Test device and semiconductor production apparatus

Abstract

This invention provides a testing device and semiconductor manufacturing equipment. The testing device includes an indicator and a switch assembly. The indicator is used to indicate whether a pneumatic valve is open or closed. The switch assembly is electrically connected to a power source and the indicator. One side of the switch assembly is in contact with or has a gap with the nozzle of the pneumatic valve. When the pneumatic valve is activated, the nozzle expands to press the switch assembly, which then connects the power source and the indicator. This application provides a testing device on the pneumatic valve. By placing the switch assembly in contact with or with a gap between the switch assembly and the nozzle, the expansion of the nozzle connects the switch assembly, which in turn connects the power source and the indicator. The test result is obtained through the indication from the indicator. The testing device has a simple structure and can automatically test the opening and closing of the pneumatic valve, thereby improving testing accuracy and convenience. Furthermore, it eliminates the need to disconnect the pneumatic valve's air hose, thus avoiding damage to the air hose or the pneumatic valve.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing, and in particular to a testing device and semiconductor manufacturing equipment. Background Technology

[0002] In the water and gas supply systems of semiconductor manufacturing, pneumatic valves, as core components of fluid control, directly affect process accuracy and equipment safety due to the stability of their switching performance. During the machine testing phase, two key functions need to be verified: whether the pneumatic valve can open normally according to instructions, and whether it can close immediately when interlocking conditions are triggered. These two indicators are fundamental to ensuring the accuracy of fluid transmission and equipment protection in emergency situations.

[0003] Current industry-standard testing methods have significant limitations: during testing, the pneumatic valve's air hose must be manually disconnected, a switch command is sent via a host computer, and the operator relies on their tactile sense to determine if there is airflow within the air hose, thus judging the valve's operational status. This method, dependent on manual perception, is not only inaccurate but also susceptible to subjective judgment, making it difficult to quantitatively assess the pneumatic valve's response speed and airtightness.

[0004] A more significant problem is that the compact internal structure of semiconductor equipment, with pneumatic valves often installed in confined spaces filled with dense piping, makes inserting and removing air tubes extremely difficult. Frequent manual insertion and removal not only increases testing time but can also damage air tube interfaces or pneumatic valve bodies due to improper operation, leading to additional equipment malfunctions. Furthermore, this process requires interrupting normal system operation, extending the machine debugging cycle and indirectly affecting the capacity and efficiency of semiconductor manufacturing. Utility Model Content

[0005] The present invention provides a testing device and semiconductor manufacturing equipment that enables automated testing of the opening and closing of pneumatic valves, improves testing accuracy and convenience, and avoids damage to air pipes or pneumatic valves.

[0006] This utility model provides a testing device, which includes:

[0007] Indicator, used to indicate whether the pneumatic valve is open or closed;

[0008] A switch assembly, which is electrically connected to a power source and an indicator, wherein one side of the switch assembly abuts against or is spaced apart from the air nozzle of a pneumatic valve.

[0009] Specifically, when the pneumatic valve is opened, the air nozzle expands to press the switch assembly, and the switch assembly connects the power supply and the indicator.

[0010] In the testing device provided by this utility model, the switch assembly includes a tactile switch, which is electrically connected to the power supply and the indicator. One end of the tactile switch is in contact with the air nozzle or is spaced apart from the air nozzle.

[0011] In the testing device provided by this utility model, the switch assembly includes a tactile switch and an adapter. The tactile switch is electrically connected to the power supply and the indicator. One end of the adapter is connected to the tactile switch, and the other end is in contact with the air nozzle or is spaced apart from the air nozzle.

[0012] In the testing device provided by this utility model, the adapter includes a first horizontal section, a second horizontal section and a vertical section. One end of the first horizontal section and the second horizontal section are respectively fixedly connected to both ends of the vertical section. One side of the first horizontal section is connected to the tactile switch, and one side of the second horizontal section abuts against the air nozzle or is spaced apart from the air nozzle.

[0013] In the testing device provided by this utility model, the adapter is made of metal or plastic.

[0014] In the testing device provided by this utility model, the adapter is made of sheet metal.

