A water-cooled screen for stabilizing a crystal bar

Abstract

The utility model relates to crystal bar production technical field especially relates to a water cooling screen for stabilizing crystal bar. The water cooling screen for stabilizing crystal bar includes water cooling screen body and buffer assembly. Among them, buffer assembly is set up to be multiple, and buffer assembly is along the circumferential and / or axial distribution of water cooling screen body, and every buffer assembly includes buffer pin and elastic piece, and one end of elastic piece is connected with water cooling screen body, and the other end of elastic piece is connected with buffer pin, and the end of buffer pin away from elastic piece is set to crystal bar, and buffer pin is configured to contact with the crystal bar that deviates from the axial motion. The water cooling screen for stabilizing crystal bar can reduce the amplitude of crystal bar shaking, absorb the energy produced by shaking, avoid the collision between crystal bar and water cooling screen body at the same time, reduce the security risk, and reduce the accident of dropping the bar.

Description

Technical Field

[0001] This utility model relates to the field of crystal rod production technology, and in particular to a water-cooled screen for stabilizing crystal rods. Background Technology

[0002] Currently, the Czochralski method is the primary industrial method for manufacturing monocrystalline silicon. This process is completed within a Czochralski silicon monocrystalline furnace: polycrystalline silicon raw material is placed in a quartz crucible and melted into molten silicon through high-temperature heating. A seed crystal with a specific crystal orientation is then lowered from the top of the equipment into the molten silicon. By precisely controlling the temperature of the molten silicon surface, the seed crystal recrystallizes on the surface. A top-mounted lifting mechanism then pulls the seed crystal upwards, ultimately producing a long crystal rod of a predetermined thickness. Throughout the entire crystal pulling process, the support and lifting of the crystal rod rely entirely on a tungsten wire rope at the top. This tungsten wire rope is typically up to seven meters long and must rotate continuously with the crystal pulling process to ensure the uniformity of the crystal rod growth. The water-cooled screen, a key component of the Czochralski silicon monocrystalline furnace, is mainly used to regulate the temperature field within the furnace, maintaining a stable thermal environment required for silicon crystal growth. It is typically located on the upper side wall of the quartz crucible and is an important structure ensuring the quality of monocrystalline silicon growth.

[0003] However, during the crystal pulling process, the crystal ingot is suspended and rotated entirely by a seven-meter-long tungsten wire rope. The tungsten wire rope has a large length-to-diameter ratio and insufficient rigidity, making it prone to radial oscillation during rotation. This causes the crystal ingot to wobble in an arc around the lifting axis. As the length of the crystal ingot increases, the amplitude of this oscillation accumulates, easily leading to collisions between the crystal ingot and the inner wall of the water-cooled screen, resulting in ingot detachment. Furthermore, if sudden external disturbances such as earthquakes occur during production, the external vibrations will be directly transmitted to the crystal ingot, causing it to wobble violently. This can not only render the monocrystalline silicon product unusable but may also cause high-temperature molten silicon to leak from the furnace due to collisions, leading to safety accidents.

[0004] Therefore, there is an urgent need to design a water-cooled screen for stabilizing crystal rods to solve the above technical problems. Utility Model Content

[0005] The purpose of this invention is to provide a water-cooled screen for stabilizing crystal rods, which can reduce the amplitude of crystal rod shaking, absorb the energy generated by shaking, and at the same time prevent the crystal rod from colliding with the water-cooled screen body, thereby reducing safety hazards and reducing crystal rod falling accidents.

[0006] To achieve this objective, the present invention adopts the following technical solution:

[0007] This utility model provides a water-cooled screen for stabilizing crystal rods, comprising:

[0008] Water-cooled screen body;

[0009] Multiple buffer components are distributed along the circumferential and / or axial direction of the water-cooled screen body. Each buffer component includes a buffer pin and an elastic element. One end of the elastic element is connected to the water-cooled screen body, and the other end of the elastic element is connected to the buffer pin.

