Simple type film applicator

Abstract

The utility model provides a simple and easy type even glue machine, include: a top plate, a bottom plate is set in top plate below, a plurality of support plate, its both ends are connected in top plate and bottom plate, top plate, bottom plate and support plate surround and set up a support space, a plurality of baffle, it is opposite in the top plate side of support plate around setting, the baffle is around in the top plate upper space, a rotating platform, set in the operation space of top plate upper middle part, a motor base, set in the support space and be connected to the support plate, the motor base middle part is parallel to the top plate and can supply a motor to set on it, and a power supply device can be connected with the motor and supply power for it. The utility model is applicable to the teaching process of photoetching technology.

Description

Technical Field

[0001] This utility model relates to the field of photolithography equipment, and in particular to a simple spin coater. Background Technology

[0002] Photolithography is a crucial process in semiconductor manufacturing. In the basic steps of photolithography, photoresist is first uniformly coated onto the prepared wafer surface. Then, the photoresist is selectively exposed and developed using light of a specific wavelength. Finally, the exposed areas of photoresist are removed to form a pattern. In this process, photoresist coating and homogenization are key steps, involving dropping photoresist onto the wafer surface and then using high-speed rotation to evenly distribute the photoresist.

[0003] Existing spin coaters are mostly used in scientific research or industry, and there is a lack of simple equipment for students to use in scientific experiments. Scientific instruments and industrial equipment are complex and expensive, making it difficult for schools to equip them for teaching purposes, and these devices are also not suitable for students to make and operate themselves.

[0004] Therefore, how to design a simple spin coater that can overcome the shortcomings of the existing technology has become a problem that urgently needs to be solved by those skilled in the art. Utility Model Content

[0005] This invention provides a simple spin coater, which has a simple structure and low cost, and can be used in the teaching process of photolithography.

[0006] To achieve the above objectives, this utility model provides a simple spin coater, comprising:

[0007] One top plate;

[0008] A base plate is installed below the top plate;

[0009] Multiple support plates, each having its two ends connected to the top plate and the bottom plate respectively, together with the top plate, the bottom plate, and the multiple support plates forming a support space;

[0010] Multiple baffles are arranged around the top plate on the side opposite to the support plate, and the multiple baffles surround an operating space above the top plate;

[0011] A turntable is located in the operating space above the top plate, and a simulated wafer is placed on the turntable.

[0012] A motor mount, disposed in the support space and connected to the plurality of support plates, has a central portion parallel to the top plate and allows a motor to be mounted thereon. The motor passes through the top plate and connects to the turntable to drive the turntable to rotate; and

[0013] A power supply device that can be connected to the motor and supply it with power.

[0014] The top plate has a central hole in the middle, the turntable has a central hole in the middle, the main body of the motor is located between the top plate and the motor base, and the motor shaft passes through the central hole of the top plate and connects to the central hole of the turntable, so that the motor is fixedly connected to the turntable and can drive the turntable to rotate.

[0015] The top plate and the bottom plate are provided with multiple support slots at their corresponding edges. Each end of the support plate has at least one support protrusion, which can be inserted into the support slot to connect the support plate to the top plate and the bottom plate.

[0016] The top plate and the bottom plate are circular or polygonal plates, and the support plate and the baffle are polygonal plates.

[0017] The frame structure of the simple coating machine, constructed from the top plate, bottom plate, support plate, and baffle, is no larger than 40cm × 30cm and no smaller than 10cm × 10cm.

[0018] The motor's speed is 1500–3000 r / min.

[0019] The supporting space is an open space, and there is at least one window between adjacent supporting plates.

[0020] The top plate also has multiple baffle slots at its edge, and each baffle has at least one baffle protrusion on one side. The baffle protrusion can be inserted into the baffle slot to connect the baffle to the top plate.

[0021] The support plate has multiple motor mount slots in the middle, and the motor mount has multiple motor mount protrusions on its edge. The motor mount protrusions can be inserted into the motor mount slots to connect the motor mount to the support plate.

[0022] It also includes multiple clips that secure the simulated wafer to the turntable.

[0023] The turntable has multiple snap-fit ​​slots on its edge, and the snap-fits are inserted into these slots to secure the analog wafer to the turntable.

[0024] The simulated wafer is a plastic or glass disc with a diameter of 2.5–15 cm.

[0025] It also includes a connecting device through which the power supply device is connected to the motor.

