Bonding wedge

Abstract

This application discloses a bonding wedge, comprising a body having a through hole extending through the body along its axis, the head of the body having an end face intersecting the inner circumferential surface of the through hole, the end face including a central annular region concentrically disposed with the through hole, the radially inner side of the central annular region intersecting the inner circumferential surface of the through hole; wherein, a plurality of inner circumferential protrusions are uniformly formed circumferentially within the central annular region, the inner circumferential protrusions extending to the radially inner side of the central annular region, and the cross-sectional area of ​​the inner circumferential protrusions at their base being greater than the cross-sectional area at their top.

Description

Technical Field

[0001] This application primarily relates to the field of ultrasonic welding tools for semiconductor chip packaging. More specifically, this application relates to a bonding wedge for bonding metal wires to a bonding pad / pin. Background Technology

[0002] Currently, packaging is a crucial step in the semiconductor device manufacturing process. Wire bonding is one of the most commonly used techniques in packaging, which involves soldering the two ends of a metal wire to the pads on the die and the lead, respectively, to achieve electrical connection between the die and the lead.

[0003] Typically, wire bonding includes the steps of forming a first bonding point (also known as a ball bond) and forming a second bonding point. During the second bonding point bonding, a bonding wedge presses the metal lead vertically through its end face. The metal lead receives ultrasonic energy transmitted from the end face and melts, depositing onto the pad. When the wire bonding system stops supplying ultrasonic energy, the metal lead quickly returns to a solid state. Subsequently, the bonding wedge moves vertically upward, pulling the metal lead within the wedge's through-hole to the adjacent metal lead on the pad, causing them to separate. Thus, the second bonding point is completed, forming a fishtail shape on the pad.

[0004] It is evident that the bonding wedge is a crucial tool in wire bonding, significantly impacting bond quality. Therefore, there is a need in the art to continuously improve all aspects of the bonding wedge to achieve optimized bond performance. Utility Model Content

[0005] The purpose of this application is to provide a novel bonding cutter that can improve bonding performance.

[0006] According to one aspect of this application, a bonding cleaver is provided. The bonding cleaver includes: a body having a through hole extending through the body along its axis; a head of the body having an end face intersecting the inner circumferential surface of the through hole; the end face including a central annular region concentrically disposed with respect to the through hole; the radially inner side of the central annular region intersecting the inner circumferential surface of the through hole; wherein a plurality of inner circumferential protrusions are uniformly formed circumferentially within the central annular region, the inner circumferential protrusions extending to the radially inner side of the central annular region, and the cross-sectional area of ​​the inner circumferential protrusions at their base being greater than the cross-sectional area at their top.

[0007] In some embodiments, the cross-sectional area S of the inner circumferential protrusion gradually decreases from its base to its top.

[0008] In some embodiments, the inner circumferential protrusion is constructed as one of a frustum, a pyramidal truncated cone, or a fan-shaped truncated cone, and the inner circumferential protrusion has a maximum circumference C at its base. max The inner circumferential protrusion has a minimum circumference C at its top. min The maximum perimeter C max Let C be the minimum perimeter. min 1.1 to 3 times that.

[0009] In some embodiments, the inner circumferential protrusion is constructed as one of a cone, hemisphere, arch, pyramid, or fan-shaped cone. The inner circumferential protrusion has a base and a top. The top of the inner circumferential protrusion has a height h1 relative to its base. The circumference at the base of the inner circumferential protrusion is 1.8 to 28 times its height h1.

[0010] In some embodiments, the ring width of the central annular region is 1 micrometer to 10 micrometers.

[0011] In some embodiments, the height h1 of the inner circumferential protrusion is 1 micrometer to 5 micrometers.

[0012] In some embodiments, the inner circumferential protrusions are configured as generally polygonal pyramids or frustums, the cross-section of the inner circumferential protrusions being triangular, and the plurality of inner circumferential protrusions including a first group of inner circumferential protrusions and a second group of inner circumferential protrusions, the inner circumferential protrusions being arranged in the central annular region such that one side of the first group of inner circumferential protrusions is located radially inside the central annular region, one side of the second group of inner circumferential protrusions is located radially outside the central annular region, and the first group of inner circumferential protrusions and the second group of inner circumferential protrusions are arranged alternately with each other circumferentially.

[0013] In some embodiments, the inner circumferential protrusion is configured as a generally polygonal pyramid or frustum, the cross-section of the inner circumferential protrusion being a generally trapezoid comprising a lower base and an upper base that are substantially parallel to each other, wherein the length of the lower base is greater than the length of the upper base; the plurality of inner circumferential protrusions include a first group of inner circumferential protrusions and a second group of inner circumferential protrusions, the inner circumferential protrusions being arranged in the central annular region as follows: the side containing the lower base of the first group of inner circumferential protrusions is located radially inward of the central annular region, the side containing the lower base of the second group of inner circumferential protrusions is located radially outward of the central annular region, and the first group of inner circumferential protrusions and the second group of inner circumferential protrusions are arranged alternately with each other circumferentially.

[0014] In some embodiments, the central annular region is a main central annular region, and the end face further includes a secondary central annular region located radially outside the main central annular region and concentrically disposed with the through hole. The secondary central annular region includes a plurality of secondary inner circumferential protrusions evenly distributed along the circumference. The secondary inner circumferential protrusions partially overlap with the inner circumferential protrusions in the radial direction. The main central annular region and the secondary central annular region are adjacent to each other or separated by annular recesses.

