A multiple light source laser dissociation machine

By designing a multi-source laser dissociation machine, the problems of low efficiency and poor adaptability of traditional laser dissociation equipment have been solved, achieving efficient and precise dissociation of multiple materials, ensuring processing quality and equipment flexibility.

CN224587187UActive Publication Date: 2026-08-04SHANGHAI BONA MICROELECTRONIC EQUIP CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
SHANGHAI BONA MICROELECTRONIC EQUIP CO LTD
Filing Date
2025-07-28
Publication Date
2026-08-04

AI Technical Summary

Technical Problem

Traditional laser dissociation equipment uses a single laser light source, resulting in low processing efficiency and poor adaptability, making it difficult to meet the diverse and complex processing needs of modern industry.

Method used

The multi-source laser dissociation machine uses four sets of different types of lasers evenly installed on a turntable, combined with an encoder, gear transmission system and negative pressure cavity adsorption technology, to achieve rapid switching and precise alignment of the lasers, ensuring processing quality.

Benefits of technology

It improves processing efficiency and quality, can adapt to various material types, prevents workpiece displacement and thermal deformation during processing, and enhances the adaptability and precision of the equipment.

✦ Generated by Eureka AI based on patent content.

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Patent Text Reader

Abstract

The utility model discloses a kind of multi-light source laser dissociation machines, including workbench, control cabinet is equipped in workbench bottom end, support frame is connected in workbench upper side, support frame inside is equipped with carousel, four groups of lasers are evenly installed on carousel, shaft is connected in the middle position of carousel, one end of shaft is connected with encoder, driven gear is connected on shaft, driven gear one side is engaged with driving gear, driving gear is connected with driving shaft, driving shaft is connected with driving motor output end, can be quickly switched according to material characteristics and processing demand and use, without manually replacing laser, greatly improve work efficiency, and connect encoder on shaft, and realize accurate angle control by gear transmission system, ensure that laser beam can accurately aim target area after each rotation.
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Description

Technical Field

[0001] This utility model relates to the field of laser dissociation machine technology, specifically to a multi-source laser dissociation machine. Background Technology

[0002] With the rapid development of microelectronic packaging, display panel manufacturing, and optical device processing, the demand for precision machining equipment is increasing daily. Laser separation technology, as a non-contact, high-precision material separation technology, has been widely used in processes such as chip peeling, OLED panel cutting, and glass substrate separation. This technology achieves non-destructive separation between materials by irradiating the adhesive layer with a laser, causing it to thermally decompose, vaporize, or melt.

[0003] Currently, traditional laser dissociation equipment mostly adopts a single laser source structure, which can only process a single area. This results in low processing efficiency and poor adaptability. Furthermore, the single laser source structure means that it can only process specific types of materials or workpieces of specific thicknesses each time, making it difficult to meet the diverse and complex processing needs of modern industrial production.

[0004] No effective solutions have yet been proposed to address the problems in the relevant technologies. Utility Model Content

[0005] In view of the problems in the related technologies, this utility model proposes a multi-source laser dissociation machine to overcome the above-mentioned technical problems existing in the existing related technologies.

[0006] Therefore, the specific technical solution adopted by this utility model is as follows:

[0007] A multi-beam laser dissociation machine includes a worktable, a control cabinet at the bottom of the worktable, a support frame connected above the worktable, a turntable inside the support frame, four sets of lasers evenly installed on the turntable, a rotating shaft connected to the middle of the turntable, an encoder connected to one end of the rotating shaft, a driven gear connected to the rotating shaft, one side of the driven gear meshing with a driving gear, the driving gear connected to a drive shaft, and the drive shaft connected to the output end of a drive motor.

[0008] Furthermore, the rotating shaft and drive shaft are connected to the mounting plate via bearings, and the drive motor is fixed above the mounting plate.

[0009] Furthermore, the top of the mounting plate is connected to the hydraulic telescopic rod via a mounting bracket. The hydraulic telescopic rod is installed on the top of the support frame. A connecting bracket is connected to one side of the mounting plate, and an industrial camera is connected below the connecting bracket.

