Sheet suction device

Abstract

This application discloses a sheet adsorption device, relating to the field of processing equipment. The sheet adsorption device includes a suction cup assembly and a suction assembly, with an air passage formed within the suction cup assembly. The suction cup assembly includes multiple spaced-apart protrusions, each protrusion having an adsorption surface. All adsorption surfaces face the same direction and are located in the same spatial plane. Each protrusion has at least one adsorption hole on its adsorption surface, which communicates with the air passage within the suction cup assembly. The suction assembly communicates with the air passage of the suction cup assembly and is used to create a negative pressure within the air passage. By spaced-apart the protrusions, a gap is formed between them, thus reducing the contact area between the sheet and the suction cup assembly. This reduces the probability of debris generated during production being distributed on the adsorption surfaces of the protrusions, and consequently reduces the probability of debris being trapped between the adsorption surface and the sheet. Therefore, the sheet adsorption device provided in this application embodiment is less likely to damage the sheet during adsorption, which is beneficial for improving product yield.

Description

Technical Field

[0001] This application relates to the field of processing equipment, and more specifically, to a sheet adsorption device. Background Technology

[0002] Existing technologies employ vacuum adsorption for handling or fixing wafers. However, during adsorption, foreign particles between the equipment surface and the wafer can damage it. For example, in the photovoltaic industry, vacuum adsorption is used to handle solar cells during manufacturing. During cell production, debris may be generated. When this debris appears between the vacuum adsorption device and the wafer, the adsorption force compresses the wafer, making it susceptible to damage from the debris. This can lead to microcracks or chipping on the wafer surface, ultimately degrading its quality. Furthermore, in some scenarios, this damage is difficult to detect during handling. For instance, when handling copper-coated silicon wafers, the copper film's shielding effect prevents photoluminescence (PL) and electroluminescence (EL) imaging. Only after removing the copper film can the wafer be properly imaged under PL / EL. Therefore, it is crucial to minimize damage to the wafers caused by the handling equipment. Utility Model Content

[0003] The purpose of this application is to provide a sheet adsorption device that can reduce damage to the sheet surface from debris when adsorbing sheets.

[0004] The embodiments of this application can be implemented as follows: This application provides a sheet adsorption device, including a suction cup assembly and a suction assembly. An air passage is formed in the suction cup assembly. The suction cup assembly includes a plurality of mutually spaced protrusions, each protrusion having an adsorption surface. All adsorption surfaces face the same direction and are located in the same spatial plane. At least one adsorption hole is opened on the adsorption surface of each protrusion. The adsorption hole is connected to the air passage in the suction cup assembly. The suction assembly is connected to the air passage of the suction cup assembly and is used to form a negative pressure in the air passage.

[0005] In an optional embodiment, the suction cup assembly includes a support and a plurality of support arms extending along a first direction. The plurality of support arms are spaced apart in a second direction. The first direction is perpendicular to the second direction. Each support arm is provided with a plurality of bosses arranged at intervals along the first direction. One end of the support arm is connected to the support. An air passage is formed in the support, the support arms, and the bosses.

[0006] In an optional embodiment, the support is provided with an opening for communicating with an air passage, and the suction assembly communicates with the air passage in the support through the opening.

[0007] In an optional embodiment, each boss is disposed on one side of the support arm in a third direction, which is perpendicular to the first and second directions, and the surface of the support arm on the side where the boss is located is an outwardly convex curved surface.

[0008] In an optional embodiment, the boss, support arm, and support are made of polymer materials or aluminum alloys.

[0009] In an optional embodiment, an anti-slip buffer layer is attached to the adsorption surface of each boss.

[0010] In an optional embodiment, the anti-slip buffer layer has a plurality of through holes that penetrate the anti-slip buffer layer in the thickness direction.

[0011] In an optional embodiment, the diameter of the through hole is 0.5~2mm; And / or, the thickness of the anti-slip buffer layer is 0.05~0.15mm.

[0012] In an optional implementation, the anti-slip buffer layer covers the adsorption holes, or the anti-slip buffer layer avoids the adsorption holes.

[0013] In an optional embodiment, the anti-slip cushioning layer includes at least one of nylon mesh, rubber pad, and silicone pad.