[0015] In some embodiments, the secondary inner peripheral protrusion has the same shape as the inner peripheral protrusion.

[0016] In some embodiments, the end face further includes a plurality of peripheral protrusions in the region radially outside the central annular region or the sub-central annular region, the plurality of peripheral protrusions being arranged in a polygonal matrix.

[0017] In some embodiments, the end face further includes at least one outer peripheral annular region concentrically disposed with respect to the through hole in the radially outer region of the central annular region or the sub-central annular region. A plurality of peripheral protrusions are uniformly formed circumferentially within the outer peripheral annular region, and each peripheral protrusion extends across the entire annular width of the outer peripheral annular region in which it is located.

[0018] In some embodiments, the peripheral protrusion is one of the following: cylindrical, hemispherical, conical, arched, polygonal prism, polygonal pyramid, polygonal frustum, fan-shaped prism, fan-shaped pyramid, or fan-shaped frustum.

[0019] In some embodiments, the outer peripheral protrusion has the same shape as the inner peripheral protrusion and / or the sub-inner peripheral protrusion.

[0020] In some embodiments, adjacent peripheral protrusions are adjacent to each other or spaced apart by more than 0 and less than or equal to 5 micrometers.

[0021] In some embodiments, the height h2 of the top of the peripheral protrusion relative to its base is greater than or equal to 1 micrometer and less than or equal to 5 micrometers.

[0022] In some embodiments, the height h1 of the inner peripheral protrusion is equal to the height h2 of the outer peripheral protrusion.

[0023] In some embodiments, the angle FA between the end face and the plane perpendicular to the central axis of the through hole is 0 degrees to 15 degrees.

[0024] According to the bonding wedge of this application, by providing one or two central annular regions on the radially inner side of the end face and providing an outer peripheral protrusion, the slippage between the metal lead and the end face of the bonding wedge can be effectively improved, the metal ball formation can be better controlled, the bonding quality can be improved, and the unwanted breakage and fishtail tearing of the metal lead can be reduced. In addition, the service life of the bonding wedge of this application is increased by approximately 30%.

[0025] It should be understood that the foregoing general description and the following detailed description are exemplary and illustrative only, and not intended to limit the scope of the invention. Furthermore, the accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and, together with the description, serve to explain the principles and concepts of the invention. Attached Figure Description

[0026] The above and other features of this utility model will become more fully clear from the following description and appended claims, taken in conjunction with the accompanying drawings. It is understood that these drawings depict only a few embodiments of the present application and should not be considered as limiting the scope of the application. The present application will be described more clearly and in more detail with reference to the accompanying drawings.

[0027] Figure 1 An exemplary perspective view of a bonding cleaver in the prior art is shown.

[0028] Figures 2A to 2D A bonding cleaver according to a first embodiment of this application is illustrated by way of example.

[0029] Figures 3A to 3C A bonding cleaver according to a second embodiment of this application is illustrated by way of example.

[0030] Figures 4A to 4B A bonding cleaver according to a third embodiment of this application is illustrated by way of example.

[0031] Figures 5A to 5B A bonding cleaver according to a fourth embodiment of this application is illustrated by way of example.

[0032] Figures 6A to 6B A bonding cleaver according to a fifth embodiment of this application is illustrated by way of example.

[0033] Figures 7A to 7B A bonding cleaver according to a sixth embodiment of this application is illustrated by way of example.

[0034] Figure 8 A bonding cleaver according to a seventh embodiment of this application is illustrated by way of example.

[0035] Explanation of reference numerals in the attached figures:

[0036] Bonded cleavers: 100, 200, 300, 400, 500, 600, 700

[0037] Main body: 10, 110

[0038] Central circular zone: 120, 520, 620

[0039] Main central ring area: 220, 320, 602, 720

[0040] Sub-central annular area: 230, 330, 730

[0041] Base: 10a

[0042] Head: 10b

[0043] Metal leads: 11

[0044] Through holes: 12, 101, 201, 501

[0045] Cylindrical inner circumferential surface: 101a, 201a

[0046] Conical inner circumferential surface: 101b, 201b

[0047] End face: 102, 202, 502

[0048] Lateral wall: 103, 203

[0049] Inner peripheral bulge: 104, 204, 304, 504, 604, 704

[0050] The base of the inner circumferential protrusion: 104a

[0051] The top of the inner circumference protrusion: 104b

[0052] Outer ring area: 540, 640

[0053] Peripheral protrusions: 106, 206, 306, 406, 506, 606, 706

[0054] The base of the outer bulge: 106a

[0055] The outer convex top: 106b Detailed Implementation

[0056] In the following detailed description, reference is made to the accompanying drawings, which form part of this application. In the drawings, unless the context otherwise requires, similar symbols generally denote similar components. The illustrative embodiments described in the detailed description, drawings, and claims are not intended to be limiting. Other embodiments and variations may be employed without departing from the spirit or scope of the subject matter of this application. It is understood that various different configurations, substitutions, and combinations can be made to the various aspects of the application generally described herein and illustrated in the drawings, and all of these should not be construed as limiting the scope of protection of this application. The scope of protection of this application is limited only by the definition of the appended claims.

