Tray transfer module and chip testing device

Abstract

The application relates to the technical field of semiconductor testing, and provides a tray transfer module and a chip testing device. The tray transfer module comprises a transverse driving mechanism, a clamping mechanism and a clamping driving mechanism. The transverse driving mechanism at least comprises a mounting plate capable of reciprocating along a first direction. The clamping mechanism comprises a clamping seat and a clamping arm arranged on the clamping seat. The clamping seat is movably connected to the mounting plate, and the clamping arm is provided with a clamping part for connecting a tray. The clamping mechanism is arranged on the mounting plate in at least two and is spaced or adjacent along the first direction. Each clamping mechanism is movably arranged on the mounting plate along a second direction, and the clamping seat in each clamping mechanism is driven by the clamping driving mechanism. The tray transfer module provided by the application can meet the carrying and testing of a larger batch of chips, thereby shortening the carrying time and improving the carrying efficiency.

Description

Technical Field

[0001] This application relates to the field of semiconductor testing technology, and in particular to a tray transfer module and a chip testing device. Background Technology

[0002] In chip testing, multiple chambers are typically used to meet different testing requirements, and a tray carrying the chips is moved between these chambers via a tray transfer module. The tray transfer module needs to be securely connected to the tray before lateral drive is used to move the tray. However, with the increasing demands of chip testing, traditional tray transfer modules are no longer sufficient for handling larger batches of chips, resulting in low testing efficiency. Utility Model Content

[0003] Therefore, it is necessary to provide a material tray transfer module that can meet the handling and testing needs of larger batches of chips, thereby shortening the handling time and improving handling efficiency.

[0004] A material tray transfer module includes a lateral drive mechanism, a clamping mechanism, and a clamping drive mechanism. The lateral drive mechanism includes at least a mounting plate capable of reciprocating along a first direction. The clamping mechanism includes a clamping seat and a clamping arm disposed on the clamping seat. The clamping seat is movably connected to the mounting plate, and the clamping arm is provided with a clamping part for connecting the material tray.

[0005] The clamping mechanism comprises at least two clamping mechanisms arranged at intervals or adjacent to each other along a first direction on the mounting plate. Each clamping mechanism is movably disposed on the mounting plate along a second direction. The clamping seat in each clamping mechanism is driven by the clamping driving mechanism. The second direction is set at an angle to the first direction.

[0006] Understandably, the clamping mechanism can connect to the tray via the clamping part on the clamping arm, thus meeting the lateral movement requirements of the tray within each chamber under the action of the lateral drive mechanism. Simultaneously, by using at least two clamping mechanisms, multiple trays can be handled simultaneously, effectively increasing the number of trays that can be handled at a time. This allows for handling and testing of larger batches of chips, thereby shortening handling time and improving handling efficiency. Furthermore, because each clamping mechanism is driven by the clamping drive mechanism to adjust the position of the clamping seat in the second direction, the position of the clamping arm relative to the tray can be adjusted. This facilitates the clamping arm moving the clamping part closer to or away from the corresponding tray, achieving clamping and releasing, further improving handling efficiency.

[0007] In some embodiments, each of the clamping seats has a connecting side for connecting to the corresponding clamping arm; in any two adjacent clamping seats along the first direction, the length of the connecting side of one clamping seat along the first direction is greater than the length of the connecting side of the other clamping seat along the first direction.

[0008] In some embodiments, any two adjacent clamping seats correspond to clamping arms that protrude along a first direction from the same side of the corresponding clamping seat, and the former clamping arm is connected to a position of the corresponding clamping seat away from the other clamping seat along the first direction.

[0009] In some embodiments, in any two adjacent clamping seats, the length of the clamping arm corresponding to the preceding clamping seat along the first direction is greater than the length of the clamping arm corresponding to the following clamping seat along the first direction; and / or, in any two adjacent clamping seats, the preceding clamping seat is provided with a plurality of mounting holes spaced apart along the first direction, and each mounting hole can at least partially cooperate with the clamping arm.

[0010] In some embodiments, each clamping mechanism has a clamping seat connected to a corresponding clamping drive mechanism, and each clamping seat can reciprocate along a second direction under the action of its corresponding clamping drive mechanism.

[0011] In some embodiments, the clamping drive mechanism includes a support rail and a transfer mating member. The support rail has a rail groove extending along a first direction. The transfer mating member is connected to the clamping seat and is at least partially accommodated within the rail groove. The transfer mating member is capable of moving with the clamping seat within the rail groove along the first direction, and the support rail is capable of driving the clamping seat to move along a second direction via the transfer mating member.

[0012] In some embodiments, the movable mating parts corresponding to any two adjacent clamping seats are staggered along the second direction, and the support rails are staggered along the second direction.

[0013] In some embodiments, the clamping drive mechanism further includes a power source and a transmission rod connected to the power source, the transmission rod being connected to the support rail; the tray transfer module further includes a fixed base plate, the power source and the clamping mechanism being disposed on opposite sides of the fixed base plate along the thickness direction of the fixed base plate, the fixed base plate being provided with guide holes for the transmission rod to pass through.

[0014] In some embodiments, the tray transfer module further includes a connecting seat, which is connected to the mounting plate and is angled relative to the mounting plate, and each of the clamping seats is slidably connected to the connecting seat.

[0015] In some embodiments, the mounting plate is movably provided with two clamping mechanisms arranged at intervals or adjacent to each other along a first direction, and the clamping seat in each clamping mechanism is correspondingly connected to two clamping arms arranged at intervals along a third direction, the third direction, the second direction, and the first direction.

[0016] In some embodiments, the two clamping arms on each clamping seat are used to clamp the two trays facing each other on one side.

[0017] In some embodiments, each clamping arm in the clamping mechanism is provided with at least two clamping portions arranged at intervals along a first direction, and the third direction, the second direction and the first direction are arranged at an angle to each other.