[0026] The power supply device is a battery box, and the connection device is a connector.

[0027] The top plate, the bottom plate, the support plate, the baffle, the turntable, and the motor base are made of wood, plastic, or glass.

[0028] The simplified spin coater includes an unassembled form in which the top plate, the bottom plate, the support plate, the baffle, the turntable, the motor base, and multiple clips for fixing the simulated wafer on the turntable are stacked in the unassembled form.

[0029] The simplified spin coater includes a non-separated form in which the top plate, the bottom plate, the support plate, the baffle, the turntable, the motor base, and a plurality of clips for fixing the simulated wafer on the turntable are disposed on at least one plate in the non-separated form.

[0030] Compared with the prior art, the present invention has at least the following technical advantages:

[0031] 1) This utility model simplifies the structure and function of the spin coater, uses materials such as plastic sheets to simulate wafers, uses a turntable to realize the rotation and fixation of the simulated wafers, and uses a motor to drive the turntable, ultimately simulating and reproducing the process of spin coater application in photolithography. Users can be more interested in and more easily understand the implementation process of key processes in chip manufacturing.

[0032] 2) This utility model simplifies the frame structure while ensuring the basic functions of the glue coater, and uses simple and readily available materials (such as wood boards and acrylic boards), which greatly reduces the cost of the device and enhances safety, making it more suitable for use in the teaching process and for large-scale promotion in educational settings.

[0033] 3) This simplified spin coater can be used in a non-separated form, with the frame components mounted on a single sheet of material. Users can assemble the spin coater frame and connect the circuits themselves during the photolithography learning process, and then perform the photolithography operation. Throughout the learning process, users not only increase their understanding of the principles of photolithography but also their understanding of circuit connections, further enhancing their hands-on skills.

[0034] The present invention will be described in detail below with reference to the accompanying drawings and specific embodiments, but this is not intended to limit the present invention. Attached Figure Description

[0035] Figure 1 This is a three-dimensional structural diagram of a simplified spin coater according to a preferred embodiment of the present invention.

[0036] Figure 2This is a three-dimensional front view of a simplified spin coater according to a preferred embodiment of the present invention;

[0037] Figure 3 This is a schematic diagram of the unseparated state of a simplified spin coater according to a preferred embodiment of the present invention.

[0038] In the attached figures, the following labels are used:

[0039] 1 top plate

[0040] 11 Top plate center hole

[0041] 2 base plates

[0042] 3 support plates

[0043] 31 support convex part

[0044] 32 support slots

[0045] 4 baffles

[0046] 41 baffle protrusion

[0047] 42 bezel slots

[0048] 5 turntables

[0049] 51 buckles

[0050] 52 buckle slots

[0051] 53 Turntable Center Hole

[0052] 6 motor mounts

[0053] 61 Motor mount protrusion

[0054] 62 motor socket slot

[0055] 7 Power Supply Unit

[0056] 71 Connecting device

[0057] 8 motors

[0058] 9 Simulated Wafers Detailed Implementation

[0059] To clearly explain the technical features of this utility model, enabling those skilled in the art to clearly understand its structure, characteristics, usage, and technical effects, the following detailed embodiments, in conjunction with the accompanying drawings, illustrate the solution of this utility model. However, the following descriptions are merely illustrative and do not constitute a limitation of this utility model.

[0060] Please refer to Figure 1 and Figure 2 . Figure 1This is a three-dimensional structural diagram of a simplified spin coater according to a preferred embodiment of the present invention. Figure 2 This is a three-dimensional front view of a simplified spin coater according to a preferred embodiment of the present invention.

[0061] A preferred embodiment of this utility model provides a simple coating machine, including a top plate 1, a bottom plate 2, multiple support plates 3, multiple baffles 4, a turntable 5, a motor base 6, and a power supply device 7.

[0062] The base plate 2 is located below the top plate 1; the multiple support plates 3 are connected at both ends to the top plate 1 and the base plate 2 respectively, and the top plate 1, the base plate 2, and the multiple support plates 3 enclose a support space; the multiple baffles 4 are arranged around the other side of the top plate 1, specifically, the multiple baffles 4 and the support plates 3 are located on both sides of the top plate 1, and the multiple baffles 4 enclose an operating space above the top plate 1; the turntable 5 is located in the operating space in the middle of the top plate 1, and a simulated wafer 9 is placed on the turntable 5; the motor base 6 is located in the support space and connected to the multiple support plates 3, the motor base 6 is located between the top plate 1 and the base plate 2, and is parallel to the top plate 1 and the base plate 2, and can accommodate a motor 8, which passes through the top plate 1 and is connected to the turntable 5 to drive the turntable 5 to rotate; the power supply device 7 can be connected to the motor 8 and supply power to it.