[0057] In this application, unless otherwise expressly stated, the use of singular terms should also include the plural meaning. In this application, unless otherwise stated, the use of “or” means “and / or”. Furthermore, the use of the term “comprising” and other forms of expression such as “including” and “containing” is not restrictive. Additionally, the section headings used in this specification are for organizational purposes only and should not be construed as limiting the subject matter described.

[0058] As used herein, the “distal end” of a bonding wedge refers to the end of the bonding wedge used to press the metal leads together to form a bonding point, while the “proximal end” is the end opposite the “distal end.” Spatially relative terms, such as “up,” “down,” “left,” “right,” etc., are used to describe the relationship between one element or feature and another, as shown in the accompanying figures. In addition to the orientations depicted in the figures, spatially relative terms are intended to cover different orientations of the bonding wedge in use or operation. The bonding wedge may be oriented in other ways (rotated 90 degrees, 180 degrees, or in other orientations), and the spatially relevant descriptors used herein can be interpreted accordingly.

[0059] In this document, unless otherwise specified, the endpoints of the range should be included for all numerical ranges.

[0060] Figure 1 This is an exemplary perspective view of an existing bonding wedge in its working position, wherein a metal lead 11 for welding passes through a through-hole 12 located in the central region of the bonding wedge. Figure 1As shown, the bonding wedge includes a body 10 having a base 10a at a proximal end and a head 10b at a distal end. The base 10a is used for mounting to a frame of a wire bonding system (e.g., a wire bonding machine), and the head 10b is used to pressure contact the metal lead 11 with the pad for bonding. The body 10 of the bonding wedge has a through-hole 12 extending along its axial direction Y. The metal lead 11 passes through the through-hole 12 from the base 10a at the proximal end of the bonding wedge and extends out of the head 10b at the distal end of the bonding wedge. It is understood that the wire bonding system includes a clamp for controlling the movement of the metal lead 11. When the clamp clamps the metal lead 11, the metal lead 11 cannot move relative to the bonding wedge; and when the clamp releases the metal lead 11, the metal lead 11 can move along the axial direction Y within the through-hole 12 of the bonding wedge.

[0061] Figures 2A to 2D An exemplary embodiment of a bonding cleaver 100 according to a first embodiment of this application is shown, wherein... Figure 2A This is a perspective view of the bonded cleaver 100; Figure 2B From Figure 2A Top view of the bonding cleaver 100 viewed from above; Figure 2C yes Figure 2B A magnified view of the area within the dashed box; Figure 2D It is the edge of the bonded cleaver Figure 2B Longitudinal section view of the central section line AA.

[0062] refer to Figures 2A to 2D ,and Figure 1 Similar to existing bonding cleavers, the bonding cleaver 100 includes a body 110 having a through hole 101 extending from the proximal end of the body 110 along the axis Y of the body 110 to the distal end of the body 110. The through hole 101 includes a cylindrical inner circumferential surface 101a with a diameter of H and a tapered inner circumferential surface 101b, the tapered inner circumferential surface 101b on its distal end side (i.e., Figure 2D The top side of the through hole 101 has a maximum diameter CD and an inner taper angle ICA. Of course, in some embodiments, the through hole 101 may also include only a cylindrical inner circumferential surface without having a tapered inner circumferential surface.

[0063] The head of the main body 110 has an end face 102 and an outer wall 103. The radially inner side of the end face 102 intersects with the inner circumferential surface of the through hole 101 (i.e., the tapered inner circumferential surface 101b), and the radially outer side of the end face 102 is in contact with the outer wall 103. Figures 2A-2DIn the illustrated embodiment, the end face 102 of the bonding wedge 100 is constructed as a conical surface P, with an angle FA between the conical surface P and the horizontal plane L. The horizontal plane L is perpendicular to the axis Y of the main body 110 and intersects the farthest point of the bonding wedge 100. The angle FA can be greater than 0 to less than or equal to 15 degrees. The angle FA can also be equal to 0 degrees, in which case the end face 102 of the bonding wedge 100 coincides with the horizontal plane L. The extension portion of the outer sidewall 103 of the bonding wedge 100 ( Figure 2D The dashed portion intersects with the horizontal plane L to form a ring with a diameter of T. The proximal side of the main body 110 is connected to a wire bonding system (e.g., a wire bonding machine, not shown). The structure and shape of the main body 110 of the bonding wedge 100 of this application can adopt... Figure 1 The form shown or any other suitable form, as long as the distal end of the bonding cleaver 100 has Figures 2A to 2D The structure shown is sufficient.

[0064] Continue to refer to the appendix Figures 2A to 2D The end face 102 includes a central annular region 120 concentrically disposed near the through hole 101, the radially inner side of the central annular region 120 intersecting the inner circumferential surface of the through hole 101. For example... Figure 2C As shown, the area enclosed by the arc-shaped dashed line is the central annular region 120, which includes a first group of inner circumferential protrusions 104-1 and a second group of inner circumferential protrusions 104-2.

