the output shaft of the drive source 36221, and a driven wheel 36228 is coaxially connected to the transmission shaft 36222. The drive wheel and the driven wheel 36228 are driven by a belt. In other embodiments, the drive wheel and the driven wheel 36228 can be two meshing gears.

[0061] The bottom of the support plate 3621 is connected to multiple slides 36227. In this embodiment, four slides 36227 are arranged in a rectangular array at the bottom of the support plate 3621. Two sliding openings 3615 are respectively provided on the left and right side walls of the storage cabinet 361. The two sliding openings 3615 on each side of the storage cabinet 361 are arranged along the Y-axis. The number of first guide rails 36229 matches the number of slides 36227. The four first guide rails 36229 are respectively located on one side of the four sliding openings 3615. The length direction of both the first guide rails 36229 and the sliding openings 3615 is along the Z-axis. The ends of the four slides 36227 away from the support plate 3621 pass through the four sliding openings 3615. The slides 36227 are slidably connected to the first guide rails 36229 via sliders. Two of the slides 36227 are respectively engaged with two belt drives. The drive source 36221 drives the transmission shaft 36222 to rotate via the drive wheel and driven wheel 36228. The transmission shaft 36222 drives the drive wheels 36223 on both sides to rotate synchronously, thereby the belt drives the slide 36227 to move along the Z-axis. The support plate 3621, carrying multiple stacked material trays, moves towards the output position 3611. Photoelectric sensors are also installed on the left and right side walls of the storage cabinet 361 to limit the stroke of the support plate 3621.

[0062] The tray removal mechanism 365 includes a second transmission component 3651, a connecting seat 3652, and a tray removal component 367. Two connecting seats 3652 are provided, and each is connected to the second transmission component 3651 via a belt drive. The structure of the second transmission component 3651 is identical to that of the first transmission component 3622, and will not be described in detail here. The second transmission component 3651 drives the connecting seats 3652 to move along the Z-axis. Second guide rails along the Z-axis are also provided on the left and right side walls of the storage cabinet 361, and the two ends of the connecting seats 3652 slide against the second guide rails via sliders.

[0063] The two ends of the connecting seat 3652 are respectively connected to the mounting seats 3653. In this embodiment, the connecting seat 3652 is set as a U-shaped plate with the opening facing. The top of the storage cabinet 361 has four notches 3616. The ends of the four mounting seats 3653 away from the connecting seat 3652 are respectively located in the four notches 3616. The part of the mounting seat 3653 located in the notch 3616 is defined as the disassembly part. At least one disassembly component 367 is connected to the side wall of the disassembly part facing the inside of the storage cabinet 361. The multiple disassembly components 367 are arranged along the Z-axis direction.

[0064] The tray removal assembly 367 includes a tray removal base 3671 and a tray removal component 3672. The tray removal base 3671 is mounted on a mounting base 3653 and has a mounting opening. The tray removal component 3672 is hinged in the mounting opening. A torsion spring 3673 is provided on the hinge shaft between the tray removal component 3672 and the tray removal base 3671. One end of the tray removal component 3672 protrudes from the tray removal base 3671 and is used for insertion between adjacent trays. The bottom surface of the end of the tray removal component 3672 protruding from the tray removal base 3671 is provided with a guide surface 3674, and the top surface of the tray removal component 3672 is provided as a bearing surface. The end of the guide surface 3674 near the inside of the storage cabinet 361 is inclined towards the bearing surface. When the torsion spring 3673 is in its natural state, the bearing surface is set horizontally. At this time, the disassembly part 3672 is in the first state, and the disassembly part 3672 can rotate toward the inner wall of the storage cabinet 361 to the second state.

[0065] The top of the storage cabinet 361 is also provided with a support plate 3617. The support plate 3617 is hinged to the opposite inner side wall of the storage cabinet 361. The support plate 3617 on each side is located between the two disassembly parts on the same side. The support plate 3671 is used to support the material tray on the output position 3611. The hinge structure between the support plate 3617 and the storage cabinet 361 is the same as the hinge structure of the disassembly part 3672, which will not be described in detail here.

[0066] When the support plate 3621, carrying multiple stacked trays, moves towards the output position 3611 to the predetermined position, the tray removal mechanism 365 descends. The tray at the top abuts against the guide surface 3674 of the tray removal component 3672 on the tray removal mechanism 365, pushing the tray removal component 3672 upward. The tray removal component 3672 rotates upward. When the tray at the top moves above the tray removal component 3672, one end of the tray removal component 3672 protruding from the tray removal seat 3671 inserts between adjacent trays and resets under the action of the torsion spring 3673, supporting the tray at the top and thus removing the top tray. Then, the tray removal mechanism 365 rises, moving one of the separated trays towards the output position 3611 until the tray presses against the support plate 3617, causing the support plate 3617 to rotate. The tray moves above the support plate 3617 and is placed on the support plate 3617. At this time, the tray is located on the output position 3611. The pushing device 363 pushes the tray on the output position 3611 toward the feeding mechanism 366. The pushing device 363 can be a rotary cylinder, linear cylinder, lead screw structure, etc., and there are no restrictions here. A photoelectric sensor can also be installed on the top of the storage cabinet 361 to detect whether there is a tray at the output position 3611, so as to prevent the pushing device 363 from running empty.

