A modular removal device for low temperature adsorption of carbon monoxide from silane gas

Abstract

The utility model provides a kind of modularization removal device of silane gas low-temperature adsorption carbon monoxide, including the mounting bracket for installing removal device, the removal device is fluidly connected with low-temperature adsorption mechanism, the removal device includes: removal shell is installed on the mounting bracket by fixed assembly, the removal shell top is fluidly connected with exhaust component, bottom is fluidly connected with air intake component, the air intake component is fluidly connected with the low-temperature adsorption mechanism by conveying component.The utility model can further improve impurity removal effect, effectively ensure the quality of silane gas, and the whole production process is more safe and reliable, reduces potential risk.

Description

Technical Field

[0001] This utility model relates to a carbon monoxide removal device, and more particularly to a modular removal device for carbon monoxide by low-temperature adsorption of silane gas. Background Technology

[0002] This section provides only background information relevant to this disclosure and is not necessarily prior art.

[0003] In industries such as semiconductor manufacturing, the purity requirements for silane gas are extremely high. If silane gas contains trace amounts of carbon monoxide impurities, it may affect the quality of the product. Under certain process conditions, carbon monoxide may undergo unnecessary chemical reactions with silane or other substances, generating unwanted byproducts. Therefore, removing carbon monoxide during the purification process helps ensure the high purity of the final gas and avoid these potential problems.

[0004] In the prior art (CN218485564U), an integrated cryogenic adsorption device for high-temperature gas-cooled reactors is proposed. However, this device has the following problems in its implementation:

[0005] Poor carbon monoxide removal results in reduced purity of silane gas, which also increases safety risks during production, potentially threatening the health of operators and causing fires or explosions. Therefore, a modular carbon monoxide removal device for low-temperature adsorption of silane gas is needed.

[0006] It should be noted that the information disclosed in the background section above is only used to enhance the understanding of the background of this disclosure, and therefore may include information that does not constitute prior art known to those skilled in the art. Utility Model Content

[0007] Purpose of the invention: The technical problem to be solved by this utility model is to provide a modular removal device for carbon monoxide by low-temperature adsorption of silane gas, which addresses the shortcomings of the existing technology.

[0008] To address the aforementioned technical problems, this utility model discloses a modular removal device for carbon monoxide by low-temperature adsorption of silane gas, comprising a mounting bracket for installing the removal device, wherein the removal device is fluidly connected to a low-temperature adsorption mechanism, and the removal device includes:

[0009] The removal shell is mounted on the mounting bracket by a fixing component. The top of the removal shell is fluidly connected to the exhaust component, and the bottom is fluidly connected to the intake component. The intake component is fluidly connected to the low-temperature adsorption mechanism through a conveying component.

[0010] Furthermore, the shell removal includes:

[0011] A hollow removal tube, wherein an activated carbon filter, activated carbon particles and a molecular sieve are installed inside the removal tube.

[0012] Furthermore, the shell removal also includes:

[0013] A sealing cap is threaded to the upper and lower ends of the removal tube, and a connecting pipe is fixedly installed on the sealing cap. The connecting pipe at the bottom is connected to the air intake assembly, and the connecting pipe at the top is connected to the exhaust assembly. A valve is provided on the connecting pipe.

[0014] Furthermore, the fixing component includes:

[0015] A pad is disposed between the removal tube and the mounting bracket;

[0016] A rubber-coated U-shaped clip is installed on the outside of the removal tube. Both ends of the rubber-coated U-shaped clip pass through the pad and are threaded to the mounting bracket. Both ends of the rubber-coated U-shaped clip are threaded and are fixed by nuts after passing through the mounting bracket.

[0017] Furthermore, the intake assembly includes:

[0018] Two L-shaped tubes are symmetrically arranged below the shell, and the L-shaped tubes are fluidly connected to the connecting tube located at the bottom;

[0019] The L-shaped tube is fluidly connected via a tee connector, the third end of which is fluidly connected to a hollow mounting rod, and the other end of which is fluidly connected to the conveying assembly.