[0065] The inner circumferential protrusions 104-1 and 104-2 are both constructed in the shape of a triangular frustum, with a triangular cross-section (see...). Figure 2C Multiple first-group inner circumferential protrusions 104-1 are uniformly arranged circumferentially within the central annular region 120. The bases of the inner circumferential protrusions 104-1 may be adjacent to each other or spaced apart by a certain distance. As shown in the figure, each inner circumferential protrusion 104-1 is configured such that one side is located radially inside the central annular region 120 (i.e., the side closer to the through hole 101), while the other two sides extend obliquely radially outside the central annular region 120 to a position close to a certain distance from the radially outside of the central annular region 120. The inner circumferential protrusion 104-1 only extends across a portion of the annular width of the central annular region 120 (i.e., the distance between the radially inside and radially outside of the central annular region 120). Multiple second-group inner circumferential protrusions 104-2 are uniformly arranged circumferentially within the central annular region 120. The bases of the inner circumferential protrusions 104-2 may be adjacent to each other or spaced apart by a certain distance. Each inner circumferential protrusion 104-2 is configured such that one side of it is located radially outward of the central annular region 120 (i.e., away from the through hole 101), while the other two sides of the inner circumferential protrusion 104-2 extend radially inward toward the central annular region 120 to the tapered inner circumferential surface 101b of the through hole 101. For example... Figure 2BAs shown, the inner circumferential protrusions 104-1 and 104-2 are arranged alternately along the circumferential direction.

[0066] It is understood that, in some embodiments, the first set of inner circumferential protrusions 104-1 may also extend obliquely from the radially inner side of the central annular region 120 to its radially outer side, i.e., across the entire annular width of the central annular region 120; in some embodiments, the second set of inner circumferential protrusions 104-2 may extend obliquely from the radially outer side of the central annular region 120 to the radially inner side near the central annular region 110, i.e., across the entire annular width of the central annular region 120; in some embodiments, both the first set of inner circumferential protrusions 104-2 and the second set of inner circumferential protrusions 104-2 are configured to extend only across a portion of the annular width of the central annular region 120.

[0067] like Figure 2D As shown, the top 104b of the inner circumferential protrusion 104-1 lies within the conical surface P. Similarly, the top 104b of the inner circumferential protrusion 104-2 also lies within the conical surface P. The inner circumferential protrusions 104-1 and 104-2 have the largest cross-sectional area S at their base 104a. max It has the smallest cross-sectional area S at its top 104b. min The top 104b of the inner circumferential protrusions 104-1 and 104-2 has a height h1 relative to the base 104a. In some embodiments of this application, the circumferential width of the central annular region 120 is set to 1 micrometer to 10 micrometers. In still other embodiments of this application, the inner circumferential protrusions 104-1 and 104-2 have the largest circumference C at their base 104a. max It has a minimum perimeter C at its top 104b. min The maximum circumference C of the inner circumference protrusions 104-1 and 104-2 max Let C be the minimum perimeter. min The height h1 of the inner circumferential protrusions is 1.1 to 3 times that of the molten metal. This ratio ensures that the inner circumferential protrusions have a suitable sharpness, thereby effectively increasing the friction between the end face and the molten metal. In some other embodiments of this application, the height h1 of the inner circumferential protrusions 104-1 and 104-2 is 1 micrometer to 5 micrometers. It is understood that in other embodiments of this application, the inner circumferential protrusions 104-1 and 104-2 can be constructed in the form of a triangular pyramid, that is, the apex of the inner circumferential protrusion is inside the end face 102; in this case, the base perimeter of the inner circumferential protrusions 104-1 and 104-2 is 1.8 to 28 times their height h1, and the height h1 of the inner circumferential protrusions 104-1 and 104-2 is 1 micrometer to 5 micrometers.

[0068] According to this application, the structure of the inner circumferential protrusions 104-1 and 104-2 is not limited to... Figures 2A-2DIn a variation of the triangular truncated pyramid form shown in this embodiment, the first and second sets of inner circumferential protrusions can be constructed as quadrangular truncated pyramids with a generally trapezoidal cross-section (not shown), including a lower base and an upper base that are parallel to each other, wherein the length of the lower base is greater than the length of the upper base. The lower base of the first set of inner circumferential protrusions is located radially inward of the central annular region 120, and the lower base of the second set of inner circumferential protrusions is located radially outward of the central annular region 120, and the first and second sets of inner circumferential protrusions are arranged alternately with each other circumferentially. The first and second sets of inner circumferential protrusions can extend across a portion or the entire width of the central annular band 120. The maximum circumference C of the first and second sets of inner circumferential protrusions at the base 104a is... max Its minimum perimeter C at the top 104b min 1.1 to 3 times that.

[0069] Continue to refer to Figures 2A to 2D The end face 102, in the radially outer region of the central annular region 120, also includes a plurality of peripheral protrusions 106, which are arranged in a quadrilateral matrix (specifically, the peripheral protrusions 106 are arranged along...). Figure 2B (The four sides of the dashed rectangle in the image are arranged), and the 106 protrusions on each outer perimeter are connected by... Figure 2B The horizontal or vertical grooves shown are spaced apart from each other. In some embodiments, the spacing between the peripheral protrusions 106 is greater than 0 micrometers and less than or equal to 5 micrometers.

[0070] In some embodiments, the peripheral protrusions 106 may also be arranged in other polygonal matrices, such as a triangular matrix (i.e., the peripheral protrusions are arranged along the sides of a triangle), a pentagonal matrix, a hexagonal matrix, a heptagonal matrix, an octagonal matrix, etc.