[0018] This application also provides a chip testing device, including a testing module and the aforementioned tray transfer module. The testing module has a preheating chamber, a testing chamber, and a reheating chamber arranged at intervals along a first direction. The tray transfer module is installed on the testing module and is used to drive the tray to move in the preheating chamber, the testing chamber, and the reheating chamber. Attached Figure Description

[0019] To more clearly illustrate the technical solutions in the embodiments of this application or the conventional technology, the drawings used in the description of the embodiments or the conventional technology will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 This is a schematic diagram of a tray transfer module provided in one embodiment of this application;

[0021] Figure 2 This is a top view of a tray transfer module provided in an embodiment of this application;

[0022] Figure 3 This is a partial top view of a tray transfer module provided in an embodiment of this application;

[0023] Figure 4 A partial cross-sectional view of a tray transfer module provided in an embodiment of this application;

[0024] Figure 5 for Figure 4 A magnified view of a section at point A in the middle;

[0025] Figure 6 A schematic diagram of the lateral drive mechanism in a tray transfer module provided in an embodiment of this application;

[0026] Figure 7A cross-sectional view of the lateral drive mechanism in a tray transfer module provided in an embodiment of this application;

[0027] Figure 8 for Figure 7 A magnified view of a section at point B in the middle;

[0028] Figure 9 An exploded view of the first locking component in a tray transfer module provided in an embodiment of this application;

[0029] Figure 10 A schematic diagram of a tray transfer module provided in another embodiment of this application;

[0030] Figure 11 A partial schematic diagram of a chip testing apparatus provided in an embodiment of this application in a first state;

[0031] Figure 12 This is a partial schematic diagram of a chip testing apparatus provided in an embodiment of this application in a second state.

[0032] Reference numerals: 100, Tray transfer module; 110, Lateral drive mechanism; 111, Mounting plate; 112, Guide rail assembly; 113, First locking assembly; 114, Second locking assembly; 115, Drive source; 116, Transmission structure; 117, Support base plate; 120, Clamping mechanism; 121, Clamping seat; 121a, First clamping seat; 121b, Second clamping seat; 122, Clamping arm; 122a, First clamping arm; 122b, Second clamping arm; 123, Clamping part; 124, Connecting part; 130, Clamping drive mechanism; 131, Support rail; 132, Moving mating part; 133, Power source; 134, Transmission rod; 140, Fixed base plate; 150, Connecting seat; 151, Sliding block; 152, Sliding base; 200, Test module; 201. Preheating chamber; 202. Testing chamber; 203. Warming chamber; 1110. Assembly hole; 1111. Large diameter section; 1112. Tapered section; 1113. Small diameter section; 1121. Upper guide rail; 1122. Lower guide rail; 1123. Slider; 1123a. Lower slider; 1123b. Upper slider; 1131. Locking element; 1131a. First limiting end face; 1131b. 1132. Second limiting end face; 1133. Elastic element; 1134. Limiting seat; 1135. Conical section; 1136. Straight section; 1137. Limiting gasket; 1138. Pre-tightening gasket; 1149. Locking post; 1160. Belt drive unit; 1161. Chain drive unit; 1211. Connecting side; 1310. Track groove; 1321. Wheel axle; 1322. Wheel body. Detailed Implementation

[0033] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0034] It should be noted that when a component is referred to as being "fixed to" or "attached to" another component, it can be directly on the other component or there may be an intermediate component. When a component is considered to be "connected to" another component, it can be directly connected to the other component or there may be an intermediate component present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used in this application's specification are for illustrative purposes only and do not represent the only possible implementation.

[0035] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0036] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature and the second feature are in indirect contact through an intermediate medium. Furthermore, "above," "over," and "on top" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0037] Unless otherwise defined, all technical and scientific terms used in this application have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used in this application is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. The term "and / or" as used in this application includes any and all combinations of one or more of the associated listed items.

[0038] Please see Figures 1 to 3This application provides a tray transfer module 100, which can meet the handling and testing needs of larger batches of chips, thereby shortening the handling time and improving handling efficiency. The tray transfer module 100 includes a lateral drive mechanism 110, a clamping mechanism 120, and a clamping drive mechanism 130. The lateral drive mechanism 110 includes at least a mounting plate 111 capable of reciprocating along a first direction. The clamping mechanism 120 includes a clamping seat 121 and a clamping arm 122 disposed on the clamping seat 121. The clamping seat 121 is movably connected to the mounting plate 111, and the clamping arm 122 is provided with a clamping portion 123 for connecting the tray. At least two clamping mechanisms 120 are provided and arranged at intervals or adjacent to each other along the first direction on the mounting plate 111. Each clamping mechanism 120 is movably disposed on the mounting plate 111 along a second direction, and the clamping seat 121 in each clamping mechanism 120 is driven by the clamping drive mechanism 130. The second direction is angled to the first direction.

[0039] It should be noted in advance that the first direction can be the X-axis, the second direction is the Y-axis, and the third direction is the Z-axis.

[0040] In practical use, the transverse drive mechanism 110 also includes a drive source 115 and a transmission structure 116 for driving the mounting plate 111 to reciprocate along the X-axis. The drive source 115 is connected to the transmission structure 116, and the transmission structure 116 is connected to the mounting plate 111, thereby driving the mounting plate 111. When the mounting plate 111 reciprocates along the X-axis, it can drive at least two clamping mechanisms 120 on it to reciprocate synchronously along the X-axis. At the same time, each clamping mechanism 120 can clamp a tray through its corresponding clamping arm 122, thereby driving at least two trays to reciprocate along the X-axis, realizing tray handling. Moreover, because each clamping mechanism 120's corresponding clamping seat 121 can reciprocate along the Y-axis direction relative to the mounting plate 111 under the action of the clamping drive mechanism 130, the position adjustment of the clamping arm 122 relative to the material tray is realized, which is more conducive to the clamping arm 122 driving the clamping part 123 to approach or move away from the corresponding material tray, thereby realizing clamping positioning and release positioning.

[0041] In other words, the clamping mechanism 120 can be connected to the tray via the clamping part 123 on the clamping arm 122, and thus, under the action of the lateral drive mechanism 110, meet the transportation requirements for the lateral movement of the tray in each chamber. Simultaneously, by using at least two clamping mechanisms 120, multiple trays can be transported simultaneously, effectively increasing the number of trays that can be transported at a time. This allows for the handling and testing of larger batches of chips, thereby shortening the handling time and improving handling efficiency.

