Vacuum molecular pump impeller and vacuum molecular pump
By designing a gradient vacuum molecular pump impeller, the problem of low pumping efficiency in existing vacuum molecular pumps has been solved, achieving more efficient gas transmission and compression, adapting to different gas types and pressure conditions, and improving the overall performance of the vacuum molecular pump.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- SHENZHEN XINPENG PRECISION CNC CO LTD
- Filing Date
- 2025-09-25
- Publication Date
- 2026-08-04
AI Technical Summary
Existing vacuum molecular pumps have low pumping efficiency.
Design a vacuum molecular pump impeller by gradually reducing the distance between the outer ends of the pumping blades, transition blades, and compression blades and the central axis of the impeller body, thereby achieving a gradual change in blade size. This allows the gas to enter the vacuum molecular pump more effectively and be gradually compressed before being transported to the exhaust port.
It improves pumping efficiency and gas compression ratio, enhances adaptability to different gas types and pressure conditions, and ensures good performance under various operating conditions.
Smart Images
Figure CN224592417U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of vacuum technology, and in particular to a vacuum molecular pump impeller and a vacuum molecular pump. Background Technology
[0002] A vacuum molecular pump is a device that generates a vacuum by using a high-speed rotating impeller. The impeller is the core component of the vacuum molecular pump. However, the pumping efficiency of vacuum molecular pumps still needs improvement. Utility Model Content
[0003] In view of this, embodiments of this application provide a vacuum molecular pump impeller and a vacuum molecular pump to solve the problem of low pumping efficiency.
[0004] The first aspect of this application discloses a vacuum molecular pump impeller, comprising an impeller body, a pumping blade, a transition blade, and a compression blade. The pumping blade, the transition blade, and the compression blade are arranged sequentially along the axial direction of the impeller body. The distance between the outer end of the pumping blade and the central axis of the impeller body is greater than the distance between the outer end of the transition blade and the central axis of the impeller body, and the distance between the outer end of the transition blade and the central axis of the impeller body is greater than the distance between the outer end of the compression blade and the central axis of the impeller body.
[0005] The beneficial effects of the vacuum molecular pump impeller provided in this application embodiment are as follows: by gradually reducing the distance between the outer end of the pumping blade and the central axis of the impeller body, the distance between the outer end of the transition blade and the central axis of the impeller body, and the distance between the outer end of the compression blade and the central axis of the impeller body, the blade size is gradually changed. This allows the pumping blade to better guide the gas into the vacuum molecular pump. When passing through the transition blade and the compression blade, the gas can be better compressed and transported to the exhaust port. This makes the gas transport in the vacuum molecular pump smoother, helps to improve the pumping efficiency and gas compression ratio, and more effectively pumps the gas from the vacuum chamber to the exhaust port.
[0006] Furthermore, the gradually changing blade size design makes the vacuum molecular pump more adaptable to different gas types and pressure conditions. For gases of varying molecular weights and flow rates, the gradually changing blade size design allows for better transport, maintaining good performance under various operating conditions.
[0007] In some embodiments, the extraction blades are provided with multiple layers along the axial direction of the impeller body, wherein, The length of the multiple layers of extraction blades decreases sequentially along the axial direction of the impeller body; or, The lengths of the extraction blades in the multi-layered system are all the same.
[0008] In some embodiments, the transition blades are provided in multiple layers along the axial direction of the impeller body, wherein, The lengths of the multiple transition blades decrease sequentially along the axial direction of the impeller body; or, The transition blades in the multi-layered structures are all the same length.
[0009] In some embodiments, the compression blades are provided in multiple layers along the axial direction of the impeller body, wherein, The length of the multiple layers of compression blades decreases sequentially along the axial direction of the impeller body; or, The compression blades in the multi-layered system are all the same length.
[0010] In some embodiments, at least one of the extraction blades, the transition blades, and the compression blades is integrally formed with the impeller body.
[0011] In some embodiments, the impeller body includes a cylindrical section and a conical section, the conical section having a large-diameter end and a small-diameter end, and the cylindrical section being connected to the large-diameter end; the suction blade, the transition blade, and the compression blade are disposed on the conical section, the suction blade being located at the small-diameter end of the conical section, and the compression blade being located at the large-diameter end of the conical section.
