Vacuum coating device facilitating replacement of workpieces

Abstract

The utility model relates to vacuum coating device field especially for a kind of vacuum coating device of workpiece convenient to replace, including vacuum coater and bottom plate installed on ground, the side wall of vacuum coater is close to the bottom plate, the top end both sides of bottom plate are connected with support, the side wall of support is connected with multiple guide rods, the bottom end of guide rod is connected with the top end of bottom plate, the side wall of one of support is rotatably connected with blind door, lifting mechanism is provided on the bottom plate;By starting drive element, drive element drives support plate to move downwards, makes support plate to come down, operating personnel get on support plate, then, close blind door, utilize limiting mechanism, to lock blind door, to ensure that operating personnel will not fall from support plate, then, again support plate is moved upwards, to facilitate the height of support plate, so that the height of support plate satisfies the operating personnel in range height to replace workpiece.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating equipment, specifically to a vacuum coating equipment that facilitates workpiece replacement. Background Technology

[0002] Vacuum coating equipment mainly refers to a type of coating that needs to be carried out under high vacuum. It includes many types, such as vacuum resistance heating evaporation, electron gun heating evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition, ion beam sputtering, and many others.

[0003] In some larger vacuum coating equipment, due to their considerable height, the sealing door is positioned high, especially for top-opening sealing doors. Therefore, support devices, typically ladders or staircases, are provided alongside the vacuum coating equipment to facilitate operators in opening the sealing door and placing workpieces inside. However, these ladders or staircases are generally of fixed height. Consequently, when operators of different heights use the ladders or staircases, the height may be too large or too small, making it inconvenient for them to place or change workpieces. Therefore, height-adjustable support devices are needed to facilitate use by operators of a certain height range, thereby increasing the usability of the support devices.

[0004] This invention proposes a vacuum coating device that facilitates workpiece replacement, in order to solve the above-mentioned problems. Utility Model Content

[0005] The purpose of this invention is to address the shortcomings of existing technologies by proposing a vacuum coating device that facilitates workpiece replacement.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a vacuum coating device for easy workpiece replacement, comprising a vacuum coating machine and a base plate installed on the ground, the base plate being close to the side wall of the vacuum coating machine, and supports being connected to both sides of the top of the base plate, the side walls of the supports being connected to multiple guide rods, the bottom ends of the guide rods being connected to the top of the base plate, one of the side walls of the supports being rotatably connected to a door, the base plate being provided with a lifting mechanism, and the door and the supports being equipped with limit mechanisms.

[0007] As a preferred embodiment of this utility model, the distance between the two brackets is greater than the sealing length of the vacuum coating machine, the brackets are U-shaped, and the length of the brackets is greater than the sealing length of the vacuum coating machine.

[0008] As a preferred technical solution of this utility model, the lifting mechanism includes a driving component, a support plate and guide holes. The top end of the base plate is connected to the driving component, the output end of the driving component is connected to the support plate, and the side wall of the support plate is provided with two sets of symmetrically distributed guide holes. The side wall of the guide holes is slidably connected to the guide rod.

[0009] As a preferred embodiment of this utility model, there is a gap between the side wall of the support plate away from the vacuum coating machine and the side wall of the bracket away from the vacuum coating machine.

[0010] As a preferred technical solution of this utility model, the limiting mechanism includes a connecting block, a round hole, a rod, a ring, and a socket. Multiple connecting blocks are connected to one side of the side wall of the door. A round hole is opened on the side wall of the connecting block. A rod is movably connected in the round hole. Two rings are connected to the side wall of the rod. The two rings are located on both sides of the connecting block. Multiple sockets are opened on the side wall of the other bracket. The sockets can be aligned with the round holes, and the diameter of the sockets is equal to the diameter of the round holes.

[0011] As a preferred technical solution of this utility model, the driving component can be a hydraulic cylinder or a jack.

[0012] Compared with the prior art, the beneficial effects of this utility model are: This utility model uses a drive unit to move the support plate downwards, allowing the operator to climb onto the support plate. Then, the cover is closed, and a limit mechanism is used to lock the cover, ensuring that the operator will not fall off the support plate. The support plate can then be moved upwards to easily adjust its height, allowing operators of varying heights to change workpieces. Attached Figure Description

[0013] The accompanying drawings are provided to further illustrate the present invention and form part of the specification. They are used together with the embodiments of the present invention to explain the present invention, but do not constitute a limitation thereof. In the drawings: Figure 1 This is a front view structural diagram of the present invention; Figure 2 This is a schematic diagram of the rear view structure of this utility model; Figure 3 This is a cross-sectional right view of the structure of this utility model; Figure 4 This is a cross-sectional front view of the present invention. Figure 5 This is a schematic diagram of the support plate structure of this utility model; Figure 6 This is a schematic diagram of the cross-sectional structure of the insertion rod of this utility model.

