Spray protection device

Abstract

The utility model relates to the technical field of semiconductor processing equipment, especially melt -casting protection device. This melt -casting protection device includes the protection cover and isolation structure, and the protection cover has the accommodating cavity, and the one end of accommodating cavity is equipped with the open mouth, and accommodating cavity includes the non -melt -casting area and melt -casting area who connects in sequence along the axial direction, and the open mouth is located the one end of non -melt -casting area away from melt -casting area, and the isolation structure can along the open mouth stretch into accommodating cavity and with the cavity wall of accommodating cavity abuts, and the length of isolation structure along accommodating cavity axial length and the axial length of non -melt -casting area are same, realized the effect that the cavity wall of isolation structure and non -melt -casting area abutted, and then realized the isolation shielding of non -melt -casting area, not only the isolation shielding effect of non -melt -casting area is good, and simple operation, high working efficiency.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor processing equipment technology, and in particular to a melt spray protection device. Background Technology

[0002] A wafer refers to a silicon wafer used in the fabrication of silicon semiconductor integrated circuits. Specifically, a silicon ingot is cut into extremely thin circular wafers using a laser, and then circuits and electronic components are etched onto these wafers. During wafer fabrication, particles generated during etching can fall onto the wafer surface and affect the etching process. To prevent these particles from falling onto the wafer surface, a protective shield treated with alumina spraying is placed over the wafer. Alumina spraying increases surface roughness, causing particles to adhere to the areas within the protective shield that have been treated with alumina spraying.

[0003] In related technologies, the protective shield is cylindrical with an opening at one axial end. The inner wall of the shield is divided axially into a sprayed region treated with alumina and a non-sprayed region. The opening is located at one end of the non-sprayed region, and the sprayed region is located at the other end. To prevent the wafer from undergoing spraying in the non-sprayed region, adhesive tape is applied to the non-sprayed region of the shield. However, this method of using adhesive tape to cover the non-sprayed region is not only inefficient but also fails to guarantee complete coverage, leading to subsequent over-spraying issues.

[0004] Therefore, there is an urgent need to invent a spray protection device to solve the above problems. Utility Model Content

[0005] The purpose of this invention is to provide a spray protection device to achieve precise coverage of the non-spray area inside the protective cover. It is simple to operate, has a good coverage effect, and is highly efficient.

[0006] To achieve this objective, the present invention adopts the following technical solution:

[0007] The melt-blown protective device includes:

[0008] A protective cover having a receiving cavity with an opening at one end, the receiving cavity comprising a non-spraying region and a spraying region connected sequentially along an axial direction, the opening being located at the end of the non-spraying region away from the spraying region; and

[0009] An isolation structure is provided, which extends into the receiving cavity along the opening and abuts against the cavity wall. The length of the isolation structure extending into the receiving cavity along the axial direction is the same as the axial length of the non-spraying region.

[0010] As an optional solution, the isolation structure includes an isolation body and a first extension portion connected sequentially along the axial direction. The isolation body is cylindrical and extends along the axial direction. The extension length of the isolation body along the axial direction is the same as the length of the non-sprayed region along the axial direction. The outer peripheral wall of the isolation body abuts against the inner cavity wall of the non-sprayed region.

[0011] The first extension is located at one end of the isolation body along the axial direction, the first extension extends radially outward, and the first extension is configured to abut against the axial end face of the protective cover where the opening is located.

[0012] As an alternative, the first extension portion extends outward in a circular shape around the periphery of the isolation body with the central axis of the isolation body as the center.

[0013] As an optional solution, the axial end face of the isolation body with the opening is provided with a second extension extending radially outward, and the second extension abuts against the first extension.

[0014] As an alternative, the second extension portion extends outward in a circular shape around the periphery of the protective cover with the central axis of the protective cover as the center.

[0015] Alternatively, the first extension portion extends a greater distance along the radial direction than the second extension portion extends a greater distance along the radial direction.

[0016] As an optional solution, the surface of the first extension portion that does not abut against the second extension portion is coated with an anti-slip coating;

[0017] And / or, the surface of the first extension portion that does not abut against the second extension portion is provided with protrusions and / or grooves.

[0018] As an optional solution, the isolation body and the first extension portion are integrally formed using aluminum material.

[0019] As an optional solution, the inner diameter of the non-sprayed region is larger than the inner diameter of the sprayed region, and an annular radial abutment end face is formed between the non-sprayed region and the sprayed region. One axial end of the isolation structure extends into the receiving cavity and abuts against the radial abutment end face.

[0020] As an optional solution, the area of ​​the axial end face of the isolation structure that abuts against the radial abutting end face is not less than one-third of the total area of ​​the axial end face of the isolation structure.

