Ball screw dismounting assembly

Abstract

The utility model relates to the technical field of semiconductor manufacturing provides a kind of ball screw dismounting assembly, comprising: screw rod, sleeve and dismounting component;The sleeve is sleeved in the one end of the screw rod;The dismounting component includes fixed part and rotating part;The screw rod has dismounting state, when the screw rod is the dismounting state, the fixed part is set to the screw rod for the circumferential fixation to screw rod, the rotating part is set to the sleeve, and the rotating part and the sleeve circumferential positioning, rotating position is set on the rotating part for driving it rotates around the central axis of the screw rod.The above-mentioned ball screw dismounting assembly can improve the dismounting efficiency of the sleeve of ball screw.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, and in particular to a ball screw assembly / disassembly assembly. Background Technology

[0002] Ion implantation is a crucial technology in modern integrated circuit manufacturing. It is a material modification method that introduces dopant ions into a solid. Simply put, the ion implantation process involves accelerating a beam of ions composed of atoms to be doped towards a solid material in a vacuum system, injecting the atoms into the solid material, thereby forming a surface layer with special properties in a region of the solid material.

[0003] Because the width of the ion beam cannot completely cover the entire surface of the wafer during ion implantation, directional scanning is required during the implantation process to ensure that the ion beam is uniformly distributed on the wafer surface.

[0004] Oriented scanning requires a vertical scanning motion mechanism to drive the wafer in high-speed, high-frequency directional reciprocating motion. This vertical scanning motion mechanism typically uses ball screws, and the frequent directional movements accelerate the wear of these ball screws. Once the ball screw wear exceeds the allowable range, it can lead to problems such as inaccurate scanning positioning, motion jitter, and the generation of metal debris. Ultimately, this can cause the ion implantation system to malfunction, necessitating shutdown for cleaning or replacement.

[0005] There are no standard tools for removing the ferrule from the existing ball screw. It requires manual disassembly and assembly using existing tools, which is difficult and inefficient.

[0006] Therefore, this utility model provides a ball screw assembly for disassembly and assembly to improve the efficiency of removing the screw sleeve. Utility Model Content

[0007] The purpose of this utility model is to provide a ball screw assembly for disassembly and assembly to improve the efficiency of removing the screw sleeve.

[0008] This utility model provides a ball screw assembly for disassembly and assembly, including: a screw, a retainer, and a disassembly component;

[0009] The ferrule is fitted onto one end of the lead screw;

[0010] The disassembly assembly includes a fixing component and a rotating component;

[0011] The lead screw has a detachable state. When the lead screw is in the detachable state, the fixing member is provided on the lead screw to fix the lead screw circumferentially.

[0012] The rotating component is disposed on the sleeve and is circumferentially positioned with the sleeve. The rotating component is provided with a rotation position for driving it to rotate around the central axis of the lead screw.

[0013] Optionally, the fixing member has a first positioning hole, and a limiting structure is provided in the first positioning hole. The end of the lead screw away from the sleeve is fitted into the first positioning hole, and the limiting structure restricts the rotation of the lead screw relative to the first positioning hole.

[0014] Optionally, a first limiting plane is provided on the outer wall of the end of the lead screw away from the ferrule;

[0015] The limiting structure is a second limiting plane, which is disposed on the inner wall of the first positioning hole, and the first limiting plane and the second limiting plane fit together conformally.

[0016] Optionally, the fastener includes a base and a fixing sleeve, one axial end of the fixing sleeve is connected to the base, the first positioning hole is opened at the other axial end of the fixing sleeve, and the dimension of the base along the radial direction of the fixing sleeve is larger than the outer diameter of the fixing sleeve.

[0017] Optionally, the first positioning hole is divided into a cylindrical section and an irregular section along its axial direction. The cylindrical section extends to one end of the fixing member. The inner diameter of the cylindrical section is the same as the outer diameter of the end of the lead screw away from the ferrule. The limiting structure is disposed on the inner wall of the irregular section.

[0018] Optionally, the outer periphery of the card sleeve has a notch;

[0019] The rotating component is provided with a second positioning hole, and the inner wall of the second positioning hole is provided with a protrusion. The sleeve is located inside the second positioning hole, and the protrusion is located inside the notch.

[0020] Optionally, the rotation position is a non-circular drive hole formed on the rotating component.

[0021] Optionally, the rotating position is located at one axial end of the rotating component, and the second positioning hole is located at the other axial end of the rotating component.

[0022] Optionally, the ball screw assembly may further include a mounting component;

[0023] The mounting assembly includes a mounting component having a first reference plane and a second reference plane, the first reference plane and the second reference plane being parallel.

[0024] The lead screw is in an installed state. When the lead screw is in the installed state, the mounting component is disposed on the lead screw, and both the first reference plane and the second reference plane are perpendicular to the axial direction of the lead screw.

[0025] Optionally, the mounting component is provided with a third positioning hole;

[0026] The lead screw is located inside the third positioning hole;

[0027] The third positioning hole is connected to the first reference plane and the second reference plane. The mounting component is provided with an opening that is radially connected to the third positioning hole, and the opening allows the lead screw to enter and exit radially.

