Stage, leveling assembly and testing equipment

Abstract

This application relates to a slide stage, a leveling assembly, and a testing device. The slide stage includes a base, a suction cup, a fixing assembly, and a leveling assembly. The suction cup is arranged on one side of the base in a first direction. The fixing assembly and the leveling assembly are spaced apart circumferentially along the suction cup and each includes two fixing members and a locking member. The two fixing members are directly or indirectly universally connected, and the locking member is used to lock the connection between the two fixing members. The two fixing members include a first fixing member fixed to the suction cup and a second fixing member fixed to the base. The leveling assembly also includes a leveling structure clamped between the two fixing members along the first direction, and the leveling structure can drive the first fixing member to reciprocate along the first direction. The technical solution of this application can improve the leveling efficiency of the slide stage.

Description

Technical Field

[0001] This application relates to the field of testing technology, and in particular to a slide stage, leveling assembly, and testing equipment. Background Technology

[0002] Automated Optical Inspection (AOI) is a front-end wafer fabrication process in semiconductor manufacturing. It uses optical algorithms to measure critical wafer dimensions, such as linewidth and lineheight, film thickness, and surface roughness. AOI equipment typically consists of wafer loading, wafer handling robots, wafer pre-alignment, a stage, and optical inspection equipment.

[0003] In the wafer inspection industry, wafer stages are generally made of metal or ceramic materials, namely metal chucks and microporous ceramic chucks. Wafer stages are typically placed on a marble platform. Due to machining errors and cumulative errors during assembly, wafer stages are usually equipped with leveling mechanisms. Currently, most wafer stages in the industry are fixed and adjusted using a set screw structure. This involves three to four adjusting studs evenly distributed at the bottom of the vacuum chuck. The height of a specific area of ​​the chuck is adjusted by changing the thread engagement depth of the studs. After leveling, the set screws on the side of the studs are tightened to fix the position. Finally, the connecting screws between the wafer stage and the adjusting studs are tightened to complete the entire wafer stage adjustment operation. This leveling method is time-consuming, labor-intensive, and inefficient. Utility Model Content

[0004] Therefore, it is necessary to provide a wafer carrier, a leveling component, and a testing device to address the problem of low leveling efficiency of the wafer carrier stage.

[0005] Firstly, this application proposes a slide stage, comprising:

[0006] Base;

[0007] A suction cup is disposed on one side of the base in the first direction;

[0008] The fixing component and the leveling component are distributed at intervals along the circumference of the suction cup, and each includes two fixing parts and a locking part. The two fixing parts are directly or indirectly universally connected, and the locking part is used to lock the connection between the two fixing parts. The two fixing parts include a first fixing part fixed to the suction cup and a second fixing part fixed to the base.

[0009] The leveling assembly further includes a leveling structure sandwiched between the two fixing members along the first direction, the leveling structure being capable of driving the first fixing member to reciprocate along the first direction.

[0010] In one embodiment, both fixing members are provided with connecting holes, and the locking member includes a locking threaded member, which passes through the connecting holes of the two fixing members and locks them together;

[0011] There is a gap between at least one of the connecting holes and the locking thread.

[0012] In one embodiment, both the fixing component and the leveling component further include a sealing ring, and the locking threaded component includes an extended end that extends out of the fixing component; the sealing ring is sleeved on the extended end and is limited to the locking threaded component and the fixing component;

[0013] The sealing ring consists of a first washer and a second washer stacked along the first direction, with the first washer and the second washer spherically mated.

[0014] In one embodiment, both the fixing component and the leveling component further include a connecting member, which is connected between the first fixing member and the second fixing member along the first direction and is spherically hinged to the first fixing member;

[0015] The fitting of the leveling component is connected to the second fixing member via the leveling structure, and the fitting of the fixing component is directly connected to the second fixing member.

[0016] In one embodiment, the leveling structure includes a wedge and an adjusting member. The wedge is movably disposed relative to the second fixing member along an adjusting direction intersecting the first direction. The adjusting member is connected to the wedge and is used to control the wedge to move along the adjusting direction.

[0017] The leveling assembly includes a fitting that is spherically hinged to the first fixing member. The wedge-shaped member is fitted with the inclined surface of the fitting, and during movement, it can drive the first fixing member to reciprocate along the first direction via the fitting.

[0018] In one embodiment, the leveling structure further includes a base and an elastic element. The base is located between the two fixing elements and fixed to the second fixing element. The wedge-shaped element and the adjusting element are both movably mounted on the base along the adjusting direction.

[0019] The elastic element is connected between the base and the wedge-shaped element, and the elastic element and the adjusting element are arranged on opposite sides of the wedge-shaped element.

