Sample stage device with cooling device and vacuum coating equipment

Abstract

This utility model relates to the technical field of vacuum coating equipment, and in particular to a sample stage device with a cooling device and a vacuum coating equipment. The sample stage device can flexibly move the sample holder up and down within the vacuum chamber via a lifting device. Operators do not need to open the vacuum chamber to remove the sample and transfer it to different process modules, thereby avoiding contamination from contact with the atmospheric environment when the sample is transferred to different process stations, and reducing the deviation of sample material performance or film defects caused by atmospheric pollutants. The cooling device is set between the sample holder and the lifting device, and can actively cool the sample holder to suppress the sample temperature rise caused by heat source radiation or process energy input during the coating process, protect the heat-sensitive material and reduce film defects caused by thermal stress, thereby protecting the sample and improving the stability of multi-process operation and the reliability of experimental results.

Description

Technical Field

[0001] This utility model relates to the technical field of vacuum coating equipment, and more particularly to a sample stage device with a cooling device and a vacuum coating equipment. Background Technology

[0002] In the vacuum coating process, a sample stage is typically used to fix the sample to be processed within a vacuum chamber, utilizing the vacuum environment to achieve a localized ultra-clean environment. The vacuum environment can effectively avoid interference from atmospheric pollutants, providing a high-purity, low-disturbance experimental basis for research such as material growth, aging simulation, and performance testing.

[0003] However, the sample stage in traditional vacuum coating equipment has a single function, supporting only a single coating process. This leads to the need for samples to be repeatedly removed and reloaded into different functional modules for research requiring multiple steps and processes. This process not only significantly increases the risk of samples being exposed to the atmospheric environment, potentially causing material performance deviations or film defects due to the introduction of atmospheric pollutants, but also affects the continuity of experiments due to process interruptions, ultimately reducing research efficiency and the reliability of results.

[0004] This utility model was proposed in response to the shortcomings of the existing technology. Utility Model Content

[0005] This invention addresses the problems of traditional vacuum coating equipment, such as the single function of the sample stage, the need to repeatedly remove and reload samples into different functional modules, which increases the risk of sample exposure to the atmospheric environment. This can lead to material performance deviations or film defects due to the introduction of atmospheric pollutants, and can also affect the continuity of experiments due to process interruptions, reducing research efficiency and the reliability of results. The invention proposes a sample stage device and vacuum coating equipment with a cooling device.

[0006] The technical solution adopted by this utility model to solve its technical problem is: A sample stage device with a cooling system includes: A sample holder, used to hold samples; A lifting device is provided, on which the sample rack is mounted and driven to move the sample rack up and down. A cooling device is provided between the sample holder and the lifting device to cool the sample holder.

[0007] The sample stage device with a cooling device as described above includes a cooling plate disposed between the sample holder and the lifting device. The cooling plate is provided with an inlet pipe and an outlet pipe. The inlet pipe and the outlet pipe pass through the lifting device and extend to the outside, respectively, and coolant is input and output to the cooling plate through the inlet pipe and the outlet pipe.

[0008] As described above, the sample stage device with a cooling device has an inlet, a serpentine flow channel and an outlet connected in sequence in the cooling tray. The inlet and outlet are located at the bottom of the cooling tray. The inlet is connected to the inlet pipe and the outlet is connected to the outlet pipe.

[0009] As described above, the sample stage device with a cooling device has an inlet channel between the inlet and the serpentine channel, and an outlet channel between the outlet and the serpentine channel. The inlet channel and the outlet channel are symmetrically arranged along the central axis of the cooling plate, and the serpentine channel is arranged around the outer periphery of the inlet channel and the outlet channel.

[0010] As described above, the sample stage device with a cooling device includes a lifting device comprising a driver and a column connected to the driver. The driver drives the column to move up and down. The column is provided with a first lead channel and a second lead channel for the water inlet pipe and the water outlet pipe to pass through, respectively.

[0011] As described above, the sample stage device with a cooling device has a first mounting base at the bottom of the column. The column is connected to the moving end of the driver through the first mounting base. The driver drives the column to move up and down, thereby driving the cooling plate and the sample holder to move up and down synchronously. The first mounting base has a first opening and a second opening that are respectively connected to the first lead channel, the second lead channel and the third lead channel. The first opening and the second opening are used to allow the water inlet pipe and the water outlet pipe to extend out of the column.

