Bonded Cleaver

Abstract

This application discloses a bonding wedge, comprising a body having a through hole extending through the body along its axis, a head of the body having an end face intersecting the inner circumferential surface of the through hole, the end face including a central annular region concentrically disposed with the through hole, the radially inner side of the central annular region intersecting the inner circumferential surface of the through hole; wherein, a plurality of inner circumferential recesses are uniformly spaced along the circumferential direction within the central annular region, the inner circumferential recesses extending from the radially inner side of the central annular region to the radially outer side of the central annular region, and the inner width of the inner circumferential recess on the radially inner side of the central annular region is greater than the outer width of the inner circumferential recess on the radially outer side of the central annular region.

Description

Technical Field

[0001] This application primarily relates to the field of ultrasonic welding tools for semiconductor chip packaging. More specifically, this application relates to a bonding wedge for bonding metal wires to a bonding pad / pin. Background Technology

[0002] Currently, packaging is a crucial step in the semiconductor device manufacturing process. Wire bonding is one of the most commonly used techniques in packaging, which involves soldering the two ends of a metal wire to the pads on the die and the lead, respectively, to achieve electrical connection between the die and the lead.

[0003] Typically, wire bonding includes the steps of forming a first bonding point (also known as a ball bond) and forming a second bonding point. During the second bonding point bonding, a bonding wedge presses the metal lead vertically through its end face. The metal lead receives ultrasonic energy transmitted from the end face and melts, depositing onto the pad. When the wire bonding system stops supplying ultrasonic energy, the metal lead quickly returns to a solid state. Subsequently, the bonding wedge moves vertically upward, pulling the metal lead within the wedge's through-hole to the adjacent metal lead on the pad, causing them to separate. Thus, the second bonding point is completed, forming a fishtail shape on the pad.

[0004] It is evident that the bonding wedge is a crucial tool in wire bonding, significantly impacting bond quality. Therefore, there is a need in the art to continuously improve all aspects of the bonding wedge to achieve optimized bond performance. Utility Model Content

[0005] The purpose of this application is to provide a novel bonding cutter that can improve bonding performance.

[0006] According to one aspect of this application, a bonding cleaver is provided. The bonding cleaver includes: a body having a through hole extending through the body along its axis; a head of the body having an end face intersecting the inner circumferential surface of the through hole; wherein the end face includes a central annular region concentrically disposed with respect to the through hole, the radially inner side of the central annular region intersecting the inner circumferential surface of the through hole; a plurality of inner circumferential recesses are uniformly spaced circumferentially within the central annular region, the inner circumferential recesses extending from the radially inner side of the central annular region to the radially outer side of the central annular region, and the inner width of the inner circumferential recess on the radially inner side of the central annular region is greater than the outer width of the inner circumferential recess on the radially outer side of the central annular region.

[0007] Preferably, the inner circumferential recess is triangular or trapezoidal in shape on the end face.

[0008] Preferably, the inner circumferential recess on the inner surface of the through hole is V-shaped, U-shaped, rectangular, or trapezoidal.

[0009] Preferably, the inner circumferential recess is trapezoidal in shape on the end face, and the inner width of the inner circumferential recess is 1.5-5 times its outer width.

[0010] Preferably, the depth d1 of the inner circumferential recess relative to the end face is 1 micrometer to 5 micrometers.

[0011] Preferably, the region on the end face located radially outside the central annular region further includes a plurality of peripheral protrusions, the plurality of peripheral protrusions being disposed within at least one peripheral annular region arranged concentrically with the through hole, wherein the peripheral annular region is adjacent to or spaced apart from the central annular region by a certain distance.

[0012] Preferably, the region on the end face located radially outside the central annular region further includes a plurality of peripheral recesses, the plurality of peripheral recesses being disposed within at least one peripheral annular region arranged concentrically with the through hole, wherein the peripheral annular region is adjacent to or spaced apart from the central annular region by a certain distance.

[0013] Preferably, the distance between the central annular region and the outer annular region is 3 micrometers to 15 micrometers.

[0014] Preferably, the end face includes at least two outer annular regions, and the distance between adjacent outer annular regions is 3 micrometers to 15 micrometers.

[0015] Preferably, the end face further includes a plurality of peripheral protrusions in the radially outer region of the central annular area, the plurality of peripheral protrusions being arranged in a polygonal matrix.

[0016] Preferably, the end face further includes a plurality of peripheral recesses in the radially outer region of the central annular area, the plurality of peripheral recesses being arranged in a polygonal matrix.

[0017] Preferably, the outer peripheral protrusion is one of the following: cylindrical, hemispherical, conical, arched, polygonal prism, polygonal pyramid, fan-shaped prism, or fan-shaped pyramid.

[0018] Preferably, the outer peripheral recess on the end face has a shape that is one of a circle, an ellipse, a triangle, a rectangle, a trapezoid, or a fan-shaped ring.

[0019] Preferably, the depth d1 of the inner circumferential recess is equal to the depth d2 of the outer circumferential recess.

[0020] The bonding wedge of this application, during bonding, features a central annular region on the radially inner side of its end face. Within this central annular region, multiple inner circumferential recesses are evenly spaced circumferentially. These inner circumferential recesses extend radially from the radially inner side to the radially outer side of the central annular region, with the inner width of the inner circumferential recess on the radially inner side being greater than its outer width on the radially outer side. During bonding, these inner circumferential recesses effectively guide the metal radially outward, significantly reducing slippage of the metal lead relative to the bonding wedge's end face. This better controls the formation of metal balls from the metal lead, improving bonding quality and reducing unwanted breakage and fishtail tearing of the metal lead. Furthermore, the service life of the bonding wedge of this application is increased by approximately 30%.