[0020] In one embodiment, the adjusting member includes an adjusting threaded member and a locking nut. The adjusting threaded member is threadedly engaged with the base and abuts against the wedge-shaped member. The locking nut is threadedly installed on the adjusting threaded member and is located outside the base.

[0021] In one embodiment, a guide portion is provided within the base, and the wedge-shaped member is movably disposed along the guide portion.

[0022] In one embodiment, the base is provided with a mounting hole, the wedge is provided with a limiting hole, one end of the elastic member is inserted into the mounting hole, and the other end is inserted into the limiting hole.

[0023] In one embodiment, the base has a receiving cavity, the wedge and the elastic member are located in the receiving cavity, the receiving cavity has a clearance hole, and the mating member passes through the clearance hole and engages with the inclined surface of the wedge.

[0024] In one embodiment, the wedge-shaped member has a strip-shaped hole that extends along the adjustment direction, and the locking member passes through the first fixing member, the mating member, and the strip-shaped hole in sequence and is locked onto the second fixing member.

[0025] Secondly, this application proposes a leveling assembly, including a locking member and a first fixing member, a mating member, a leveling structure, and a second fixing member connected sequentially along a first direction. The mating member is spherically hinged to the first fixing member. The leveling structure is configured to drive the mating member to reciprocate along the first direction to change the distance between the first fixing member and the second fixing member in the first direction. The locking member is used to lock the connection between the first fixing member and the second fixing member.

[0026] Thirdly, this application proposes a testing apparatus, including the stage described in the first aspect.

[0027] During adjustment, the aforementioned stage, leveling assembly, and testing equipment, due to the direct or indirect universal connection between the first and second fixing components, allow their position to change with the deflection of the suction cup. The flatness of the suction cup can be adjusted simply by adjusting the leveling structure, making leveling simple, easy to operate, time-saving, labor-saving, and highly efficient. Furthermore, the locking threaded component always connects the two fixing components, ensuring they will not detach and eliminating the risk of screws falling off the machine, as is present in existing technologies. This guarantees adjustment safety. Attached Figure Description

[0028] Various other advantages and benefits will become apparent to those skilled in the art upon reading the detailed description of the preferred embodiments below. The accompanying drawings are for illustrative purposes only and are not intended to limit the scope of this application. Furthermore, the same reference numerals denote the same parts throughout the drawings. In the drawings:

[0029] Figure 1 This is a schematic diagram of the stage structure in some embodiments;

[0030] Figure 2 This is a schematic diagram of the structure of the leveling component in some embodiments;

[0031] Figure 3 for Figure 2 The diagram shows the internal structure of the leveling assembly and the base after assembly.

[0032] Figure 4 for Figure 2 An exploded view of the leveling components shown;

[0033] Figure 5 This is a schematic diagram of the leveling component in some other embodiments;

[0034] Figure 6 for Figure 5 The diagram shows the internal structure of the leveling component.

[0035] Figure 7 These are schematic diagrams of the structure of the fixing components in some embodiments;

[0036] Figure 8 for Figure 7 The diagram shows the internal structure of the fixed components after they are assembled with the base.

[0037] The reference numerals in the detailed embodiments are as follows:

[0038] 100. Stage; Z, First direction; 10. Base; 20. Suction cup; 30. Fixing assembly; 40. Leveling assembly; A. Fixing component; A1. First fixing component; A2. Second fixing component; A3. Connecting hole; B. Locking component; B1. Locking threaded component; B11. Pressing head; B12. Screw; C. Connecting component; D. Sealing ring; D1. First washer; D2. Second washer; 41. Leveling structure; 41a. Wedge-shaped component; a1. Limiting hole; a2. Strip hole; a3. Mating part; 41b. Adjusting component; b1. Adjusting threaded component; b2. Locking nut; 41c. Base; c1. Guide part; c2. Mounting hole; c3. Receiving cavity; c4. Threaded hole; c5. First seat body; c6. Second seat body; c7. Intermediate seat body; 41d. Elastic component. Detailed Implementation

[0039] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0040] In the description of this application, it should be understood that, where they appear, the terms “center,” “longitudinal,” “lateral,” “length,” “width,” “thickness,” “upper,” “lower,” “front,” “rear,” “left,” “right,” “vertical,” “horizontal,” “top,” “bottom,” “inner,” “outer,” “clockwise,” “counterclockwise,” “axial,” “radial,” and “circumferential” indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0041] Furthermore, where applicable, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0042] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "joining," "fixing," etc., shall be interpreted broadly. For example, they may refer to a fixed connection, a detachable connection, or an integral part; they may refer to a mechanical connection or an electrical connection; they may refer to a direct connection or an indirect connection through an intermediate medium; they may refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0043] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0044] It should be noted that, if an element is described as "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. When an element is described as "connected to" another element, it can be directly connected to the other element or there may be an intervening element. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only possible implementation.