[0015] In the testing device provided by this utility model, the switch assembly further includes a circuit board, and the tactile switch and the indicator are electrically connected to both sides of the circuit board respectively.

[0016] In the testing device provided by this utility model, the power supply is mounted on the circuit board and electrically connected to the circuit board.

[0017] In the testing device provided by this utility model, the indicator is an indicator light.

[0018] This utility model also provides a semiconductor manufacturing apparatus, which includes:

[0019] The testing device is any of the testing devices described above.

[0020] This application provides a testing device on the pneumatic valve, wherein the switching assembly is either in contact with or has a gap between it and the air nozzle of the pneumatic valve. The expansion of the air nozzle connects the switching assembly, thereby connecting the power supply and the indicator. The test result is obtained through the indication of the indicator. The testing device has a simple structure and can automatically test the opening and closing of the pneumatic valve, thereby improving the testing accuracy and convenience. Furthermore, it eliminates the need to disconnect the air pipe of the pneumatic valve, thus avoiding damage to the air pipe or the pneumatic valve. Attached Figure Description

[0021] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0022] Figure 1 This is a structural diagram of the testing device in an embodiment of the present invention;

[0023] Figures 2a to 2c This is a structural diagram of the testing device from various perspectives in another embodiment of the present invention;

[0024] Figure 3 This is an exploded view of the testing device in an embodiment of the present invention;

[0025] Figure 4 This is an assembly diagram of the testing device and the pneumatic valve in an embodiment of this utility model;

[0026] Figure 5 An assembly diagram of the testing device and the pneumatic valve in another embodiment of this utility model.

[0027] The labels for the attached figures are as follows:

[0028] 1. Testing device; 11. Indicator; 12. Switch assembly; 121. Tactile switch; 122. Adapter; 1221. First horizontal section; 1222. Second horizontal section; 1223. Vertical section; 123. Circuit board; 13. Power supply; 2. Pneumatic valve; 21. Air nozzle. Detailed Implementation

[0029] It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other. The preferred embodiments of this utility model will now be described in detail with reference to the accompanying drawings.

[0030] Reference Figures 1 to 5 The diagram illustrates an embodiment of the testing device 1 and semiconductor manufacturing equipment of this invention. The testing device 1 includes an indicator 11 and a switch assembly 12. The indicator 11 is used to indicate whether a pneumatic valve 2 is open or closed. The switch assembly 12 is electrically connected to a power supply 13 and the indicator 11. One side of the switch assembly 12 abuts against or is spaced apart from the air nozzle 21 of the pneumatic valve 2. When the pneumatic valve 2 is activated, the air nozzle 21 expands to press the switch assembly 12, and the switch assembly 12 connects the power supply 13 and the indicator 11.

[0031] Specifically, pneumatic valve 2 is an automated control valve powered by compressed air. Through a pneumatic actuator, it drives the valve core to precisely control the on / off state, flow rate, pressure, or direction of fluids (gas, liquid, slurry). In the semiconductor manufacturing industry, pneumatic valve 2 is a crucial structural component of semiconductor manufacturing equipment. Particularly in the water or gas supply systems of semiconductor manufacturing equipment, pneumatic valve 2 can precisely control the delivery of ultrapure gases / chemicals, achieving millisecond-level opening / closing and flow regulation in a high-cleanliness environment, thereby ensuring process stability and zero contamination. For example, in water supply systems, pneumatic valve 2 can control the flow of water, determining whether water is allowed to pass through. Therefore, before using the equipment, it is essential to test whether pneumatic valve 2 can open normally and whether it can close normally when interlocking conditions are triggered.

[0032] Based on this, this application provides a testing device 1, which is used in the testing phase of the equipment to test whether the pneumatic valve 2 can be opened normally and whether the pneumatic valve 2 can be closed normally when the interlock condition is triggered. The testing process does not require disconnecting the air pipe of the pneumatic valve 2 to avoid damaging the air pipe or the pneumatic valve 2; and the testing process is automated, which can improve the testing accuracy and convenience.