[0021] The beneficial effects of this utility model are:

[0022] The sputtering protection device provided by this utility model has a receiving cavity set inside the protective cover. The receiving cavity is divided into a non-sputtering area and a sputtering area connected in sequence along the axial direction. An opening is made at the end of the non-sputtering area away from the sputtering area, so that the product can pass through the non-sputtering area through the opening and then be processed in the sputtering area, which meets the basic processing requirements of the product. By setting an isolation structure that extends into the receiving cavity along the opening and abuts against the cavity wall of the receiving cavity, it is ensured that the length of the isolation structure extending into the receiving cavity along the opening is the same as the axial length of the non-sputtering area. This achieves the effect of the isolation structure abutting against the cavity wall of the non-sputtering area, thereby achieving the isolation and shielding of the non-sputtering area relative to the product. It not only has a good isolation and shielding effect on the non-sputtering area, but is also simple to operate and has high work efficiency. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of the assembly structure of the spray protection device provided in this embodiment of the utility model;

[0024] Figure 2 This is a cross-sectional schematic diagram of the weld bead protection device provided in the embodiment of this utility model in the assembled state;

[0025] Figure 3 This is a schematic diagram of the explosion structure of the fusion sputtering protection device provided in this embodiment of the utility model;

[0026] Figure 4 This is a cross-sectional schematic diagram of the fusion sputtering protection device provided in this embodiment of the present invention under an explosive state;

[0027] Figure 5 yes Figure 2 A magnified view of a section at point A in the middle;

[0028] Figure 6 yes Figure 2 A magnified view of a section at point B in the middle.

[0029] In the picture:

[0030] 100. Protective cover; 110. Receiving cavity; 111. Non-spraying area; 112. Spraying area; 113. Opening; 114. Radial abutment end face; 120. Second extension;

[0031] 200. Isolation structure; 210. Isolation body; 220. First extension. Detailed Implementation

[0032] To make the technical problem solved by this utility model, the technical solution adopted, and the technical effect achieved clearer, the technical solution of this utility model will be further described below with reference to the accompanying drawings and specific embodiments.

[0033] In the description of this utility model, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0034] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0035] In the description of this embodiment, the terms "upper," "lower," "left," and "right," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first" and "second" are only used for distinction in description and have no special meaning.

[0036] During wafer fabrication, etching particles that fall onto the wafer surface can negatively impact the etching process. To prevent these particles from landing on the wafer surface, a protective shield treated with alumina spraying is needed. Alumina spraying increases surface roughness, causing particles to adhere to the sprayed areas within the shield. Existing shields are cylindrical with an opening at one axial end. The inner wall of the shield is divided axially into a sprayed area treated with alumina and a non-sprayed area, with the opening at one end of the non-sprayed area and the sprayed area at the other. To prevent spraying in the non-sprayed area, tape is applied to this area. However, this method of using tape to cover the non-sprayed area is inefficient and cannot guarantee complete coverage, leading to subsequent over-spraying issues.

[0037] To solve the above problems, such as Figures 1-4As shown, this embodiment provides a sputtering protection device. The sputtering protection device includes a protective cover 100 and an isolation structure 200. The protective cover 100 has a receiving cavity 110, with an opening 113 at one end. The receiving cavity 110 includes a non-sputtering region 111 and a sputtering region 112 connected sequentially along the axial direction. The opening 113 is located at the end of the non-sputtering region 111 away from the sputtering region 112. The isolation structure 200 can extend into the receiving cavity 110 along the opening 113 and abut against the cavity wall of the receiving cavity 110. The length of the isolation structure 200 extending into the receiving cavity 110 along the axial direction is the same as the axial length of the non-sputtering region 111.

[0038] This spray protection device, by setting a receiving cavity 110 inside the protective cover 100, divides the receiving cavity 110 axially into a non-spray area 111 and a spray area 112 connected in sequence. An opening 113 is opened at the end of the non-spray area 111 away from the spray area 112, allowing the product to pass through the non-spray area 111 along the opening 113 and then be processed in the spray area 112, meeting the basic processing requirements of the product. By setting an isolation structure 200 extending into the receiving cavity 110 along the opening 113 and abutting against the cavity wall of the receiving cavity 110, it is ensured that the length of the isolation structure 200 extending into the receiving cavity 110 along the opening 113 is the same as the axial length of the non-spray area 111, thus achieving the effect of the isolation structure 200 abutting against the cavity wall of the non-spray area 111, thereby achieving the isolation and shielding of the non-spray area 111. It not only has a good isolation and shielding effect on the non-spray area 111, but is also simple to operate and has high working efficiency.