[0042] Please continue reading. Figures 1 to 3In some embodiments, each clamping mechanism 120 has a clamping seat 121 connected to a corresponding clamping drive mechanism 130, and each clamping seat 121 can reciprocate along the second direction under the action of its corresponding clamping drive mechanism 130. That is, each clamping mechanism 120 is provided with its own clamping drive mechanism 130 and is driven independently by the corresponding clamping drive mechanism 130. In this way, the position of each clamping seat 121 in the Y-axis direction can be adjusted individually, thereby adjusting the position of the corresponding clamping arm 122 in the Y-axis direction. For example, the clamping arms 122 corresponding to two clamping seats 121 can be staggered along the Y-axis direction, thereby reducing mutual interference when handling multiple trays and improving the handling stability of each tray. At the same time, this arrangement also facilitates the selective driving of one or more clamping seats 121 along the Y-axis direction based on actual needs, improving the flexibility of use. Of course, when one of the clamping seats 121 moves to clamp the tray, the other clamping seats 121 can move in the opposite direction to move away from the tray or remain in the original position, thereby reducing the risk of interference.

[0043] In some embodiments, each clamping seat 121 has a connecting side 1211 for connecting a corresponding clamping arm 122. In any two adjacent clamping seats 121 along the X-axis direction, the length of the connecting side 1211 of one clamping seat 121 along the first direction is greater than the length of the connecting side 1211 of the other clamping seat 121 along the first direction. For example... Figure 3 As shown, the X-axis direction is the left and right direction. Any two adjacent clamping seats 121 are the first clamping seat 121a and the second clamping seat 121b, respectively. The length L1 of the first clamping seat 121a along the first direction is greater than the length L2 of the second clamping seat 121b along the first direction.

[0044] Understandably, a longer connecting edge 1211 provides a wider connection area, allowing the clamping arm 122 corresponding to that connecting edge 1211 to be farther away from the clamping arm 122 corresponding to the other connecting edge 1211, thus increasing the spacing between the corresponding clamping arms 122 of the two clamping seats 121. This not only reduces clamping interference between any two adjacent trays but also facilitates adaptation to trays of different sizes or different clamping positions on the trays. Furthermore, a longer connecting edge 1211 also facilitates the installation of larger or more numerous clamping arms 122 to meet the handling needs of trays of different sizes or types. Simultaneously, a shorter connecting edge 1211 can reduce unnecessary material usage while maintaining a compact structure, lowering the overall weight and cost of the device. In other words, the differentiated design of the connecting edges 1211 on any two adjacent clamping seats 121 facilitates more efficient and flexible handling of diverse testing tasks, improving the efficiency and accuracy of chip testing.

[0045] Please continue reading. Figures 1 to 3 In some embodiments, the clamping arms 122 corresponding to any two adjacent clamping seats 121 protrude from the corresponding clamping seats 121 on the same side along the X-axis. That is, the clamping arms 122 corresponding to any two adjacent clamping seats 121 protrude from the corresponding clamping seats 121 on the same side along the X-axis. Figure 2 As shown, the first clamping seat 121a corresponds to the first clamping arm 122a, which extends along the X-axis and protrudes from the left side of the first clamping seat 121a; and the second clamping seat 121b corresponds to the second clamping arm 122b, which also extends along the X-axis and protrudes from the left side of the second clamping seat 121b.

[0046] This configuration ensures that the first clamping arm 122a and the second clamping arm 122b can clamp the two material trays from the side closest to any two adjacent material trays as much as possible, reducing the space occupied during clamping.

[0047] Please continue reading. Figures 1 to 3 Furthermore, the preceding clamping arm 122 is connected to the corresponding clamping seat 121 at a position away from the other clamping seat 121 along the first direction. The connection area is defined as the position on the connecting side 1211 of the clamping seat 121 corresponding to the position where the clamping arm 122 is connected. Therefore, this arrangement effectively increases the distance between the corresponding connection areas of any two adjacent clamping seats 121 along the first direction, thereby avoiding interference between their respective clamping arms 122 and increasing the length of the clamping arms 122, thus reducing interference between any two adjacent trays. Figure 2 The first clamping arm 122a is connected to the left side of the first clamping seat 121a, and the second clamping arm 122b is connected to the right side of the second clamping seat 121b. Thus, when the second clamping arm 122b protrudes towards the left side of the second clamping seat 121b, this arrangement maintains a relatively large distance between the two connecting areas, thereby providing ample extension space for the second clamping arm 122b to extend.

[0048] like Figure 3As shown, the clamping mechanism 120 further includes a connecting portion 124, through which the clamping arm 122 can be connected to the corresponding clamping seat 121. The connecting portion 124 can be a connecting block. Of course, the clamping arm 122 can also be directly connected to the clamping seat 121 by screws. Taking any two adjacent clamping seats 121 as an example, the first clamping seat 121a is located to the left of the second clamping seat 121b. In this case, in order to reduce the interference of the first clamping seat 121a to the second clamping arm 122b, the dimension of the first clamping seat 121a along the Y-axis is smaller than the dimension of the second clamping seat 121b along the Y-axis, providing sufficient extension space for the extension of the second clamping arm 122b. At this time, the second clamping arm 122b can be directly fastened to the second clamping seat 121b with screws, and the first clamping arm 122a can be connected to the second clamping seat 121b through the aforementioned connecting part 124. The connecting part 124 is provided to compensate for the size difference between the first clamping seat 121a and the second clamping seat 121b, so as to ensure that the first clamping arm 122a and the second clamping arm 122b are as flush as possible, which is conducive to the simultaneous handling of the material tray in the same plane. Furthermore, in order to avoid interference between the second clamping seat 121b of the first clamping arm 122a and the second clamping arm 122b, an avoidance groove is provided at one end of the second clamping arm 122b facing the first clamping arm 122a. The avoidance groove extends along the first direction so that when the first clamping arm 122a moves, the avoidance groove of the second clamping arm 122b avoids the first clamping seat 121a, thereby reducing the risk of interference.

