Sealing structure of photovoltaic device reaction chamber and photovoltaic dry method device

Abstract

The utility model discloses a kind of sealing structure of photovoltaic equipment reaction chamber, reaction chamber includes inner cavity, outer cavity, furnace mouth sealing plate, first furnace tail sealing plate and furnace door, inner cavity is located inside outer cavity, furnace mouth sealing plate is located at one end of outer cavity and furnace mouth sealing plate closes the area between inner cavity and outer cavity, first sealing member is equipped between furnace mouth sealing plate and outer cavity, second sealing member is equipped between furnace mouth sealing plate and inner cavity, first furnace tail sealing plate is located at the other end of outer cavity and first furnace tail sealing plate closes the other end of outer cavity, third sealing member is equipped between first furnace tail sealing plate and outer cavity, the inside of inner cavity is inner chamber, inner cavity, outer cavity, furnace mouth sealing plate, first furnace tail sealing plate form outer chamber.The utility model is by being arranged between furnace mouth sealing plate and outer cavity first sealing member, second sealing member is arranged between furnace mouth sealing plate and inner cavity and third sealing member is arranged between first furnace tail sealing plate and outer cavity, effectively improve the sealing effect of reaction chamber.

Description

Technical Field

[0001] This utility model belongs to the technical field of photovoltaic cell manufacturing equipment, and particularly relates to a sealing structure for a photovoltaic equipment reaction chamber and a photovoltaic dry process equipment. Background Technology

[0002] Solar energy has become the cleanest, most economical, and safest energy source, with the advantage of being inexhaustible. Therefore, it has received widespread attention from countries around the world.

[0003] Among various photovoltaic cell manufacturing equipment, tubular equipment accounts for a large proportion and is extremely crucial, including equipment for diffusion, PECVD, ALD, oxidation, annealing, and LPCVD. The reaction chamber, as the reaction area for process gases, is the soul of the tubular equipment, playing a vital role in improving quality and production efficiency, and reducing manufacturing costs. Currently, the vast majority of tubular equipment reaction chambers are single-chamber structures, with a smaller number having dual-chamber structures. However, with the rapid development of the industry, the limitations of single-chamber structures in terms of wafer loading capacity and high production costs are becoming increasingly apparent. It is expected that the application of dual-chamber structures will increase significantly in the future.

[0004] In simple terms, a dual-cavity structure consists of two cavities: an inner cavity and an outer cavity. The interior of the inner cavity is called the inner chamber, which is the reaction zone for the process gas. The area between the inner and outer cavities is called the outer chamber, which, although an auxiliary area, also has a significant impact on process quality.

[0005] The dual-chamber structure is currently mostly used in ALD equipment, where the process temperature is below 400℃. Therefore, the current structure is relatively simple. A reference can be made to the structure disclosed in Chinese invention patent application number 202110834251.X, entitled "A Vacuum Suspension Coating Equipment." However, this structure has not been used in more tubular equipment mainly due to the following problems: 1. The inner cavity is made of stainless steel, usually 304 stainless steel. Most processes require temperatures above 400℃. When the process temperature exceeds 400℃, the performance of 304 stainless steel gradually deteriorates with increasing temperature, increasing the risk and potentially rendering it unusable. 2. Using other high-temperature resistant materials generally results in lower machinability than stainless steel, making it difficult to ensure the sealing performance of the current structure, significantly increasing the difficulty of creating a sealing structure. 3. At higher process temperatures, the current heater is also unsuitable, requiring a change to other methods with higher heating capacity, such as graphite heaters. Currently, on the furnace opening side, when the furnace door is open, the outer chamber and the external environment are not sealed. Oxygen entering the outer chamber can trigger a heater reaction, reducing its lifespan.

[0006] As is widely known in the industry, good sealing is an essential key performance requirement for photovoltaic tube equipment. The aforementioned problems with the current dual-cavity structure are all related to and worsen the sealing performance. Summary of the Invention

[0007] The purpose of this invention is to provide a sealing structure for the reaction chamber of a photovoltaic device and a photovoltaic dry process device, so as to solve the problem of poor sealing effect of the reaction chamber of existing photovoltaic devices.