[0010] As an optional technical solution for a water-cooled screen used to stabilize a crystal rod, the end of the buffer pin away from the elastic element is positioned towards the crystal rod, and the buffer pin is configured to contact the crystal rod that is moving off-axis.

[0011] As an optional technical solution for a water-cooled screen used to stabilize crystal rods, a first mounting hole is provided on the side wall of the water-cooled screen body, and the first mounting hole penetrates the inner wall and outer wall of the water-cooled screen body.

[0012] The buffer assembly further includes a baffle plate, which is connected to the outer wall of the water-cooled screen body and covers the first mounting hole. The elastic element is disposed in the first mounting hole, with one end of the elastic element connected to the baffle plate and the other end of the elastic element connected to the buffer pin. A second mounting hole is provided on the baffle plate, with one end of the buffer pin passing through the second mounting hole and the other end of the buffer pin passing through the first mounting hole and used to contact the crystal rod that deviates from the axis of motion.

[0013] As an optional technical solution for a water-cooled screen used to stabilize crystal rods, the baffle is bolted or snapped to the outer wall of the water-cooled screen body.

[0014] As an optional technical solution for a water-cooled screen used to stabilize crystal rods, the inner wall of the first mounting hole is provided with a limiting part, and the buffer pin includes a protrusion that cooperates with the limiting part to restrict the movement stroke of the buffer pin.

[0015] As an optional technical solution for a water-cooled screen used to stabilize crystal rods, the buffer pin further includes a first connecting part and a second connecting part. One end of the protrusion is connected to the first connecting part, and the other end of the protrusion is connected to the second connecting part. The elastic element is sleeved on the first connecting part, and one end of the elastic element is connected to the protrusion, and the other end is connected to the baffle. The end of the second connecting part away from the protrusion protrudes through the first mounting hole and is used to contact the crystal rod that is deviating from the axis of motion.

[0016] As an optional technical solution for water-cooled screens used to stabilize crystal rods, the surface of the second connecting part away from the protrusion is an arc-shaped surface.

[0017] As an optional technical solution for a water-cooled screen used to stabilize a crystal rod, the end of the buffer pin away from the elastic element has a roller, and the rolling direction of the roller is consistent with the rotation direction of the crystal rod.

[0018] As an optional technical solution for a water-cooled screen used to stabilize crystal rods, the buffer components are configured to be eight, and the eight buffer components are evenly distributed along the circumference of the water-cooled screen body, with the included angle between two adjacent buffer components set to 45°.

[0019] As an optional technical solution for stabilizing crystal rods, the plurality of buffer components are divided into at least two groups of buffer units along the axial direction of the water-cooled screen body, and each group of buffer units includes a plurality of buffer components distributed circumferentially along the water-cooled screen body.

[0020] As an optional technical solution for a water-cooled screen used to stabilize crystal rods, the water-cooled screen for stabilizing crystal rods further includes an inlet pipe and an outlet pipe. The inner wall and outer wall of the water-cooled screen body form a cooling channel, and both the inlet pipe and the outlet pipe are connected to the cooling channel.

[0021] As an optional technical solution for a water-cooled screen used to stabilize crystal rods, both the inlet pipe and the outlet pipe are located in the top area of ​​the water-cooled screen body, and the inlet pipe and the outlet pipe are arranged opposite to each other.

[0022] The beneficial effects of this utility model include at least the following:

[0023] This invention provides a water-cooled screen for stabilizing crystal rods. The water-cooled screen includes a water-cooled screen body and buffer components. Multiple buffer components are provided, distributed along the circumferential and / or axial direction of the water-cooled screen body. Each buffer component includes a buffer pin and an elastic element. One end of the elastic element is connected to the water-cooled screen body, and the other end of the elastic element is connected to the buffer pin.