[0028] In summary, the ball screw assembly includes: the screw, the retainer, and the disassembly / removal components;

[0029] The ferrule is fitted onto one end of the lead screw; the disassembly assembly includes a fixing component and a rotating component; the lead screw is in a disassembled state, and when the lead screw is in the disassembled state, the fixing component is disposed on the lead screw to fix it circumferentially, the rotating component is disposed on the ferrule and is circumferentially positioned with the ferrule, and the rotating component is provided with a rotation position for driving it to rotate around the central axis of the lead screw.

[0030] With this configuration, the aforementioned ball screw assembly allows for circumferential fixation of the screw when it is in the disassembly state. The fixing component secures the screw circumferentially, while the rotating component fixes the ferrule and rotates it relative to the screw, facilitating ferrule removal and installation. The cooperation of the fixing and rotating components makes ferrule rotation easier, optimizing and standardizing the ferrule removal and installation process. This results in more even force distribution during ferrule removal and installation, reducing the probability of ferrule damage. Furthermore, it improves the efficiency of ferrule removal and installation, enhances the efficiency of post-removal maintenance of the ball screw, and saves maintenance time. Attached Figure Description

[0031] Figure 1 This is a schematic diagram of the main structure of a lead screw according to an embodiment of the present invention;

[0032] Figure 2 This is a side view of the lead screw according to an embodiment of the present invention;

[0033] Figure 3 This is a bottom view of the lead screw structure according to an embodiment of the present invention;

[0034] Figure 4 This is a schematic diagram of the structure of a card sleeve according to an embodiment of the present invention;

[0035] Figure 5This is a schematic diagram of the lead screw in a disassembled state according to an embodiment of the present invention.

[0036] Figure 6 This is a schematic diagram of the structure of a fastener according to an embodiment of the present invention;

[0037] Figure 7 This is a schematic diagram of the structure of a rotating component according to an embodiment of the present invention;

[0038] Figure 8 This is a bottom view of the rotating component according to an embodiment of the present invention;

[0039] Figure 9 This is a schematic diagram of the lead screw in the installed state according to an embodiment of the present invention. Figure 1 ;

[0040] Figure 10 This is a schematic diagram of the lead screw in the installed state according to an embodiment of the present invention. Figure 2 ;

[0041] Figure 11 This is a schematic diagram of the structure of the mounting assembly according to an embodiment of the present invention. Figure 1 ;

[0042] Figure 12 This is a schematic diagram of the structure of the mounting assembly according to an embodiment of the present invention. Figure 2 .

[0043] In the attached diagram:

[0044] 10-Lead screw; 11-First limiting plane; 101-Small diameter section; 102-Medium diameter section; 103-Large diameter section;

[0045] 20 - Card sleeve; 21 - Notch;

[0046] 30 - Disassembly component; 31 - Fixing component; 311 - Base; 312 - Fixing sleeve; 32 - Rotating component; 321 - Rotation position; 33 - First positioning hole; 331 - Cylindrical section; 332 - Irregular section; 34 - Limiting structure; 35 - Second positioning hole; 36 - Protrusion; 37 - Small diameter hole;

[0047] 40 - Mounting component; 41 - Mounting piece; 42 - First reference plane; 43 - Second reference plane; 44 - Third positioning hole; 45 - Opening;

[0048] 50 - Upper platform; 51 - Groove;

[0049] 60 - Retaining ring;

[0050] 70-Ball bearing;

[0051] 80- Lower platform. Detailed Implementation

[0052] The ball screw assembly for disassembly and assembly proposed in this utility model will be further described in detail below with reference to the accompanying drawings and specific embodiments. The advantages and features of this utility model will become clearer from the following description. It should be noted that the drawings are all in a very simplified form and use non-precise proportions, and are only used to facilitate and clarify the illustration of the embodiments of this utility model.

[0053] As used in this invention, the singular forms “a,” “an,” and “the” include plural objects; the term “or” is generally used to mean “and / or”; the term “a number” is generally used to mean “at least one”; and the terms “at least two” or “more than” are generally used to mean “two or more”. Furthermore, the terms “first,” “second,” and “third” are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined with “first,” “second,” or “third” may explicitly or implicitly include one or at least two of that feature. Furthermore, the terms "installed," "connected," and "attached," as used in this utility model, and the term "set" on one element from another, should be interpreted broadly. They generally only indicate a connection, coupling, cooperation, or transmission relationship between the two elements, which can be direct or indirect through an intermediate element. They should not be construed as indicating or implying a spatial positional relationship between the two elements, meaning one element can be located inside, outside, above, below, or to one side of the other element, unless otherwise explicitly stated. Those skilled in the art can understand the specific meaning of these terms in this utility model according to the specific circumstances. Additionally, directional terms such as above, below, up, down, upward, downward, left, and right are used relative to exemplary embodiments as shown in the figures, with upward or up direction pointing towards the top of the corresponding figure, and downward or down direction pointing towards the bottom of the corresponding figure.

[0054] This embodiment provides a ball screw assembly for disassembly and assembly, including: a screw 10, a retainer 20, and a disassembly component 30;

[0055] Combination Figure 1 As shown, the lead screw 10 has a three-section stepped structure with the outer diameter gradually increasing from top to bottom, namely the small diameter end 101, the medium diameter section 102, and the large diameter section 103.