[0021] It should be understood that the foregoing general description and the following detailed description are exemplary and illustrative only, and not intended to limit the scope of the invention. Furthermore, the accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and, together with the description, serve to explain the principles and concepts of the invention. Attached Figure Description

[0022] The above and other features of this utility model will become more fully clear from the following description and appended claims, taken in conjunction with the accompanying drawings. It is understood that these drawings depict only a few embodiments of the present application and should not be considered as limiting the scope of the application. The present application will be described more clearly and in more detail with reference to the accompanying drawings.

[0023] Figure 1 An exemplary perspective view of a bonding cleaver in the prior art is shown.

[0024] Figures 2A to 2D A bonding cleaver according to a first embodiment of this application is illustrated by way of example.

[0025] Figures 3A to 3C A bonding cleaver according to a second embodiment of this application is illustrated by way of example.

[0026] Figures 4A to 4B A bonding cleaver according to a third embodiment of this application is illustrated by way of example.

[0027] Figures 5A to 5B A bonding cleaver according to a fourth embodiment of this application is illustrated by way of example.

[0028] Figures 6A to 6C A bonding cleaver according to a fifth embodiment of this application is illustrated by way of example.

[0029] Figures 7A to 7B A bonding cleaver according to a sixth embodiment of this application is illustrated by way of example.

[0030] Figure 8A and 8B A bonding cleaver according to a seventh embodiment of this application is illustrated by way of example.

[0031] Figures 9A to 9B A bonding cleaver according to an eighth embodiment of this application is illustrated by way of example.

[0032] Figures 10A to 10D A bonding cleaver according to a ninth embodiment of this application is illustrated by way of example.

[0033] Figures 11A to 11B A bonding cleaver according to the tenth embodiment of this application is illustrated by way of example.

[0034] Explanation of reference numerals in the attached figures: Main body: 10, 110 Base: 10a Head: 10b Metal leads: 11 Through holes: 12, 101, 201 Cylindrical inner circumferential surface: 101a Conical inner circumferential surface: 101b Bonded cleavers: 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 Central circular zone: 120, 220, 320, 420, 520, 620, 720, 820, 920, 1020 End face: 102, 202, 302, 402, 502, 902, 1002 Lateral wall: 103, 303, 503, 703, 803 Inner peripheral depression: 104, 204, 304, 404, 504, 604, 704, 804, 904, 1004 Peripheral depressions: 106, 206, 306, 406 Outer ring area: 140, 240, 540, 940, 1040 Peripheral protrusions: 506, 606, 706, 806, 906, 1006 Detailed Implementation

[0035] In the following detailed description, reference is made to the accompanying drawings, which form part of this application. In the drawings, unless the context otherwise requires, similar symbols generally denote similar components. The illustrative embodiments described in the detailed description, drawings, and claims are not intended to be limiting. Other embodiments and variations may be employed without departing from the spirit or scope of the subject matter of this application. It is understood that various different configurations, substitutions, and combinations can be made to the various aspects of the application generally described herein and illustrated in the drawings, and all of these should not be construed as limiting the scope of protection of this application. The scope of protection of this application is limited only by the definition of the appended claims.

[0036] In this application, unless otherwise expressly stated, the use of singular terms should also include the plural meaning. In this application, unless otherwise stated, the use of “or” means “and / or”. Furthermore, the use of the term “comprising” and other forms of expression such as “including” and “containing” is not restrictive. Additionally, the section headings used in this specification are for organizational purposes only and should not be construed as limiting the subject matter described.

[0037] As used herein, the “distal end” of a bonding wedge refers to the end of the bonding wedge used to press the metal leads together to form a bonding point, while the “proximal end” is the end opposite the “distal end.” Spatially relative terms, such as “up,” “down,” “left,” “right,” etc., are used to describe the relationship between one element or feature and another, as shown in the accompanying figures. In addition to the orientations depicted in the figures, spatially relative terms are intended to cover different orientations of the bonding wedge in use or operation. The bonding wedge may be oriented in other ways (rotated 90 degrees, 180 degrees, or in other orientations), and the spatially relevant descriptors used herein can be interpreted accordingly.

[0038] In this document, unless otherwise specified, the endpoints of the range should be included for all numerical ranges.

[0039] Figure 1 This is an exemplary perspective view of an existing bonding wedge in its working position, wherein a metal lead 11 for welding passes through a through-hole 12 located in the central region of the bonding wedge. Figure 1As shown, the bonding wedge includes a body 10 having a base 10a at a proximal end and a head 10b at a distal end. The base 10a is used for mounting to a frame of a wire bonding system (e.g., a wire bonding machine), and the head 10b is used to pressure contact the metal lead 11 with the pad for bonding. The body 10 of the bonding wedge has a through-hole 12 extending along its axial direction Y. The metal lead 11 passes through the through-hole 12 from the base 10a at the proximal end of the bonding wedge and extends out of the head 10b at the distal end of the bonding wedge. It is understood that the wire bonding system includes a clamp for controlling the movement of the metal lead 11. When the clamp clamps the metal lead 11, the metal lead 11 cannot move relative to the bonding wedge; and when the clamp releases the metal lead 11, the metal lead 11 can move along the axial direction Y within the through-hole 12 of the bonding wedge.