[0010] Furthermore, two fixed plates are provided above the workbench, and a first threaded rod is provided between the two fixed plates. A first movable block is threadedly connected to the first threaded rod. A groove is provided above the first movable block, and a second threaded rod is provided inside the groove. A second movable block is threadedly connected to the second threaded rod, and a placement rack is provided above the second movable block.

[0011] Furthermore, the first threaded rod is connected to the fixed plate via a bearing, one end of the first threaded rod passes through the fixed plate and is connected to the first servo motor, and one end of the second threaded rod passes through the first moving block and is connected to the second servo motor.

[0012] Furthermore, the top of the placement rack has an opening, inside which is a negative pressure chamber. The top of the negative pressure chamber is connected to an adsorption plate with adsorption holes. The bottom of the negative pressure chamber is connected to a vacuum pump via a suction pipe, and the vacuum pump is located inside the placement rack.

[0013] Furthermore, mounting side plates are connected to both sides of the top of the placement rack, and cooling fans are installed inside the mounting side plates.

[0014] Furthermore, the control cabinet is equipped with a central control system.

[0015] The beneficial effects of this utility model are as follows:

[0016] By evenly installing four different types of lasers on the turntable, it is possible to quickly switch between them according to material properties and processing requirements without manually changing the lasers, which greatly improves work efficiency. Furthermore, an encoder is connected to the rotating shaft, and a gear transmission system is used to achieve precise angle control, ensuring that the laser beam is accurately aligned with the target area after each rotation.

[0017] By providing a negative pressure chamber at the top of the placement rack and connecting it to a vacuum pump through an adsorption hole, the workpiece can be firmly fixed during processing, preventing displacement caused by vibration or temperature changes. Furthermore, by installing cooling fans on both sides of the placement rack, the temperature of the workpiece and its surrounding environment can be effectively reduced, avoiding thermal deformation and further improving processing quality. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 This is a front view of a multi-source laser dissociation machine according to an embodiment of the present utility model;

[0020] Figure 2This is a diagram showing the turntable connection of a multi-source laser dissociation machine according to an embodiment of the present invention;

[0021] Figure 3 This is a connection diagram of the second moving block of a multi-source laser dissociation machine according to an embodiment of the present invention.

[0022] Figure 4 This is an internal structural diagram of a multi-source laser dissociation machine placement rack according to an embodiment of the present utility model.

[0023] In the picture:

[0024] 1. Workbench; 2. Control cabinet; 3. Support frame; 4. Turntable; 5. Laser; 6. Rotating shaft; 7. Encoder; 8. Driven gear; 9. Drive gear; 10. Drive shaft; 11. Drive motor; 12. Mounting plate; 13. Mounting bracket; 14. Hydraulic telescopic rod; 15. Connecting bracket; 16. Industrial camera; 17. Fixing plate; 18. First threaded rod; 19. First moving block; 20. Groove; 21. Second threaded rod; 22. Second moving block; 23. Placement rack; 24. First servo motor; 25. Second servo motor; 26. Opening; 27. Negative pressure chamber; 28. Adsorption plate; 29. ​​Evacuation pipe; 30. Vacuum pump; 31. Mounting plate; 32. Cooling fan. Detailed Implementation

[0025] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0026] According to an embodiment of the present invention, a multi-source laser dissociation machine is provided.