[0020] Furthermore, the conveying assembly includes:

[0021] The fan has its input end connected to the outlet end of the low-temperature adsorption mechanism via a delivery pipe; and its output end is connected to the air intake assembly via an output pipe.

[0022] Furthermore, the activated carbon filter is horizontally arranged inside the removal tube.

[0023] Furthermore, two sets of fixing blocks are installed on the inner wall of the removal tube above the activated carbon filter screen, and two stainless steel circular perforated plates are respectively set on the two sets of fixing blocks. The activated carbon particles and the molecular sieve are respectively provided on the stainless steel circular perforated plates.

[0024] Furthermore, the number of activated carbon filters is set to multiple.

[0025] Furthermore, the number of shells to be removed is set to multiple.

[0026] Beneficial effects:

[0027] This invention uses a low-temperature adsorption mechanism to adsorb silane gas at low temperatures. After adsorption, the gas passes through a conveying assembly and an inlet assembly into a removal shell. Then, it passes through multiple conveying components, activated carbon particles, and molecular sieves in the removal shell, thereby further improving the impurity removal effect, effectively ensuring the quality of the silane gas, and making the entire production process safer and more reliable, reducing potential risks. Attached Figure Description

[0028] The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments, and the advantages of the present invention in the above and / or other aspects will become clearer.

[0029] Figure 1 This is a schematic diagram of the overall structure proposed in this utility model.

[0030] Figure 2 A schematic diagram of the conveying component is provided for this utility model.

[0031] Figure 3 A schematic diagram of the structure for removing the shell is provided for this utility model.

[0032] Figure 4 A structural schematic diagram of the fixing component is provided for this utility model.

[0033] In the diagram: 1 is the mounting bracket; 2 is the low-temperature adsorption mechanism; 3 is the removal shell; 31 is the removal tube; 32 is the sealing cap; 33 is the connecting tube; 34 is the valve; 4 is the fixing component; 41 is the pad; 42 is the rubber-coated U-shaped clip; 43 is the nut; 5 is the air intake component; 51 is the L-shaped tube; 52 is the tee connector; 53 is the mounting rod; 6 is the conveying component; 61 is the fan; 62 is the output tube; 63 is the conveying tube; 7 is the activated carbon filter; 8 is the stainless steel circular perforated plate; 9 is the activated carbon granules; 10 is the molecular sieve; 11 is the exhaust component; 12 is the fixing block. Detailed Implementation

[0034] This invention proposes a modular removal device for carbon monoxide through low-temperature adsorption of silane gas, such as... Figure 1 As shown, it includes a mounting bracket 1 and a low-temperature adsorption mechanism 2.

[0035] like Figure 2 As shown, multiple detachable shells 3 are arranged horizontally on both the front and rear sides of the mounting bracket 1. Each of the multiple detachable shells 3 has a fixing component 4 on its outer side wall, and the detachable shells 3 are fixedly connected to the mounting bracket 1 through the fixing component 4.

[0036] An air intake assembly 5 is provided below the shell 3, and multiple shells 3 are connected to the air intake assembly 5.

[0037] The air intake assembly 5 is fluidly connected to the low-temperature adsorption mechanism 2 via the delivery assembly 6.

[0038] like Figure 3 As shown, multiple activated carbon filters 7 are vertically arranged and fixedly installed on the inner wall of the shell 3.

[0039] Two stainless steel circular perforated plates 8 are symmetrically arranged on the inner side of the shell 3, and the stainless steel circular perforated plates 8 are located above the activated carbon filter screen 7. Activated carbon particles 9 and molecular sieves 10 are respectively arranged above the two stainless steel circular perforated plates 8.

[0040] Two sets of fixing blocks 12 are fixedly installed on the inner side of the shell 3, and two stainless steel circular perforated plates 8 are respectively set on the two sets of fixing blocks 12.

[0041] An exhaust assembly 11 is provided above the shell 3, and multiple shells 3 are connected to the exhaust assembly 11.