[0012] In some embodiments, the cylindrical segment has a first cylindrical cavity, and the conical segment has a stepped cavity communicating with the first cylindrical cavity.
[0013] In some embodiments, the transition blades are provided in multiple layers along the axial direction of the impeller body, and the compression blades are provided in multiple layers along the axial direction of the impeller body; the stepped cavity includes a first stepped cavity segment, a second stepped cavity segment, and a third stepped cavity segment with successively increasing diameters, the second stepped cavity segment is arranged corresponding to an adjacent layer of the transition blades and a layer of the compression blades, the first stepped cavity segment is arranged corresponding to the remaining layers of the transition blades, and the third stepped cavity segment is arranged corresponding to the remaining layers of the compression blades.
[0014] In some embodiments, the conical segment further has a second cylindrical cavity, and the conical segment has a partition that separates the stepped cavity from the second cylindrical cavity. The partition has a central hole and a plurality of fixing holes, and the plurality of fixing holes are arranged at intervals around the central hole.
[0015] The second aspect of this application provides a vacuum molecular pump comprising a vacuum molecular pump impeller as described in the first aspect.
[0016] This vacuum molecular pump employs any one or more embodiments of the vacuum molecular pump impeller described above, and thus possesses the beneficial effects of the aforementioned embodiments, which will not be elaborated upon here.
[0017] The above description is only an overview of the technical solution of this application. In order to better understand the technical means of this application and to implement it in accordance with the contents of the specification, and to make the above and other objects, features and advantages of this application more obvious and understandable, the following are specific embodiments of this application. Attached Figure Description
[0018] To more clearly illustrate the technical solutions in the embodiments of this application, the drawings used in the description of the embodiments or conventional technology will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0019] Figure 1 This is a schematic diagram of the structure of a vacuum molecular pump impeller provided in some embodiments of this application; Figure 2 yes Figure 1 The image shows a top view of the impeller of a vacuum molecular pump. Figure 3 yes Figure 2 The image shows a cross-sectional view of the vacuum molecular pump impeller at point AA.
[0020] The markings in the diagram mean: 10. Vacuum molecular pump impeller; 11. Impeller body; 111. Conical section; 1111. Small diameter end; 1112. Large diameter end; 1113. Stepped cavity; 11131. First stepped cavity section; 11132. Second stepped cavity section; 11133. Third stepped cavity section; 1114. Second cylindrical cavity; 1115. Separator; 11151. Central hole; 11152. Fixing hole; 112. Cylindrical section; 1121. First cylindrical cavity; 12. Exhaust vanes; 13. Transition blades; 14. Compression blades. Detailed Implementation
[0021] The embodiments of the technical solution of this application will now be described in detail with reference to the accompanying drawings. These embodiments are only used to more clearly illustrate the technical solution of this application and are therefore merely examples, and should not be used to limit the scope of protection of this application.
[0022] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application pertains; the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the application; the terms “comprising” and “having”, and any variations thereof, in the specification, claims, and foregoing description of the drawings are intended to cover non-exclusive inclusion.
[0023] In the description of the embodiments of this application, technical terms such as "first" and "second" are used only to distinguish different objects and should not be construed as indicating or implying relative importance or implicitly specifying the number, specific order, or primary and secondary relationship of the indicated technical features. In the description of the embodiments of this application, "multiple" means two or more, unless otherwise explicitly defined.
[0024] In this document, the term "embodiment" means that a particular feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of this application. The appearance of this phrase in various places throughout the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.
[0025] In the description of the embodiments in this application, the term "and / or" is merely a description of the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent: A existing alone, A and B existing simultaneously, and B existing alone. Additionally, the character " / " in this document generally indicates that the preceding and following related objects have an "or" relationship.
[0026] In the description of the embodiments of this application, the term "multiple" refers to two or more (including two), similarly, "multiple sets" refers to two or more (including two sets), and "multiple pieces" refers to two or more (including two pieces).
[0027] In the description of the embodiments of this application, the technical terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. They are only for the convenience of describing the embodiments of this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the embodiments of this application.