[0067] The feeding mechanism 366 includes a mounting plate 3661, a conveyor belt 3662, and a motor 3663. There are two mounting plates 3661, which are connected to the rear side wall of the storage cabinet 361 and are located near the top of the storage cabinet 361. The conveyor belt 3662 is located inside the two mounting plates 3661 via a conveyor wheel. The conveyor wheel is rotatably connected to the mounting plate 3661. The motor 3663 drives the conveyor wheel to rotate, and the conveyor belt 3662 conveys the material tray along the Y-axis.

[0068] A limiting plate 3643 is provided between the two mounting plates 3661. The limiting plate 3643 is located near the storage cabinet 361 and has a through-hole 3644 that penetrates the side wall of the limiting plate 3643 near the storage cabinet 361. The return device 364 includes a pushing member 3641 and a push plate 3642. The pushing member 3641 controls the movement of the push plate 3642 along the Y-axis. In this embodiment, the pushing member 3641 achieves linear movement along the Y-axis through a screw-slider mechanism. A slide rail can also be provided between the mounting plates 3661 to guide the pushing member 3641. A photoelectric sensor is provided on the slide rail to limit the movement stroke of the pushing member 3641.

[0069] One end of the push plate 3642 is hinged to the output end of the push member 3641. A torsion spring 3673 is provided at the hinge between the push plate 3642 and the push member 3641. The end of the push plate 3642 away from the push member 3641 abuts against the bottom of the limiting plate 3643 under the action of the torsion spring 3673. The push member 3641 is located on the side of the opening 3644 away from the storage cabinet 361. The push member 3641 controls the push plate 3642 to move toward the opening 3644. Under the action of the torsion spring 3673, the push plate 3642 is exposed in the opening 3644 and rotates to the top of the conveyor belt 3662, thereby pushing the empty tray toward the storage cabinet 361. When the next empty tray moves above the storage cabinet 361, it is located at the bottom of the previous empty tray. The previous empty tray moves upward along the guide surface 3674 on the tray removal component 3672 under the push of the next empty tray, so that the empty tray enters the empty tray storage area 3613 from the bottom.

[0070] Furthermore, protective plates are provided on both the left and right side walls of the storage cabinet 361. The protective plates cover the side walls of the storage cabinet 361 to protect components such as the first transmission component 3622, the second transmission component 3651, and the connecting seat 3652.

[0071] The feeding device 36 may also include a magazine storage rack 368, which is used to store multiple magazines stacked together to meet the magazine feeding method. The magazine storage rack 368 is located between two beam frames 33 and in front of the process module 35. The working platform 31 is equipped with a top-loading component to push out the magazines in the magazine storage rack 368. The top-loading assembly includes a support block 3682, a push rod 3683, a lifting screw 3681, and a motor 3663. A connecting frame 3684 is provided at the bottom of the working platform 31. The lifting screw 3681 is rotatably connected to the connecting frame 3684. The motor 3663 is used to drive the lifting screw 3681 to rotate. A nut seat is connected to the support block 3682. The nut seat is threadedly engaged with the lifting screw 3681. A slide rail is provided on the connecting frame 3684 along the Z-axis direction. A slider is provided on the support block 3682 and engages with the slide rail. The support block 3682 is slidably positioned below the working platform 31 along the Z-axis direction through the engagement of the lifting screw 3681 and the nut seat. The push rod 3683 is connected to the top of the support block 3682. The push rod 3683 extends through the working platform 31 into the magazine storage rack 368 to push the magazine.

[0072] The implementation principle of this application is as follows:

[0073] In the workpiece mounting equipment 3, the first workpiece is transferred through two conveying mechanisms 32. After the workpiece to be mounted moves to the two working positions, the lifting mechanism lifts and positions the first workpiece. The second workpiece is placed on the material tray and fed by the feeding device 36. The material tray is pushed out of the storage cabinet 361 by the lifting mechanism 362 and moved to the side of the feeding mechanism 366 near the working position by the pushing device 363 and the feeding mechanism 366.

[0074] The Y-axis drive mechanism controls the movement of the placement mechanism 34. The first camera 345 takes a picture of the second workpiece on the tray, the placement head picks up the second workpiece, and the second camera 346 takes a picture of the first workpiece at the work station. The Y-axis drive mechanism controls the placement mechanism 34 to move above the first workpiece for placement. Two cameras arranged along the Y-axis are installed in the placement mechanism to photograph and position the first and second workpieces respectively, shortening the path of the placement mechanism along the Y-axis. This allows for photographing and positioning of the workpiece and the workpiece being placed without increasing the size of the placement equipment.