[0033] The testing device 1 includes an indicator 11 and a switch assembly 12. The indicator 11 is used to indicate whether the pneumatic valve 2 is open or closed. That is, when the pneumatic valve 2 is open or closed, the indicator 11 can directly indicate the status of the pneumatic valve 2 to the user. The status refers to the open or closed state of the pneumatic valve 2. The indicator 11 has different indication effects in different states of the pneumatic valve 2, so that the user can directly obtain the current status of the pneumatic valve 2. The indicator 11 can be any structural component with indication function, such as an indicator light, status light, display screen, display, buzzer, speaker, vibration motor, etc., and is not limited here.

[0034] The switch assembly 12 is used to connect or disconnect the power supply 13 and the indicator 11, so that the indicator 11 can have different behaviors in different states of the pneumatic valve 2; the switch assembly 12 is electrically connected to the power supply 13 and the indicator 11, and the power supply 13 is used to provide power to the indicator 11; one side of the switch assembly 12 abuts against the air nozzle 21 of the pneumatic valve 2, or one side of the switch assembly 12 is spaced apart from the air nozzle 21, that is, the switch assembly 12 can abut against the air nozzle 21 or not abut against the air nozzle 21, as long as it can be pressed when the air nozzle 21 is expanded, thereby determining the connected or disconnected state of the switch assembly 12.

[0035] During the test to determine if the pneumatic valve 2 can open normally, the pneumatic valve 2 is opened. At this time, the air nozzle 21 of the pneumatic valve 2 expands, and the expanded air nozzle 21 can press the switch assembly 12. The switch assembly 12 is then in a connected state, connecting the power supply 13 and the indicator 11. This causes the indicator 11 to display a message indicating that the pneumatic valve 2 is open, allowing the user to directly receive a notification that the pneumatic valve 2 can be opened normally. If the indicator 11 does not change after the pneumatic valve 2 is opened, it indicates that the pneumatic valve 2 is malfunctioning.

[0036] When testing whether the pneumatic valve 2 can close normally, the pneumatic valve 2 is closed. At this time, the air nozzle 21 of the pneumatic valve 2 retracts. After the air nozzle 21 retracts, it does not press the switch assembly 12. At this time, the switch assembly 12 is in the open state, thereby disconnecting the power supply 13 and the indicator 11. This causes the indicator 11 to display a prompt that the pneumatic valve 2 is in the closed state, so that the user can directly obtain a prompt that the pneumatic valve 2 can close normally. If the indicator 11 does not change after the pneumatic valve 2 is closed, it indicates that the pneumatic valve 2 is abnormal.

[0037] Therefore, this application provides a test device 1 on the pneumatic valve 2, with the switch assembly 12 abutting against or having a gap between it and the air nozzle 21 of the pneumatic valve 2. The expansion of the air nozzle 21 connects the switch assembly 12, thereby connecting the power supply 13 and the indicator 11. The test result is obtained through the indication of the indicator 11. The test device 1 has a simple structure and can automatically test the opening and closing of the pneumatic valve 2, thereby improving the test accuracy and convenience. Furthermore, it eliminates the need to disconnect the air pipe of the pneumatic valve 2, thus avoiding damage to the air pipe or the pneumatic valve 2.

[0038] In one embodiment, reference is made to Figure 1 , Figure 2a , Figures 2c to 5 As shown, the switch assembly 12 includes a tactile switch 121, which is electrically connected to the power supply 13 and the indicator 11. One end of the tactile switch 121 abuts against or is spaced apart from the air nozzle 21. Specifically, the switch assembly 12 includes a tactile switch 121, which is used to connect or disconnect the electrical connection between the power supply 13 and the indicator 11. One end of the tactile switch 121 extends toward the air nozzle 21, and either abuts against or is spaced apart from the air nozzle 21.

[0039] When testing whether the pneumatic valve 2 can open normally, the pneumatic valve 2 is opened. At this time, the air nozzle 21 of the pneumatic valve 2 expands, and the expanded air nozzle 21 can press the tactile switch 121. At this time, the tactile switch 121 is in the connected state, thereby connecting the power supply 13 and the indicator 11, so that the indicator 11 displays a prompt that the pneumatic valve 2 is in the open state, so that the user can directly obtain a prompt that the pneumatic valve 2 can be opened normally. If the indicator 11 does not change after the pneumatic valve 2 is opened, it indicates that the pneumatic valve 2 is abnormal.