[0027] Example 1

[0028] like Figures 1-4As shown, the multi-source laser dissociation machine according to an embodiment of this utility model includes a worktable 1, which serves as the basic platform for the entire device, supporting the workpiece to be processed and related mechanical components. A control cabinet 2 is located at the bottom of the worktable 1, housing the central control system, power management unit, and other electronic components, responsible for the overall operation control and data processing of the device. A support frame 3 is connected above the worktable 1, and a turntable 4 is located inside the support frame 3, used to evenly distribute and fix four sets of lasers 5, enabling rapid switching between laser sources of different wavelengths or powers. Four sets of lasers 5 are evenly installed on the turntable 4, and each set of lasers 5 can be configured with different parameters according to requirements, adapting to various material types. A rotating shaft 6 is connected to the middle of the turntable 4, and an encoder 7 is connected to one end of the rotating shaft 6. It can detect the rotation angle of the rotating shaft 6 and feed back information to the control system to ensure the positioning accuracy after each rotation. A driven gear 8 is connected to the rotating shaft 6. One side of the driven gear 8 is meshed with the driving gear 9. The driving gear 9 is connected to the drive shaft 10. The drive shaft 10 is connected to the output end of the drive motor 11. The rotating shaft 6 and the drive shaft 10 are connected to the mounting plate 12 through bearings. The drive motor 11 is fixed above the mounting plate 12. The top of the mounting plate 12 is connected to the hydraulic telescopic rod 14 through the mounting bracket 13. The hydraulic telescopic rod 14 is installed on the top of the support frame 3. A connecting bracket 15 is connected to one side of the mounting plate 12. An industrial camera 16 is connected below the connecting bracket 15 to capture workpiece images and achieve automatic alignment and precise positioning by combining vision algorithms.

[0029] like Figures 1-4As shown, two fixed plates 17 are provided above the worktable 1, and a first threaded rod 18 is provided between the two fixed plates 17. A first moving block 19 is threadedly connected to the first threaded rod 18. By rotating, the first moving block 19 moves along the X-axis, realizing the initial positioning of the workpiece in the horizontal direction. A groove 20 is provided above the first moving block 19, and a second threaded rod 21 is provided inside the groove 20. A second moving block 22 is threadedly connected to the second threaded rod 21. The second moving block 22 is used to support the placement frame 23 and moves below it along the Y-axis, realizing the precise positioning of the workpiece in the Y-axis direction. A placement frame 23 is provided above the second moving block 22. The first threaded rod 18 is connected to the fixed plate 17 through a bearing. One end of the first threaded rod 18 passes through the fixed plate 17 and is connected to the first servo motor 24. One end of the second threaded rod 21 passes through the first moving block 19 and is connected to the second servo motor 25. Limiting rods are provided on both sides of the grooved rod 21. The limiting rods are respectively connected to the first moving block 19 and the second moving block 22 to prevent the first moving block 19 and the second moving block 22 from shifting during movement. The top of the placement rack 23 is provided with an opening 26. The opening 26 is provided with a negative pressure chamber 27. The top of the negative pressure chamber 27 is connected to an adsorption plate 28. The adsorption plate 28 is provided with adsorption holes to firmly adsorb the workpiece onto the placement rack 23. The bottom of the negative pressure chamber 27 is connected to a vacuum pump 30 through a suction pipe 29. The vacuum pump 30 is located inside the placement rack 23. The top of the placement rack 23 is connected to two mounting side plates 31. The mounting side plates 31 are installed with cooling fans 32. The control cabinet 2 is provided with a central control system, including a PLC or industrial computer, to manage the coordinated work of various subsystems such as the laser 5, servo motor, and vacuum pump 30. It also has image processing function and can process the video captured by the industrial camera 16.

[0030] To facilitate understanding of the above-mentioned technical solutions of this utility model, the working principle or operation method of this utility model in actual process will be described in detail below.