[0028] In the description of the embodiments of this application, unless otherwise expressly specified and limited, technical terms such as "installation," "connection," "joining," and "fixing" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. For those skilled in the art, the specific meaning of the above terms in the embodiments of this application can be understood according to the specific circumstances.
[0029] An embodiment of the first aspect of this application provides a vacuum molecular pump impeller. Please refer to... Figure 1 and Figure 3 The vacuum molecular pump impeller 10 includes an impeller body 11, a pumping blade 12, a transition blade 13, and a compression blade 14. The pumping blade 12, the transition blade 13, and the compression blade 14 are arranged sequentially along the axial direction of the impeller body 11. The distance S1 between the outer end of the pumping blade 12 and the central axis X of the impeller body 11 is greater than the distance S2 between the outer end of the transition blade 13 and the central axis X of the impeller body 11. The distance S2 between the outer end of the transition blade 13 and the central axis X of the impeller body 11 is greater than the distance S3 between the outer end of the compression blade 14 and the central axis X of the impeller body 11.
[0030] The impeller body 11 is the main structure of the vacuum molecular pump impeller 10. The impeller body 11 is used to connect with the drive device. During operation, the drive device drives the impeller body 11 to rotate, thereby driving the pumping blades 12, the transition blades 13 and the compression blades 14 to rotate.
[0031] The pumping vane 12 is mainly used to realize the pumping function of the vacuum molecular pump. It has a high pumping speed and a low compression ratio. The transition vane 13 plays a transitional role, which gradually reduces the pumping speed and gradually increases the compression ratio. The compression vane 14 plays a compression role, with a low pumping speed and a high compression ratio.
[0032] The extraction blade 12, transition blade 13, and compression blade 14 are arranged sequentially along the axial direction of the impeller body 11. This can be understood as the transition blade 13 being positioned between the extraction blade 12 and the compression blade 14 along the axial direction of the impeller body 11. After the airflow enters the vacuum molecular pump through the extraction port, it first passes through the extraction blade 12, transition blade 13, and compression blade 14 in sequence, and then exits from the exhaust port of the vacuum molecular pump. The axial direction of the impeller body 11 is... Figure 3 The direction of extension of the central axis X of the impeller body 11.
[0033] The distance S1 between the outer end of the suction blade 12 and the central axis X of the impeller body 11 is greater than the distance S2 between the outer end of the transition blade 13 and the central axis X of the impeller body 11. The distance S2 between the outer end of the transition blade 13 and the central axis X of the impeller body 11 is greater than the distance S3 between the outer end of the compression blade 14 and the central axis X of the impeller body 11. That is, the outer ends of the suction blade 12, the transition blade 13, and the compression blade 14 gradually approach the central axis X of the impeller body 11.
[0034] Understandably, in the radial direction of the impeller body 11, the length of the suction blade 12 is greater than the length of the transition blade 13, and the length of the transition blade 13 is greater than the length of the compression blade 14. Specifically, the length of the suction blade 12 refers to the distance between its outer and inner ends in the radial direction of the impeller body 11; the length of the transition blade 13 refers to the distance between its outer and inner ends in the radial direction of the impeller body 11; and the length of the compression blade 14 refers to the distance between its outer and inner ends in the radial direction of the impeller body 11.
[0035] It should be noted that the outer end of the suction blade 12 refers to the end of the suction blade 12 that is away from the central axis X of the impeller body 11, and the inner end of the suction blade 12 refers to the end of the suction blade 12 that is close to the central axis X of the impeller body 11; the outer end of the transition blade 13 refers to the end of the transition blade 13 that is away from the central axis X of the impeller body 11, and the inner end of the transition blade 13 refers to the end of the transition blade 13 that is close to the central axis X of the impeller body 11; the outer end of the compression blade 14 refers to the end of the compression blade 14 that is away from the central axis X of the impeller body 11, and the inner end of the compression blade 14 refers to the end of the compression blade 14 that is close to the central axis X of the impeller body 11.
[0036] Among them, the suction blade 12 can be arranged in one or more layers along the axial direction of the impeller body 11; the transition blade 13 can be arranged in one or more layers along the axial direction of the impeller body 11; and the compression blade 14 can be arranged in one or more layers along the axial direction of the impeller body 11.