[0040] When testing whether the pneumatic valve 2 can close normally, the pneumatic valve 2 is closed. At this time, the air nozzle 21 of the pneumatic valve 2 retracts. After the air nozzle 21 retracts, it does not press the tactile switch 121. At this time, the tactile switch 121 is in the open state, thereby disconnecting the power supply 13 and the indicator 11. This causes the indicator 11 to display a prompt that the pneumatic valve 2 is in the closed state, so that the user can directly obtain a prompt that the pneumatic valve 2 can close normally. If the indicator 11 does not change after the pneumatic valve 2 is closed, it indicates that the pneumatic valve 2 is abnormal.

[0041] Therefore, in this embodiment, by setting the tactile switch 121 to connect or disconnect the electrical connection between the power supply 13 and the indicator 11, the tactile switch 121 is a momentary action, non-locking / non-holding push-button switch with advantages such as small size, long life, low cost, easy installation, and high sensitivity. Thus, during the test, the tactile switch 121 can keenly detect the change of the air nozzle 21 of the pneumatic valve 2, thereby enabling the indicator 11 to obtain the opening and closing state of the pneumatic valve 2 more accurately, thereby improving the test accuracy and reducing the cost.

[0042] In a specific embodiment, refer to Figure 2a , Figure 2c , Figure 3 , Figure 5As shown, the switch assembly 12 includes a tactile switch 121 and an adapter 122. The tactile switch 121 is electrically connected to the power supply 13 and the indicator 11. One end of the adapter 122 is connected to the tactile switch 121, and the other end is in contact with or spaced from the air nozzle 21. Specifically, the switch assembly 12 includes a tactile switch 121 and an adapter 122. The tactile switch 121 is electrically connected to the power supply 13 and the indicator 11, and is used to connect or disconnect the electrical connection between the power supply 13 and the indicator 11. The adapter 122 is used to indirectly connect the tactile switch 121 and the air nozzle 21. One end of the adapter 122 is connected to the tactile switch 121, and the other end of the adapter 122 abuts against the air nozzle 21, or the other end of the adapter 122 is spaced apart from the air nozzle 21. This allows the tactile switch 121, the power supply 13, and the indicator 11 to be placed further away from the air nozzle 21 in more confined spaces where it is inconvenient to place the test device 1, such as in a place with a large external space for the pneumatic valve 2, or in the external space of the equipment, thereby ensuring the use of the test device 1.

[0043] In this embodiment, the adapter 122 ensures that when the air nozzle 21 expands, the air nozzle 21 applies a force to the adapter 122, thereby driving the adapter 122. The adapter 122 then applies a force to the tactile switch 121 to press the tactile switch 121, thereby connecting the power supply 13 and the indicator 11. This improves the practicality of the testing device 1, making it suitable for testing pneumatic valves 2 in various spaces.

[0044] In one embodiment, reference is made to Figure 3 , Figure 5As shown, the adapter 122 includes a first horizontal section 1221, a second horizontal section 1222, and a vertical section 1223. One end of the first horizontal section 1221 and the second horizontal section 1222 are respectively fixedly connected to both ends of the vertical section 1223. One side of the first horizontal section 1221 is connected to the tactile switch 121, and one side of the second horizontal section 1222 abuts against the air nozzle 21 or is spaced apart from the air nozzle 21. Specifically, the adapter 122 includes a first horizontal segment 1221, a second horizontal segment 1222, and a vertical segment 1223. One end of the first horizontal segment 1221 and the second horizontal segment 1222 are respectively fixedly connected to both ends of the vertical segment 1223, that is, the first horizontal segment 1221 and the second horizontal segment 1222 are arranged parallel to each other on both sides of the vertical segment 1223. The adapter 122 has a "U" shaped structure. One side of the first horizontal segment 1221 is connected to the tactile switch 121, and one side of the second horizontal segment 1222 abuts against the air nozzle 21. Alternatively, one side of the second horizontal segment 1222 may be spaced apart from the air nozzle 21. Therefore, when the air nozzle 21 expands, it applies a force to the second horizontal segment 1222 towards the first horizontal segment 1221. The second horizontal segment 1222, through the vertical segment 1223, applies a force to the first horizontal segment 1221 towards the tactile switch 121, causing the first horizontal segment 1221 to press the tactile switch 121. This connects the tactile switch 121 to the power supply 13 and the indicator 11, thereby detecting whether the pneumatic valve 2 is open. Therefore, the adapter 122 in this embodiment has a simple structure and high structural stability.