[0040] Figures 2A to 2D An exemplary embodiment of a bonding cleaver 100 according to a first embodiment of this application is shown, wherein... Figure 2A This is a perspective view of the bonded cleaver 100; Figure 2B From Figure 2A Top view of the bonding cleaver 100 viewed from above; Figure 2C yes Figure 2B A magnified view of the area within the dashed box; Figure 2D It is the edge of the bonded cleaver Figure 2B Longitudinal section view of the central section line AA.

[0041] refer to Figures 2A to 2D ,and Figure 1 Similar to existing bonding cleavers, bonding cleaver 100 includes a body 110, the body 110 having a proximal end ( Figure 2A The lower end of the body 110 extends along the axis Y of the body 110 to the distal end of the body 110. Figure 2A The through hole 101 (at the upper end of the hole) includes a cylindrical inner circumferential surface 101a with a diameter of H and a tapered inner circumferential surface 101b. The tapered inner circumferential surface 101b is located at its distal end (i.e., Figure 2D The left side of the through hole 101 has the largest diameter CD and an inner taper angle ICA. Of course, in some embodiments, the through hole 101 may also include only a cylindrical inner circumferential surface without having a tapered inner circumferential surface located at the distal end.

[0042] The head of the main body 110 has an end face 102 and an outer wall 103. The radially inner side of the end face 102 intersects with the inner circumferential surface of the through hole 101 (i.e., the tapered inner circumferential surface 101b), and the radially outer side of the end face 102 is in contact with the outer wall 103. Figure 2A-2DIn the illustrated embodiment, the end face 102 of the bonding wedge 100 is constructed as a conical surface P, with an angle FA between the conical surface P and the horizontal plane L. The horizontal plane L is perpendicular to the axis Y of the main body 110 and intersects the farthest point of the bonding wedge 100. The angle FA can be greater than 0 to less than or equal to 15 degrees. In some embodiments, the angle FA can also be equal to 0 degrees, in which case the end face 102 of the bonding wedge 100 coincides with the horizontal plane L. The extension portion of the outer sidewall 103 of the bonding wedge 100 ( Figure 2D The dashed portion intersects with the horizontal plane L to form a ring with a diameter of T. The proximal side of the main body 110 is connected to a wire bonding system (e.g., a wire bonding machine, not shown). The structure and shape of the main body 110 of the bonding wedge 100 of this application can adopt... Figure 1 The form shown or any other suitable form, as long as the distal end of the bonding cleaver 100 has Figures 2A to 2D The structure shown is sufficient.

[0043] Continue to refer to the appendix Figures 2A to 2D The end face 102 includes a central annular region 120 concentrically disposed near the through hole 101, the radially inner side of the central annular region 120 intersecting the inner circumferential surface of the through hole 101. For example... Figure 2B As shown, the central annular region 120 includes multiple inner circumferential depressions 104.

[0044] As shown in the figure, the inner circumferential recesses 104 are evenly arranged circumferentially within the central annular region 120, and the inner circumferential recesses 104 are spaced apart from each other by a certain distance. The shape of the inner circumferential recesses 104 on the end face 102 is approximately an isosceles triangle (see figure). Figure 2B and 2C One side 104a of the triangle is located radially inside the central annular region 120, while the other two sides 104b and 104c extend obliquely radially outside the central annular region 120, spanning the entire annular width of the central annular region 120 (i.e., the distance between the radially inside and radially outside of the central annular region 120). In some embodiments of this application, the annular width of the central annular region 120 is set to 1 micrometer to 10 micrometers. In the illustrated embodiment, the outer width W of the inner circumferential recess 104 at the radially outer side of the central annular region 120 (i.e., the side away from the through hole 102) is... out Approximately equal to 0, the inner width W of the inner circumferential recess 104 at the radially inner side of the central annular region 120 (i.e., the side closer to the through hole 102) is approximately 0. in The value of (i.e., the distance between the two side walls of the inner circumferential depression) can be 2 micrometers to 7 micrometers, which is greater than the outer width W. in .

[0045] It is understood that in some embodiments, the triangle formed by the inner circumferential recess 104 on the end face 102 may not be an isosceles triangle, and its two sides 104b and 104c are not equal to each other, and the included angle between them can be 30 degrees to 120 degrees.

[0046] like Figure 2D As shown, the inner circumferential recess 104 is recessed from the end face 102. The inner circumferential recess 104 has a roughly rectangular shape on the inner circumferential surface of the through hole 102. The depth d1 of the inner circumferential recess 104 relative to the end face 102 is 1 micrometer to 5 micrometers.

[0047] Continue to refer to Figures 2A to 2D The end face 102, in the radially outer region of the central annular region 120, also includes a plurality of peripheral recesses 106, the depth d2 of which is 1 micrometer to 5 micrometers relative to the end face 102. In some embodiments of this application, the depth d2 of the peripheral recesses 106 is equal to the depth d1 of the inner peripheral recesses 104, in order to better compress the metal. A plurality of peripheral recesses 106 are uniformly disposed within the peripheral annular region 140 concentrically arranged with the through hole 102, and span the circumferential width of the peripheral annular region 140. The bases of the peripheral recesses 106 within the same peripheral annular region 140 are adjacent to each other. In some embodiments of this application, the circumferential width of the peripheral annular region 140 is 1 micrometer to 10 micrometers. In the illustrated embodiment, the radially innermost peripheral annular region 140 is adjacent to the central annular region 120, and adjacent peripheral annular regions 140 are also adjacent to each other. In some embodiments of this application, the central annular region 120 and the adjacent outer annular region 140, and / or the two adjacent outer annular regions 140 may be spaced apart by a certain distance, for example, 3 micrometers to 15 micrometers.