[0024] In summary, by setting multiple buffer components on the water-cooled screen body, each buffer component includes an elastic element and a buffer pin. During the crystal pulling process, when the crystal rod shakes, the buffer pin can contact the crystal rod. The crystal rod transmits the collision force to the buffer pin. At this time, the elastic element is deformed by the force of the buffer pin. The elastic element converts the shaking energy (collision energy) of the crystal rod into elastic potential energy, thereby effectively reducing the shaking amplitude of the crystal rod, avoiding violent collision between the crystal rod and the water-cooled screen body, reducing the risk of crystal rod falling accidents, reducing safety hazards, and improving safety. Attached Figure Description

[0025] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments of this utility model will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the content of the embodiments of this utility model and these drawings without creative effort.

[0026] Figure 1 This is a schematic diagram of the structure of the water-cooled screen and crystal rod for stabilizing the crystal rod provided in this embodiment of the utility model;

[0027] Figure 2 This is a top view of the water-cooled screen and crystal rod for stabilizing the crystal rod provided in this embodiment of the utility model;

[0028] Figure 3 This is a schematic diagram of the structure of the water-cooled screen for stabilizing crystal rods provided in an embodiment of this utility model;

[0029] Figure 4 This is a cross-sectional view of the water-cooled screen for stabilizing crystal rods provided in an embodiment of this utility model;

[0030] Figure 5 yes Figure 4 A magnified view of a portion of point A in the middle.

[0031] Figure Labels

[0032] 100. Crystal rods;

[0033] 10. Water-cooled screen body; 11. First mounting hole; 12. Limiting part; 13. Cooling channel;

[0034] 20. Buffer assembly; 21. Buffer pin; 211. First connecting part; 212. Second connecting part; 213. Protrusion; 214. Arc-shaped surface; 22. Elastic element; 23. Baffle; 231. Second mounting hole;

[0035] 30. Inlet pipe; 40. Outlet pipe. Detailed Implementation

[0036] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0037] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0038] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0039] In the description of this utility model, it should be noted that the terms "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this utility model is in use. They are used only for the convenience of describing this utility model and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first," "second," and "third," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more.

[0040] In the description of this utility model, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set" and "connection" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0041] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0042] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0043] This embodiment provides a water-cooled screen for stabilizing crystal rods, which can reduce the amplitude of crystal rod shaking, absorb the energy generated by shaking, and at the same time prevent the crystal rod from colliding with the water-cooled screen body, reduce safety hazards, and reduce crystal rod falling accidents.

[0044] like Figures 1-5 As shown, the water-cooled screen used to stabilize the crystal rod mainly includes a water-cooled screen body 10 and a buffer assembly 20. Multiple buffer assemblies 20 are provided, distributed along the circumference and / or axial direction of the water-cooled screen body 10. Each buffer assembly 20 includes a buffer pin 21 and an elastic element 22. One end of the elastic element 22 is connected to the water-cooled screen body 10, and the other end is connected to the buffer pin 21. The end of the buffer pin 21 away from the elastic element 22 is positioned towards the crystal rod 100, and the buffer pin 21 is configured to contact the crystal rod 100 that is moving off-axis.

[0045] Based on the above design, multiple buffer components 20 are set on the water-cooled screen body 10. Each buffer component 20 includes an elastic element 22 and a buffer pin 21. During the crystal pulling process, when the crystal rod 100 shakes, the buffer pin 21 can contact the crystal rod 100. The crystal rod 100 transmits the collision force to the buffer pin 21. At this time, the elastic element 22 is deformed by the force of the buffer pin 21. The elastic element 22 converts the shaking energy of the crystal rod 100 into elastic potential energy, thereby effectively reducing the shaking amplitude of the crystal rod 100, avoiding violent collision between the crystal rod 100 and the water-cooled screen body 10, reducing the risk of crystal rod falling accident, and improving safety.

[0046] Optionally, the elastic element 22 in this embodiment can be set as a cylindrical helical spring, and the buffer pin 21 is made of carbon-carbon composite material.

[0047] Optionally, the crystal rod 100 in this embodiment can be a single-crystal silicon rod.