[0045] Please refer to Figure 1 and combined Figure 2 , Figure 3 , Figure 7 and Figure 8 The stage 100 proposed in this embodiment includes a base 10, a suction cup 20, a fixing assembly 30, and a leveling assembly 40. The suction cup 20 is arranged on one side of the base 10 in the first direction Z. The fixing assembly 30 and the leveling assembly 40 are distributed circumferentially around the suction cup 20 and each includes two fixing members A and a locking member B. The two fixing members A are directly or indirectly universally connected, and the locking member B is used to lock the two fixing members A. The two fixing members A include a first fixing member A1 fixed to the suction cup 20 and a second fixing member A2 fixed to the base 10. The leveling assembly 40 also includes a leveling structure 41 sandwiched between the two fixing members A along the first direction Z. The leveling structure 41 can drive the first fixing member A1 to reciprocate along the first direction Z.

[0046] The suction cup 20 is used to hold and adsorb workpieces placed on the stage 100. The suction cup 20 typically, but is not limited to, uses negative pressure adsorption. In actual use, the first direction Z corresponds to the vertical direction. The suction cup 20 is supported on the base 10 by the fixing component 30 and the leveling component 40.

[0047] Since three points define a plane, the total number of fixing components 30 and leveling components 40 is typically set to three. Preferably, one fixing component 30 and two leveling components 40 are configured for more flexible adjustment. Of course, in other embodiments, two fixing components 30 and one leveling component 40 may also be configured.

[0048] Both the fixing assembly 30 and the leveling assembly 40 include two fixing members A, namely a first fixing member A1 and a second fixing member A2 arranged along the first direction Z. The first fixing member A1 is fixedly connected to the suction cup 20 by bolts, welding, or other means. The second fixing member A2 is fixedly connected to the base 10 by bolts, welding, or other means. The first fixing member A1 and the second fixing member A2 are directly or indirectly universally connected, that is, after the first fixing member A1 and the second fixing member A2 are fixed to the suction cup 20 and the base 10 respectively, they can rotate relative to each other in multiple directions to allow the suction cup 20 to deflect relative to the base 10. Specifically, the first fixing member A1 and the second fixing member A2 can be directly or indirectly universally connected by ball joints, universal connectors, or other means.

[0049] Both the fixing assembly 30 and the leveling assembly 40 also include a locking member B, which is used to lock the first fixing member A1 and the second fixing member A2 to restrict rotation of the universal joint connecting the first fixing member A1 and the second fixing member A2. It is worth noting that although the locking member B allows slight rotation of the first fixing member A1 and the second fixing member A2 when locking them, allowing the suction cup 20 to deflect and causing the suction cup 20 to drive the first fixing member A1 to rotate slightly relative to the second fixing member A2, it does not obstruct the rotation of the suction cup 20.

[0050] The leveling assembly 40 also includes a leveling structure 41, which is clamped along the first direction Z to the first fixing member A1 and the second fixing member A2, and can drive the first fixing member A1 to move along the first direction Z. When the first fixing member A1 moves, it can cause the suction cup 20 to deflect upward or downward relative to the base 10, thereby adjusting the flatness of the suction cup 20. The leveling structure 41 can be constructed in various ways; for example, the leveling structure 41 includes a lifting motor.

[0051] One method of using the stage 100 is as follows: the first fixing member A1 of the fixing assembly 30 and the leveling assembly 40 is fixedly connected to the suction cup 20, and the second fixing member A2 of the fixing assembly 30 and the leveling assembly 40 is fixedly connected to the base 10. Then, the locking member B connects the first fixing member A1 and the second fixing member A2. The leveling structure 41 of the leveling assembly 40 then drives the first fixing member A1 connected to it to rise and fall. The first fixing member A1 of the fixing assembly 30 remains stationary in the first direction Z. When the first fixing member A1 of the leveling assembly 40 rises and falls, it causes the suction cup 20 to deflect relative to the base 10 to adjust the flatness until it is in place. During this process, the first fixing member A1 of the fixing assembly 30, driven by the suction cup 20, undergoes a certain degree of slight rotation with the second fixing member A2 within the allowable range of the locking member B.

[0052] Thus, during the adjustment process, since the first fixing member A1 and the second fixing member A2 are directly or indirectly universally connected, their positional state can change with the deflection of the suction cup 20. The flatness of the suction cup 20 can be adjusted simply by adjusting the leveling structure 41. Leveling is simple, easy to operate, time-saving, labor-saving, and highly efficient. Moreover, the locking threaded part B1 is always connected to the two fixing members A, ensuring that the two fixing members A will not detach and that there are no screws that can be completely loosened as in the prior art. There is no risk of screws falling off the machine, ensuring the safety of the adjustment.