[0056] The sleeve 20 is fitted onto the upper small-diameter section 101 of the lead screw 10. Specifically, the sleeve 20 is threaded onto the upper small-diameter section 101 of the lead screw 10. Therefore, during the removal of the sleeve 20, it is necessary to rotate the sleeve 20 relative to the lead screw 10 to loosen the sleeve 20.

[0057] The mean diameter section 102 of the lead screw 10 is used to install the bearing (not shown in the figure), and the ferrule 20 has an axial positioning function for the bearing.

[0058] The large-diameter section 103 of the lead screw 10 is a screw section, which is used to cooperate with the threaded transmission of the ball bearing. The lead screw 10 converts its own rotational motion into the directional reciprocating motion of the ball bearing to achieve directional reciprocating drive of the wafer.

[0059] Please continue to refer to this. Figures 1 to 3 As shown, the lower end of the lead screw 10 (the end away from the ferrule 20, which is also the lower end of the large diameter section 103) is provided with a first limiting plane 11 on its outer wall.

[0060] Two first limiting planes 11 are provided, and the two first limiting planes 11 are arranged opposite to each other and parallel along a radial direction of the lead screw 10. The first limiting planes 11 can be formed by de-meating the outer periphery of the lower end of the lead screw 10.

[0061] The lead screw 10 has a slender structure. Although it has a first limiting plane 11 at its lower end, the axial width of the first limiting plane 11 is usually narrow, and conventional tools such as wrenches cannot fix it.

[0062] Please refer to Figure 4 As shown, in this embodiment, the sleeve 20 has a circular structure with four notches 21 evenly distributed on its outer circumference. The structure of the sleeve 20 is quite special, and there are no special tools for disassembly and assembly. It can be removed by applying force to the notches 21 on the outer ring of the sleeve 20 with an existing screwdriver, but it is inconvenient to apply force during the removal process, the removal is difficult, the removal efficiency is low, and it is easy to damage the notch structure of the outer ring of the sleeve 20.

[0063] The disassembly assembly 30 includes a fixing component 31 and a rotating component 32;

[0064] The lead screw 10 is in a detachable state. When the lead screw 10 is in the detachable state, it is removed from the machine tool, while the ferrule 20 and bearings are still connected to the lead screw 10. At this time, it is necessary to remove the ferrule 20 from the lead screw 10 or install a new ferrule 20 on the lead screw 10.

[0065] When the lead screw 10 is in the disassembled state, the fixing member 31 is disposed on the lead screw 10 to fix the lead screw 10 circumferentially, thereby restricting the rotation of the lead screw 10.

[0066] The rotating component 32 is disposed on the sleeve 20 and is circumferentially positioned with the sleeve 20. The rotating component 32 is provided with a rotating position 321 for driving it to rotate around the central axis of the lead screw 10.

[0067] Combination Figure 5 As shown, the lower end of the lead screw 10 is fixed to the fixing member 31 to achieve circumferential fixation of the lead screw 10. The rotating member 32 is disposed at the upper end of the lead screw 10 and is sleeved on the retaining sleeve 20, since the rotating member 32 and the retaining sleeve 20 are circumferentially positioned. The provision of the rotation position 321 facilitates driving the rotating member 32 to rotate around the central axis of the lead screw 10.

[0068] When the rotating component 32 rotates, it will drive the ferrule 20 to rotate synchronously. However, the lead screw 10 is fixed by the fixing component 31, so the lead screw 10 will not rotate. Therefore, when the rotating component 32 drives the ferrule 20 to rotate, the ferrule 20 will rotate relative to the lead screw 10, so as to facilitate the removal of the ferrule 20.

[0069] The aforementioned ball screw assembly allows for circumferential fixation of the screw 10 via the fixing component 31 when the ball screw is in the disassembly state. The rotating component 32 fixes the ferrule 20 and drives it to rotate relative to the screw 10, facilitating the removal and installation of the ferrule 20. The cooperation of the fixing component 31 and the rotating component 32 makes ferrule rotation easier, optimizing and standardizing the ferrule removal and installation process. This results in more even force distribution during ferrule removal and installation, reducing the probability of ferrule damage. Furthermore, it improves the efficiency of ferrule removal and installation, enhances the efficiency of maintenance after ball screw removal, and saves maintenance time.

[0070] Combination Figure 5 and Figure 6 As shown, in this embodiment, the fixing member 31 is adapted to the shape of the lower end of the lead screw 10.

[0071] The fixing member 31 is provided with a first positioning hole 33, and a limit structure 34 is provided in the first positioning hole 33. The end of the lead screw 10 away from the sleeve 20 ( Figure 5 The lower end of the lead screw 10 is inserted into the first positioning hole 33, and the limiting structure 34 restricts the rotation of the lead screw 10 relative to the first positioning hole 33.

[0072] Since the lower end of the lead screw 10 is provided with two first limiting planes 11, the limiting structure 34 in this embodiment is a second limiting plane. The second limiting plane is provided on the inner wall of the first positioning hole 33, and the first limiting plane 11 fits the second limiting plane in a conformal manner.

[0073] like Figure 6 As shown, the first positioning hole 33 is divided into a cylindrical section 331 and an irregular section 332 along its axial direction, and one end of the cylindrical section 331 ( Figure 6 The lower end of the cylindrical section 331 and one end of the irregular section 332 ( Figure 6 The upper end of the irregular segment 332 is connected, and the cylindrical segment 331 extends to one end of the fixing member 31. Figure 6 The upper end of the fixing member 31), the inner diameter of the cylindrical section 331 is the same as the outer diameter of the large diameter section of the lead screw 10, and the limiting structure 34 is disposed on the inner wall of the irregular section 332.