[0049] Alternatively, the first clamping arm 122a can protrude from the left side of the first clamping seat 121a, and the second clamping arm 122b can protrude from the right side of the second clamping seat 121b, thereby significantly reducing clamping interference between any two adjacent trays.

[0050] Please continue reading. Figures 1 to 3 In some embodiments, in any two adjacent clamping seats 121, the length of the clamping arm 122 corresponding to the first clamping seat 121 along the first direction is greater than the length of the clamping arm 122 corresponding to the second clamping seat 121 along the first direction. That is, the length L3 of the first clamping arm 122a is greater than the length L4 of the second clamping arm 122b. This increases the range of the clamping portion 123 on the first clamping arm 122a, thereby increasing the distance between the corresponding clamping portions 123 on the two clamping arms 122 along the X-axis. When any two adjacent clamping seats 121 clamp a tray respectively, tray interference can be reduced.

[0051] It should be noted that, taking the example of two clamping arms 122 extending in the same direction relative to their respective corresponding clamping seats 121, the "first clamping seat 121" refers to the first clamping seat 121 along the extension direction. For example... Figure 2In the middle, both clamping arms 122 extend to the left relative to their respective clamping seats 121. The clamping seat 121 on the left is the first clamping seat 121, i.e., the first clamping seat 121a mentioned above, and the clamping seat 121 on the right is the second clamping seat 121, i.e., the second clamping seat 121b mentioned above.

[0052] In some embodiments, in any two adjacent clamping seats 121, the former clamping seat 121 is provided with a plurality of mounting holes arranged at intervals along a first direction, and each mounting hole can at least partially cooperate with the clamping arm 122.

[0053] In other words, the first clamping base 121a has multiple spaced mounting holes at the position corresponding to the connecting part 124. The connecting part 124 can be adjusted in assembly position relative to the first clamping base 121a along the first direction to meet the installation position adjustment of the first clamping arm 122a, thereby realizing the adjustment of the distance between the first clamping arm 122a and the second clamping arm 122b to meet the clamping of trays of different sizes. Among them, the connecting part 124 has multiple connecting holes spaced along the first direction, and the number of connecting holes is less than the number of mounting holes, thereby meeting the assembly position adjustment of the connecting part 124.

[0054] Please continue reading. Figures 1 to 3 In some embodiments, each clamping arm 122 in the clamping mechanism 120 is provided with at least two clamping portions 123 spaced apart along a first direction. The presence of at least two clamping portions 123 increases the reliability of the connection with the material tray. Each clamping portion 123 can be a clamping post protruding from the clamping arm 122, and the corresponding material tray has positioning holes for inserting the clamping posts. The connection between the clamping arm 122 and the material tray is achieved through the insertion and engagement of the clamping posts and the positioning holes, resulting in a simple structure and convenient operation. The end of each clamping post facing away from the clamping arm 122 is tapered to serve as a guide for insertion.

[0055] Alternatively, the clamping part 123 can also be a positioning groove. In this case, the material tray is provided with a positioning post for insertion into the positioning groove. The clamping arm 122 is connected to the material tray by the insertion and cooperation of the positioning post and the positioning groove.

[0056] In some specific embodiments, the clamping arm 122 is provided with two clamping portions 123 arranged at intervals along the X-axis. Alternatively, the clamping arm 122 may be provided with three or four clamping portions 123 arranged at intervals along the X-axis.

[0057] Please continue reading. Figures 1 to 3In some embodiments, the mounting plate 111 is movably provided with two clamping mechanisms 120 arranged at intervals or adjacent to each other along a first direction. Each clamping mechanism 120 has a clamping seat 121 correspondingly connected to two clamping arms 122 arranged at intervals along a third direction, namely the third direction, the second direction, and the first direction.

[0058] In other words, each clamping base 121 is connected to two clamping arms 122 spaced apart along the Z-axis, and each clamping arm 122 is provided with at least two clamping parts 123 spaced apart along the X-axis. When both clamping arms 122 are used to cooperate with the same tray, it is equivalent to the clamping base 121 and the tray forming a four-point fixation, further improving the connection reliability. Of course, each clamping arm 122 can also correspond to one tray, so two clamping arms 122 spaced apart along the Z-axis can correspond to two trays that are adjacent or spaced apart along the Z-axis. Thus, when the mounting plate 111 is connected to two clamping bases 121, the simultaneous handling of four trays can be satisfied, which not only improves handling efficiency but also testing efficiency.

[0059] In this configuration, the two first clamping arms 122a on the first clamping base 121a are clamped and fixed to opposite edges of two material trays arranged along the Z-axis via their respective clamping parts 123. Similarly, the two second clamping arms 122b on the second clamping base 121b are also clamped and fixed to opposite edges of two other material trays arranged along the Z-axis via their respective clamping parts 123. Furthermore, since the first clamping arms 122a and the second clamping arms 122b extend in the same direction, they are effectively connected to the diagonally opposite edges of the four material trays.

[0060] Please see Figures 1 to 5 In some embodiments, the tray transfer module 100 further includes a connecting seat 150, which is connected to the mounting plate 111 and is angled relative to the mounting plate 111. Each clamping seat 121 is slidably connected to the connecting seat 150. The mounting plate 111 is arranged vertically (i.e., along the Z-axis), and the connecting seat 150 is arranged horizontally to support at least two clamping seats 121 on it. Simultaneously, the connecting seat 150 is also provided with a sliding block 151, which is slidably engaged with a sliding base 152, and the sliding base 152 is connected to the clamping seat 121. The engagement of the sliding block 151 and the sliding base 152 guides the movement of the clamping seat 121 relative to the connecting seat 150, further improving clamping reliability. Each clamping seat 121 is provided with a corresponding set of sliding blocks 151 and sliding bases 152.

[0061] The connecting seat 150 is provided with a reinforcing rib on the side near the mounting plate 111 to improve the reliability of the connection with the mounting plate 111.

