Low center of gravity high precision platform

Abstract

This utility model relates to a low-center-of-gravity, high-precision platform, including a base, linear guide rails connected to the sides of the base, a linear motor magnet parallel to the linear guide rails connected to the outer side of the base, a slide plate slidably connected between the linear guide rails via a slider, a mover sliding within the linear motor magnet connected to the end of the slide plate, an air blowing assembly connected to the end of the linear motor magnet, a photoelectric fixing block connected to the base, a photoelectric sensor for sensing the slide plate connected to the photoelectric fixing block, a buffer connected to the base via a buffer fixing block, a grating ruler parallel to the linear guide rails connected to the base, a recessed DD motor connected to the slide plate, a reading head for reading the grating ruler connected to the bottom surface of the slide plate via a reading head mounting block, and a power meter fixed to the top surface of the slide plate via a power meter sheet metal. By lowering the platform's center of gravity, incorporating UP-level guide rails, and optimizing internal wiring, the platform's high precision is improved.

Description

Technical Field

[0001] This utility model relates to a low center of gravity and high precision platform. Background Technology

[0002] High-precision semiconductor platforms are the core foundation supporting modern wafer fabrication and a key enabling technology for the evolution of advanced process nodes, the realization of advanced processes, and the assurance of chip yield. Their development level directly determines the performance ceiling of semiconductor manufacturing equipment. Currently, this field faces severe challenges such as approaching physical limits, complex multi-physics coupling, and high system control difficulty, but it also shows strong development trends in materials, control algorithms, intelligence, and domestic production.

[0003] From ceramic wafer forks to wafer alignment stages, from wafer handling robots to precision motion platforms, each link constitutes a precise and efficient production system. With continuous technological development and improvement, these devices will undoubtedly play an even more important role in future semiconductor manufacturing. Currently, common non-air-bearing platform modules on the market have a positioning accuracy of ±1 and a repeatability of ±0.5. While these platform accuracies, when equipped with SP-grade guide rails, meet the requirements of general products, they are insufficient for some specialized products requiring higher precision. Using higher precision would increase costs.

[0004] In view of the above-mentioned shortcomings, the designer actively researched and innovated in order to create a new type of low-center-of-gravity, high-precision platform with greater industrial value. Utility Model Content

[0005] To solve the above-mentioned technical problems, the purpose of this utility model is to provide a low center of gravity and high precision platform.

[0006] To achieve the above objectives, the present invention adopts the following technical solution:

[0007] A low-center-of-gravity, high-precision platform includes a base with linear guide rails connected to its sides. A linear motor magnet, parallel to the linear guide rails, is connected to the outer side of the base adjacent to the linear guide rails. A sliding plate is slidably connected between the linear guide rails via a slider. A mover that slides within the linear motor magnet is connected to the end of the sliding plate. An air-blowing assembly for actuating the mover within the linear motor magnet is connected to the end of the linear motor magnet. A photoelectric fixing block is connected to the base, and a photoelectric sensor for sensing the sliding plate is connected to the photoelectric fixing block. A buffer is connected to the base via a buffer fixing block. A grating ruler, parallel to the linear guide rails, is connected to the base and fixed by a grating ruler end plate. A recessed DD motor is connected to the sliding plate. A reading head for reading the grating ruler is connected to the bottom surface of the sliding plate via a reading head mounting block. A power meter is fixed to the top surface of the sliding plate via a sheet metal mounting.

[0008] Preferably, the base of the low center of gravity high-precision platform is made of marble.

[0009] Preferably, in the low center of gravity high-precision platform, the air blowing assembly includes an air blowing fixing block and a magnetic air blowing connector. The air blowing fixing block is connected to the end of the linear motor magnet, and the magnetic air blowing connector is connected to the air blowing fixing block and communicates with the linear motor magnet.

[0010] Preferably, in the low center of gravity high-precision platform, the base is externally connected to a drag chain groove, and a drag chain is connected inside the drag chain groove. The drag chain is synchronously connected to the slide plate through a drag chain moving fixing block.

[0011] Preferably, in the low center of gravity high-precision platform, a magnet protection plate is connected to the linear motor magnet.

[0012] Preferably, in the low center of gravity high precision platform, the end of the base is connected to an end plate, and a cable protection plate is connected to the end of the slide plate opposite to the end plate. An accordion cover is connected between the cable protection plate and the end plate.

[0013] Preferably, in the low center of gravity high-precision platform, there are two photoelectric sensors, which are respectively located on the left and right sides of the base, and two buffers, which are respectively located on the left and right sides of the base, and a limiting block that contacts the buffer is connected to the sliding plate.