[0074] The lower end of the lead screw 10 can be inserted into the first positioning hole 33 through the upper end of the fixing member 31. The lower end of the lead screw 10 is inserted into the irregular section 332, and the two first limiting planes 11 conformally fit with the two second limiting planes respectively. The irregular section 332 forms a circumferential limit for the lead screw 10. A part of the large-diameter section of the lead screw 10 is inserted into the cylindrical section 331 and conformally fits with the inner circumferential surface of the cylindrical section 331 to ensure the stability of the lead screw 10.

[0075] In this embodiment, the length of the cylindrical segment 331 is preferably much longer than the length of the irregular segment 332. The cylindrical segment 331 serves to stabilize the entire lead screw 10. For example, the length of the cylindrical segment 331 can be set to about one-third of the overall length of the lead screw 10. The length of the irregular segment 332 should not be less than the axial dimension of the first limiting plane 11.

[0076] In this embodiment, the cross-section of the irregular segment 332 can be set to rectangular, and the two opposite sides of the irregular segment 332 serve as two limiting structures 34 (second limiting planes), respectively conforming to the two first limiting planes 11. In other alternative embodiments, the cross-section of the irregular segment 332 can be the same as the cross-section of the lower end of the lead screw 10 (e.g., Figure 3 (As shown) maintain consistency, that is, the cross-section of the irregular segment 332 is an approximately rectangular structure composed of straight lines and arcs. In other alternative embodiments, when the shape of the lower end of the lead screw 10 changes, the irregular segment 332 can adapt to the change in the shape of the lower end of the lead screw 10 to ensure that the lower end of the lead screw 10 can be inserted into the irregular segment 332, and the shape of the lead screw 10 can be constrained circumferentially.

[0077] In this embodiment, the limiting structure 34 is configured as a planar structure to adapt to the structure of the lead screw 10. In other alternative embodiments, the specific structure of the limiting structure 34 can be adjusted based on the specific structural form of the lead screw 10. For example, the limiting structure 34 can be a bolt structure, with the bolt connected to the fixing member 31. By tightening the bolt, its head is radially pressed against the outer wall of the lead screw to limit the rotation of the lead screw. Alternatively, the limiting structure 34 can be a pin, with the pin disposed on the inner wall of the irregular section 332. The pin is radially inserted into a pin hole on the outer wall of the lead screw to limit the rotation of the lead screw.

[0078] Furthermore, such as Figure 6As shown, the fixing member 31 includes a base 311 and a fixing sleeve 312, and one axial end of the fixing sleeve 312 ( Figure 6 The lower end of the fixing sleeve 312 is connected to the base 311, and the first positioning hole 33 is opened at the other axial end of the fixing sleeve 312. Figure 6 The upper end of the fixing sleeve 312), the dimension of the base 311 along the radial direction of the fixing sleeve 312 is greater than the outer diameter of the fixing sleeve 312.

[0079] like Figure 6 As shown, the fixing sleeve 312 has a cylindrical structure, and its inner cavity serves as the cylindrical segment 331 of the first positioning hole 33. The irregularly shaped segment 332 extends through the base 311. The base 311 has a plate-like structure and is generally rectangular. The base 311 is perpendicular to the axial direction of the fixing sleeve 312, and the fixing sleeve 312 is connected to the center of the base 311 along its length. Therefore, as... Figure 6 As shown, the base 311 is located on both radial sides of the fixing sleeve 312. Figure 6 Extending outwards in the left and right directions (in the middle) to form two pedals.

[0080] Combination Figure 5 As shown, during the assembly and disassembly of the retaining sleeve 20, the fixing member 31 is placed on the ground with the retaining sleeve 312 facing upwards and the base 311 against the ground. The lower end of the lead screw 10 is inserted into the inner cavity of the retaining sleeve 312 (the cylindrical section 331 of the first positioning hole 33), and the lower end of the lead screw 10 is inserted into the irregular section 332 to achieve circumferential positioning of the lead screw 10. Then, the rotating member 32 is engaged with the retaining sleeve 20, and both feet are stepped on the pedals on both sides of the base 311 to ensure stability.

[0081] In this embodiment, the first positioning hole 33 is located at the upper end of the fixing sleeve 312 and extends through the base 311; therefore, the first positioning hole 33 is a through hole structure. In other alternative embodiments, the first positioning hole 33 can be a blind hole structure, that is, the first positioning hole 33 is located at the upper end of the fixing sleeve 312 and does not extend downward through the base 311, so that the entire first positioning hole 33 is located inside the fixing sleeve 312 and does not occupy the base 311.

[0082] In this embodiment, the fixing member 31 consists of a base 311 and a fixing sleeve 312, which facilitates the flexible movement of the fixing member 31 and allows it to be fixed by stepping on it with both feet. In other alternative embodiments, the fixing member 31 may only include the fixing sleeve 312. In this case, the fixing sleeve 312 can be fixedly installed in a specific position, such as being fixed on a workbench for fixed-point use.

