Polishing pad conditioner

Abstract

The utility model discloses a polishing pad correction device relates to polishing equipment technical field, including flat disc and correction blade, be equipped with the mounting post on the correction blade, the mounting post is connected with the flat disc. The stable installation of correction blade on the flat disc is realized through the mounting post on the correction blade to prevent the correction blade from falling off the flat disc, and the service life of whole correction device is increased, and the practicality is higher.

Description

Technical Field

[0001] This utility model relates to the field of polishing equipment technology, and in particular to a polishing pad correction device. Background Technology

[0002] In the thinning manufacturing process of LCD panels, chemical mechanical polishing (CMP) is a core process to ensure the flatness of the glass substrate surface. As a key consumable in the CMP process, the surface uniformity and physical properties of the polishing pad directly affect the polishing rate, in-plane uniformity (WIWNU), and defect control level. However, long-term, high-frequency polishing operations can lead to topological distortions on the polishing pad surface (such as localized depressions, protrusions, or micropore blockage), accompanied by plastic deformation and cross-linking aging of the polyurethane material. This causes the effective lifespan of the polishing pad to decrease significantly to 30%-50% of the normal cycle. Currently, the industry generally adopts a proactive maintenance strategy of grinding and correcting the polishing pads.

[0003] For example, CN212947279U, published on April 13, 2021, discloses a dressing wheel for a sapphire double-sided polishing machine. It consists of a dressing wheel base, elliptical diamond pellets, and circular diamond pellets. The dressing wheel base has eight drainage grooves. The diamond pellets are glued to the dressing wheel base. However, after prolonged use, the diamond pellets are prone to detaching from the base, resulting in a short lifespan and poor practicality for the entire dressing wheel. Summary of the Invention

[0004] The purpose of this invention is to provide a polishing pad correction device with a longer service life. This invention connects the correction blade to the flat plate via a mounting post on the correction blade, thereby ensuring stable mounting of the correction blade on the flat plate, increasing the service life of the entire correction device, and making it more practical.

[0005] To achieve the above objectives, the technical solution adopted by this utility model to solve its technical problem is: a polishing pad correction device, including a flat plate and a correction blade, wherein the correction blade is provided with a mounting post, and the mounting post is connected to the flat plate.

[0006] The corrective blade is provided with a slot, the mounting post is disposed in the slot, one end of the mounting post extends out of the slot, and the mounting post is welded to the flat plate.

[0007] The mounting post and the slot have a T-shaped cross-section.

[0008] The flat plate is equipped with a heating component for heating the correction blade.

[0009] The heating assembly includes an electric heating wire disposed on a flat plate.

[0010] The flat plate is provided with a mounting groove, and the electric heating wire is placed in the mounting groove.

[0011] The flat plate is equipped with a sealing plate, which is connected to the flat plate by connecting bolts.

[0012] The sealing plate is equipped with a power supply module that is connected to the electric heating wire.

[0013] The corrective blade is a diamond ring, and the electric heating wire is arranged opposite to the diamond ring.

[0014] The beneficial effects of this utility model are:

[0015] The mounting post on the correction blade ensures stable installation of the correction blade on the flat plate, thereby preventing the correction blade from falling off the flat plate and increasing the service life of the entire correction device, making it more practical.

[0016] The grooves on the mounting post and the flat plate have a T-shaped cross section, which ensures that after the mounting base is welded to the flat plate in the groove, the correction blade is not easy to slip off the flat plate, thus ensuring the stable installation of the correction blade.

[0017] The heating assembly, consisting of a power supply module and an electric heating wire, heats the correction blade on the flat plate, allowing the heated correction blade to quickly polish the polishing pad, thus achieving stable correction of the polishing pad and a faster correction speed. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the polishing pad correction device of this utility model.

[0019] Figure 2 for Figure 1 A sectional view.

[0020] In the attached diagram: 1-flat plate, 2-correction blade, 3-mounting post, 4-slot, 5-mounting groove, 6-electric heating wire, 7-sealing plate, 8-connecting bolt, 9-power supply module. Detailed Implementation

[0021] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model.

[0022] The specific implementation of this utility model will be described in detail below with reference to specific embodiments.

[0023] like Figure 1-2 As shown, the polishing pad correction device includes a flat plate 1 and a correction blade 2. The correction blade 2 is provided with a mounting post 3, which is connected to the flat plate 1. The correction blade 2 performs correction work on the polishing pad as the flat plate 1 rotates. Specifically, the flat plate 1 is disc-shaped and is made of stainless steel.

[0024] In use, rotating the flat plate 1 causes the correction blade 2 to rotate, which in turn corrects the polishing pad. The mounting post 3 on the correction blade 2 ensures stable installation of the correction blade on the flat plate 1, thereby preventing the correction blade 2 from falling off the flat plate 1 and increasing the service life of the entire correction device, making it more practical.