[0014] In the diagram: 1. Vacuum coating machine; 2. Base plate; 3. Support; 4. Guide rod; 5. Lifting mechanism; 501. Drive component; 502. Support plate; 503. Guide hole; 6. Door; 7. Auxiliary component; 701. Side plate; 702. Through hole; 703. Pedal; 704. Connecting rod; 8. Fence component; 801. Fence frame; 802. Handle; 9. Limiting mechanism; 901. Connecting block; 902. Round hole; 903. Insert rod; 904. Circular ring; 905. Insertion hole. Detailed Implementation

[0015] The following will refer to the appendix in the embodiments of this utility model. Figure 1-6 The technical solutions in the embodiments of this utility model are clearly and completely described herein. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0016] Example Please refer to Figure 1-6 The present invention provides the following technical solution: a vacuum coating device for easy workpiece replacement, comprising a vacuum coating machine 1 and a base plate 2 installed on the ground, one end of the base plate 2 and one end of the support 3 being close to the side wall of the vacuum coating machine 1, the distance between the two supports 3 being greater than the sealing length of the vacuum coating machine 1, the support 3 being U-shaped, the top two sides of the base plate 2 being connected to the support 3, the side wall of the support 3 being connected to multiple guide rods 4, the bottom end of the guide rods 4 being connected to the top end of the base plate 2, one of the side walls of the support 3 being rotatably connected to a door 6, the base plate 2 being provided with a lifting mechanism 5, and the door 6 and the support 3 being equipped with a limiting mechanism 9.

[0017] Please refer to Figure 2 , Figure 3 , Figure 4 and Figure 5 The lifting mechanism 5 includes a drive component 501, a support plate 502, and a guide hole 503. The top of the base plate 2 is connected to the drive component 501, and the output end of the drive component 501 is connected to the support plate 502. The side wall of the support plate 502 is provided with two sets of symmetrically distributed guide holes 503. The side wall of the guide hole 503 is slidably connected to the guide rod 4. There is a gap between the side wall of the support plate 502 away from the vacuum coating machine 1 and the side wall of the bracket 3 away from the vacuum coating machine 1. The drive component 501 can be a hydraulic cylinder or a jack. The length of the bracket 3 is greater than the length of the sealing door of the vacuum coating machine 1.

[0018] Open the cover door 6, start the drive unit 501, the drive unit 501 drives the support plate 502 to move downward, so that the support plate 502 is lowered, and the operator climbs onto the support plate 502. Then, close the cover door 6 and use the limit mechanism 9 to lock the cover door 6, so as to ensure that the operator will not fall from the support plate 502. Then, move the support plate 502 upward to facilitate the adjustment of the height of the support plate 502, so that the height of the support plate 502 can meet the height of the operator within the range to change the workpiece.

[0019] When the vacuum coating machine 1 is at the top, simply raise the support plate 502 to a height suitable for the operator's height to facilitate the replacement of workpieces inside the vacuum coating machine 1. When the vacuum coating machine 1 is at the outer side wall, the base plate 2 moves under the vacuum coating machine 1's door. The vacuum coating machine 1's door is then located inside the two supports 3. Since the distance between the two supports 3 is greater than the length of the vacuum coating machine 1's door and the length of the supports 3 is greater than the length of the vacuum coating machine 1's door, the vacuum coating machine 1's door can be opened normally. At this point, move the support plate 502 to a height matching the operator's height (it is recommended that the top of the support plate 502 not be higher than the bottom of the vacuum coating machine 1's door) to facilitate the operator opening the vacuum coating machine 1's door and replacing workpieces inside.

[0020] Please refer to Figure 4 and Figure 6 The limiting mechanism 9 includes a connecting block 901, a round hole 902, a plug rod 903, a ring 904, and a socket 905. Multiple connecting blocks 901 are connected to one side of the side wall of the door 6. A round hole 902 is opened on the side wall of the connecting block 901. A plug rod 903 is movably connected in the round hole 902. Two rings 904 are connected to the side wall of the plug rod 903. The two rings 904 are located on both sides of the connecting block 901. Multiple sockets 905 are opened on the side wall of another bracket 3. The sockets 905 can be aligned with the round hole 902, and the diameter of the sockets 905 is equal to the diameter of the round hole 902. After the door 6 is closed, the connecting block 901 is located inside the gap between the side plate 701 and one side wall of the bracket 3.

[0021] After the door 6 is closed, one side of the door 6 is in contact with the side wall of another bracket 3. At the same time, the door 6 drives the connecting block 901 to rotate, so that the round hole 902 on the connecting block 901 is aligned with the insertion hole 905, and multiple insertion rods 903 are inserted into the insertion hole 905, so that the door 6 and the bracket 3 are locked together. The multiple insertion rods 903 can also prevent other insertion rods 903 from falling off. The remaining insertion rods 903 can still lock the door 6 and the bracket 3 together.