[0083] In this embodiment, two parallel first limiting planes 11 are provided on the outer periphery of the lower end of the lead screw 10, so two second limiting planes (limiting structures 34) are provided in the first positioning hole 33. In other alternative embodiments, one, three, four, or more first limiting planes 11 may be provided on the outer periphery of the lower end of the lead screw 10. For example, the lower end of the lead screw 10 may be triangular, forming three first limiting planes 11 that are at an included angle to each other; or the lower end of the lead screw 10 may be rectangular, forming four first limiting planes 11. The number of first limiting planes 11 provided on the outer periphery of the lower end of the lead screw 10 and the shape of the lower end of the lead screw 10 can be adjusted based on actual positioning requirements. In addition, the specific shape of the first positioning hole 33 can be adjusted adaptively based on the shape of the lower end of the lead screw 10. Preferably, the first positioning hole 33 conformally fits the lower end of the lead screw 10 to form circumferential positioning of the lead screw 10.

[0084] In other alternative embodiments, the first limiting plane 11 can be replaced with a groove provided on the outer wall of the lower end of the lead screw 10. In this case, the limiting structure 34 is set as a protrusion on the inner circumferential surface of the first positioning hole 33, which conformally fits the groove to limit the rotation of the lead screw 10. The specific structure of the limiting structure 34 can be adapted to the specific shape of the lower end of the lead screw 10.

[0085] In this embodiment, the base 311 is configured as a rectangular plate structure. The width of the base 311 is the same as the outer diameter of the fixing sleeve 312, and the two sides of the base 311 along its width direction are tangent to the outer peripheral surface of the fixing sleeve 312. The length of the base 311 is greater than the outer diameter of the fixing sleeve 312, and the base 311 extends outward along its length on both sides, forming a structure located at... Figure 6 The fixing sleeve 312 has pedals on both sides for easy stepping and securing. In other alternative embodiments, the base 311 can be configured as a disc-shaped structure, with a diameter larger than the outer diameter of the fixing sleeve 312, and the base 311 and the fixing sleeve 312 are coaxially arranged. In this case, when the base 311 is connected to the bottom center of the fixing sleeve 312, the base 311 forms an annular stepping area around the fixing sleeve 312, facilitating stepping and securing from any direction. The specific shape of the base 311 can be adjusted based on actual usage requirements.

[0086] In this embodiment, the base 311 is configured as a plate structure, which is relatively lightweight and requires external force (such as stepping) for fixation. In other alternative embodiments, the base 311 can be configured as a block structure, which should ensure that the base 311 is relatively heavy. In this case, the fastener 31 can be naturally fixed by the weight of the base 311 itself.

[0087] In this embodiment, the outer contour of the fixing sleeve 312 is set as a cylindrical surface. In other alternative embodiments, the outer contour of the fixing sleeve 312 can be set as a rectangular or polygonal surface. The shape of the outer contour of the fixing sleeve 312 can be flexibly adjusted based on actual usage requirements.

[0088] Please refer to Figure 5 and Figure 7 As shown, the rotating component 32 is provided with a second positioning hole 35, the inner diameter of which is equal to the outer diameter of the sleeve 20. Since the outer circumferential surface of the sleeve 20 has four notches 21 evenly distributed, in this embodiment, the inner wall of the second positioning hole 35 is provided with four protrusions 36.

[0089] The sleeve 20 is located inside the second positioning hole 35, and the sleeve 20 and the second positioning hole 35 are coaxially arranged, with the four protrusions 36 located in the four notches 21 respectively. Through the cooperation between the notches 21 and the protrusions 36, the circumferential positioning of the sleeve 20 and the rotating part 32 is achieved.

[0090] like Figure 7 As shown, the outer contour of the rotating component 32 has a stepped shaft structure that is smaller at the top and larger at the bottom. The second positioning hole 35 is opened at the lower end of the rotating component 32 and is located in the large-diameter section of the rotating component 32. A small-diameter hole 37 is opened in the small-diameter end of the rotating component 32. The diameter of the small-diameter hole 37 is smaller than the diameter of the second positioning hole 35, and the small-diameter hole 37 is coaxially arranged with the second positioning hole 35. The diameter of the small-diameter hole 37 is greater than or equal to the outer diameter of the small-diameter end of the lead screw 10. When the rotating component 32 is fitted into the sleeve 20, the small-diameter hole 37 is used to accommodate the small-diameter section of the lead screw 10.

[0091] In this embodiment, the rotation position 321 is disposed at the upper end of the rotating member 32, and the rotation position 321 is a non-circular drive hole formed on the rotating member 32. Please refer to... Figure 7 and Figure 8 As shown, the rotating position 321 is a rectangular hole that communicates with the small-diameter hole 37, and the diameter of the circumscribed circle of the rectangular hole is smaller than the inner diameter of the small-diameter hole 37. This rectangular hole can be used with an existing torque wrench to drive the rotation of the rotating component 32. The central axis of the rotating position 321 is collinear with the central axis of the second positioning hole 35. Here, the rotating position 321 is a rectangular hole, and the central axis of the rotating position 321 is the central axis of the circumscribed circle of the rectangular hole.