[0037] The beneficial effects of the vacuum molecular pump impeller 10 provided in this application embodiment are as follows: by gradually reducing the distance between the outer end of the pumping blade 12 and the central axis X of the impeller body 11, the distance between the outer end of the transition blade 13 and the central axis X of the impeller body 11, and the distance between the outer end of the compression blade 14 and the central axis X of the impeller body 11, the blade size is gradually changed, which allows the pumping blade 12 to better guide the gas into the vacuum molecular pump. When passing through the transition blade 13 and the compression blade 14, the gas can be better compressed and transported to the exhaust port, thereby making the transmission of gas in the vacuum molecular pump smoother, which helps to improve the pumping efficiency and gas compression ratio, and more effectively pumps the gas from the vacuum chamber to the exhaust port.
[0038] Furthermore, the gradually changing blade size design makes the vacuum molecular pump more adaptable to different gas types and pressure conditions. For gases of varying molecular weights and flow rates, the gradually changing blade size design allows for better transport, maintaining good performance under various operating conditions.
[0039] Please refer to Figure 1 and Figure 3 In some embodiments, the extraction blades 12 are provided with multiple layers along the axial direction of the impeller body 11, and the length of the multiple extraction blades 12 decreases sequentially along the axial direction of the impeller body 11.
[0040] It is understood that the suction blades 12 can be arranged in two, three, four or more layers along the axial direction of the impeller body 11. Each layer of suction blades 12 includes multiple suction blades 12 arranged at intervals along the circumference of the impeller body 11.
[0041] The length of the multi-layered extraction blades 12 decreases sequentially along the axial direction of the impeller body 11. Please refer to... Figure 3 Taking the example of two layers of suction blades 12 arranged along the axial direction of the impeller body 11, the length of the upper suction blade 12 is greater than the length of the lower suction blade 12. It can be understood that the width of the upper suction blade 12 can be greater than or equal to the width of the lower suction blade 12, where the width of the suction blade 12 refers to the dimension of the suction blade 12 along the axial direction of the impeller body 11.
[0042] Based on the above technical solution, by setting up multi-layered air extraction blades 12, it is beneficial to improve air extraction.
[0043] In some embodiments, the extraction blades 12 are arranged in multiple layers along the axial direction of the impeller body 11, and the multiple layers of extraction blades 12 have the same length.
[0044] It is understood that the suction blades 12 can be arranged in two, three, four or more layers along the axial direction of the impeller body 11. Each layer of suction blades 12 includes multiple suction blades 12 arranged at intervals along the circumference of the impeller body 11.
[0045] The multi-layered extraction blades 12 are all the same length, please refer to... Figure 3 Taking the example of two layers of suction blades 12 arranged along the axial direction of the impeller body 11, the length of the upper suction blade 12 is equal to the length of the lower suction blade 12. It can be understood that the width of the upper suction blade 12 can be greater than or equal to the width of the lower suction blade 12, where the width of the suction blade 12 refers to the dimension of the suction blade 12 along the axial direction of the impeller body 11.
[0046] Based on the above technical solution, by setting up multi-layered air extraction blades 12, it is beneficial to improve air extraction.
[0047] Please refer to Figure 1 and Figure 3 In some embodiments, the transition blades 13 are provided with multiple layers along the axial direction of the impeller body 11, and the length of the multiple transition blades 13 decreases sequentially along the axial direction of the impeller body 11.
[0048] It is understood that the transition blades 13 can be arranged in two, three, four or more layers along the axial direction of the impeller body 11. Each layer of transition blades 13 includes multiple transition blades 13 arranged at intervals along the circumference of the impeller body 11.
[0049] The length of the multi-layer transition blades 13 decreases sequentially along the axial direction of the impeller body 11. Please refer to... Figure 3 Taking the example of two layers of transition blades 13 arranged along the axial direction of the impeller body 11, the length of the upper transition blade 13 is greater than the length of the lower transition blade 13. It can be understood that the width of the upper transition blade 13 can be greater than or equal to the width of the lower transition blade 13, where the width of the transition blade 13 refers to the dimension of the transition blade 13 along the axial direction of the impeller body 11.