[0048] For example, the swaying amplitude of the crystal ingot 100 is between 5mm and 20mm. The swaying amplitude of the crystal ingot 100 is the distance between the farthest position of the crystal ingot 100 during swaying and the central axis of the crystal ingot 100. This distance can be set to 5mm-20mm. For example, this distance is 5mm, 8mm, 10mm, 15mm, or 20mm, etc.

[0049] It is understandable that the swaying amplitude of the crystal rod 100 is the distance by which the crystal rod 100 deviates from the axis (the central axis of the crystal rod 100).

[0050] like Figures 4-5 As shown, in this embodiment, a first mounting hole 11 is provided on the side wall of the water-cooled screen body 10, and the first mounting hole 11 penetrates the inner wall and outer wall of the water-cooled screen body 10. The buffer assembly 20 also includes a baffle 23, which is connected to the outer wall of the water-cooled screen body 10 and covers the first mounting hole 11. An elastic member 22 is disposed in the first mounting hole 11, one end of the elastic member 22 is connected to the baffle 23, and the other end of the elastic member 22 is connected to the buffer pin 21. A second mounting hole 231 is provided on the baffle 23, one end of the buffer pin 21 passes through the second mounting hole 231, and the other end of the buffer pin 21 passes through the first mounting hole 11 and is used to contact the crystal rod 100 that deviates from the axis of motion.

[0051] It is understood that the baffle 23 in this embodiment can completely cover the first mounting hole 11 or partially cover the first mounting hole 11. When the baffle 23 partially covers the first mounting hole 11, a second mounting hole 231 is formed between the baffle 23 and the buffer pin 21.

[0052] Specifically, by opening a first mounting hole 11 through the inner and outer walls of the side wall of the water-cooled screen body 10, the elastic element 22 is placed in the first mounting hole 11, achieving precise radial positioning of the elastic element 22 and preventing lateral displacement of the elastic element 22 under high-temperature conditions. The baffle 23 is connected to the outer wall of the water-cooled screen body 10 and covers the first mounting hole 11, which can reduce heat leakage in the furnace and provide a stable fixed support end for the elastic element 22, ensuring that the elastic element 22 deforms only along its own axis when subjected to force. The buffer pin 21 passes through the second mounting hole 231 and the first mounting hole 11, which can restrict the movement of the buffer pin 21 only along the radial direction of the crystal rod 100, ensuring that the buffer pin 21 is always set towards the crystal rod 100, avoiding the inability to contact the crystal rod 100 that deviates from the axis due to the offset of the buffer pin 21, and further improving the reliability and stability of the buffer assembly 20.

[0053] In some optional embodiments, the diameter of the first mounting hole 11 is 0.8 mm larger than the outer diameter of the elastic element 22, and the depth is adapted to the free length of the elastic element 22. The baffle 23 is made of high-temperature resistant stainless steel plate with a thickness of 4 mm. The diameter of the second mounting hole 231 is 0.15 mm larger than the outer diameter of the buffer pin 21. The mating clearance between the buffer pin 21 and the second mounting hole 231 and the first mounting hole 11 is controlled at 0.2 mm so that the buffer pin 21 can achieve telescopic movement after being impacted by the crystal rod 100. A high-temperature resistant sealing gasket is provided on the contact surface between the baffle 23 and the outer wall of the water-cooled screen body 10 to further reduce heat leakage.

[0054] In some optional embodiments, the baffle 23 is bolted or snap-fitted to the outer wall of the water-cooled screen body 10. Both connection methods are characterized by convenient installation and quick disassembly. Bolted connection provides higher connection strength and stability, suitable for long-term use and scenarios subject to large buffering forces. Snap-fit ​​connection is more convenient when frequent disassembly and assembly of the buffer assembly 20 is required, facilitating quick replacement or maintenance of the buffer assembly 20.

[0055] like Figures 4-5 As shown, in this embodiment, a limiting portion 12 is provided on the inner wall of the first mounting hole 11, and the buffer pin 21 includes a protrusion 213. The protrusion 213 abuts against the limiting portion 12 to limit the movement stroke of the buffer pin 21. Specifically, the limiting portion 12 provided on the inner wall of the first mounting hole 11 abuts against the protrusion 213 on the buffer pin 21, which can effectively limit the movement stroke of the buffer pin 21, prevent the buffer pin 21 from over-extending, and extend the service life of the buffer assembly 20.