[0008] To achieve the above objectives, this utility model provides a sealing structure for a photovoltaic equipment reaction chamber. The reaction chamber includes an inner cavity, an outer cavity, a furnace opening sealing plate, a first furnace tail sealing plate, and a furnace door. The inner cavity is located inside the outer cavity. The furnace opening sealing plate is located at one end of the outer cavity and closes the area between the inner cavity and the outer cavity. A first sealing element is provided between the furnace opening sealing plate and the outer cavity. A second sealing element is provided between the furnace opening sealing plate and the inner cavity. The first furnace tail sealing plate is located at the other end of the outer cavity and closes the other end of the outer cavity. A third sealing element is provided between the first furnace tail sealing plate and the outer cavity. The interior of the inner cavity is an inner chamber, and the inner cavity, the outer cavity, the furnace opening sealing plate, and the first furnace tail sealing plate form an outer chamber.

[0009] Preferably, a first flange is provided on the outer peripheral wall of the end of the outer cavity that is connected to the furnace mouth sealing plate, the first flange is fastened to the furnace mouth sealing plate and the first sealing element is provided between the first flange and the furnace mouth sealing plate, and a second flange is provided on the outer peripheral wall of the end of the outer cavity that is connected to the first furnace tail sealing plate, the second flange is fastened to the first furnace tail sealing plate and the third sealing element is provided between the second flange and the first furnace tail sealing plate.

[0010] Preferably, a boss is provided on the outer peripheral wall of the end of the inner cavity that is connected to the furnace opening sealing plate. A pressure plate is provided on the side of the boss facing the furnace door. The furnace opening sealing plate is annular. The inner surface of the furnace opening sealing plate is recessed inward corresponding to the boss so that the boss is embedded in the first recess. The inner surface of the furnace opening sealing plate is also recessed inward corresponding to the pressure plate so that one end of the pressure plate is embedded in the second recess. The pressure plate connects the furnace opening sealing plate and the boss. A second sealing element is provided between the boss and the furnace opening sealing plate.

[0011] Preferably, the system further includes a second furnace tail sealing plate and an elastic clamping member. One end of the inner cavity is closed by the furnace door, and the other end of the inner cavity abuts against the second furnace tail sealing plate to close the other end of the inner cavity. One end of the elastic clamping member is connected to the second furnace tail sealing plate, and the other end of the elastic clamping member is connected to the first furnace tail sealing plate to press the second furnace tail sealing plate against the other end of the inner cavity.

[0012] Preferably, the second furnace tail sealing plate is provided with a first heat insulation bag extending into the inner cavity, the first heat insulation bag being embedded in the inner cavity, and a second heat insulation bag is also provided on the inner side of the furnace door, the second heat insulation bag extending into the inner cavity.

[0013] Preferably, the system further includes an intake pipe, an exhaust pipe, a first elastic pipe, and a second elastic pipe. Both the intake pipe and the exhaust pipe pass through the first and second furnace tail sealing plates and extend into the inner cavity. The intake pipe includes a first section located between the first and second furnace tail sealing plates, which passes through the first elastic pipe. One end of the first elastic pipe is sealed to the first furnace tail sealing plate via a fourth sealing element, and the other end is sealed to the second furnace tail sealing plate via a fifth sealing element. The exhaust pipe includes a second section located between the first and second furnace tail sealing plates, which passes through the second elastic pipe. One end of the second elastic pipe is sealed to the first furnace tail sealing plate via a sixth sealing element, and the other end is sealed to the second furnace tail sealing plate via a seventh sealing element.