[0031] In summary, with the help of the above-mentioned technical solution of this utility model, before the operation begins, the operator places the workpiece to be processed on the adsorption plate 28 on the top of the placement rack 23. After starting the vacuum pump 30, the air inside the negative pressure chamber 27 is extracted through the air extraction pipe 29 to form a negative pressure environment. The adsorption holes on the adsorption plate 28 firmly adsorb the workpiece onto the surface of the placement rack 23, preventing it from shifting or deforming due to vibration or thermal effects during processing. The industrial camera 16 can acquire images of the workpiece before processing. The central control system identifies and analyzes the acquired images, identifies the outline, key feature points, and adhesive layer position of the workpiece, and compares them with the preset processing path. It automatically adjusts the position of the placement rack 23 to achieve precise alignment. Then, the central control system can move the workpiece with high precision in the Y-axis direction by starting the second servo motor 25. The entire first moving block 19, where the second moving block 22 is located, is connected to the first servo motor 24 through the first threaded rod 18 and can move in the X-axis direction. Two sets of servo motors work together to enable the placement frame 23 to precisely move the workpiece in the XY plane to the processing area of ​​the laser beam. When it is necessary to change to a different laser 5, the drive motor 11 can be started. The drive motor 11 drives the active gear 9 to rotate, which in turn drives the rotating shaft 6 to rotate through meshing with the driven gear 8, thereby driving the turntable 4 to rotate, realizing the rapid switching of laser 5. At the same time, the encoder 7 detects the rotation angle of the rotating shaft 6 in real time and feeds the signal back to the central control system to ensure the positioning accuracy of the laser 5 after each rotation. The hydraulic telescopic rod 14 can adjust the distance between the laser 5 and the workpiece according to the workpiece of different thicknesses to ensure that the focus of the laser beam falls accurately on the adhesive layer, thereby improving the separation efficiency and quality. During the operation of the laser 5, the cooling fan 32 can be started to continuously cool the workpiece and the surrounding area, effectively preventing material deformation or performance changes caused by local overheating.

[0032] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A multi-source laser dissociation machine, comprising: The system includes a workbench (1), a control cabinet (2) at the bottom of the workbench (1), a support frame (3) connected above the workbench (1), a turntable (4) inside the support frame (3), four sets of lasers (5) evenly installed on the turntable (4), a rotating shaft (6) connected in the middle of the turntable (4), an encoder (7) connected to one end of the rotating shaft (6), a driven gear (8) connected to the rotating shaft (6), one side of the driven gear (8) meshing with the driving gear (9), the driving gear (9) connected to the drive shaft (10), and the drive shaft (10) connected to the output end of the drive motor (11).

2. A multi-source laser dissociation machine according to claim 1, wherein, The rotating shaft (6) and the drive shaft (10) are connected to the mounting plate (12) through bearings, and the drive motor (11) is fixed above the mounting plate (12).

3. A multi-source laser dissociation machine according to claim 1, wherein, The top of the mounting plate (12) is connected to the hydraulic telescopic rod (14) via the mounting bracket (13). The hydraulic telescopic rod (14) is installed on the top of the support frame (3). A connecting bracket (15) is connected to one side of the mounting plate (12), and an industrial camera (16) is connected below the connecting bracket (15).

4. The multi-source laser dissociation machine of claim 1, wherein, Two fixed plates (17) are provided above the workbench (1). A first threaded rod (18) is provided between the two fixed plates (17). A first moving block (19) is threadedly connected to the first threaded rod (18). A groove (20) is provided above the first moving block (19). A second threaded rod (21) is provided inside the groove (20). A second moving block (22) is threadedly connected to the second threaded rod (21). A placement rack (23) is provided above the second moving block (22).

5. A multi-source laser dissociation machine as defined in claim 1, wherein, The first threaded rod (18) is connected to the fixed plate (17) through the bearing. One end of the first threaded rod (18) passes through the fixed plate (17) and is connected to the first servo motor (24). One end of the second threaded rod (21) passes through the first moving block (19) and is connected to the second servo motor (25).

6. A multi-source laser dissociation machine as defined in claim 1, wherein, The top of the placement rack (23) is provided with an opening (26), and a negative pressure chamber (27) is provided inside the opening (26). An adsorption plate (28) is connected to the top of the negative pressure chamber (27), and an adsorption hole is provided on the adsorption plate (28). The bottom of the negative pressure chamber (27) is connected to a vacuum pump (30) through a suction pipe (29). The vacuum pump (30) is located inside the placement rack (23).

7. A multi-source laser dissociation machine as defined in claim 1, wherein, The top two sides of the mounting rack (23) are connected to mounting side plates (31), and a cooling fan (32) is installed inside the mounting side plates (31).

8. A multi-source laser dissociation machine as defined in claim 1, wherein, The control cabinet (2) is equipped with a central control system.