[0053] It should be noted that in other operations, locking member B can also be used to lock the first fixing member A1 and the second fixing member A2 after the flatness of the suction cup 20 is adjusted to the correct position. In this case, it is not required that locking member B allow the first fixing member A1 and the second fixing member A2 to rotate slightly. The above is only one method of using the stage 100 according to an embodiment of this application, and is not intended to limit the method of use.

[0054] To allow for slight rotation of the connected first fixing member A1 and second fixing member A2, locking member B is used. In some embodiments, refer to... Figure 3 , Figure 6 and Figure 4 Understood, both fasteners A are provided with connecting holes A3, and the locking component B includes a locking threaded component B1. The locking threaded component B1 passes through the connecting holes A3 of the two fasteners A and locks them together. There is a gap between at least one connecting hole A3 and the locking threaded component.

[0055] There are several ways to lock the first fixing member A1 and the second fixing member A2 by passing through two connecting holes A3 and locking the threaded locking member B1. In one embodiment, the locking threaded component B1 includes a clamping head B11 and a screw B12. The clamping head B11 is connected to one end of the screw B12. There is a gap between the connecting hole A3 of one of the fixing components A (such as the first fixing component A1) and the locking threaded component B1. This connecting hole A3 is referred to as the gap hole. The connecting hole A3 of the other fixing component A (such as the second fixing component A2) is threadedly connected to the locking threaded component B1. This connecting hole A3 is referred to as the threaded hole c4. The screw B12 passes through the two connecting holes A3 and is threadedly locked to the connecting hole A3 on the other fixing component A. The clamping head B11 is located outside the two fixing components A and is used to clamp the end of one of the fixing components A (such as the first fixing component A1) away from the other fixing component A (such as the second fixing component A2). The two fixing components A are locked by the cooperation of the clamping head B11 and the screw B12.

[0056] In another embodiment, the locking threaded component B1 includes a clamping head B11, a screw B12, and a clamping nut (not shown). The clamping head B11 is connected (either integrally or separately) to one end of the screw B12, and the clamping nut is threaded to the other end of the screw B12. The screw B12 passes through the connecting holes A3 of the two fixing components A, and there is a gap between all the connecting holes A3 and the screw B12 (i.e., both connecting holes A3 are gap holes). The clamping head B11 and the clamping nut respectively abut against the opposite ends of the two fixing components A. During the leveling process, the clamping nut can be loosened, allowing the two fixing components A to rotate relative to each other. After leveling, the clamping nut is tightened, and the clamping head B11 and the clamping nut are used to lock and fix the two fixing components A. In other embodiments, the locking threaded component B1 may also include two clamping nuts, which are threaded to both ends of the screw B12 respectively, for clamping the two fixing components A.

[0057] In practical applications, during the leveling process, the screw B12 of the locking threaded component B1 passes through the two connecting holes A3 and locks the two fixing components A. Because there is a gap between the screw B12 and the clearance hole, the gap allows for slight relative rotation of the two fixing components A during the adjustment of the flatness of the suction cup 20 by the leveling structure 41. At this time, by utilizing the gap between the locking threaded component B1 and one of the fixing components A, the locking component B allows for slight rotation of both fixing components A. The structure is simple and easy to implement.

[0058] It should be noted that when the first fixing member A1 and the mating member C are ball-jointed, the mating member C is provided with a gap hole for the locking threaded member B1 to pass through, and there is a gap between the locking threaded member B1 and the locking threaded member B1.

[0059] Of course, locking member B can also adopt other solutions to allow slight rotation of the first fixing member A1 and the second fixing member A2 in the locked state. For example, locking member B includes a first locking part fixedly connected to the first fixing member A1 and a second locking part fixedly connected to the second fixing member A2. The first locking part and the second locking part are locked together, and the first locking part is an elastic member 41d.

[0060] When locking member B includes the aforementioned locking threaded member B1, further in the embodiment, refer to... Figures 2 to 8 It is understood that both the fixing component 30 and the leveling component 40 also include a sealing ring D, and the locking threaded component B1 includes a protruding end extending from the fixing component A. The sealing ring D is fitted onto the protruding end and is confined between the locking threaded component B1 and the fixing component A.

[0061] Specifically, the protruding end includes the portion of screw B12 extending out of fixing member A and a clamping head B11 or clamping nut connecting this portion. If the protruding end includes clamping head B11, sealing ring D is fitted onto the portion of screw B12 extending out of fixing member A and is positioned between clamping head B11 and fixing member A. If the protruding end includes clamping nut, sealing ring D is fitted onto the portion of screw B12 extending out of fixing member A and is positioned between clamping nut and fixing member A. Both ends of the locking threaded member B1 can be protruding ends, or only one end can be a protruding end. If both ends are protruding ends, one protruding end can include clamping head B11 and the other protruding end can include clamping nut, or both protruding ends can include clamping nuts.