[0014] Preferably, the first furnace tail sealing plate has a first hole corresponding to the air inlet pipe. A first inner flange and a first outer flange are also provided on the outer side of the first furnace tail sealing plate corresponding to the first hole. The first inner flange is connected to the first furnace tail sealing plate, and the first outer flange is connected to the first inner flange. An eighth sealing element is provided between the first outer flange and the first inner flange. The air inlet pipe passes through the first outer flange, the first inner flange, and the first hole. The first furnace tail sealing plate has a second hole corresponding to the exhaust pipe. A second inner flange and a second outer flange are also provided on the first furnace tail sealing plate corresponding to the second hole. The second inner flange is connected to the first furnace tail sealing plate, and the second outer flange is connected to the second inner flange. A ninth sealing element is provided between the second outer flange and the second inner flange. The exhaust pipe passes through the second outer flange, the second inner flange, and the second hole.

[0015] Preferably, the intake pipe is provided with a first check valve on the pipe located outside the outer cavity; the exhaust pipe is also connected to a vacuum device at one end located outside the outer cavity, and a second check valve is provided on the exhaust pipe located outside the outer cavity.

[0016] Preferably, a tenth sealing element is provided between the furnace door and the furnace opening sealing plate to ensure a sealed connection between the furnace door and the furnace opening sealing plate when the furnace door is closed.

[0017] This utility model also provides a photovoltaic dry process equipment, including the sealing structure of the reaction chamber of the photovoltaic equipment described above.

[0018] Compared with the prior art, this utility model effectively improves the sealing effect of the photovoltaic equipment reaction chamber by setting a first sealing element between the furnace mouth sealing plate and the outer cavity, a second sealing element between the furnace mouth sealing plate and the inner cavity, and a third sealing element between the first furnace tail sealing plate and the outer cavity. Attached Figure Description

[0019] Figure 1 This is a structural diagram of the sealing structure of the reaction chamber of the photovoltaic equipment according to an embodiment of this utility model.

[0020] Figure 2 for Figure 1 Enlarged view of point A in the middle.

[0021] Figure 3 for Figure 1 Enlarged view of point B in the middle.

[0022] Figure 4 This is a schematic diagram of the connection structure between the air inlet pipe and the first inner flange and the first outer flange in the sealing structure of the photovoltaic equipment reaction chamber of this embodiment of the present invention.

[0023] Explanation of reference numerals in the attached diagram:

[0024] 1. Inner cavity; 11. Boss; 12. Connecting ring; 2. Outer cavity; 21. First flange; 22. Second flange; 3. Furnace opening sealing plate; 31. First recess; 32. Second recess; 4. First furnace tail sealing plate; 41. First hole; 5. Furnace door; 51. Second insulation bag; 61. First sealing element; 62. Second sealing element; 63. Third sealing element; 64. Fourth sealing element; 65. Fifth sealing element; 66. Eighth sealing element; 67. Tenth sealing element; 7. Pressure plate; 8. Second furnace tail sealing plate; 81. First insulation bag; 9. Elastic clamping element; 10. Air inlet pipe; 13. Exhaust pipe; 14. Thermocouple; 15. First inner flange; 16. First outer flange; 17. First check valve; 18. First elastic tube; 100. Inner chamber; 200. Outer chamber. Detailed Implementation

[0025] To explain in detail the technical content, structural features, and effects of this utility model, the following description is provided in conjunction with the embodiments and accompanying drawings.

