Air floating vibration isolation platform and wafer testing machine
By integrating the main body of the vibration isolator and the leveling valve, the air-floating vibration isolation platform solves the real-time and reliability problems of traditional air-floating vibration isolation systems under dynamic conditions, and achieves rapid response and high-precision platform leveling.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- 长川科技(苏州)有限公司
- Filing Date
- 2025-06-27
- Publication Date
- 2026-08-04
AI Technical Summary
Traditional air-bearing vibration isolation systems are difficult to meet real-time requirements under dynamic operating conditions, and the systems are complex, unreliable, have slow leveling, and are prone to air leakage or electrical failures.
Design an air-floating vibration isolation platform that integrates the vibration isolator body and the leveling valve. It achieves rapid automatic leveling through fluid communication, simplifying the structure and improving reliability.
The platform leveling achieved rapid response and high reliability, simplified the system structure, and improved the platform's stability and accuracy.
Smart Images
Figure CN224592603U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of semiconductor testing technology, and in particular to an air-bearing vibration isolation platform and a wafer testing machine. Background Technology
[0002] AOI (Automated Optical Inspection) is a common inspection technology in semiconductor testing. It uses optical algorithms to measure critical dimensions of wafers, such as linewidth and lineheight, film thickness, and surface roughness. AOI automated optical inspection equipment typically uses a wafer stage to hold the wafer and place it in the inspection area of the optical inspection device for inspection.
[0003] In the wafer inspection industry, maintaining a level wafer on the wafer stage requires basic leveling adjustments to ensure stable wafer placement and accuracy during inspection. Furthermore, AOI (Automated Optical Inspection) equipment, being extremely precise, often incorporates air-bearing vibration isolation platforms to isolate the wafer stage from external environmental vibrations. However, traditional air-bearing vibration isolation systems typically consist of air-bearing isolators and independent leveling modules. The air path transmission and control signal processing result in leveling lag, making it difficult to meet real-time requirements under dynamic operating conditions. Moreover, the complex interconnections between its multiple components make it susceptible to air path leaks or electrical faults during long-term operation, leading to insufficient system reliability.
[0004] Therefore, it is necessary to propose a new technical solution to overcome the shortcomings of existing technologies. Utility Model Content
[0005] Based on this, this application provides an air-floating vibration isolation platform and a wafer testing machine, which have a compact structure, rapid response and higher reliability.
[0006] Therefore, this application adopts the following technical solution: an air-floating vibration isolation platform, including a displacement platform, a frame supporting the displacement platform, and an air-floating vibration isolator disposed between the frame and the displacement platform. The air-floating vibration isolator includes an isolator body and a leveling valve near the side of the isolator body. The two ends of the isolator body are respectively connected to the frame and the displacement platform. The leveling valve has a fixing part and an abutment at its two ends. The fixing part is fixedly connected to one of the frame and the displacement platform, and the abutment abuts against the other of the frame and the displacement platform.
[0007] The vibration isolator body is in fluid communication with the leveling valve, and the leveling valve can replenish fluid to the vibration isolator body under the compression of the displacement platform.
[0008] In some embodiments, the air-bearing vibration isolation platform includes a wear-resistant component disposed on the frame, the fixing part is fixedly connected to the displacement platform, and the abutting top abuts against the wear-resistant component.
[0009] In some embodiments, the air-bearing vibration isolation platform includes a mounting base connected to the frame, the mounting base including a main mounting base for mounting the vibration isolator body and a wear-resistant component mounting base for mounting the wear-resistant component, the wear-resistant component being assembled to the frame via the wear-resistant component mounting base and located below the abutment top.
[0010] In some embodiments, the wear-resistant component mounting base is detachably mounted on the main body mounting base.
[0011] In some embodiments, the wear-resistant component mounting base is mounted on the side of the main mounting base, and there is a disassembly space between the lower part of the wear-resistant component mounting base and the frame to facilitate the disassembly and assembly of the wear-resistant component from below the leveling valve without removing the leveling valve.
[0012] In some embodiments, the leveling valve includes a columnar body, the fixing part is a mounting plate disposed at the top of the columnar body, and the abutment is a crimp joint formed at the bottom of the columnar body.