[0062] The sealing ring D is compressed between the locking threaded part B1 and the fixing part A. It can not only absorb the unevenness of the surfaces of the clamping head B11 and the clamping nut abutting against the fixing part A, but also be squeezed by the first fixing part A1 when the first fixing part A1 moves relative to the locking threaded part B1 in the first direction Z, allowing the first fixing part A1 to move. At the same time, the first fixing part A1 can also provide the clamping force to press the second fixing part A2, so that the first fixing part A1 and the second fixing part A2 are more tightly connected.

[0063] Understandably, the greater the compression of the sealing ring D, the greater the resistance to the movement of the first fixing member A1, making it difficult for the first fixing member A1 to deflect and requiring more effort for leveling. In practical applications, if the locking member B locks the first fixing member A1 and the second fixing member A2 before leveling, the compression of the sealing ring D can be adjusted appropriately to reduce the leveling effort and difficulty while locking the two fixing members A.

[0064] Specifically, in the embodiments, refer to Figure 3 , Figure 6 and Figure 8 Understandably, the sealing ring D includes a first washer D1 and a second washer D2 stacked along the first direction Z, with the first washer D1 and the second washer D2 spherically mating. Specifically, the first washer D1 may have a convex spherical surface, and the second washer D2 may have a concave spherical surface, with the convex and concave spherical surfaces engaging in a concave-convex fit along the first direction Z.

[0065] After tightening, the second washer D2 abuts against the first fixing member A1, and the first washer D1 abuts against the clamping head B11 or the clamping nut. During the leveling process, when the first fixing member A1 rotates slightly relative to the second fixing member A2, the second washer D2 follows the first fixing member A1 in rotating slightly under the action of friction. Since the second washer D2 and the first washer D1 are set to spherical mating, the first washer D1 allows the second washer D2 to rotate slightly with the first fixing member A1, reducing the resistance of the friction between the first washer D1 and the second washer D2 to the rotation of the first fixing member A1, making the rotation of the first fixing member A1 smoother.

[0066] In some embodiments, refer to Figure 3 , Figure 4 , Figure 6 and Figure 8 It is understood that both the fixing component 30 and the leveling component 40 further include a connecting member C, which is connected between the first fixing member A1 and the second fixing member A2 along the first direction Z, and is spherically hinged to the first fixing member A1. The connecting member C of the leveling component 40 is connected to the second fixing member A2 via the leveling structure 41, and the connecting member C of the fixing component 30 is directly connected to the second fixing member A2.

[0067] A spherical hinge is a ball joint. In this case, the connecting piece C is used to achieve an indirect ball joint between the first fixing piece A1 and the second fixing piece A2. The structure is simple and helps to reduce the cost of the stage 100.

[0068] Furthermore, the mating part C is hemispherically hinged to the first fixing part A1, and the mating parts are concave and convex along the first direction Z. For example, the mating part C has a hemispherical protrusion, and the first fixing part A1 has a groove that mates with the hemispherical surface. The hemispherical hinge between the mating part C and the first fixing part A1 not only simplifies the manufacturing process but also facilitates assembly.

[0069] Understandably, in other embodiments, the mating part C of the fixing component 30 may be integrally formed with its second fixing part A2.

[0070] In some embodiments, refer to Figure 3 and Figure 6 The leveling structure 41 includes a wedge 41a and an adjusting member 41b. The wedge 41a is movably disposed relative to the second fixing member A2 along an adjusting direction intersecting the first direction Z. The adjusting member 41b is connected to the wedge 41a and is used to control the movement of the wedge 41a along the adjusting direction. The leveling assembly 40 includes a mating member C that is spherically hinged to the first fixing member A1. The wedge 41a is inclinedly mated to the mating member C, and during movement, it can drive the first fixing member A1 to reciprocate along the first direction Z via the mating member C.

[0071] The adjustment direction is typically horizontal. The adjusting member 41b drives the wedge member 41a to reciprocate along the adjustment direction; the adjusting member 41b is not limited to a linear motor. The inclined surface on the wedge member 41a can be a straight inclined surface, which is simple in structure and easy to manufacture. Of course, the inclined surface can also be an arc-shaped inclined surface. Understandably, the inclined surface is set at different heights at both ends along the first direction Z in the adjustment direction.

[0072] At this point, the wedge-shaped member 41a with an inclined surface is used to drive the mating member C to move along the first direction Z, thereby realizing the lifting and lowering of the first fixing member A1. This not only simplifies the structure but also reduces costs. Simultaneously, it reduces the space occupied by the leveling assembly 40 in the first direction Z.