[0045] More specifically, the testing device 1 is mounted above the air nozzle 21, the second horizontal segment 1222 is horizontally positioned above the air nozzle 21, the tactile switch 121 is horizontally positioned above the first horizontal segment 1221, and the vertical segment 1223 is perpendicular to both the first horizontal segment 1221 and the second horizontal segment 1222. This allows the air nozzle 21 to exert an upward force on the second horizontal segment 1222 when it expands, thereby causing the first horizontal segment 1221 to move upward and press the tactile switch 121. The testing device 1 has high structural stability, ensuring the successful pressing of the tactile switch 121 by the adapter 122.

[0046] In one embodiment, the adapter 122 is made of metal or plastic (not shown in the figure). Specifically, the adapter 122 is mainly used to receive the force applied by the air nozzle 21 to press the tactile switch 121, therefore the adapter 122 needs to have a certain mechanical strength. In this embodiment, the adapter 122 can be made of metal or plastic. Metal has the advantages of high mechanical strength, excellent temperature resistance, and long service life, while plastic has a certain mechanical strength and the advantages of low weight, low cost, and high design freedom. Therefore, the adapter 122 in this embodiment can be made of metal or plastic, and the user can choose according to the actual use situation, which is not limited here.

[0047] In a specific embodiment, the adapter 122 is made of sheet metal (not shown in the figure). Specifically, sheet metal is selected as the material for the adapter 122 in this embodiment. First, sheet metal itself has high structural strength and rigidity, and can maintain a stable shape during long-term and frequent pressing operations, making it less prone to deformation or damage. This ensures that the pressing action of the tactile switch 121 is accurate and reliable, avoiding trigger failure caused by deformation of the adapter 122.

[0048] Meanwhile, the sheet metal material has good fatigue resistance and can maintain its original mechanical properties after repeated pressing, which extends the service life of the adapter 122 and reduces maintenance costs caused by component wear.

[0049] In addition, the sheet metal material has a mature processing technology and can be efficiently formed by stamping and other methods, which can accurately meet the size requirements of the adapter 122, ensure the matching accuracy with the tactile switch 121 and the air nozzle 21, and further improve the reliability of the tactile switch 121 triggering.

[0050] In one embodiment, reference is made to Figures 1 to 5 As shown, the switch assembly 12 further includes a circuit board 123, on which the tactile switch 121 and the indicator 11 are fixedly mounted, and the circuit board 123 is electrically connected to the tactile switch 121 and the indicator 11. Specifically, the switch assembly 12 further includes a circuit board 123, which is used to electrically connect the tactile switch 121 and the indicator 11. The tactile switch 121 and the indicator 11 are both fixedly mounted on the circuit board 123, so that the circuit board 123 is electrically connected to the tactile switch 121 and the indicator 11, so that the tactile switch 121, the indicator 11 and the circuit board 123 form a circuit to ensure that the indicator 11 is turned on or off.

[0051] In this embodiment, both the tactile switch 121 and the indicator 11 are mounted on the circuit board 123, which makes the test device 1 highly integrated, reduces the space occupied by the test device 1, and the electrical connection method of the tactile switch 121 and the indicator 11 is simple, easy to install, low in cost, and has a stable structure.

[0052] In a specific embodiment, refer to Figures 1 to 2b , Figure 4 and Figure 5 As shown, the power supply 13 is mounted on and electrically connected to the circuit board 123. Specifically, mounting the power supply 13 on the circuit board 123 and electrically connecting it to the circuit board 123 creates a current path between the power supply 13, the circuit board 123, the tactile switch 121, and the indicator 11, enabling the power supply 13 to power the indicator light. This further improves the integration and structural stability of the testing device 1 and reduces its footprint.