[0048] As shown in the figure, most of the peripheral recesses 106 are circular in shape on the end face 102, and the circumferential width of the peripheral annular region 140 where these peripheral recesses 106 are located is equal to the diameter of the peripheral recesses 106. However, in the peripheral annular region 140 near the outer wall 103, the peripheral recesses 106 are partially circular on the end face 102; therefore, the circumferential width of the peripheral annular region 140 where these peripheral recesses 106 are located is smaller than the circumferential width of the peripheral annular region 140 located radially inward. In some embodiments, it is also possible to... Figure 2B The outermost annular region 140 shown has no recesses, but transitions smoothly to the outer wall 103 with a plane (when FA equals 0) or a conical surface (when FA is greater than 0).

[0049] exist Figures 2A to 2DIn the embodiment shown, the end face 102 includes five outer annular regions 140. However, the number of outer annular regions 140 is not limited to five, and can be adjusted according to actual needs, for example, to one, two, three, four, six, seven or more.

[0050] Figures 3A to 3C An exemplary embodiment of a bonding cleaver 200 according to a second embodiment of this application is shown, wherein... Figure 3A This is a perspective view of the bonded cleaver 200; Figure 3B From Figure 3A Top view of the bonding cleaver 200 viewed from above; Figure 3C yes Figure 3B A magnified view of the area within the dashed box.

[0051] and Figures 2A to 2D Compared to the bonding cleaver 100 shown, Figures 3A to 3B The main difference between the bonding cleaver 200 shown is that the shape of the inner circumferential recess 204 in the central annular region 220 is different from that of the inner circumferential recess 104 of the bonding cleaver 100. The following will mainly introduce the differences between the bonding cleaver 200 and the bonding cleaver 100. For the similarities between the two, please refer to the description of the bonding cleaver 100, which will not be repeated here.

[0052] refer to Figures 3A to 3C The inner circumferential recess 204 within the central annular region 220 has a generally trapezoidal shape at the end face 202. It includes a bottom edge 204a located radially inward of the central annular region 220, a top edge 204d located radially outward of the central annular region 220, and two side edges 204b and 204c connecting the bottom edge 204a and the top edge 204d. In the embodiment shown in the figure, the length of the bottom edge 204a (corresponding to the inner width W of the inner circumferential recess 204) in The length of the top edge 204d is greater than the outer width W of the inner circumferential recess 204. out The ratio between the two is 1.5 to 5 times. The length of side 204b is less than that of side 204c, thus causing the inner circumferential recess 204 within the central annular region 220 to face to one side ( Figure 3B It extends obliquely in a counterclockwise direction. In some embodiments of this application, the length of side 204b is set to be greater than the length of side 204c, so that the inner circumferential recess 204 extends towards the counterclockwise direction. Figure 3C The inner circumferential recess 204 extends obliquely to the opposite side. In some embodiments of this application, the two sides 204b and 204c of the inner circumferential recess 204 are equal, so that the inner circumferential recess 204 extends radially from the radially inner side of the central annular region 220 to the radially outer side (i.e., arranged radially).

[0053] Similar to the bonding cutter 100, the end face 202 of the bonding cutter 200 also has multiple outer peripheral annular regions 240 located radially outside the central annular region 220, in which multiple outer peripheral recesses 206 are evenly arranged. The relevant features of the outer peripheral annular regions 240 and the outer peripheral recesses 206 can be referred to the previous description of the bonding cutter 100, and will not be repeated here.

[0054] Figures 4A to 4B An exemplary embodiment of a bonding cleaver 300 according to a third embodiment of this application is shown, wherein... Figure 4A This is a perspective view of the bonded cleaver 300; Figure 4B From Figure 4A The top view of the bonding cleaver 300 as seen from above.

[0055] and Figures 2A to 2D Compared to the bonding cleaver 100 shown, Figures 4A to 4B The main difference between the bonded cleaver 300 shown is that the arrangement of the outer peripheral recesses 306 is different. The following will mainly introduce the differences between the bonded cleaver 300 and the bonded cleaver 100. For the similarities between the two, please refer to the description of the bonded cleaver 100.

[0056] refer to Figures 4A to 4B The peripheral recesses 306 are arranged in a rectangular matrix instead of within the peripheral annular region 140 as in the bonding cutter 100. Specifically, the peripheral recesses 306 are arranged along the four sides of the dashed rectangular frame in the figure. Most of the peripheral recesses 306 are circular at the end face 302, with only those near the central annular region 320 and near the outer side wall 303 of the bonding cutter 300 being part of a circle.

[0057] In some embodiments, the peripheral recesses 106 may also be arranged in other ways as a polygonal matrix, such as a triangular matrix (i.e., the peripheral recesses are arranged along the sides of a triangle), a pentagonal matrix, a hexagonal matrix, a heptagonal matrix, an octagonal matrix, etc.

[0058] Figures 5A to 5B An exemplary embodiment of a bonding cleaver 400 according to a fourth embodiment of this application is shown, wherein... Figure 5A This is a perspective view of the bonded cleaver 400; Figure 4B From Figure 4A Top view of the Bonded Cleaver 400 as viewed from above.