[0092] During use, the rotating component 32 is first fitted onto the retaining sleeve 20. The outer circumferential surface of the retaining sleeve 20 conforms to the inner circumferential surface of the second positioning hole 35, and the four protrusions 36 are respectively inserted into the four notches 21. The rectangular head of the torque wrench is inserted into the rectangular hole (rotation position 321) at the upper end of the retaining sleeve 20, and the torque wrench is rotated to drive the rotating component 32 and the retaining sleeve 20 to rotate. Since the lead screw 10 is fixed by the fixing component 31 and cannot rotate, the retaining sleeve 20 rotates relative to the lead screw 10, thereby realizing the removal or installation of the retaining sleeve 20. After the retaining sleeve 20 is removed or installed, the rectangular head of the torque wrench is pulled out of the rectangular hole at the upper end of the retaining sleeve 20, and then the rotating component 32 is removed from the retaining sleeve 20, so that the rotating component 32 is separated from the retaining sleeve 20.

[0093] In this embodiment, both the notch 21 and the protrusion 36 are approximately cuboid in shape. In other alternative embodiments, the notch 21 and the protrusion 36 can be set as semicircular, triangular, or other shapes. The specific shapes of the notch 21 and the protrusion 36 can be adjusted based on actual needs.

[0094] In this embodiment, the rotating member 32 is provided with four protrusions 36 that respectively mate with four notches 21. In other alternative embodiments, the number of notches 21 and protrusions 36 can be adjusted based on actual usage requirements, for example, one, two, three or more notches 21 and protrusions 36.

[0095] In this embodiment, the four notches 21 are evenly distributed along the circumferential direction of the sleeve 20. Therefore, the four protrusions 36 are also evenly distributed circumferentially on the inner circumferential surface of the second positioning hole 35 to match the positions of the four notches 21. In other alternative embodiments, the four notches 21 can be distributed non-centrally symmetrically on the outer circumferential surface of the sleeve 20. In this case, the four protrusions 36 can also be distributed non-centrally symmetrically on the inner circumferential surface of the second positioning hole 35. The specific distribution of the four notches 21 and the four protrusions 36 can be adjusted based on actual usage requirements.

[0096] In this embodiment, the rotation position 321 is a rectangular hole. In other alternative embodiments, the rotation position 321 can be a triangular hole, a regular pentagon, or other non-circular hole, to cooperate with a corresponding torque wrench to drive the rotation of the rotating component 32. In other alternative embodiments, the rotation position 321 can also be a non-circular protrusion connected to the upper end of the rotating component 32, such as a regular hexagonal protrusion, in which case the rotation position 321 can cooperate with an internal hexagonal wrench to drive the rotation. The specific structural form of the rotation position 321 can be adjusted based on the actual rotation driving method of the rotating component 32.

[0097] In this embodiment, the rotation position 321 is located on the top of the rotating member 32 and is coaxially arranged with the sleeve 20. In other alternative embodiments, the rotation position 321 can be an opening formed on the side of the rotating member 32, in which case a drive arm inserted into the opening can be used to apply a circumferential external force to drive the rotation of the rotating member 32. The position of the rotation position 321 can be flexibly adjusted based on actual rotation requirements.

[0098] In this embodiment, the rotation position 321 is configured as a hole-like structure. This structure requires the use of an existing wrench to drive the rotation of the rotating component 32. In other alternative embodiments, the rotation position 321 can also be a lever arm connected to the side of the rotating component 32. This lever arm itself also functions as a wrench. By gripping and driving the lever arm, the rotating component 32 can be driven to rotate, in which case no other external tools are required.

[0099] In this embodiment, the outer contour of the rotating component 32 is generally cylindrical. In other alternative embodiments, the outer contour of the rotating component 32 can be set as a cuboid or other shapes, and the shape of the outer contour of the rotating component 32 can be adjusted according to actual usage requirements.

[0100] In this embodiment, the rotating component 32 is configured as an approximately "convex" shape, with a smaller top and a larger bottom. This design satisfies the diameter requirements of the internal second positioning hole 35 and the small-diameter hole 37, while also helping to save materials and reduce material costs. In other alternative embodiments, the rotating component 32 can be configured as a cylindrical structure with the same outer diameter at both the top and bottom. The specific structure of the rotating component 32 can be adjusted based on actual needs.

[0101] In this embodiment, the inner diameter of the second positioning hole 35 is equal to the outer diameter of the sleeve 20. When the rotating member 32 is fitted onto the sleeve 20, the inner circumferential surface of the second positioning hole 35 conformally fits the outer circumferential surface of the sleeve 20, ensuring the stability of the fit between the rotating member 32 and the sleeve 20. In other alternative embodiments, the inner diameter of the second positioning hole 35 can be appropriately larger than the outer diameter of the sleeve 20, so that when the rotating member 32 is fitted onto the sleeve 20, there can be an appropriate gap between the inner circumferential surface of the second positioning hole 35 and the outer circumferential surface of the sleeve 20. It should be ensured that the distance from the radially inner side of the protrusion 36 to the central axis of the second positioning hole 35 is less than the outer diameter of the sleeve 20, so that when the rotating member 32 is fitted onto the sleeve 20, the protrusion 36 remains within the notch 21 and does not radially dislodge from the notch 21.

[0102] In this embodiment, the rotating component 32 is fitted to the ferrule 20 by being fitted over it. In other alternative embodiments, the fitting method between the rotating component 32 and the ferrule 20 can be adjusted based on the actual structure of the ferrule 20. For example, when the outer circumferential surface of the ferrule 20 has a hole structure and the material structure around the hole structure has sufficient strength, the rotating component 32 can be radially inserted into the hole structure. In this case, the rotating component 32 is similar to a cantilever structure. By driving a circumferential force on the free end of the rotating component 32, the rotating component 32 rotates around the lead screw 10, thereby causing the ferrule 20 to rotate relative to the lead screw 10.