[0014] The beneficial effects of the sheet adsorption device provided in this application embodiment include: The sheet adsorption device provided in this application includes a suction cup assembly and a suction assembly, with an air passage formed within the suction cup assembly. The suction cup assembly includes multiple spaced-apart protrusions, each with an adsorption surface. All adsorption surfaces face the same direction and are located in the same spatial plane. Each protrusion has at least one adsorption hole on its adsorption surface, which communicates with the air passage within the suction cup assembly. The suction assembly communicates with the air passage of the suction cup assembly and is used to create a negative pressure within the air passage. By spaced-apart the protrusions, a gap is formed between them, thus reducing the contact area between the sheet and the suction cup assembly. This reduces the probability of debris generated during production being distributed on the adsorption surfaces of the protrusions, and consequently reduces the probability of debris being trapped between the adsorption surfaces and the sheet. Debris falling between the protrusions will not come into contact with the sheet when the sheet adsorption device adsorbs it, thus preventing damage to the sheet. Therefore, the sheet adsorption device provided in this application embodiment is less likely to damage the sheet during adsorption, which is beneficial for improving product yield. Attached Figure Description

[0015] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0016] Figure 1 This is a schematic diagram of a sheet adsorption device in one embodiment of this application; Figure 2 This is a first schematic diagram of the suction cup assembly of the sheet adsorption device in one embodiment of this application; Figure 3 This is a second schematic diagram of the suction cup assembly of the sheet adsorption device in one embodiment of this application; Figure 4 This is a schematic diagram of the anti-slip buffer layer (nylon mesh) absorbing debris in one embodiment of this application.

[0017] Icons: 100-Suction cup assembly; 110-Boss; 111-Suction hole; 112-Suction surface; 120-Support arm; 130-Support; 131-Opening; 140-Connecting part; 200-Suction assembly; 210-Vacuum pump; 220-Pipeline. Detailed Implementation

[0018] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0019] Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely to illustrate selected embodiments of the application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.

[0020] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0021] In the description of this application, it should be noted that if terms such as "upper," "lower," "inner," or "outer" are used to indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship that the utility model product is usually placed in during use, they are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0022] Furthermore, the terms "first" and "second" are used only to distinguish descriptions and should not be interpreted as indicating or implying relative importance.

[0023] It should be noted that, where there is no conflict, the features in the embodiments of this application can be combined with each other.

[0024] In related technologies, vacuum adsorption devices often trap external or production-generated debris between the sheet and the adsorption surface when adsorbing sheet materials. The adsorption force causes the sheet to press against the adsorption surface of the device, while the debris may scratch the surface of the sheet. Taking photovoltaic product manufacturing as an example, when solar cells (or their semi-finished products) are adsorbed, debris may cause problems such as microcracks and perforations in the solar cells, leading to a decrease in product yield.

[0025] To address the issue of sheet materials being easily damaged by debris, this application provides a sheet material adsorption device. By setting multiple spaced protrusions, the area of ​​the adsorption surface is reduced, thereby decreasing the risk of the sheet material being damaged by pressing on debris.

[0026] Figure 1 This is a schematic diagram of a sheet adsorption device in one embodiment of this application; Figure 2 This is a first schematic diagram of the suction cup assembly 100 of the sheet adsorption device in one embodiment of this application; Figure 3 This is a second schematic diagram of the suction cup assembly 100 of a sheet adsorption device in one embodiment of this application. Figures 1 to 3As shown, this application provides a sheet adsorption device, including a suction cup assembly 100 and a suction assembly 200 (not shown in the figure). An air passage is formed within the suction cup assembly 100. The suction cup assembly 100 includes a plurality of mutually spaced protrusions 110, each protrusion 110 having an adsorption surface 112. All adsorption surfaces 112 face the same direction and are located in the same spatial plane. At least one adsorption hole 111 is formed on the adsorption surface 112 of each protrusion 110. The adsorption hole 111 communicates with the air passage within the suction cup assembly 100. The suction assembly 200 is communicated with the air passage of the suction cup assembly 100 and is used to create a negative pressure within the air passage. It can be understood that when the suction assembly 200 operates, a negative pressure is generated within the air passage of the suction cup assembly 100, thus generating an adsorption force at the adsorption hole 111, which can be used to adsorb sheets. When the sheet is adsorbed, it abuts against the adsorption surface 112. Since the adsorption surface 112 is formed on the top of each protrusion 110, and the area between each protrusion 110 is hollowed out, the total area of ​​the adsorption surface 112 is small. Therefore, the probability of debris being trapped between the adsorption surface 112 and the sheet is low when adsorbing the sheet, and the sheet is less likely to be damaged by debris. In this embodiment, the adsorption surfaces 112 on each protrusion 110 are all on the same plane, making the sheet adsorption device more suitable for adsorbing sheets with flat surfaces.

