Microelectronic chemical solution electrodialysis separator

Abstract

This utility model relates to the field of microelectronic chemistry technology and discloses a microelectronic chemical solution electrodialysis separator, including a membrane layer. The inner side of the membrane layer is hot-pressed with a flow channel mesh. Upper and lower separators are respectively provided on both sides of the membrane layer. Sealing rings are embedded and bonded to the opposing surfaces of the upper and lower separators. During the assembly and use of this electrodialysis separator, the mounting holes and the sleeve rings are used together to achieve sleeve positioning with the positioning rods of the electrodialysis equipment. During assembly, the mounting holes and the sleeve rings must be precisely aligned; this design lays the foundation for subsequent stable connection. Simultaneously, the sleeve rings provide effective support for the upper and lower separators through the positioning rods of the equipment, thereby providing reliable support for the membrane layer clamped between the upper and lower separators. Thus, the covering and positioning of the membrane layer by the upper and lower separators effectively prevents adhesion during the use of the electrodialysis separator.

Description

Technical Field

[0001] This utility model belongs to the field of microelectronic chemistry technology, and specifically relates to a microelectronic chemistry solution electrodialysis separator. Background Technology

[0002] Electrodialysis separators are one of the core components of electrodialysis technology. They are functional plates used to separate adjacent ion exchange membranes (cation exchange membranes and anion exchange membranes) within an electrodialysis device, create independent flow channels, and support the membrane structure to ensure uniform flow of the electrolyte (or the solution to be treated, such as microelectronic chemical solutions, wastewater, seawater, etc.). Together with ion exchange membranes, electrodes, and frames, they constitute the electrodialysis unit and directly affect the separation efficiency, energy consumption, and equipment stability of the electrodialysis process.

[0003] Currently, traditional electrodialysis separators have revealed numerous drawbacks in practical applications. From a structural design perspective, most separators are directly bonded to the ion exchange membrane. While this ensures sufficient space for ion exchange to some extent, it also leads to severe membrane adhesion problems. When the solution flows through the channel between the separator and the membrane, due to adsorption on the membrane surface and the presence of impurities in the solution, the ion exchange membrane easily adheres tightly to the separator surface, resulting in a significant reduction in the effective cross-sectional area of ​​the channel. This membrane adhesion phenomenon is not accidental but an inevitable result of long-term operation and complex solution environments. For example, when treating microelectronic chemical solutions containing trace amounts of metal ions and organic colloids, these impurities gradually deposit on the contact surface between the membrane and the separator, further exacerbating membrane adhesion.

[0004] Channel blockage is another thorny problem stemming from membrane adhesion. As membrane adhesion deteriorates, the flow velocity distribution of the solution within the channels becomes extremely uneven, with some areas experiencing a sharp drop in velocity. This makes it easier for suspended particles and scaling substances in the solution to deposit and accumulate in these areas, ultimately causing channel blockage. Once channel blockage occurs, the operation of the entire electrodialysis system will be severely impacted. First, the obstructed solution flow leads to a significant reduction in throughput, failing to meet the stringent requirements for solution throughput in microelectronics manufacturing processes. Second, channel blockage can also cause localized pressure increases, which not only severely tests the mechanical properties of the separators and ion exchange membranes, potentially leading to membrane rupture and separator deformation, but also increases equipment maintenance costs and replacement frequency. Utility Model Content

[0005] The purpose of this invention is to address the shortcomings of existing technologies by proposing a microelectronic chemical solution electrodialysis separator.

[0006] To achieve the above objectives, the present invention adopts the following technical solution: a microelectronic chemical solution electrodialysis separator, comprising a membrane layer, wherein a flow channel grid is hot-pressed on the inner side of the membrane layer, and an upper separator and a lower separator are respectively provided on both sides of the membrane layer, wherein a sealing ring is embedded and bonded to the opposite surfaces of the upper separator and the lower separator, and a positioning plug and a positioning post are respectively fixedly installed on the opposite surfaces of the upper separator and the lower separator, wherein one end of the positioning post penetrates the membrane layer and is sleeved on the surface of the positioning plug;

[0007] The positioning plug is fixedly sleeved with a retaining ring on its outer side. The surface of the retaining ring is circumferentially distributed with retaining protrusions. The upper and lower spacers are both embedded with retaining rings at equal intervals on both sides.

[0008] Preferably, both the upper and lower partitions have an embedded mounting cavity on their inner sides, which is used in conjunction with a sealing ring for installation and accommodating purposes.

[0009] Preferably, the snap-fit ​​protrusion and the snap-fit ​​ring are integrally formed, and the number of snap-fit ​​protrusions is four.