[0071] As shown in the figure, most of the peripheral protrusions 106 are constructed in the form of a quadrangular prism, with the cross-sectional area at their base 106a equal to the cross-sectional area at their top 106b. They are only partially quadrangular prisms near the central annular band 120 or near the outer wall 103. In some embodiments, the peripheral protrusions 106 may also be constructed in the form of a frustum, with the bases of adjacent peripheral protrusions 106 adjacent to each other or spaced apart by a distance, for example, greater than 0 micrometers and less than or equal to 5 micrometers. The cross-sectional area of ​​the peripheral protrusion 106 at its base 106a is greater than the cross-sectional area at its top 106b, and the perimeter of the peripheral protrusion 106 at its base 106a is greater than the perimeter at its top 106b. The maximum perimeter C of the peripheral protrusion 106 is... max Its minimum perimeter C min 1.1 to 3 times that.

[0072] like Figure 2DAs shown, the top 106b of the outer peripheral protrusion 106 is also located within the conical surface P. The top 106b of the outer peripheral protrusion 106 has a height h2 relative to its base 106a. In some embodiments, the height h2 of the outer peripheral protrusion 106 is greater than or equal to 1 micrometer and less than 5 micrometers. In some embodiments, the height h1 of the inner peripheral protrusion is equal to the height h2 of the outer peripheral protrusion. This configuration facilitates more efficient guidance of metal flow at the end face, improving the morphology of the bonded metal spheres and the fishtail.

[0073] Figures 3A to 3C An exemplary embodiment of a bonding cleaver 200 according to a second embodiment of this application is shown, wherein... Figure 3A This is a perspective view of the bonded cleaver 200; Figure 3B From Figure 3A Top view of the bonding cleaver 200 as viewed from above; Figure 3C yes Figure 3B A magnified view of the area within the dashed box.

[0074] and Figures 2A to 2D Compared to the bonding cleaver 100 shown, Figures 3A to 3C The main difference of the bonding wedge 200 shown is that the end face 202 includes two central annular regions. Figure 3C (Delineated by a circular dashed line), namely the main central annular region 220 near the through hole 201 and the secondary central annular region 230 located radially outside the main central annular region 220. Additionally, the inner circumferential protrusion 204 is roughly frustum-shaped. The following will mainly describe the differences between the bonding cutter 200 and the bonding cutter 100; the features of the remaining parts of the bonding cutter 200 can be referred to the description of the bonding cutter 100.

[0075] refer to Figures 3A to 3C The radially inner side of the main central annular region 220 intersects with the through hole 201. A plurality of inner circumferential protrusions 204 are uniformly distributed circumferentially within the main central annular region 220. These inner circumferential protrusions 204 are generally frustoconical in shape and extend radially inward from the outer side of the main central annular region 220 to the inner surface of the through hole 201 (e.g., a tapered inner circumferential surface 201b), meaning the inner circumferential protrusions 204 extend across the entire annular width of the main central annular region 220. In some embodiments, the annular width of the main central annular region 220 is 1 micrometer to 10 micrometers.

[0076] Multiple inner circumferential protrusions 204 are evenly distributed circumferentially within the secondary central annular region 230. These inner circumferential protrusions 204 are also constructed as approximately frustum-shaped cones extending across the entire width of the secondary central annular region 230. The annular width of the secondary central annular region 230 ranges from 1 micrometer to 10 micrometers, and its specific value may be the same as or different from that of the main central annular region 220. In some embodiments, the maximum circumference C of the inner circumferential protrusions 204 at their base is... max Let C be the minimum perimeter at its top.min The height h1 is 1.1 to 3 times that of the height h1. In other embodiments, the inner circumferential protrusion 204 may also be constructed as a hemispherical or arched shape, that is, the longitudinal section of the inner circumferential protrusion 204 is semi-circular or arc-shaped. In this case, it is preferable that the circumference of the inner circumferential protrusion 204 at the base is 1.8 to 28 times that of its height h1, and the height h1 of the inner circumferential protrusion 204 is 1 micrometer to 5 micrometers.

[0077] As shown in the figure, radially, the inner circumferential protrusions 204 within the main central annular region 220 and the inner circumferential protrusions 204 within the secondary central annular region 230 at least partially overlap. The bases of two adjacent inner circumferential protrusions 204 within the same annular region are circumferentially adjacent to each other (i.e., there are no other components or structures between the two adjacent bases). In some embodiments, the bases of the inner circumferential protrusions 204 may also be spaced apart by a certain distance, for example, greater than 0 micrometers and less than or equal to 5 micrometers. (Reference) Figure 3C The main central annular region 220 and the secondary central annular region 230 (the area defined by the arc-shaped dashed line in the figure) are adjacent to each other. In some embodiments of this application, the main central annular region 220 and the secondary central annular region 230 may be spaced apart from each other by annular recesses, the width of which may be set to be greater than 0 and less than or equal to 5 micrometers.

[0078] exist Figures 3A to 3C In some embodiments, the inner circumferential protrusions 204 in the main central annular region 220 and the inner circumferential protrusions 204 in the secondary central annular region 230 are constructed with substantially the same shape. In some embodiments of this application, the inner circumferential protrusions in the main central annular region 220 and the inner circumferential protrusions in the secondary central annular region 230 may also be constructed with different shapes, but the cross-sectional area of ​​the inner circumferential protrusions in the two central annular regions at their respective bases must be greater than the cross-sectional area at their tops, and radially, the inner circumferential protrusions in the main central annular region and the inner circumferential protrusions in the secondary central annular region should at least partially overlap.