[0063] The top plate 1 has a central hole 11 in the middle, and the turntable 5 has a central hole 53 in the middle. The main body of the motor 8 is disposed between the top plate 1 and the motor base 6, and the motor shaft of the motor 8 passes through the central hole 11 of the top plate and connects with the central hole 53 of the turntable, so that the motor 8 is fixedly connected to the turntable 5 and can drive the turntable 5 to rotate.

[0064] The top plate 1 and the bottom plate 2 are respectively provided with a plurality of support slots 32 at their corresponding edge positions. The support plate 3 has at least one support protrusion 31 at each end. The support protrusion 31 can be inserted into the support slot 32 so that the support plate 3 connects the top plate 1 and the bottom plate 2.

[0065] The top plate 1 and the bottom plate 2 are circular or polygonal plates, and the support plate 3 and the baffle 4 are polygonal plates. For example, the polygonal embodiments of the top plate 1 and the bottom plate 2 can be quadrilateral or hexagonal plates. For example, the polygonal embodiments of the support plate 3 and the baffle 4 can be trapezoidal or rectangular plates. The main function of the top plate 1, the bottom plate 2, and the support plate 3 is to form the frame structure of the glue coater. The main function of the baffle 4 is to enclose the turntable 5, preventing accidental contact by the user and glue splattering when the turntable 5 rotates at high speed. Therefore, the shape of each plate only needs to achieve its main function. Those skilled in the art can also use other irregular shapes while ensuring functionality, or add decorative designs to regular shapes.

[0066] The frame structure of this simple spin coater, constructed from the top plate 1, the bottom plate 2, the support plate 3, and the baffle 4, is no larger than 40cm × 30cm and no smaller than 10cm × 10cm. Within these dimensions, the simple spin coater has a moderate size, making it more suitable for operation and demonstration in teaching processes.

[0067] The motor 8 has a rotational speed of 1500–3000 r / min. At this speed, the rotational speed of the turntable 5 driven by the motor 8 is suitable for the uniform spreading of photoresist and can also ensure operational safety.

[0068] The supporting space is not enclosed, and there is at least one window between adjacent supporting plates 3. In this invention, when multiple supporting plates 3 form supporting sidewalls between the top plate 1 and the bottom plate 2, the space between the top plate 1 and the bottom plate 2 is not completely enclosed. For example, when the top plate 1 and the bottom plate 2 are hexagonal plates, and the supporting plates 3 are spaced apart on three walls, three windows will be formed between adjacent supporting plates 3. Thus, when the simplified spin coater of this invention is used in photolithography teaching, the user can easily connect the motor 8 and the power supply device 7 with wires through the window, and can also observe the operating status of the motor 8 through the window.

[0069] The top plate 1 is also provided with a plurality of baffle slots 42 at its edge. The baffle 4 has at least one baffle protrusion 41 on one side, which can be inserted into the baffle slot 42 to connect the baffle 4 to the top plate 1.

[0070] The support plate 3 has multiple motor mount slots 62 in the middle, and the motor mount 6 has multiple motor mount protrusions 61 on its edge. The motor mount protrusions 61 can be inserted into the motor mount slots 62 to connect the motor mount 6 to the support plate 3.

[0071] The simple spin coater also includes multiple clips 51, which are used to fix the simulated wafer 9 onto the turntable 5. Specifically, the turntable 5 has multiple clip slots 52 on its edge, and the multiple clips 51 are inserted into the clip slots 52 to fix the simulated wafer 9 onto the turntable 5.

[0072] The simulated wafer 9 is a plastic or glass disc. For example, the plastic disc can be made of acrylic or PVC. The diameter of the simulated wafer 9 can be selected from a suitable value between 2.5 and 15 cm, depending on the dimensions of the frame structure assembled with the top plate 1, the bottom plate 2, the support plate 3, and the baffle 4.