[0013] In some embodiments, the columnar body includes an upper segment and a lower segment that can move vertically relative to each other, and an adjusting member sleeved on the outside of the upper segment or the lower segment. The adjusting member drives the upper segment and the lower segment to move relative to each other to adjust the length of the columnar body.
[0014] In some embodiments, the leveling valve further includes a locking nut fitted onto the columnar body to restrict the movement of the adjusting member.
[0015] In some embodiments, there are multiple air-bearing vibration isolators, each disposed at a support position around the frame, and the multiple air-bearing vibration isolators are connected to the same air supply source through controllable valves.
[0016] This application also adopts the following technical solution: a wafer testing machine, which includes a testing device, a conveying device, and an air-bearing vibration isolation platform as described above. The conveying device is used to convey the wafer to the air-bearing vibration isolation platform, and the testing device is used to test the wafer placed on the air-bearing vibration isolation platform.
[0017] The air-floating vibration isolation platform provided in this application includes an air-floating vibration isolator, which includes an isolator body and a leveling valve near the isolator body. The two ends of the isolator body are respectively connected to the frame and the displacement platform. The leveling valve has a fixing part and a top located at its two ends. The fixing part is fixedly connected to one of the frame and the displacement platform, and the top abuts against the other of the frame and the displacement platform. The isolator body and the leveling valve are in fluid communication, and the leveling valve can replenish fluid to the isolator body under the compression of the displacement platform. This configuration enables the air-floating vibration isolator to achieve both vibration isolation of the displacement platform and automatic leveling function. It has the characteristics of compact structure, rapid response and higher reliability, effectively solving the problems of leveling lag and system complexity in traditional technology. Attached Figure Description
[0018] To more clearly illustrate the technical solutions in the embodiments of this application or the conventional technology, the drawings used in the description of the embodiments or the conventional technology will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0019] Figure 1 This is a three-dimensional assembly diagram of an embodiment of the air-bearing vibration isolation platform of this application.
[0020] Figure 2 This is an exploded perspective view of an embodiment of the air-bearing vibration isolation platform of this application.
[0021] Figure 3 for Figure 2 A magnified view of a portion of point A in the middle.
[0022] Figure 4 This is another exploded perspective view of one embodiment of the air-bearing vibration isolation platform of this application.
[0023] Figure 5 for Figure 4 A magnified view of a section at point B.
[0024] Figure 6 This is a connection diagram of an embodiment of the air-bearing vibration isolation platform of this application.
[0025] The components are labeled as follows: 1. Displacement platform; 2. Frame; 3. Air-float vibration isolator; 31. Vibration isolator body; 32. Leveling valve; 321. Columnar body; 3211. Fixing part; 3212. Top; 322. Adjusting component; 323. Locking nut; 33. Wear-resistant part; 4. Mounting base; 41. Body mounting base; 42. Wear-resistant part mounting base; 5. Detection device; 6. Controllable valve. Detailed Implementation
[0026] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.
[0027] It should be noted that when a component is referred to as being "fixed to" or "set on" another component, it can be directly on the other component or there may be an intermediate component. When a component is considered to be "connected to" another component, it can be directly connected to the other component or there may be an intermediate component present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used in this application's specification are for illustrative purposes only and do not represent the only possible implementation.
[0028] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.
[0029] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature and the second feature are in indirect contact through an intermediate medium. Furthermore, "above," "over," and "on top" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.
[0030] Unless otherwise defined, all technical and scientific terms used in this application have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used in this application is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. The term "and / or" as used in this application includes any and all combinations of one or more of the associated listed items.
[0031] Please see Figures 1 to 6As shown, this application provides an air-floating vibration isolation platform, including a displacement platform 1, a frame 2 supporting the displacement platform 1, and an air-floating vibration isolator 3 disposed between the frame 2 and the displacement platform 1. The air-floating vibration isolator 3 includes an isolator body 31 and a leveling valve 32 near the side of the isolator body 31. The two ends of the isolator body 31 are respectively connected to the frame 2 and the displacement platform 1. The leveling valve 32 has a fixing part 3211 and an abutment top 3212 located at its two ends, respectively. The fixing part 3211 is fixedly connected to one of the frame 2 and the displacement platform 1, and the abutment top 3212 abuts against the other of the frame 2 and the displacement platform 1. The vibration isolator body 31 is in fluid communication with the leveling valve 32, and the leveling valve 32 can replenish fluid to the vibration isolator body 31 under the compression of the displacement platform 1.