[0079] like Figures 3A to 3C As shown, on the radially outer side of the sub-central annular region 230, the end face 202 also includes an outer peripheral protrusion 206. The shape, structure and arrangement of the outer peripheral protrusion 206 can be referred to the above description of the bonding cutter 100, and will not be repeated here.

[0080] Figures 4A to 4B The head of a bonding cleaver 300 according to a third embodiment of this application is illustrated exemplarily, wherein... Figure 4A This is a perspective view of the bonded cleaver 300; Figure 4B From Figure 4A Top view of the Bonded Cleaver 300 as viewed from above.

[0081] and Figures 3A to 3C Compared to the bonding cleaver 200 shown, Figures 4A to 4BThe main difference of the bonding cleaver 300 shown is that the inner circumferential protrusions 304 within the main central annular region 320 and the secondary central annular region 330 are constructed in the shape of a truncated pyramid, with a cross-sectional area at its base greater than that at its top, and a circumference at its base greater than that at its top. Preferably, the maximum circumference C of the inner circumferential protrusion 304 at its base is... max Let C be the minimum perimeter at its top. min 1.1 to 3 times that. For example... Figure 4B As shown, the cross-section of the inner circumferential protrusion 304 is rectangular, particularly square. The main central annular region 320 and the secondary central annular region 330 are separated from each other by an annular groove, the width of which can be greater than 0 and less than or equal to 5 micrometers. In the radial direction, the inner circumferential protrusions 304 in the main central annular region 320 and the adjacent inner circumferential protrusions 304 in the secondary central annular region 330 at least partially overlap. The end face of the bonding wedge 300 also includes an outer circumferential protrusion 306 located radially outside the secondary central annular region 330. The shape, structure, and arrangement of the outer circumferential protrusion 306 can be referred to the bonding wedge 100, and will not be described again here.

[0082] Figures 5A to 5B The head of a bonding cleaver 400 according to a fourth embodiment of this application is illustrated exemplarily, wherein... Figure 5A This is a perspective view of the bonded cleaver 400; Figure 5B From Figure 5A Top view of the Bonded Cleaver 400 as viewed from above.

[0083] and Figures 3A to 3C Compared to the bonding cleaver 200 shown, Figures 5A to 5B The main difference of the bonding cleaver 400 shown is that the inner circumferential protrusion 404 is constructed in the shape of a hexagonal frustum, with a cross-sectional area at its base greater than that at its top, and a circumference at its base greater than that at its top. Preferably, the maximum circumference C of the inner circumferential protrusion 404 at its base is... max Let C be the minimum perimeter at its top. min 1.1 to 3 times that. For example... Figure 5B As shown, the cross-section of the inner circumferential protrusion 404 is approximately hexagonal. The main central annular region 420 and the secondary central annular region 430 are adjacent to each other. In the radial direction, the inner circumferential protrusion 404 in the main central annular region 420 and the adjacent inner circumferential protrusion 404 in the secondary central annular region 430 at least partially overlap. The end face of the bonding cutter 400 also includes an outer circumferential protrusion 406 located radially outside the secondary central annular region 430. The shape, structure, and arrangement of the outer circumferential protrusion 406 can be referred to the bonding cutter 100, and will not be described again here.

[0084] Figures 6A to 6B An exemplary illustration shows the head of a bonding cleaver 500 according to a fifth embodiment of this application, wherein... Figure 6AThis is a perspective view of the bonded cleaver 500; Figure 6B From Figure 6A Top view of the Bonded Cleaver 500 as viewed from above.

[0085] and Figures 5A to 5B Compared to the bonding cleaver 400 shown, Figures 6A to 6B The main difference of the bonding wedge 500 shown is that the bonding wedge 500 has a central annular region 520, in which the inner peripheral protrusion 504 is constructed in the shape of a hexagonal frustum and extends from the radially outer side of the central annular region 520 to its radially inner side (i.e. the inner peripheral surface of the through hole).

[0086] refer to Figure 6A and 6B The end face 502 includes multiple outer annular regions 540 concentrically arranged with the through hole 501 on the radially outer side of the central annular region 520 (the figure shows that the bonding wedge 500 includes four outer annular regions 540). Multiple outer annular protrusions 506 are uniformly formed circumferentially within each outer annular region 540. Each outer annular protrusion 506 extends across the entire annular width of its respective outer annular region 540. The annular widths of the central annular region 520 and the outer annular regions 540 are 1 micrometer to 10 micrometers. The annular widths of the central annular region 520 and the outer annular regions 540 can be the same or different from each other, and can be specifically set according to actual needs by those skilled in the art.

[0087] From a radial perspective, the inner peripheral protrusion 504 at least partially overlaps with the corresponding outer peripheral protrusion 506 in the adjacent outer peripheral annular region 540, and the corresponding outer peripheral protrusion 506 in the adjacent outer peripheral annular region 540 also at least partially overlaps. Figures 6A to 6B The diagram shows four outer annular regions 540, but the number of outer annular regions 540 is not limited to this. More or fewer outer annular regions 540 can be provided, such as 1, 2, 3, 5, 6, etc. Those skilled in the art can set an appropriate number of outer annular regions 540 according to actual needs. In some embodiments, the outer annular protrusion 506 can also be set in the shape of a hexagonal prism.