[0056] For example, the limiting part 12 is configured as an annular step protruding towards the center from the inner wall of the first mounting hole 11, and the height of the annular step is 1.5 mm. The protrusion 213 is configured as an annular protrusion on the outer wall of the buffer pin 21, and the height of the annular protrusion is 2.5 mm.

[0057] Furthermore, the buffer pin 21 in this embodiment also includes a first connecting portion 211 and a second connecting portion 212. One end of the protrusion 213 is connected to the first connecting portion 211, and the other end of the protrusion 213 is connected to the second connecting portion 212. The elastic member 22 is sleeved on the first connecting portion 211. The first connecting portion 211 can radially position the elastic member 22, preventing the elastic member 22 from shifting laterally during deformation, ensuring that the elastic member 22 is only subjected to force along the axial direction, and improving the force stability. One end of the elastic member 22 is connected to the protrusion 213, and the other end is connected to the baffle 23. The protrusion 213, as an intermediate force transmission structure, can evenly transmit the force of the second connecting portion 212 to the elastic member 22, avoiding excessive local force. The end of the second connecting portion 212 away from the protrusion 213 passes through the first mounting hole 11 and is used to contact the crystal rod 100 that is moving off-axis. The length of the second connecting part 212 extending out of the first mounting hole 11 can be adjusted according to the wall thickness of the water-cooled screen body 10 and the swing range of the crystal rod 100 to adapt to different usage scenarios and needs, thereby improving the versatility and adaptability of the buffer assembly 20.

[0058] like Figure 5As shown, the surface of the second connecting portion 212 away from the protrusion 213 is an arc-shaped surface 214. This increases the contact area between the buffer pin 21 and the crystal rod 100, making the impact force more evenly distributed on the buffer pin 21, reducing local pressure on the surface of the second connecting portion 212, and also reducing the risk of damage to the surface of the crystal rod 100. In addition, the arc-shaped surface 214 can guide the crystal rod 100 to slide smoothly along the surface of the buffer pin 21 when shaking, reducing frictional resistance and impact, further improving the buffering effect of the buffer assembly 20 and its role in protecting the crystal rod 100.

[0059] In some optional embodiments, the end of the buffer pin 21 away from the elastic element 22 has a roller (not shown in the figure), and the rolling direction of the roller is consistent with the rotation direction of the crystal ingot 100. This converts the sliding friction between the buffer pin 21 and the crystal ingot 100 into rolling friction between the roller and the crystal ingot 100. From the perspective of friction characteristics, the rolling friction coefficient is much smaller than the sliding friction coefficient, which can significantly reduce the resistance encountered by the crystal ingot 100 during rotation, avoid interference with the rotational stability of the crystal ingot 100 due to frictional resistance, ensure that the crystal ingot 100 rotates smoothly at a preset rate, and thus ensure that the growth diameter of the crystal ingot 100 is uniform. At the same time, rolling friction will not cause sliding scratches on the surface of the crystal ingot 100, which can effectively protect the surface integrity of the crystal ingot 100, reduce the risk of product scrap due to surface damage, and reduce the phenomenon of stress concentration on the surface of the crystal ingot 100.

[0060] For example, the end of the buffer pin 21 away from the elastic element 22 can be connected to the roller by bolts.

[0061] In some optional embodiments, eight buffer components 20 are provided, and the eight buffer components 20 are evenly distributed along the circumference of the water-cooled screen body 10, with the included angle between two adjacent buffer components 20 set to 45°. This allows the water-cooled screen body 10 to provide omnidirectional buffer protection for the crystal rod 100 in the circumferential direction. Regardless of which direction the crystal rod 100 shakes, it can receive effective support and buffering from the buffer components 20 in a timely manner, avoiding collisions between the crystal rod 100 and the inner wall of the water-cooled screen body 10, and ensuring the stable growth of the crystal rod 100. The evenly distributed buffer components 20 also make the water-cooled screen body 10 more uniformly stressed, reducing local stress concentration, improving the overall structural stability of the water-cooled screen body 10, and extending its service life.