[0022] Please refer to Figure 3 and Figure 5An auxiliary component 7 is provided on the support plate 502. The auxiliary component 7 includes a side plate 701, a through hole 702, a pedal 703, and a connecting rod 704. The side plate 701 is connected to the side of the support plate 502 near the door 6. The side plate 701 has multiple arrayed through holes 702. The pedal 703 is connected to the side wall of the side plate 701 near the support plate 502. The top of the pedal 703 is flush with the bottom side wall of the through hole 702. Two symmetrically distributed connecting rods 704 are connected to the bottom of the side wall of the side plate 701 near the support plate 502. The connecting rods 704 are inclined. The other end of the connecting rods 704 is connected to the bottom side wall of the support plate 502. There is a gap between the side plate 701 and the closed door 6.

[0023] After the support plate 502 is moved downward, the operator can pass through the through hole 702 and then step on the foot pedal 703, which makes it convenient for the operator to climb onto the support plate 502.

[0024] Please refer to Figure 3 , Figure 4 and Figure 5 A fence component 8 is provided on the support plate 502. The fence component 8 includes a fence frame 801 and a handle 802. The top of the support plate 502 is connected to the fence frame 801. The fence frame 801 is U-shaped. The opening of the fence frame 801 faces the side plate 701. Multiple handles 802 are connected to the side wall of the fence frame 801 near the side plate 701. The length of the handle 802 is less than the length of the support plate 502.

[0025] The fence frame 801 can provide shelter for the workers, while the handle 802 makes it easy for the workers to climb up the support plate 502 by holding the handle 802. When outside the sealing door of the vacuum coating machine 1, the sealing door of the vacuum coating machine 1 needs to be located above the fence frame 801.

[0026] The working principle and usage process of this utility model are as follows: In specific use, open the cover door 6, start the drive component 501, the drive component 501 drives the support plate 502 to move downward, so that the support plate 502 is lowered, and the operator climbs onto the support plate 502. Then, close the cover door 6, and one side of the cover door 6 is in contact with the side wall of another bracket 3. At the same time, the cover door 6 drives the connecting block 901 to rotate, so that the round hole 902 on the connecting block 901 is aligned with the insertion hole 905, and multiple insertion rods 903 are inserted into the insertion hole 905, so that the cover door 6 and the bracket 3 are locked together. Multiple insertion rods 903 can also prevent other insertion rods 903 from falling off. The remaining insertion rods 903 can still lock the cover door 6 and the bracket 3 together, thereby ensuring that the operator will not fall off the support plate 502. Then, move the support plate 502 upward to facilitate the adjustment of the height of the support plate 502, so that the height of the support plate 502 meets the needs of operators of different heights to change workpieces.

[0027] Finally, it should be noted that the above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A vacuum coating device facilitating replacement of workpieces, comprising a vacuum coating machine (1) installed on the ground and a base plate (2) close to the side wall of the vacuum coating machine (1), characterized in that: The top two sides of the base plate (2) are connected to brackets (3). The side walls of the brackets (3) are connected to multiple guide rods (4). The bottom ends of the guide rods (4) are connected to the top of the base plate (2). A door (6) is rotatably connected to the side wall of one of the brackets (3). A lifting mechanism (5) is provided on the base plate (2). A limit mechanism (9) is installed on the door (6) and the bracket (3).

2. The vacuum coating device of claim 1, wherein: The distance between the two supports (3) is greater than the sealing length of the vacuum coating machine (1), the support (3) is U-shaped, and the length of the support (3) is greater than the sealing length of the vacuum coating machine (1).

3. The vacuum coating device of claim 1, wherein: The lifting mechanism (5) includes a driving component (501), a support plate (502) and a guide hole (503). The top of the base plate (2) is connected to the driving component (501), and the output end of the driving component (501) is connected to the support plate (502). The side wall of the support plate (502) is provided with two sets of symmetrically distributed guide holes (503), and the side wall of the guide hole (503) is slidably connected to the guide rod (4).

4. The vacuum coating device of claim 3, wherein: There is a gap between the side wall of the support plate (502) away from the vacuum coating machine (1) and the side wall of the bracket (3) away from the vacuum coating machine (1).

5. The vacuum coating device of claim 1, wherein: The limiting mechanism (9) includes a connecting block (901), a round hole (902), a plug rod (903), a ring (904), and a socket (905). A plurality of connecting blocks (901) are connected to one side of the side wall of the door (6). A round hole (902) is opened on the side wall of the connecting block (901). A plug rod (903) is movably connected in the round hole (902). Two rings (904) are connected to the side wall of the plug rod (903). The two rings (904) are located on both sides of the connecting block (901). A plurality of sockets (905) are opened on the side wall of the other bracket (3). The sockets (905) can be aligned with the round hole (902), and the diameter of the sockets (905) is equal to the diameter of the round hole (902).

6. The vacuum coating device of claim 3, wherein: The drive component (501) can be a hydraulic cylinder or a jack.

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