[0039] Specifically, such as Figure 3 and Figure 4As shown, the isolation structure 200 includes an isolation body 210 and a first extension 220 connected sequentially along the axial direction. The isolation body 210 is cylindrical and extends along the axial direction. The axial extension length of the isolation body 210 is the same as the axial length of the non-spraying region 111. The outer peripheral wall of the isolation body 210 abuts against the inner cavity wall of the non-spraying region 111. The first extension 220 is located at one end of the isolation body 210 along the axial direction. The first extension 220 extends radially outward and is configured to abut against the axial end face of the protective cover 100 where an opening 113 is provided. By dividing the isolation structure 200 into an isolation body 210 and a first extension 220 connected sequentially along the axial direction, the isolation body 210 is made into a cylindrical shape extending along the axial direction, and the length of the isolation body 210 extending along the axial direction is the same as the axial length of the non-spraying region 111. This allows the outer peripheral wall of the isolation body 210 to abut against the inner cavity wall of the non-spraying region 111. By providing a first extension 220 extending radially outward at one axial end of the isolation body 210, the first extension 220 abuts against the axial end face of the protective cover 100 with an opening 113. This enables the isolation body 210 to be limited and fixed when it extends into the receiving cavity 110, further ensuring that the isolation body 210 accurately isolates the non-spraying region 111.

[0040] In this embodiment, the isolation body 210 and the first epitaxial portion 220 are integrally formed from aluminum. By using aluminum to integrally form the isolation body 210 and the first epitaxial portion 220, the production efficiency of the isolation structure 200 can be improved and the production difficulty reduced. It should be noted that in this embodiment, the isolation structure 200 is die-cast to ensure the consistency of the product specifications of the isolation structure 200.

[0041] To improve the limiting effect of the first extension portion 220 on the insertion of the isolation body 210 into the receiving cavity 110, the first extension portion 220 extends outward in a circular shape around the periphery of the isolation body 210 with the central axis of the isolation body 210 as the center, so that the first extension portion 220 is arranged in a ring shape on the periphery of one axial end of the isolation body 210. When the first extension portion 220 abuts against the axial end face of the protective cover 100 with the opening 113, the contact area between the first extension portion 220 and the protective cover 100 can be increased, ensuring the abutment and positioning effect between the first extension portion 220 and the protective cover 100.

[0042] To avoid stress concentration when the first extension portion 220 comes into contact with the end face of the protective cover 100 with the opening 113, the axial end face of the isolation body 210 with the opening 113 is provided with a second extension portion 120 extending radially outward, which abuts against the first extension portion 220. By providing a second extension portion 120 extending radially outward on the end face of the protective cover 100 with the opening 113, the second extension portion 120 abuts against the first extension portion 220, thereby solving the problem of stress concentration by increasing the contact area.

[0043] In this embodiment, the second extension portion 120 extends outward in a circular shape around the periphery of the protective cover 100 with the central axis of the protective cover 100 as the center. By configuring the second extension portion 120 as a ring-shaped structure extending outward in a circular shape around the periphery of the protective cover 100 with the central axis of the protective cover 100 as the center, the second extension portion 120 can be adapted to the ring-shaped first extension portion 220, further increasing the contact area between the first extension portion 220 and the second extension portion 120.

[0044] In addition, such as Figure 5 As shown, in this embodiment, the radial extension distance of the first extension portion 220 is greater than the radial extension distance of the second extension portion 120. By making the radial extension distance of the first extension portion 220 greater than the radial extension distance of the second extension portion 120, when it is necessary to separate the assembled protective cover 100 from the isolation structure 200 or to assemble the protective cover 100 from the isolation structure 200, the portion of the first extension portion 220 extending radially out of the second extension portion 120 can be grasped to achieve a stable grip on the isolation structure 200. This improves the assembly and disassembly efficiency of the protective cover 100 and the isolation structure 200 while reducing the assembly and disassembly difficulty of the protective cover 100 and the isolation structure 200.

[0045] To improve the gripping effect of the worker on the first extension portion 220, an anti-slip coating is applied to the surface of the first extension portion 220 that does not abut against the second extension portion 120, and protrusions and grooves are provided on the surface of the first extension portion 220 that does not abut against the second extension portion 120. By providing protrusions, grooves, and an anti-slip coating on the surface of the first extension portion 220 that does not abut against the second extension portion 120, the surface roughness of the area of ​​the first extension portion 220 for the worker to grip can be increased while ensuring that the first extension portion 220 abuts against the second extension portion 120, thereby improving the gripping effect on the first extension portion 220. It should be noted that in other embodiments, the anti-slip coating may be applied only to the surface of the first extension portion 220 that does not abut against the second extension portion 120, the protrusion may be provided only to the surface of the first extension portion 220 that does not abut against the second extension portion 120, or the groove may be provided only to the surface of the first extension portion 220 that does not abut against the second extension portion 120. This embodiment does not impose specific limitations.