[0088] Figures 7A to 7B The head of a bonding cleaver 600 according to a sixth embodiment of this application is illustrated exemplarily, wherein... Figure 7A This is a perspective view of the bonded cleaver 600; Figure 7B From Figure 7A Top view of the Bonded Cleaver 600 as viewed from above.

[0089] and Figures 6A to 6B Compared to the bonding cleaver 500 shown, Figures 7A to 7BThe main difference in the shown bonding cleaver 600 is that the inner circumferential protrusion 604 in the central annular region 620 and the outer circumferential protrusion 606 in the outer annular region 640 are constructed in the shape of a truncated triangular prism. One side of the truncated triangular prism is close to the radially outer side of the annular band it occupies, while the other two sides extend obliquely towards the radially inner side of the annular band, thus spanning the entire width of the annular band. The cross-sectional area of ​​the inner circumferential protrusion 604 at its base is larger than that at its top, and its circumference at its base is greater than its circumference at its top, preferably with the maximum circumference C at its base. max Let C be the minimum perimeter at its top. min The size is 1.1 to 3 times that of the original. In some embodiments, adjacent annular bands are spaced by annular grooves of a certain width, the annular grooves having a width greater than 0 micrometers and less than or equal to 5 micrometers. In other embodiments, the outer peripheral protrusion 606 may be constructed as a triangular prism or a triangular pyramid.

[0090] Figure 8 A perspective view of the head of a bonding cleaver 700 according to a seventh embodiment of this application is shown. Figures 3A to 3C Compared to the bonding cleaver 200 shown, Figure 8 The inner circumferential protrusion 704 and outer circumferential protrusion 706 of the bonding cleaver 700 shown are both constructed in an arched shape, with a non-circular curved longitudinal section. In some embodiments, the inner circumferential protrusion 704 and / or the outer circumferential protrusion 706 may also be constructed as a hemispherical shape with a circular longitudinal section, or as a conical shape with a triangular longitudinal section. In some embodiments, the circumference of the inner circumferential protrusion 704 at its base is 1.8 to 28 times its height h1.

[0091] Although the various embodiments of this application use metal leads and nickel-palladium-gold frames with different properties as welding materials, this application does not limit the welding materials. Those skilled in the art will understand that any suitable form of welding material can be used in the various embodiments of this application.

[0092] Although the various embodiments shown in the accompanying drawings are not explicitly illustrated, those skilled in the art will understand that, in order to improve the bonding effect, arc-shaped transition surfaces can be provided at the junctions of the surfaces in the bonding wedge. For example, an arc-shaped transition portion can be provided at the junction of the cylindrical surface and the inner conical surface of the through hole, and an arc-shaped transition portion can be provided at the junction of the inner conical surface and the end face, etc. Those skilled in the art can combine them arbitrarily according to actual needs.

[0093] Those skilled in the art can use appropriate existing measurement methods to determine the height, inner cone angle, bottom side length, and top side length of the protrusion, for example, by using 3D scanning to measure these parameters, and this application does not limit this.

[0094] The discussion herein includes numerous illustrative drawings that illustrate the structure of the distal end of a bonding cleaver according to different embodiments. For clarity, these drawings do not show all aspects of each embodiment. Any embodiment provided herein may share any or all features with any or all other embodiments provided herein, and features in different embodiments may be combined arbitrarily as needed, all within the scope of protection of this application.

[0095] Various embodiments have been described herein with reference to the accompanying drawings. However, it is apparent that various modifications and changes can be made thereto, and other embodiments can be implemented without departing from the broader scope of the invention as set forth in the appended claims. For example, the shapes of the inner and outer circumferential protrusions are not limited to those shown in the figures, and can also be constructed as fan-ring cones or fan-ring truncated cones with a fan-ring cross-section. That is, the inner circumferential protrusion is constructed as one of a frustum, cone, hemisphere, arch, multi-faceted frustum, multi-faceted pyramid, fan-ring cone, or fan-ring truncated cone, and the outer circumferential protrusion is constructed as one of a cylinder, hemisphere, cone, arch, multi-faceted prism, multi-faceted pyramid, multi-faceted frustum, fan-ring prism, fan-ring cone, or fan-ring truncated cone. The inner circumferential protrusions of various embodiments can be arbitrarily combined with the outer circumferential protrusions of other embodiments; for example, the inner circumferential protrusion of the first embodiment can be combined with the outer circumferential protrusion of the fifth embodiment, etc. Furthermore, other embodiments will be apparent to those skilled in the art upon consideration of the practice of one or more embodiments of the invention disclosed herein. Therefore, the embodiments in this application and herein are intended to be considered exemplary only, and the true scope and spirit of the invention are indicated by the list of the appended exemplary claims.

Claims

1. A bonding blade, comprising: The main body has a through hole extending through it along its axis, and the head of the main body has an end face intersecting the inner circumferential surface of the through hole. The end face includes a central annular region concentrically disposed with the through hole, and the radially inner side of the central annular region intersects the inner circumferential surface of the through hole. The central annular region has multiple inner circumferential protrusions uniformly formed along the circumference. The inner circumferential protrusions extend to the radial inner side of the central annular region, and the cross-sectional area of ​​the inner circumferential protrusion at its base is greater than the cross-sectional area at its top.

2. The bonding kerfing of claim 1, wherein, The cross-sectional area S of the inner circumferential protrusion gradually decreases from its base to its top.