[0073] This simple spin coater also includes a connecting device 71, through which the power supply device 7 is connected to the motor 8. Please refer to [reference needed]. Figure 1 and Figure 2 The diagram illustrates the connection between the power supply device 7, the connecting device 71, and the motor 8 via wires in this embodiment. By adding the connecting device 71 between the power supply device 7 and the motor 8, the power supply device 7 can be easily replaced. The power supply device 7 is a battery box, and the connecting device 71 is a connector. The battery box can hold a button battery to power the motor 8.

[0074] The top plate 1, the bottom plate 2, the support plate 3, the baffle 4, the turntable 5, and the motor base 6 are made of wood, plastic, or glass. For example, the plastic plate can be made of acrylic or PVC.

[0075] The simple spin coater includes an unassembled form in which the top plate 1, the bottom plate 2, the support plate 3, the baffle 4, the turntable 5, the motor base 6, and a plurality of clips 51 for fixing the simulated wafer 9 on the turntable 5 are stacked in the unassembled form.

[0076] This simple spin coater includes an unseparated form (such as...) Figure 3 As shown, the top plate 1, the bottom plate 2, the support plate 3, the baffle 4, the turntable 5, the motor base 6, and multiple clips 51 for fixing the simulated wafer 9 on the turntable 5 are arranged in an unseparated form on at least one substrate. Specifically, one or more substrates can be used, and the components are scribed and cut on the substrates according to their outer contours, but the connection points are retained, and the components are not separated. Thus, the simplified spin coater of this invention can have a small-volume, substrate-type packaging form, making it easier to transport and store. More importantly, during the teaching of photolithography, users can remove the components from the whole substrate themselves and assemble the simplified spin coater, which not only improves the user's hands-on skills but also increases the fun of photolithography teaching.

[0077] The following are the operating steps during use:

[0078] 1) The user disassembles each component of the simple spin coater from the whole board and manually assembles and connects the circuit to make the assembled simple spin coater.

[0079] The assembly process includes assembling the components removed from the plate (top plate 1, bottom plate 2, support plate 3, baffle 4, turntable 5, buckle 51, and motor base 6) into a frame, installing the power supply device 7 and the connecting device 71 (the power supply device 7 is a battery box, and the connecting device 71 is a connector; the battery box and connector are fixed on the support plate 3, and a button battery is installed in the battery box), fixing the motor 8 to the turntable 5 (the motor 8 is placed on the motor base 6, and the motor shaft of the motor 8 passes through the center hole 11 of the top plate and is fixedly connected to the turntable 5), and making electrical connections between the power supply device 7, the connecting device 71, and the motor 8.

[0080] 2) Fix the simulated wafer 9 on the turntable 5, start the motor 8 to drive the turntable 5 to rotate at high speed, and while the turntable 5 is rotating, drop photoresist onto the simulated wafer 9 and observe the process of the photoresist being uniformly distributed on the simulated wafer 9 under high-speed rotation.

[0081] The step of fixing the simulated wafer 9 includes fixing the simulated wafer 9 onto the turntable 5 using multiple clips 51;

[0082] 3) Turn off the motor 8 and wait for the turntable 5 to stop rotating. Remove the simulated wafer 9 with photoresist applied and irradiate the photoresist on the simulated wafer 9 with ultraviolet light. Observe the generation process of the photolithography pattern by observing the color change reaction of the photoresist.

[0083] 4) Remove the photoresist from the simulated wafer 9, disassemble the assembled simple spin coater, and recycle the components of the simple spin coater and the simulated wafer for reuse.

[0084] Compared with the prior art, the present invention has at least the following technical advantages:

[0085] 1) This utility model simplifies the structure and function of the spin coater, uses materials such as plastic sheets to simulate wafers, uses a turntable to realize the rotation and fixation of the simulated wafers, and uses a motor to drive the turntable, ultimately simulating and reproducing the process of spin coater application in photolithography. Users can be more interested in and more easily understand the implementation process of key processes in chip manufacturing.

[0086] 2) This utility model simplifies the frame structure while ensuring the basic functions of the glue coater, and uses simple and readily available materials (such as wood boards and acrylic boards), which greatly reduces the cost of the device and enhances safety, making it more suitable for use in the teaching process and for large-scale promotion in educational settings.