[0103] The lead screw 10 also has an installation state. In this embodiment, in order to facilitate the installation of the lead screw 10, the ball screw assembly also includes an installation component 40.

[0104] Combination Figure 9 As shown, when the lead screw 10 is in the installed state, it is mounted on the upper platform 50. The upper platform 50 has a groove 51, and the bottom of the groove 51 has an opening for the lead screw 10 to pass through. The diameter of this opening is smaller than the outer diameter of the retaining sleeve 20, so the retaining sleeve 20 is located within the groove 51. Furthermore, a retaining ring 60 is provided within the groove 51 to fix the upper end of the lead screw 10. The retaining ring 60 forms a circumferential positioning relationship with the lead screw 10 via a pin, and is also fastened to the upper platform 50 by screws to position the lead screw axially. Additionally, a bearing is provided on the lead screw 10 (the bearing is located below the retaining sleeve 20, not shown in the figure). The retaining sleeve 20 is supported on the bearing and can rotate with the bearing, thus allowing the lead screw 10 to rotate freely. The motor drives the retaining ring 60 to rotate, and the retaining ring 60 drives the lead screw 10 to rotate. The assembly methods of the motor, bearing, retaining ring 60, etc., are consistent with existing methods and belong to prior art, and will not be described further here.

[0105] Please continue to refer to this. Figure 9 As shown, the lead screw 10 and the ball bearing 70 are threadedly connected. The ball bearing 70 is fixedly connected to the lower platform 80. Therefore, when the lead screw 10 rotates, it converts the rotational motion into the vertical linear motion of the ball bearing 70, thereby causing the lower platform 80 to reciprocate vertically. The lower platform 80 can be used to store wafers, thereby driving the wafers to achieve directional linear reciprocating motion.

[0106] After the lead screw 10 is installed, it is necessary to ensure the relative positional relationship between the upper platform 50 and the lower platform 80. For example, it is necessary to ensure that the lower surface of the upper platform 50 and the upper surface of the lower platform 80 are parallel. If the relative positional error between the two is large, it will easily cause the movement direction of the lower platform 80 to deviate, which in turn will cause the scanning direction of the wafer to be incorrect.

[0107] Therefore, in this embodiment, the installation component 40 is added to ensure the relative positional accuracy of the upper platform 50 and the lower platform 80.

[0108] Combination Figures 9 to 11 As shown, the mounting assembly 40 includes a mounting member 41, which has a first reference plane 42 and a second reference plane 43, the first reference plane 42 and the second reference plane 43 being parallel.

[0109] The lead screw 10 is in an installed state, at which time the lead screw 10 is installed on the upper platform 50 and the lead screw 10 is threadedly engaged with the ball bearing 70.

[0110] When the lead screw 10 is in the installed state, the mounting member 41 is disposed on the lead screw 10, and both the first reference plane 42 and the second reference plane 43 are perpendicular to the axial direction of the lead screw 10.

[0111] Specifically, such as Figure 11 and Figure 12 As shown, the outer contour of the mounting part 41 is generally cylindrical. The upper end of the mounting part 41 along its axial direction serves as the first reference plane 42, and the lower end of the mounting part 41 along its axial direction serves as the second reference plane 43.

[0112] The mounting component 41 is provided with a third positioning hole 44, which is provided through the axial direction of the mounting component 41, that is, the third positioning hole 44 is connected to the first reference plane 42 and the second reference plane 43.

[0113] The third positioning hole 44 is used to accommodate the lead screw 10. When the lead screw 10 is in the installed state, the lead screw 10 is located in the third positioning hole 44. Preferably, the hole diameter of the lead screw 10 is appropriately larger than the outer diameter of the lead screw 10.

[0114] Furthermore, the mounting component 41 is provided with an opening 45 that radially communicates with the third positioning hole 44, the opening 45 allowing the lead screw 10 to enter and exit radially. The width of the opening 45 should be greater than the outer diameter of the lead screw 10. Therefore, the mounting component 41 has an overall approximately "C" shaped structure.

[0115] Mounting component 41 is designed to ensure that the lower surface of the upper platform 50 and the upper surface of the lower platform 80 are parallel when the lead screw 10 is installed.

[0116] Combination Figure 9 As shown, the mounting part 41 is sleeved on the lead screw 10 through the opening 45, and the lower end face (second reference plane 43) of the mounting part 41 is horizontally attached to the upper surface of the lower platform 80. At this time, the upper end face (first reference plane 42) of the mounting part 41 is parallel to the upper surface of the lower platform 80.

[0117] Then rotate the lead screw 10, causing the ball bearing 70 to move the lower platform 80 upwards, approaching the lower surface of the upper platform 50. For example... Figure 10As shown, rotate the screw until the upper end face (first reference plane 42) of the mounting part 41 contacts the lower surface of the upper platform 50. At this point, loosen the screw of the retaining ring 60, and adjust the angle of the lead screw 10 accordingly. Continue rotating the lead screw 10 so that the lower end face (second reference plane 43) of the mounting part 41 fits against the upper surface of the lower platform 80, and the upper end face (first reference plane 42) of the mounting part 41 conforms to the lower surface of the upper platform 50, ensuring that the upper surface of the lower platform 80 is parallel to the lower surface of the upper platform 50. Then retighten the screw of the retaining ring 60 to fix the lead screw 10. Finally, reverse the lead screw 10 so that the ball bearing 70 drives the lower platform 80 downward away from the lower surface of the upper platform 50, and remove the mounting part 41.

