A cutting fluid circulation device for chip cutting
The combined filtration system of activated carbon adsorption mesh and stainless steel ultrafine filter mesh solves the problem of poor filtration effect in existing cutting fluid circulation devices, realizes efficient recycling of cutting fluid, and reduces costs and resource waste.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- SUZHOU ASEN SEMICON CO LTD
- Filing Date
- 2025-06-23
- Publication Date
- 2026-08-04
AI Technical Summary
The existing chip cutting fluid circulation device has poor filtration performance, which leads to impurities clogging the pipes and affecting the recycling of the cutting fluid.
The system employs a combination of activated carbon adsorption mesh, stainless steel ultrafine filter mesh, and metal filter frame. The frame is fixed with screws for easy disassembly and cleaning, achieving multi-stage filtration to remove suspended solids, heavy metal deposits, and other pollutants.
It significantly improves the filtration effect of cutting fluid, reduces water waste, lowers usage costs, and enables efficient recycling of cutting fluid.
Smart Images

Figure CN224590705U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of chip cutting fluid circulation device, specifically a chip cutting fluid circulation device. Background Technology
[0002] Integrated circuits, also known as microcircuits, microchips, or wafers / chips, are a way to miniaturize circuits (mainly semiconductor devices, but also passive components) in electronics. They are often manufactured on the surface of semiconductor wafers. Chips need to be cooled during dicing. The wastewater generated during water cooling is directly discharged, which wastes the dicing fluid. Therefore, a dicing fluid circulation device is needed.
[0003] Current chip dicing fluid circulation devices suffer from poor filtration efficiency. Impurities during fluid recovery can clog the pipes, further hindering filtration. Therefore, those skilled in the art have developed a chip dicing fluid circulation device to address the problems described in the background section. Utility Model Content
[0004] The purpose of this invention is to provide a cutting fluid circulation device for chip cutting, so as to solve the problems mentioned in the background art.
[0005] To achieve the above objectives, this utility model provides the following technical solution: a chip cutting fluid circulation device, comprising an installation platform, a circulation tank installed on the right side of the top of the installation platform, a conveying pipe connected to the bottom of the left side of the front of the circulation tank, a circulation pump connected to the side of the conveying pipe away from the circulation tank, a guide pipe connected to the back of the circulation pump, a sealing cover provided on the top of the circulation tank, an installation frame installed on the inner wall of the circulation tank, an activated carbon adsorption mesh plate provided on the top of the installation frame, a stainless steel ultrafine filter mesh plate provided on the top of the activated carbon adsorption mesh plate, and a metal filter frame provided on the top of the stainless steel ultrafine filter mesh plate.
[0006] As a further embodiment of this utility model: the top of the sealing cover is connected to a connecting pipe, and handles are installed on both sides of the top of the sealing cover.
[0007] As a further improvement of this utility model: a mounting bracket is installed at the bottom of the circulating pump, and the bottom of the mounting bracket is fixed to the left side of the top of the mounting platform.
[0008] As a further improvement of this utility model, the outer side of the mounting frame is fixed to the bottom of the inner wall of the circulation tank by screws.
[0009] As a further embodiment of this utility model: the top of the mounting frame contacts the bottom of the activated carbon adsorption mesh plate, and the top of the activated carbon adsorption mesh plate contacts the bottom of the stainless steel ultrafine filter mesh plate.
[0010] As a further improvement of this utility model: the top of the stainless steel ultrafine filter plate is in contact with the bottom of the metal filter frame, and handles are installed on both sides of the top of the metal filter frame.
[0011] Compared with the prior art, the beneficial effects of this utility model are: In this invention, the installation frame provides support and fixation for the activated carbon adsorption mesh, the stainless steel ultrafine filter mesh, and the metal filter frame. First, the sealing cover is moved out of one side of the circulation box, and then the metal filter frame is moved out of the circulation box by the handle, allowing for cleaning of the metal filter frame.