3. The bonding kerfing of claim 1 or 2, wherein, The inner circumferential protrusion is one of the following: frustum, pyramidal frustum, or fan-shaped frustum. The inner circumferential protrusion has its maximum circumference C at its base. max The inner circumferential protrusion has a minimum circumference C at its top. min The maximum perimeter C max Let C be the minimum perimeter. min 1.1 to 3 times that.

4. The bonding kerfing of claim 1 or 2, wherein, The inner circumferential protrusion is one of the following: conical, hemispherical, arched, polygonal pyramid, or fan-shaped pyramid. The inner circumferential protrusion has a base and a top. The top of the inner circumferential protrusion has a height h1 relative to its base. The circumference at the base of the inner circumferential protrusion is 1.8-28 times its height h1.

5. The bonding kerfing of claim 1 or 2, wherein, The width of the central annular region is 3 micrometers to 10 micrometers.

6. The bonding kerfing of claim 1 or 2, wherein, The height h1 of the inner circumferential protrusion is 1 micrometer to 5 micrometers.

7. The bonding kerfing of claim 1 or 2, wherein, The inner circumferential protrusions are constructed in the form of a generally polygonal pyramid or frustum, and the cross-section of the inner circumferential protrusions is triangular. The plurality of inner circumferential protrusions include a first group of inner circumferential protrusions and a second group of inner circumferential protrusions. The inner circumferential protrusions are arranged in the central annular region in such a way that one side of the first group of inner circumferential protrusions is located radially inside the central annular region, one side of the second group of inner circumferential protrusions is located radially outside the central annular region, and the first group of inner circumferential protrusions and the second group of inner circumferential protrusions are arranged alternately with each other in the circumferential direction.

8. The bonding kerfing of claim 1 or 2, wherein, The inner circumferential protrusion is constructed in the form of a generally polygonal pyramid or frustum, and the cross-section of the inner circumferential protrusion is a generally trapezoidal shape including a lower base and an upper base that are substantially parallel to each other, wherein the length of the lower base is greater than the length of the upper base. The plurality of inner circumferential protrusions include a first group of inner circumferential protrusions and a second group of inner circumferential protrusions, which are arranged in the central annular region as follows: the side where the lower bottom edge of the first group of inner circumferential protrusions is located is located radially inside the central annular region, the side where the lower bottom edge of the second group of inner circumferential protrusions is located is located radially outside the central annular region, and the first group of inner circumferential protrusions and the second group of inner circumferential protrusions are arranged alternately with each other in the circumferential direction.

9. The bonding kerfing of claim 1 wherein, The central annular area is the main central annular area, and the end face further includes a secondary central annular area located radially outside the main central annular area and concentrically arranged with the through hole. The secondary central annular area includes a plurality of secondary inner circumferential protrusions evenly distributed along the circumference. The secondary inner circumferential protrusions partially overlap with the inner circumferential protrusions in the radial direction. The main central annular area and the secondary central annular area are adjacent to each other or separated by annular recesses.

10. The bonding kerfing of claim 9, wherein, The secondary inner circumferential protrusion has the same shape as the inner circumferential protrusion.

11. The bonding kerfing of claim 1 wherein, The end face also includes multiple peripheral protrusions in the radially outer region of the central annular area, and the multiple peripheral protrusions are arranged in a polygonal matrix.

12. The bonding kerfing of claim 9, wherein, The end face also includes a plurality of peripheral protrusions in the radially outer region of the central annular region or the sub-central annular region, the plurality of peripheral protrusions being arranged in a polygonal matrix.

13. The bonding kerfing of claim 1 wherein, The end face also includes at least one outer annular region concentrically arranged with the through hole in the radially outer region of the central annular region. Multiple outer annular protrusions are uniformly formed in the circumferential direction in the outer annular region, and each outer annular protrusion extends across the entire annular width of the outer annular region in which it is located.

14. The bonding kerfing of claim 9, wherein, The end face also includes at least one outer annular region concentrically arranged with the through hole in the radially outer region of the central annular region or the sub-central annular region. Multiple outer annular protrusions are uniformly formed in the circumferential direction in the outer annular region, and each outer annular protrusion extends across the entire annular width of the outer annular region in which it is located.

15. The bonding kerfing of any of claims 11-14, wherein, The outer peripheral protrusion is one of the following: cylindrical, hemispherical, conical, arched, polygonal prism, polygonal pyramid, polygonal frustum, fan-shaped prism, fan-shaped pyramid, or fan-shaped frustum.

16. The bonding kerfing of claim 15, wherein, The outer peripheral protrusion has the same shape as the inner peripheral protrusion and / or the sub-inner peripheral protrusion.

17. The bonding kerfing of any of claims 11-14, wherein, The bases of adjacent peripheral protrusions are either adjacent to each other or spaced apart by more than 0 and less than or equal to 5 micrometers.

18. The bonding kerfing of any of claims 11-14, wherein, The height h2 of the top of the outer peripheral protrusion relative to its base is greater than or equal to 1 micrometer and less than or equal to 5 micrometers.

19. The bonding kerfing of claim 18, wherein, The height h1 of the inner circumferential protrusion is equal to the height h2 of the outer circumferential protrusion.

20. The bonding kerfing of any of claims 11-14, wherein, The angle FA between the end face and the plane perpendicular to the central axis of the through hole is 0 degrees to 15 degrees.

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