[0118] In this embodiment, the mounting component 41 is configured as an approximately "C"-shaped structure. In other alternative embodiments, the mounting component 41 may be configured as a U-shaped structure, or as a ring structure formed by splicing two halves together. The specific structural shape of the mounting component 41 can be adjusted based on actual usage requirements.

[0119] In this embodiment, the outer contour of the mounting member 41 is set as a cylindrical structure. In other alternative embodiments, the outer contour of the mounting member 41 can be set as a cuboid or other shapes, and the specific shape of the outer contour of the mounting member 41 can be adjusted according to actual needs.

[0120] In this embodiment, the third positioning hole 44 on the mounting component 41 is a circular hole. In other alternative embodiments, the third positioning hole 44 can be a square hole or a hole of other shapes. The specific shape of the third positioning hole 44 can be adjusted according to actual needs.

[0121] In this embodiment, based on the overall structural design of the mounting component 41, the first reference plane 42 and the second reference plane 43 are semi-circular annular planar structures. In other alternative embodiments, the first reference plane 42 and the second reference plane 43 can be planar structures with an outer square and an inner circle. The specific shapes of the first reference plane 42 and the second reference plane 43 can be adjusted based on actual usage requirements, ensuring that the first reference plane 42 is not larger than the upper platform 50 and the second reference plane 43 is not larger than the upper surface of the lower platform 80.

[0122] The various embodiments in this specification are described in a progressive manner, with each embodiment focusing on the differences from other embodiments. The same or similar parts between the various embodiments can be referred to each other.

[0123] The above description is only a description of the preferred embodiment of the present utility model and is not intended to limit the scope of the present utility model in any way. Any changes or modifications made by those skilled in the art based on the above disclosure shall fall within the protection scope of the claims.

Claims

1. A ball screw disassembly assembly, comprising: include: Lead screws, ferrules, and disassembly components; The ferrule is fitted onto one end of the lead screw; The disassembly assembly includes a fixing component and a rotating component; The lead screw has a detachable state. When the lead screw is in the detachable state, the fixing member is provided on the lead screw to fix the lead screw circumferentially. The rotating component is disposed on the sleeve and is circumferentially positioned with the sleeve. The rotating component is provided with a rotation position for driving it to rotate around the central axis of the lead screw.

2. The ball screw disassembly assembly of claim 1, wherein, The fastener has a first positioning hole, and a limiting structure is provided in the first positioning hole. The end of the lead screw away from the sleeve is fitted into the first positioning hole, and the limiting structure restricts the rotation of the lead screw relative to the first positioning hole.

3. The ball screw disassembly assembly of claim 2, wherein, A first limiting plane is provided on the outer wall of the end of the lead screw away from the ferrule; The limiting structure is a second limiting plane, which is disposed on the inner wall of the first positioning hole, and the first limiting plane and the second limiting plane fit together conformally.

4. The ball screw disassembly assembly of claim 2, wherein, The fastener includes a base and a fixing sleeve. One axial end of the fixing sleeve is connected to the base, and the first positioning hole is opened at the other axial end of the fixing sleeve. The dimension of the base along the radial direction of the fixing sleeve is larger than the outer diameter of the fixing sleeve.

5. The ball screw disassembly assembly of claim 3, wherein, The first positioning hole is divided into a cylindrical section and an irregular section along its axial direction. The cylindrical section extends to one end of the fixing member. The inner diameter of the cylindrical section is the same as the outer diameter of the end of the lead screw away from the sleeve. The limiting structure is disposed on the inner wall of the irregular section.

6. The ball screw disassembly assembly of claim 1, wherein, The outer periphery of the card sleeve has a notch; The rotating component is provided with a second positioning hole, and the inner wall of the second positioning hole is provided with a protrusion. The sleeve is located inside the second positioning hole, and the protrusion is located inside the notch.

7. The ball screw disassembly assembly of claim 6, wherein, The rotation position is a non-circular drive hole opened on the rotating component.

8. The ball screw assembly as described in claim 7, characterized in that, The rotating position is located at one axial end of the rotating component, and the second positioning hole is located at the other axial end of the rotating component.

9. The ball screw disassembly assembly of claim 1, wherein, The ball screw assembly also includes an installation component; The mounting assembly includes a mounting component having a first reference plane and a second reference plane, the first reference plane and the second reference plane being parallel. The lead screw is in an installed state. When the lead screw is in the installed state, the mounting component is disposed on the lead screw, and both the first reference plane and the second reference plane are perpendicular to the axial direction of the lead screw.

10. The ball screw disassembly assembly of claim 9, wherein, The mounting component is provided with a third positioning hole; The lead screw is located inside the third positioning hole; The third positioning hole is connected to the first reference plane and the second reference plane. The mounting component is provided with an opening that is radially connected to the third positioning hole, and the opening allows the lead screw to enter and exit radially.

Images