[0059] and Figures 4A to 4B Compared to the bonding cleaver 300 shown, Figures 5A to 5BThe main difference between the bonded cleaver 400 and the bonded cleaver 100 is that the shape of the inner circumferential recess 204 in the central annular region 220 is different from that of the inner circumferential recess 104 in the bonded cleaver 100. The following will mainly introduce the differences between the bonded cleaver 400 and the bonded cleaver 300. For the similarities between the two, please refer to the description of the bonded cleaver 300.

[0060] refer to Figures 5A to 5B The inner circumferential recess 404 within the central annular region 420 has a roughly trapezoidal shape at the end face 402, similar in shape to the inner circumferential recess 204 of the bonding wedge 200. The length of the base of the inner circumferential recess 404 (i.e., the inner width W of the inner circumferential recess 404) is... in The length of the top edge is greater than the outer width W of the inner circumferential recess 404. out The ratio between the two is the inner width W. in The outer width W out 1.5 to 5 times, with an inner circumferential depression 404 facing one side ( Figure 5B It extends obliquely in a counterclockwise direction. The shape, structure and arrangement of the inner circumferential recess 404 can be referred to the description of the inner circumferential recess 204 of the bonding cutter 200, and will not be repeated here.

[0061] Similar to the bonding cleaver 300, the end face 402 of the bonding cleaver 400 is also provided with a plurality of peripheral recesses 406 located radially outside the central annular region 420. These peripheral recesses 406 are arranged in a rectangular matrix similar to those of the bonding cleaver 300. The shape, structure and arrangement of the peripheral recesses 406 can be referred to the above description of the bonding cleaver 300.

[0062] Figures 6A to 6C The head of a bonding cleaver 500 according to a fifth embodiment of this application is shown exemplarily, wherein... Figure 6A This is a perspective view of the bonded cleaver 500; Figure 6B From Figure 6A Top view of the Bonded Cleaver 500 (viewed from above). Figure 6C It is a bonded cleaver 500 edge Figure 6B A cross-sectional view along line AA in the middle.

[0063] and Figures 2A to 2D Compared to the bonding cleaver 100 shown, Figures 6A to 6B The main difference of the bonding cutter 500 shown is that the end face 502 has multiple peripheral protrusions 506 located radially outward from the central annular region 520.

[0064] like Figure 6A and 6CAs shown, a plurality of inner circumferential recesses 504 are uniformly arranged in the central annular region 520. The inner circumferential recesses 504 present a triangular shape on the end face 502 that is the same as the inner circumferential recesses 104 of the bonding cutter 100. The shape, structure, and arrangement of the inner circumferential recesses 504 can be referred to the above description of the bonding cutter 100.

[0065] As shown in the figure, the end face 502 of the bonding cutter 500 has multiple peripheral protrusions 506 radially outside the central annular region 520. These peripheral protrusions 506 are arranged within the peripheral annular region 540 concentrically with the through hole 502. Figure 6B Five peripheral annular regions 540 are shown. The top of the peripheral protrusion 506 is located within the end face 502, and its height h2 from the base 506b to the end face 502 is 1 micrometer to 5 micrometers, and is equal to the depth d1 of the inner peripheral recess 504. In some embodiments, the height h2 of the peripheral protrusion 506 may be greater than or less than the depth d1 of the inner peripheral recess 504.

[0066] In the illustrated embodiment, most of the peripheral protrusions 506 are cylindrical, with only the peripheral protrusions 505 near the outer sidewall 503 being partially cylindrical. Within the same peripheral annular region 540, the bases of the peripheral protrusions 506 are arranged adjacent to each other circumferentially, and adjacent peripheral annular regions 540 are also adjacent to each other. In some embodiments of this application, the peripheral annular regions 540 are spaced apart by recesses. In some embodiments, the peripheral protrusions 506 within the same peripheral annular region 540 can also be spaced apart by recesses. Similarly, the central annular region 520 and the adjacent peripheral annular region 540 can also be spaced apart by recesses, instead of the illustrated arrangement where they are adjacent to each other.

[0067] Figures 7A to 7B The head of a bonding cleaver 600 according to a sixth embodiment of this application is illustrated exemplarily, wherein... Figure 7A This is a perspective view of the bonded cleaver 600; Figure 7B From Figure 7A Top view of the Bonded Cleaver 600 as viewed from above.

[0068] and Figures 6A to 6C Compared to the bonding cleaver 500 shown, Figures 7A to 7B The main difference between the bonded cleaver 600 and the bonded cleaver 500 is that the shape of the inner circumferential recess 604 in the central annular region 620 is different from that of the inner circumferential recess 504 in the bonded cleaver 500. The following will mainly introduce the differences between the bonded cleaver 600 and the bonded cleaver 500. For the similarities between the two, please refer to the description of the bonded cleaver 500, which will not be repeated here.

[0069] refer to Figures 7A to 7BThe inner circumferential recess 604 within the central annular region 620 has a roughly trapezoidal shape at the end face 602, similar in shape to the inner circumferential recess 204 of the bonding cutter 200. The length of the base of the inner circumferential recess 604 (i.e., the inner width W of the inner circumferential recess 604) is... in The length of the top edge is greater than the outer width W of the inner circumferential recess 604. out The ratio between the two is the inner width W. in The outer width W out 1.5 to 5 times, with an inner circumferential depression 604 on one side ( Figure 5B It extends obliquely in a counterclockwise direction. The shape, structure and arrangement of the inner circumferential recess 604 can be referred to the description of the inner circumferential recess 204 of the bonding cutter 200, and will not be repeated here.