[0062] Of course, operators can also set other numbers of buffer components 20 according to actual needs, which will not be elaborated here.

[0063] In some optional embodiments, the plurality of buffer components 20 are divided into at least two groups of buffer units along the axial direction of the water-cooled screen body 10, and each group of buffer units includes a plurality of buffer components 20 distributed circumferentially along the water-cooled screen body 10. This axial distribution design of multiple groups of buffer units can buffer and protect the crystal rod 100 at different height positions, forming a multi-layer protective structure. As the length of the crystal rod 100 increases, the buffer units at different heights can specifically buffer the swaying of corresponding parts of the crystal rod 100, effectively suppressing the axial swinging and shaking of the crystal rod 100, further improving the stability of the crystal rod 100, and reducing the risk of the crystal rod falling off due to the accumulation of swaying amplitude.

[0064] For example, the buffer units can be configured as two groups, three groups, four groups, etc.

[0065] like Figures 1-3 As shown, the water-cooled screen used to stabilize the crystal rod also includes an inlet pipe 30 and an outlet pipe 40. The inner and outer walls of the water-cooled screen body 10 form a cooling channel 13. Both the inlet pipe 30 and the outlet pipe 40 are connected to the cooling channel 13, which enables the coolant to circulate within the water-cooled screen. The coolant carries away the heat absorbed by the water-cooled screen during operation, maintaining the temperature stability of the water-cooled screen, thereby maintaining the uniformity and stability of the temperature field inside the furnace, which is beneficial to the uniform growth of the crystal rod 100.

[0066] Optionally, the cooling channel 13 is configured as a spiral structure along the circumference of the water-cooled screen body 10 and covers the entire axial height of the water-cooled screen body 10. The inlet pipe 30 and the outlet pipe 40 are made of 304 stainless steel, and the connection between the inlet pipe 30 and the outlet pipe 40 and the cooling channel 13 is sealed by argon arc welding to prevent coolant leakage.

[0067] Alternatively, deionized water with a high thermal conductivity can be used as the coolant to ensure heat exchange efficiency.

[0068] like Figure 1 As shown, both the inlet pipe 30 and the outlet pipe 40 are located in the top area of ​​the water-cooled screen body 10, and are arranged opposite to each other. This layout facilitates the uniform distribution and circulation of the coolant. After the coolant enters the cooling channel 13 from the inlet pipe 30 at the top of the water-cooled screen body 10, it can diffuse evenly inside the water-cooled screen body 10, fully absorb heat, and then flow out from the outlet pipe 40 at the top of the water-cooled screen body 10, improving cooling efficiency. At the same time, the arrangement of the inlet pipe 30 and the outlet pipe 40 in the top area of ​​the water-cooled screen body 10 also facilitates connection and maintenance with external cooling systems, reducing the difficulty of arranging pipes on the side or bottom of the water-cooled screen body 10 and reducing interference with other components.

[0069] Obviously, the above description is merely a preferred embodiment of the present invention and the technical principles employed. Those skilled in the art will understand that the present invention is not limited to the specific embodiments described herein, and various obvious changes, readjustments, and substitutions can be made without departing from the protection scope of the present invention. Therefore, although the present invention has been described in detail through the above embodiments, the present invention is not limited to the above embodiments. Many other equivalent embodiments may be included without departing from the concept of the present invention, and the scope of the present invention is determined by the scope of the appended claims.

[0070] Note that in the description of this specification, the references to terms such as "some embodiments," "other embodiments," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of this utility model. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

Claims

1. A water-cooled shield for stabilizing a crystal bar, characterized by, include: Water-cooled screen body (10); Multiple buffer components (20) are distributed along the circumference and / or axial direction of the water-cooled screen body (10). Each buffer component (20) includes a buffer pin (21) and an elastic element (22). One end of the elastic element (22) is connected to the water-cooled screen body (10), and the other end of the elastic element (22) is connected to the buffer pin (21).