[0026] like Figures 1 to 4As shown, this utility model embodiment provides a sealing structure for a photovoltaic equipment reaction chamber. The reaction chamber includes an inner cavity 1, an outer cavity 2, a furnace opening sealing plate 3, a first furnace tail sealing plate 4, and a furnace door 5. The inner cavity 1 is located inside the outer cavity 2. The furnace opening sealing plate 3 is located at one end of the outer cavity 2 and closes the area between the inner cavity 1 and the outer cavity 2. A first sealing element 61 is provided between the furnace opening sealing plate 3 and the outer cavity 2. A second sealing element 62 is provided between the furnace opening sealing plate 3 and the inner cavity 1. The first furnace tail sealing plate 4 is located at the other end of the outer cavity 2 and closes the other end of the outer cavity 2. A third sealing element 63 is provided between the first furnace tail sealing plate 4 and the outer cavity 2. The interior of the inner cavity 1 is an inner chamber 100. The inner cavity 1, the outer cavity 2, the furnace opening sealing plate 3, and the first furnace tail sealing plate 4 form an outer chamber 200. Specifically, the first sealing element 61, the second sealing element 62, and the third sealing element 63 can be sealing rings. In some other specific embodiments, the first sealing element 61, the second sealing element 62, and the third sealing element 63 can also be other sealing structures, which can be selected according to actual needs. In addition, the furnace door 5 is only used to open / close the inner cavity 100, effectively ensuring the sealing of the outer cavity 200 and effectively protecting the heater inside the outer cavity 200.

[0027] This invention effectively improves the sealing effect of the photovoltaic equipment reaction chamber by setting a first sealing element 61 between the furnace opening sealing plate 3 and the outer cavity 2, setting a second sealing element 62 between the furnace opening sealing plate 3 and the inner cavity 1, and setting a third sealing element 63 between the first furnace tail sealing plate 4 and the outer cavity 2.

[0028] In this embodiment of the utility model, such as Figure 1 as well as Figure 3As shown, a first flange 21 is provided on the outer peripheral wall of the end where the outer cavity 2 is connected to the furnace mouth sealing plate 3. The first flange 21 is fastened to the furnace mouth sealing plate 3 and a first sealing element 61 is provided between the first flange 21 and the furnace mouth sealing plate 3. A second flange 22 is provided on the outer peripheral wall of the end where the outer cavity 2 is connected to the first furnace tail sealing plate 4. The second flange 22 is fastened to the first furnace tail sealing plate 4 and a third sealing element 63 is provided between the second flange 22 and the first furnace tail sealing plate 4. Specifically, the first flange 21 and the furnace mouth sealing plate 3 can be fastened together with bolts, and the second flange 22 and the first furnace tail sealing plate 4 can be fastened together with bolts. When the first sealing element 61 and the third sealing element 63 are sealing rings, the mounting position of the first sealing element 61 is set on the side of the first flange 21 facing the furnace mouth sealing plate 3 so that the first sealing element 61 is embedded in the first flange 21, and the mounting position of the third sealing element 63 is set on the side of the second flange 22 facing the first furnace tail sealing plate 4 so that the third sealing element 63 is embedded in the first flange 21. By setting the first flange 21 and the second flange 22 on the outer peripheral wall of the outer cavity 2, the installation is convenient and the sealing connection between the first flange 21 and the furnace mouth sealing plate 3 and the second flange 22 and the first furnace tail sealing plate 4 is facilitated.

[0029] In this embodiment of the utility model, such as Figures 1 to 2 As shown, a boss 11 is provided on the outer peripheral wall of the end of the inner cavity 1 that is connected to the furnace opening sealing plate 3. A pressure plate 7 is provided on the side of the boss 11 facing the furnace door 5. The furnace opening sealing plate 3 is annular. The inner surface of the furnace opening sealing plate 3 is recessed inward to the boss 11 so that the boss 11 is embedded in the first recess 31. The inner surface of the furnace opening sealing plate 3 is also recessed inward to the pressure plate 7 so that one end of the pressure plate 7 is embedded in the second recess 32. The pressure plate 7 connects the furnace opening sealing plate 3 and the boss 11. A second sealing element 62 is provided between the boss 11 and the furnace opening sealing plate 3. Specifically, the pressure plate 7 can be ring-shaped. The pressure plate 7 is fastened to the furnace opening sealing plate 3 by bolts or the like to press the pressure plate 7 onto the furnace opening sealing plate 3 and the inner cavity 1, ensuring that the furnace opening sealing plate 3 and the inner cavity 1 can be tightly connected, and ensuring the sealing between the inner cavity 1 and the outer cavity 2. In addition, a second sealing element 62 is provided between the boss 11 and the furnace opening sealing plate 3. The second sealing element 62 can be a sealing ring, which further ensures the sealing between the inner cavity 1 and the outer cavity 2.