[0014] Preferably, in the low center of gravity high-precision platform, the bottom of the slide plate is connected to a DD motor cable protection sheet metal for installing cables, and the base is provided with a groove for the DD motor cable protection sheet metal to slide with the slide plate.

[0015] Preferably, in the low center of gravity high-precision platform, a cable connector fixing block is connected to the drag chain groove.

[0016] By means of the above solution, this utility model has at least the following advantages:

[0017] This utility model eliminates the skateboard adapter design, lowers the platform's center of gravity, incorporates UP-level guide rails, optimizes internal wiring, and improves the platform's high precision.

[0018] The above description is only an overview of the technical solution of this utility model. In order to better understand the technical means of this utility model and to implement it in accordance with the contents of the specification, the preferred embodiments of this utility model are described in detail below with reference to the accompanying drawings. Attached Figure Description

[0019] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 This is a schematic diagram of the structure of this utility model;

[0021] Figure 2 yes Figure 1 Top view;

[0022] Figure 3 yes Figure 1 Side view. Detailed Implementation

[0023] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0024] Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely to illustrate selected embodiments of the application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.

[0025] like Figure 1 , Figure 2 and Figure 3As shown, a low-center-of-gravity, high-precision platform includes a base 1. Linear guide rails 2 are connected to the sides of the base 1. A linear motor magnet 3, parallel to the linear guide rails, is connected to the outer side of the base 1 adjacent to the linear guide rails 2. A sliding plate 8 is slidably connected between the linear guide rails 2 via a slider. A mover 26, which slides within the linear motor magnet 3, is connected to the end of the sliding plate 8. An air-blowing assembly for blowing the mover within the linear motor magnet 3 is connected to the end of the linear motor magnet 3. A photoelectric fixing block is connected to the base 1. 12. A photoelectric sensor 13 for sensing the slide plate 8 is connected to the photoelectric fixing block 12. A buffer 15 is connected to the base 1 through a buffer fixing block 14. A grating ruler 16, which is fixed by the grating ruler end pressure plate 17, is connected to the base 1 and is arranged parallel to the linear guide rail. A sinking DD motor 9 is connected to the slide plate 8. A reading head 30 for reading the grating ruler is connected to the bottom surface of the slide plate 8 through a reading head mounting block 29. A power meter 23 is connected to the top surface of the slide plate 8 through a power meter fixing sheet metal 24.

[0026] The base 1 described in this utility model is a marble base, which has a stable structure, is resistant to high temperature and shock, and can maintain its shape and precision in industrial vibration or high temperature environments.

[0027] The air blowing assembly described in this utility model includes an air blowing fixing block 18 and a magnetic air blowing connector 6. The air blowing fixing block 18 is connected to the end of the linear motor magnet 3, and the magnetic air blowing connector 6 is connected to the air blowing fixing block 18 and communicates with the linear motor magnet 3.

[0028] In this utility model, the base 1 is externally connected to a drag chain groove 20, and a drag chain 21 is connected inside the drag chain groove 20. The drag chain 21 is synchronously connected to the slide plate 8 through the drag chain moving fixing block 22.

[0029] In this utility model, the linear motor magnet 3 is connected to a magnet protection plate 4, and the slide plate 8 is connected to a magnet protection plate 10.

[0030] In this invention, the base 1 is connected to an end plate 7 at one end, and a cable protection plate 11 is connected to the end of the slide plate 8 opposite to the end plate 7. A gusset 5 is connected between the cable protection plate 11 and the end plate 7. The cable protection plate 11 is installed on both sides of the slide plate 8, and then two gussets 5 are attached between the end plate 7 and the cable protection plate 11 using Velcro.

[0031] In this utility model, there are two photoelectric sensors 13, which are respectively located on the left and right sides of the base 1. There are two buffers 15, which are respectively located on the left and right sides of the base. The sliding plate 8 is connected to a limiting block 27 that contacts the buffer.

[0032] In this utility model, the bottom of the slide plate 8 is connected to a DD motor cable protection sheet metal 28 for installing cables, and the base 1 is provided with a groove 25 for the DD motor cable protection sheet metal 28 to slide with the slide plate.

[0033] In this utility model, the cable connector fixing block 19 is connected to the drag chain groove 20.

[0034] Among them, the linear guide 2 is a UP-level linear guide 2, which can maintain extremely high straightness during linear motion; the mover 26 is a Packer motor dual-drive design, which has good control accuracy and stability, and uniform thrust; the grating ruler 17 and the reading head 30 are imported reading head feedback systems with nanometer-level precision feedback, accurately reflecting the real-time position of the platform; the sinking DD motor 9 lowers the center of gravity, and the optimization of the platform module body structure reduces the overall center of gravity by 40mm; the air blowing assembly (air blowing fixing block 18 and magnetic air blowing connector 6) blows air during platform movement, reducing the heat generated during movement.