[0042] In use, the low-temperature adsorption mechanism 2 effectively reduces the thermal motion speed of gas molecules, thereby enhancing the selectivity and adsorption efficiency of the filter for target molecules. Then, through the conveying component 6 and in cooperation with the air inlet component 5, the silane gas after low-temperature adsorption is conveyed to the removal shell 3. The silane gas in the removal shell 3 then passes through multiple activated carbon filters 7, activated carbon particles 9, and molecular sieves 10 in sequence. This gives the device advantages such as high-purity purification, high-efficiency adsorption performance, dual adsorption mechanism, simple regeneration, no additional pollution, and wide applicability. It can further improve the impurity removal effect, effectively ensure the quality of silane gas, and make the entire production process safer and more reliable, reducing potential risks.

[0043] like Figure 4 As shown, the removal shell 3 includes: a removal tube 31 fixedly installed on the mounting bracket 1 by a fixing component 4, and sealing caps 32 are threaded to both the upper and lower ends of the removal tube 31.

[0044] like Figure 3 As shown, connecting pipes 33 are fixedly installed on the sealing caps 32 at both the upper and lower ends. The connecting pipe 33 located below is connected to the air intake assembly 5, and the connecting pipe 33 located above is connected to the exhaust assembly 11. A valve 34 is provided on the connecting pipe 33.

[0045] In use, open the valve 34 on the connecting pipe 33 connected to the air intake assembly 5, so that the silane gas after low-temperature adsorption can be transported to the removal pipe 31 for further filtration, thereby further improving the impurity removal effect, and at the same time, the filtered gas can enter the exhaust assembly 11 and be discharged.

[0046] By unscrewing the sealing cap 32 from the removal tube 31, it is convenient to replace the activated carbon particles 9 and molecular sieve 10 in the removal tube 31 later, and it is also convenient to clean the activated carbon filter screen 7.

[0047] The fixing component 4 includes: a pad 41 disposed on the outside of the removal tube 31 and a rubber-coated U-shaped clip 42, the two ends of the rubber-coated U-shaped clip 42 passing through the pad 41 and threadedly connected to the through holes on the mounting bracket 1 with nuts 43.

[0048] In use, the two ends of the rubber-coated U-shaped clip 42 are manually passed through the holes on the pad 41 and the mounting bracket 1, and then the nut 43 is threaded onto the rubber-coated U-shaped clip 42, so that the shell 3 can be stably fixed on the mounting bracket 1 for use.

[0049] The intake assembly 5 includes two L-shaped pipes 51 symmetrically arranged below the housing 3, and the connecting pipe 33 located below is connected to the L-shaped pipes 51.

[0050] The two L-shaped tubes 51 are connected by a T-joint 52. A hollow mounting rod 53 is fixedly connected to the third end of the T-joint 52, and the other end of the mounting rod 53 is connected to the conveying assembly 6.

[0051] In use, the combination of the mounting rod 53, the three-way connector 52 and the L-shaped tube 51 allows the silane gas after low-temperature adsorption to enter each removal shell 3, thereby improving the filtration effect, extending the service life of the activated carbon filter 7, activated carbon particles 9 and molecular sieve 10 inside the removal shell 3, and also adapting to load changes.

[0052] The conveying assembly 6 includes: a fan 61 disposed between the mounting bracket 1 and the low-temperature adsorption mechanism 2, wherein the input end of the fan 61 is fixedly connected to a conveying pipe 63, and the other end of the conveying pipe 63 is connected to the low-temperature adsorption mechanism 2.

[0053] The output end of the fan 61 is fixedly connected to the output pipe 62, and the other end of the output pipe 62 is connected to the mounting rod 53 through a straight connector.

[0054] In use, the combination of the fan 61, the delivery pipe 63 and the output pipe 62 can increase the airflow speed and pressure difference, so that the silane gas after low-temperature adsorption can quickly enter the removal shell 3. At the same time, the gas can pass through the activated carbon filter 7, the stainless steel circular perforated plate 8 and the molecular sieve 10 at a more uniform speed, which helps to give full play to the best performance of each filter material and further improve the impurity removal rate.