[0062] Please see Figures 1 to 5 In some embodiments, the clamping drive mechanism 130 includes a support rail 131 and a movable mating member 132. The support rail 131 has a rail groove 1310 extending along a first direction; the movable mating member 132 is connected to the clamping seat 121 and is at least partially accommodated within the rail groove 1310. The movable mating member 132 is movable along the clamping seat 121 within the rail groove 1310 along the first direction, and the support rail 131 can drive the clamping seat 121 to move along a second direction via the movable mating member 132.

[0063] In practical use, the clamping drive mechanism 130 also includes a power source 133 and a transmission rod 134 connected to the power source 133. The transmission rod 134 is connected to the support rail 131. The power source 133 can be a linear module or a cylinder, etc. The power source 133 drives the support rail 131 to move along the Y-axis direction via the transmission rod 134. The support rail 131 can be stopped by contacting the moving mating part 132 along the Y-axis direction through the groove wall of the track groove 1310. This, in turn, drives the clamping seat 121 to move along the Y-axis direction via the moving mating part 132, allowing the clamping arm 122 to move closer to and further away from the material tray. When the clamping seat 121 moves along the X-axis direction under the action of the transverse drive mechanism 110, the clamping seat 121 can drive the transfer mating part to move synchronously within the track groove 1310.

[0064] In other words, by utilizing the cooperation between the movable mating part 132 and the support rail 131, the movement of the clamping seat 121 along the X-axis direction and the movement along the Y-axis direction do not interfere with each other, thereby satisfying the clamping and handling of the material tray and making the operation more convenient.

[0065] The movable mating component 132 includes an axle 1321 and a wheel body 1322 sleeved on the axle 1321. The axle 1321 is connected to the clamping seat 121, and the wheel body 1322 is rotatably connected to the axle 1321. This arrangement reduces wear between the movable mating component 132 and the groove wall of the track groove 1310, avoids movement jamming, and thus reduces interference with the movement of the clamping seat 121 along the X-axis. In some specific embodiments, the wheel body 1322 can be a bearing.

[0066] Furthermore, each clamping seat 121 may be connected to two movable mating parts 132 arranged at intervals along the X-axis to improve the reliability of the mating with the support rail 131. Of course, there may also be three or four, etc. This is just an example.

[0067] In some embodiments, the movable mating parts 132 corresponding to any two adjacent clamping seats 121 are staggered along the second direction, and the support rails 131 are also staggered along the second direction. That is, the support rails 131 corresponding to the first clamping seat 121a and the second clamping seat 121b need to be spaced apart in the Y-axis direction to reduce interference. Therefore, the movable mating parts 132 corresponding to each support rail 131 also need to be spaced apart in the Y-axis direction. Simultaneously, the two support rails 131 also need to be spaced apart in the X-axis direction, i.e., one support rail 131 is located above the other support rail 131. Therefore, the corresponding movable mating parts 132 must also be adapted accordingly. For example, the axle 1321 of the movable mating part 132 adapted to the higher support rail 131 is longer than the axle 1321 of the movable mating part 132 corresponding to the other support rail 131, thereby causing the two wheels 1322 to be staggered in the Z-axis direction. Alternatively, the dimension of the higher support rail 131 in the Z-axis direction can be increased to cover the outer side of the movable mating part 132. It is sufficient that the support rails 131 and the moving mating parts 132 corresponding to the two clamping seats 121 do not interfere with each other; this is just an example.

[0068] Please see Figure 1 and Figure 10 In some embodiments, the tray transfer module 100 further includes a fixed substrate 140, with a power source 133 and a clamping mechanism 120 respectively disposed on both sides of the fixed substrate 140 along its thickness direction. The fixed substrate 140 has guide holes for the transmission rod 134 to pass through. Taking the thickness direction of the fixed substrate 140 as the Y-axis direction, both sides of the fixed substrate 140 along the Y-axis direction have assembly spaces. Therefore, the power source 133 and the clamping mechanism 120 can be disposed on both sides of the fixed substrate 140 along the Y-axis direction, which can move the power source 133 away from the chip testing space and improve the protection of the power source 133. The fixed substrate 140 may be provided with a linear bearing in the guide hole to guide the movement of the transmission rod 134.

[0069] Please see Figure 1 , Figure 4 , Figure 6 , Figure 7 and Figure 8In some embodiments, the aforementioned lateral drive mechanism 110 further includes a guide rail assembly 112, a first locking assembly 113, and a second locking assembly 114. The guide rail assembly 112 includes an upper guide rail 1121 and a lower guide rail 1122 arranged opposite to each other and spaced apart along the Z-axis direction. At least one slider 1123 is slidably connected to both the upper guide rail 1121 and the lower guide rail 1122. The first locking assembly 113 includes a locking member 1131 and an elastic member 1132. The locking member 1131 connects the mounting plate 111 and the slider 1123, and the elastic member 1132 is pressed between the locking member 1131 and the mounting plate 111. The second locking assembly 114 is rigidly connected to the slider 1123 and the mounting plate 111. One of the first locking assembly 113 and the second locking assembly 114 cooperates with the slider 1123 corresponding to the upper guide rail 1121, and the other cooperates with the slider 1123 corresponding to the lower guide rail 1122.

[0070] In this configuration, the slider 1123 corresponding to the upper guide rail 1121 is the upper slider 1123b, and the slider 1123 corresponding to the lower guide rail 1122 is the lower slider 1123a. Since the length directions of both the upper and lower guide rails 1121 and 1122 are along the X-axis, the mounting plate 111 is connected to one side of the upper and lower guide rails 1121 and 1122 along the Y-axis.

[0071] Understandably, the upper guide rail 1121 and the lower guide rail 1122 are arranged parallel to each other along the Z-axis, forming a double guide rail structure. Therefore, by having the upper guide rail 1121 and the lower guide rail 1122 respectively cooperate with the mounting plate 111 via sliders 1123, the connection reliability between the guide rail assembly 112 and the mounting plate 111 is increased. The slider 1123 can be slidably connected to the guide rail via a dovetail groove or T-slot structure. The upper slider 1123b is rigidly connected to the upper part of the mounting plate 111 via the second locking assembly 114, bearing the main load and maintaining the basic support force, thereby maintaining the smoothness of overall movement. The lower slider 1123a is connected to the lower part of the mounting plate 111 via the first locking assembly 113. At this time, the connection between the lower slider 1123a and the mounting plate 111 is mainly achieved by the locking member 1131 to prevent them from separating; and, with the buffering effect of the elastic member 1132, the connection rigidity between the slider 1123a and the mounting plate 111 is significantly lower than that at the second locking member, allowing the mounting plate 111 to finely adjust its position as it moves with the slider 1123.