[0010] Preferably, both ends of the ferrule are formed with inclined edges, and the inner side of the positioning post is provided with a snap-fit ​​cavity.

[0011] Preferably, the inner side of the positioning post is provided with a positioning cavity for insertion into the positioning plug, and the positioning cavity is in communication with the snap-fit ​​cavity.

[0012] Preferably, the shape of the snap-fit ​​cavity matches the snap-fit ​​ring, and its size is 1mm-3mm larger than that of the snap-fit ​​ring.

[0013] Preferably, the inner side of the positioning post is provided with a snap-fit ​​groove, which is used in conjunction with the snap-fit ​​protrusion for snap-fit.

[0014] Preferably, both sides of the membrane layer are provided with through cavities, which are used in conjunction with positioning posts to penetrate the membrane layer, and both sides of the membrane layer are provided with mounting holes corresponding to the sleeve ring.

[0015] In summary, this utility model has the following beneficial effects:

[0016] 1. During the insertion and positioning process of the positioning post and the positioning plug, the positioning plug will be precisely inserted into the positioning cavity with the cooperation of the two parts. At this time, the inner wall of the positioning cavity will compress the retaining ring and retaining protrusion on the surface of the positioning post. As the positioning plug is continuously inserted, the retaining protrusion will gradually move closer to the retaining groove, eventually achieving the retaining positioning of the two parts; at the same time, the retaining ring is exactly inside the retaining cavity. This design achieves a multi-positioning effect, which can effectively improve the assembly stability between the upper and lower spacers and provide a strong guarantee for reliable use in the future.

[0017] 2. During the assembly and use of this electrodialysis partition, the mounting holes and the sleeve ring are used together to achieve sleeve positioning with the positioning rods of the electrodialysis equipment. During assembly, the mounting holes and the sleeve ring must be precisely aligned; this design lays the foundation for a stable connection later. Simultaneously, the sleeve ring, through the positioning rods of the equipment, effectively supports both the upper and lower partitions, thus providing reliable support for the membrane layer clamped between the upper and lower partitions. In this way, the covering and positioning of the membrane layer by the upper and lower partitions effectively prevents adhesion during the use of the electrodialysis partition.

[0018] 3. During the assembly and use of this electrodialysis partition, the membrane layer, along with the flow channel mesh, is applied to the surface of the lower partition. At this time, the through holes of the membrane layer will be fitted onto the surface of the positioning column, forming a preliminary positioning state. Simultaneously, the sealing ring on the surface of the lower partition will contact the membrane layer and form support, while the four through holes provide tension to the membrane layer, ensuring that the membrane layer is flat and tightly covers the surface of the lower partition.

[0019] 4. In the use of electrodialysis separators, the sealing ring is used to effectively ensure the sealing between the upper and lower separators and the membrane layer, and to prevent leakage. The opening of the embedded installation cavity will help improve the overall connection between the sealing ring and the upper and lower separators, and the stability of both under long-term use is ensured by the adhesive and snap-fit ​​embedded method. Attached Figure Description

[0020] Figure 1 This is a three-dimensional structural diagram of the present invention;

[0021] Figure 2 This is a schematic diagram of the membrane layer and flow channel mesh of this utility model;

[0022] Figure 3 This is a schematic diagram of the upper and lower partitions of this utility model;

[0023] Figure 4 This is an exploded view of the upper spacer and sealing ring of this utility model;

[0024] Figure 5 This is an exploded view of the lower partition and sealing ring of this utility model;

[0025] Figure 6 This is an enlarged cross-sectional view of the positioning post and positioning plug of this utility model.

[0026] Figure label:

[0027] 1. Membrane layer; 101. Flow channel mesh;

[0028] 2. Upper partition; 201. Lower partition;

[0029] 3. Sealing ring; 301. Embedded mounting cavity;

[0030] 4. Positioning post; 401. Positioning cavity;

[0031] 5. Location plugin;

[0032] 6. Socket retaining ring; 601. Inclined flange; 602. Snap-fit ​​cavity;

[0033] 7. Snap-fit ​​protrusion; 701. Snap-fit ​​groove;

[0034] 8. Through-cavity;

[0035] 9. Connecting ring; 901. Mounting hole. Detailed Implementation

[0036] To make the technical means, creative features, and achieved objectives and effects of this utility model easier to understand, the present utility model is further described below with reference to specific embodiments and accompanying drawings. However, the following embodiments are merely preferred embodiments of this utility model and not all of them. Other embodiments obtained by those skilled in the art based on the embodiments described in the implementation plan without creative effort are all within the protection scope of this utility model.