[0030] In this embodiment of the utility model, such as Figure 1 and Figure 3As shown, the sealing structure of the photovoltaic equipment reaction chamber also includes a second furnace tail sealing plate 8 and an elastic pressing member 9. One end of the inner cavity 1 is closed by the furnace door 5, and the other end of the inner cavity 1 abuts against the second furnace tail sealing plate 8 to close the other end of the inner cavity 1. One end of the elastic pressing member 9 is connected to the second furnace tail sealing plate 8, and the other end of the elastic pressing member 9 is connected to the first furnace tail sealing plate 4 to press the second furnace tail sealing plate 8 against the other end of the inner cavity 1. Specifically, the temperature of the inner cavity 100 is relatively high. As the temperature changes, the length of the inner cavity 1 will increase or decrease accordingly. Therefore, an elastic clamping member 9 is provided between the first furnace tail sealing plate 4 and the second furnace tail sealing plate 8 so that the second furnace tail sealing plate 8 can also be pressed against the inner cavity 1 when the length of the inner cavity 1 changes, so as to ensure that the inner cavity 1 has good sealing performance. For example, there can be two symmetrically distributed elastic clamping members 9. Specifically, the elastic clamping member 9 can be a spring or a bellows. In addition, a connecting protrusion ring 12 is provided on the outer side wall of the inner cavity 1 corresponding to the second furnace tail sealing plate 8. A sealing ring is provided between the connecting protrusion ring 12 and the second furnace tail sealing plate 8 to ensure the sealing performance of the inner cavity 1.

[0031] In this embodiment of the utility model, such as Figure 1 and Figure 3 As shown, the second furnace tail sealing plate 8 is provided with a first heat insulation package 81 extending into the inner cavity 1, and the first heat insulation package 81 is embedded in the inner cavity 1. Specifically, because sealing components and metal structural components are arranged near the first furnace tail sealing plate 4, the heat in the inner cavity 100 is high, which may damage these components. In order to reduce the heat conduction to the first furnace tail sealing plate 4, a first heat insulation package 81 is provided on the second furnace tail sealing plate 8. The first heat insulation package 81 is composed of one or more heat insulation materials. Common heat insulation materials include nano-boards, stainless steel, ceramic fiber boards, cured carbon felt, graphite felt, ceramics, etc.

[0032] In this embodiment of the utility model, such as Figure 1 and Figure 3As shown, the sealing structure of the photovoltaic equipment reaction chamber also includes an inlet pipe 10, an exhaust pipe 13, a first elastic pipe 18, and a second elastic pipe. The inlet pipe 10 and the exhaust pipe 13 are both installed on the first furnace tail sealing plate 4 and the second furnace tail sealing plate 8 and extend into the inner cavity 1. The inlet pipe 10 includes a first section located between the first furnace tail sealing plate 4 and the second furnace tail sealing plate 8. The first section is installed in the first elastic pipe 18. One end of the first elastic pipe 18 is sealed to the first furnace tail sealing plate 4 through a fourth sealing element 64, and the other end of the first elastic pipe 18 is sealed to the second furnace tail sealing plate 8 through a fifth sealing element 65. The exhaust pipe 13 includes a second section located between the first furnace tail sealing plate 4 and the second furnace tail sealing plate 8. The second section is installed in the second elastic pipe. One end of the second elastic pipe is sealed to the first furnace tail sealing plate 4 through a sixth sealing element, and the other end of the second elastic pipe is sealed to the second furnace tail sealing plate 8 through a seventh sealing element. Specifically, an exhaust pipe 13 and an intake pipe 10 are arranged on the first furnace tail sealing plate 4. If an effective sealing method is not adopted, gas leakage will occur between the inner chamber 100 and the outer chamber 200, which will have an adverse effect on the process. Therefore, the holes of the first furnace tail sealing plate 4 and the second furnace tail sealing plate 8 corresponding to the exhaust pipe 13 and the intake pipe 10 are connected by a first elastic tube 18 and a second elastic tube. A fourth sealing element 64 and a fifth sealing element 65 are used to seal the first elastic tube 18 with the first furnace tail sealing plate 4 and the second furnace tail sealing plate 8. A sixth sealing element and a seventh sealing element are used to seal the second elastic tube with the first furnace tail sealing plate 4 and the second furnace tail sealing plate 8 to ensure that the inner and outer cavities 2 are isolated and sealed. The first elastic tube 18 and the second elastic tube can be corrugated pipes, and the fourth sealing element 64, the fifth sealing element 65, the sixth sealing element and the seventh sealing element can be sealing rings. In addition, a thermocouple 14 for detection is also provided on the first furnace tail sealing plate 4. Similarly, a corrugated pipe can be fitted on the part of the thermocouple 14 located between the first furnace tail sealing plate 4 and the second furnace tail sealing plate 8 and sealed between the first furnace tail sealing plate 4 and the second furnace tail sealing plate 8.