[0032] The air-floating vibration isolation platform provided in this application includes an air-floating vibration isolator 3, which includes a vibration isolator body 31 and a leveling valve 32 that are fluidly connected. The vibration isolator body 31 and the leveling valve 32 are arranged adjacent to each other, which not only realizes the vibration isolation function of the displacement platform 1, but also realizes the function of rapid automatic leveling. It has the characteristics of compact structure, rapid response and higher reliability, and effectively solves the problems of leveling lag and system complexity in traditional technology.
[0033] Please see Figure 1 and Figure 2 As shown, the displacement platform 1 is used to support the wafer to be inspected and to move the wafer smoothly and with high precision on a horizontal plane, so as to accurately move each area on the wafer that needs to be inspected to the inspection area of the inspection device such as the AOI camera. In this embodiment, the displacement platform 1 is a platform with marble as its base. The frame 2 is set below the displacement platform 1 to provide a stable support foundation for the displacement platform 1. In this embodiment, the frame 2 is mainly composed of several crossbeams and several longitudinal beams forming a frame structure. The top of the frame 2 is provided with a top plate to facilitate the installation of the air-bearing vibration isolation platform, the inspection device 5, and other related components.
[0034] Please see Figures 2 to 5As shown, the air-bearing vibration isolator 3 includes an isolator body 31 and a leveling valve 32. The two ends of the isolator body 31 are connected to the frame 2 and the displacement platform 1, respectively. Its main function is to isolate external vibrations through its internal air film structure. The two ends of the leveling valve 32 are also connected to the frame 2 and the displacement platform 1, respectively. The leveling valve 32 is located on one side of the isolator body 31 and close to it. The leveling valve 32 and the isolator body 31 are positioned close to each other, meaning that they are placed as close as possible without structural interference. This ensures that the upper ends of the leveling valve 32 and the upper ends of the isolator body 31 are close to each other at their contact support positions with the displacement platform 1, and can be considered approximately the same support position. This avoids a significant seesaw effect on the displacement platform 1 caused by the leveling valve 32 and the isolator body 31 having significantly different support positions on the displacement platform 1.
[0035] In this embodiment, the internal flow channels of the vibration isolator body 31 and the leveling valve 32 are kept in fluid communication through a short pipe. When the displacement platform 1 tilts due to load changes or external disturbances, it exerts a squeezing effect on the leveling valve 32. This mechanical action prompts the leveling valve 32 to replenish fluid, typically gas, into the vibration isolator body 31, thereby quickly adjusting the pressure distribution inside the vibration isolator body 31 and achieving automatic leveling of the displacement platform 1. This integrated design perfectly combines vibration isolation and leveling functions, greatly improving the system's response speed and reliability.
[0036] Please see Figure 3 and Figure 5 As shown, the two ends of the leveling valve 32 are a fixing part 3211 and an abutment 3212, respectively. The fixing part 3211 is fixedly connected to one of the frame 2 and the displacement platform 1, while the abutment 3212 abuts against the other. This arrangement allows the leveling valve 32 to sense changes in the horizontal state of the displacement platform 1 in real time. Further, in this embodiment, the upper end of the leveling valve 32 is the fixing part 3211, which is fixedly connected to the displacement platform 1, and the lower end of the leveling valve 32 is the abutment 3212, which faces the frame 2. In this embodiment, the air-bearing vibration isolation platform includes a wear-resistant component 33 disposed on the frame 2, and the abutment 3212 of the leveling valve 32 abuts against the wear-resistant component 33. The wear-resistant component 33 is preferably made of a material with high hardness and low coefficient of friction, such as silicon carbide or special ceramic materials. In actual assembly, the fixing part 3211 of the leveling valve 32 is fixedly connected to the bottom surface of the displacement platform 1 by fasteners such as bolts, while its top part 3212 abuts vertically against the upper surface of the wear-resistant part 33.