[0027] In this embodiment, the suction cup assembly 100 further includes a support 130 and a plurality of support arms 120 extending along a first direction (arrow ab in the figure). The plurality of support arms 120 are spaced apart in a second direction (arrow cd in the figure), and the first direction is perpendicular to the second direction. Each support arm 120 is provided with a plurality of bosses 110 arranged at intervals along the first direction. One end of the support arm 120 is connected to the support 130, and an air passage is formed in the support 130, the support arm 120, and the bosses 110. In this embodiment, the suction cup assembly 100 includes three support arms 120, and one end of each support arm 120 is connected to the support 130.

[0028] Optionally, the protrusions 110 on the same support arm 120 are evenly spaced, and each protrusion 110 is provided with an adsorption hole 111, thus making the adsorption holes 111 evenly spaced in the first direction. Furthermore, the support arms 120 are evenly spaced in the second direction. Through the above arrangement, the adsorption holes 111 are more evenly distributed, enabling the sheet adsorption device to generate a uniform adsorption force on the sheet, avoiding warping and deformation of the sheet due to uneven adsorption force. In this embodiment, the support arms 120 have the same length, and the number of protrusions 110 on each support arm 120 is equal.

[0029] In other embodiments, the number of support arms 120 on the suction cup assembly 100 can be adjusted as needed, for example, two or more; each boss 110 can be provided with multiple suction holes 111, for example, the boss 110 is provided with multiple suction holes 111 arranged in a rectangular array or a ring array. In this embodiment, the shape of the boss 110 is trapezoidal and the suction surface 112 is rectangular; in other embodiments, the boss 110 can also be a frustum of a cone and the suction surface 112 is circular.

[0030] In this embodiment, the support 130 is provided with an opening 131 that connects to the air passage, and the suction assembly 200 is connected to the air passage in the support 130 through the opening 131. Since the air passage in the boss 110 is connected to the air passage in the support arm 120, and the air passage in the support arm 120 is connected to the air passage in the support 130, by suctioning the opening 131 on the support 130, the suction holes 111 on the multiple bosses 110 can generate suction force, thereby adsorbing the sheet.

[0031] In this embodiment, each boss 110 is disposed on one side of the support arm 120 in a third direction (the direction of arrow ef in the figure). The third direction is perpendicular to the first and second directions, and the third direction is the height direction of the boss 110. Optionally, the surface of the support arm 120 on the side where the boss 110 is located is a convex curved surface, that is, the side of the support arm 120 facing direction e in the figure is a convex curved surface. By setting the support arm 120 to have a convex curved surface, debris falling on the support arm 120 can easily slide off and will not accumulate on the support arm 120.

[0032] Optionally, an anti-slip buffer layer is attached to the adsorption surface 112 of each boss 110. By providing the anti-slip buffer layer, the risk of the sheet sliding relative to the boss 110 can be reduced, improving the stability of the sheet. Simultaneously, the anti-slip buffer layer is more flexible than the boss 110, providing a cushioning effect and preventing damage to the sheet due to rigid contact between the boss 110 and the sheet. Furthermore, because the anti-slip buffer layer has a certain degree of flexibility, it avoids the problem of the sheet not being able to tightly adhere to the suction cup assembly 100 when there is slight deformation. It should be noted that the anti-slip buffer pad needs not to affect the adsorption effect of the adsorption holes 111. For example, the anti-slip buffer pad can have openings to avoid the adsorption holes 111; or, the anti-slip buffer pad can cover the adsorption holes 111 and be breathable along its thickness direction, so that the position corresponding to the adsorption holes 111 can still generate sufficient adsorption force to adsorb the sheet.

[0033] Optionally, the anti-slip buffer layer has several through holes that penetrate the anti-slip buffer layer in the thickness direction. On the one hand, the through holes allow air to pass through, ensuring that the adsorption force generated by the adsorption holes 111 can penetrate the anti-slip buffer layer and act on the sheet; on the other hand, the through holes can accommodate debris, so even if debris falls onto the top of the protrusion 110, it will be collected by the through holes, which can prevent or reduce damage to the sheet from direct contact with the debris. Therefore, the anti-slip buffer layer can play multiple roles, including buffering, anti-slip, preventing sheet misalignment, and accommodating debris.

[0034] Optionally, the diameter of the through hole is 0.5~2mm, and the thickness of the anti-slip buffer layer is 0.05~0.15mm. Optionally, the anti-slip buffer layer can be bonded to the boss 110 by tape or glue.

[0035] Optionally, the anti-slip cushioning pad may be made of at least one of rubber pads, silicone pads, or nylon mesh. When the anti-slip cushioning layer is made of nylon mesh, the nylon mesh can form through holes to collect debris. Figure 4 This is a schematic diagram illustrating the absorption of debris by the anti-slip buffer layer (nylon mesh) in one embodiment of this application. Figure 4 As can be seen, the debris falls into the mesh of the nylon mesh, which can mitigate the adverse effects of the debris on the sheet. It should be understood that in other embodiments, the anti-slip cushioning pad is selected from one or more of the following: rubber pad, silicone pad, paper, and fabric, or a combination thereof.