[0033] In this embodiment of the utility model, such as Figure 1 and Figure 4As shown, a first hole 41 is provided on the first furnace tail sealing plate 4 corresponding to the air inlet pipe 10. A first inner flange 15 and a first outer flange 16 are also provided on the outer side of the first furnace tail sealing plate 4 corresponding to the first hole 41. The first inner flange 15 is connected to the first furnace tail sealing plate 4, and the first outer flange 16 is connected to the first inner flange 15. An eighth sealing element 66 is provided between the first outer flange 16 and the first inner flange 15. The air inlet pipe 10 passes through the first outer flange 16, the first inner flange 15, and the first hole 41. A second hole is provided on the first furnace tail sealing plate 4 corresponding to the exhaust pipe 13. A second inner flange and a second outer flange are also provided on the first furnace tail sealing plate 4 corresponding to the second hole. The second inner flange is connected to the first furnace tail sealing plate 4, and the second outer flange is connected to the second inner flange. A ninth sealing element is provided between the second outer flange and the second inner flange. The exhaust pipe 13 passes through the second outer flange, the second inner flange, and the second hole. Specifically, some holes are usually made on the first furnace tail sealing plate 4 for arranging the air inlet pipe 10, the exhaust pipe 13, and the thermocouple 14, etc. If these holes are not sealed effectively, gas leakage will occur between the outer chamber 200 and the external environment, which will have an adverse effect on the process. Therefore, by setting a first inner flange 15, a first outer flange 16, a second inner flange, and a second outer flange, and setting an eighth sealing element 66 between the first inner flange 15 and the first outer flange 16 and a ninth sealing element between the second inner flange and the second outer flange, the air inlet pipe 10 passes through the first outer flange 16 and the first inner flange 15 and extends into the inner chamber 100, and the exhaust pipe 13 passes through the second outer flange and the second inner flange and extends into the inner chamber 100. The first outer flange 16 and the second outer flange are preferably made of stainless steel, which facilitates sealing by welding, snap-fitting, or other methods. In addition, a third hole is provided on the first furnace tail sealing plate 4 corresponding to the thermocouple 14. A third inner flange and a third outer flange are also provided on the outer side of the first furnace tail sealing plate 4 corresponding to the third hole. The third inner flange is connected to the first furnace tail sealing plate 4, and the third outer flange is connected to the third inner flange and the third outer flange is sealed to the third inner flange. The thermocouple 14 passes through the third outer flange and the third inner flange and extends into the inner cavity 100 and / or the outer cavity 200. The third outer flange is preferably made of stainless steel, which facilitates sealing by welding, snap-fitting or other methods.