[0037] In the upright configuration of the leveling valve 32, the upper end of the leveling valve 32 is the abutment 3212, which abuts against the displacement platform 1, and the lower end is the fixing part 3211, which is connected and fixed to the frame 2. As a result, when the displacement platform 1 moves up and down, it will rub against the upper end of the leveling valve 32. The dust generated by this friction will fall downwards and enter the leveling valve 32, affecting its normal operation and potentially causing damage. This embodiment further optimizes the installation method of the leveling valve 32 by inverting it, connecting its upper end to the displacement platform 1, and using its lower end for abutment friction. This ensures that the dust generated by the friction between the abutment 3212 and the wear-resistant part 33 is located below the leveling valve 32, preventing dust from entering its interior.
[0038] Please continue reading. Figure 3 and Figure 5 As shown, in this embodiment, the air-floating vibration isolation platform includes a mounting base 4 connected to the frame 2. The vibration isolator body 31 and the leveling valve 32 are mounted to the frame 2 via the mounting base 4. Specifically, the mounting base 4 includes a main mounting base 41 for mounting the vibration isolator body 31 and a wear-resistant component mounting base 42 for mounting the wear-resistant component 33. The wear-resistant component 33 is assembled to the frame 2 via the wear-resistant component mounting base 42 and is located below the top 3212. In this embodiment, the wear-resistant component 33 is assembled below the top 3212 via the independently provided wear-resistant component mounting base 42. This arrangement ensures stable support for the leveling valve 32 and facilitates subsequent maintenance. Specifically, the wear-resistant component mounting base 42 is detachably mounted on the main mounting base 41. More specifically, the wear-resistant component mounting base 42 is mounted on the side of the main mounting base 41, and the two are fixed together by detachable connectors such as bolts. This design allows sufficient space for disassembly and assembly between the underside of the wear-resistant part mounting base 42 and the frame 2. When the wear-resistant part 33 needs to be replaced, the wear-resistant part mounting base 42 and the wear-resistant part 33 on it can be removed directly from under the leveling valve 32 after removing the connecting bolts between the wear-resistant part mounting base 42 and the main mounting base 41, without having to remove the entire leveling valve 32 or the displacement platform 1. This facilitates the disassembly and assembly of the wear-resistant part 33 and greatly simplifies the maintenance process.
[0039] In this embodiment, the structural design of the mounting base 4 fully considers the convenience of installation and maintenance. The main mounting base 41 is fixed on the frame 2, providing a stable mounting foundation for the vibration isolator body 31. The wear-resistant component mounting base 42 is mounted on the main mounting base 41 via a lateral connection. This lateral mounting design allows for easy disassembly of the wear-resistant component mounting base 42. During actual disassembly, simply loosening the lateral bolts connecting the wear-resistant component mounting base 42 and the main mounting base 41 allows the wear-resistant component mounting base 42 to be moved out horizontally. This design not only simplifies the disassembly process but, more importantly, avoids interference with other components during maintenance.
[0040] Please see Figure 5 As shown, in this embodiment, the leveling valve 32 includes a cylindrical body 321, a fixing part 3211 which is a mounting top plate disposed at the top of the cylindrical body 321, and a pressure joint formed at the bottom of the cylindrical body 321. The cylindrical body 321 includes an upper section and a lower section that can move vertically relative to each other, and an adjusting member 322 sleeved on the outside of the upper section or the lower section. The adjusting member 322 drives the upper section and the lower section to move relative to each other to adjust the length of the cylindrical body 321. In a specific embodiment, the adjusting member 322 may adopt the structure of a threaded sleeve. By rotating the adjusting member 322, the upper section and the lower section can be driven to move relative to each other, thereby precisely adjusting the length of the entire cylindrical body 321. Furthermore, the leveling valve 32 also includes a locking nut 323 sleeved on the cylindrical body 321 to restrict the movement of the adjusting member 322. After adjustment, in order to ensure the stability of adjustment accuracy, a locking nut 323 is also provided in this embodiment. The locking nut 323 is sleeved on the columnar body 321. The locking nut 323 can firmly restrict the movement of the adjusting part 322 by tightening, and prevent position displacement caused by vibration or other reasons during use.