[0070] Similar to the bonding cutter 500, the end face 602 of the bonding cutter 600 is also provided with a plurality of peripheral protrusions 606 located radially outside the central annular region 620. These peripheral protrusions 606 are similar to the peripheral protrusions 506 of the bonding cutter 500, and are also evenly arranged in the peripheral annular region concentric with the through hole. Therefore, the shape, structure and arrangement of the peripheral recesses 606 can be referred to the above description of the bonding cutter 500.

[0071] Figures 8A to 8B The head of a bonding cleaver 700 according to a seventh embodiment of this application is shown exemplarily, wherein... Figure 8A This is a perspective view of the bonded cleaver 700; Figure 8B From Figure 8A Top view of the Bonded Cleaver 700 as viewed from above.

[0072] and Figures 6A to 6C Compared to the bonding cleaver 500 shown, Figures 8A to 8B The main difference between the bonded cleaver 700 shown is that the arrangement of the outer peripheral protrusions 706 is different. The following will mainly introduce the differences between the bonded cleaver 700 and the bonded cleaver 500. For the similarities between the two, please refer to the description of the bonded cleaver 500.

[0073] refer to Figures 8A to 8B The peripheral protrusions 706 are arranged in a rectangular matrix rather than within the peripheral annular region 540 as in the bonding cutter 500. Specifically, the peripheral protrusions 706 are arranged along the four sides of the dashed rectangle in the figure. Most of the peripheral protrusions 706 are cylindrical, except for a portion of the cylindrical shape near the central annular region 720 and near the outer side wall 703 of the bonding cutter 700.

[0074] In some embodiments, the peripheral protrusions 706 may also be arranged in other ways as a polygonal matrix, such as a triangular matrix (i.e., the peripheral recesses are arranged along the sides of the triangles), a pentagonal matrix, a hexagonal matrix, a heptagonal matrix, an octagonal matrix, etc.

[0075] Figures 9A to 9B The head of a bonding cleaver 800 according to an eighth embodiment of this application is illustrated exemplarily, wherein... Figure 9A This is a perspective view of the bonded cleaver 800; Figure 9B From Figure 9A Top view of the Bonded Cleaver 800 as viewed from above.

[0076] and Figures 8A to 8B Compared to the bonded cleaver 700 shown, Figures 9A to 9B The main difference between the bonded cleaver 800 and the bonded cleaver 700 is that the shape of the inner circumferential recess 204 in the central annular region 820 is different from that of the inner circumferential recess 704 in the bonded cleaver 700. The following will mainly introduce the differences between the bonded cleaver 800 and the bonded cleaver 700. For the similarities between the two, please refer to the description of the bonded cleaver 700, which will not be repeated here.

[0077] refer to Figures 9A to 9B The inner circumferential recess 804 within the central annular region 820 has a roughly trapezoidal shape at the end face 802, similar in shape to the inner circumferential recess 604 of the bonding cutter 600. The length of the base of the inner circumferential recess 804 (i.e., the inner width W of the inner circumferential recess 804) is... in The length of the top edge is greater than the outer width W of the inner circumferential recess 804. out The ratio between the two is the inner width W. in The outer width W out 1.5 to 5 times, with an inner circumferential depression 804 on one side ( Figure 9B It extends obliquely in a counterclockwise direction. The shape, structure and arrangement of the inner circumferential recess 904 can be referred to the description of the inner circumferential recess 604 of the bonding cutter 600, and will not be repeated here.

[0078] Similar to the bonding cleaver 700, the end face 802 of the bonding cleaver 800 is also provided with a plurality of peripheral protrusions 806 located radially outside the central annular region 820. These peripheral protrusions 806 are arranged in a rectangular matrix similar to those of the bonding cleaver 700. The shape, structure and arrangement of the peripheral protrusions 806 can be referred to the above description of the bonding cleaver 700.

[0079] Figures 10A to 10D The head of a bonding cleaver 900 according to a ninth embodiment of this application is shown exemplarily, wherein... Figure 10A This is a perspective view of the bonded cleaver 900; Figure 10B From Figure 10ATop view of the Bonded Cleaver 900, viewed from above. Figure 10C yes Figure 10B A magnified view of the area within the dashed box; Figure 10D It is a bonded cleaver 900 along Figure 10B A cross-sectional view along line AA in the middle.

[0080] and Figures 6A to 6C Compared to the bonding cleaver 500 shown, Figures 10A to 10D The main difference between the bonded cleaver 900 shown is the shape and arrangement of the outer peripheral protrusions 906. The following will mainly introduce the differences between the bonded cleaver 900 and the bonded cleaver 500. For the similarities between the two, please refer to the description of the bonded cleaver 500, which will not be repeated here.

[0081] refer to Figures 10A to 10D Multiple inner circumferential recesses 904 are evenly arranged within the central annular region 920. The inner circumferential recesses 904 present a triangular shape on the end face 902, which is the same as the inner circumferential recesses 504 of the bonding cutter 500. The shape, structure, and arrangement of the inner circumferential recesses 904 can be referred to the above description of the bonding cutter 500.

[0082] As shown in the figure, the end face 902 of the bonding cutter 900 has a plurality of spaced peripheral protrusions 906 on the radially outer side of the central annular region 920. The top of the peripheral protrusions 906 is located inside the end face 902, and their height h2 from the base 906b to the end face 902 is 1 micrometer to 5 micrometers, and is equal to the depth d1 of the inner peripheral recess 904. In some embodiments, the height h2 of the peripheral protrusions 906 may be greater than or less than the depth d1 of the inner peripheral recess 904.