[0034] In this embodiment of the utility model, such as Figure 1 As shown, the intake pipe 10 is equipped with a first check valve 17 on the pipe outside the outer cavity 2; the exhaust pipe 13 is also connected to a vacuum device at one end outside the outer cavity 2, and a second check valve is installed on the exhaust pipe 13 on the pipe outside the outer cavity 2. In this embodiment of the present invention, the exhaust pipe 13 is sealed by an external vacuum pump and a second check valve, and the intake pipe 10 is sealed by an external first check valve 17. The types of the first check valve 17 and the second check valve can be pneumatic valves, diaphragm valves, electric valves, etc., and are not limited here.

[0035] In this embodiment of the utility model, such as Figures 1 to 2 As shown, a tenth sealing element 67 is provided between the furnace door 5 and the furnace opening sealing plate 3 to ensure a sealed connection between the furnace door 5 and the furnace opening sealing plate 3 when closed. Specifically, the furnace door 5 is slew-openable and connectable to the furnace opening sealing plate 3 to open and close the inner cavity 100. The tenth sealing element 67 can be a sealing ring, which is embedded in the furnace opening sealing plate 3 to ensure a sealed connection between the furnace door 5 and the furnace opening sealing plate 3 when closed, thus ensuring the airtightness of the inner cavity 100. In addition, a second heat insulation package 51 is also provided on the inner side of the furnace door 5. The second heat insulation package 51 extends into the inner cavity 1, thereby preventing heat from escaping from the inner cavity 1.

[0036] It should be noted that the sealing ring in this embodiment can be made of rubber, graphite, polytetrafluoroethylene, or metal. Based on the excellent comprehensive performance and moderate price of fluororubber, fluororubber is preferred for sealing rings.

[0037] This utility model embodiment also provides a photovoltaic dry process equipment, including the sealing structure of the photovoltaic equipment reaction chamber described above. This utility model embodiment ensures the sealing of the inner chamber 100 and the outer chamber 200 with the external environment through the double-chamber sealing structure, and also ensures the sealing between the inner chamber 100 and the outer chamber 200, thereby ensuring stable and good vacuum process conditions.

[0038] The above-disclosed examples are merely preferred embodiments of the present utility model and should not be construed as limiting the scope of the present utility model. Therefore, any equivalent changes made in accordance with the scope of the present utility model application shall still fall within the scope of the present utility model.

Claims

1. A seal structure for a photovoltaic device reaction chamber, characterized by, The reaction chamber includes an inner cavity, an outer cavity, a furnace opening sealing plate, a first furnace tail sealing plate, and a furnace door. The inner cavity is located inside the outer cavity. The furnace opening sealing plate is located at one end of the outer cavity and closes the area between the inner cavity and the outer cavity. A first sealing element is provided between the furnace opening sealing plate and the outer cavity. A second sealing element is provided between the furnace opening sealing plate and the inner cavity. The first furnace tail sealing plate is located at the other end of the outer cavity and closes the other end of the outer cavity. A third sealing element is provided between the first furnace tail sealing plate and the outer cavity. The interior of the inner cavity is the inner chamber, and the inner cavity, the outer cavity, the furnace opening sealing plate, and the first furnace tail sealing plate form the outer chamber.

2. The seal structure for a photovoltaic device reaction chamber according to claim 1, wherein A first flange is provided on the outer peripheral wall of the end of the outer cavity that is connected to the furnace mouth sealing plate. The first flange is fastened to the furnace mouth sealing plate and a first sealing element is provided between the first flange and the furnace mouth sealing plate. A second flange is provided on the outer peripheral wall of the end of the outer cavity that is connected to the first furnace tail sealing plate. The second flange is fastened to the first furnace tail sealing plate and a third sealing element is provided between the second flange and the first furnace tail sealing plate.