[0072] In other words, the second locking component 114 maintains the basic support force between the mounting plate 111 and the guide rail assembly 112, and the cooperation of the locking member 1131 and the elastic member 1132, while maintaining the connection between the mounting plate 111 and the lower slider 1123a, promotes a certain amount of floating between them. Therefore, when the mounting plate 111 moves, the first locking component 113 can be used to dynamically adjust the force between the mounting plate 111 and the upper slider 1123b and the lower slider 1123a, avoiding local friction concentration, thereby avoiding jamming caused by rigid structure, facilitating smoother movement of the mounting plate 111 under the action of the slider 1123, and extending the service life of the guide rail assembly 112. Meanwhile, based on the arrangement of the upper guide rail 1121 and the lower guide rail 1122 along the Z-axis, the rigid connection is located at the upper part of the mounting plate 111. Therefore, when the mounting plate 111 is subjected to downward force, it can support the mounting plate 111 more firmly and stably, reducing the risk of the mounting plate 111 tilting downward, thereby improving the overall structural stability of the transverse drive mechanism 110.

[0073] The elastic element 1132 is made of spring or rubber. The locking element 1131 can be made of bolt, pin or snap-fit ​​structure, etc., and the combination with the elastic element 1132 forms an elastic floating state.

[0074] Alternatively, the upper slider 1123b can be connected to the upper part of the mounting plate 111 via the first locking component 113, and the lower slider 1123a can be connected to the lower part of the mounting plate 111 via the second locking component 114.

[0075] like Figure 7 As shown, in some embodiments, the second locking assembly 114 includes a plurality of locking posts 1141, which are arranged at intervals and respectively connect the slider 1123 and the mounting plate 111 to achieve a rigid connection between the mounting plate 111 and the slider 1123. For example, the locking posts 1141 can be bolts, which makes disassembly and assembly more convenient.

[0076] like Figure 1 and Figure 6As shown, in actual use, the transverse drive mechanism 110 also includes a drive source 115 and a transmission structure 116. The drive source 115 is connected to the transmission structure 116, and the transmission structure 116 is connected to the mounting plate 111, thereby realizing the movement drive of the mounting plate 111. The drive source 115 can be a motor, and the transmission structure 116 can be a belt drive unit 1161, a chain drive unit 1162, or a combination of both. In some specific embodiments, the transmission structure 116 includes a belt drive unit 1161 and a chain drive unit 1162. One pulley in the belt drive unit 1161 is connected to the motor shaft of the motor, and the other pulley is connected to one of the sprockets in the chain drive unit 1162 via a drive shaft. The chain in the chain drive unit 1162 is connected to the mounting plate 111. Thus, the movement drive of the mounting plate 111 can be realized.

[0077] like Figure 10 As shown, in some embodiments, based on the setting of the fixed substrate 140, the drive source 115 in the lateral drive mechanism 110 can also be located on the side of the fixed substrate 140 away from the clamping mechanism 120, so as to avoid the drive source 115 from getting close to the chip test cavity and improve the protection of the power source 133.

[0078] Furthermore, the lateral drive mechanism 110 also includes a support base plate 117, on which the aforementioned guide rail assembly 112 is mounted to ensure the stability and reliability of the upper guide rail 1121 and the lower guide rail 1122.

[0079] The following description uses the first locking component 113 connecting the lower guide rail 1122 and the lower slider 1123a as an example.

[0080] Please see Figures 7 to 9 In some embodiments, the mounting plate 111 has a mounting hole 1110 for the locking member 1131 to pass through, and the locking member 1131 passes through the mounting plate 111 to connect with the corresponding lower slider 1123a. Taking a screw as an example, the locking member 1131 is threadedly connected to the lower slider 1123a through the mounting hole 1110 to maintain the basic connection between the mounting plate 111 and the lower slider 1123a and prevent them from disengaging. One end of the locking member 1131 facing away from the lower slider 1123a may have a mounting protrusion extending radially outward, and the side wall of the mounting protrusion facing the lower slider 1123a serves as a second limiting end face 1131b. An elastic member 1132 may be sleeved on the outside of the locking member 1131 and pressed between the second limiting end face 1131b and the mounting plate 111. Alternatively, multiple elastic elements 1132 may be provided and arranged around the outer periphery of the locking element 1131 at circumferential intervals, with each elastic element 1132 pressed between the second limiting end face 1131b and the mounting plate 111.

[0081] There is a movable gap between the outer wall of the locking member 1131 and the wall of the mounting hole 1110. It is understood that since the upper part of the mounting plate 111 is rigidly connected to the upper slider 1123b via the second locking assembly 114, which provides basic support and positioning for the mounting plate 111, the movable gap effectively provides space for the lower slider 1123a relative to the mounting plate 111. This allows the locking member 1131 to swing freely within the mounting hole 1110 along with the lower slider 1123a, adapting to different stress conditions.

[0082] Please continue reading. Figures 7 to 9 In some embodiments, the first locking assembly 113 further includes a limiting seat 1133, which is sleeved on the outside of the locking member 1131 and pressed between the elastic member 1132 and the mounting plate 111. The limiting seat 1133 has a through hole for the locking member 1131 to pass through, facilitating its sleeve on the outside of the locking member 1131. One end of the elastic member 1132 facing away from the aforementioned second limiting end face 1131b can be pressed against the limiting seat 1133, thereby preventing direct contact between the elastic member 1132 and the mounting plate 111 and reducing wear on the mounting plate 111.