[0035] The working principle of this utility model is as follows:

[0036] Control System: Responsible for controlling and monitoring the drive system to ensure the normal operation of the platform module. The control system typically uses a programmable logic controller (PLC) to control parameters such as motor start / stop and speed through programming. It can also collect and analyze various data from the platform module to promptly identify and resolve problems.

[0037] When the platform is in motion, the control system sends instructions to the drive system to drive the motor and move the skateboard 8 along a predetermined trajectory. The reading head 30 monitors the position and status of the skateboard 8 in real time and feeds the information back to the control system so that the control system can adjust and optimize the platform module.

[0038] This utility model eliminates the skateboard adapter design, lowers the platform's center of gravity, incorporates UP-level guide rails, optimizes internal wiring, and improves the platform's high precision.

[0039] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0040] In the description of this application, it should be noted that the terms "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product is in use. They are used only for the convenience of describing this application and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application. Furthermore, the terms "first," "second," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0041] Furthermore, terms such as "horizontal" and "vertical" do not imply that components must be absolutely horizontal or vertical, but rather that they can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal than "vertical," and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0042] In the description of this application, it should also be noted that, unless otherwise expressly specified and limited, the terms "set up," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0043] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the technical principles of the present utility model, and these improvements and modifications should also be considered within the protection scope of the present utility model.

Claims

1. A low center of gravity, high-precision platform, including a base (1), characterized in that: A linear guide rail (2) is connected to the side of the base (1). A linear motor magnet (3) parallel to the linear guide rail is connected to the outer side of the base (1) adjacent to the linear guide rail (2). A sliding plate (8) is slidably connected between the linear guide rails (2) via a slider. A mover (26) that slides inside the linear motor magnet (3) is connected to the end of the sliding plate (8). An air blowing assembly for blowing the mover to slide inside the linear motor magnet (3) is connected to the end of the linear motor magnet (3). A photoelectric fixing block (12) is connected to the base (1). A photoelectric sensor (13) for sensing the slide plate (8) is connected to the base (1). A buffer (15) is connected to the base (1) via a buffer fixing block (14). A grating ruler (16) is connected to the base (1) via a grating ruler end pressure plate (17) and is parallel to the linear guide rail. A sinking DD motor (9) is connected to the slide plate (8). A reading head (30) for reading the grating ruler is connected to the bottom surface of the slide plate (8) via a reading head mounting block (29). A power meter (23) is connected to the top surface of the slide plate (8) via a power meter fixing sheet metal (24).

2. The low center of gravity high-precision platform according to claim 1, characterized in that: The base (1) is made of marble.

3. The low center of gravity high-precision platform according to claim 1, characterized in that: The air blowing assembly includes an air blowing fixing block (18) and a magnetic air blowing connector (6). The air blowing fixing block (18) is connected to the end of the linear motor magnet (3), and the magnetic air blowing connector (6) is connected to the air blowing fixing block (18) and communicates with the linear motor magnet (3).

4. The low center of gravity high-precision platform according to claim 1, characterized in that: The base (1) is externally connected to a drag chain groove (20), and a drag chain (21) is connected inside the drag chain groove (20). The drag chain (21) is synchronously connected to the slide plate (8) through the drag chain moving fixing block (22).

5. The low center of gravity high-precision platform according to claim 1, characterized in that: A magnet protection plate (4) is connected to the linear motor magnet (3).

6. The low center of gravity high-precision platform according to claim 1, characterized in that: The end of the base (1) is connected to the end plate (7), and the end of the slide plate (8) opposite to the end plate (7) is connected to the cable protection plate (11), and the cable protection plate (11) and the end plate (7) are connected to the bellows cover (5).

7. The low center of gravity high-precision platform according to claim 1, characterized in that: Two photoelectric sensors (13) are provided, which are located on the left and right sides of the base (1). Two buffers (15) are provided, which are located on the left and right sides of the base. A limiting block (27) that contacts the buffer is connected to the sliding plate (8).

8. The low center of gravity high-precision platform according to claim 1, characterized in that: The bottom of the slide plate (8) is connected to a DD motor cable protection sheet metal (28) for installing cables, and the base (1) has a groove for the DD motor cable protection sheet metal (28) to slide with the slide plate.

9. The low center of gravity high-precision platform according to claim 4, characterized in that: A cable connector fixing block (19) is connected to the cable chain groove (20).

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