[0041] Please see Figure 2 and Figure 6 As shown, in this embodiment, there are multiple air-bearing vibration isolators 3, each positioned at a support location around the frame 2. Each air-bearing vibration isolator 3 is connected to the same air supply source via a controllable valve 6. In this embodiment, there are four air-bearing vibration isolators 3, located at the four corners of the frame 2. One of the four air-bearing vibration isolators 3 has only an isolator body 31, which typically serves as a reference position. The other three air-bearing vibration isolators 3 each have an isolator body 31 and a leveling valve 32 adjacent to the isolator body 31. In other embodiments, the number of air-bearing vibration isolators 3 is not limited to four; it can also be three, five, or other numbers. Preferably, they are evenly distributed below the displacement platform 1 to provide stable support.
[0042] In this embodiment, the air-floating vibration isolation platform includes multiple air-floating vibration isolators 3 evenly distributed around the frame 2 at various support positions, collectively supporting the displacement platform 1. Each air-floating vibration isolator 3 is connected to the same air supply source via an independent controllable valve 6. This arrangement allows the system to independently control the air pressure of each air-floating vibration isolator 3 according to actual needs. When a certain area of the displacement platform 1 sinks due to load changes, the leveling valve 32 of the corresponding air-floating vibration isolator 3 will be subjected to greater compressive force. This mechanical action will cause the leveling valve 32 to supply more gas to the vibration isolator body 31, thereby increasing the internal air pressure of the vibration isolator body 31 in that area and quickly lifting the sunken platform area. Through the coordinated work of multiple air-floating vibration isolators 3, it can be ensured that the displacement platform 1 always maintains a high-precision level.
[0043] Please refer to it again. Figure 1 , Figure 2 and Figure 4 As shown, this application also provides a wafer testing machine, which includes a testing device 5, a conveying device (not shown), and an air-bearing vibration isolation platform as described above. The conveying device is used to convey the wafer to the air-bearing vibration isolation platform, and the testing device 5 is used to test the wafer placed on the air-bearing vibration isolation platform. In one embodiment, the testing device 5 is an AOI optical inspection instrument.
[0044] To more clearly illustrate the implementation of this utility model, the following description is provided in conjunction with specific operating steps. When initially adjusting the height of the leveling valve 32, first loosen the locking nut 323 to release the fixing of the adjusting component 322; then rotate the adjusting component 322, causing relative movement between the upper and lower sections of the columnar body 321 via threaded transmission, thereby adjusting the height of the leveling valve 32; once the ideal height is reached, tighten the locking nut 323 to fix the position of the adjusting component 322; repeat the above method to complete the initial adjustment of the other leveling valves 32. During use, when a certain area of the displacement platform 1 sinks due to load changes, the leveling valve 32 of the corresponding air-floating vibration isolator 3 experiences greater compressive force. This mechanical action causes the leveling valve 32 to supply more gas to the vibration isolator body 31, thereby increasing the internal air pressure of the vibration isolator body 31 in that area and quickly lifting the sunken platform area. When the leveling valve 32 is not compressed, it will close the internal vent valve, making the chamber of the vibration isolator body 31 smaller and the height of the corresponding displacement platform 1 area lower. Therefore, through the coordinated work of multiple air-bearing vibration isolators 3, even if the center of gravity changes, rapid inflation and deflation can ensure that the displacement platform 1 always maintains a high-precision level.
[0045] As described above in the specific embodiments, the air-floating vibration isolation platform provided in this application includes an air-floating vibration isolator 3. The air-floating vibration isolator includes a fluidly connected isolator body 31 and a leveling valve 32. The isolator body 31 and the leveling valve 32 are arranged adjacent to each other, achieving both vibration isolation of the displacement platform 1 and rapid automatic leveling. It features a compact structure, rapid response, and higher reliability, effectively solving the problems of leveling lag and system complexity in traditional technologies. The air-floating vibration isolation platform and wafer testing machine with it provided in this application eliminate the air path delay problem of traditional independent leveling modules by directly integrating the leveling function into the air-floating vibration isolator 3; the adjustable design of the leveling valve 32 enables precise control of the platform's levelness; the optimized design of the wear-resistant component 33 and its mounting structure greatly simplifies the maintenance process; and the collaborative control system of multiple air-floating vibration isolators 3 ensures the overall stability of the platform. These technical advantages make this application solution particularly suitable for applications with extremely high requirements for platform stability and levelness, such as semiconductor testing and precision machining.