[0083] Furthermore, the mounting hole 1110 includes at least a large-diameter section 1111 and a tapered section 1112 connected to the large-diameter section 1111, the diameter of the tapered section 1112 gradually decreasing from the large-diameter section 1111 towards the slider 1123. The limiting seat 1133 has a tapered section 1133a, which extends into the tapered section 1112 and is press-fitted, and at least a portion of the locking member 1131 and the elastic member 1132 are accommodated in the large-diameter section 1111.

[0084] In other words, at least a portion of the limiting seat 1133 extends into the assembly hole 1110 and presses against the hole wall of the assembly hole 1110. Furthermore, the engagement of the tapered section 1112 and the conical section 1133a allows the limiting seat 1133 to press against the mounting plate 111 via a beveled surface, improving assembly stability. Simultaneously, because at least a portion of the limiting seat 1133 extends into the assembly hole 1110, when the sliding block 1123a causes the locking member 1131 to oscillate within the assembly hole 1110, the limiting seat 1133 can abut against the locking member 1131, further reducing impacts and wear caused by direct contact between the mounting plate 111 and the locking member 1131, thus extending the service life of the mounting plate 111. In addition, the large-diameter section 1111 provides ample assembly space for the elastic member 1132.

[0085] Please continue reading. Figures 7 to 9In some specific embodiments, the assembly hole 1110 further includes a small-diameter section 1113, which is connected to the end of the tapered section 1112 facing away from the large-diameter section 1111. Both the small-diameter section 1113 and the large-diameter section 1111 are cylindrical. The small-diameter section 1113 enhances the structural strength of the assembly hole 1110 facing the slider 1123. Simultaneously, the limiting seat 1133 also includes a straight section 1133b, which is connected to the side of the conical section 1133a facing away from the assembly hole 1110. The straight section 1133b further increases the structural strength of the limiting seat 1133 itself.

[0086] In some specific embodiments, the locking element 1131 can be a height-equalizing screw. The limiting seat 1133 can be made of rubber, which ensures a certain degree of assembly rigidity while also providing wear resistance.

[0087] Please continue reading. Figures 7 to 9 In some embodiments, the locking member 1131 has a first limiting end face 1131a near the end of the slider 1123. The first locking assembly 113 also includes a limiting washer 1134, which is sleeved on the outside of the locking member 1131 and pressed between the first limiting end face 1131a and the slider 1123. That is, a limiting washer 1134 is also pressed between the slider 1123 and the locking member 1131 to limit the assembly of the locking member 1131 relative to the slider 1123; and this arrangement can prevent the elastic member 1132 from being over-compressed, thereby weakening the connection strength between the lower slider 1123a and the mounting plate 111. The locking member 1131 can also be configured as a stepped structure to form the first limiting end face 1131a. Meanwhile, the small-diameter section 1113 at the assembly hole 1110 provides ample assembly space for the assembly of the limiting gasket 1134, reducing assembly interference between the limiting gasket 1134 and the limiting seat 1133. The limiting gasket 1134 can be made of stainless steel, rubber, silicone, or other materials to ensure wear resistance.

[0088] Please continue reading. Figures 7 to 9Furthermore, the locking member 1131 has a second limiting end face 1131b at its end facing away from the slider 1123. The first locking assembly 113 also includes a pre-tightening washer 1135, which is sleeved on the outside of the locking member 1131 and pressed between the second limiting end face 1131b and the elastic member 1132. This arrangement serves two purposes: firstly, it prevents wear between the elastic member 1132 and the second limiting end face 1131b of the locking member 1131, extending the service life of both the locking member 1131 and the elastic member 1132; secondly, the pre-tightening washer 1135 allows adjustment of the compression of the elastic member 1132, ensuring a stable fit between the mounting member and the mounting plate 111. The pre-tightening washer 1135 can also be made of stainless steel, rubber, silicone, or other similar materials.

[0089] like Figure 1 , Figure 6 and Figure 7 As shown, in some embodiments, each slider 1123 is provided with at least two sets of spaced-apart first locking components 113 or second locking components 114. This arrangement improves the connection reliability between each slider 1123 and the mounting plate 111. In some specific embodiments, the upper guide rail 1121 is provided with two upper sliders 1123b spaced-apart along the X-axis, and each upper slider 1123b is connected to the mounting plate 111 through at least two sets of second locking components 114. Each set of second locking components 114 includes two locking pins 1141 spaced-apart along the Z-axis. For example, each upper slider 1123b is connected to the upper part of the mounting plate 111 through four spaced-apart locking pins 1141. Meanwhile, the lower guide rail 1122 is provided with two lower sliders 1123a spaced-apart along the X-axis, and each lower slider 1123a is connected to the lower part of the mounting plate 111 through four sets of spaced-apart second locking components 114.

[0090] Please see Figure 1 , Figure 10 , Figure 11 and Figure 12 This application also provides a chip testing device, including a testing module 200 and the aforementioned tray transfer module 100. The testing module 200 has a preheating chamber 201, a testing chamber 202 and a reheating chamber 203 arranged at intervals along the X-axis. The tray transfer module 100 is installed on the testing module 200 and is used to drive the tray to move in the preheating chamber 201, the testing chamber 202 and the reheating chamber 203.

[0091] For example, the preheating chamber 201, the testing chamber 202, and the recovery chamber 203 are arranged at intervals along the X-axis. The clamping mechanism 120 in the tray transfer module 100, under the action of the clamping drive mechanism 130, approaches the tray and clamps it securely via the clamping part 123. Then, under the action of the transverse drive mechanism 110, the clamping mechanism 120 drives the tray to move sequentially along the X-axis within the preheating chamber 201, the testing chamber 202, and the recovery chamber 203 to meet the testing requirements of the chips on the tray. For example, when a chip needs to be tested in a high-temperature environment, the tray can be moved to the preheating chamber 201 by the tray transfer module for preheating. Then, it continues to move along the X-axis to the testing chamber 202 for chip testing. After testing, it continues to move along the X-axis to the recovery chamber 203 for heat dissipation and recovery of the chip.