[0073] In the specific embodiments, please refer to... Figure 3 and Figure 6 The leveling structure 41 also includes a base 41c and an elastic element 41d. The base 41c is located between two fixing elements A and fixed to the second fixing element A2. The wedge-shaped element 41a and the adjusting element 41b are movably mounted on the base 41c along the adjusting direction. The elastic element 41d connects the base 41c and the wedge-shaped element 41a, and the elastic element 41d and the adjusting element 41b are arranged on opposite sides of the wedge-shaped element 41a.

[0074] The elastic element 41d can be, but is not limited to, a spring. The base 41c can be fixed to the second fixing element A2 by screws, rivets, etc. The base 41c can be provided with a clearance hole or other clearance structure to avoid the mating element C. The mating element C passes through the clearance structure and engages with the wedge 41a and the inclined surface of the mating element C. Similarly, the clearance structure is used to limit the movement of the mating element C, allowing the mating element C to move only in the first direction Z.

[0075] In practical applications, adjusting the adjusting member 41b causes the wedge-shaped member 41a to move along the adjusting direction, thereby driving the mating member C to raise and lower the first fixing member A1 to adjust the flatness of the suction cup 20. The elastic member 41d exerts an elastic force on the wedge-shaped member 41a against the force of the adjusting member 41b. Under the two opposing reaction forces, when the adjusting member 41b does not move, the wedge-shaped member 41a can also remain in place to fix the position of the first fixing member A1 in the first direction Z.

[0076] The elastic element 41d can be fixedly connected to the base 41c and the wedge-shaped element 41a by welding, bonding or other means.

[0077] In a preferred embodiment, a mounting hole c2 is provided on the base 41c, a limiting hole a1 is provided on the wedge-shaped member 41a, and one end of the elastic member 41d is inserted into the mounting hole c2, while the other end is inserted into the limiting hole a1. The mounting hole c2 and the limiting hole a1 limit the position of the elastic member 41d, making it easy to install the elastic member 41d.

[0078] Further in the embodiments, refer to Figures 2 to 6 It is understood that the adjusting member 41b includes an adjusting threaded member b1 and a locking nut b2. The adjusting threaded member b1 is threadedly engaged with the base 41c and abuts against the wedge-shaped member 41a. The locking nut b2 is threadedly installed on the adjusting threaded member b1 and is located outside the base 41c.

[0079] Specifically, the adjusting threaded component b1 has an external thread, and the base 41c has a threaded hole c4 that matches the external thread. The adjusting threaded component b1 is rotatably mounted in the threaded hole c4, with one end abutting against the wedge-shaped component 41a. Since the adjusting threaded component b1 needs to rotate to drive the wedge-shaped component 41a to move, the wedge-shaped component 41a abuts against the adjusting threaded component b1, simplifying the connection between the two. When the adjusting threaded component b1 moves away from the elastic element 41d, under the action of the elastic element 41d, the wedge-shaped component 41a can follow the adjusting threaded component b1 and remain abutting against it.

[0080] The locking nut b2 is threaded onto the portion of the adjusting threaded component b1 located outside the base 41c, and is used to lock the adjusting threaded component b1. Considering machining accuracy and cost, the adjusting threaded component b1 and the threaded hole c4 on the base 41c are often clearance fits. During long-term operation, the adjusting threaded component b1 is prone to loosening under the push of the elastic element 41d. The locking nut b2 is configured to resist the force of the elastic element 41d and prevent the adjusting threaded component b1 from loosening.

[0081] In one specific embodiment, combined with Figure 4 It is understood that a guide portion c1 is provided inside the base 41c, and the wedge-shaped member 41a is movable along the guide portion c1.

[0082] Understandably, the wedge-shaped member 41a is provided with a mating part a3, which mates with the guide part c1. For example, the guide part c1 is a guide groove, and the mating part a3 is a mating protrusion. The mating protrusion inserts into the guide groove and moves along the guide groove in the adjustment direction. In this case, the guide part c1 can limit the movement direction of the wedge-shaped member 41a and enable the wedge-shaped member 41a to be positioned and installed on the base 41c.

[0083] In one specific embodiment, combined with Figure 3 , Figure 4 and Figure 6 Understandably, the base 41c has a receiving cavity c3, the wedge-shaped member 41a and the elastic member 41d are located in the receiving cavity c3, the receiving cavity c3 has a clearance hole, and the mating member C passes through the clearance hole and engages with the inclined surface of the wedge-shaped member 41a.