[0036] In this embodiment, the suction cup assembly 100 further includes a connecting portion 140, which is connected to the support 130. The suction cup assembly 100 can be connected to external components through the connecting portion 140, thereby enabling the suction cup assembly 100 to be fixed or moved. For example, the suction cup assembly 100 can be connected to a robotic arm through the connecting portion 140, allowing the robotic arm to pick up and move sheets using the sheet adsorption device.

[0037] In this embodiment, the boss 110, support arm 120, and support 130 are made of polymer materials or aluminum alloys. For example, the boss 110, support arm 120, and support 130 are made of polyetheretherketone (PEEK), and the boss 110, support arm 120, and support 130 are integrally molded. The integrally molded structure can ensure the airtightness of the gas path and avoid the problems of poor airtightness and reduced adsorption force caused by the connection of multiple parts.

[0038] In this embodiment, the suction assembly 200 may include a vacuum pump 210 and a pipeline 220. The vacuum pump 210 is connected to the opening 131 on the support 130 through the pipeline 220. After the vacuum pump 210 is started, the suction hole 111 generates suction, which can be used to adsorb sheets. The vacuum pump 210 may be fixed to the connecting part 140 or the support 130, or it may not be fixed to the suction cup assembly 100.

[0039] In summary, the sheet adsorption device provided in this application includes a suction cup assembly 100 and a suction assembly 200, with an air passage formed within the suction cup assembly 100. The suction cup assembly 100 includes multiple spaced-apart protrusions 110, each protrusion 110 having an adsorption surface 112. All adsorption surfaces 112 face the same direction and are located in the same spatial plane. Each protrusion 110 has at least one adsorption hole 111 on its adsorption surface 112, and the adsorption hole 111 communicates with the air passage within the suction cup assembly 100. The suction assembly 200 communicates with the air passage of the suction cup assembly 100 and is used to create a negative pressure within the air passage. By spaced-apart the protrusions 110, a gap is formed between them, thus reducing the contact area between the sheet and the suction cup assembly 100. This reduces the probability of debris generated during production being distributed on the adsorption surfaces 112 of the protrusions 110, and consequently reduces the probability of debris being trapped between the adsorption surfaces 112 and the sheet. The debris falling between the protrusions 110 will not come into contact with the sheet when the sheet adsorption device adsorbs the sheet, thus preventing damage to the sheet. Therefore, the sheet adsorption device provided in this embodiment is less likely to damage the sheet during adsorption, which helps improve product yield.

[0040] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in this application should be included within the scope of protection of this application.

Claims

1. A sheet suction device characterized by comprising: The device includes a suction cup assembly and a suction assembly. The suction cup assembly forms an air passage and includes multiple spaced protrusions. Each protrusion has an adsorption surface, and all adsorption surfaces face the same direction and are located in the same spatial plane. Each protrusion has at least one adsorption hole on its adsorption surface. The adsorption hole communicates with the air passage in the suction cup assembly. The suction assembly communicates with the air passage of the suction cup assembly and is used to create a negative pressure in the air passage. Each of the aforementioned protrusions has an anti-slip buffer layer attached to its adsorption surface. The anti-slip buffer layer has several through holes that penetrate the anti-slip buffer layer in the thickness direction. The anti-slip buffer layer comprises nylon mesh and covers the adsorption holes.

2. The sheet suction device according to claim 1, wherein The suction cup assembly includes a base and a plurality of support arms extending along a first direction. The plurality of support arms are spaced apart in a second direction. The first direction is perpendicular to the second direction. Each support arm is provided with a plurality of protrusions arranged at intervals along the first direction. One end of each support arm is connected to the base. The air passage is formed in the base, the support arms, and the protrusions.

3. The sheet suction device according to claim 2, wherein The support is provided with an opening that connects to the air passage, and the suction assembly is connected to the air passage in the support through the opening.

4. The sheet suction device according to claim 2, wherein Each of the aforementioned protrusions is disposed on one side of the support arm in a third direction, the third direction being perpendicular to the first direction and the second direction, and the surface of the support arm on the side where the protrusion is located is an outwardly convex curved surface.

5. The sheet suction device according to claim 2, wherein The boss, the support arm, and the support are made of polymer materials or aluminum alloys.

6. The sheet suction device according to any one of claims 1 to 5, characterized by The diameter of the through hole is 0.5~2mm; And / or, the thickness of the anti-slip buffer layer is 0.05~0.15mm.

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