[0083] exist Figure 10A In the illustrated embodiment, the outer peripheral protrusion 906 is constructed in the form of a fan-shaped column (i.e., a column with a fan-shaped cross-section). Multiple outer peripheral protrusions 906 are evenly arranged concentrically within the outer peripheral annular region 940 of the through-hole 902. The outer peripheral protrusions 906 extend radially across the annular width of the outer peripheral annular region 940, and the annular width can be 1 micrometer to 10 micrometers. In the illustrated embodiment, the end face 902 includes five outer peripheral annular regions 940, wherein the annular width of the outermost outer peripheral annular region 940 is smaller than that of the other outer peripheral annular regions 940. However, it is understood that the number of outer peripheral annular regions 940 can be adjusted according to actual needs, for example, to 1, 2, 3, 4, 6, 7, or more. In some embodiments, all outer peripheral annular regions 904 can be configured to have the same annular width. In some embodiments, the outer peripheral annular regions 904 can be... Figure 10B The outermost annular region 904 shown is formed as a continuous annular protrusion to smoothly transition to the outer wall of the bonding cutter 900.

[0084] exist Figures 10A to 10DIn the illustrated embodiment, the central annular region 920 is spaced apart from the innermost outer annular region 940 by a certain distance S1, and adjacent outer annular regions 940 are also spaced apart by a certain distance S2. S1 and S2 can be set to 3 micrometers to 15 micrometers. The distance S3 between two adjacent outer annular protrusions 906 within the same outer annular region 940 is set to 3 micrometers to 15 micrometers, and the values ​​of S1, S2, and S3 are equal. In some embodiments, the spacings S1, S2, and S3 may be different from each other or only partially the same, and this application does not intend to limit this.

[0085] Figures 11A to 11B The head of a bonding cleaver 1000 according to a sixth embodiment of this application is shown exemplarily, wherein... Figure 11A This is a perspective view of the bonded cleaver 1000; Figure 11B From Figure 11A Top view of the Bonded Cleaver 1000 as viewed from above.

[0086] and Figures 10A to 10D Compared to the bonding cleaver 900 shown, Figures 11A to 11B The main difference between the bonding cleaver 1000 and the bonding cleaver 900 is that the shape of the inner circumferential recess 1004 in the central annular region 1020 is different from that of the inner circumferential recess 904 in the bonding cleaver 900. The following will mainly introduce the differences between the bonding cleaver 1000 and the bonding cleaver 900. For the similarities between the two, please refer to the description of the bonding cleaver 900, which will not be repeated here.

[0087] refer to Figures 11A to 11B The inner circumferential recess 1004 within the central annular region 1020 has a roughly trapezoidal shape at the end face 1002, similar in shape to the inner circumferential recess 204 of the bonding wedge 200. The length of the base of the inner circumferential recess 1004 (i.e., the inner width W of the inner circumferential recess 1004) in The length of the top edge is greater than the outer width W of the inner circumference recess 1004. out The ratio between the two is the inner width W. in The outer width W out 1.5 to 5 times, with an inner circumferential depression of 1004 on one side ( Figure 5B It extends obliquely in a counterclockwise direction. The shape, structure and arrangement of the inner circumferential recess 1004 can be referred to the description of the inner circumferential recess 204 of the bonding cutter 200, and will not be repeated here.

[0088] Similar to the bonding cutter 900, the outer peripheral protrusion 1006 of the bonding cutter 1000 is also constructed in the form of a fan-shaped ring column. The outer peripheral protrusion 1006 is arranged within the outer peripheral annular region 1040, which is concentric with the through hole. The outer peripheral protrusions 1006 within the same outer peripheral annular region 1040 are spaced apart by a certain distance. The inner peripheral annular region 1020 and the adjacent outer peripheral annular region 1040, as well as the adjacent outer peripheral annular regions 1040, are also spaced apart by a certain distance. For details on the shape, structure, and arrangement of the outer peripheral protrusion 1006 and the outer peripheral annular region 1040, please refer to the above description of the bonding cutter 900, which will not be repeated here.

[0089] Although the various embodiments of this application use metal leads and nickel-palladium-gold frames with different properties as welding materials, this application does not limit the welding materials. Those skilled in the art will understand that any suitable form of welding material can be used in the various embodiments of this application.

[0090] Although the various embodiments shown in the accompanying drawings are not explicitly illustrated, those skilled in the art will understand that, in order to improve the bonding effect, arc-shaped transition surfaces can be provided at the junctions of the surfaces in the bonding wedge. For example, an arc-shaped transition portion can be provided at the junction of the cylindrical surface and the inner conical surface of the through hole, and an arc-shaped transition portion can be provided at the junction of the inner conical surface and the end face, etc. Those skilled in the art can combine them arbitrarily according to actual needs.

[0091] Those skilled in the art can use appropriate existing measurement methods to determine the height, inner cone angle, bottom side length, and top side length of the protrusion, for example, by using 3D scanning to measure these parameters, and this application does not limit this.

[0092] The discussion herein includes numerous illustrative drawings that illustrate the structure of the distal end of a bonding cleaver according to different embodiments. For clarity, these drawings do not show all aspects of each embodiment. Any embodiment provided herein may share any or all features with any or all other embodiments provided herein, and features in different embodiments may be combined arbitrarily as needed, all within the scope of protection of this application.