[0050] Based on the above technical solution, by setting up multi-layer transition blades 13, it is beneficial for the gas to transition better from being pumped to being compressed.
[0051] In some embodiments, the transition blades 13 are arranged in multiple layers along the axial direction of the impeller body 11, and the multiple layers of transition blades 13 have the same length.
[0052] It is understood that the transition blades 13 can be arranged in two, three, four or more layers along the axial direction of the impeller body 11. Each layer of transition blades 13 includes multiple transition blades 13 arranged at intervals along the circumference of the impeller body 11.
[0053] The multi-layer transition blades 13 are all the same length, please refer to... Figure 3 Taking the example of two layers of transition blades 13 arranged along the axial direction of the impeller body 11, the length of the upper transition blade 13 is equal to the length of the lower transition blade 13. It can be understood that the width of the upper transition blade 13 can be greater than or equal to the width of the lower transition blade 13, where the width of the transition blade 13 refers to the dimension of the transition blade 13 along the axial direction of the impeller body 11.
[0054] Based on the above technical solution, by setting up multi-layer transition blades 13, it is beneficial for the gas to transition better from being pumped to being compressed.
[0055] Please refer to Figure 1 and Figure 3 In some embodiments, the compression blades 14 are provided in multiple layers along the axial direction of the impeller body 11, and the length of the multiple compression blades 14 decreases sequentially along the axial direction of the impeller body 11.
[0056] It is understood that the compression blades 14 can be arranged in two, three, four or more layers along the axial direction of the impeller body 11. Each layer of compression blades 14 includes multiple compression blades 14 arranged at intervals along the circumference of the impeller body 11.
[0057] The length of the multi-layered compression blades 14 decreases sequentially along the axial direction of the impeller body 11. Please refer to... Figure 3 Taking the example of two layers of compression blades 14 arranged along the axial direction of the impeller body 11, the length of the upper compression blade 14 is greater than the length of the lower compression blade 14. It can be understood that the width of the upper compression blade 14 can be greater than or equal to the width of the lower compression blade 14, where the width of the compression blade 14 refers to the dimension of the compression blade 14 along the axial direction of the impeller body 11.
[0058] Based on the above technical solution, by setting up multi-layer compression blades 14, it is beneficial to compress the gas better.
[0059] In some embodiments, the compression blades 14 are arranged in multiple layers along the axial direction of the impeller body 11, and the multiple layers of compression blades 14 have the same length.
[0060] It is understood that the compression blades 14 can be arranged in two, three, four or more layers along the axial direction of the impeller body 11. Each layer of compression blades 14 includes multiple compression blades 14 arranged at intervals along the circumference of the impeller body 11.
[0061] The multi-layer compression blades 14 are all the same length, please refer to... Figure 3 Taking the example of two layers of compression blades 14 arranged along the axial direction of the impeller body 11, the length of the upper compression blade 14 is equal to the length of the lower compression blade 14. It can be understood that the width of the upper compression blade 14 can be greater than or equal to the width of the lower compression blade 14, where the width of the compression blade 14 refers to the dimension of the compression blade 14 along the axial direction of the impeller body 11.
[0062] Based on the above technical solution, by setting up multi-layer compression blades 14, it is beneficial to compress the gas better.
[0063] In some embodiments, at least one of the extraction blade 12, the transition blade 13, and the compression blade 14 is integrally formed with the impeller body 11.
[0064] It can be understood that the suction blade 12, the transition blade 13, and the compression blade 14 are all integrally formed with the impeller body 11; or, one of the suction blade 12, the transition blade 13, and the compression blade 14 is integrally formed with the impeller body 11; or, two of the suction blade 12, the transition blade 13, and the compression blade 14 are integrally formed with the impeller body 11.
[0065] Based on the above technical solution, the fitting accuracy between at least one of the pumping blade 12, the transition blade 13 and the compression blade 14 and the impeller body 11 can be improved, thereby improving the overall performance of the vacuum molecular pump.
[0066] In other embodiments, the extraction blade 12, the transition blade 13, and the compression blade 14 can be separately fixedly connected to the impeller body 11. For example, the separate fixed connection can be achieved by welding, interference fit, etc.