[0055] This invention provides a modular removal device and method for carbon monoxide by low-temperature adsorption of silane gas. Many methods and approaches exist for implementing this technical solution; the above description is merely a preferred embodiment. It should be noted that those skilled in the art can make various improvements and modifications without departing from the principle of this invention, and these improvements and modifications should also be considered within the scope of protection of this invention. All components not explicitly stated in this embodiment can be implemented using existing technology.

Claims

1. A modular removal device of carbon monoxide by low-temperature adsorption of silane gas, comprising a mounting bracket (1) for mounting the removal device, said removal device being fluidly connected to a low-temperature adsorption mechanism (2), characterized in that, The removal device includes: The removal shell (3) is mounted on the mounting bracket (1) by a fixing component (4). The top of the removal shell (3) is fluidly connected to the exhaust component (11), and the bottom is fluidly connected to the intake component (5). The intake component (5) is fluidly connected to the low-temperature adsorption mechanism (2) through a conveying component (6).

2. A modular device for low temperature adsorption of carbon monoxide from silane gas according to claim 1, characterized in that, The shell removal (3) includes: A hollow removal tube (31) is provided, which is equipped with an activated carbon filter (7), activated carbon particles (9) and a molecular sieve (10).

3. A modular device for low temperature adsorptive removal of carbon monoxide from silane gas according to claim 2, characterized in that The shell removal (3) also includes: A sealing cap (32) is threaded to the upper and lower ends of the removal tube (31). A connecting tube (33) is fixedly installed on the sealing cap (32). The connecting tube (33) at the bottom is connected to the air intake assembly (5), and the connecting tube (33) at the top is connected to the exhaust assembly (11). A valve (34) is provided on the connecting tube (33).

4. A modular device for low temperature adsorptive removal of carbon monoxide from silane gas according to claim 3, characterized in that The fixing component (4) includes: A pad (41) is disposed between the removal tube (31) and the mounting bracket (1); A rubber-coated U-shaped clip (42) is provided on the outside of the removal tube (31). The two ends of the rubber-coated U-shaped clip (42) pass through the pad (41) and are threaded to the mounting bracket (1). The two ends of the rubber-coated U-shaped clip (42) are threaded and are fixed by nuts (43) after passing through the mounting bracket (1).

5. The modular removal device for low-temperature adsorption of carbon monoxide by silane gas according to claim 4, characterized in that, The intake assembly (5) includes: Two L-shaped tubes (51) are symmetrically arranged below the removal shell (3), and the L-shaped tubes (51) are fluidly connected to the connecting tube (33) located at the bottom; The L-shaped tube (51) is fluidly connected via a tee connector (52), the third end of which is fluidly connected to a hollow mounting rod (53), and the other end of which is fluidly connected to the conveying assembly (6).

6. The modular removal device for low-temperature adsorption of carbon monoxide by silane gas according to claim 5, characterized in that, The conveying assembly (6) includes: The fan (61) has its input end connected to the outlet end of the low-temperature adsorption mechanism (2) via a delivery pipe (63); and its output end is connected to the air intake assembly (5) via an output pipe (62).

7. A modular device for low temperature adsorption of carbon monoxide from silane gas according to claim 6, characterized in that, The activated carbon filter (7) is horizontally arranged inside the removal tube (31).

8. A modular device for low temperature adsorption of carbon monoxide from silane gas according to claim 7, characterized in that, Two sets of fixing blocks (12) are installed on the inner wall of the removal tube (31) above the activated carbon filter (7). Two stainless steel circular perforated plates (8) are respectively set on the two sets of fixing blocks (12). The stainless steel circular perforated plates (8) are respectively provided with activated carbon particles (9) and molecular sieves (10).

9. A modular device for low temperature adsorption of carbon monoxide from silane gas according to claim 8, wherein, The number of activated carbon filters (7) is set to multiple.

10. A modular device for low temperature adsorption of carbon monoxide from silane gas according to claim 9, wherein, The number of shells removed (3) is set to multiple.

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