[0093] Various embodiments have been described herein with reference to the accompanying drawings. However, it is apparent that various modifications and changes can be made thereto, and other embodiments can be implemented without departing from the broader scope of the invention as set forth in the appended claims. For example, the shapes of the inner circumferential recess, outer circumferential recess, and outer circumferential protrusion are not limited to those illustrated, and can be constructed in other forms. For instance, the shape of the inner circumferential recess on the inner circumferential surface of the through hole is not limited to the generally rectangular shape illustrated, but can also be generally V-shaped, U-shaped, or trapezoidal. The shape of the outer circumferential recess on the end face is not limited to the circular shape illustrated, but can also be elliptical, triangular, rectangular, trapezoidal, fan-shaped, etc. In addition to the cylindrical and fan-shaped cylindrical outer circumferential protrusions illustrated, the outer circumferential protrusion can also be constructed as one of the following: cylindrical, hemispherical, conical, arched, polygonal prism, polygonal pyramid, polygonal frustum, fan-shaped cone, or fan-shaped frustum.

[0094] Furthermore, other embodiments will be apparent to those skilled in the art upon consideration of the practice of one or more embodiments of the present invention disclosed herein. Therefore, the embodiments in this application and herein are intended to be considered exemplary only, and the true scope and spirit of the present invention are indicated by the list of exemplary claims appended.

Claims

1. A bonding cleaver, comprising: The main body has a through hole extending through it along its axis, and the head of the main body has an end face intersecting the inner circumferential surface of the through hole. The end face includes a central annular region concentrically disposed with the through hole, and the radially inner side of the central annular region intersects the inner circumferential surface of the through hole. Multiple inner circumferential recesses are uniformly spaced along the circumference within the central annular region. The inner circumferential recesses extend from the radially inner side of the central annular region to the radially outer side of the central annular region, and the inner width of the inner circumferential recess on the radially inner side of the central annular region is greater than the outer width of the inner circumferential recess on the radially outer side of the central annular region.

2. The bonding cleaver according to claim 1, characterized in that, The inner circumferential recess is triangular or trapezoidal in shape on the end face.

3. The bonding cleaver according to claim 1, characterized in that, The inner circumferential recess on the inner surface of the through hole is one of the following shapes: V-shaped, U-shaped, rectangular, or trapezoidal.

4. The bonding cleaver according to claim 2, characterized in that, The inner circumferential recess is trapezoidal in shape on the end face, and the inner width of the inner circumferential recess is 1.5-5 times its outer width.

5. The bonding cleaver according to any one of claims 1-4, characterized in that, The depth d1 of the inner circumferential recess relative to the end face is 1 micrometer to 5 micrometers.

6. The bonding cleaver according to any one of claims 1-4, characterized in that, The region on the end face located radially outside the central annular region also includes a plurality of peripheral protrusions, which are disposed in at least one peripheral annular region arranged concentrically with the through hole, wherein the peripheral annular region is adjacent to or spaced apart from the central annular region by a certain distance.

7. The bonding cleaver according to any one of claims 1-4, characterized in that, The region on the end face located radially outside the central annular region also includes a plurality of peripheral recesses, which are disposed in at least one peripheral annular region arranged concentrically with the through hole, wherein the peripheral annular region is adjacent to or spaced apart from the central annular region by a certain distance.

8. The bonding cleaver according to claim 6, characterized in that, The distance between the central annular region and the outer annular region is 3 micrometers to 15 micrometers.

9. The bonding cleaver according to claim 7, characterized in that, The distance between the central annular region and the outer annular region is 3 micrometers to 15 micrometers.

10. The bonding cleaver according to claim 6, characterized in that, The end face includes at least two outer annular regions, and the distance between adjacent outer annular regions is 3 micrometers to 15 micrometers.

11. The bonding cleaver according to claim 7, characterized in that, The end face includes at least two outer annular regions, and the distance between adjacent outer annular regions is 3 micrometers to 15 micrometers.

12. The bonding cleaver according to any one of claims 1-4, characterized in that, The end face also includes multiple peripheral protrusions in the radially outer region of the central annular area, and the multiple peripheral protrusions are arranged in a polygonal matrix.

13. The bonding cleaver according to any one of claims 1-4, characterized in that, The end face also includes multiple peripheral recesses in the radially outer region of the central annular area, and the multiple peripheral recesses are arranged in a polygonal matrix.

14. The bonding cleaver according to claim 6, characterized in that, The outer peripheral protrusion is one of the following: cylindrical, hemispherical, conical, arched, polygonal prism, polygonal pyramid, fan-shaped prism, or fan-shaped pyramid.

15. The bonding cleaver according to claim 12, characterized in that, The outer peripheral protrusion is one of the following: cylindrical, hemispherical, conical, arched, polygonal prism, polygonal pyramid, fan-shaped prism, or fan-shaped pyramid.

16. The bonding cleaver according to claim 7, characterized in that, The outer peripheral recess on the end face has a shape that is one of the following: circular, elliptical, triangular, rectangular, trapezoidal, or fan-shaped.

17. The bonding cleaver according to claim 13, characterized in that, The outer peripheral recess on the end face has a shape that is one of the following: circular, elliptical, triangular, rectangular, trapezoidal, or fan-shaped.

18. The bonding cleaver according to claim 7, characterized in that, The depth d1 of the inner circumferential depression is equal to the depth d2 of the outer circumferential depression.

19. The bonding cleaver according to claim 13, characterized in that, The depth d1 of the inner circumferential depression is equal to the depth d2 of the outer circumferential depression.

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