[0012] In this invention, the activated carbon adsorption mesh plate and the stainless steel ultrafine filter mesh plate are moved out of the circulation box by removing the metal filter mesh frame to one side, and then the activated carbon adsorption mesh plate and the stainless steel ultrafine filter mesh plate are moved out of the circulation box to the other side. This allows for the cleaning of the activated carbon adsorption mesh plate and the stainless steel ultrafine filter mesh plate without affecting the filtration of the cutting fluid. Attached Figure Description
[0013] Figure 1 This is a schematic diagram of the structure of this utility model; Figure 2 This is a top view of the left side of the mounting platform and circulation box structure in this utility model; Figure 3 This is a cross-sectional view of the circulation box structure in this utility model; Figure 4 This is a bottom view of the circulation box and metal filter frame structure in this utility model.
[0014] In the diagram: 1. Mounting platform; 2. Circulation box; 3. Delivery pipe; 4. Circulation pump; 5. Guide pipe; 6. Sealing cover; 7. Mounting frame; 8. Activated carbon adsorption mesh plate; 9. Stainless steel ultrafine filter mesh plate; 10. Metal filter mesh frame; 11. Connecting pipe; 12. Mounting bracket; 13. Handle. Detailed Implementation
[0015] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.
[0016] Please see Figures 1-4In this embodiment of the present invention, a chip cutting fluid circulation device includes a mounting platform 1, a circulation tank 2 mounted on the right side of the top of the mounting platform 1, a conveying pipe 3 connected to the bottom of the left side of the front of the circulation tank 2, a circulation pump 4 connected to the side of the conveying pipe 3 away from the circulation tank 2, a guide pipe 5 connected to the back of the circulation pump 4, a sealing cover 6 provided on the top of the circulation tank 2, an mounting frame 7 installed on the inner wall of the circulation tank 2, an activated carbon adsorption mesh plate 8 provided on the top of the mounting frame 7, a stainless steel ultrafine filter mesh plate 9 provided on the top of the activated carbon adsorption mesh plate 8, and a metal filter frame 10 provided on the top of the stainless steel ultrafine filter mesh plate 9.
[0017] The top of the sealing cap 6 is connected to the connecting pipe 11, and handles are installed on both sides of the top of the sealing cap 6. The cutting fluid generated during cutting is transported to the circulation tank 2 through the connecting pipe 11. The metal filter frame 10 in the circulation tank 2 filters the cutting fluid and removes solid particles such as suspended matter and heavy metal precipitates from the cutting fluid. The bottom of the circulating pump 4 is equipped with a mounting bracket 12, and the bottom of the mounting bracket 12 is fixed to the left side of the top of the mounting platform 1. The metal filter screen 10 can be washed with water or cleaned with a neutral detergent to remove dust and impurities from its surface. After cleaning and drying, it can be reused, which greatly reduces the cost of use. The outer side of the mounting frame 7 is fixed to the bottom of the inner wall of the circulation tank 2 by screws. The cutting fluid is filtered through the stainless steel ultrafine filter plate 9 and the activated carbon adsorption plate 8 in sequence. The stainless steel ultrafine filter plate 9, with its high-precision pore size design, can intercept suspended solids, particulate matter and impurities in the cutting fluid, significantly reducing the turbidity of the water and thus purifying the water quality. The top of the mounting frame 7 contacts the bottom of the activated carbon adsorption mesh plate 8, and the top of the activated carbon adsorption mesh plate 8 contacts the bottom of the stainless steel ultrafine filter mesh plate 9. The activated carbon adsorption mesh plate 8 can remove a variety of pollutants from wastewater, including organic matter, heavy metal ions, dye molecules, suspended solids, colloids, bacteria, etc. The activated carbon adsorption mesh can quickly remove pigment molecules in the water, making the wastewater clear and transparent. The top of the stainless steel ultrafine filter plate 9 contacts the bottom of the metal filter frame 10. Handles 13 are installed on both sides of the top of the metal filter frame 10. The filtered cutting fluid starts the circulation pump 4. The circulation pump 4 transports the cutting fluid in the circulation tank 2 to the guide pipe 5 through the delivery pipe 3. The guide pipe 5 circulates the cutting fluid into the chip cutting equipment, which will not cause waste of water resources and can reuse the cutting fluid repeatedly.