[0012] As described above, the sample stage device with a cooling device has a second mounting base at the top of the column, and the cooling plate is mounted on the second mounting base. The second mounting base has a first through hole and a second through hole corresponding to the water inlet pipe and the water outlet pipe, respectively. The water inlet pipe and the water outlet pipe are respectively connected to the bottom of the first through hole and the second through hole.

[0013] As described above, in the sample stage device with a cooling device, a first sealing ring and a second sealing ring corresponding to the first through hole and the second through hole are respectively provided between the cooling plate and the second mounting base.

[0014] The sample stage device with a cooling device as described above further includes a sealing device disposed on the outside of the column. The sealing device includes a third mounting base, a sealing connecting base disposed on the third mounting base, and a sealing element disposed on the inner side of the sealing connecting base. The column is slidably inserted through the sealing element by the driver. A third sealing ring is also provided between the sealing connecting base and the third mounting base.

[0015] This utility model also provides a vacuum coating equipment, including a base, a vacuum chamber disposed on the base, and a sample stage device as described above. The sample stage device is disposed between the base and the vacuum chamber. A vacuum chamber is provided inside the vacuum chamber. An assembly part is provided outside the vacuum chamber. The lifting device passes through the assembly part at least partially and extends into the vacuum chamber. The lifting device moves up and down relative to the vacuum chamber to drive the sample holder and cooling device to move up and down within the vacuum chamber.

[0016] Compared with the prior art, the beneficial effects of this utility model are: This invention also provides a sample stage device with a cooling system. By integrating a lifting device and a cooling device into the sample stage device, the device can lift and cool samples within a vacuum chamber. Once a sample is loaded, multiple processes and steps can be completed within the vacuum chamber using the sample stage device. This enhances sample protection and the continuity of the coating process, improving the efficiency of material research and the consistency of experimental data in vacuum coating. In practical applications, the sample stage device allows the sample holder to move flexibly within the vacuum chamber via the lifting device. Operators do not need to open the vacuum chamber to remove samples and transfer them to different process modules, thus avoiding contamination from contact with the atmospheric environment when transferring samples between different process stations. This reduces the deviation in sample material performance or film defects caused by atmospheric pollutants. The cooling device, located between the sample holder and the lifting device, actively cools the sample holder, suppressing the temperature rise of the sample caused by heat source radiation or process energy input during the coating process. This protects heat-sensitive materials and reduces film defects caused by thermal stress, thus protecting the sample and improving the stability of multi-process operations and the reliability of experimental results.

[0017] The present invention will be further described below with reference to the accompanying drawings and specific embodiments. Attached Figure Description

[0018] Figure 1 This is a perspective view of the vacuum coating equipment of this utility model; Figure 2 Disassembly of the sample stage device of this utility model Figure 1 ; Figure 3 Disassembly of the sample stage device of this utility model Figure 2 ; Figure 4 Disassembly of the sample stage device of this utility model Figure 3 ; Figure 5 for Figure 3 Sectional view A-A in the middle; Figure 6This is a top view of the vacuum coating equipment of this utility model; Figure 7 for Figure 6 The B-B section view in the diagram; Figure 8 for Figure 6 Local magnification Figure 1 ; Figure 9 for Figure 6 Local magnification Figure 2 ; Figure 10 For Figure 2 The C-C section view in the image. Detailed Implementation

[0019] The embodiments of this utility model will now be described in detail with reference to the accompanying drawings. The described embodiments are merely some, not all, of the embodiments of this utility model. All other embodiments obtained by those skilled in the art based on the embodiments of this utility model without inventive effort are within the scope of protection of this utility model.

[0020] It should be noted that all directional indicators (such as up, down, left, right, front, back, etc.) in this utility model embodiment are only used to explain the relative positional relationship and movement of each component in a certain specific posture (as shown in the figure). If the specific posture changes, the directional indicator will also change accordingly.