[0025] The corrective blade 2 is provided with a slot 4, and a mounting post 3 is set in the slot 4. One end of the mounting post 3 extends out of the slot 4. The mounting post 3 is welded to the flat plate 1 and is inserted into the slot 4. Through the welding of the mounting post 3 and the flat plate 1, the stable connection between the mounting post 3 and the flat plate 1 is ensured, thereby ensuring the stable installation of the corrective blade 2, which is engaged with the mounting post 3, on the flat plate 1, thus preventing the corrective blade 2 from falling off the flat plate 1. In another embodiment, the mounting post 3 is a bolt, and the flat plate 1 is provided with a threaded groove that mates with the bolt. The bolt passes through the slot 4 and mates with the threaded groove on the flat plate 1, thereby realizing the convenient installation and removal of the corrective blade 2 on the flat plate 1, which facilitates the maintenance of the corrective blade 2.

[0026] The mounting post 3 and the slot 4 have T-shaped cross sections, which ensures that after the mounting base 3 is welded to the flat plate 1 in the slot 4, the correction blade 2 is not easy to slip off the flat plate 1, thus ensuring the stable installation of the correction blade 2.

[0027] The flat plate 1 is equipped with a heating component for heating the correction blade 2. The correction blade 2 is heated by the heating component, thereby ensuring that the polishing pad is heated and thus ensuring the stable correction and polishing work of the polishing pad.

[0028] The heating component includes an electric heating wire 6 mounted on a flat plate 1. After the electric heating wire 6 is powered, it heats the flat plate 1, thereby heating the correction blade 2. This allows the heated correction blade 2 to quickly polish the polishing pad, thus achieving stable correction of the polishing pad.

[0029] The flat plate 1 is provided with a mounting groove 5, and the electric heating wire 6 is placed in the mounting groove 5. The electric heating wire 6 is stored in the mounting groove 5, thereby ensuring the stable installation of the electric heating wire 6 on the flat plate 1.

[0030] The flat plate 1 is provided with a sealing plate 7, which is connected to the flat plate 1 by connecting bolts 8. The electric heating wire 6 is stably installed in the mounting groove 5 by the setting of the sealing plate 7, thereby ensuring the stable operation of the heating component. Specifically, there are four connecting bolts 8 on the sealing plate 7. The sealing plate 7 is disc-shaped, and the four connecting bolts 8 are symmetrically distributed in a ring on the sealing plate 7. The sealing plate 7 is provided with four through holes for the connecting bolts 8 to pass through, and the flat plate 1 is provided with threaded holes that mate with the connecting bolts 8.

[0031] The sealing plate 7 is equipped with a power supply module 9 connected to the electric heating wire 6. The power supply module 9 supplies power to the electric heating wire 6. Specifically, the power supply module 9 includes an STM32 microcontroller electrically connected to the electric heating wire 6. The STM32 microcontroller is equipped with a lithium battery and a charging interface, thereby ensuring that the power supply module 9 stably supplies power to the electric heating wire 6.

[0032] The correction blade 2 is a diamond ring, and the electric heating wire 6 is arranged opposite to the diamond ring to ensure that the electric heating wire 6 corrects the correction blade 2, thereby ensuring that the polishing pad can perform correction work stably. In this embodiment, the electric heating wire 6 is circular, and four diamond rings and circular electric heating wires 6 are provided on the flat plate 1.

[0033] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A polishing pad conditioner characterized by, It includes a flat plate (1) and a correction blade (2), wherein the correction blade (2) is provided with a mounting post (3), and the mounting post (3) is connected to the flat plate (1).

2. The polishing pad conditioner of claim 1, wherein The corrective blade (2) is provided with a slot (4), the mounting post (3) is set in the slot (4), one end of the mounting post (3) extends out of the slot (4), and the mounting post (3) is welded to the flat plate (1).

3. The polishing pad conditioner of claim 2, wherein, The mounting column (3) and the slot (4) have T-shaped cross sections.

4. The polishing pad conditioner of any of claims 1-3, wherein, The flat plate (1) is provided with a heating component for heating the correction blade (2).

5. The polishing pad conditioner of claim 4, wherein, The heating assembly includes an electric heating wire (6) disposed on a flat plate (1).

6. The polishing pad conditioner of claim 5, wherein, The flat plate (1) is provided with a mounting groove (5), and the electric heating wire (6) is disposed in the mounting groove (5).

7. The polishing pad conditioner of claim 6, wherein The flat plate (1) is provided with a sealing plate (7), which is connected to the flat plate (1) by connecting bolts (8).

8. The polishing pad conditioner of claim 7, wherein, The sealing plate (7) is provided with a power supply module (9) connected to the electric heating wire (6).

9. The polishing pad conditioner of claim 7, wherein, The corrective blade (2) is a diamond ring, and the electric heating wire (6) is arranged opposite to the diamond ring.

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