[0084] To facilitate the installation of the wedge-shaped member 41a, the base 41c optionally includes a first base c5, a second base c6, and an intermediate base c7. The first base c5 and the second base c6 are detachably mounted on both sides of the intermediate base c7 in the adjustment direction, and the three together form a receiving cavity c3. A guide portion c1 and a clearance hole are provided on the intermediate base c7, an adjusting member 41b is mounted on the first base c5, and an elastic member 41d is mounted on the second base c6.

[0085] The clearance hole and the mating part C can be fitted with a clearance. After the mating part C passes through the clearance hole, it mates with the inclined surface of the wedge-shaped part 41a. The clearance hole can not only position the mating part C, but also guide the mating part C to move along the first direction Z.

[0086] In some embodiments, refer to Figure 3 and Figure 6 It is understood that the wedge-shaped member 41a is provided with a strip hole a2, which extends along the adjustment direction. The locking member B passes through the first fixing member A1, the mating member C, and the strip hole a2 in sequence and is locked onto the second fixing member A2.

[0087] The strip hole a2 passes through the wedge 41a along the first direction Z, and the locking threaded part B1 passes through the strip. When the wedge 41a moves along the adjustment direction, the strip hole a2 ensures that the locking threaded part B1 will not interfere with the movement of the wedge 41a.

[0088] In one specific embodiment of this application, combined with Figures 1 to 8 The stage 100 includes a fixing component 30 and two leveling components 40. These three components are arranged in a triangular pattern around one side of the suction cup 20. Both the fixing component 30 and the leveling component 40 include a first fixing member A1, a second fixing member A2, a locking member B, and a mating member C. The first fixing member A1 is fixedly connected to the suction cup 20, and the second fixing member A2 is fixedly connected to the base 10. The leveling component 40 also includes a leveling structure 41. The mating member C is spherically hinged to the first fixing member A1, and the mating member C of the fixing component 30 is fixedly connected to the second fixing member A2. The mating member C of the leveling component 40 is connected to the second fixing member A2 through the leveling structure 41. The locking member B includes a locking threaded member B1. The first fixing member A1 and the mating member C both have gap holes, and the second fixing member A2 has a threaded hole c4. The locking threaded member B1 passes through the gap holes on the first fixing member A1 and the mating member C and is threadedly connected to the threaded hole c4. The leveling structure 41 includes a base 41c, a wedge 41a, and an adjusting member 41b. A slotted hole a2 is provided on the wedge 41a, and a locking threaded member B1 passes through the slotted hole a2. A mating member C mates with the inclined surface of the wedge 41a. The wedge 41a and the adjusting member 41b are disposed on the base 41c. The adjusting member 41b includes an adjusting threaded member b1 disposed on the base 41c. The adjusting threaded member b1 pushes the wedge 41a to move along an adjusting direction perpendicular to the first direction Z. An elastic member 41d is provided on the base 41c, and the elastic member 41d is connected to the side of the wedge 41a opposite to the adjusting threaded member b1.

[0089] In addition, this application also provides a leveling assembly 40, including a locking member B and a first fixing member A1, a mating member C, a leveling structure 41 and a second fixing member A2 connected sequentially along a first direction Z. The mating member C is spherically hinged to the first fixing member A1. The leveling structure 41 is configured to drive the fitting part to reciprocate along the first direction Z to change the distance between the first fixing member A1 and the second fixing member A2 in the first direction Z. The locking member B is used to lock the connection between the first fixing member A1 and the second fixing member A2.

[0090] Understandably, the first fixing member A1 and the second fixing member A2 are used to fix them to different external structures. In a specific application, the leveling assembly 40 is applied to the stage 100, the first fixing member A1 is used to fix it to the suction cup 20, and the second fixing member A2 is used to fix it to the base 10. Of course, the leveling assembly 40 can also be used for leveling other platforms.

[0091] For detailed descriptions of the leveling assembly 40, locking member B, first fixing member A1, mating member C, leveling structure 41, and second fixing member A2, please refer to the above description; they will not be repeated here. In further embodiments, the leveling assembly 40 may include the solutions described in the above embodiments, which will also not be repeated here.

[0092] When adjusting the flatness of the platform using this leveling component 40, the operation is not only simple, but the leveling efficiency is also high.

[0093] In addition, this application embodiment also provides a testing device, including the wafer stage 100 in the above embodiments. Specifically, the testing device may be a test sorter, a wafer test probe station, or an optical inspection device. The wafer stage 100 is used to carry wafers, chips, and other test pieces.

[0094] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0095] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are specific and detailed, they should not be construed as limiting the scope of this patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. A slide stage (100), characterized in that, include: Base (10); A suction cup (20) is arranged on one side of the base (10) in the first direction (Z); The fixing component (30) and the leveling component (40) are distributed circumferentially along the suction cup (20), and each includes two fixing parts (A) and a locking part (B). The two fixing parts (A) are directly or indirectly universally connected, and the locking part (B) is used to lock the connection between the two fixing parts (A). The two fixing parts (A) include a first fixing part (A1) fixed to the suction cup (20) and a second fixing part (A2) fixed to the base (10). The leveling assembly (40) further includes a leveling structure (41) sandwiched between the two fixing members (A) along the first direction (Z), the leveling structure (41) being capable of driving the first fixing member (A1) to reciprocate along the first direction (Z).