2. The water cooled shield for stabilizing a crystal bar of claim 1, wherein, The buffer pin (21) is positioned away from the elastic element (22) and toward the crystal rod (100). The buffer pin (21) is configured to contact the crystal rod (100) which is moving off-axis.

3. The water cooled shield for stabilizing a crystal bar of claim 1, wherein, The water-cooled screen body (10) has a first mounting hole (11) on its side wall, and the first mounting hole (11) penetrates the inner wall and outer wall of the water-cooled screen body (10). The buffer assembly (20) further includes a baffle (23), which is connected to the outer wall of the water-cooled screen body (10) and covers the first mounting hole (11). The elastic element (22) is disposed in the first mounting hole (11). One end of the elastic element (22) is connected to the baffle (23), and the other end of the elastic element (22) is connected to the buffer pin (21). A second mounting hole (231) is provided on the baffle (23). One end of the buffer pin (21) passes through the second mounting hole (231), and the other end of the buffer pin (21) passes through the first mounting hole (11) and is used to contact the crystal rod (100) that deviates from the axis of motion.

4. The water cooled shield for stabilizing a crystal bar of claim 3, wherein, The baffle (23) is bolted or snapped to the outer wall of the water-cooled screen body (10).

5. The water cooled shield for stabilizing a crystal bar of claim 3 wherein, The inner wall of the first mounting hole (11) is provided with a limiting part (12), and the buffer pin (21) includes a protrusion (213), which cooperates with the limiting part (12) to restrict the movement stroke of the buffer pin (21).

6. The water cooled shield for stabilizing a crystal bar of claim 5, wherein, The buffer pin (21) further includes a first connecting part (211) and a second connecting part (212). One end of the protrusion (213) is connected to the first connecting part (211), and the other end of the protrusion (213) is connected to the second connecting part (212). The elastic element (22) is sleeved on the first connecting part (211), and one end of the elastic element (22) is connected to the protrusion (213), and the other end is connected to the baffle (23). The end of the second connecting part (212) away from the protrusion (213) passes through the first mounting hole (11) and is used to contact the crystal rod (100) that is deviating from the axis of motion.

7. The water cooled shield for stabilizing a crystal bar of claim 6, wherein, The surface of the second connecting part (212) away from the protrusion (213) is an arc-shaped surface (214).

8. The water cooled shield for stabilizing a crystal bar of claim 6, wherein, The buffer pin (21) has a roller at one end away from the elastic member (22), and the rolling direction of the roller is consistent with the rotation direction of the crystal rod (100).

9. The water cooled shield for stabilizing a crystal bar of claim 1 wherein, The buffer components (20) are configured to be eight, and the eight buffer components (20) are evenly distributed along the circumference of the water-cooled screen body (10), with the included angle between two adjacent buffer components (20) set to 45°.

10. The water cooled shield for stabilizing a crystal bar of claim 1 wherein, The plurality of buffer components (20) are divided into at least two groups of buffer units along the axial direction of the water-cooled screen body (10), and each group of buffer units includes a plurality of buffer components (20) distributed circumferentially along the water-cooled screen body (10).

11. The water cooled shield for stabilizing a crystal bar of claim 1 wherein, The water-cooled screen used to stabilize the crystal rod also includes an inlet pipe (30) and an outlet pipe (40). The inner and outer walls of the water-cooled screen body (10) are arranged to form a cooling channel (13). The inlet pipe (30) and the outlet pipe (40) are both connected to the cooling channel (13).

12. The water cooled shield for stabilizing a crystal bar of claim 11, wherein, The liquid inlet pipe (30) and the liquid outlet pipe (40) are both located in the top area of ​​the water-cooled screen body (10), and the liquid inlet pipe (30) and the liquid outlet pipe (40) are arranged opposite to each other.

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