[0021] Furthermore, the use of terms such as "first" and "second" in this utility model is for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. Additionally, the technical solutions of the various embodiments can be combined with each other, but only on the basis of being achievable by those skilled in the art. When the combination of technical solutions is contradictory or impossible to implement, such a combination of technical solutions should be considered non-existent and not within the scope of protection claimed by this utility model.

[0022] like Figure 1As shown in Figure 10, this utility model provides a vacuum coating equipment 200, including a base 210, a vacuum chamber 220 disposed on the base 210, and a sample stage device 100. The sample stage device 100 is disposed between the base 210 and the vacuum chamber 220. The vacuum chamber 220 has a vacuum chamber 221 inside, and an assembly part 222 is provided outside the vacuum chamber 220. The sample stage device 100 extends at least partially through the assembly part 222 into the vacuum chamber 221, and carries the sample, placing the sample in the vacuum chamber 221. The sample holder 100 includes a sample holder 110 for placing samples, a lifting device 120, and a cooling device 130. The sample holder 110 is disposed on the lifting device 120, which at least partially passes through the assembly part 222 and extends into the vacuum chamber 221. The cooling device 130 is disposed between the sample holder 110 and the lifting device 120. The lifting device 120 moves up and down relative to the vacuum chamber 220 to drive the sample holder 110 to move up and down within the vacuum chamber 221, and the cooling device 130 cools the sample holder 110.

[0023] In this invention, by integrating the lifting device 120 and the cooling device 130 into the sample stage device 100, the sample stage device 100 can achieve the functions of lifting and cooling samples within the vacuum chamber 221. Once a sample is loaded, multiple processes and steps can be completed within the vacuum chamber 221 using the sample stage device 100, enhancing sample protection and the continuity of the coating process, and improving the efficiency of material research and the consistency of experimental data in vacuum coating. Specifically, in practical applications, the sample stage device 100 can flexibly move the sample holder 110 up and down within the vacuum chamber 221 via the lifting device 120. Operators do not need to open the vacuum chamber 221 to remove samples and transfer them to different process modules, thus avoiding sample contamination from contact with the atmospheric environment when changing process stations. This reduces sample material performance deviations or film defects caused by atmospheric pollutants. The cooling device 130 is located between the sample holder 110 and the lifting device 120. It can actively cool the sample holder 110, suppress the sample temperature rise caused by heat source radiation or process energy input during the coating process, protect the heat-sensitive material and reduce film defects caused by thermal stress, thereby protecting the sample and improving the stability of multi-process operations and the reliability of experimental results.

[0024] Specifically, such as Figure 3 , 4As shown in Figures 5 and 7, the cooling device 130 includes a cooling tray 131 disposed between the sample holder 110 and the lifting device 120. The cooling tray 131 has an inlet pipe 132 and an outlet pipe 133 externally. The inlet pipe 132 and outlet pipe 133 pass through the lifting device 120 and extend to the outside. The inlet pipe 132 and outlet pipe 133 are respectively connected to an external cold source, through which coolant is input to and output to the cooling tray 131. The coolant can be cold water to reduce the cost of the cooling device 130. The cooling tray 131 is directly connected to the sample holder 110. The sample holder 110 is cooled efficiently by the flow of cold water within the cooling plate 131, thereby cooling the sample and preventing material thermal stress, film cracking, or performance degradation caused by localized overheating. Furthermore, the lifting device 120 is located at the lower part of the cooling plate 131, and the inlet pipe 132 and outlet pipe 133 pass through the interior of the lifting device 120 and extend to the outside, optimizing the wiring layout of the cooling device 130. This improves the structural compactness of the sample stage device 100, thereby reducing the volume of the sample stage device 100 and reducing the external assembly structure of the sample stage device 100, which helps maintain the sealing of the vacuum chamber 221.