3. The seal structure for a photovoltaic device reaction chamber as claimed in claim 1, wherein A boss is provided on the outer peripheral wall of the end of the inner cavity that is connected to the furnace opening sealing plate. A pressure plate is provided on the side of the boss facing the furnace door. The furnace opening sealing plate is annular. The inner surface of the furnace opening sealing plate is recessed inward corresponding to the boss so that the boss is embedded in the first recess. The inner surface of the furnace opening sealing plate is also recessed inward corresponding to the pressure plate so that one end of the pressure plate is embedded in the second recess. The pressure plate connects the furnace opening sealing plate and the boss. A second sealing element is provided between the boss and the furnace opening sealing plate.

4. The seal structure for a photovoltaic device reaction chamber as recited in claim 1, wherein, It also includes a second furnace tail sealing plate and an elastic clamping member. One end of the inner cavity is closed by the furnace door, and the other end of the inner cavity abuts against the second furnace tail sealing plate to close the other end of the inner cavity. One end of the elastic clamping member is connected to the second furnace tail sealing plate, and the other end of the elastic clamping member is connected to the first furnace tail sealing plate to press the second furnace tail sealing plate against the other end of the inner cavity.

5. The seal for a photovoltaic device reaction chamber of claim 4, wherein, The second furnace tail sealing plate is provided with a first heat insulation bag extending into the inner cavity. The first heat insulation bag is embedded in the inner cavity. A second heat insulation bag is also provided on the inner side of the furnace door, and the second heat insulation bag extends into the inner cavity.

6. The seal structure for a photovoltaic device reaction chamber as recited in claim 4, wherein, It also includes an intake pipe, an exhaust pipe, a first elastic pipe, and a second elastic pipe. The intake pipe and the exhaust pipe are both installed through the first furnace tail sealing plate and the second furnace tail sealing plate and extend into the inner cavity. The intake pipe includes a first section located between the first furnace tail sealing plate and the second furnace tail sealing plate. The first section is installed in the first elastic pipe. One end of the first elastic pipe is sealed to the first furnace tail sealing plate by a fourth sealing element, and the other end of the first elastic pipe is sealed to the second furnace tail sealing plate by a fifth sealing element. The exhaust pipe includes a second section located between the first furnace tail sealing plate and the second furnace tail sealing plate. The second section is installed in the second elastic pipe. One end of the second elastic pipe is sealed to the first furnace tail sealing plate by a sixth sealing element, and the other end of the second elastic pipe is sealed to the second furnace tail sealing plate by a seventh sealing element.

7. The seal structure for a photovoltaic device reaction chamber as claimed in claim 6, wherein The first furnace tail sealing plate has a first hole corresponding to the air inlet pipe. On the outer side of the first furnace tail sealing plate, corresponding to the first hole, there is also a first inner flange and a first outer flange. The first inner flange is connected to the first furnace tail sealing plate. The first outer flange is connected to the first inner flange and an eighth sealing element is provided between the first outer flange and the first inner flange. The air inlet pipe passes through the first outer flange, the first inner flange, and the first hole. The first furnace tail sealing plate has a second hole corresponding to the exhaust pipe. On the first furnace tail sealing plate, corresponding to the second hole, there is also a second inner flange and a second outer flange. The second inner flange is connected to the first furnace tail sealing plate. The second outer flange is connected to the second inner flange and a ninth sealing element is provided between the second outer flange and the second inner flange. The exhaust pipe passes through the second outer flange, the second inner flange, and the second hole.

8. The seal structure for a photovoltaic device reaction chamber as recited in claim 6, wherein, The intake pipe is equipped with a first check valve on the pipe located outside the outer cavity; the exhaust pipe is also connected to a vacuum device at one end located outside the outer cavity, and a second check valve is installed on the exhaust pipe located outside the outer cavity.

9. The seal for a photovoltaic device reaction chamber of claim 1, wherein, A tenth sealing element is provided between the furnace door and the furnace opening sealing plate to ensure a sealed connection between the furnace door and the furnace opening sealing plate when the furnace door is closed.

10. A photovoltaic dry process apparatus, characterized by: The sealing structure includes the photovoltaic device reaction chamber as described in any one of claims 1 to 9.

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