[0046] In one of the alternative solutions, such as Figure 2 and Figure 6 As shown, the inner diameter of the non-sprayed region 111 is larger than the inner diameter of the sprayed region 112. An annular radial abutment end face 114 is formed between the non-sprayed region 111 and the sprayed region 112. One axial end of the isolation body 210 extends into the receiving cavity 110 and abuts against the radial abutment end face 114. By making the inner diameter of the non-sprayed area 111 in the receiving cavity 110 larger than the inner diameter of the sprayed area 112, an annular radial abutment end face 114 can be formed between the non-sprayed area 111 and the sprayed area 112. When the isolation body 210 extends into the receiving cavity 110 along the opening 113, as the axial end face of the isolation body 210 extends into the receiving cavity 110 abuts and is fixed with the radial abutment end face 114, the first extension 220 in the isolation structure 200 abuts with the second extension 120 in the protective cover 100, so as to further improve the limiting accuracy of the isolation body 210, thereby ensuring the isolation coverage effect of the non-sprayed area 111.

[0047] In this embodiment, to ensure the contact effect between the isolation body 210 and the radial abutment end face 114, the area of ​​the axial end face of the isolation structure 200 that abuts with the radial abutment end face 114 is not less than one-third of the total area of ​​the axial end face of the isolation structure 200. It should be noted that in this embodiment, the area of ​​the axial end face of the isolation structure 200 that abuts with the radial abutment end face 114 is half of the total area of ​​the axial end face of the isolation structure 200. In other embodiments, the ratio between the area of ​​the axial end face of the isolation structure 200 and the radial abutment end face 114 abutting with the total area of ​​the axial end face of the isolation structure 200 can be adjusted within a range of not less than one-third; this embodiment does not impose a specific limitation.

[0048] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating the present utility model, and are not intended to limit the implementation of the present utility model. Those skilled in the art can make other variations or modifications based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.

Claims

1. A melt shielding device, characterized in that include: The protective cover (100) has a receiving cavity (110), one end of which is provided with an opening (113). The receiving cavity (110) includes a non-spraying region (111) and a spraying region (112) connected sequentially along the axial direction. The opening (113) is located at the end of the non-spraying region (111) away from the spraying region (112). as well as An isolation structure (200) is provided, which extends into the receiving cavity (110) along the opening (113) and abuts against the cavity wall of the receiving cavity (110). The length of the isolation structure (200) extending into the receiving cavity (110) along the axial direction is the same as the axial length of the non-melting region (111).

2. The flash shield of claim 1, wherein The isolation structure (200) includes an isolation body (210) and a first extension (220) connected sequentially along the axial direction. The isolation body (210) is cylindrical and extends along the axial direction. The extension length of the isolation body (210) along the axial direction is the same as the length of the non-melting region (111) along the axial direction. The outer peripheral wall of the isolation body (210) abuts against the inner cavity wall of the non-melting region (111). The first extension (220) is located at one end of the isolation body (210) along the axial direction, the first extension (220) extends radially outward, and the first extension (220) is configured to abut against the axial end face of the protective cover (100) where the opening (113) is provided.

3. The flash shield of claim 2, wherein, The first extension portion (220) extends outward in a circular shape around the periphery of the isolation body (210) with the central axis of the isolation body (210) as the center.

4. The flash shield of claim 2, wherein, The isolation body (210) has an axial end face with the opening (113) and a second extension (120) extending radially outward, the second extension (120) abutting against the first extension (220).

5. The flash shield of claim 4, wherein, The second extension (120) extends outward in a circular shape around the periphery of the protective cover (100) with the central axis of the protective cover (100) as the center.

6. The weld bead protection device according to claim 4, characterized in that, The first extension (220) extends a greater distance along the radial direction than the second extension (120) extends a greater distance along the radial direction.

7. The weld bead protection device according to claim 6, characterized in that, The surface of the first extension portion (220) that does not abut against the second extension portion (120) is coated with an anti-slip coating; And / or, the surface of the first extension portion (220) that does not abut against the second extension portion (120) is provided with protrusions and / or grooves.

8. The weld bead protection device according to claim 2, characterized in that, The isolation body (210) and the first extension (220) are integrally formed from aluminum material.

9. The weld bead protection device according to claim 1, characterized in that, The inner diameter of the non-sprayed region (111) is larger than the inner diameter of the sprayed region (112). An annular radial abutment end face (114) is formed between the non-sprayed region (111) and the sprayed region (112). One axial end of the isolation structure (200) extends into the receiving cavity (110) and abuts against the radial abutment end face (114).

10. The weld bead protection device according to claim 9, characterized in that, The area of ​​the axial end face of the isolation structure (200) that abuts against the radial abutting end face (114) is not less than one-third of the total area of ​​the axial end face of the isolation structure (200).

Images