[0037] The specific embodiments of this utility model are described below with reference to the accompanying drawings:

[0038] Example:

[0039] refer to Figures 1-6 The microelectronic chemical solution electrodialysis separator includes a membrane layer 1. The inner side of the membrane layer 1 is hot-pressed with a flow channel grid 101. The two sides of the membrane layer 1 are respectively provided with an upper separator 2 and a lower separator 201. The opposing surfaces of the upper separator 2 and the lower separator 201 are embedded with sealing rings 3. The opposing surfaces of the upper separator 2 and the lower separator 201 are respectively fixedly installed with positioning plugs 5 and positioning posts 4. One end of the positioning post 4 penetrates the membrane layer 1 and is sleeved on the surface of the positioning plug 5.

[0040] The outer side of the positioning plug 5 is fixedly sleeved with a retaining ring 6. The surface of the retaining ring 6 is circumferentially distributed with retaining protrusions 7. The upper spacer 2 and the lower spacer 201 are both equally spaced and fixedly embedded with retaining rings 9.

[0041] Specifically, during the assembly and use of this electrodialysis partition, the mounting hole 901 and the sleeve ring 9 are used together to achieve sleeve positioning with the positioning rods of the electrodialysis equipment. During assembly, the mounting hole 901 and the sleeve ring 9 must be precisely aligned; this design lays the foundation for a stable connection later. Simultaneously, the sleeve ring 9 provides effective support for the upper partition 2 and the lower partition 201 through the positioning rods of the equipment, thus providing reliable support for the membrane layer 1 clamped between the upper and lower partitions 201. In this way, the covering and positioning of the membrane layer 1 by the upper partition 2 and the lower partition 201 effectively prevents adhesion during the use of the electrodialysis partition.

[0042] Both the upper partition 2 and the lower partition 201 have an embedded mounting cavity 301 on their inner sides, which is used in conjunction with the sealing ring 3 for installation and accommodation.

[0043] Specifically, the sealing ring 3 is used to effectively ensure the sealing between the upper spacer 2 and the lower spacer 201 and the membrane layer 1 respectively, and can prevent leakage. The opening of the embedded mounting cavity 301 will help improve the overall connection between the sealing ring 3 and the upper spacer 2 and the lower spacer 201 respectively. It ensures the stability of the two under long-term use through the method of adhesion and snap-fit ​​embedding.

[0044] The snap-fit ​​protrusion 7 and the sleeve retaining ring 6 are integrally molded. There are four snap-fit ​​protrusions 7. Both ends of the sleeve retaining ring 6 are formed with inclined edges 601. The inner side of the positioning post 4 is provided with a snap-fit ​​cavity 602. The inner side of the positioning post 4 is provided with a positioning insertion cavity 401 that is inserted into the positioning plug 5. The positioning insertion cavity 401 and the snap-fit ​​cavity 602 are interconnected. The shape of the snap-fit ​​cavity 602 fits the sleeve retaining ring 6, and its size is 1mm-3mm larger than the sleeve retaining ring 6. The inner side of the positioning post 4 is provided with a snap-fit ​​groove 701 in a circular shape. The snap-fit ​​groove 701 is used to snap-fit ​​with the snap-fit ​​protrusion 7.

[0045] Specifically, during the insertion and positioning process of the positioning post 4 and the positioning plug 5, the positioning plug 5 will be precisely inserted into the positioning cavity 401 with the cooperation of the two. At this time, the inner wall of the positioning cavity 401 will compress the sleeve retaining ring 6 and the retaining protrusion 7 on the surface of the positioning post 4. As the positioning plug 5 is continuously inserted, the retaining protrusion 7 will gradually move closer to the retaining groove 701, and finally achieve the retaining positioning of the two; at the same time, the sleeve retaining ring 6 is exactly inside the retaining cavity 602, achieving multiple positioning.

[0046] Both sides of the membrane layer 1 are provided with through cavities 8, which are used in conjunction with the positioning post 4 to penetrate the membrane layer 1. Both sides of the membrane layer 1 are provided with mounting holes 901 corresponding to the sleeve ring 9.

[0047] Specifically, during the assembly and use of the electrodialysis partition, the mounting hole 901 and the sleeve ring 9 are used together to achieve sleeve positioning with the positioning rod of the electrodialysis equipment. Then, the sleeve ring 9 provides effective support for the upper partition 2 and the lower partition 201 through the positioning rod of the equipment.