[0025] In other alternative embodiments, such as Figure 4 and Figure 10 As shown, the cooling plate 131 is provided with a water inlet 1312, a serpentine flow channel 1313, and a water outlet 1314 connected in sequence. The water inlet 1312 and the water outlet 1314 are located at the bottom of the cooling plate 131. The water inlet 1312 is connected to the water inlet pipe 132, and the water outlet 1314 is connected to the water outlet pipe 133. The water inlet 1312 and the water outlet 1314 are located at the bottom of the cooling plate 131. One end of the serpentine flow channel 1313 is connected to the water inlet 1312, and the other end is connected to the water outlet 1314, allowing coolant to flow through. The rapid and uniform flow through the serpentine flow channel 1313 increases the contact area and contact time between the coolant and the sample holder 110, thereby improving heat conduction efficiency and quickly dissipating the heat generated by the sample holder 110 during coating or high-temperature processes. This avoids material thermal stress, film defects, or performance degradation caused by localized overheating. The serpentine flow channel 1313 also improves the space utilization of the cooling plate 131, making its internal structure more compact and reducing its volume. This allows the cooling plate 131 to achieve efficient heat exchange within the limited space of the vacuum chamber 221.

[0026] In some alternative embodiments, such as Figure 10As shown, an inlet channel 1315 is provided between the inlet 1312 and the serpentine flow channel 1313, and an outlet channel 1316 is provided between the outlet 1314 and the serpentine flow channel 1313. The inlet channel 1315 and the outlet channel 1316 are symmetrically arranged along the central axis of the cooling plate 131, and the serpentine flow channel 1313 is arranged around the outer periphery of the inlet channel 1315 and the outlet channel 1316. Specifically, the inlet 1312 and the outlet 1314 are symmetrically arranged at the bottom of the cooling plate 131, and the inlet channel 1315 and the outlet channel 1316 are on the same straight line in the cooling plate 131. Furthermore, the inlet channel 1315 and the outlet channel 1316 are symmetrically arranged along the central axis of the cooling plate 131, and the serpentine channel 1313 forms an annular serpentine channel 1313 and surrounds the outside of the inlet channel 1315 and the outlet channel 1316. By providing symmetrical internal channels within the cooling plate 131, the flow path of the internal channels of the cooling plate 131 is optimized, improving the overall heat exchange efficiency and cooling uniformity of the cooling plate 131. At the same time, the symmetrical channel structure helps to ensure the airtightness of the internal channels of the cooling plate 131, avoiding leakage and disorder in the channels that would affect the flow efficiency of the coolant, thereby improving the cooling effect of the cooling plate 131.

[0027] Specifically, such as Figure 1 and Figure 7 As shown, the lifting device 120 includes a driver 121 and a column 122 connected to the driver 121. The driver 121 drives the column 122 to move up and down. The column 122 has a first lead-in channel and a second lead-in channel for the water inlet pipe 132 and the water outlet pipe 133 to pass through, respectively. Optionally, the column 122 can be a hollow column, and the first and second lead-in channels can be formed through the hollow cavity 1220 of the column 122. This simplifies the structure of the column 122 and reduces the manufacturing cost of the sample stage device 100. The inlet pipe 132 and outlet pipe 133 extend directly to the outside through the hollow cavity 1220, which reduces the assembly difficulty of the inlet pipe 132 and outlet pipe 133. At the same time, the vertical arrangement of the column 122 enables the orderly storage of external pipelines, avoiding mechanical jamming or maintenance difficulties caused by messy wiring, and simplifying the structure of the sample stage device 100. By encapsulating both the inlet pipe 132 and outlet pipe 133 in the internal channel of the column 122, the risk of sealing damage or air leakage that may be caused by traditional external pipes passing through the vacuum chamber 221 is avoided, while preventing coolant leakage from polluting the vacuum environment.

[0028] Optional, such as Figure 1As shown, the driver 121 is mounted in the base 210 via a connecting bracket 101. The driver 121 includes a drive motor 1211 and a telescopic push rod 1212 that is connected to the drive motor 1211. The column 122 is mounted on the upper part of the telescopic push rod 1212. The driver 121 can be a servo electric cylinder in the prior art. The servo electric cylinder integrates the telescopic push rod 1212. The end of the telescopic push rod 1212 forms the moving end of the driver 121 and is connected to the column 122. The servo electric cylinder controls and adjusts the lifting and lowering movement of the column 122 to achieve precise positioning of the sample holder 110 at any position during the lifting and lowering process. Optionally, the driver 121 further includes a transmission assembly connected between the drive motor 1211 and the telescopic push rod 1212. The transmission assembly transmits the mechanical energy of the drive motor 1211 to the telescopic push rod 1212 to achieve the lifting effect of the telescopic push rod 1212 on the column 122. The transmission assembly is provided with an outer cover 1213 connected to the connecting bracket 101 to protect the transmission assembly. It should be noted that the transmission assembly can be an existing pulley transmission assembly, a multi-stage gear transmission assembly, etc., and this utility model does not make a specific limitation.