[0087] 3) This simplified spin coater can be used in a non-separated form, with the frame components mounted on a single sheet of material. Users can assemble the spin coater frame and connect the circuits themselves during the photolithography learning process, and then perform the photolithography operation. Throughout the learning process, users not only increase their understanding of the principles of photolithography but also their understanding of circuit connections, further enhancing their hands-on skills.

[0088] Of course, there may be other embodiments of this utility model. Without departing from the spirit and essence of this utility model, those skilled in the art can make various corresponding changes and modifications based on this utility model, but these corresponding changes and modifications should all fall within the protection scope of the claims of this utility model.

Claims

1. A simple spin coater, characterized in that, include: One top plate; A base plate is installed below the top plate; Multiple support plates, each having its two ends connected to the top plate and the bottom plate respectively, together with the top plate, the bottom plate, and the multiple support plates forming a support space; Multiple baffles are arranged around the top plate on the side opposite to the support plate, and the multiple baffles surround an operating space above the top plate; A turntable is located in the operating space above the top plate, and a simulated wafer is placed on the turntable. A motor mount, disposed in the support space and connected to the plurality of support plates, has a central portion parallel to the top plate and allows a motor to be mounted thereon. The motor passes through the top plate and connects to the turntable to drive the turntable to rotate; and A power supply device that can be connected to the motor and supply it with power.

2. The simplified spin coater according to claim 1, characterized in that, The top plate has a central hole in the middle, and the turntable has a central hole in the middle. The main body of the motor is located between the top plate and the motor base, and the motor shaft passes through the central hole of the top plate and connects to the central hole of the turntable, so that the motor is fixedly connected to the turntable and can drive the turntable to rotate.

3. The simplified spin coater according to claim 1, characterized in that, The top plate and the bottom plate are provided with multiple support slots at their corresponding edges. Each end of the support plate has at least one support protrusion, which can be inserted into the support slot to connect the support plate to the top plate and the bottom plate.

4. The simplified spin coater according to claim 1, characterized in that, The top plate and the bottom plate are circular or polygonal plates, and the support plate and the baffle are polygonal plates.

5. The simplified spin coater according to claim 1, characterized in that, The frame structure of this simple coating machine, constructed from the top plate, bottom plate, support plate, and baffle, is no larger than 40cm × 30cm and no smaller than 10cm × 10cm.

6. The simplified spin coater according to claim 1, characterized in that, The motor's speed is 1500~3000 r / min.

7. The simplified spin coater according to claim 1, characterized in that, The support space is an open space, and there is at least one window between adjacent support plates.

8. The simplified spin coater according to claim 1, characterized in that, Multiple baffle slots are also provided at the edge of the top plate. Each baffle has at least one baffle protrusion on one side, which can be inserted into the baffle slot to connect the baffle to the top plate.

9. The simple type of a film uniformizing machine according to claim 1, wherein The support plate has multiple motor mount slots in the middle, and the motor mount has multiple motor mount protrusions on its edge. The motor mount protrusions can be inserted into the motor mount slots to connect the motor mount to the support plate.

10. The simple type of a film applicator according to claim 1, wherein It also includes multiple clips that secure the analog wafer to the turntable.

11. The simple type of a film applicator according to claim 10, wherein The turntable has multiple snap-fit ​​slots on its edge, and the snap-fits are inserted into the snap-fit ​​slots to fix the analog wafer onto the turntable.

12. The simple type of a film applicator according to claim 1, wherein The simulated wafer is a plastic or glass disc with a diameter of 2.5 to 15 cm.

13. The simple type of a film applicator according to claim 1, wherein It also includes a connection device through which the power supply device is connected to the motor.

14. The simple type of a kiss coater according to claim 13, characterized by, The power supply device is a battery box, and the connection device is a connector.

15. The simplified spin coater according to claim 1, characterized in that, The top plate, the bottom plate, the support plate, the baffle, the turntable, and the motor base are made of wood, plastic, or glass.

16. The simple type of a film applicator according to claim 1, wherein The simple spin coater includes an unassembled form in which the top plate, the bottom plate, the support plate, the baffle, the turntable, the motor base, and multiple clips for fixing the simulated wafer on the turntable are stacked in the unassembled form.

17. The simple type of a film applicator according to claim 1, wherein The simple spin coater includes a non-separated configuration in which the top plate, the bottom plate, the support plate, the baffle, the turntable, the motor base, and a plurality of clips for fixing the simulated wafer on the turntable are disposed on at least one substrate in the non-separated configuration.

Images