[0048] The working principle of this utility model is as follows: In the assembly and use process of this electrodialysis partition, the membrane layer 1 and the flow channel mesh 101 are first fixed together using existing mature hot pressing molding technology. Then, the membrane layer 1, together with the flow channel mesh 101, is placed over the surface of the lower partition 201. At this time, the through holes of the membrane layer 1 will correspondingly fit onto the surface of the positioning post 4, forming a preliminary positioning state. The sealing ring 3 on the surface of the lower partition 201 will contact the membrane layer 1 and form support, while the four through holes can provide tension to the membrane layer 1, ensuring that the membrane layer 1 is flat and tightly covered on the surface of the lower partition 201.

[0049] Then, the upper spacer 2 is removed and the positioning plug 5 is inserted into the positioning post 4. The positioning plug 5 will be precisely inserted into the positioning cavity 401 with the cooperation of the two. At this time, the inner wall of the positioning cavity 401 will compress the sleeve retaining ring 6 and the retaining protrusion 7 on the surface of the positioning post 4. As the positioning plug 5 is continuously inserted, the retaining protrusion 7 will gradually move closer to the retaining groove 701, and finally achieve the retaining positioning of the two; at the same time, the sleeve retaining ring 6 is exactly inside the retaining cavity 602, achieving the insertion between the positioning post 4 and the positioning plug 5, and realizing the positioning retaining between the upper spacer 2 and the lower spacer 201.

[0050] During the subsequent assembly and use of the electrodialysis partition, the mounting hole 901 and the sleeve ring 9 are used together to achieve sleeve positioning with the positioning rods of the electrodialysis equipment. Then, the sleeve ring 9 provides effective support for the upper partition 2 and the lower partition 201 through the positioning rods of the equipment. In this way, the upper partition 2 and the lower partition 201 effectively prevent the membrane layer 1 from sticking during use.

[0051] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0052] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely preferred examples and are not intended to limit the utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed utility model. The scope of protection of this utility model is defined by the appended claims and their equivalents.

Claims

1. A microelectronic chemical solution electrodialysis diaphragm, comprising a membrane layer (1), the inner side of the membrane layer (1) is hot-pressed to form a flow channel grid (101), characterized in that: The membrane layer (1) is provided with an upper partition (2) and a lower partition (201) on both sides respectively. The upper partition (2) and the lower partition (201) are both embedded with sealing rings (3). The upper partition (2) and the lower partition (201) are respectively fixedly installed with positioning plugs (5) and positioning posts (4). One end of the positioning post (4) penetrates the membrane layer (1) and is sleeved on the surface of the positioning plugs (5). The positioning plug (5) is fixedly sleeved with a sleeve ring (6), and the surface of the sleeve ring (6) is circumferentially distributed with snap-fit ​​protrusions (7). The upper spacer (2) and the lower spacer (201) are both fixedly embedded with sleeve rings (9) at equal intervals on both sides.

2. The microelectronic chemistry solution electrodialysis spacer of claim 1, wherein: The inner sides of the upper partition (2) and the lower partition (201) are provided with embedded mounting cavities (301), which are used in conjunction with the sealing ring (3) for installation and accommodating purposes.

3. The microelectronic chemical solution electrodialysis spacer of claim 1, wherein: The snap-fit ​​protrusion (7) and the sleeve snap ring (6) are integrally molded, and there are four snap-fit ​​protrusions (7).

4. The microelectronic chemical solution electrodialysis spacer of claim 1, wherein: Both ends of the sleeve retaining ring (6) are formed with inclined edges (601), and the inner side of the positioning post (4) is provided with a retaining cavity (602).

5. The microelectronic chemical solution electrodialysis spacer of claim 4, wherein: The inner side of the positioning post (4) is provided with a positioning cavity (401) for insertion into the positioning plug (5), and the positioning cavity (401) is connected to the snap-fit ​​cavity (602).

6. The microelectronic chemical solution electrodialysis spacer of claim 5, wherein: The shape of the snap-fit ​​cavity (602) matches the snap-fit ​​ring (6), and its size is 1mm-3mm larger than that of the snap-fit ​​ring (6).

7. The microelectronic chemical solution electrodialysis spacer of claim 1, wherein: The inner side of the positioning post (4) is provided with a snap-fit ​​groove (701) in a circular shape, and the snap-fit ​​groove (701) is used in conjunction with the snap-fit ​​protrusion (7) for snap-fit.

8. The microelectronic chemical solution electrodialysis spacer of claim 1, wherein: Both sides of the membrane layer (1) are provided with through cavities (8), which are used in conjunction with the positioning post (4) to penetrate the membrane layer (1). Both sides of the membrane layer (1) are provided with mounting holes (901) corresponding to the sleeve ring (9).

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