[0029] Further optional, such as Figure 1 , 5As shown in Figure 7, the bottom of the column 122 is provided with a first mounting base 123. The column 122 is connected to the moving end of the driver 121 through the first mounting base 123. The driver 121 drives the column 122 to move up and down, thereby driving the cooling plate 131 and the sample holder 110 to move up and down synchronously. The first mounting base 123 is provided with a first opening 1231 and a second opening 1232 respectively communicating with the first lead channel and the second lead channel. The first opening 1231 and the second opening 1232 are used to allow the water inlet pipe 132 and the water outlet pipe 133 to extend out of the column 122. The first mounting base 123 can be set as a first flange part located at the bottom of the column 122. The first flange part can be used to fix the column 122 to the moving end of the driver 121 through bolts, screws and other connecting parts, so that the column 122 follows the moving end of the driver 121 in the vacuum coating equipment. The lifting and moving mechanism 122 is achieved through mechanical fixation between the first mounting base 123 and the driver 121, which enables efficient transmission of the driving force of the driver 121. This ensures that the column 122 moves smoothly and is positioned accurately during lifting and lowering, thereby driving the cooling plate 131 and the sample holder 110 to lift and lower synchronously. This avoids the mechanical asynchrony problem caused by the lag in drive transmission in traditional structures. The ends of the water inlet pipe 132 and the water outlet pipe 133 can be set as Z-shaped bends, and the second opening 1232 and the third opening 1233 are passed through the Z-shaped bends. This allows the connecting ends of the water inlet pipe 132 and the water outlet pipe 133 to face the bottom of the vacuum coating equipment 200, which is beneficial for the connection of the water inlet pipe 132 and the water outlet pipe 133 to the external cold source. During production, the external cold source can be set in the base 210 and located below the vacuum chamber 220, which can ensure that the water inlet pipe 132 and the water outlet pipe 133 follow the lifting and lowering movement of the column 122, ensuring the normal operation of the cooling device 130. It should be noted that the external cold source shown can be set in the base 210 and located below the vacuum chamber 220, so that the water inlet pipe 132 and the water outlet pipe 133 can be connected to the external cold source respectively. The external pipes between the water inlet pipe 132 and the water outlet pipe 133 and the external cold source can be reserved to accommodate the lifting and lowering movement of the column 122 and the cooling plate 131, thereby ensuring the normal operation of the lifting device 120 and the cooling device 130.

[0030] Optional, such as Figure 5 As shown, the first opening 1231 and the second opening 1232 are distributed circumferentially around the first mounting base 123, wherein the first opening 1231 and the second opening 1232 are symmetrically arranged in the first mounting base 123, such that the water inlet pipe 132 and the water outlet pipe 133 have different extension directions relative to the first mounting base 123, so as to facilitate the connection of the sample stage device 100 with an external cold source.

[0031] Further optional, such as Figure 2 , 3 As shown in Figure 7, the top of the column 122 is provided with a second mounting base 124, and the cooling plate 131 is disposed on the second mounting base 124. The second mounting base 124 is provided with a first through hole 1241 and a second through hole 1242 corresponding to the water inlet pipe 132 and the water outlet pipe 133, respectively. The water inlet pipe 132 and the water outlet pipe 133 are respectively connected to the bottom of the first through hole 1241 and the second through hole 1242 and extend into the hollow cavity 1220. A first sealing ring 125 and a second sealing ring 126 corresponding to the first through hole 1241 and the second through hole 1242 are provided between the cooling plate 131 and the second mounting base 124, respectively. The first sealing ring 125 is corresponding to the first through hole 1241 and the second through hole 1242. On the outer periphery of the hole 1241, the second sealing ring 126 is correspondingly disposed on the outer periphery of the second through hole 1242; by setting the second mounting base 124, the cooling plate 131 can be quickly installed and disassembled with the column 122 through the second mounting base 124; in addition, the second mounting base 124 concentrates the passage paths of the water inlet pipe 132 and the water outlet pipe 133 within the second mounting base 124 through the first through hole 1241 and the second through hole 1242, avoiding mechanical interference and messy wiring that may be caused by traditional external pipelines. At the same time, through the precise matching of the sealing ring and the through hole, the connection between the cooling plate 131 and the lifting device 120 is more compact, saving space in the vacuum chamber and improving the sealing performance of the sample stage device 100.