[0053] More specifically, the power supply 13 uses a button battery, which is installed on the circuit board 123 to power the indicator 11. It is low in cost, occupies little space, and is easy to install.

[0054] In one embodiment, the indicator 11 is an indicator light (not shown in the figure). Specifically, in this embodiment, an indicator light is used as the indicator 11. The state of the pneumatic valve 2 is indicated by the illumination and extinguishing of the indicator light. If the indicator light is on, it indicates that the pneumatic valve 2 is in the open state; if the indicator light is off, it indicates that the pneumatic valve 2 is in the closed state. The method of displaying the state of the pneumatic valve 2 by means of an indicator light is simple and intuitive, and users can more directly understand whether the pneumatic valve 2 can start and close normally. At the same time, the indicator light is inexpensive, which reduces the production cost of the testing device 1. Furthermore, the indicator light has a compact structure, which can further reduce the space occupied by the testing device 1. Moreover, the electrical connection between the indicator light and the tactile switch 121 and the circuit board 123 is simple.

[0055] Reference Figures 4 to 5 As shown, this embodiment also provides a semiconductor manufacturing equipment, which includes a testing device 1. The testing device 1 can be any type of testing device 1 provided by this utility model. Since the specific structure and working principle of the testing device 1 have been described in detail in the previous description, they will not be repeated here for the sake of brevity.

[0056] The semiconductor manufacturing equipment in this embodiment adopts the testing device 1 provided by this utility model. The testing device 1 has a simple structure and can automatically test whether the pneumatic valve 2 can be opened and closed normally, thereby improving the testing accuracy and convenience of the semiconductor manufacturing equipment during the testing process and improving the testing efficiency of the semiconductor manufacturing equipment; it can also effectively avoid damaging the air pipe of the pneumatic valve 2 or the body of the pneumatic valve 2, thereby improving the service life of the semiconductor manufacturing equipment.

[0057] The above description is merely a specific embodiment of this utility model, but the protection scope of this utility model is not limited thereto. Any person skilled in the art can easily conceive of various equivalent modifications or substitutions within the technical scope disclosed in this utility model, and these modifications or substitutions should all be covered within the protection scope of this utility model. Therefore, the protection scope of this utility model should be determined by the scope of the claims.

Claims

1. A test device, characterized by include: Indicator, used to indicate whether the pneumatic valve is open or closed; A switch assembly, which is electrically connected to a power source and an indicator, wherein one side of the switch assembly abuts against or is spaced apart from the air nozzle of a pneumatic valve. Specifically, when the pneumatic valve is opened, the air nozzle expands to press the switch assembly, and the switch assembly connects the power supply and the indicator.

2. The test device of claim 1, wherein, The switch assembly includes a tactile switch, which is electrically connected to the power supply and the indicator. One end of the tactile switch is in contact with or has a gap from the air nozzle.

3. The test device of claim 1, wherein, The switch assembly includes a tactile switch and an adapter. The tactile switch is electrically connected to the power supply and the indicator. One end of the adapter is connected to the tactile switch, and the other end is either in contact with the air nozzle or spaced apart from the air nozzle.

4. The test device of claim 3, wherein, The adapter includes a first horizontal section, a second horizontal section, and a vertical section. One end of the first horizontal section and the second horizontal section are fixedly connected to both ends of the vertical section, respectively. One side of the first horizontal section is connected to the tactile switch, and one side of the second horizontal section abuts against the air nozzle or is spaced apart from the air nozzle.

5. The test device of claim 3, wherein, The adapter is made of metal or plastic.

6. The test device of claim 3, wherein, The adapter is made of sheet metal.

7. The test device according to any one of claims 2 to 6, wherein, The switch assembly also includes a circuit board, and the tactile switch and the indicator are electrically connected to both sides of the circuit board, respectively.

8. The test device of claim 7, wherein, The power supply is mounted on the circuit board and is electrically connected to the circuit board.

9. The test device of claim 1, wherein, The indicator is an indicator light.

10. A semiconductor production apparatus characterized by comprising: include: The testing device is the testing device according to any one of claims 1-9.

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