[0018] The working principle of this utility model is as follows: the cutting fluid generated during cutting is transported to the circulation tank 2 through the connecting pipe 11. The metal filter frame 10 in the circulation tank 2 filters the cutting fluid, removing suspended solids, heavy metal precipitates, and other solid particles. The metal filter frame 10 can be washed with water or cleaned with a neutral detergent to remove surface dust and impurities. After cleaning and drying, it can be reused, greatly reducing the cost of use. The cutting fluid is filtered sequentially through the stainless steel ultrafine filter plate 9 and the activated carbon adsorption plate 8. The stainless steel ultrafine filter plate 9, through its high-precision pore size design, can... The activated carbon adsorption screen 8 intercepts suspended solids, particulate matter, and impurities in the cutting fluid, significantly reducing the turbidity of the water and thus purifying the water quality. It can remove various pollutants from the wastewater, including organic matter, heavy metal ions, dye molecules, suspended solids, colloids, bacteria, etc. The activated carbon adsorption screen can quickly remove pigment molecules in the water, restoring the wastewater to its clear and transparent state. The filtered cutting fluid is then used to start the circulation pump 4. The circulation pump 4 transports the cutting fluid in the circulation tank 2 to the guide pipe 5 through the delivery pipe 3. The guide pipe 5 circulates the cutting fluid back into the chip cutting equipment, preventing water waste and allowing the cutting fluid to be reused repeatedly.
[0019] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.
Claims
1. A dicing liquid circulating device for dicing a wafer, comprising a mounting table (1), characterized in that: A circulation box (2) is installed on the right side of the top of the mounting platform (1). A conveying pipe (3) is connected to the bottom of the left side of the front of the circulation box (2). A circulation pump (4) is connected to the side of the conveying pipe (3) away from the circulation box (2). A guide pipe (5) is connected to the back of the circulation pump (4). A sealing cover (6) is provided on the top of the circulation box (2). An installation frame (7) is installed on the inner wall of the circulation box (2). An activated carbon adsorption mesh plate (8) is provided on the top of the installation frame (7). A stainless steel ultrafine filter mesh plate (9) is provided on the top of the activated carbon adsorption mesh plate (8). A metal filter mesh frame (10) is provided on the top of the stainless steel ultrafine filter mesh plate (9).
2. The dicing liquid circulating apparatus for dicing a wafer according to claim 1, characterized by: The top of the sealing cover (6) is connected to a connecting pipe (11), and handles are installed on both sides of the top of the sealing cover (6).
3. The dicing liquid circulating apparatus for dicing a wafer according to claim 1, wherein: The bottom of the circulating pump (4) is fitted with a mounting bracket (12), and the bottom of the mounting bracket (12) is fixed to the left side of the top of the mounting platform (1).
4. The dicing liquid circulating apparatus for dicing a wafer according to Claim 1, wherein: The outer side of the mounting frame (7) is fixed to the bottom of the inner wall of the circulation box (2) by screws.
5. The apparatus according to claim 1, wherein: The top of the mounting frame (7) is in contact with the bottom of the activated carbon adsorption mesh plate (8), and the top of the activated carbon adsorption mesh plate (8) is in contact with the bottom of the stainless steel ultrafine filter mesh plate (9).
6. The apparatus according to claim 1, wherein: The top of the stainless steel ultrafine filter plate (9) is in contact with the bottom of the metal filter frame (10), and handles (13) are installed on both sides of the top of the metal filter frame (10).