[0046] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.
[0047] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the scope of protection of this application. Therefore, the patent protection scope of this application should be determined by the appended claims.
Claims
1. An air floating vibration isolation platform, comprising a displacement platform (1), a frame (2) supporting the displacement platform (1), and an air floating vibration isolator (3) arranged between the frame (2) and the displacement platform (1), characterized in that, The air-floating vibration isolator (3) includes a vibration isolator body (31) and a leveling valve (32) near the side of the vibration isolator body (31). The two ends of the vibration isolator body (31) are respectively connected to the frame (2) and the displacement platform (1). The leveling valve (32) has a fixing part (3211) and an abutment (3212) located at its two ends respectively. The fixing part (3211) is fixedly connected to one of the frame (2) and the displacement platform (1), and the abutment (3212) abuts against the other of the frame (2) and the displacement platform (1). The vibration isolator body (31) is in fluid communication with the leveling valve (32), and the leveling valve (32) can replenish fluid to the vibration isolator body (31) under the compression of the displacement platform (1).
2. The air floatation vibration isolation platform of claim 1, wherein, The air-floating vibration isolation platform includes a wear-resistant component (33) disposed on the frame (2), the fixing part (3211) is fixedly connected to the displacement platform (1), and the abutting top (3212) abuts against the wear-resistant component (33).
3. The air-floating vibration isolation platform as described in claim 2, characterized in that, The air-floating vibration isolation platform includes a mounting base (4) connected to the frame (2). The mounting base (4) includes a main body mounting base (41) for mounting the vibration isolator body (31) and a wear-resistant part mounting base (42) for mounting the wear-resistant part (33). The wear-resistant part (33) is assembled to the frame (2) via the wear-resistant part mounting base (42) and is located below the top (3212).
4. The air-floating vibration isolation platform as described in claim 3, characterized in that, The wear-resistant component mounting base (42) is detachably mounted on the main body mounting base (41).
5. The air-floating vibration isolation platform as described in claim 4, characterized in that, The wear-resistant part mounting base (42) is mounted on the side of the main body mounting base (41), and there is a disassembly space between the lower part of the wear-resistant part mounting base (42) and the frame (2) to facilitate the disassembly and assembly of the wear-resistant part (33) from the lower part of the leveling valve (32) without removing the leveling valve (32).
6. The air-floating vibration isolation platform as described in claim 1, characterized in that, The leveling valve (32) includes a columnar body (321), the fixing part (3211) is a mounting plate disposed at the top of the columnar body (321), and the abutment (3212) is a crimp connector formed at the bottom of the columnar body (321).
7. The air-floating vibration isolation platform as described in claim 6, characterized in that, The columnar body (321) includes an upper section and a lower section that can move up and down relative to each other, and an adjusting member (322) sleeved on the outside of the upper section or the lower section. The adjusting member (322) drives the upper section and the lower section to move relative to each other to adjust the length of the columnar body (321).
8. The air-floating vibration isolation platform as described in claim 7, characterized in that, The leveling valve (32) also includes a locking nut (323) sleeved on the columnar body (321) to restrict the movement of the adjusting member (322).
9. The air-bearing vibration isolation platform as described in any one of claims 1 to 8, characterized in that, The air-floating vibration isolators (3) are multiple and are respectively set in various support positions around the frame (2). The multiple air-floating vibration isolators (3) are respectively connected to the same air supply source through controllable valves (6).
10. A wafer testing machine, characterized in that, The device includes a detection device (5), a conveying device, and an air-floating vibration isolation platform as described in any one of claims 1 to 9, wherein the conveying device is used to convey the wafer to the air-floating vibration isolation platform, and the detection device (5) is used to detect the wafer placed on the air-floating vibration isolation platform.