[0032] Optionally, a first receiving groove and a second receiving groove are provided between the cooling plate 131 and the second mounting base 124 for installing the first sealing ring 125 and the second sealing ring 126. The first sealing ring 125 and the second sealing ring 126 abut against the cooling plate 131 and the second mounting base 124 to close the assembly gap between the cooling plate 131 and the second mounting base 124, which helps to improve the sealing performance of the sample stage device 100 and ensure the cleanliness of the vacuum chamber 221. Further, the first receiving groove and the second receiving groove can be provided at the bottom of the cooling plate 131, or at the top of the second mounting base 124, or facing each other at the bottom of the cooling plate 131 and the top of the second mounting base 124. This utility model does not make specific limitations.

[0033] Further optional, such as Figure 3 , 4As shown in Figure 8, a sealing device 150 is provided on the outer side of the column 122. The sealing device 150 includes a third mounting base 151, a sealing connecting base 152 provided on the third mounting base 151, and a sealing element 153 provided on the inner side of the sealing connecting base 152. The column 122 is slidably inserted through the sealing element 153 by the driver 121. A third sealing ring 154 is also provided between the sealing connecting base 152 and the third mounting base 151. Specifically, the third mounting base 151 and the assembly The assembly part 222 is connected to the third mounting base 151, which has a second flange 1511 at its bottom. The assembly part 222 includes a third flange 2221 corresponding to the second flange 1511 and an assembly cylinder 2222 disposed between the third flange 2221 and the vacuum chamber 220. The second flange 1511 and the third flange 2221 can be connected by screws, bolts or other fasteners. The seat of the third mounting base 151 extends into the vacuum chamber 221 through the cavity of the assembly cylinder 2222. This allows the sealing connector 152 to be fixed within the vacuum chamber 221. The sealing element 153 can be a pre-existing skeleton oil seal 153. The column 122 is vertically and movably inserted into the skeleton oil seal 153, providing a vacuum seal for the column 122. Simultaneously, the top and bottom of the sealing connector 152 guide the column 122 to move vertically, enhancing the stability of the lifting device 120. Furthermore, through… The third sealing ring 154 abuts against the sealing connection seat 152 and the third mounting seat 151 to close the assembly gap between the sealing connection seat 152 and the third mounting seat 151, further enhancing the sealing performance of the sample stage device 100. Furthermore, the third sealing ring 154 abuts against the second flange portion 1511 and the third flange portion 2221, and the second flange portion 1511 and / or the third flange portion 2221 are provided with a third receiving groove for installing the third sealing ring 154.

[0034] Furthermore, a fourth sealing ring 155 is provided between the second flange portion 1511 and the third flange portion 2221. The fourth sealing ring 155 seals the assembly gap between the third mounting base 151 and the assembly portion 222, thereby improving the connection sealing between the sample stage device 100 and the vacuum chamber 220 and ensuring the stability of the vacuum chamber 221.

[0035] The above examples are merely illustrative of the technical content of this utility model to facilitate reader understanding, but do not imply that the implementation of this utility model is limited to these embodiments. Any technical extensions or re-creations made based on this utility model are protected by this utility model. The scope of protection of this utility model is defined by the claims.

Claims

1. A sample stage device with a cooling device, characterized in that, include: A sample holder (110) is used to hold samples; A lifting device (120) is provided, and the sample rack (110) is mounted on the lifting device (120). The lifting device (120) drives the sample rack (110) to move up and down. A cooling device (130) is provided between the sample holder (110) and the lifting device (120) to cool the sample holder (110).