[0075] This application is equipped with a dual conveyor mechanism 32 with multiple workstations, and two mounting mechanisms 34 can operate simultaneously. By setting up a first conveyor frame 322 and a second conveyor frame 323 with adjustable spacing, the width between the two conveyor belts 3662 can be adjusted to accommodate large-sized first workpieces. The feeding device 36 can handle both tray loading and empty tray unloading, thereby greatly improving mounting efficiency and meeting production capacity requirements.

[0076] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0077] Based on the above-described preferred embodiments of this utility model, and through the foregoing description, those skilled in the art can make various changes and modifications without departing from the technical concept of this utility model. The technical scope of this utility model is not limited to the contents of the specification, but must be determined by the scope of the claims.

Claims

1. A workpiece mounting apparatus (3) characterized by comprising: include: The work platform (31) is used to receive the first workpiece transferred from the previous process; A conveying mechanism (32) is installed on the work platform (31) and arranged along the X-axis direction for conveying the first workpiece along the X-direction; A beam frame (33) is arranged along the Y-axis direction. The beam frame (33) is spanned above the conveying mechanism (32) by a support column. The length of the beam frame (33) is less than or equal to that of the working platform (31). The working platform (31) is equipped with a feeding device (36) for providing a second workpiece. The feeding device (36) is located on the front side of the working platform (31) and corresponds to the front end of the beam frame (33). A mounting mechanism (34) is connected to the beam frame (33) and is movable along the Y direction. The mounting mechanism (34) includes: The mounting column (341) is connected to the beam frame (33). The mounting column (341) is provided with a first camera (345), a mounting head (344), and a second camera (346) arranged sequentially along the Y-axis. The first camera (345) is used to photograph the first workpiece, the second camera (346) is used to photograph the second workpiece, and the mounting head (344) is used to pick up the second workpiece and mount the second workpiece onto the first workpiece.

2. The workpiece mounting apparatus (3) according to claim 1, characterized in that The front and rear sides of the mounting post (341) are slidably connected to a front mounting bracket (342) and a rear mounting bracket (343) via two Z-axis drive devices (347). The first camera (345) is mounted on the rear mounting bracket (343), and the second camera (346) and the mounting head (344) are mounted on the front mounting bracket (342).

3. The workpiece mounting apparatus (3) according to claim 1, characterized in that The conveying mechanism (32) is provided with two working positions along the X-axis, and there are two beam frames (33), which are respectively provided with two working positions.

4. The workpiece mounting apparatus (3) according to claim 3, characterized in that The mounting mechanism (34) on the two beam frames (33) is connected to the opposite side of the two beam frames (33).

5. The workpiece mounting apparatus (3) according to claim 3, characterized in that The work platform (31) is provided with two feeding devices (36), which are respectively arranged opposite to the two beam frames (33).

6. The workpiece mounting apparatus (3) according to claim 5, characterized in that The feeding device (36) includes, Storage cabinet (361), the storage cabinet (361) is used to store multiple trays stacked together, the top of the storage cabinet (361) is provided with an output position (3611), and an empty tray storage area (3613) is provided above the storage cabinet (361). A lifting mechanism (362) is provided in the storage cabinet (361) to lift multiple stacked material trays toward the output position (3611); Feeding mechanism (366) is located on one side of storage cabinet (361) and opposite to output position (3611). The feeding mechanism (366) is used to convey the material tray toward the conveying mechanism (32) and transport the empty material tray back to the empty tray storage area (3613). A pushing device (363) is provided on the top of the storage cabinet (361) and opposite to the feeding mechanism (366). The pushing device (363) and the feeding mechanism (366) are located on opposite sides of the storage cabinet (361). The pushing device (363) is used to push the material tray onto the feeding mechanism (366). A return device (364) is provided on the feeding mechanism (366) for pushing empty trays to the bottom of the empty tray storage area (3613).

7. The workpiece mounting apparatus (3) according to claim 6, characterized in that The storage cabinet (361) is installed on the front side of the work platform (31), and the workpiece mounting equipment (3) is installed on the work platform (31).

8. The workpiece mounting apparatus (3) according to claim 1, characterized in that The feeding device (36) also includes a magazine storage rack (368), which is used to store multiple magazines stacked together. The magazine storage rack (368) is located between the two beams (33) and at the front end of the beams (33). The working platform (31) is provided with a top-loading assembly for pushing out the magazines in the magazine storage rack (368).

9. The workpiece mounting apparatus (3) according to claim 8, characterized in that The top material assembly includes: A support block (3682) is slidably disposed below the work platform (31) along the Z-axis direction; A push rod (3683) is connected to the top of the support block (3682) and extends through the work platform (31) into the magazine storage rack (368).

10. A semiconductor mounting system, characterized by comprising: It includes a feeding device, a plurality of dispensing devices, a plurality of workpiece mounting devices (3) as described in any one of claims 1-9, a hot pressing device, and a unloading device connected in sequence.

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