2. The stage (100) according to claim 1, characterized in that, Both of the fixing members (A) are provided with connecting holes (A3), and the locking member (B) includes a locking threaded member (B1). The locking threaded member (B1) passes through the connecting holes (A3) of the two fixing members (A) and locks the two together. There is a gap between at least one of the connecting holes (A3) and the locking thread (B1).

3. The stage (100) according to claim 2, characterized in that, Both the fixing component (30) and the leveling component (40) further include a sealing ring (D), and the locking threaded component (B1) includes an extended end that extends out of the fixing component (A); the sealing ring (D) is sleeved on the extended end and is located between the locking threaded component (B1) and the fixing component (A); The sealing ring (D) consists of a first washer (D1) and a second washer (D2) stacked along the first direction (Z), with the first washer (D1) and the second washer (D2) spherically mated.

4. The stage (100) according to claim 1, characterized in that, Both the fixing component (30) and the leveling component (40) further include a connector (C), which is connected between the first fixing component (A1) and the second fixing component (A2) along the first direction (Z) and is spherically hinged to the first fixing component (A1); The leveling component (40) has its connector (C) connected to the second fixing member (A2) via the leveling structure (41), and the fixing component (30) has its connector (C) directly connected to the second fixing member (A2).

5. The stage (100) according to claim 1, characterized in that, The leveling structure (41) includes a wedge (41a) and an adjusting member (41b). The wedge (41a) is movably disposed relative to the second fixing member (A2) along an adjusting direction intersecting the first direction (Z). The adjusting member (41b) is connected to the wedge (41a) and is used to control the wedge (41a) to move along the adjusting direction. The leveling assembly (40) includes a fitting (C) that is spherically hinged to the first fixing member (A1). The wedge (41a) is fitted with the inclined surface of the fitting (C) and can drive the first fixing member (A1) to reciprocate along the first direction (Z) via the fitting (C) when moving.

6. The stage (100) according to claim 5, characterized in that, The leveling structure (41) further includes a base (41c) and an elastic element (41d). The base (41c) is located between the two fixing elements (A) and fixed to the second fixing element (A2). The wedge-shaped element (41a) and the adjusting element (41b) are both movably installed on the base (41c) along the adjusting direction. The elastic element (41d) is connected between the base (41c) and the wedge (41a), and the elastic element (41d) and the adjusting element (41b) are arranged on opposite sides of the wedge (41a).

7. The stage (100) according to claim 6, characterized in that, The adjusting member (41b) includes an adjusting threaded member (b1) and a locking nut (b2). The adjusting threaded member (b1) is threadedly engaged with the base (41c) and abuts against the wedge-shaped member (41a). The locking nut (b2) is threadedly installed on the adjusting threaded member (b1) and is located outside the base (41c); and / or, The base (41c) is provided with a guide portion (c1), and the wedge-shaped member (41a) is movably disposed along the guide portion (c1); and / or, The base (41c) is provided with a mounting hole (c2), the wedge (41a) is provided with a limiting hole (a1), one end of the elastic member (41d) is inserted into the mounting hole (c2), and the other end is inserted into the limiting hole (a1).

8. The stage (100) according to claim 6, characterized in that, The base (41c) forms a receiving cavity (c3), the wedge-shaped member (41a) and the elastic member (41d) are located in the receiving cavity (c3), the receiving cavity (c3) has a clearance hole, and the mating member (C) passes through the clearance hole and engages with the inclined surface of the wedge-shaped member (41a); and / or, The wedge-shaped member (41a) has a strip hole (a2) extending along the adjustment direction. The locking member (B) passes through the first fixing member (A1), the mating member (C), and the strip hole (a2) in sequence and is locked onto the second fixing member (A2).

9. A leveling component (40), characterized in that, The device includes a locking member (B) and a first fixing member (A1), a mating member (C), a leveling structure (41), and a second fixing member (A2) connected sequentially along a first direction (Z). The mating member (C) is spherically hinged to the first fixing member (A1). The leveling structure (41) is configured to drive the mating member (C) to reciprocate along the first direction (Z) to change the distance between the first fixing member (A1) and the second fixing member (A2) in the first direction (Z). The locking member (B) is used to lock the connection between the first fixing member (A1) and the second fixing member (A2).

10. A testing device, characterized in that, Includes the stage (100) as described in any one of claims 1 to 8.

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