2. The sample stage device with a cooling device as described in claim 1, characterized in that, The cooling device (130) includes a cooling plate (131) disposed between the sample holder (110) and the lifting device (120). The cooling plate (131) is provided with an inlet pipe (132) and an outlet pipe (133) on the outside. The inlet pipe (132) and the outlet pipe (133) pass through the lifting device (120) and extend to the outside, respectively. Coolant is input to and output to the cooling plate (131) through the inlet pipe (132) and the outlet pipe (133).

3. The sample stage device with a cooling device as described in claim 2, characterized in that, The cooling plate (131) is provided with a water inlet (1312), a serpentine flow channel (1313) and a water outlet (1314) connected in sequence. The water inlet (1312) and the water outlet (1314) are located at the bottom of the cooling plate (131). The water inlet (1312) is connected to the water inlet pipe (132), and the water outlet (1314) is connected to the water outlet pipe (133).

4. The sample stage device with a cooling device as described in claim 3, characterized in that, An inlet channel (1315) is provided between the inlet (1312) and the serpentine channel (1313), and an outlet channel (1316) is provided between the outlet (1314) and the serpentine channel (1313). The inlet channel (1315) and the outlet channel (1316) are symmetrically arranged along the central axis of the cooling plate (131), and the serpentine channel (1313) is arranged around the outer periphery of the inlet channel (1315) and the outlet channel (1316).

5. The sample stage device with a cooling device as described in claim 2, characterized in that, The lifting device (120) includes a driver (121) and a column (122) connected to the driver (121). The driver (121) drives the column (122) to move up and down. The column (122) is provided with a first lead wire channel and a second lead wire channel for the water inlet pipe (132) and the water outlet pipe (133) to pass through respectively.

6. The sample stage device with a cooling device as described in claim 5, characterized in that, The bottom of the column (122) is provided with a first mounting base (123). The column (122) is connected to the moving end of the driver (121) through the first mounting base (123). The driver (121) drives the column (122) to move up and down, so as to drive the cooling plate (131) and the sample holder (110) to move up and down synchronously. The first mounting base (123) is provided with a first opening (1231) and a second opening (1232) respectively communicating with the first lead channel, the second lead channel and the third lead channel. The first opening (1231) and the second opening (1232) are used to allow the water inlet pipe (132) and the water outlet pipe (133) to extend out of the column (122).

7. The sample stage device with a cooling device as described in claim 5, characterized in that, The top of the column (122) is provided with a second mounting base (124), and the cooling plate (131) is provided on the second mounting base (124). The second mounting base (124) is provided with a first through hole (1241) and a second through hole (1242) corresponding to the water inlet pipe (132) and the water outlet pipe (133) respectively. The water inlet pipe (132) and the water outlet pipe (133) are respectively connected to the bottom of the first through hole (1241) and the second through hole (1242).

8. The sample stage device with a cooling device as described in claim 7, characterized in that, A first sealing ring (125) and a second sealing ring (126) corresponding to the first through hole (1241) and the second mounting base (124) are respectively provided between the cooling plate (131) and the second mounting base (124).

9. The sample stage device with a cooling device as described in claim 5, characterized in that, It also includes a sealing device (150) disposed on the outside of the column (122). The sealing device (150) includes a third mounting base (151), a sealing connecting base (152) disposed on the third mounting base (151), and a sealing element (153) disposed on the inside of the sealing connecting base (152). The column (122) is slidably inserted through the sealing element (153) by the driver (121). A third sealing ring (154) is also provided between the sealing connecting base (152) and the third mounting base (151).

10. A vacuum coating apparatus (200), characterized in that, The device includes a base (210), a vacuum chamber (220) disposed on the base (210), and a sample stage device (100) as described in any one of claims 1 to 9. The sample stage device (100) is disposed between the base (210) and the vacuum chamber (220). The vacuum chamber (220) has a vacuum chamber (221) inside and an assembly part (222) outside the vacuum chamber (220). The lifting device (120) passes through at least part of the assembly part (222) and extends into the vacuum chamber (221). The lifting device (120) moves up and down relative to the vacuum chamber (220) to drive the sample holder (110) and the cooling device (130) to move up and down in the vacuum chamber (221).

Images