[0067] Please refer to Figure 3 In some embodiments, the impeller body 11 includes a conical section 111 and a cylindrical section 112. The conical section 111 has a small-diameter end 1111 and a large-diameter end 1112, and the cylindrical section 112 is connected to the large-diameter end 1112. The suction blade 12, the transition blade 13 and the compression blade 14 are disposed on the conical section 111. The suction blade 12 is located at the small-diameter end 1111 of the conical section 111, and the compression blade 14 is located at the large-diameter end 1112 of the conical section 111.
[0068] It can be understood that the smaller diameter end 1111 is the end of the tapered segment 111 that is away from the cylindrical segment 112, and the larger diameter end 1112 is the end of the tapered segment 111 that is close to the cylindrical segment 112.
[0069] The pumping blade 12, the transition blade 13, and the compression blade 14 are disposed on the conical section 111, with the pumping blade 12 located at the small diameter end 1111 of the conical section 111 and the compression blade 14 located at the large diameter end 1112 of the conical section 111. This makes the pumping blade 12 longer and the compression blade 14 shorter, which is more conducive to the pumping and compression of the vacuum molecular pump.
[0070] In other embodiments, the impeller body 11 may include a first cylindrical section and a second cylindrical section, the diameter of the first cylindrical section may be less than or equal to the diameter of the second cylindrical section, and the suction blade 12, the transition blade 13 and the compression blade 14 are disposed on the first cylindrical section.
[0071] In some embodiments, the cylindrical segment 112 has a first cylindrical cavity 1121, and the conical segment 111 has a stepped cavity 1113 communicating with the first cylindrical cavity 1121.
[0072] Optionally, the transition blades 13 are provided in multiple layers along the axial direction of the impeller body 11, and the compression blades 14 are provided in multiple layers along the axial direction of the impeller body 11. The stepped cavity 1113 includes a first stepped cavity section 11131, a second stepped cavity section 11132, and a third stepped cavity section 11133 with successively increasing diameters. The second stepped cavity section 11132 is arranged corresponding to an adjacent layer of transition blades 13 and a layer of compression blades 14. The first stepped cavity section 11131 is arranged corresponding to the remaining layers of transition blades 13, and the third stepped cavity section 11133 is arranged corresponding to the remaining layers of compression blades 14. The diameter of the third stepped cavity section 11133 is smaller than the diameter of the first cylindrical cavity 1121.
[0073] For example, the transition blades 13 are provided in two layers along the axial direction of the impeller body 11, and the compression blades 14 are provided in three layers along the axial direction of the impeller body 11; the second stepped cavity section 11132 is arranged correspondingly to the adjacent lower layer transition blades 13 and upper layer compression blades 14, the first stepped cavity section 11131 is arranged correspondingly to the upper layer transition blades 13, and the third stepped cavity section 11133 is arranged correspondingly to the middle and lower layers of compression blades 14.
[0074] Based on the above technical solution, the stepped cavity 1113 can reduce the wall thickness of the impeller body 11, thereby reducing the weight of the impeller body 11.
[0075] Please refer to Figure 2 and Figure 3 In some embodiments, the tapered segment 111 also has a second cylindrical cavity 1114. The tapered segment 111 has a partition 1115 that separates the stepped cavity 1113 from the second cylindrical cavity 1114. The partition 1115 has a central hole 11151 and a plurality of fixing holes 11152, which are arranged at intervals around the central hole 11151.
[0076] The diameter of the second cylindrical cavity 1114 is smaller than the diameter of the first stepped cavity segment 11131.
[0077] Optionally, the exhaust blades 12 are provided in two layers along the axial direction of the impeller body 11. The upper exhaust blades 12 are arranged corresponding to the second cylindrical cavity 1114, and the lower exhaust blades 12 are arranged corresponding to the separator 1115.
[0078] It is understandable that two, three, four or more fixing holes 11152 can be provided.
[0079] Optionally, multiple fixing holes 11152 are evenly spaced around the central hole 11151 to ensure uniform force distribution after the output shaft is fixedly connected to the separator 1115.
[0080] Optionally, both the center hole 11151 and the fixing hole 11152 are through holes.