[0092] In this process, the tray transfer module 100 is equipped with a first clamping seat 121a and a second clamping seat 121b arranged along the X-axis. The first clamping seat 121a is equipped with two first clamping arms 122a spaced apart along the Z-axis, and the second clamping seat 121b is equipped with two second clamping arms 122b spaced apart along the Z-axis. Therefore, the tray moving module can simultaneously clamp four diagonally distributed trays. When the tray held by the first clamping seat 121a through the two first clamping arms 122a is located in the test chamber 202 for chip testing, the tray held by the second clamping seat 121b through the two second clamping arms 122b is located in the preheating chamber 201 for chip preheating; this is the first state. After the chip in the test chamber 202 completes the test, the four trays move simultaneously under the action of the horizontal drive mechanism 110. This causes the two trays corresponding to the first clamping seat 121a to move to the cooling chamber 203 for heat dissipation and temperature recovery, while the two trays corresponding to the second clamping seat 121b move to the test chamber 202 for testing; this is the second state. In this way, the testing efficiency can be accelerated.

[0093] Meanwhile, it is precisely because of the setting of the fixed substrate 140 that the drive source 115 in the transverse drive mechanism 110 and the power source 133 in the clamping drive mechanism 130 are both located on the side of the fixed substrate 140 away from the test module 200, which improves the protection of the power source 133 and the drive source 115 and reduces the risk of damage due to contact with high temperature.

[0094] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0095] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the scope of protection of this application. Therefore, the patent protection scope of this application should be determined by the appended claims.

Claims

1. A tray transfer module, characterized by, The device includes a lateral drive mechanism (110), a clamping mechanism (120), and a clamping drive mechanism (130). The lateral drive mechanism (110) includes at least a mounting plate (111) capable of reciprocating along a first direction. The clamping mechanism (120) includes a clamping seat (121) and a clamping arm (122) disposed on the clamping seat (121). The clamping seat (121) is movably connected to the mounting plate (111). The clamping arm (122) is provided with a clamping part (123) for connecting a material tray. The clamping mechanism (120) is provided in at least two and is arranged at intervals or adjacent to each other along the first direction on the mounting plate (111). Each clamping mechanism (120) is movably disposed on the mounting plate (111) along the second direction. The clamping seat (121) in each clamping mechanism (120) is driven by the clamping drive mechanism (130). The second direction is set at an angle to the first direction.

2. The tray transfer module of claim 1, wherein, Each of the clamping seats (121) has a connecting side (1211) for connecting to the corresponding clamping arm (122); In any two adjacent clamping seats (121) along the first direction, the length of the connecting side (1211) of one clamping seat (121) along the first direction is greater than the length of the connecting side (1211) of the other clamping seat (121) along the first direction.

3. Magazine transfer module according to claim 1 or 2, characterized in that Any two adjacent clamping seats (121) have their corresponding clamping arms (122) protruding along the first direction on the same side of the corresponding clamping seat (121), and the former clamping arm (122) is connected to the position of the corresponding clamping seat (121) away from the other clamping seat (121) along the first direction.

4. The tray transfer module of claim 3, wherein, In any two adjacent clamping seats (121), the length of the clamping arm (122) corresponding to the preceding clamping seat (121) along the first direction is greater than the length of the clamping arm (122) corresponding to the following clamping seat (121) along the first direction; and / or, In any two adjacent clamping seats (121), the former clamping seat (121) is provided with a plurality of mounting holes arranged at intervals along a first direction, and each mounting hole can be selected to cooperate with at least part of the clamping arm (122).

5. The tray transfer module of claim 1, wherein, Each clamping mechanism (120) has a clamping seat (121) connected to a clamping drive mechanism (130), and each clamping seat (121) can reciprocate along the second direction under the action of its corresponding clamping drive mechanism (130).

6. The tray transfer module of claim 1, wherein, The clamping drive mechanism (130) includes: The support track (131) is provided with a track groove (1310) extending along a first direction; and A movable mating part (132) is connected to the clamping seat (121) and is at least partially accommodated in the track groove (1310); The movable mating member (132) can move along the clamping seat (121) in the track groove (1310) along the first direction, and the support track (131) can drive the clamping seat (121) to move along the second direction through the movable mating member (132).

7. The tray transfer module of claim 6, wherein, The moving mating parts (132) corresponding to any two adjacent clamping seats (121) are staggered along the second direction, and each of the support rails (131) is staggered along the second direction.

8. The tray transfer module of claim 6, wherein, The clamping drive mechanism (130) further includes a power source (133) and a transmission rod (134) connected to the power source (133), the transmission rod (134) being connected to the support rail (131); The tray transfer module (100) also includes a fixed base plate (140), the power source (133) and the clamping mechanism (120) are respectively disposed on both sides of the fixed base plate (140) along the thickness direction of the fixed base plate (140), and the fixed base plate (140) is provided with a guide hole for the transmission rod (134) to pass through.

9. The tray transfer module of claim 1, wherein, The material tray transfer module (100) also includes a connecting seat (150), which is connected to the mounting plate (111) and is set at an angle to the mounting plate (111). Each of the clamping seats (121) is slidably connected to the connecting seat (150).

10. The tray transfer module of claim 1, wherein, The mounting plate (111) is movably provided with two clamping mechanisms (120) arranged at intervals or adjacent to each other along a first direction. Each clamping mechanism (120) has a clamping seat (121) connected to two clamping arms (122) arranged at intervals along a third direction, namely the third direction, the second direction, and the first direction.

11. The tray transfer module of claim 10, wherein, The two clamping arms (122) on each clamping seat (121) are used to clamp the two trays facing each other on one side.

12. The tray transfer module of claim 1, wherein, Each clamping arm (122) in each clamping mechanism (120) is provided with at least two clamping portions (123) arranged at intervals along a first direction, and the third direction, the second direction and the first direction are arranged at an angle to each other.

13. A chip testing apparatus characterized by comprising: include: The test module (200) has a preheating chamber (201), a test chamber (202), and a reheating chamber (203) arranged at intervals along a first direction; and The tray transfer module according to any one of claims 1 to 12 is installed in the test module (200), and the tray transfer module (100) is used to drive the tray to move in the preheating chamber (201), the test chamber (202) and the reheating chamber (203).

Images