[0081] The first cylindrical cavity 1121 and the stepped cavity 1113 are for the installation of a drive device (e.g., a drive motor). The drive device includes an output shaft, which includes a shaft body and a flange disposed on the shaft body. The end of the shaft body passes through the central hole 11151. Fasteners (e.g., screws, bolts, pins) pass through the fixing hole 11152 and are connected to the flange to achieve a fixed connection between the output shaft and the partition 1115.
[0082] A second aspect of this application discloses a vacuum molecular pump comprising a vacuum molecular pump impeller 10 as described in the first aspect. It also includes a drive unit for driving the vacuum molecular pump impeller 10 to rotate.
[0083] The vacuum molecular pump employs any one or more embodiments of the vacuum molecular pump impeller 10 described above, and thus has the beneficial effects of the above embodiments, which will not be elaborated further here.
[0084] The above embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this application, and should all be included within the protection scope of this application.
Claims
1. A vacuum molecular pump impeller, characterized in that: The impeller includes a main body, suction blades, transition blades, and compression blades. The suction blades, transition blades, and compression blades are arranged sequentially along the axial direction of the impeller main body. The distance between the outer end of the suction blade and the central axis of the impeller main body is greater than the distance between the outer end of the transition blade and the central axis of the impeller main body. The distance between the outer end of the transition blade and the central axis of the impeller main body is greater than the distance between the outer end of the compression blade and the central axis of the impeller main body.
2. The vacuum molecular pump impeller as described in claim 1, characterized in that: The extraction blades are provided in multiple layers along the axial direction of the impeller body, wherein, The length of the multiple layers of extraction blades decreases sequentially along the axial direction of the impeller body; or, The lengths of the extraction blades in the multi-layered system are all the same.
3. The vacuum molecular pump impeller as described in claim 1, characterized in that: The transition blades are provided in multiple layers along the axial direction of the impeller body, wherein, The lengths of the multiple transition blades decrease sequentially along the axial direction of the impeller body; or, The transition blades in the multi-layered structures are all the same length.
4. The vacuum molecular pump impeller as described in claim 1, characterized in that: The compression blades are provided in multiple layers along the axial direction of the impeller body, wherein, The length of the multiple layers of compression blades decreases sequentially along the axial direction of the impeller body; or, The compression blades in the multi-layered system are all the same length.
5. The vacuum molecular pump impeller as described in claim 1, characterized in that: At least one of the extraction blades, the transition blades, and the compression blades is integrally formed with the impeller body.
6. The vacuum molecular pump impeller as described in any one of claims 1-5, characterized in that: The impeller body includes a cylindrical section and a conical section. The conical section has a large-diameter end and a small-diameter end, and the cylindrical section is connected to the large-diameter end. The suction blade, the transition blade, and the compression blade are disposed on the conical section. The suction blade is located at the small-diameter end of the conical section, and the compression blade is located at the large-diameter end of the conical section.
7. The vacuum molecular pump impeller as described in claim 6, characterized in that: The cylindrical segment has a first cylindrical cavity, and the conical segment has a stepped cavity communicating with the first cylindrical cavity.
8. The vacuum molecular pump impeller as described in claim 7, characterized in that: The transition blades are provided in multiple layers along the axial direction of the impeller body, and the compression blades are provided in multiple layers along the axial direction of the impeller body; the stepped cavity includes a first stepped cavity section, a second stepped cavity section, and a third stepped cavity section with successively increasing diameters. The second stepped cavity section is arranged corresponding to an adjacent layer of the transition blades and a layer of the compression blades. The first stepped cavity section is arranged corresponding to the remaining layers of the transition blades, and the third stepped cavity section is arranged corresponding to the remaining layers of the compression blades.
9. The vacuum molecular pump impeller as described in claim 7, characterized in that: The conical segment also has a second cylindrical cavity, and a partition is provided in the conical segment to separate the stepped cavity from the second cylindrical cavity. The partition has a central hole and multiple fixing holes, and the multiple fixing holes are arranged at intervals around the central hole.
10. A vacuum molecular pump, characterized in that: Includes the vacuum molecular pump impeller as described in any one of claims 1-9.